CN115683081A - Sensitive ring coupling structure and coupling method - Google Patents
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Abstract
本申请涉及一种敏感环耦合结构及耦合方法,其包括光波导芯片光纤环组件及输入端尾纤组件,所述光波导芯片包括芯片衬底及形成于芯片衬底上的Y型光波导,所述Y型光波导包括输入端、第一分支及第二分支,所述光纤环组件包括第一衬底以及与第一衬底固定的光纤环;所述光纤环包括第一输入光纤及第二输入光纤,所述第一分支与第一输入光纤通过固化胶连接,所述第二分支与第二输入光纤通过固化胶连接。所述尾纤组件包括第二衬底以及与第二衬底固定的第二光纤,第二衬底的厚度与第一衬底的厚度相同,所述第二光纤与Y型光波导的输入端通过固化胶连接。
The application relates to a sensitive ring coupling structure and coupling method, which includes an optical waveguide chip fiber ring assembly and an input end pigtail assembly, the optical waveguide chip includes a chip substrate and a Y-shaped optical waveguide formed on the chip substrate, The Y-shaped optical waveguide includes an input end, a first branch and a second branch, and the fiber ring assembly includes a first substrate and a fiber ring fixed to the first substrate; the fiber ring includes a first input fiber and a second fiber ring. Two input optical fibers, the first branch is connected to the first input optical fiber through curing glue, and the second branch is connected to the second input optical fiber through curing glue. The pigtail assembly includes a second substrate and a second optical fiber fixed to the second substrate, the thickness of the second substrate is the same as that of the first substrate, and the input end of the second optical fiber and the Y-shaped optical waveguide Connected by curing glue.
Description
技术领域technical field
本申请涉及光纤传感技术领域,尤其是涉及一种敏感环耦合结构及耦合方法。The present application relates to the technical field of optical fiber sensing, in particular to a sensitive ring coupling structure and coupling method.
背景技术Background technique
光纤陀螺是一种全固态的角速率传感仪表,具有启动快、精度覆盖范围大、可靠性高和成本低等的优点,已成为惯性导航、制导及测量领域的主流仪表。高精度光纤陀螺普遍采用高双折射保偏光纤环、宽谱光源和 Y 波导器件方案。保偏光纤环是其中的传感部件,它与 Y 波导器件的两根输出尾纤相熔接耦合形成闭合回路以敏感系统相对惯性空间的转动信息。Fiber optic gyroscope is an all-solid-state angular rate sensing instrument, which has the advantages of fast start-up, large accuracy coverage, high reliability and low cost, and has become a mainstream instrument in the fields of inertial navigation, guidance and measurement. High-precision fiber optic gyroscopes generally use high-birefringence polarization-maintaining fiber rings, broadband light sources and Y-waveguide device solutions. The polarization-maintaining optical fiber ring is the sensing part, which is fused and coupled with the two output pigtails of the Y-waveguide device to form a closed loop to sense the rotation information of the system relative to the inertial space.
相关技术中,为了实现Y波导与光纤环直接对接耦合,在光波导芯片内、位于Y波导两侧各设置有一条直波导作为辅助波导,借由检测尾纤和直波导之间的耦合质量来反应Y波导和光纤环之间的耦合质量。但是此方案存在以下问题:首先,光纤耦合质量严重依赖于工作波导两侧的直波导与陪测光纤的加工技术,其次存在陪测光纤与工作光纤轴向之间的一致性差异。若直波导与陪测光纤存在加工偏差,直波导的耦合质量不能精确反映光纤环和Y波导的耦合质量。In the related art, in order to realize the direct butt coupling between the Y waveguide and the fiber ring, a straight waveguide is provided in the optical waveguide chip on both sides of the Y waveguide as an auxiliary waveguide, by detecting the coupling quality between the pigtail and the straight waveguide. Reflects the coupling quality between the Y waveguide and the fiber ring. However, this solution has the following problems: First, the quality of fiber coupling is heavily dependent on the processing technology of the straight waveguides on both sides of the working waveguide and the accompanying optical fiber, and secondly, there is a difference in the axial consistency between the accompanying optical fiber and the working optical fiber. If there is a processing deviation between the straight waveguide and the accompanying optical fiber, the coupling quality of the straight waveguide cannot accurately reflect the coupling quality of the fiber ring and the Y waveguide.
