CN115701814A - Mold device - Google Patents

Abstract

The application relates to a mold device for preparing a first substrate into a composite material, comprising a container, a positioning assembly and at least two metal meshes. The container is provided with a containing cavity and a first opening arranged along a first direction, and the first opening is communicated with the containing cavity. The positioning assembly is arranged in the accommodating cavity, a positioning cavity extending along the first direction is limited in the positioning assembly, and the positioning cavity is communicated with the first opening so that the first base material can enter the positioning cavity through the first opening. At least two metal meshes are arranged at intervals along the first direction and are positioned in the positioning cavity by means of the positioning assembly. Wherein, a clamping space for clamping the first substrate to prepare the composite material is formed between the adjacent metal meshes. The application of the die device is used for positioning the metal net and the first base material, the diamond with high hardness in the first base material is prevented from being directly processed, and the difficulty degree and the preparation cost of preparation are reduced.

Description

Mold device

technical field

The present application relates to the technical field of semiconductor material preparation, in particular to a mold device.

Background technique

In order to improve the thermal conductivity of semiconductor packaging materials, diamond has broad application prospects in composite materials due to its high thermal conductivity. However, due to the extremely high hardness of diamond, the preparation of composite materials is difficult and expensive.

Contents of the invention

Based on this, a mold device capable of improving the ease of preparation of composite materials is provided, so as to solve the problems of difficulty and high cost in preparation of composite materials.

A mold device for preparing a first substrate to form a composite material, comprising:

The container has an accommodating cavity and a first opening opened along a first direction, and the first opening communicates with the accommodating cavity;

The positioning component is arranged in the receiving cavity; the positioning component defines a positioning cavity extending along the first direction, and the positioning cavity communicates with the first opening, so that the first base material can enter the positioning cavity through the first opening; as well as

At least two metal meshes are spaced apart from each other along the first direction and positioned in the positioning cavity by means of the positioning component;

Wherein, a clamping space for clamping the first base material to prepare a composite material is formed between adjacent metal meshes.

In one of the embodiments, the positioning assembly includes first positioning elements and second positioning elements arranged alternately and at intervals along the first direction;

Positioning holes are formed on the first positioning member and the second positioning member along the first direction, and all the positioning holes are jointly defined to form a positioning cavity;

A limiting space for limiting a metal mesh is formed between adjacent first positioning pieces and second positioning pieces.

In one of the embodiments, the positioning component also includes a positioning structure;

The positioning structure fits between adjacent first positioning pieces and second positioning pieces to form a limiting space.

In one of the embodiments, the positioning structure includes a protruding structure;

The protruding structure is provided on the side of the first positioning member facing the second positioning member; and/or the protruding structure is provided on the side of the second positioning member facing the first positioning member;

Adjacent first positioning pieces and second positioning pieces are spaced apart from each other by means of the protruding structures to form a limiting space.

In one of the embodiments, the positioning structure includes a protruding structure and a concave structure;

At least one of the protruding structure and the recessed structure is provided on the side of the first positioning member facing the adjacent second positioning member, and at least the other of the protruding structure and the recessing structure is provided on the second positioning member facing the adjacent side. one side of the first positioning member;

Adjacent first positioning pieces and second positioning pieces can be separated by at least part of the protruding structure, and/or can be spaced by at least part of the matching protruding structure and concave structure, so as to form a limiting space.

In one of the embodiments, one of the protruding structure and the recessed structure is provided on the side of the first positioning member facing the adjacent second positioning member, and the other of the protruding structure and the recessed structure is provided on the second positioning member. One side of the piece facing the adjacent first positioning piece;

Adjacent first positioning pieces and second positioning pieces can be separated by at least part of the protruding structure, and/or can be spaced by at least part of the matching protruding structure and concave structure, so as to form a limiting space.

In one of the embodiments, the side of the first positioning member facing the adjacent second positioning member is provided with a protruding structure and a concave structure;

The second positioning part is provided with a protruding structure and a concave structure on one side facing the adjacent first positioning part;

Adjacent first positioning pieces and second positioning pieces can be separated by at least part of the protruding structure, and/or can be spaced by at least part of the matching protruding structure and concave structure, so as to form a limiting space.

