CN115903277A - an optical attenuator - Google Patents

Abstract

The embodiment of the invention provides an optical attenuator, which comprises a waveguide component, a heating electrode loop and a modulation electrode loop, wherein the heating electrode loop is arranged on the waveguide component; and an upper cladding layer overlying the upper layer of the waveguide assembly; the waveguide assembly includes: a modulation waveguide assembly; the heating electrode loop is arranged on the upper cladding layer at a position corresponding to the modulation waveguide component; the modulation electrode loop is arranged on the upper cladding along the first direction and is positioned on at least one side of the heating electrode loop; the first direction is a light transmission direction. In practical application, when an optical signal is transmitted to the modulation waveguide component from the waveguide component, a plurality of paths of polarized optical signals are generated under the action of the thermal effect of the heating electrode loop, and the polarization angles of the plurality of paths of polarized optical signals are adjusted under the action of the thermal effect of the modulation electrode loop to be offset with each other, so that the optical signal output by the optical attenuator can obtain a smaller PDL value, the effective attenuation of the optical power is ensured, and the adjustment performance of the optical attenuator on the optical power is improved.

Description

an optical attenuator

technical field

The invention relates to the technical field of optical communication, in particular to an optical attenuator.

Background technique

Planar Lightwave Circuit (PLC) type variable optical attenuator (Variable Optical Attenuator, VOA) is one of the important optical devices in optical communication systems, which has the advantages of simple fabrication, small size, good stability, low cost, and easy Integration and suitable for large-scale production and other advantages. Existing PLC-type VOAs are usually based on silicon-based silica technology, using MZI (Mach-Zehnder Interferometer, Mach-Zehnder interferometer) structure, including input straight waveguide, input Y branch, up-modulation waveguide, down-modulation waveguide, output Y The branch and output straight waveguide, the upper modulation waveguide and the lower modulation waveguide are provided with heating electrodes, and the heating electrodes are heated by applying voltage, and the heat is transferred to the core layer of the waveguide to realize the attenuation of optical power through the thermo-optic effect of the waveguide.

However, in actual work, the greater the voltage applied to the heating electrode, the greater the thermal stress on the waveguide. With the increase of thermal stress and optical power attenuation, the polarization-dependent loss (PDL) also increases. Large, resulting in the optical jitter of the communication link, reducing the optical power adjustment performance of the optical attenuator.

Contents of the invention

The embodiments of the present invention mainly provide an optical attenuator, which can reduce the PDL of the optical attenuator and improve the optical power adjustment performance of the optical attenuator.

An embodiment of the present invention provides an optical attenuator, including: a waveguide assembly, a heating electrode circuit, a modulation electrode circuit, and an upper cladding layer covering the upper layer of the waveguide assembly; the waveguide assembly includes: a modulation waveguide assembly;

The heating electrode circuit is arranged on the upper cladding layer at a position corresponding to the modulating waveguide assembly;

The modulation electrode circuit includes at least one, the modulation electrode circuit is arranged on the upper cladding layer along a first direction, and is located on at least one side of the heating electrode circuit; the first direction is the light transmission direction;

Wherein, when the optical signal is transmitted from the waveguide component to the modulating waveguide component, multi-path polarized light signals are generated under the thermal effect of the heating electrode circuit, and all polarized light signals are adjusted under the thermal effect of the modulating electrode circuit. The polarization angles of the multi-channel polarized optical signals can be canceled out.

In the attenuator, the waveguide component further includes: an input waveguide component and an output waveguide component; the input waveguide component, the modulation waveguide component and the output waveguide component are connected in sequence;

Wherein, the optical signal is transmitted through the input waveguide assembly to generate a multi-channel optical signal with polarization rotation, and when the multi-channel optical signal is transmitted to the modulation waveguide assembly, under the thermal effect of the heating electrode circuit , to generate secondary polarization rotation to form the multi-path polarized light signal, and adjust the rotation angle of the multi-path polarized light signal under the action of the thermal effect of the modulation electrode circuit, so that the multi-path polarized light signal When transmitted to the output waveguide assembly, the polarization angles of the multiple polarized optical signals cancel each other out.

In an embodiment of the present invention, the modulation electrode loop includes a plurality; the plurality of modulation electrode loops are sequentially arranged on the upper cladding layer along the first direction with gaps or without gaps, and are located on at least one of the heating electrode loops. side.

In the embodiment of the present invention, the modulation electrode circuit includes a modulation electrode and a first conductive electrode located at both ends of the modulation electrode, and the modulation electrode is respectively connected to the positive pole and the negative pole of the power supply through the first conductive electrode to form the modulation electrode. Electrode circuit;

The heating electrode circuit includes a heating electrode and a second conductive electrode located at both ends of the heating electrode, and the heating electrode is respectively connected to the positive pole and the negative pole of a power supply through the second conductive electrode to form the heating electrode circuit.

In an embodiment of the present invention, the input waveguide assembly includes: an input straight waveguide and an input branch waveguide, and the input straight waveguide and the input branch waveguide are sequentially connected;

Wherein, when the optical signal is transmitted from the input straight waveguide to the input branch waveguide, a multi-channel optical signal with polarization rotation is generated.

In an embodiment of the present invention, the modulation waveguide assembly includes: an upper modulation waveguide and a lower modulation waveguide;

The heating electrode circuit is arranged on the upper cladding at a position corresponding to the upper modulation waveguide; and/or, the heating electrode circuit is arranged on the upper cladding at a position corresponding to the lower modulation waveguide;

Wherein, the optical signal is transmitted through the input waveguide assembly to generate multiple optical signals with polarization rotation, and when the multiple optical signals are transmitted to the upper modulation waveguide and the lower modulation waveguide, the upper modulation Under the action of the thermal effect of the heating electrode circuit at the corresponding position of the waveguide; and/or, under the action of the thermal effect of the heating electrode circuit at the position corresponding to the down modulation waveguide, secondary polarization rotation occurs to form at least one polarized light signal, and Under the thermal effect of the modulation electrode circuit, the rotation angle of the at least one path of polarized light signals is adjusted so that it can cancel each other with other paths of light signals.

In an embodiment of the present invention, the output waveguide assembly includes: an output branch waveguide and an output straight waveguide, and the output straight waveguide and the output straight waveguide are sequentially connected;

Wherein, after the rotation angle of the at least one polarized light signal is adjusted by the modulation electrode circuit, the at least one polarized light signal and other optical signals can cancel each other, pass through the output branch waveguide, and connect the branch waveguide and One end connected to the output straight waveguide forms a target optical signal, and the target optical signal is output through the output straight waveguide.

In the embodiment of the present invention, the optical attenuator further includes: a lower cladding layer and a substrate, the lower cladding layer is located below the waveguide assembly, and the substrate is located below the lower cladding layer.

