CN115811829A - Circuit board and manufacturing method thereof - Google Patents
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Abstract
一种电路板,包括位于外侧的第一导电层,所述第一导电层包括多个第一连接垫。每个第一连接垫上凸设有绝缘的凸块,所述凸块的表面包覆有金属层,所述金属层与所述第一连接垫相连接。本申请还提供上述电路板的制作方法。
A circuit board includes a first conductive layer on the outside, and the first conductive layer includes a plurality of first connection pads. An insulating bump protrudes from each first connection pad, the surface of the bump is covered with a metal layer, and the metal layer is connected to the first connection pad. The present application also provides a manufacturing method of the above-mentioned circuit board.
Description
技术领域technical field
本发明涉及一种电路板领域,尤其涉及一种具有导电柱的电路板及其制作方法。The invention relates to the field of circuit boards, in particular to a circuit board with conductive columns and a manufacturing method thereof.
背景技术Background technique
电路板的表面具有多个焊垫,用于与各类电子元器件(例如芯片)相焊接。在高密度趋势下,焊垫越来越小,为提高焊接良率和可靠性,提出了采用铜柱代替焊垫进行焊接的方法。铜柱凸出于电路板表面的导电层外,其通过电镀形成。然而,工业生产中,受限于电镀设备(如传统的龙门式或垂直连续电镀设备)及药水,电镀的均匀性较差;且由于形成铜柱的节点在所述电路板的表面上分布不均匀,导致电镀时所产生的电流密度分布不均匀,使得电镀形成的多个铜柱的高度差异较大,无法满足封装的要求。The surface of the circuit board has a plurality of welding pads for welding with various electronic components (such as chips). Under the trend of high density, the welding pads are getting smaller and smaller. In order to improve the welding yield and reliability, a method of using copper pillars instead of welding pads for welding is proposed. The copper pillars protrude from the conductive layer on the surface of the circuit board and are formed by electroplating. However, in industrial production, limited by electroplating equipment (such as traditional gantry type or vertical continuous electroplating equipment) and liquid medicine, the uniformity of electroplating is relatively poor; Uniformity, resulting in uneven distribution of current density generated during electroplating, resulting in a large difference in height of multiple copper pillars formed by electroplating, which cannot meet the requirements of packaging.
发明内容Contents of the invention
有鉴于此,本发明提供一种解决上述技术问题的电路板的制作方法及由此方法制作形成的电路板。In view of this, the present invention provides a method for manufacturing a circuit board and a circuit board formed by the method to solve the above-mentioned technical problems.
本申请第一方面提供一种电路板,包括位于外侧的第一导电层,所述第一导电层包括多个第一连接垫。每个第一连接垫上凸设有绝缘的凸块,所述凸块的表面包覆有金属层,所述金属层与所述第一连接垫相连接。The first aspect of the present application provides a circuit board, including a first conductive layer on the outside, and the first conductive layer includes a plurality of first connection pads. An insulating bump protrudes from each first connection pad, the surface of the bump is covered with a metal layer, and the metal layer is connected to the first connection pad.
本申请第二方面提供一种电路板的制作方法,包括以下步骤:The second aspect of the present application provides a method for manufacturing a circuit board, comprising the following steps:
提供电路基板,包括位于外侧的第一金属层;providing a circuit substrate, including a first metal layer on the outside;
在所述第一金属层上形成一绝缘层;forming an insulating layer on the first metal layer;
去除部分绝缘层以形成多个绝缘的凸块;removing a portion of the insulating layer to form a plurality of insulating bumps;
在所述凸块的表面形成金属层,其中,所述金属层与所述第一金属层相连接;forming a metal layer on the surface of the bump, wherein the metal layer is connected to the first metal layer;
在所述第一金属层上进行线路制作形成第一导电层,其中,所述第一导电层包括多个第一连接垫,每个第一连接垫与相应的金属层相连接。A circuit is fabricated on the first metal layer to form a first conductive layer, wherein the first conductive layer includes a plurality of first connection pads, and each first connection pad is connected to a corresponding metal layer.
