CN116005115A - Scanning type target seat device and pulse laser deposition equipment - Google Patents

Abstract

The invention discloses a scanning target seat device and pulse laser deposition equipment. Wherein, the scanning type target holder device includes: a first transmission unit having a first main body and a hollow mounting cylinder, the first main body is installed on the outside of the coating chamber, and the installation cylinder can rotate relative to the first main body; the second transmission unit , installed to the mounting cylinder, the second transmission unit has a second body and a mounting shaft, the mounting shaft is rotatable relative to the second body, the mounting shaft is provided with an input part and an output part, the input part is on the outside of the mounting cylinder, and the output part is on the Install the inner side of the barrel; the bracket, used to support the target, is installed on the output part and installed in the coating chamber; the first driving part drives the second transmission unit to rotate to make the bracket revolve; the second driving part is connected to the input part , and drive the installation shaft to rotate, so that the bracket installed on the output part of the installation shaft will rotate by itself. The scanning target seat device of the invention can improve the stability of the equipment.

Description

Scanning target device and pulsed laser deposition equipment

technical field

The invention relates to the technical field of vacuum coating equipment, in particular to a scanning target seat device and pulse laser deposition equipment.

Background technique

Pulsed Laser Deposition (PLD) is a means of bombarding objects with laser light, and then depositing the bombarded substances on different substrates to obtain precipitation or thin films. Existing pulsed laser deposition equipment utilizes focused laser light incident on the surface of the target material, thereby sputtering out material and depositing it on the substrate. Since the spot size of the pulsed laser deposition is generally 2-4 mm, the size of the target is generally one inch, so the utilization rate of the target is too low and the scope of application is small.

In order to improve the utilization rate of the target material, the current pulse laser deposition equipment mainly uses gears and bearings to realize the revolution and rotation of the target seat in the cavity, thereby improving the utilization rate of the target material. But this device can exist such as following problems:

1. Due to the heat generated by the laser ablation target during pulsed laser deposition, and the substrate needs to be formed under high temperature conditions, the ambient temperature in the coating chamber will reach 600°C or higher, and high temperature must be used in this high temperature environment. Bearings, high-temperature bearings are expensive, and they are often worn out and damaged, which affects the stability of the equipment.

2. Since pulsed laser deposition requires film formation in an ultra-high vacuum environment, if lubricating grease is used, the grease will volatilize, which will affect the vacuum environment in the coating chamber and affect the quality of film formation. If you do not use lubricating grease, the gears and bearings are easy to get stuck, which will affect the stability of the equipment.

Contents of the invention

The present invention aims to solve the problems of the prior art at least to a certain extent. Therefore, the present invention proposes a scanning target seat device to improve the stability of the equipment. In addition, the present invention also proposes a pulsed laser deposition equipment with the scanning target seat device.

According to one aspect of the present invention, the scanning target holder device is used for revolving and rotating the target in the coating chamber, comprising: a first transmission unit having a first main body and a hollow mounting cylinder, the first main body is installed on The outside of the coating chamber is sealed with the coating chamber, the installation cylinder is rotatable relative to the first body and the installation cylinder and the first body are sealed; the second transmission unit, Installed to the installation cylinder and sealed with the installation cylinder, the second transmission unit has a second main body and an installation shaft, the installation shaft is rotatable relative to the second main body, and the installation shaft and The second main body is sealed, and the two axial ends of the installation shaft are respectively provided with an input part and an output part, the input part is located outside the installation cylinder, and the output part is located at the The inner side of the installation cylinder; the bracket, used to support the target, installed to the output part, and arranged in the coating chamber; the first drive part, one of the installation cylinder and the second main body connected to drive the second transmission unit to rotate so that the bracket revolves with the rotation of the second transmission unit; the second drive part is connected to the input part and drives the installation shaft to rotate to The bracket attached to the output portion of the installation shaft is made to rotate by itself as the installation shaft rotates.

The scanning target holder device according to the first aspect of the present invention has the following beneficial effects: the stability of the equipment can be improved.

In some embodiments, the first body and the installation cylinder are sealed by a magnetic fluid sealing structure; and/or, the second body and the installation shaft are sealed by a magnetic fluid sealing structure. seal.

In some embodiments, one end of the mounting cylinder facing the outside of the coating chamber is provided with a mounting seat, the second transmission unit and the second driving part are respectively mounted to the mounting seat, and are The cylinder rotates relative to the first body.

In some embodiments, a third transmission unit is further included; the first drive part includes a drive motor for revolution, and the drive motor for revolution is connected to the second transmission unit through the third transmission unit.

In some embodiments, the third transmission unit includes: a driving gear for revolution, coaxially connected with the driving motor for revolution; a driven gear for revolution, connected coaxially with the second main body; The driving gear meshes with the driven gear for revolution.