In an embodiment of the present invention, when the optical signal is transmitted to the modulation waveguide assembly in the waveguide assembly, the modulation waveguide assembly is heated based on the heating electrode circuit, so as to adjust the phase shift of the optical signal;

heating the modulation electrode circuit, so that the modulation electrode circuit performs a second phase shift adjustment on the optical signal after the phase shift adjustment, and the optical signal after the second phase shift adjustment is When the modulated waveguide component is output, a target optical signal is formed, and the power of the target optical signal is smaller than the power of the optical signal.

In the embodiment of the present invention, when the optical signal is transmitted in the input waveguide component, a phase shift occurs, and when the phase-shifted optical signal passes through the modulation waveguide component, a second phase shift occurs, and by heating the modulated an electrode circuit, which adjusts the phase shift of the optical signal that generates the secondary phase shift, so that the optical signal output from the modulation waveguide assembly to the output waveguide assembly is a target optical signal, and the target optical signal The power is less than the power of the optical signal.

In the embodiment of the present invention, when the optical signal passes through the input straight waveguide and is transmitted to the input branch waveguide, a phase shift occurs and multiple optical signals are generated.

In the embodiment of the present invention, when the multi-channel optical signal passes through the upper modulation waveguide and the lower modulation waveguide, the heating electrode circuit at the position corresponding to the upper modulation waveguide is heated; and/or, the position corresponding to the lower modulation waveguide is heated. The heating electrode circuit is heated, so that at least one of the multi-channel optical signals undergoes a secondary phase shift, by heating the modulation electrode circuit on the upper modulation waveguide; and/or by heating the modulation electrode circuit on the lower modulation waveguide The modulation electrode circuit is heated to adjust the phase shift of at least one of the multiple optical signals, so that the optical signals output from the upper modulation waveguide and the lower modulation waveguide to the output waveguide assembly and combined are the target optical signal, so The power of the target optical signal is smaller than the power of the optical signal.

An embodiment of the present invention provides an optical attenuator, including a waveguide assembly, a heating electrode circuit, a modulation electrode circuit; and an upper cladding layer covering the upper layer of the waveguide assembly; the waveguide assembly includes: a modulation waveguide assembly; The position on the layer corresponds to the modulation waveguide assembly; the modulation electrode circuit includes at least one, the modulation electrode circuit is arranged on the upper cladding layer along the first direction, and is located on at least one side of the heating electrode circuit; the first direction is the light transmission direction. Wherein, when the optical signal is transmitted from the waveguide component to the modulation waveguide component, the multi-path polarized light signal is generated under the thermal effect of the heating electrode circuit, and the polarization of the multi-path polarized light signal is adjusted under the thermal effect of the modulation electrode circuit Angle, so that they can cancel each other, so that the optical signal output through the optical attenuator can obtain a smaller PDL value, ensure the effective attenuation of optical power, and improve the adjustment performance of the optical attenuator to optical power.

Description of drawings

Fig. 1 is the structural representation of a kind of PLC type VOA provided in the prior art;

Fig. 2 is a side view structural schematic diagram of an optical attenuator provided by an embodiment of the present invention;

Fig. 3 is a schematic top view structural diagram of a waveguide assembly provided by an embodiment of the present invention;

Fig. 4a is a schematic diagram of a polarization rotation angle generated by one optical signal provided by an embodiment of the present invention;

Fig. 4b is a schematic diagram of another optical signal generating polarization rotation angle provided by an embodiment of the present invention;

Fig. 5 is a top view distribution diagram of a modulation electrode circuit provided by an embodiment of the present invention;

FIG. 6 is a schematic top view structural diagram of a modulation electrode circuit provided by an embodiment of the present invention;

FIG. 7 is a schematic top view of another optical attenuator provided by an embodiment of the present invention;

Fig. 8 is a schematic side view structural diagram of another optical attenuator provided by an embodiment of the present invention;

FIG. 9 is a schematic flowchart of optical signal transmission in an optical attenuator according to an embodiment of the present invention.

Detailed ways

In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with the accompanying drawings, and the described embodiments should not be considered as limiting the present invention, and those of ordinary skill in the art do not make any All other embodiments obtained under the premise of creative labor belong to the protection scope of the present invention.

In the following description, references to "some embodiments/other embodiments" describe a subset of all possible embodiments, but it is understood that "some embodiments/other embodiments" may be all possible embodiments The same subset or different subsets of , and can be combined with each other without conflict.

The optical attenuator is a device used to attenuate the optical power. It is mainly used in the index measurement of the optical fiber system, the signal attenuation of the short-distance communication system and the system test and other occasions. The optical attenuator is a very important fiber optic passive device. It can attenuate the energy of the optical signal according to the user's requirements. It is often used in absorbing or reflecting the optical power margin, evaluating the loss of the system and various tests. . At present, optical attenuators have been widely used in the field of optical communication, bringing convenience to users.

Optical attenuators can be divided into fixed optical attenuators and variable optical attenuators. Fixed optical attenuators have a fixed attenuation value for optical signal energy; according to the user's attenuation requirements for optical signals, optical signal energy can reach different attenuation values. It is the variable optical attenuator. The variable optical attenuator can achieve different optical power attenuation through adjustment strategies, which is more applicable than the fixed optical attenuator.

In the field of optical communication, a PLC-based variable optical attenuator is a general-purpose optical device in an optical communication system, and its structure is shown in Figure 1. Figure 1 is a schematic diagram of a PLC-type VOA structure provided in the related art. The structure of this variable optical attenuator 1 comprises, input straight waveguide 10, input Y branch 11, down modulation waveguide 12, up modulation waveguide 13, output Y branch 14 and output straight waveguide 15, up modulation waveguide 13 and down modulation waveguide 12 A heating electrode 18 is arranged on the upper side. When the optical signal passes through the input straight waveguide 10, the input Y branch 11, and reaches the upper modulation waveguide 13, the heating electrode 18 of the upper modulation waveguide 13 is heated to transfer heat to the upper modulation waveguide. The waveguide core layer of 13 attenuates the optical power by modulating the thermo-optic effect of the waveguide. However, in the process of continuously heating the heating electrode, the PDL of the variable optical attenuator will also increase, and the increase of the PDL value will make the optical signal intensity change continuously, which is manifested as optical jitter in the communication link, thus affecting the variable optical attenuator. The adjustment performance of the attenuator to the optical power.

In order to solve the above problems of the PLC-type VOA, an embodiment of the present invention provides an optical attenuator, which can effectively reduce the PDL value and improve the optical power adjustment performance of the optical attenuator.

An embodiment of the present invention provides an optical attenuator. As shown in FIG. 2 , it is a schematic side view structural diagram of an optical attenuator provided by an embodiment of the present invention. The optical attenuator 1 includes: a waveguide assembly 21, a heating electrode circuit 22, The modulation electrode circuit 23 and the upper cladding layer 24 covering the upper layer of the waveguide assembly 21 ; the waveguide assembly 21 includes: a modulation waveguide assembly 211 .