In one of the embodiments, a matching portion is provided on the metal mesh;

The matching part can cooperate with the positioning structure, so that the metal mesh is confined between the first positioning part and the second positioning part.

In one of the embodiments, the end of the container away from the first opening has a stepped portion;

The stepped portion is configured to support the positioning assembly.

In one of the embodiments, a first channel is provided on the stepped portion;

The radial dimension of the first channel is smaller than the radial dimension of the first opening.

In the above-mentioned mold device, in the accommodating cavity of the container, the metal mesh and the first substrate are positioned through the positioning cavity defined by the positioning component, so that two adjacent metal meshes can reliably clamp the first substrate during the preparation process. material, thereby avoiding the direct processing of diamond with higher hardness in the first base material, thereby reducing the degree of difficulty and cost of preparation.

Description of drawings

Fig. 1 is the structural representation of the mold device of an embodiment of the present application;

FIG. 2 is a schematic structural view of a container according to an embodiment of the present application;

FIG. 3 is a schematic structural diagram of a metal mesh according to an embodiment of the present application;

Fig. 4 is a schematic structural diagram of a first positioning member according to an embodiment of the present application;

Fig. 5 is a schematic structural diagram of a second positioning member according to an embodiment of the present application;

Fig. 6 is a schematic structural diagram of a supporting member according to an embodiment of the present application;

FIG. 7 is a schematic structural diagram of an indenter according to an embodiment of the present application.

Explanation of reference signs:

100. Mold device; 110. Container; 111. Accommodating cavity; 112. First opening; 113. Step; 1131. First channel; 1132. Second channel; 120. Positioning component; 121. First positioning member; 1211, protruding structure; 122, second positioning part; 1221, recessed structure; A, positioning cavity; a, positioning hole; 130, metal mesh; 131, matching part; B, limiting space; 140, supporting part; 150, pressure head.

Detailed ways

In order to make the above-mentioned purpose, features and advantages of the present application more obvious and understandable, the specific implementation manners of the present application will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the application. However, the present application can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial" , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the application and simplifying the description, rather than indicating or implying the referred device or Elements must have certain orientations, be constructed and operate in certain orientations, and thus should not be construed as limiting the application.

In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present application, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

In this application, terms such as "installation", "connection", "connection" and "fixation" should be interpreted in a broad sense, for example, it can be a fixed connection or a detachable connection, unless otherwise clearly specified and limited. , or integrated; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise specified limit. Those of ordinary skill in the art can understand the specific meanings of the above terms in this application according to specific situations.

In the present application, unless otherwise clearly specified and limited, a first feature being "on" or "under" a second feature may mean that the first and second features are in direct contact, or that the first and second features are indirect through an intermediary. touch. Moreover, "above", "above" and "above" the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. "Below", "beneath" and "beneath" the first feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontally than the second feature.

It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions are for the purpose of illustration only and are not intended to represent the only embodiment.

In addition, the drawings are not drawn in a 1:1 scale, and the relative sizes of the elements are drawn in the drawings by way of example only and not necessarily in true scale.

In order to facilitate the understanding of the technical solution of the present application, prior to the detailed description, the composite materials used for packaging of existing semiconductor devices are firstly described.

The heat sink material commonly used in semiconductor packaging is a heat-dissipating packaging material with high thermal conductivity and low thermal expansion coefficient. It acts as a fixed support for the chip and dissipates heat, providing a stable working environment for the chip. Commonly used heat sink materials include tungsten-copper alloy, molybdenum-copper alloy, aluminum silicon carbide, copper-clad ceramic plate, etc., but these materials generally have relatively low thermal conductivity, which cannot meet the growing heat dissipation requirements of electronic components.

The thermal conductivity of diamond can reach 2000w/mk, which is a good heat dissipation packaging material, and diamond also has the characteristics of high hardness, which makes it extremely difficult to process, and the preparation of the whole diamond is difficult and expensive. Therefore, composite materials are usually prepared from diamond particles and metal materials, and the thermal expansion coefficient requirements of the composite materials are adjusted by designing the volume fraction of diamond particles, so as to match with semiconductor materials such as silicon carbide and gallium nitride, and have a relatively high High thermal conductivity can better meet the heat dissipation requirements of the chip.