发明内容Contents of the invention
为了实现对保偏光纤环与光波导芯片的精准耦合,本申请提供一种敏感环耦合结构与耦合方法。In order to realize the precise coupling of the polarization-maintaining optical fiber ring and the optical waveguide chip, the present application provides a sensitive ring coupling structure and coupling method.
本申请提供的一种敏感环耦合结构与耦合方法,采用如下的技术方案:A sensitive ring coupling structure and coupling method provided in this application adopts the following technical scheme:
一种敏感环耦合结构,其中,所述敏感环耦合结构包括光波导芯片以及光纤环组件以及输入端尾纤组件,所述光波导芯片包括芯片衬底及形成于芯片衬底上的Y型光波导,所述Y型光波导包括输入端、第一分支及第二分支,所述光纤环组件包括第一衬底以及与第一衬底固定的光纤环,所述第一衬底的厚度与芯片衬底的厚度不相同;所述光纤环包括第一输入光纤及第二输入光纤,所述第一分支与第一输入光纤通过固化胶连接,所述第二分支与第二输入光纤通过固化胶连接。所述尾纤组件包括第二衬底以及与第二衬底固定的第二光纤,第二衬底的厚度与第一衬底的厚度相同,所述第二光纤与Y型光波导的输入端通过固化胶连接。A sensitive ring coupling structure, wherein the sensitive ring coupling structure includes an optical waveguide chip, an optical fiber ring assembly, and an input end pigtail assembly, and the optical waveguide chip includes a chip substrate and a Y-shaped optical fiber formed on the chip substrate. Waveguide, the Y-shaped optical waveguide includes an input end, a first branch and a second branch, the fiber ring assembly includes a first substrate and a fiber ring fixed to the first substrate, the thickness of the first substrate is the same as The thickness of the chip substrate is not the same; the optical fiber ring includes a first input optical fiber and a second input optical fiber, the first branch and the first input optical fiber are connected by curing glue, and the second branch and the second input optical fiber are connected by curing glue connection. The pigtail assembly includes a second substrate and a second optical fiber fixed to the second substrate, the thickness of the second substrate is the same as that of the first substrate, and the input end of the second optical fiber and the Y-shaped optical waveguide Connected by curing glue.
在本发明的其中一个实施例中,所述第一衬底开设有两个安装槽,所述光纤环由保偏光纤绕制而成,所述保偏光纤的熊猫眼的中心与纤芯的中心的连线与所述安装槽的中心线垂直或者平行;所述第二衬底开设有一个安装槽,所述第二光纤是保偏光纤,所述第二光纤的熊猫眼的中心与纤芯的中心的连线与所述安装槽的中心线垂直或者平行;每个所述安装槽内保偏光纤的熊猫眼的中心与纤芯的中心的连线与所述安装槽的中心线同时垂直或者平行。In one embodiment of the present invention, the first substrate is provided with two installation grooves, the optical fiber ring is wound by a polarization-maintaining optical fiber, and the center of the panda eye of the polarization-maintaining optical fiber is aligned with the center of the fiber core. The connecting line at the center is perpendicular or parallel to the center line of the installation groove; the second substrate is provided with an installation groove, the second optical fiber is a polarization maintaining optical fiber, and the center of the panda eye of the second optical fiber is aligned with the fiber The line connecting the center of the core is perpendicular or parallel to the center line of the installation slot; vertical or parallel.
在本发明的其中一个实施例中,所述敏感环耦合结构还包括宽谱光源、光功率计、耦合器;所述耦合器的输入端分别与宽谱光源及光功率计相连通,所述耦合器的输出端与第二光纤的一端连接,所述Y型光波导的入射端与第二光纤的另一端连接。In one of the embodiments of the present invention, the sensitive ring coupling structure further includes a broadband light source, an optical power meter, and a coupler; the input ends of the coupler are connected to the broadband light source and the optical power meter respectively, and the The output end of the coupler is connected to one end of the second optical fiber, and the incident end of the Y-shaped optical waveguide is connected to the other end of the second optical fiber.
在本发明的其中一个实施例中,所述芯片衬底的相对两侧面分别与第一衬底及第二衬底固定。In one embodiment of the present invention, opposite side surfaces of the chip substrate are respectively fixed to the first substrate and the second substrate.