It should be noted that the waveguide component 21 can be an optical waveguide through which the optical signal can be transmitted; the heating electrode circuit 22 transmits its own heat to the modulating waveguide component 211, causing the modulating waveguide component 211 to undergo thermal stress and changing the rotation direction of the optical signal , so that the optical signal rotates randomly; the modulating electrode circuit 23 can specifically be a PDL modulating electrode circuit 23, which is used to adjust the PDL of the optical attenuator. By changing the heat of the modulating electrode circuit 23, the rotation angle of the optical signal is regularly rotated.

In some embodiments, the heating electrode circuit 22 may include a resistance structure. At this time, the heating electrode circuit 22 may be a circuit circuit composed of a resistance structure. By applying a voltage signal to the circuit circuit, the resistance generates heat, and the heat generated by the resistance is transferred. to the modulating waveguide component 211 so that the optical signal passing through the modulating waveguide component 211 is rotated.

In some embodiments, the modulating electrode circuit 23 and the heating electrode circuit 22 can be substantially the same or completely the same. When the electrode loops 22 are basically the same, the difference between the two is only that the size of the electrode loops is different, and the rest of the features including structure, size and material are the same; in other embodiments, the modulation electrode loop 23 and the heating The electrode circuits 22 may be different, and in this case, at least any one of the size, shape, structure and material of the two is different.

It should be noted that the heating electrode circuit 22 is disposed on the upper cladding layer 24 at a position corresponding to the modulation waveguide assembly 211 . The heat generated by the heating electrode is not directly transmitted to the modulating waveguide assembly 211, but is transmitted to the modulating waveguide assembly 211 by heating through the upper cladding layer 24 located under the heating electrode circuit 22, so that the modulating waveguide assembly passes through the modulating waveguide assembly The optical signal at 211 is rotated. In some embodiments, the material of the upper cladding layer 24 may be a mixture of silicon dioxide and boron, and the upper cladding layer 24 is used to protect the modulation waveguide component 211 .

In some embodiments, at least one modulating electrode loop 23 is included, and the modulating electrode loop 23 is disposed on the upper cladding layer 24 along a first direction and located on at least one side of the heating electrode loop 22; the first direction is the light transmission direction.

According to the modulation of the PDL, the optical attenuator can be provided with one or more modulation electrode loops 23, and all the modulation electrode loops 23 are along the direction of optical signal transmission, and are arranged on the upper cladding layer 24, so that the modulation after heating The electrode loop 23 can transmit its own heat to the modulation waveguide component 211 through the upper cladding layer 24 .

It can be understood that the modulating electrode circuit 23 can be located on one side of the heating electrode circuit 22, or on both sides of the heating electrode, by heating the modulating electrode located on one side or both sides of the heating electrode circuit 22, the heat transfer after heating To modulate the waveguide component 211, so that the optical signal passing through the modulated waveguide component 211 is regularly rotated to generate a rotation angle expected by the user, so as to reduce the PDL of the optical attenuator.

In some embodiments, when the optical signal is transmitted from the waveguide component 21 to the modulating waveguide component 211, the multi-path polarized light signal is generated under the thermal effect of the heating electrode circuit 22, and the multiple polarized optical signals are adjusted under the thermal effect of the modulating electrode circuit 23. The polarization angles of the two polarized optical signals can cancel each other out.

It should be noted that the optical signal is transmitted through the waveguide assembly 21, and when it reaches the modulation waveguide assembly 211, multiple optical signals are generated, and the heated heating electrode generates heat, which is transmitted to the modulation waveguide assembly 211 through the upper cladding layer 24 to modulate The waveguide produces a thermal effect, and the thermal effect makes the multi-path optical signals deflected through the modulation waveguide assembly 211 to generate multi-path polarized light signals. The deflection directions of the multi-path polarized light signals are irregular. At this time, heat is generated by heating the modulation electrode circuit 23 , and adjust the generated heat according to the actual situation, so that the multi-path polarized light signals rotate regularly, further, adjust the heat generated by the modulation electrode circuit 23 until the rotation angles of the multi-path polarized light signals add up and cancel.

The embodiment of the present invention provides an optical attenuator 1, including a waveguide assembly 21, a heating electrode circuit 22, a modulation electrode circuit 23; and an upper cladding layer 24 covering the upper layer of the waveguide assembly; the waveguide assembly 21 includes: a modulation waveguide assembly 211; The heating electrode circuit 22 is arranged on the upper cladding layer 24 at a position corresponding to the modulation waveguide assembly 211; the modulation electrode circuit 23 includes at least one, and the modulation electrode circuit 23 is arranged on the upper cladding layer 24 along the first direction, and is located on the heating electrode circuit 22 at least one side; the first direction is the light transmission direction. Wherein, when the optical signal is transmitted from the waveguide component 21 to the modulation waveguide component 211, the multi-path polarized optical signal is generated under the thermal effect of the heating electrode circuit 22, and the multi-channel polarization is adjusted under the thermal effect of the modulating electrode circuit 23 The polarization angle of the optical signal makes them cancel each other, so that the optical signal output through the optical attenuator can obtain a smaller PDL value, ensure the effective attenuation of optical power, and improve the adjustment performance of the optical attenuator to optical power.

In some embodiments, as an example, as shown in FIG. 3 , it is a schematic top view of a waveguide assembly 21 provided by an embodiment of the present invention. As shown in FIG. 3 , the waveguide assembly 21 further includes: an input waveguide assembly 212 and an output waveguide assembly 212 The waveguide assembly 213 ; the input waveguide assembly 212 , the modulation waveguide assembly 211 and the output waveguide assembly 213 are connected in sequence.

It should be noted that the input waveguide assembly 212, the modulation waveguide assembly 211, and the output waveguide assembly 213 are seamlessly connected to each other, so that there is no external force or other external factors except for the influence of the heating electrode circuit 22 and the modulation electrode circuit 23. Under the influence of factors, the optical signal through the input waveguide assembly 212 , the modulation waveguide assembly 211 and the output waveguide assembly 213 is transmitted without distortion.

In some embodiments, the input waveguide component 212, the modulation waveguide component 211, and the output waveguide component 213 can all be made of lithium niobate (LiNbO3), III-V semiconductor compound, silicon dioxide (SiO2), silicon-on-insulator (Silicon- on-Insulator, SOI), polymer (Polymer) and glass.

The optical signal first enters the input waveguide assembly 212, is transmitted in the input waveguide assembly 212, and then enters the modulation waveguide assembly 211. After the polarization rotation angle is adjusted through the heating electrode circuit 22 and the modulation electrode circuit 23 in the modulation waveguide assembly 211, the input and output waveguide The component 213 finally outputs the attenuated optical signal through the output waveguide component 213 .