For ease of description, the drawings only show structures related to the embodiments of the present application.

Figure 1 shows a schematic structural view of a mold device 100 in an embodiment of the present application, and Figure 2 shows a schematic structural view of a container 110 in an embodiment of the present application; Figure 3 shows a schematic structural view of a container 110 in an embodiment of the present application; Schematic diagram of the structure of the metal mesh 130 .

Referring to Fig. 1, and in conjunction with Fig. 2 and Fig. 3, a mold device 100 provided by an embodiment of the present application is used to prepare the first base material to form a composite material, including a container 110, a positioning component 120 and at least two metal meshes 130. The container 110 has an accommodating cavity 111 and a first opening 112 opened along a first direction, and the first opening 112 communicates with the accommodating cavity 111 . The positioning assembly 120 is arranged in the receiving cavity 111, and the positioning assembly 120 defines a positioning cavity A extending along the first direction. The positioning cavity A communicates with the first opening 112, so that the first substrate can pass through the first opening 112. Enter the positioning chamber A. At least two metal meshes 130 are spaced apart from each other along the first direction, and are positioned in the positioning cavity A by means of the positioning component 120 . Wherein, a clamping space for clamping the first base material to prepare a composite material is formed between adjacent metal meshes 130 .

The above-mentioned mold device 100, in the accommodating cavity 111 of the container 110, positions the metal mesh 130 and the first substrate through the positioning cavity A defined by the positioning component 120, so that two adjacent metal meshes 130 can be positioned during the manufacturing process. Reliable clamping of the first base material in the middle, thus avoiding the direct processing of the diamond with higher hardness in the first base material, thereby reducing the degree of difficulty and preparation in the process of processing the first base material to obtain a composite material cost.

It should be noted that the mold device 100 in this application can be applied in the preparation processes such as infiltration process, powder metallurgy process, stirring casting process, sintering process, etc., wherein, the sintering process includes but not limited to spark plasma sintering, hot pressing sintering process, high pressure sintering process, etc. This application takes the infiltration process as an example. The infiltration process is to heat the metal to a liquid state, infiltrate the diamond particles without pressure or with the assistance of pressure, and finally solidify into a composite material.

In combination with the mold device 100 in the present application, the first base material includes diamond, and the metal mesh 130 has a plurality of mesh holes, and the diameter of the mesh holes is larger than the particle diameter of diamond. In this way, it can be ensured that the diamond is confined between the two metal meshes 130 , and the aperture of the metal mesh 130 is prevented from being too large, so that the diamond cannot be clamped between the two layers of metal mesh 130 . Especially when preparing a multilayer composite material, diamonds are intercepted by the metal mesh 130, which can prevent the diamond on the upper layer in the mold device 100 from falling through the metal mesh 130 to a lower layer, so as to prevent the prepared multilayer composite material from being difficult to obtain. Maintain an even consistency with each layer of composite. The metal mesh 130 is limited between the first positioning member 121 and the second positioning member 122, which can limit the floating of the diamond particles and the metal mesh 130 in the metal solution during the preparation process of the composite material. In addition, the metal mesh 130 can also ensure the uniformity of the spreading of the diamond particles, thereby improving the thickness uniformity of the prepared composite material.

Further, the mold device 100 is used to prepare the first base material and the second base material to form a composite material. The second base material is centered on the first base material and symmetrically disposed on opposite sides of the two metal meshes 130 . Specifically, in some embodiments, the second substrate is a metal block. In this way, during the preparation process, the metal block is deformed, enters through the mesh of the metal mesh 130 and covers the diamond, and then is cooled and solidified to obtain a composite material.

"Deformation" means that the metal deforms during heating. What needs to be explained here is that the expansion phenomenon of an object due to temperature change is called "thermal expansion". Generally speaking, when the external pressure is constant, the volume of the substance increases when the temperature rises. During the heating process, the metal melts, and melting is a solid-liquid coexistence state in the melting process. At this time, no matter the solid phase metal or the liquid phase metal, "deformation" occurs, that is, its volume increases, and in the mold device 100 In the container 110, limited by the inner wall of the container 110, the gravity of the metal itself and other pressures, the metal deformation will enter through the mesh of the metal mesh 130, that is, fill the gap between the diamond and the metal mesh 130, and realize Coating of diamonds. That is, the prepared diamonds are "embedded" inside the composite material.