In some embodiments, the second transmission unit includes a plurality of installation shafts, each of the installation shafts is rotatable relative to the second body, and each installation shaft and the second body are respectively connected by seal.

In some embodiments, a fourth transmission unit is further included, and the second driving part is in transmission connection with the input part of each of the input shafts through the fourth transmission unit.

In some embodiments, the second driving part includes a driving motor for rotation; the fourth transmission unit includes a driving gear for rotation and a plurality of driven gears for rotation; the driving gear for rotation and the driving gear for rotation The driving motor is connected coaxially; the driven gears for rotation are respectively connected coaxially with the input parts of the installation shafts; the driving gears for rotation are respectively meshed with the driven gears for rotation.

In some embodiments, the output portion of the installation shaft extends into the coating chamber through the inner side of the installation cylinder.

The pulsed laser deposition equipment according to the second aspect of the invention has a coating chamber, and further includes: any one of the above-mentioned scanning target holder devices.

The pulsed laser deposition equipment according to the second aspect of the present invention has the following beneficial effects: it can improve the stability of the equipment on the basis of maintaining the quality of film formation.

Description of drawings

Figure 1 is a schematic diagram of one embodiment of a pulsed laser deposition apparatus having a scanning target holder device of the present invention.

Fig. 2 is a perspective view of an embodiment of the scanning target device of the present invention.

Fig. 3 is a sectional view at A-A in Fig. 2 .

Fig. 4 is an exploded view of the scanning target device in Fig. 2 .

FIG. 5 is a perspective view of another viewing angle of the scanning target device of FIG. 2 .

Fig. 6 is a perspective view of the first transmission unit in Fig. 5 .

Fig. 7 is a perspective view of the second transmission unit in Fig. 5 .

Detailed ways

Examples of the present embodiment will be described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, and are only for explaining the present embodiment, and should not be construed as limiting the present embodiment.

In the description of this embodiment, it should be understood that the orientation descriptions, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the drawings. It is for the convenience of describing this embodiment and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the embodiment.

In the description of this embodiment, several means one or more, and multiple means two or more. Greater than, less than, exceeding, etc. are understood as not including the original number, and above, below, within, etc. are understood as including the original number. If the description of the first and second is only for the purpose of distinguishing the technical features, it cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features relation.

In the description of this embodiment, unless otherwise clearly defined, words such as setting, installation, and connection should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in this embodiment in combination with the specific content of the technical solution .

Referring to Figures 1 to 7, and mainly referring to Figures 1 to 5, the scanning target device 100 according to the first embodiment (for convenience of description, sometimes only referred to as "target device 100") is used to make the coating chamber The target in 201 has 300 revolutions and rotation. It includes: a first transmission unit 101 , a second transmission unit 102 , a bracket 103 , a first driving part 104 and a second driving part 105 . The first transmission unit 101 has a first main body 106 and a hollow mounting cylinder 107. The first main body 106 is installed to the outside of the coating chamber 201 and is sealed with the coating chamber 201. The mounting cylinder 107 can rotate relative to the first main body 106. And the installation cylinder 107 and the first main body 106 are sealed. The second transmission unit 102 is installed to the installation cylinder 107 and is sealed with the installation cylinder 107 . The second transmission unit 102 has a second main body 108 and an installation shaft 109 , the installation shaft 109 is rotatable relative to the second main body 108 and is sealed between the installation shaft 109 and the second main body 108 . The two axial ends of installation shaft 109 are provided with input part 110 and output part 111 respectively, and input part 110 is in the outside of installation cylinder 107, and output part 111 is in the inside of installation cylinder 107 (that is, the one that communicates with coating chamber 201. side). The bracket 103 is used to support the target 300 . The bracket 103 is installed to the output part 111 and is set in the coating chamber 201 . The first driving part 104 is connected to one of the mounting cylinder 107 and the second main body 108 . The first driving part 104 drives the second transmission unit 102 to rotate, so that the bracket 103 revolves along with the rotation of the second transmission unit 102 . The second driving part 105 is connected with the input part 110 and drives the installation shaft 109 to rotate, so that the bracket 103 installed on the output part 111 of the installation shaft 109 rotates with the rotation of the installation shaft 109 .

According to the target stand device 100 of this embodiment, the stability of the equipment can be improved. Specifically, the first transmission unit 101 is provided with a hollow mounting cylinder 107 that rotates relative to the first body 106 , and the second transmission unit 102 is installed on the installation cylinder 107 of the first transmission unit 101 . It can realize that the second transmission unit 102 can rotate relative to the first main body 106 together with the installation cylinder 107 . Thus, the revolution of the second rotation unit is realized. In addition, by making the second transmission unit 102 have the installation shaft 109 that rotates relative to the second body 108, and installing the bracket 103 for supporting the target 300 on the output portion 111 of the installation shaft 109, the target can be realized. Rotation of material 300.