本申请提供的电路板及其制作方法中,通过去除所述绝缘层的部分形成多个凸块,并在所述凸块的表面电镀包覆一层金属层即制得导电柱,相较现有电镀形成的导电柱,缩短了电镀镀层及时间,提高了电镀效率,且提高了导电柱的高度的一致性。且在所述导电柱与电子元器件相连时,所述凸块可提供硬质支撑。In the circuit board and its manufacturing method provided by the present application, a plurality of bumps are formed by removing part of the insulating layer, and a metal layer is electroplated on the surface of the bumps to obtain a conductive column. The conductive column formed by electroplating shortens the electroplating layer and time, improves the electroplating efficiency, and improves the consistency of the height of the conductive column. And when the conductive pillars are connected with electronic components, the bumps can provide hard support.
附图说明Description of drawings
图1至图10为本申请一实施方式的电路板的制作流程的截面示意图。1 to 10 are schematic cross-sectional views of a manufacturing process of a circuit board according to an embodiment of the present application.
主要元件符号说明Description of main component symbols
电路板 100
双面基板 10Double-
盲孔 101
第一金属层 11
第一绝缘层 12First
第三金属层 13
导电结构 102
第三导电层 130third
第二绝缘层 21Second
第二金属层 22
电路基板 30
绝缘层 40
凸块 41
金属层 42
第一导电层 110first
第二导电层 120second
第一连接垫 111
第二连接垫 121
第一防焊层 61First
第二防焊层 62
防氧化层 70
如下具体实施方式将结合上述附图进一步说明本发明。The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings.
具体实施方式Detailed ways
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some of the embodiments of the application, not all of them.
除非另有定义,本文所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。本文中在本申请的说明书中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制本申请。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terms used herein in the specification of the application are only for the purpose of describing specific embodiments, and are not intended to limit the application.
下面结合附图,对本申请的一些实施方式作详细说明。在不冲突的情况下,下述的实施方式及实施方式中的特征可以相互组合或替换。Some implementations of the present application will be described in detail below in conjunction with the accompanying drawings. In the case of no conflict, the following embodiments and features in the embodiments can be combined or replaced with each other.
请参阅图1至图10,本申请第一实施方式提供一种电路板100的制作方法,其包括以下步骤:Please refer to FIG. 1 to FIG. 10 , the first embodiment of the present application provides a method for manufacturing a
步骤S1,请参阅图1,提供一双面基板10,并在所述双面基板10上形成盲孔101。Step S1 , please refer to FIG. 1 , providing a double-
所述双面基板10包括层叠设置的第一金属层11、第一绝缘层12和第三金属层13。所述盲孔101贯通所述第三金属层13和所述第一绝缘层12,且所述第一金属层11的部分从所述盲孔101中露出。所述盲孔101的数量可根据实际需要进行设定,本申请不作限制。The double-
所述第一绝缘层12为本领域常用的介电材料,如聚酰亚胺、环氧树脂等。所述第一金属层11和所述第三金属层13的材质可包含但不仅限于铜、金、银等。本实施方式中,所述第一金属层11和所述第三金属层13为铜箔。The first
步骤S2,请参阅图2,在所述盲孔101中形成导电结构102,以电连接所述第一金属层11和所述第三金属层13。Step S2 , please refer to FIG. 2 , forming a
本实施方式中,所述导电结构102为导电孔。所述导电孔可采用以下方式制得:先采用黑孔/黑影制程在所述盲孔101的内壁上形成晶种层,再采用电镀的方式在所述晶种层上形成镀铜层,以形成所述导电孔。所述晶种层还可以采用化学镀铜的方式形成在所述盲孔101的内壁上。在其他方式中,所述导电结构102可以为导电柱,其可通过在所述盲孔101中填充导电材料的方式形成。In this embodiment, the