In some embodiments, the first substrate further includes metal powder. In this way, the coating effect on the diamond can be further ensured by means of the metal powder. Specifically, the metal powder is the same material as the metal block of the second substrate. In this way, the bonding strength of the composite material can be further improved, and the melting point of the metal can be easily controlled to ensure that the metal can be reliably melted to the coated diamond during the infiltration process. Exemplarily, the material of the metal powder and the metal block includes at least one of copper, silver, aluminum and nickel. The above-mentioned metal materials have better thermal conductivity, and the final prepared composite material has higher thermal conductivity, which is more suitable for the field of semiconductor heat dissipation.

It should be noted that the mold device 100 provided in the present application can either prepare only one layer of composite material, or simultaneously prepare a multi-layer composite material by means of multiple metal blocks and multiple metal meshes 130 in the mold device 100 . By means of the second base material metal block, both sides of the prepared composite material along the first direction are metal layers. After the cooled multi-layer composite material and the mold device 100 are taken out from the heating furnace, the single-layer composite material can be formed by cutting the multi-layer composite material at the metal layer. The cutting method can be, for example, wire cutting, laser cutting, diamond tool cutting, water jet cutting, etc., which is not limited here.

Among them, the multi-layer composite material prepared by the mold device 100 provided by the present application is bonded together by means of metal layers between each layer, so when it is cut, there will be no hindrance of diamond and metal mesh 130, so The processing difficulty is reduced, and the yield rate is improved. Moreover, the reserved metal layer is also easy for subsequent processing steps such as surface plating and packaging. Moreover, precisely because both sides of the composite material in the first direction are metal layers, the difficulty of grinding and polishing is reduced, and the surface flatness and roughness of the composite material are also greatly improved.

FIG. 4 shows a schematic structural view of the first positioning member 121 in an embodiment of the present application; FIG. 5 shows a schematic structural view of the second positioning member 122 in an embodiment of the present application.

Referring to FIG. 4 and FIG. 5 in conjunction with FIG. 1 , in some embodiments, the positioning assembly 120 includes first positioning members 121 and second positioning members 122 arranged alternately and at intervals along the first direction. The first positioning piece 121 and the second positioning piece 122 are provided with a positioning hole a along the first direction, and all the positioning holes a jointly define a positioning cavity A, and a positioning cavity A is formed between adjacent first positioning pieces 121 and second positioning pieces 122. A limiting space B for limiting a metal mesh 130 . Since the two adjacent metal meshes 130 limit the amount of the first base material that can be accommodated, that is, the size of the composite material that can be prepared is limited by the two adjacent metal meshes 130, so, by means of The first locating parts 121 and the second locating parts 122 arranged alternately at intervals can support and limit the metal mesh 130, thereby avoiding the displacement of the metal mesh 130 in the container 110 during the preparation process, thereby ensuring that the metal mesh 130 is displaced at the same time When preparing multi-layer composite materials, the structural dimensions of each layer of composite materials remain consistent. It should be noted that, in order to meet the thickness requirements of different composite materials, the dimensions of the first positioning member 121 and the second positioning member 122 in the first direction can be adjusted according to requirements, which is not limited here.

Please continue to refer to FIG. 4 and FIG. 5, in some embodiments, the positioning assembly 120 also includes a positioning structure, and the positioning structure is fitted between the adjacent first positioning member 121 and the second positioning member 122 to form a limit space B. In this way, by means of the positioning structure between the first positioning member 121 and the second positioning member 122 , a limiting space B for limiting the metal mesh 130 can be formed. Specifically, in some embodiments, the positioning structure includes a protruding structure 1211 , and the protruding structure 1211 is disposed on a side of the first positioning member 121 facing the second positioning member 122 . Adjacent first positioning members 121 and second positioning members 122 are spaced apart from each other by means of protruding structures 1211 to form a limiting space B. In this way, the protruding structure 1211 on the first positioning member 121 cooperates with the surface of the second positioning member 122 facing the first positioning member 121, thereby reliably clamping the metal mesh 130 between the first positioning member 121 and the second positioning member. between 122 pieces.