Thus, by installing the second transmission unit 102 on the first transmission unit 101 , the revolution and rotation of the target 300 can be realized.

In addition, in the target holder device 100 of this embodiment, the sealing between the second transmission unit 102 and the coating chamber 201 can be realized by sealing the installation shaft 109 and the second main body 108 . And by making the input part 110 of the installation shaft 109 be in the outside of the installation cylinder 107, and make the output part 111 be in the inside of the installation cylinder 107, and by the second driving part 105 in the outside of the installation cylinder 107, through the installation shaft 109 The input part 110 is connected with the mounting shaft 109, so that the mounting shaft 109 can be driven on the outside of the mounting cylinder 107 (that is, the outside of the coating chamber 201), and the output part 111 of the mounting shaft 109 on the inside of the mounting cylinder 107 can be rotated together. . Therefore, even if other intermediate structures (such as transmission structures) need to be provided, they do not need to be installed in the coating chamber 201 , but can be added outside the coating chamber 201 . And even if it is necessary to use such as bearings, lubricating oil, grease, etc., it does not need to be installed in the coating chamber 201, but only needs to be added outside the coating chamber 201, such as at the input part 110 of the installation shaft 109, so that it will not be caused by The addition of an additional intermediate structure affects the film formation in the coating chamber 201 , can maintain the stability of the film formation in the coating chamber 201 , and can improve the stability of the equipment.

Furthermore, since the second transmission unit 102 is installed on the mounting cylinder 107 of the first transmission unit 101 as a whole, the mutual interaction between the revolution of the target 300 through the first transmission unit 101 and the rotation through the second transmission unit 102 can be realized. independent. That is, the revolution of the first transmission unit 101 will not affect the autorotation of the second transmission unit 102, thus, the stability of the equipment can be further improved.

Continuing to refer to FIG. 1 , the target holder device 100 of this embodiment is used, for example, in pulsed laser deposition equipment (PLD equipment 200 ). The PLD device 100 has a housing 202 in which a coating chamber 201 is formed. The housing 202 is, for example, substantially cylindrical or spherical. The casing 202 can be made of known materials such as No. 304 stainless steel, and formed by argon arc welding, for example. In addition, the surface of the housing 202 can be treated by spraying glass shot and electrochemical polishing.

Housing 202 can be provided with a plurality of flanges 203, among these flanges 203, can include the flange that is used for installing the target base device 100, the flange that is used for installing abutment 109, is used for installing various pumps ( For example, it can be listed: flanges of sublimation pumps, molecular pumps, ion pumps, etc.), flanges used as windows, used to connect various equipment (such as: electron guns, fluorescent screens, discharge electrodes, intake pipes, various sensors, etc.), flanges for loading and/or unloading, etc. These flanges 203 can be appropriately increased, decreased or combined in other ways according to the specific process requirements of the coating equipment.

With continued reference to FIG. 1 and auxiliary reference to FIG. 4 , the target base device 100 is mounted on one of the flanges 203 of the casing 202 through the first main body 106 of the first transmission unit 101 . A first seal 112 is disposed between the first body 106 and the flange 203 of the housing 202 , and the first seal 112 may be a gasket made of metal, for example. By using the first sealing member 112 made of metal, the sealing between the first body 106 and the casing 202 can achieve a vacuum degree of less than, for example, 1.0×10 ⁻¹⁰ Pa. The mounting cylinder 107 of the first transmission unit 101 is directly connected with the inside of the coating chamber 201 . For example, a second sealing member 113 is provided between the second transmission unit 102 and the installation cylinder 107 . More specifically, the second main body 108 of the second transmission unit 102 is installed on the installation barrel 107 , and a second seal 113 is disposed between the second main body 108 and the installation barrel 107 . Likewise, the second sealing member 113 can be, for example, a sealing gasket made of metal, so that the sealing between the second body 108 and the installation cylinder 107 can achieve a vacuum degree of less than, for example, 1.0×10 ⁻¹⁰ Pa.