In some embodiments, the optical signal is transmitted through the input waveguide component 212 to generate multiple optical signals with polarization rotation. Secondary polarization rotation to form multi-path polarized light signals, and adjust the rotation angle of the multi-path polarized light signals under the thermal effect of the modulation electrode circuit 23, so that when the multi-path polarized light signals are transmitted to the output waveguide assembly 213, more The polarization angles of the two polarized optical signals cancel each other out.

Optical signal is a kind of electromagnetic wave, which has volatility. When the vibration direction of optical signal and the propagation direction of optical signal are asymmetrical, polarization phenomenon will occur. When the optical signal propagates in the input waveguide assembly 212, since the input waveguide assembly 212 is not a regular device that allows the optical signal to propagate along a straight line, when the propagation direction of the optical signal changes, its polarization direction and propagation direction will be different. The symmetry causes the optical signal to be polarized to generate a multi-channel optical signal with a polarization rotation angle. Specifically, the multi-channel optical signal can be specifically two channels, and both optical signals generate a polarization rotation angle.

It should be noted that when the optical signal passes through the input waveguide component 212, without the influence of external force or other factors, the polarization rotation angles of the two optical signals that generate polarization will not change randomly, and when the optical signal is from the input Before the waveguide assembly 212 enters the modulation waveguide assembly 211, the rotation angle remains unchanged.

In some embodiments, the two optical signals that generate polarization rotation both generate a certain polarization rotation angle, as shown in FIG. 4a, which is a schematic diagram of an optical signal generating a polarization rotation angle provided by an embodiment of the present invention. The polarization rotation angle of one path of optical signal generating polarization rotation is ρ1. FIG. 4b is a schematic diagram of another polarization rotation angle generated by an optical signal provided by an embodiment of the present invention. In FIG. 4b, the polarization rotation angle of one optical signal that generates polarization rotation is ρ2.

It should be noted that whether the optical signal produces a counterclockwise polarization rotation angle or a clockwise polarization rotation angle, an initial calibration is required. For example, after the optical attenuator is manufactured, it can be tested to determine whether the optical attenuator passes the input waveguide component. After the optical signal of 212 is polarized, which one of the two optical signals rotates clockwise and which one rotates counterclockwise. For example, when testing the optical attenuator, it is found that when two optical signals pass through the modulating waveguide assembly 212, the polarization rotation angle of one optical signal rotates clockwise, resulting in an angle ρ1 as shown in Figure 4a, and the polarization of the other optical signal The angle of rotation is rotated counterclockwise, resulting in an angle ρ2 as shown in Fig. 4b.

When the two-way optical signals that generate polarization rotation enter the modulation waveguide component 211 from the input waveguide component 212, they are transmitted to the modulation waveguide component 211 through the heat generated by the heating electrode circuit 22. Under the action of thermal stress and phase delay, the two-way polarization The optical signal continues to rotate, producing a secondary polarization rotation, but this time the polarization direction is not regular.

In some embodiments, the polarization of the optical signal rotates clockwise in the input waveguide assembly 212, rotates counterclockwise after entering the modulation waveguide, or continues to rotate clockwise after entering the modulation waveguide, or after adjusting the heat generated by the heating electrode, Alternately rotating clockwise and counterclockwise, or any other possible rotation direction, it should be noted that the polarization direction of the optical signal transmitted in the modulation waveguide is randomly deflected.

In the modulation waveguide, by heating the modulation electrode, the thermal effect of the modulation waveguide is generated. At this time, the heat generated by the modulation electrode is continuously changed, and the polarization rotation angle of the optical signal can be adjusted, so that when the secondary polarization rotation of the optical signal occurs Carry out regular rotation, and can be adjusted until the polarization rotation angle reaches the expected angle, so that when the two optical signals with polarization rotation are transmitted to the output waveguide assembly 213, the polarization rotation angles of the two optical signals cancel each other out, specifically two The addition of the polarization rotation angles of the two optical signals is zero, for example, the polarization rotation angle of one optical signal is 30°, and the deflection rotation angle of the other optical signal is -30°, then the addition of the deflection rotation angles of the two optical signals can cancel .

In some embodiments, the modulation electrode loop 23 includes a plurality; the plurality of modulation electrode loops 23 are sequentially arranged on the upper cladding layer 24 along the first direction with gaps or without gaps, and are located on at least one side of the heating electrode loop 22 .

It should be noted that there may be one or more modulation electrode circuits 23, and all the modulation electrode circuits 23 are arranged on the upper cladding layer 24 of the optical attenuator. The modulating electrode circuit 23 can be arranged on one side of the heating electrode circuit 22 , along the direction of light propagation, in the same direction as the heating electrode circuit 22 , or the modulating electrode circuit 23 can be arranged on both sides of the heating electrode circuit 22 . In practical applications, for the modulating electrode circuits 23 arranged on both sides of the heating electrode circuit 22, it can be determined as required whether to adjust the heat generated by the modulating electrode circuits 23 on any side of the heating electrode circuit 22, or the heat generated by the modulating electrode circuits 22 on both sides of the heating electrode circuit 22. The heat of the modulating electrode circuit 23 is regulated.

In some embodiments, as shown in FIG. 5 , it is a schematic distribution diagram of a modulation electrode loop provided by an embodiment of the present invention. As shown in FIG. 5 , the modulation electrode loop 23 is arranged on the heating electrode along the direction of optical signal transmission. One side of the modulation electrode circuit 23 and the heating electrode circuit 22 are both located on the upper cladding layer 24. Along the direction of optical signal transmission, the opposite side of the two sides of the heating electrode circuit 22 is set as two modulation electrodes with a gap. The electrode loops 23, at this time, can be adjusted according to actual needs, and the two modulating electrode loops 23 can generate different amounts of heat.

It should be noted that the modulation electrode circuit 23 can have one or more gaps, for example, when there is one gap, there are two modulation electrodes on one side of the heating electrode circuit 22; when the gap is N, N is greater than or equal to 1 When is a positive integer, there are N+1 modulation electrode circuits 23 on the heating electrode side. In this case, the heat generated by the multiple modulation electrode circuits 23 on the heating electrode side can be adjusted to be different.

In some embodiments, the modulating electrode loop 23 includes a modulating electrode and a first conductive electrode located at both ends of the modulating electrode, and the modulating electrode is respectively connected to the positive pole and the negative pole of the power supply through the first conductive electrode to form the modulating electrode loop 23 .

The heating electrode circuit 22 includes a heating electrode and a second conductive electrode located at two ends of the heating electrode, and the heating electrode is respectively connected to the positive pole and the negative pole of the power supply through the second conductive electrode to form the heating electrode circuit 22 .