Specifically, in still some embodiments, the protruding structure 1211 is disposed on a side of the second positioning member 122 facing the first positioning member 121 . In this way, the protruding structure 1211 on the second positioning member 122 cooperates with the surface of the first positioning member 121 facing the second positioning member 122, thereby reliably clamping the metal mesh 130 between the first positioning member 121 and the second positioning member. between 122 pieces. Specifically, in some other embodiments, the protruding structure 1211 can also be provided on the side of the first positioning member 121 facing the second positioning member 122 and the side of the second positioning member 122 facing the first positioning member 121 .

In some embodiments, the positioning structure includes a protruding structure 1211 and a concave structure 1221, at least one of the protruding structure 1211 and the concave structure 1221 is disposed on the side of the first positioning member 121 facing the adjacent second positioning member 122 At least the other of the protruding structure 1211 and the concave structure 1221 is disposed on a side of the second positioning member 122 facing the adjacent first positioning member 121 . It should be noted that "at least" one of the protruding structure 1211 and the concave structure 1221, that is, the first positioning member 121 and the second positioning member 122 can be provided with either the protruding structure 1211 or the concave structure. The structure 1221 can also be provided with the protruding structure 1211 and the concave structure 1221 at the same time. During assembly, the first positioning member 121 and the second positioning member 122 cooperate with each other by means of the protruding structure 1211 and the concave structure 1221, thereby limiting the movement between the first positioning member 121 and the second positioning member 122, thereby ensuring The limiting effect on the metal mesh 130.

In some embodiments, the adjacent first positioning member 121 and the second positioning member 122 can form a distance by means of at least part of the protruding structure 1211 . In this way, in combination with some embodiments described later, by virtue of the surface of the protruding structure 1211 facing the second positioning member 122, and the surface of the second positioning member 122 facing the first positioning member 121, it is possible to achieve reliable positioning of the metal mesh 130 .

In yet other embodiments, the adjacent first positioning member 121 and the second positioning member 122 can form a space between the protruding structure 1211 and the recessed structure 1221 that are at least partly matched, so as to form a limiting space B. In this way, through the cooperation between the protruding structure 1211 and the concave structure 1221, the distance between the first positioning part 121 and the second positioning part 122 can be further reduced, so that the metal mesh 130 can be confined in a smaller space Inside, the movable range of the metal mesh 130 is further reduced. Moreover, the movement of the first positioning member 121 relative to the second positioning member 122 is more reliably limited by means of the depression of the concave structure 1221 , so that the positioning of the metal mesh 130 is more reliable. In the embodiment of the present application, the two surfaces of the metal mesh 130 in the first direction are attached to the first positioning piece 121 and the second positioning piece 122 respectively, that is, are clamped between the first positioning piece 121 and the second positioning piece 121 . Between the positioning pieces 122.

Specifically, in some embodiments, one of the protruding structure 1211 and the recessed structure 1221 is provided on the side of the first positioning member 121 facing the adjacent second positioning member 122, and the other of the protruding structure 1211 and the recessed structure 1221 One is disposed on a side of the second positioning member 122 facing the adjacent first positioning member 121 . It can be understood that, in this embodiment, there is only one of the protruding structure 1211 or the concave structure 1221 on the first positioning member 121 or the second positioning member 122 .

Specifically, in some implementations, adjacent first positioning members 121 and second positioning members 122 can form intervals by means of at least part of the protruding structures 1211 . In this way, the metal mesh 130 can be limited by means of the gap formed by the protruding structure 1211 . Specifically, in other embodiments, the adjacent first positioning member 121 and the second positioning member 122 can form a space between the protruding structure 1211 and the concave structure 1221 that are at least partly matched with each other, so as to form a limiting space B. In this way, by virtue of the cooperation of the protruding structure 1211 and the concave structure 1221 , the interval distance can be further reduced, thereby reducing the movable space of the metal mesh 130 .