在本发明的其中一个实施例中,所述Y型光波导的侧表面与自身纵截面方向的夹角为6-12°,所述光纤环组件的侧面与自身纵截面之间的夹角为10-15°。In one of the embodiments of the present invention, the angle between the side surface of the Y-shaped optical waveguide and its own longitudinal section is 6-12°, and the included angle between the side surface of the optical fiber ring assembly and its own longitudinal section is 10-15°.
本申请还涉及一种敏感环耦合结构的耦合方法,其中,所述耦合方法包括:The present application also relates to a coupling method of a sensitive ring coupling structure, wherein the coupling method includes:
提供光波导芯片以及光纤环组件、尾纤组件,所述光波导芯片包括芯片衬底及形成于芯片衬底上的Y型光波导,所述Y型光波导包括输入端、第一分支及第二分支,所述光纤环组件包括第一衬底以及与第一衬底固定的光纤环;所述光纤环包括第一输入光纤及第二输入光纤;An optical waveguide chip, an optical fiber ring assembly, and a pigtail assembly are provided, the optical waveguide chip includes a chip substrate and a Y-shaped optical waveguide formed on the chip substrate, and the Y-shaped optical waveguide includes an input end, a first branch and a second branch. Two branches, the fiber ring assembly includes a first substrate and a fiber ring fixed to the first substrate; the fiber ring includes a first input fiber and a second input fiber;
对准第一输入光纤与第一分支,对准第二输入光纤及第二分支,使第一分支的光信号耦合至第一输入光纤,使第二分支的光信号耦合至第二输入光纤;以及Aligning the first input fiber and the first branch, aligning the second input fiber and the second branch, coupling the optical signal of the first branch to the first input fiber, and coupling the optical signal of the second branch to the second input fiber; as well as
对所述第一分支与第一输入光纤的结合面点固化胶,对所述第二分支与第二输入光纤的结合面点固化胶;以及Applying curing glue to the bonding surface of the first branch and the first input optical fiber, and applying curing glue to the bonding surface of the second branch and the second input optical fiber; and
对固化胶进行固化,使所述第一分支与第一输入光纤通过固化胶连接,所述第二分支与第二输入光纤通过固化胶连接。The curing glue is cured, so that the first branch is connected with the first input optical fiber through the curing glue, and the second branch is connected with the second input optical fiber through the curing glue.
所述尾纤组件包括第二衬底以及与第二衬底固定的第二光纤,第二衬底的厚度与第一衬底的厚度相同,所述尾纤组件对准Y型光波导的输入端,The pigtail assembly includes a second substrate and a second optical fiber fixed to the second substrate, the thickness of the second substrate is the same as that of the first substrate, and the pigtail assembly is aligned with the input of the Y-shaped optical waveguide end,
对所述尾纤组件和Y波导的输入端的结合面点固化胶,对所述第二光纤与Y型光波导的输入端通过固化胶连接。Apply curing glue to the joint surface of the pigtail assembly and the input end of the Y waveguide, and connect the second optical fiber to the input end of the Y-shaped optical waveguide through curing glue.
在本发明的其中一个实施例中,对准第一输入光纤与第一分支,对准第二输入光纤及第二分支,对准输入端尾纤组件及Y型波导输入端,使输入端尾纤组件的光信号输入Y型波导的输入端,第一分支的光信号耦合至第一输入光纤,使第二分支的光信号耦合至第二输入光纤的方法包括:In one embodiment of the present invention, the first input fiber is aligned with the first branch, the second input fiber is aligned with the second branch, the input end fiber pigtail assembly and the input end of the Y-shaped waveguide are aligned, so that the input end tail The optical signal of the fiber assembly is input to the input end of the Y-shaped waveguide, the optical signal of the first branch is coupled to the first input optical fiber, and the method for coupling the optical signal of the second branch to the second input optical fiber includes:
提供宽谱光源、光功率计、耦合器;使所述耦合器的输入端分别与宽谱光源及光功率计电性连通,使所述耦合器的输出端与第二光纤对准;providing a broadband light source, an optical power meter, and a coupler; making the input ends of the coupler electrically connected to the broadband light source and the optical power meter respectively, and aligning the output end of the coupler with the second optical fiber;
使宽谱光源发射光束,所述宽谱光源发射的光束经所述耦合器过滤后,经所述尾纤组件、光波导芯片及光纤环组件传输,并在光波导芯片中产生分束及合束后,再经耦合器到达光功率计,由所述光功率计检测功率;以及The wide-spectrum light source emits light beams, and the light beams emitted by the wide-spectrum light source are filtered by the coupler, then transmitted through the pigtail assembly, the optical waveguide chip and the optical fiber ring assembly, and generate beam splitting and combining in the optical waveguide chip. After the beam, it reaches the optical power meter through the coupler, and the power is detected by the optical power meter; and
根据所述功率判断第一分支与第一输入光纤、第二分支与第二输入光纤的对准耦合度。The degree of alignment coupling between the first branch and the first input optical fiber, and between the second branch and the second input optical fiber is judged according to the power.