It should be noted that, as shown in FIG. 6 , which is a schematic top view structural diagram of a modulation electrode circuit provided by an embodiment of the present invention, the first conductive electrode in the modulation electrode circuit includes a conductive electrode (V-) 231 and a conductive electrode (V+ ) 233, the modulation electrode loop 23 includes a conductive electrode (V-) 231, a modulation electrode 232 and a conductive electrode (V+) 233, and the two ends of the modulation electrode 232 are respectively connected to the positive pole and the negative pole of the power supply through the first conductive conductive electrode to form a modulation electrode loop 23 .

Similar to the structure of the modulation electrode circuit 23, the second conductive electrode includes a conductive electrode (V-) and a conductive electrode (V+), and the heating electrode circuit 22 includes a conductive electrode (V-), a heating electrode, and a conductive electrode (V+). The two ends are respectively connected to the positive pole and the negative pole of the power supply through conductive electrodes to form a heating electrode circuit 22 .

It can be understood that the first conductive electrode constituting the modulation electrode circuit 23 and the second conductive electrode constituting the heating electrode circuit 22 are all conductive electrodes that can be connected to a power supply, and there is no substantial difference. Here, the distinction between the first conductive electrode and the The second conductive electrode only indicates that the modulation electrode circuit 23 and the heating electrode circuit 22 can be connected to different power supply voltage signals through their respective conductive electrodes. By connecting the power supply voltage, the heating electrode and the modulation electrode 232 will generate heat, and the generated heat will pass through The upper cladding layer 24 of the optical attenuator is transmitted to the modulation waveguide component 211 to attenuate the optical power, and the PDL value of the optical attenuator can be adjusted.

In some embodiments, as shown in FIG. 7 , which is a schematic top view of another optical attenuator provided by an embodiment of the present invention, the waveguide assembly 21 includes an input waveguide assembly 212, a modulation waveguide assembly 211, and an output waveguide assembly 213, wherein , the input waveguide component 212 includes: an input straight waveguide 2121 and an input branch waveguide 2122, and the input straight waveguide 2121 and the input branch waveguide 2122 are sequentially connected.

It should be noted that the input straight waveguide 2121 is the initial propagation medium device for the optical signal to enter the optical attenuator, the optical signal propagates along a straight line in the input straight waveguide 2121, and the propagation direction of the light changes after reaching the input branch waveguide 2122, and produces Two optical signals, specifically, the shape of the input branch waveguide 2122 can be a Y-shaped branch, which is divided into an upper branch and a lower branch. At the connection between the input straight waveguide 2121 and the input branch waveguide 2122, one path propagates upward, and the other path down-propagated optical signal.

In some embodiments, when the optical signal is transmitted from the input straight waveguide 2121 to the input branch waveguide 2122, a multi-channel optical signal with polarization rotation is generated. When the propagation direction of the optical signal changes, the propagation direction and the vibration direction of the optical signal are asymmetrical. Therefore, the polarization rotation of the two optical signals entering the input branch waveguide 2122 will occur.

In some embodiments, it can be seen from FIG. 7 that the modulation waveguide assembly 211 includes: an upper modulation waveguide 2111 and a lower modulation waveguide 2112; the heating electrode circuit 22 is arranged on the upper cladding 24 at a position corresponding to the upper modulation waveguide 2111; And/or, the heating electrode circuit 22 is disposed on the upper cladding layer 24 at a position corresponding to the lower modulation waveguide 2112 .

The input branch waveguide 2122 divides the optical signal into two channels for transmission respectively. When the two optical signals enter the modulating waveguide, they are also two optical signals. At this time, one of the two optical signals is transmitted in the upper modulating waveguide 2111, and the other is transmitted in the lower modulating waveguide. The transmission in the modulation waveguide 2112 is to pass through the heating electrode circuit 22, or the heating electrode circuit 22 and the modulation electrode circuit 23 to act on at least one of the two modulation waveguides to realize the adjustment of the polarization rotation angle of at least one optical signal.

In some embodiments, the heating electrode circuit 22 is arranged on the upper cladding layer 24, corresponding to the position of the upper modulation waveguide 2111, or the heating electrode circuit 22 is arranged to correspond to the position of the lower modulation waveguide 2112, or the heating electrode circuit 22 is in The positions of the upper modulation waveguide 2111 and the lower modulation waveguide 2112 are correspondingly provided with heating electrode circuits 22 .

It can be understood that the position corresponding to the upper modulation waveguide 2111 or the lower modulation waveguide 2112 indicates that the direction of the heating electrode circuit 22 is consistent with the direction of the upper modulation waveguide 2111 or the lower modulation waveguide 2112, both are along the propagation direction of the optical signal, and meet the requirements of heating The electrodes are in sufficient contact with the modulation waveguide so as to transmit the heat generated by themselves to the upper modulation waveguide 2111 or the lower modulation waveguide 2112 .

In some embodiments, the optical signal is transmitted through the input waveguide component 212 to generate multiple optical signals with polarization rotation. When the multiple optical signals are transmitted to the upper modulation waveguide 2111 and the lower modulation waveguide 2112, the heating at the corresponding position of the upper modulation waveguide 2111 Under the action of the thermal effect of the electrode circuit 22; and/or, under the action of the thermal effect of the heating electrode circuit 22 at the position corresponding to the lower modulation waveguide 2112, secondary polarization rotation occurs to form at least one path of polarized light signals, and the modulation electrode circuit 23 Under the effect of thermal effect, the rotation angle of at least one path of polarized light signal is adjusted so that it can cancel each other with other paths of light signal.

Two paths of polarization-rotated optical signals are generated in the input waveguide assembly 212, respectively enter the upper modulation waveguide and the lower modulation waveguide 2112, and under the thermal effect of the heating electrode circuit 22 of the upper modulation waveguide, one path of polarized optical signals is generated, or in the upper modulation waveguide Under the action of the thermal effect of the heating electrode circuit 22 of the modulation waveguide and the lower modulation waveguide 2112, two paths of polarized light signals are generated, and under the action of the thermal effect of the modulation electrode circuit 23 of the upper modulation waveguide 2111, or the upper modulation waveguide and the lower modulation waveguide Under the thermal effect of the modulation electrode circuit 23 of the modulation waveguide 2112, the rotation angle of the polarized optical signal is adjusted, so that the polarization rotation angles of the upper and lower optical signals output from the modulation waveguide add up to zero, thereby reducing the PDL.

In some embodiments, as shown in FIG. 7 , the output waveguide assembly 213 includes: an output branch waveguide 2131 and an output straight waveguide 2132 , and the output straight waveguide 2132 and the output straight waveguide 2132 are connected in sequence.