Continuing to refer to FIG. 3 , in some embodiments, the first body 106 and the mounting cylinder 107 are sealed by a magnetic fluid sealing structure (for convenience of description, also referred to as "the first magnetic fluid sealing structure 114"). Specifically, ferrofluid, also known as magnetic liquid or ferrofluid, is a liquid magnetic material that has both the magnetism of a solid and the fluidity of a liquid. In terms of morphology, ferrofluid is a colloidal mixture of solid and liquid phases, and solid-liquid separation will not occur under the action of gravity, centrifugal force or electromagnetic force. As a magnetic fluid sealing structure, it refers to a sealing structure that uses the amorphous state of the magnetic fluid and its response characteristics to the magnetic field to apply it to the rotary shaft dynamic seal. Generally speaking, the magnetic fluid sealing structure includes a permanent magnet, a rotating body (such as the mounting cylinder 107 or the mounting shaft 109 ), magnetic poles and magnetic fluid. When the magnetic fluid is injected into the magnetic circuit composed of permanent magnets, rotating bodies and magnetic poles, under the action of the magnetic field force, a number of stable "O-shaped" liquid sealing rings are formed in the sealing gap, and the sealing gap is filled. Achieving a seal. The first body 106 is, for example, in the shape of a cylindrical flange. Both axial ends of the first main body 106 are embedded with bearings (not marked with reference numerals), and the installation cylinder 107 is coaxially installed in the first main body 106 through the bearings and is rotatable relative to the first main body 106 . Between the inner side of the first body 106 , the bearing, and the outer side of the mounting cylinder 107 is filled with a magnetic fluid (not marked with reference numerals). Thus, the first magnetic fluid sealing structure 114 is formed between the first body 106 and the installation cylinder 107 , and a dynamic seal between the first body 106 and the installation cylinder 107 can be realized.

Continuing to refer to FIG. 4 to FIG. 6 , in addition, in order to further improve the vacuum degree of the seal, a first cooling cavity 115 is provided in the first main body 106 , for example. The structure of the first cooling cavity 115 is not particularly limited, for example, an annular cooling passage may be provided in the wall of the first body 106 . In addition, the cooling medium in the first cooling cavity 115 is not particularly limited, for example, cooling medium such as water and oil can be used. By providing the first cooling cavity 115 in the first main body 106, the ambient temperature around the magnetic fluid can be reduced, and the vacuum degree of the seal can be improved while maintaining the normal operation of the magnetic fluid. For example, the first main body 106 and the installation cylinder 107 can be realized. The degree of vacuum of the seal between them is 1.0×10 ^-6 Pa or less.

Continuing to refer to FIGS. 3 to 6 , and with auxiliary reference to the drawings, one end of the mounting cylinder 107 facing the outside of the coating chamber 201 is provided with a mounting seat 116, and the second transmission unit 102 and the second driving part 105 are installed on the mounting seat 116 respectively, and then The installation cylinder 107 rotates relative to the first body 106 to rotate. Specifically, the mounting seat 116 may be, for example, integrally formed with the mounting cylinder 107 , or the mounting seat 116 may be a component directly mounted to one end of the mounting cylinder 107 in the circumferential direction. The mounting seat 116 can be, for example, in the shape of a ring, and is coaxial with the mounting cylinder 107 . The second body 108 is coaxially locked to the mounting base 116 , for example via the second sealing member 113 . Thereby, the second main body 108 rotates coaxially with the attachment cylinder 107 . In addition, the second driving part 105 can be directly installed on the installation base 116 , or can be indirectly installed on the installation base 116 via the second main body 108 . In other words, the second driving part 105 can also be directly installed on the second main body 108 and indirectly installed on the mounting base 116 via the second main body 108 . As a result, the second drive unit 105 rotates together with the mounting cylinder 107 .

That is, when the first driving part 104 is connected to one of the mounting cylinder 107 and the second main body 108, and thereby drives the second transmission unit 102 to rotate, the second driving part 105 is also driven by the first driving part 104 to rotate. Thus, the second transmission unit 102 and the second drive unit 105 are taken as an integral part, and the internal actions, such as the second drive unit 105 driving the rotation of the mounting shaft 109 of the second transmission unit 102, will not be subject to the first drive. Influenced by the driving action of the part 104, the independence between the revolution and rotation of the target holder device 100 can be greatly improved, thereby improving the stability of the device.

In addition, it should be noted that when the first drive unit 104 drives the second transmission unit 102 and the second drive unit 105, it is not in a continuous rotation, but drives the second transmission unit 102 and the second transmission unit 102 in a swinging state. Two driving parts 105, that is, the first driving part 104 switches between driving the second transmission unit 102 and the second driving part 105 clockwise, and driving the second transmission unit 102 and the second driving part 105 counterclockwise, here In this case, even if the second driving part 105 (for example, the driving motor 126 for rotation described later) has some controlled cables, etc., it will not be entangled or the like, so the second driving part 105 (directly or indirectly) can be installed To the mounting seat 116, there is no need to worry about entanglement of cables therein, so that the second transmission unit 102 and the second driving part 105 can be installed on the mounting seat 116 as an integral part. In the case that the second transmission unit 102 and the second driving part 105 are installed on the mounting seat 116 as an integral part, no matter whether the rotation direction of the installation cylinder 107 is the same as that of the installation shaft 109, it will not affect the installation shaft. 109 turns. In other words, when the first driving part 104 swings to drive the second transmission unit 102 and the second driving part 105, it will not affect the rotation of the installation shaft 109 of the second transmission unit 102, thereby improving the stability of the device .