Specifically, in some other embodiments, the side of the first positioning member 121 facing the adjacent second positioning member 122 is provided with a protruding structure 1211 and a concave structure 1221 . A protruding structure 1211 and a concave structure 1221 are provided on a side of the second positioning member 122 facing the adjacent first positioning member 121 . Adjacent first locating members 121 and second locating members 122 can form intervals by means of at least part of the protruding structures 1211, and/or can form intervals by means of at least part of the mating protruding structures 1211 and recessed structures 1221, so as to form a limit. bit space B. It can be understood that, in this embodiment, both the protruding structure 1211 and the concave structure 1221 are provided on the first positioning member 121 or the second positioning member 122 .

Further, a side of the first positioning member 121 facing the second positioning member 122 is provided with a plurality of protruding structures 1211 , and the plurality of protruding structures 1211 are arranged at intervals along the circumferential direction of the first positioning member 121 . A side of the second positioning member 122 facing the first positioning member 121 is provided with a plurality of recessed structures 1221 , and the plurality of recessed structures 1221 are arranged at intervals along the circumferential direction of the second positioning member 122 . Wherein, the plurality of protruding structures 1211 are in one-to-one correspondence with the plurality of recessed structures 1221 and cooperate with each other. In this way, by virtue of the cooperation between the plurality of protruding structures 1211 and the plurality of recessed structures 1221, the mutual movement between the first positioning member 121 and the second positioning member 122 can be restricted from multiple positions, so as to further ensure that the metal mesh 130 reliable limit.

Further, the first positioning member 121 is provided with four protruding structures 1211 on the side facing the second positioning member 122 , and the second positioning member 122 is provided with four concave structures 1221 on the side facing the first positioning member 121 . In the embodiment shown in FIG. 4 , both sides of the first positioning member 121 in the first direction are provided with protruding structures 1211 . In this way, when the first positioning piece 121 and the second positioning piece 122 are alternately arranged, it can be ensured that when the first positioning piece 121 is located between the two second positioning pieces 122, it can rely on the protruding structures 1211 on both sides to communicate with both sides at the same time. The concave structure 1221 on the second positioning member 122 cooperates to achieve a more stable positioning.

In some embodiments, the outer contour shape of the protruding structure 1211 matches the inner contour shape of the concave structure 1221 . In this way, it can ensure that the protruding structure 1211 and the concave structure 1221 are reliably matched. Specifically, in the embodiment shown in FIG. 4 and FIG. 5 , the orthographic projection of the protruding structure 1211 on a plane perpendicular to the first direction is circular, and the projection of the concave structure 1221 on a plane perpendicular to the first direction is circular. The orthographic projection is circular. Understandably, the protruding structure 1211 is a cylindrical structure. In this way, the ease of processing the protruding structure 1211 and the concave structure 1221 can be improved. Of course, the protruding structure 1211 and the concave structure 1221 can also be in other shapes, which are not limited here.

In other embodiments, the positioning structure may also be in other structural forms. For example, the side of the first positioning member 121 facing the second positioning member 122 has a convex arc segment in the first direction, and the side of the second positioning member 122 facing the first positioning member 121 has a concave portion in the first direction. arc segment. In this way, the first positioning part 121 and the second positioning part 122 cooperate with each other by means of the arc segment, and the mutual movement between the first positioning part 121 and the second positioning part 122 can also be restricted. The arc segment can be a continuous arc segment to form a "wave"-like structure, or it can be an arc segment spaced apart from each other, as long as the mutual interaction between the first positioning member 121 and the second positioning member 122 can be realized. Just cooperate.

Please refer to FIG. 3 again. In some embodiments, the metal mesh 130 is provided with a matching portion 131, and the matching portion 131 can cooperate with the positioning structure, so that the metal mesh 130 is limited to the first positioning member 121 and the second positioning member 122. between. In this way, through the matching portion 131 on the metal net 130 cooperating with the positioning structure, it is possible to ensure that the metal net 130 is attached to the positioning structure. Specifically, in some embodiments, the matching portion 131 is a matching hole. In combination with some of the aforementioned embodiments, the first positioning member 121 is provided with a protruding structure 1211 , the second positioning member 122 is provided with a concave structure 1221 , and the metal mesh 130 is clamped between the first positioning member 121 and the second positioning member 122 , that is, the protruding structure 1211 extends into the concave structure 1221 through the matching hole, so as to ensure that the metal mesh 130 can be reliably positioned by the first positioning member 121 and the second positioning member 122 . Further, the metal mesh 130 is provided with a plurality of matching portions 131 , and the plurality of matching portions 131 are spaced apart from each other along the circumferential direction. In this way, the metal mesh 130 can be easily constrained between the first positioning member 121 and the second positioning member 122 from multiple positions. Specifically, in the embodiment shown in FIG. 3 , four matching holes are opened on the metal mesh 130 .