在本发明的其中一个实施例中,所述芯片衬底的相对两侧面分别与第一衬底及第二衬底固定。In one embodiment of the present invention, opposite side surfaces of the chip substrate are respectively fixed to the first substrate and the second substrate.
在本发明的其中一个实施例中,所述Y型光波导的侧表面与自身纵截面之间的夹角为6-12°,所述光纤环组件的侧面与自身纵截面之间的夹角为10-15°。In one embodiment of the present invention, the angle between the side surface of the Y-shaped optical waveguide and its own longitudinal section is 6-12°, and the included angle between the side surface of the optical fiber ring assembly and its own longitudinal section 10-15°.
在本发明的其中一个实施例中,在提供宽谱光源、光功率计、耦合器的同时还包括提供两个夹具及两个六维电动台,利用两个夹具分别夹持尾纤组件及光纤环组件,并将每个夹具分别设置于一个所述六维电动台,设定六维电动台的角度调整范围及步径,按步径逐渐调整六维电动台的爬坡角度以调整光波导芯片与光纤环组件的对准耦合度,并记录每个步径值对应的光功率计检测的功率,记录所有步径值对应的功率,并在检测到最大功率时对光波导芯片与光纤环组件进行固定。In one embodiment of the present invention, while providing a broadband light source, an optical power meter, and a coupler, it also includes providing two clamps and two six-dimensional electric tables, and using two clamps to clamp the pigtail assembly and the optical fiber respectively ring assembly, and set each fixture on one of the six-dimensional electric stages, set the angle adjustment range and step diameter of the six-dimensional electric stage, and gradually adjust the climbing angle of the six-dimensional electric stage according to the step diameter to adjust the optical waveguide The alignment coupling degree of the chip and the fiber ring assembly, and record the power detected by the optical power meter corresponding to each step value, record the power corresponding to all step values, and compare the optical waveguide chip and the fiber ring when the maximum power is detected. Components are fixed.
综上所述,本申请包括以下至少一种有益技术效果:In summary, the present application includes at least one of the following beneficial technical effects:
1.与相关技术相比,本申请提供的敏感环结构包括的所述光波导芯片包括芯片衬底及形成于芯片衬底上的Y型光波导,所述Y型光波导包括输入端、第一分支及第二分支,所述光纤环包括第一输入光纤及第二输入光纤,所述第一分支与第一输入光纤通过固化胶连接,所述第二分支与第二输入光纤通过固化胶连接,所述输入端尾纤组件与Y型光波导的输入端通过固化胶连接。也即,输入端尾纤组件、光纤环组件与光波导芯片通过固化胶粘接固定,形成直接耦合的敏感环耦合结构,从而,避免了因熔接不理想而产生的偏振交叉耦合和背向反射等噪声影响。1. Compared with related technologies, the optical waveguide chip included in the sensitive ring structure provided by the application includes a chip substrate and a Y-shaped optical waveguide formed on the chip substrate, and the Y-shaped optical waveguide includes an input end, a first A branch and a second branch, the optical fiber ring includes a first input fiber and a second input fiber, the first branch and the first input fiber are connected by curing glue, and the second branch and the second input fiber are connected by curing glue Connecting, the pigtail assembly at the input end is connected with the input end of the Y-shaped optical waveguide through curing glue. That is to say, the pigtail assembly at the input end, the fiber ring assembly and the optical waveguide chip are bonded and fixed by curing glue to form a direct-coupled sensitive ring coupling structure, thereby avoiding polarization cross-coupling and back reflection due to unsatisfactory fusion splicing other noise effects.