Continuing to refer to FIG. 3 , the space between the second body 108 and the installation shaft 109 may also be sealed by a magnetic fluid sealing structure (for convenience of description, also referred to as "second magnetic fluid sealing structure 117"). The second body 108 is, for example, in the shape of a cylindrical flange. Both axial ends of the second main body 108 are embedded with bearings (not marked with reference numerals), and the installation shaft 109 is coaxially installed in the second main body 108 through the bearings and is rotatable relative to the second main body 108 . Between the inner side of the second body 108 , the bearing and the outer side of the mounting shaft 109 is filled with magnetic fluid (not marked with reference numerals). Thus, the second magnetic fluid sealing structure 117 is formed between the second body 108 and the installation shaft 109 , and a dynamic seal between the second body 108 and the installation shaft 109 can be realized.

Continuing to refer to FIG. 5 and FIG. 7 , similarly, in order to further improve the vacuum degree of the seal, for example, a second cooling chamber 118 is provided in the second main body 108 . The structure of the second cooling chamber 118 is not particularly limited, for example, an annular cooling channel may be provided in the wall of the second body 108 . In addition, the cooling medium in the second cooling cavity 118 is not particularly limited, for example, cooling medium such as water and oil can be used. By setting the second cooling cavity 118 in the second main body 108, the ambient temperature around the magnetic fluid can be reduced, and the vacuum degree of the seal can be improved while maintaining the normal operation of the magnetic fluid. For example, the second main body 108 and the installation shaft 109 can be realized. The degree of vacuum of the seal between them is 1.0×10 ^-6 Pa or less.

With continued reference to FIG. 7 and auxiliary reference to FIGS. 1 , 3 , 4 and 5 , the circumferential length of the installation shaft 109 is greater than the height of the second body 108 . The input portion 110 and the output portion 111 of the installation shaft 109 protrude to the outside of the second body 108 in the axial direction. The inner diameter of the installation cylinder 107 is greater than or equal to the inner diameter of the second body 108 , so that the output portion 111 of the installation shaft 109 can extend into the installation cylinder 107 . In the case where the second transmission unit 102 is coaxially mounted to the axially outer end of the installation cylinder 107 through the second main body 108 , the output portion 111 of the installation shaft 109 passes through the inside of the installation cylinder 107 The other side of the axial direction (that is, the side opposite to the coating chamber 201) protrudes. Thus, when the target base device 100 is installed on the housing 202 of the PLD equipment 100 through the first body 106 , the output portion 111 of the installation shaft 109 directly passes through the inside of the installation cylinder 107 and extends into the coating chamber 201 .

By making the output portion 111 of the installation shaft 109 directly extend into the coating chamber 201, on the one hand, it can be realized in the target holder device 100, reducing the number of parts that need to be accommodated in the coating chamber 201, and on the other hand, it is not necessary to install the components in the coating chamber 201 For example, additional processing is performed on these components, for example, it is not necessary to add expensive and easily damaged high-temperature bearings in the coating chamber 201, and it is not necessary to use lubricating grease in the coating chamber 201. Accordingly, the film formation quality of the PLD device 100 can be maintained and the stability of the device can be improved.

For example, the bracket 103 for supporting the target 300 may be fastened directly to the output portion 111 of the mounting shaft 109 . The method of fastening the bracket 103 to the output portion 111 of the installation shaft 109 is not particularly limited, for example, various known methods such as set screw tightening, nut locking, welding, clamping, etc. can be used.

In some embodiments, in order to reduce the replacement frequency of the target material 300, the second transmission unit 102 may include a plurality of installation shafts 109, each installation shaft 109 is rotatable relative to the second main body 108, and each installation shaft 109 and the second main body 108 are sealed separately. For example, the second transmission unit 102 may include a second body 108 and a plurality of installation shafts 109 . A plurality of installation cavities 119 are formed in the second body 108 , and the plurality of installation cavities 119 are evenly spaced along the circumference of the second body 108 with the axis of the second body 108 as the center. Each installation cavity 119 is respectively embedded with bearings (not labeled with reference numerals), and each installation shaft 109 is coaxially installed in the installation cavity 119 of the second body 108 through the bearings and can rotate relative to the installation cavity 119 . The inner side of each mounting cavity 119, the bearing accommodated in the mounting cavity 119, and the outer side of the mounting shaft 109 are respectively filled with magnetic fluid (not marked with reference numerals). Thereby, dynamic sealing between each installation cavity 119 and each installation shaft 109 can be realized.

The second transmission unit 102 may include, for example, four installation shafts 109 . The four installation shafts 109 are centered on the axis of the second body 108 and distributed at 90° intervals along the circumference of the second body 108 .

In addition, in the case that the second transmission unit 102 includes a plurality of installation shafts 109, the bracket 103 for supporting the target 300 may also include a plurality, and each bracket 103 is directly fastened to the output portion 111 of each installation shaft 109 respectively. .