FIG. 6 shows a schematic structural diagram of a supporting member 140 in an embodiment of the present application.

Referring to FIG. 6 , as shown in FIG. 1 and FIG. 2 , in some embodiments, the end of the container 110 away from the first opening 112 has a stepped portion 113 , and the stepped portion 113 is configured to support the positioning assembly 120 . In this way, a supporting platform can be provided for the positioning assembly 120 by means of the stepped portion 113 , so as to support the positioning assembly 120 along the first direction. It can be understood that the first positioning members 121 and the second positioning members 122 are alternately disposed on the step portion 113 along the first direction. Specifically, in some embodiments, the mold device 100 further includes a supporting member 140 , and the supporting member 140 and the positioning assembly 120 are sequentially disposed on the step portion 113 along the first direction. During the process of preparing the composite material, the supporting member 140 can support the first base material, so as to ensure the reliable progress of the manufacturing process. Especially in the process of pressure infiltration, the supporting member 140 can provide a more reliable supporting function. Exemplarily, the supporting member 140 may be a gasket.

In some embodiments, the step portion 113 is provided with a first channel 1131 , and the radial dimension of the first channel 1131 is smaller than the radial dimension of the first opening 112 . In this way, in combination with some of the above-mentioned embodiments, the waste liquid in the preparation process can be discharged more easily through the first channel 1131, so as to avoid accumulation at the bottom of the accommodating chamber 111 of the container 110, resulting in the composite material structure of the bottom layer prepared Different from the composite structure of the upper layer. In combination with some of the aforementioned embodiments, it should be noted that the molten metal can flow out through the gap between the supporting member 140 and the cavity wall of the accommodating chamber 111 of the container 110, that is, the supporting member 140 will not affect the flow of the waste liquid. discharge.

In some embodiments, the step portion 113 is further provided with a second channel 1132 communicating with the first channel 1131 , and the radial dimension of the second channel 1132 gradually increases along the direction away from the first opening 112 . In this way, the second channel 1132 can be used to cooperate with the external container, which can be, for example, a waste liquid container. Of course, in some other embodiments, instead of using the cooperation between the step portion 113 and the supporting member 140, one or more liquid outlets may be provided at the bottom of the container 110 to discharge the waste liquid, which is not limited here. .

FIG. 7 shows a schematic structural view of the indenter 150 in an embodiment of the present application.

Referring to FIG. 7 in conjunction with FIG. 1 , in some embodiments, the mold device 100 further includes a pressure head 150 , and the pressure head 150 is located at one end of the accommodating cavity 111 close to the first opening 112 along the first direction. Wherein, the pressure head 150 is used to assist pressure infiltration. In this way, it is easier to apply pressure to the first substrate and the second substrate in the container 110 by means of the pressure head 150 . Specifically, the indenter 150 may be, but not limited to, a cylinder, a cuboid, a circular truncated shape, etc., and there is no limitation here.

In the mold device 100 provided by the embodiment of the present application, the metal mesh 130 and the first substrate are positioned through the positioning cavity A defined by the positioning assembly 120 in the accommodating cavity 111 of the container 110, so that two adjacent metal meshes 130 can reliably clamp the first base material during the preparation process, thereby avoiding the direct processing of the diamond with higher hardness in the first base material, thereby reducing the process of processing the first base material to obtain the composite material. Difficulty and cost of preparation. With the help of the first positioning members 121 and the second positioning members 122 alternately arranged in the positioning assembly 120, the metal mesh 130 can be supported and limited, thereby preventing the metal mesh 130 from being displaced in the container 110 during the preparation process , thus ensuring that the structural size of each layer of composite material remains consistent when the multi-layer composite material is prepared at the same time. Moreover, the multi-layer composite material prepared by the mold device 100 provided by the present application is bonded together by means of a metal layer between each layer, so when it is cut, there will be no hindrance of diamond and metal mesh 130, so The difficulty of grinding and polishing is reduced, and the surface flatness and roughness of the composite material are also greatly improved.