It should be noted that, similar to the input branch waveguide 2122 , the shape of the output branch waveguide 2131 can also be a Y branch, and the shape of the output branch waveguide 2131 is arranged symmetrically with respect to the modulation waveguide component 211 of the input branch waveguide 2122 . The optical signals output from the upper and lower modulation waveguides 2111 and 2112 respectively enter the upper branch and the lower branch of the output branch waveguide 2131, and merge into one optical signal at the end where the output branch waveguide 2131 and the output straight waveguide 2132 are connected.

In some embodiments, after the rotation angle of at least one polarized light signal is adjusted by the modulating electrode circuit 23, the at least one polarized light signal and the other optical signals can cancel each other, pass through the output branch waveguide 2131, and connect between the branch waveguide and the output straight waveguide 2132 One end of the connection forms the target optical signal, and the target optical signal is output through the output straight waveguide 2132 .

One optical signal adjusted by the modulation electrode 232, or two optical signals adjusted by the modulation electrode, are respectively transmitted through the output branch waveguide 2131, and converged into one optical signal when reaching the output straight waveguide 2132. This optical signal is the user The desired target optical signal, the target optical signal is an optical signal with a certain attenuation in optical power, and the optical power of the target optical signal is smaller than the optical power of the optical signal initially input into the straight waveguide 2121 .

In some embodiments, as shown in FIG. 8 , which is a schematic top view of another optical attenuator provided by an embodiment of the present invention, the optical attenuator 2 further includes: a lower cladding layer 25 and a substrate 26, and the lower cladding layer 25 Located below the waveguide assembly 21 , the substrate 26 is located below the lower cladding layer 25 .

It should be noted that the material of the lower cladding layer 25 can be silicon dioxide, the lower cladding layer 25 is located below the upper cladding layer 24 and above the substrate 26, and the lower cladding layer 25 is used to protect the waveguide component 21, specifically to protect An upper modulation waveguide 2111 and a lower modulation waveguide 2112 . The substrate 26 can be made of silicon material, and is used to support the structure formed by the lower cladding layer 25, the waveguide component 21 and the upper cladding layer 24, and provide support for the optical attenuator.

In some embodiments, the heating electrode and modulating electrode 232 are made of metal or alloy. The heating electrode and the modulation electrode 232 can be made of metal or alloy with a resistivity of 50-500nΩ·m, and the material of the heating electrode and the modulation electrode 232 can be one of titanium, tungsten, chromium, platinum or any combination; the first conductive electrode The second conductive electrode and the second conductive electrode can be made of metal or alloy with an electrical conductivity of 60-110% IACS, and the materials of the first conductive electrode and the second conductive electrode can be one of gold, copper, aluminum or any combination thereof.

The optical attenuator provided in the disclosed embodiments of the present invention can transmit optical signals and realize effective attenuation of optical power. As shown in FIG. Schematic diagram of the process. The following uses Figure 9 as an example to illustrate the process of optical signal transmission in the optical attenuator, including:

S101. When the optical signal is transmitted to the modulation waveguide assembly in the waveguide assembly, the modulation waveguide assembly is heated based on the heating electrode circuit, so as to adjust the phase shift of the optical signal.

Input the optical signal that requires optical power attenuation into the waveguide assembly 212. When the optical signal enters the modulation electrode circuit 23, the modulation waveguide assembly 211 is heated by connecting the heating electrode circuit 22 with a voltage signal, so that the heating electrode circuit 22 generates heat, and the generated heat is transmitted to the modulating waveguide component 211, changing the refractive index of the material of the modulating waveguide component 211, so that the phase of the optical signal changes, that is, a phase shift occurs. By changing the voltage signal applied to the heating electrode circuit 22, it can be The adjustment of the phase of the optical signal is realized.

S102, heating the modulation electrode circuit, so that the modulation electrode circuit performs a second phase shift adjustment on the optical signal after the phase shift adjustment, and the optical signal after the second phase shift adjustment forms a target when outputting the modulation waveguide component For an optical signal, the power of the target optical signal is less than the power of the optical signal.

When a voltage signal is connected to the modulation electrode circuit 23, the modulation electrode 232 will generate heat, and this heat will be transmitted to the modulation waveguide assembly 211, causing the phase change of the optical signal that has already undergone a phase change to occur again. By changing the magnitude of the access voltage signal, Realize the change of the heat generated by the modulation electrode 232, so that the phase of the optical signal changes for the second time, and achieve the purpose of adjusting the phase-shifted optical signal to be the target optical signal. The target optical signal has the optical power expected by the user, which means that the optical power has For an optical signal with a certain amount of attenuation, the optical power of the target optical signal is less than the optical power of the optical signal initially input to the input waveguide assembly 212 .

In some embodiments, the transmission process of the optical signal in the optical attenuator further includes: when the optical signal is transmitted in the input waveguide component 212 , a phase shift occurs. When the phase-shifted optical signal passes through the modulating waveguide assembly 211, a second phase shift is generated, and the phase shift of the optical signal with the second phase shift is adjusted by heating the modulation electrode circuit 23, so that the output from the modulating waveguide assembly 211 to the output The optical signal of the waveguide assembly 213 is a target optical signal, and the power of the target optical signal is smaller than the power of the optical signal.

It should be noted that when the optical signal is transmitted in the waveguide assembly 211, it first enters the input waveguide assembly 212, and in the input waveguide assembly 212, the propagation direction of the optical signal changes, so that the propagation direction and the vibration direction of the optical signal are asymmetrical, and the light As a result, the signal undergoes a phase change. When passing through the modulation waveguide assembly 211, the phase change continues to occur under the action of the heating electrode. By changing the voltage connected to the modulation electrode circuit 23, the phase adjustment of the optical signal is realized, so that the final output to The optical signal output from the waveguide assembly 213 is the target optical signal.

In some other embodiments, when the optical signal is transmitted in the input waveguide assembly 212, a phase shift occurs, which may specifically include: when the optical signal passes through the input straight waveguide 2121 and is transmitted to the input branch waveguide 2122, a phase shift occurs and multiple channels are generated. light signal. After the optical signal is input into the waveguide assembly 212, it is input into the straight waveguide 2121 and the branch waveguide 2122 in sequence for transmission.

In the input straight waveguide 2121, the optical signal is transmitted along a straight line, the propagation direction of the light and the vibration direction are symmetrical to each other, and no polarization phenomenon occurs. When the optical signal enters the input branch waveguide 2122, when the shape of the input branch is a Y-shaped branch, the optical signal is divided into two paths, one optical signal is transmitted along the upper branch of the Y-shaped branch, and the other optical signal is transmitted along the Y-shaped branch At this time, due to the change of the propagation direction of the optical signal, the propagation direction and the vibration direction of the two optical signals are asymmetrical, so that the polarization rotation of the two optical signals occurs. phase changes.