步骤S3,请参阅图3,在所述第三金属层上进行线路制作,形成第三导电层130。所述第三导电层130通过所述导电结构102与所述第一金属层11电连接。In step S3 , please refer to FIG. 3 , performing circuit fabrication on the third metal layer to form a third
步骤S4,请参阅图4和图5,提供第二绝缘层21和第二金属层22,并将所述第二绝缘层21和所述第二金属层22依次压合在所述第三导电层130上,得到一电路基板30。Step S4, please refer to FIG. 4 and FIG. 5, providing a second insulating
所述第一金属层11和所述第二金属层22位于所述电路基板30的外侧,并相对设置。所述第二绝缘层21覆盖所述第三导电层130并与所述第一绝缘层12相连接形成一个整体。在其他实施方式中,所述第三导电层130可以省略,或者所述第三导电层130的数量可以为多个,或者所述第二金属层22和所述第二绝缘层21可以省略,本申请不作限制。The
所述第二绝缘层21为本领域常用的介电材料,如聚酰亚胺、环氧树脂等。所述第二金属层22的材质可包含但不仅限于铜、金、银等。本实施方式中,所述第二金属层22为铜箔。The second insulating
步骤S5,请参阅图5,在所述第一金属层11背离所述第一绝缘层12的一侧形成一绝缘层40。所述绝缘层40覆盖所述第一金属层11背离所述第一绝缘层12的一侧。Step S5 , please refer to FIG. 5 , forming an insulating
所述绝缘层40的材质可以为感光型树脂,例如感光型聚酰亚胺,或为非感光型树脂,例如ABF(Ajinomoto Build-up Film)材料。The material of the insulating
步骤S6,请参阅图6,去除部分绝缘层40以形成多个绝缘的凸块41。In step S6 , please refer to FIG. 6 , removing part of the insulating
所述凸块41由剩余的绝缘层40构成。所述多个凸块41间隔设置于所述第一金属层11上。所述凸块41大致为柱状,所述凸块41的直径为100~400μm。在一些实施方式中,所述凸块41的直径为200~300μm。所述凸块41的高度a为20~200μm。在一些实施方式中,所述凸块41的高度a为30~50μm。本实施方式中,沿着所述电路板的厚度方向(即沿着所述凸块41的高度方向),所述凸块41的截面形状为倒梯形。在其他实施方式中,所述凸块41的截面形状还可为梯形、矩形等,本申请不作限制。The
本实施方式中,所述绝缘层40的材质为感光型树脂。步骤S6具体包括:对所述绝缘层40进行曝光显影,以去除部分绝缘层40,并形成多个凸块41。即,通过曝光、显影去除部分绝缘层40。在其他实施方式中,还可通过激光蚀刻、等离子体蚀刻等物理蚀刻或化学蚀刻、机械切割等其他方式去除部分绝缘层40,以形成所述多个凸块41。In this embodiment, the insulating
步骤S7,请参阅图7,在所述凸块41表面形成金属层42,得到导电柱50。Step S7 , please refer to FIG. 7 , forming a
所述金属层42包覆所述凸块41外露于所述电路基板30的所有表面,并与所述第一金属层11相连接。所述凸块41和包覆于其上的金属层42共同构成所述导电柱50,所述导电柱50与所述第一金属层11电连接。The
本实施方式中,通过电镀的方式在所述凸块41的表面形成所述金属层42。具体的,先采用黑影制程在所述凸块41的表面上形成晶种层,再采用电镀的方式再所述晶种层上形成所述金属层42。在其他实施方式中,还可通过印刷等其他方式在所述凸块41的表面形成所述金属层42。In this embodiment, the
所述金属层42的厚度b为5~35μm。在一些实施方式中,所述金属层42的厚度b为10~15μm。The thickness b of the
步骤S8,请参阅图8,在所述第一金属层和所述第二金属层上进行线路制作分别形成第一导电层110和第二导电层120。Step S8 , please refer to FIG. 8 , performing circuit fabrication on the first metal layer and the second metal layer to form a first
所述第一导电层110和所述第二导电层120采用影像转移工艺及蚀刻工艺形成。The first
所述第一导电层110包括多个第一连接垫111,每个第一连接垫111与相应的导电柱50的金属层42电连接。所述第二导电层120包括多个第二连接垫121。The first
步骤S9,请参阅图9,在所述第一导电层110上形成第一防焊层61,并在所述第二导电层120上形成第二防焊层62,得到电路板100。Step S9 , please refer to FIG. 9 , forming a first solder resist
所述第一防焊层61覆盖所述第一导电层110背离所述第一绝缘层12的一侧,且所述第一连接垫111和所述导电柱50露出于所述第一防焊层61外。所述第二防焊层62覆盖所述第二导电层120背离所述第二绝缘层21的一侧,且所述第二连接垫121暴露于所述第二防焊层62外。The first solder resist
本实施方式中,使用液体感光防焊油墨通过印刷、烘烤、UV曝光、显影工序形成所述第一防焊层61和所述第二防焊层62。In this embodiment, the first solder resist
所述电路板100还包括贯通所述第二绝缘层21并电连接所述第二导电层120和所述第三导电层130的导电结构(图未示)。所述导电结构可以为导电孔或导电柱。The
步骤S10,请参阅图10,对所述第一连接垫111、所述导电柱50以及所述第二连接垫121进行表面处理,形成导电的防氧化层70。所述防氧化层70覆盖所述第一连接垫111背离所述第一绝缘层12的表面、所述金属层42背离所述凸块41的表面以及所述第二连接垫121背离所述第二绝缘层21的表面。In step S10 , please refer to FIG. 10 , surface treatment is performed on the
所述防氧化层70采用化学沉积或电镀镍金、镍钯金,化学锡、化学锡银、化学锡银铜、电镀锡、电镀锡银、电镀锡银铜或化学银等工艺制成。The