By providing the second transmission unit 102 with a plurality of installation shafts 109, the replacement frequency of the target 300 can be reduced. In addition, in the target holder device 100 of this embodiment, especially when the second transmission unit 102 has a plurality of installation shafts 109, the stability of the device can still be maintained (described later).

Continuing to refer to FIGS. 3 to 5 , in some embodiments, the target holder device 100 further includes a third transmission unit 120 . The first drive part 104 includes a drive motor 121 for revolution, and the drive motor 121 for revolution is connected to the second transmission unit 102 through a third transmission unit 120 . The third transmission unit 120 may include: a driving gear 122 for revolution and a driven gear 123 for revolution. Among them, the revolution driving gear 122 is coaxially connected to the revolution driving motor 121 . The driven gear 123 for revolution is coaxially connected to the second body 108 . The revolution driving gear 122 meshes with the revolution driven driven gear 123 . The drive motor 121 for revolution can be installed on the first main body 106 of the first transmission unit 101 or on the casing 202 of the PLD device 100 through, for example, the first installation plate 124 . The revolution driving gear 122 may be directly attached to the output shaft of the revolution driving motor 121 . The driven gear 123 for revolution has, for example, a ring shape, and is coaxially locked to the outer periphery of the second body 108 . Thus, the revolving drive motor 121 can drive the second main body 108 of the second transmission unit 102 to rotate clockwise or counterclockwise around the first main body 106 of the first transmission unit 101 through the third transmission unit 120 with high precision.

In addition, since the third transmission unit 120 is arranged outside the coating chamber 201 , maintenance work such as adding lubricating grease can be easily performed without affecting the vacuum environment in the coating chamber 201 .

Continuing to refer to FIG. 3 to FIG. 5 , in addition, in some embodiments, the target holder device 100 further includes a fourth transmission unit 125 , and the second drive part 105 is in transmission connection with the input part 110 of each input shaft through the fourth transmission unit 125 . The second drive unit 105 includes a drive motor 126 for rotation. The fourth transmission unit 125 includes a driving gear 127 for rotation and a plurality of driven gears 128 for rotation. The driving gear 127 for rotation is coaxially connected to the driving motor 126 for rotation. The driven gear 128 for rotation is coaxially connected to the input part 110 of each attachment shaft 109, respectively. The driving gear 127 for rotation meshes with the driven gear 128 for rotation respectively. The driving motor 126 for rotation can be mounted on the second body 108 of the second transmission unit 102 through the second mounting plate 129 , or can be mounted on the mounting base 116 through the second mounting plate 129 . Furthermore, the output shaft of the drive motor 126 for rotation is coaxial with the second main body 108 . The driving gear 127 for rotation may be directly attached to the output shaft of the driving motor 126 for rotation. That is, the driving gear 127 for rotation is provided coaxially with the 2nd main body 108, and is located between the driven gear 128 for rotation, and meshes with the driven gear 128 for rotation, respectively.

Thereby, a plurality of driven gears 128 for rotation can be driven to rotate by one driving gear 127 for rotation, and the structure of the target holder device 100 can be made more compact and the cost can be reduced.

It should be noted that, in the case where a plurality of targets needs to be loaded in the conventional scanning target holder device, it also includes a plurality of rotation axes and one revolution axis. However, in conventional scanning-type target holder devices, the autorotation shaft is provided at the end of the revolution shaft, and the respective rotation shafts are also meshed and interlocked by, for example, a plurality of gears. In the conventional scanning type target holder device, the rotation shaft and the gears are housed in the coating chamber 201. In this case, the support of the rotation shaft needs to use, for example, high-temperature bearings, and the meshing of the gears requires the use of, for example, lubrication. Grease etc. In particular, when lubricating grease or the like is used in the coating chamber 201 , the lubricating grease will volatilize due to high temperature, which will affect the quality of film formation.

In addition, it should be noted that one of the main reasons for using lubricating grease is that gear meshing is prone to jamming and jamming. The reasons for the gears to be jammed or stuck are mainly due to the fact that the rotation axis and a plurality of gears are arranged at the end of the revolution axis. Specifically, in the conventional scanning target holder device, the rotation axis can be driven to continuously rotate in one direction (for example, clockwise) or switch in different directions, while the revolution axis also needs to be continuously switched in the driving direction. For example, after the revolution axis is driven to rotate 180° clockwise, it will be switched to be driven to rotate 180° counterclockwise, etc., and so on. When the revolution shaft switches the driving direction, the rotation direction of the autorotation shaft and the rotation direction of the revolution shaft also switch from the same direction to the opposite direction (or switch from the opposite direction to the same direction). In this case, the transmission direction of the gear is also forcibly switched, resulting in jamming, jamming, etc. Therefore, in this case, it is necessary to add a large amount of lubricating grease in order to suppress jamming and seizure of the gears.