2.本申请的所述Y型光波导的侧表面与所述Y型光波导的侧表面与自身纵截面方向的夹角为6-12°,所述光纤环组件的侧面与自身纵截面之间的夹角为10-15°;使尾纤组件与Y型光波导配合时,尾纤组件所在的平面与Y型光波导所在的平面形成一定的微倾,以及将光纤环组件与Y型光波导配合时,光纤环组件与Y型光波导所在的平面形成一定的微倾,从而在光波导的输入及输出端均能减少背向反射损失。2. The included angle between the side surface of the Y-shaped optical waveguide of the present application and the side surface of the Y-shaped optical waveguide and its longitudinal section direction is 6-12°, and the angle between the side surface of the optical fiber ring assembly and its own longitudinal section is The angle between them is 10-15°; when the pigtail assembly is matched with the Y-shaped optical waveguide, the plane where the pigtail assembly is located and the plane where the Y-shaped optical waveguide is located form a certain slight inclination, and the optical fiber ring assembly and the Y-shaped optical waveguide When the optical waveguide is matched, the optical fiber ring component and the plane where the Y-shaped optical waveguide is located form a certain slight inclination, so that the back reflection loss can be reduced at both the input and output ends of the optical waveguide.
3.本申请的第一衬底能固定光纤环的两个光纤,在进行光功率检测时,从而对第一衬底只需要一个六维电动台,从而,简化了校准工艺。3. The first substrate of the present application can fix the two optical fibers of the fiber ring, and only one six-dimensional motorized stage is needed for the first substrate when performing optical power detection, thereby simplifying the calibration process.
4.本申请的敏感环结构包括的光波导芯片、输入端光纤组件与光纤环组件是通过六维电动台实现的耦合校准,并通过检测光功率计在不同位置及不同俯仰角下的多个功率,功率最大时意味着光纤环组件与光波导芯片实现了精准的对准,这个时候在尾纤组件与光波导的对准位置、光波导的输出端与光纤环的对准位置分别滴入适量固化胶,待其均匀填充光波导芯片与光纤环组件、光波导芯片与尾纤组件的端面后,采用紫外固化光源辐照耦合点,实现三者的牢固粘接固定,形成直接耦合的敏感环。4. The optical waveguide chip, the input end fiber optic assembly and the fiber ring assembly included in the sensitive ring structure of this application are coupled and calibrated by a six-dimensional electric stage, and multiple optical power meters are detected at different positions and different pitch angles. Power, when the power is maximum, it means that the optical fiber ring component and the optical waveguide chip have achieved precise alignment. At this time, drip the Appropriate amount of curing glue, after it evenly fills the end face of the optical waveguide chip and fiber ring assembly, optical waveguide chip and pigtail assembly, use ultraviolet curing light source to irradiate the coupling point, realize the firm bonding and fixing of the three, and form a sensitive direct coupling ring.
附图说明Description of drawings
图1是本申请提供的敏感环耦合结构的结构示意图;Fig. 1 is a structural schematic diagram of a sensitive ring coupling structure provided by the present application;
图2是图1提供的光纤环组件的结构示意图;Fig. 2 is a schematic structural view of the optical fiber ring assembly provided in Fig. 1;
图3是图1提供的敏感环耦合结构的耦合对准示意图;Fig. 3 is a schematic diagram of coupling alignment of the sensitive ring coupling structure provided in Fig. 1;
图4是图提供的敏感环耦合结构的又一视角的结构示意图。FIG. 4 is a structural schematic diagram of another perspective of the sensitive ring coupling structure provided in FIG.