请参阅图10,本申请实施方式还提供一种电路板100,包括依次层叠设置的第二导电层120、第二绝缘层21、第三导电层130、第一绝缘层12和第一导电层110、设置于所述第一导电层110上的多个导电柱50以及分别设置于所述第一导电层110和所述第二导电层120上的第一防焊层61和第二防焊层62。所述第二绝缘层21和所述第一绝缘层12连接为一体。所述第一导电层110包括多个第一连接垫111,所述第二导电层120包括多个第二连接垫121。所述多个导电柱50设置于所述多个第一连接垫111上。所述导电柱50包括设置于所述第一连接垫111上的绝缘的凸块41以及包覆所述凸块41的表面的金属层42。所述金属层42与所述第一连接垫111相连接。所述第一防焊层61覆盖所述第一导电层110背离所述第一绝缘层12的一侧,且所述第一连接垫111和所述导电柱50露出于所述第一防焊层61外。所述第二防焊层62覆盖所述第二导电层120背离所述第二绝缘层21的一侧,且所述第二连接垫121暴露于所述第二防焊层62外。Please refer to FIG. 10 , the embodiment of the present application also provides a
本申请实施方式的电路板100及其制作方法中,通过去除所述绝缘层40的部分形成多个凸块41,并在所述凸块41的表面电镀包覆一层金属层42即制得导电柱50,相较现有电镀形成的导电柱,缩短了电镀镀层及时间,提高了电镀效率,且提高了导电柱50的高度的一致性。且在所述导电柱50与电子元器件相连时,所述凸块41可提供硬质支撑。In the
以上所述,仅是本发明的较佳实施方式而已,并非对本发明任何形式上的限制,虽然本发明已是较佳实施方式揭露如上,并非用以限定本发明,任何熟悉本专业的技术人员,在不脱离本发明技术方案范围内,当可利用上述揭示的技术内容做出些许更动或修饰为等同变化的等效实施方式,但凡是未脱离本发明技术方案内容,依据本发明的技术实质对以上实施方式所做的任何简单修改、等同变化与修饰,均仍属于本发明技术方案的范围内。The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment, it is not intended to limit the present invention. Anyone familiar with this field , without departing from the scope of the technical solution of the present invention, when the technical content disclosed above can be used to make some changes or be modified into equivalent implementations with equivalent changes, but as long as it does not depart from the technical solution of the present invention, the technical content of the present invention In essence, any simple modifications, equivalent changes and modifications made to the above embodiments still fall within the scope of the technical solution of the present invention.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060223303A1 (en) * | 2005-04-04 | 2006-10-05 | Seiko Epson Corporation | Semiconductor device and method of manufacturing the same |
| CN101557927A (en) * | 2006-12-27 | 2009-10-14 | 日立化成工业株式会社 | Gravure plate and substrate having conductor layer pattern using the same |
| CN102318452A (en) * | 2009-02-12 | 2012-01-11 | 住友电木株式会社 | Resin composition for wiring board, resin sheet for wiring board, composite body, method for producing composite body, and semiconductor device |
| CN108156746A (en) * | 2016-12-06 | 2018-06-12 | 华邦电子股份有限公司 | Multilayer circuit board and method for manufacturing same |
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060223303A1 (en) * | 2005-04-04 | 2006-10-05 | Seiko Epson Corporation | Semiconductor device and method of manufacturing the same |
| CN101557927A (en) * | 2006-12-27 | 2009-10-14 | 日立化成工业株式会社 | Gravure plate and substrate having conductor layer pattern using the same |
| CN102318452A (en) * | 2009-02-12 | 2012-01-11 | 住友电木株式会社 | Resin composition for wiring board, resin sheet for wiring board, composite body, method for producing composite body, and semiconductor device |
| CN108156746A (en) * | 2016-12-06 | 2018-06-12 | 华邦电子股份有限公司 | Multilayer circuit board and method for manufacturing same |
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