However, in the present embodiment, even if the second transmission unit 102 has a plurality of installation shafts 109 (with the function of the rotation axis), and the second transmission unit 102 is connected with the second driving part 105 through a gear transmission structure, It is also possible to suppress the jamming and jamming of the gears as occurred in the previous scanning type target holder device. Specifically, as mentioned above, in the target holder device 100 of this embodiment, the second transmission unit 102 and the second driving part 105 are installed on the mounting base 116 as an integral part. In the case that the second transmission unit 102 and the second driving part 105 are installed on the mounting seat 116 as an integral part, no matter whether the rotation direction of the installation cylinder 107 is the same as that of the installation shaft 109, it will not affect the installation shaft. 109 turns. In other words, when the first drive unit 104 drives the second transmission unit 102 and the second drive unit 105 in a swinging manner, it does not affect the fourth transmission unit 125 that is transmission-connected to the second transmission unit 102 and the second drive unit 105 . Since the meshing of the gears has an influence, it is possible to suppress jamming and jamming between the driving gear 127 for rotation and the driven gear 128 for rotation of the fourth transmission unit 125 .

In addition, compared with the revolving axis driving device of the conventional scanning target device, the first driving part 104 of the target device 100 in the present embodiment is directly connected to the third transmission unit 120 through the gear transmission structure of the third transmission unit 120. The transmission connection of the second main body 108 of the second transmission unit 102 with the revolution axis function of the conventional scanning type target holder device, that is, in this case, the whole of the second transmission unit 102 (the second main body 108) can be used as It functions similarly to the revolution axis of the conventional scanning target device.

Thus, in the target base device 100 of the present embodiment, even when the second drive unit 105 is connected to the plurality of mounting shafts 109 through the fourth transmission unit 125 having a gear transmission structure, the gear structure of the fourth transmission unit 125 can be suppressed. Stuck and stuck. Furthermore, since the second driving part 105 is in transmission connection with the installation shaft 109 through the fourth transmission unit 125 outside the coating chamber 201, even if it is necessary to inject lubricating grease into the gear structure of the fourth transmission unit 125, it will not affect To the situation in the coating chamber 201, the stability of the transmission of the fourth transmission unit 125 can be improved under the premise of maintaining the quality of the film formation, and thus the stability of the target holder device 100 itself can be improved.

Therefore, in the target holder device 100 of this embodiment, not only can the structure in the coating chamber 201 be simplified, even if other intermediate structures such as the third transmission unit 120, the fourth transmission unit 125, etc. need to be provided , and do not need to be installed in the coating chamber 201, but can be added outside the coating chamber 201, so that these intermediate structures do not need to be maintained in the coating chamber 201, and the stability of the film formation in the coating chamber 201 can be maintained.

In addition, since the second transmission unit 102 as a whole is installed on the installation cylinder 107 of the first transmission unit 101 as a component that functions as the revolution shaft of the conventional scanning type target holder device, and its interior has functions as the conventional scanning target device. The component (mounting shaft 109) of the function of the rotation axis of the type target holder device can realize the mutual independence of the revolution of the target 300 through the first transmission unit 101 and the rotation of the second transmission unit 102. That is, the revolution of the first transmission unit 101 will not affect the autorotation of the second transmission unit 102, thus, the stability of the equipment can be further improved.

Further, since the first transmission unit 101 and the second transmission unit 102 use a magnetic fluid sealing structure, and the second transmission unit 102 is directly installed on the first transmission unit 101, thus, the structure in the coating chamber 201 can be simplified , it is not necessary to perform additional maintenance on the part of the target base device 100 located in the coating chamber 201 , and the stability of the target base device 100 can be improved while maintaining the stability of the film formation in the coating chamber 201 .

other implementations

It should be noted that, in the above embodiment, although the first body 106 and the installation cylinder 107 are sealed by a magnetic fluid sealing structure, it is not limited thereto. As long as the first body 106 and the installation cylinder 107 can be reliably sealed, other sealing methods can also be used, for example, a wear-resistant sealing ring can be embedded on the outer periphery of the installation cylinder 107 .

In addition, it should be noted that although the above embodiment describes the way that the second body 108 and the installation shaft 109 are also sealed by the magnetic fluid sealing structure, it is not limited thereto. As long as reliable sealing can be performed between the second body 108 and the installation shaft 109 , other sealing methods can also be used, for example, a wear-resistant sealing ring can be nested on the outer periphery of the installation shaft 109 .

In addition, the first body 106 and the installation cylinder 107 may be sealed with a wear-resistant sealing ring, while the second body 108 and the installation shaft 109 may be sealed with a magnetic fluid sealing structure. Alternatively, a magnetic fluid sealing structure may be used for sealing between the first body 106 and the mounting cylinder 107 , while sealing between the second body 108 and the mounting shaft 109 is performed by a wear-resistant sealing ring or the like. That is, it may be: between the first main body 106 and the installation cylinder 107, the magnetic fluid sealing structure is used to seal; and/or, between the second main body 108 and the installation shaft 109, the magnetic fluid sealing structure is used to seal.