附图标记说明:100、敏感环耦合结构;1、光波导芯片;2、光纤环组件;3、尾纤组件;11、芯片衬底;12、Y型光波导;120、入射端;121、侧表面;122、第一分支;124、第二分支;20、第一衬底;22、安装槽;24、光纤环;240、第一输入光纤;242、第二输入光纤;4、宽谱光源;5、光功率计;6、耦合器;30、第二衬底;32、第二光纤;245、保偏光纤;246、熊猫眼;248、纤芯;B、纵截面。Description of reference numerals: 100, sensitive ring coupling structure; 1, optical waveguide chip; 2, optical fiber ring assembly; 3, pigtail assembly; 11, chip substrate; 12, Y-shaped optical waveguide; 120, incident end; 121, 122, the first branch; 124, the second branch; 20, the first substrate; 22, the installation groove; 24, the fiber ring; 240, the first input fiber; 242, the second input fiber; 4, wide spectrum Light source; 5, optical power meter; 6, coupler; 30, second substrate; 32, second optical fiber; 245, polarization maintaining optical fiber; 246, panda eye; 248, fiber core; B, longitudinal section.
具体实施方式Detailed ways
请参阅图1-2,图1为本申请提供的一种敏感环耦合结构100,其中,所述敏感环耦合结构100包括光波导芯片1、光纤环组件2以及尾纤组件3,所述光波导芯片1包括芯片衬底11及形成于芯片衬底11上的Y型光波导12。Please refer to Figures 1-2, Figure 1 is a sensitive
所述光波导芯片1是以X切Y传铌酸锂晶片为衬底材料,光波导芯片1具有单偏振特性,即只能传输电矢量方向平行于铌酸锂晶片Z切方向的TE模。芯片衬底11通过光刻、退火质子交换、蒸发、电镀等工艺形成所述Y型光波导和推挽调制电极。所述Y型光波导12包括第一分支122及第二分支124,所述光纤环组件2包括第一衬底20以及与第一衬底20固定的光纤环24,所述第一衬底20的厚度与芯片衬底11的厚度不相同;所述光纤环24包括的两根输入光纤均是固定于第一衬底20上,也即两根输入光纤分别包括第一输入光纤240及第二输入光纤242,第一输入光纤240及第二输入光纤242之间的距离与第一分支及第二分支之间的距离差值小于等于0.5um,优选的是相等;所述第一分支122的端部与第一输入光纤240的端部对准后通过固化胶连接,所述第二分支124的端部与第二输入光纤242的端部对准后通过固化胶连接。The
所述尾纤组件3包括第二衬底30以及与第二衬底30固定的第二光纤32。尾纤组件3与所述光纤环组件2相对设置于光波导芯片1相对的端面。第二光纤32与Y型光波导12的一端通过固化胶连接。The pigtail assembly 3 includes a
与相关技术相比,本申请提供的敏感环耦合结构100包括有光波导芯片1,光波导芯片1包括芯片衬底11及形成于芯片衬底11上的Y型光波导12, Y型光波导12包括第一分支122及第二分支124,所述光纤环24包括第一输入光纤240及第二输入光纤242,第一输入光纤240与第二输入光纤242之间的距离与第一分支122及第二分支124之间的距离的差值≤0.5um;所述第一分支122与第一输入光纤240通过固化胶连接,所述第二分支124与第二输入光纤242通过固化胶连接,也即,光纤环组件2与光波导芯片1通过固化胶粘接固定,尾纤组件3与光波导芯片1通过固化胶粘接固定,最后形成直接耦合的敏感环耦合结构100,从而,避免了因熔接不理想而产生的偏振交叉耦合和背向反射等噪声影响。Compared with related technologies, the sensitive
在本发明的其中一个实施例中,所述第一衬底20开设有两个安装槽22,所述光纤环24由保偏光纤245绕制而成,所述保偏光纤245的熊猫眼246的中心与纤芯248的中心的连线与所述安装槽22的中心线垂直或者平行。安装槽22是V型或者U型,在本实施例中,安装槽22是V型。在本实施例中,是保偏光纤245的外包层移除,使纤芯248被置于该安装槽22中,由被加压器部件所加压,并由粘合剂所粘合,最后研磨表面并抛光至所需精度。In one embodiment of the present invention, the
在本实施例中,所述第二衬底30开设有一个安装槽,所述第二光纤32是保偏光纤,第二光纤32位于第二衬底30的所述安装槽,所述第二光纤32的熊猫眼的中心与纤芯的中心的连线与所述安装槽的中心线垂直或者平行;且第一衬底20的两个安装槽22内设置的保偏光纤245的熊猫眼的中心与纤芯的中心的连线与所述安装槽的中心线同时垂直或者平行,以及第二衬底30的所述安装槽内安装的第二光纤32的熊猫眼的中心与第二光纤32纤芯的中心的连线与所述安装槽的中心线同时垂直或者平行,如此能减少光纤环组件2的两个保偏光纤之间的偏振串音。由于偏振串音表征保偏光纤的偏振性能,保偏光纤的偏振串音越小,说明保偏光纤对入射光偏振态的保持能力越强,串扰到另一偏振模式上的功率越小,保偏光纤的保偏性能越好。本申请提供的一种敏感环耦合结构100的两个保偏光纤之间的偏振串音最差值优于-30dB,现有技术中的采用两根直波导对光纤环组件进行校准时两个保偏光纤之间的偏振串音最差值也是-30dB,相比于现有技术,本申请提供的一种敏感环耦合结构100的偏振串音能达到现有技术的水平,但是本申请提供的敏感环耦合结构由于无需直波导,所以制作工艺更简单。In this embodiment, the