In some other embodiments, steps S101-S102 may specifically include: heating the heating electrode circuit 22 at the position corresponding to the upper modulation waveguide 2111 when the multiple optical signals pass through the upper modulation waveguide 2111 and the lower modulation waveguide 2112; and/or , heating the heating electrode circuit 22 at the position corresponding to the lower modulation waveguide 2112, so that at least one multi-channel optical signal undergoes a secondary phase shift, by heating the modulation electrode circuit 23 on the upper modulation waveguide 2111; and/or, by The modulation electrode circuit 2323 on the lower modulation waveguide 2112 is heated to adjust the phase shift of at least one of the multiple optical signals, so that the optical signals output from the upper modulation waveguide and the lower modulation waveguide 2112 to the output waveguide assembly 213 and merged is the target optical signal, and the power of the target optical signal is less than the power of the optical signal.

Through the two optical signals of the input branch, one path is transmitted through the upper modulation waveguide 2111, and the other path is transmitted through the lower modulation waveguide 2112. At this time, the heating electrode circuit 22 on the upper modulation waveguide 2111 can be heated, so that through the upper modulation waveguide 2111 The phase of the optical signal changes; or the heating electrode circuit 22 on the lower modulation waveguide 2112 is heated, so that the phase of the optical signal passing through the upper modulation waveguide 2111 changes; or the heating electrode circuit 22 on the upper modulation waveguide 2111 and the lower The heating electrode circuit 22 on the modulation waveguide 2112 is heated, so that the phase changes of the optical signals passing through the upper modulation waveguide 2111 and the lower modulation waveguide 2112 occur.

Next, for the modulation waveguide branch where the optical signal with phase change is located, the modulation waveguide branch can be the upper modulation waveguide 2111 branch or the lower modulation waveguide branch, and the modulation electrode 232 on the modulation waveguide branch can be heated, Realize the phase adjustment of the modulated waveguide branch, so that the phase difference of the optical signals when one or two modulated optical signals are transmitted through the output branch waveguide 2131 and finally merged into the output straight waveguide 2132 is zero. At this time, from The optical signal output by the output straight waveguide 2132 is the target optical signal, and the optical power of the target optical signal is guaranteed to be lower than the optical power of the optical signal initially input to the input straight waveguide 2121 .

In some embodiments, specifically, the input optical signal passes through the input straight waveguide 2121, enters the Y-shaped branch and is divided into two paths of light, and the two paths of light generate polarization rotation. Clockwise rotation, the right light entering the lower branch rotates counterclockwise, and both produce a certain rotation angle. It should be noted that whether the optical signals input to the upper branch and the lower branch rotate counterclockwise or clockwise, a pre-test is required, for example, a calibration test is performed after the optical attenuator is manufactured or before the optical power attenuation experiment , and then determine the polarization rotation direction of the two optical signals passing through the input branch waveguide 2122 .

It can be understood that the two optical signals respectively pass through the upper and lower modulation waveguides 2112, and the heating electrode circuits 22 are arranged at the corresponding positions of the upper modulation waveguide and the lower modulation waveguide 2112, and the heating electrodes are heated. Under the action, the polarization of the two optical signals continues to rotate, but the polarization direction is irregular. For example, under the influence of the heating electrode circuit 22, the optical signal in the upper branch rotates from clockwise to counterclockwise, and the optical signal in the lower branch rotates counterclockwise. Continue to rotate counterclockwise and the rotation angle increases continuously. At this time, the heat generated in the lower branch modulation electrode circuit 23 can be adjusted, specifically, the voltage connected to the modulation electrode circuit 23 can be changed, so that the optical signal in the lower branch The rotation angle of the optical signal becomes smaller, and at the same time, the access voltage of the modulation electrode 232 in the upper branch can be fine-tuned, so that the angle of the polarization rotation angle of the optical signal in the upper branch and the polarization rotation angle of the optical signal in the lower branch add to zero . Finally, the adjusted two optical signals merge at the output Y branch and interfere to form an optical signal. At this time, the optical signal has no polarization rotation and has a small PDL.

It should be noted that, in all embodiments of the present invention, the way of heating the heating electrode circuit 22 and the modulating electrode circuit 23 can be understood as connecting the power supply voltage to the conductive electrodes of the two electrode circuits. The manner of adjusting the heat generated by the heating electrode circuit 22 and the modulating electrode circuit 23 may be to change the magnitude of the power supply voltage connected to the two electrode circuits.

In some embodiments, the heating electrode circuit 22 can be used in such a way that, for example, a power supply voltage is connected to the heating electrode circuit 22 as required, so that the heating electrode generates heat and transmits the heat to the waveguide core layer of the upper modulation waveguide 2111 to realize Temperature adjustment changes the phase of the optical signal, so that the signal of the up-modulation waveguide 2111 and the optical signal of the down-modulation waveguide 2112 are merged through the output Y-shaped branch after being adjusted by phase shift, interfere and output through the output straight waveguide, and the two original phases After the signal with the same amplitude is adjusted, it becomes two signals with the same amplitude but different phases. After superposition, the intensity of the original signal will be changed to realize the attenuation of the optical signal. When the phase difference between the upper and lower branch signals is 180 degrees, the output signal strength is 0, and the attenuator can be used as an optical switch.

In some embodiments, the modulating electrode circuit 23 can function in such a way that, for example, along the direction of optical signal propagation, on the opposite sides of the heating electrode on the modulating waveguide 2111 of the optical attenuator, one or more The modulation electrode circuit 23, in the actual use process, can adjust the polarization angle of the optical signal by heating and adjusting the modulation electrode 232 to generate thermal stress, so that the two optical signals passing through the upper modulation waveguide 2111 and the lower modulation waveguide 2112 are output in a Y-shaped The rotation angles at the confluence of the branches are summed and canceled to obtain a smaller PDL value.

It can be understood that, in the embodiment of the present invention, along the direction of light transmission, one or more modulation electrode loops 23 are arranged on the opposite sides of the heating electrode on the modulation waveguide assembly 211 of the optical attenuator. During the process, the PDL can be reduced by heating the modulation electrode 232 to adjust the rotation angle of the polarized light, so as to reduce the optical jitter problem of the communication link.

It should be understood that references to "some embodiments" or "other embodiments" throughout this specification mean that a particular feature, structure, or characteristic related to the embodiments is included in at least one embodiment of the present invention. Thus, appearances of "in some embodiments" or "in other embodiments" throughout the specification are not necessarily referring to the same embodiments. Furthermore, the particular features, structures or characteristics may be combined in any suitable manner in one or more embodiments. It should be understood that in various embodiments of the present invention, the sequence numbers of the above-mentioned processes do not mean the order of execution, and the execution order of each process should be determined by its functions and internal logic, rather than by the embodiment of the present invention. The implementation process constitutes any limitation. The serial numbers of the above embodiments of the present invention are for description only, and do not represent the advantages and disadvantages of the embodiments.