In addition, although the third transmission unit 120 has been described in the above embodiment as including a gear transmission structure, it is not limited thereto. The third transmission unit 120 may also be in the form of a transmission structure such as a belt or a synchronous belt.

In addition, although the form in which the driven gear 123 for revolution is coaxially connected to the second main body 108 has been described in the above embodiment, it is not limited thereto. For example, the driven gear 123 for revolution may be fitted on the installation cylinder 107 to be coaxially connected to the installation cylinder 107 .

In addition, although the manner in which the fourth transmission unit 125 includes a gear transmission structure has been described above, it is not limited thereto. The fourth transmission unit 125 may also be in the form of a transmission structure such as a belt or a synchronous belt.

In addition, as mentioned above, the target holder device 100 in the above embodiments can be set in a pulsed laser deposition device. Specifically, the pulsed laser deposition equipment (PLD equipment 100 ) according to the second embodiment includes a coating chamber 201 and the scanning type target holder device 100 in any one of the above-mentioned embodiments.

As described above, according to the PLD device 100 of this embodiment, it is possible to improve the stability of the device while maintaining the film formation quality.

Although the examples of this embodiment have been shown and described, those skilled in the art can understand that various changes, modifications, substitutions and Modifications, the scope of this embodiment is defined by the claims and their equivalents.

Claims (10)

1. The scanning target device is used to make the target in the coating chamber revolve and rotate, and it is characterized in that it includes: The first transmission unit has a first main body and a hollow installation cylinder, the first main body is installed to the outside of the coating chamber and is sealed with the coating chamber, and the installation cylinder is opposite to the first The main body is rotatable and sealed between the installation cylinder and the first main body; The second transmission unit is installed to the installation cylinder and is sealed with the installation cylinder. The second transmission unit has a second main body and an installation shaft, and the installation shaft is rotatable relative to the second main body and The installation shaft and the second body are sealed, and the two axial ends of the installation shaft are respectively provided with an input part and an output part, the input part is located outside the installation cylinder, and the output part The part is on the inner side of the installation cylinder; a bracket, used to support the target, installed on the output part, and set in the coating chamber; The first driving part is connected to one of the installation cylinder and the second main body, and drives the second transmission unit to rotate, so that the bracket revolves with the rotation of the second transmission unit; The second driving part is connected with the input part and drives the installation shaft to rotate, so that the bracket installed on the output part of the installation shaft rotates with the rotation of the installation shaft. 2. The scanning target holder device according to claim 1, wherein the space between the first body and the installation cylinder is sealed by a magnetic fluid sealing structure; and/or, the second body and the The space between the installation shafts is sealed by a magnetic fluid sealing structure. 3. The scanning type target holder device according to claim 1 or 2, characterized in that, one end of the mounting cylinder facing the outside of the coating chamber is provided with a mounting seat, and the second transmission unit and the first The two driving parts are respectively mounted on the mounting seat, and rotate as the mounting cylinder rotates relative to the first main body. 4. The scanning target holder device according to claim 3, further comprising a third transmission unit; The first drive part includes a drive motor for revolution, and the drive motor for revolution is connected to the second transmission unit through the third transmission unit. 5. The scanning target holder device according to claim 4, wherein the third transmission unit comprises: The driving gear for revolution is coaxially connected with the drive motor for revolution; a driven gear for revolution, coaxially connected with the second main body; The revolution driving gear meshes with the revolution driven driven gear. 6. The scanning target holder device according to claim 3, characterized in that, the second transmission unit includes a plurality of the installation shafts, each of the installation shafts is rotatable relative to the second main body, and each of the installation shafts The installation shaft and the second body are respectively sealed. 7. The scanning target holder device according to claim 6, further comprising a fourth transmission unit, the second driving part passes through the fourth transmission unit and the input part of each of the input shafts Drive connection. 8. The scanning target holder device according to claim 7, wherein the second driving part comprises a driving motor for rotation; The fourth transmission unit includes a driving gear for rotation and a plurality of driven gears for rotation; The driving gear for rotation is coaxially connected with the drive motor for rotation; The driven gears for rotation are respectively coaxially connected with the input parts of the installation shafts; The driving gear for rotation meshes with the driven gears for rotation, respectively. 9. The scanning target holder device according to claim 1 or 2, wherein the output portion of the installation shaft extends into the coating chamber through the inner side of the installation cylinder. 10. Pulse laser deposition equipment, having a coating chamber, characterized in that it further comprises: the scanning target holder device according to any one of claims 1 to 9.

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