The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, all possible combinations of the technical features in the above-mentioned embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, should be considered as within the scope of this specification.

The above-mentioned embodiments only express several implementation modes of the present application, and the description thereof is relatively specific and detailed, but should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the scope of protection of the patent application should be based on the appended claims.

Claims (10)

1. A mold apparatus for preparing a first substrate to form a composite material, comprising:

the container is provided with a containing cavity and a first opening formed along a first direction, and the first opening is communicated with the containing cavity;

the positioning assembly is arranged in the accommodating cavity; a positioning cavity extending along the first direction is defined in the positioning assembly and communicated with the first opening, so that the first substrate can enter the positioning cavity through the first opening; and

at least two metal nets which are arranged along the first direction at intervals and are positioned in the positioning cavity by means of the positioning component;

wherein a clamping space for clamping the first substrate to prepare the composite material is formed between the adjacent metal meshes.

2. The mold device of claim 1, wherein the positioning assembly comprises first and second positioning members arranged alternately and spaced apart along the first direction;

positioning holes are formed in the first positioning piece and the second positioning piece along the first direction, and all the positioning holes are limited together to form the positioning cavity;

and a limiting space for limiting the metal net is formed between the adjacent first positioning piece and the second positioning piece.

3. The mold apparatus of claim 2, wherein the positioning assembly further comprises a positioning structure;

the positioning structure is matched between the adjacent first positioning piece and the second positioning piece to form the limiting space.

4. The mold device of claim 3, wherein the positioning structure comprises a protruding structure;

the protruding structure is arranged on one side, facing the second positioning piece, of the first positioning piece; and/or the protruding structure is arranged on one side of the second positioning piece facing the first positioning piece;

the adjacent first positioning piece and the second positioning piece are spaced from each other by means of the protruding structure to form the limiting space.

5. The mold device of claim 3, wherein the positioning structure comprises a protruding structure and a recessed structure;

at least one of the protruding structure and the recessed structure is arranged on one side, facing the adjacent second positioning piece, of the first positioning piece, and at least the other one of the protruding structure and the recessed structure is arranged on one side, facing the adjacent first positioning piece, of the second positioning piece;

the adjacent first positioning piece and the second positioning piece can form a space by means of at least part of the protruding structures, and/or can form a space by means of at least part of the matching protruding structures and the concave structures to form the limiting space.

6. The mold device according to claim 5, wherein one of the protruding structure and the recessed structure is disposed on a side of the first positioning member facing the adjacent second positioning member, and the other of the protruding structure and the recessed structure is disposed on a side of the second positioning member facing the adjacent first positioning member;

the adjacent first positioning piece and the second positioning piece can form a space by means of at least part of the protruding structure, and/or can form a space by means of at least part of the protruding structure and the concave structure which are matched with each other, so that the limiting space is formed.

7. The mold device according to claim 5, wherein the side of the first positioning member facing the adjacent second positioning member is provided with the protruding structure and the recessed structure;

the protruding structure and the recessed structure are arranged on one side, facing the adjacent first positioning piece, of the second positioning piece;

the adjacent first positioning piece and the second positioning piece can form a space by means of at least part of the protruding structure, and/or can form a space by means of at least part of the protruding structure and the concave structure which are matched with each other, so that the limiting space is formed.

8. A die apparatus as claimed in any one of claims 3 to 7, wherein the expanded metal is provided with an engaging portion;

the matching part can be matched with the positioning structure, so that the metal net is limited between the first positioning piece and the second positioning piece.

9. A die apparatus as claimed in any one of claims 1 to 7, wherein an end of the container remote from the first opening has a step;

the step portion is configured to be usable to support the positioning assembly.

10. The die apparatus of claim 9, wherein the step portion is provided with a first channel;

the radial dimension of the first passage is less than the radial dimension of the first opening.

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