It should be noted that, in this document, the terms "comprising", "comprising" or any other variation thereof are intended to cover a non-exclusive inclusion such that a process, method, or structure that includes a set of elements includes not only those elements, but also Other elements not expressly listed, or inherent to the process, method, or structure, are also included. Without further limitations, an element defined by the phrase "comprising a ..." does not preclude the presence of additional same elements in the process, method, or structure that includes the element.

The above description is only a preferred embodiment of the present invention, and is not used to limit the protection scope of the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention shall be included in the within the protection scope of the present invention.

Claims (13)

1. An optical attenuator, comprising:

the device comprises a waveguide component, a heating electrode loop, a modulation electrode loop and an upper cladding covering the upper layer of the waveguide component; the waveguide assembly includes: a modulation waveguide assembly;

the heating electrode loop is arranged on the upper cladding layer at a position corresponding to the modulation waveguide component;

the modulation electrode loop is arranged on the upper cladding along a first direction and is positioned on at least one side of the heating electrode loop; the first direction is a light transmission direction;

when the optical signal is transmitted to the modulation waveguide component, the optical signal generates a multipath polarized optical signal under the action of the thermal effectiveness of the heating electrode loop, and the polarization angles of the multipath polarized optical signal are adjusted under the action of the thermal effectiveness of the modulation electrode loop so as to be mutually offset.

2. The optical attenuator of claim 1, wherein the waveguide assembly further comprises: an input waveguide assembly and an output waveguide assembly; the input waveguide assembly, the modulation waveguide assembly and the output waveguide assembly are connected in sequence;

the optical signal is transmitted through the input waveguide assembly to generate a plurality of paths of optical signals with polarization rotation, and when the plurality of paths of optical signals are transmitted to the modulation waveguide assembly, secondary polarization rotation is generated under the action of the thermal effectiveness of the heating electrode loop to form the plurality of paths of polarized optical signals, and the rotation angle of the plurality of paths of polarized optical signals is adjusted under the action of the thermal effectiveness of the modulation electrode loop, so that the polarization angles of the plurality of paths of polarized optical signals are mutually cancelled when the plurality of paths of polarized optical signals are transmitted to the output waveguide assembly.

3. The optical attenuator of claim 1 or 2,

the modulation electrode loop comprises a plurality of loops; the modulating electrode loops are sequentially arranged on the upper cladding layer along a first direction with or without gaps, and are positioned on at least one side of the heating electrode loop.

4. The optical attenuator of claim 1 or 2,

the modulation electrode loop comprises a modulation electrode and first conductive electrodes positioned at two ends of the modulation electrode, and the modulation electrode is respectively connected with the positive electrode and the negative electrode of a power supply through the first conductive electrodes to form the modulation electrode loop;

the heating electrode loop comprises a heating electrode and second conductive electrodes positioned at two ends of the heating electrode, and the heating electrode is respectively connected with the positive electrode and the negative electrode of a power supply through the second conductive electrodes to form the heating electrode loop.

5. The optical attenuator of claim 2,

the input waveguide assembly includes: the input straight waveguide and the input branch waveguide are connected in sequence;

wherein the optical signal generates a plurality of optical signals with polarization rotation when the input straight waveguide is transmitted to the input branch waveguide.

6. The optical attenuator of any one of claims 1 to 5, wherein the modulation waveguide assembly comprises: an upper modulation waveguide and a lower modulation waveguide;

the heating electrode loop is arranged on the upper cladding layer at a position corresponding to the upper modulation waveguide; and/or the heating electrode loop is arranged on the upper cladding layer at a position corresponding to the lower modulation waveguide;

the optical signal is transmitted through the input waveguide assembly to generate a plurality of optical signals with polarization rotation, and when the plurality of optical signals are transmitted to the upper modulation waveguide and the lower modulation waveguide, the plurality of optical signals are under the action of the thermal effect of the heating electrode loop at the corresponding position of the upper modulation waveguide; and/or, under the action of the thermal effect of the heating electrode loop at the position corresponding to the lower modulation waveguide, performing secondary polarization rotation to form at least one path of polarized light signal, and under the action of the thermal effect of the modulation electrode loop, adjusting the rotation angle of the at least one path of polarized light signal to enable the at least one path of polarized light signal and other paths of polarized light signals to be mutually offset.

7. The optical attenuator of claim 6, wherein the output waveguide assembly comprises: the output branch waveguide and the output straight waveguide are sequentially connected;

after the rotation angle of the at least one path of polarized light signal is adjusted by the modulation electrode loop, the at least one path of polarized light signal and the other paths of light signals can be mutually offset, a target light signal is formed at one end of the branched waveguide connected with the output straight waveguide through the output branched waveguide, and the target light signal is output through the output straight waveguide.

8. The optical attenuator of claim 6,

the optical attenuator further includes: the waveguide assembly comprises a lower cladding layer and a substrate, wherein the lower cladding layer is positioned below the waveguide assembly, and the substrate is positioned below the lower cladding layer.

9. The optical attenuator of claim 4, wherein the heating electrode and the modulating electrode are made of metal or alloy.

10. The optical attenuator of claim 1,

when an optical signal is transmitted to the modulation waveguide component in the waveguide component, heating the modulation waveguide component based on the heating electrode loop so as to perform phase shift adjustment on the optical signal;

heating the modulation electrode loop to enable the modulation electrode loop to perform secondary phase shift adjustment on the optical signal subjected to phase shift adjustment, and forming a target optical signal when the optical signal subjected to secondary phase shift adjustment is output to the modulation waveguide assembly, wherein the power of the target optical signal is smaller than that of the optical signal.

11. The optical attenuator of claim 2,

when the optical signal is transmitted through the input waveguide component, a phase shift occurs, when the optical signal with the phase shift passes through the modulation waveguide component, a secondary phase shift occurs, and by heating the modulation electrode loop, the phase shift of the optical signal with the secondary phase shift is adjusted, so that the optical signal output from the modulation waveguide component to the output waveguide component is a target optical signal, and the power of the target optical signal is smaller than that of the optical signal.

12. The optical attenuator of claim 5,

when the optical signal passes through the input straight waveguide and is transmitted to the input branch waveguide, phase shift is generated and a plurality of optical signals are generated.

13. The optical attenuator of claim 6,

when multiple optical signals pass through the upper modulation waveguide and the lower modulation waveguide, heating an electrode heating loop at a position corresponding to the upper modulation waveguide; and/or heating the heating electrode loop at the position corresponding to the lower modulation waveguide to enable at least one path of the multipath optical signals to generate secondary phase shift;

heating a modulation electrode loop on the upper modulation waveguide; and/or heating a modulation electrode loop on the lower modulation waveguide so as to perform phase shift adjustment on at least one path of the multiple paths of optical signals, so that the optical signals output to the output waveguide assembly from the upper modulation waveguide and the lower modulation waveguide and merged together are target optical signals, and the power of the target optical signals is less than that of the optical signals.

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