在本发明的其中一个实施例中,所述敏感环耦合结构100还包括宽谱光源4、光功率计5、耦合器6;所述耦合器6的输入端分别与宽谱光源4及光功率计5相连通,所述耦合器6的输出端与第二光纤32的一端连接,所述Y型光波导12的入射端120与第二光纤32的另一端连接。In one of the embodiments of the present invention, the sensitive
在本发明的其中一个实施例中,所述芯片衬底11的相对两侧面分别与第一衬底20及第二衬底30固定。In one embodiment of the present invention, opposite sides of the
请参阅图4,在本发明的其中一个实施例中,所述Y型光波导12的第一分支122的端面及第二分支124的端面与竖直方向的倾角为6-12°,优选的是8°,所述光纤环24的端面与竖直方向的倾角为10-15°,优选为12°,从而,Y型光波导与光纤环24的端面有个角度差,避免背向反射,同时不降低耦合效率。在本申请中,以预设的角度对所述光纤环24的做端面抛光处理,并根据折射定律对准所述光纤环24的端面以及所述Y型光波导12的第一分支122的端面以及第二分支124的端面。Please refer to Fig. 4, in one of the embodiments of the present invention, the inclination angle of the end face of the
请参阅图3,本申请还涉及一种敏感环耦合结构100的耦合方法,其中,所述耦合方法包括:Please refer to FIG. 3, the present application also relates to a coupling method of a sensitive
S1:提供光波导芯片1以及光纤环组件2,所述光波导芯片1包括芯片衬底11及形成于芯片衬底11上的Y型光波导12,所述Y型光波导12包括第一分支122及第二分支124,所述光纤环组件2包括第一衬底20以及与第一衬底20固定的光纤环24;所述光纤环24包括第一输入光纤240及第二输入光纤242。S1: Provide an
光纤环组件2可以通过如下方式组装获得。先提供第一衬底20,第一衬底20中设置有两个平行的安装槽22。The fiber
提供光纤环24,其中,光纤环24的两个光纤采用保偏光纤245。An
将保偏光纤245设置在所述安装槽22,通过图像摄取装置拍摄保偏光纤245在安装槽22中的位置并转动保偏光纤,直至所述保偏光纤245的熊猫眼246的中心与纤芯248的中心的连线与所述安装槽22的中心线垂直或者平行。The polarization-maintaining
在安装槽22中点固化胶,利用固化胶将保偏光纤245固定在所述安装槽22中。Dot curing glue in the
使Y型光波导12包括第一分支122及第二分支124分别与光纤环24的两个保偏光纤245对齐,并利用夹持装置夹紧两者。Align the
S2:提供宽谱光源4、光功率计5、耦合器6及尾纤组件3,所述尾纤组件3包括第二衬底30以及与第二衬底30固定的第二光纤32;S2: providing a broadband light source 4, an optical power meter 5, a coupler 6 and a pigtail assembly 3, the pigtail assembly 3 including a
S3:使所述耦合器6的输入端分别与宽谱光源4及光功率计5电性连通,使所述耦合器6的输出端与第二光纤32熔接固定,使第二光纤32的另一端对准Y型光波导12的入射端120,且对准第一输入光纤240与第一分支122,对准第二输入光纤242及第二分支124,使第一分支122的光信号耦合至第一输入光纤240,使第二分支124的光信号耦合至第二输入光纤242。S3: Make the input end of the coupler 6 electrically communicate with the broadband light source 4 and the optical power meter 5 respectively, weld and fix the output end of the coupler 6 with the second
S4:使宽谱光源4发射光束,所述宽谱光源4发射的光束经所述耦合器6过滤后,经所述尾纤组件3、光波导芯片1及光纤环组件2传输,并在光波导芯片1中产生干涉,再经耦合器6到达光功率计5,由所述光功率计5检测功率。S4: Make the wide-spectrum light source 4 emit light beams, the light beams emitted by the wide-spectrum light source 4 are filtered by the coupler 6, then transmitted through the pigtail assembly 3, the
调整尾纤组件3及光纤环组件2分别与光波导芯片1的耦合对准度,根据所述功率判断光波导芯片1与尾纤组件3及光纤环组件2的对准耦合度。Adjust the coupling alignment between the pigtail assembly 3 and the optical
在本实施例中,更具体地是,提供两个夹具、两个六维电动台、计算机以及运动控制器。计算机用于用户控制直接耦合装置的操作工序,实时显示相机图像和光功率大小,对耦合质量进行在线监测。所述运动控制器包括可编程逻辑控制器和步进梯形程序,运动控制器是控制六维电动台作动的装置。步进梯形程序包括对计算机指令的接收、指令的理解、缓冲区状态识别、脉冲输出和脉冲输出状态监控,根据脉冲输出状态来确认光波导芯片端面与尾纤组件端面是否平行。In this embodiment, more specifically, two fixtures, two six-dimensional electric stages, a computer, and a motion controller are provided. The computer is used by the user to control the operation process of the direct coupling device, display the camera image and optical power in real time, and monitor the coupling quality online. The motion controller includes a programmable logic controller and a step ladder program, and the motion controller is a device for controlling the actuation of the six-dimensional electric table. The stepping ladder program includes the receiving of computer instructions, instruction understanding, buffer state identification, pulse output and pulse output state monitoring, and confirms whether the end face of the optical waveguide chip is parallel to the end face of the pigtail assembly according to the state of the pulse output.
六维电动台的X、Y、Z方向平移分辨率为10nm,θx、θy、θz 方向旋转分辨率为0.002°。The X, Y, Z direction translation resolution of the six-dimensional electric stage is 10nm, and the θx, θy, θz direction rotation resolution is 0.002°.
具体地,利用两个夹具分别夹持尾纤组件3及光纤环组件2,将夹具分别设置于所述六维电动台,设定六维电动台的在调节平行和调节光功率时的角度调整范围、位移调整范围及步径,按旋转分辨率调整光纤环组件2与光波导芯片1的角度、以及按步径逐渐调整六维电动台的移动范围调整光波导芯片1与光纤环组件2的对准耦合度。优选地是,X、Y在平面内有一个粗调范围,记录每个步径值对应的光功率计5检测的功率,记录所有步径值对应的功率,并在检测到最大功率时对光波导芯片1与光纤环组件2进行固定。Specifically, two clamps are used to clamp the pigtail assembly 3 and the
也就是说,在本申请中,首先通过粗调找到最佳位置后,再通过微调在最佳位置附近找到最优位置。光功率值的提取是采取螺旋向内扫描或者平行扫描获取。That is to say, in the present application, after finding the optimal position through rough adjustment, the optimal position is found near the optimal position through fine adjustment. The extraction of the optical power value is acquired by helical inward scanning or parallel scanning.
更具体地,是运动控制器向两个六维电动台发送姿态控制信号;所述的计算机连接光功率计和六维电动台。在本实施例中,六维电动台的θz是以0.1°为步径进行粗调找到最佳对准位置、然后θz再以0.05°或0.01°为步径进项进行微调得以确定最优对准位置,此时光功率计5检测的输出光功率最大。六维电动台的θx、θy是以0.1°为步径进行粗调找到光纤环组件2与光波导芯片1、尾纤组件3与光波导芯片1平行的最佳对准位置、然后θx、θy再以0.05°或0.01°为步径进项进行微调的已确定最优对准位置,此时光纤环组件2与光波导芯片1、尾纤组件3与光波导芯片1的接触面平行。More specifically, the motion controller sends attitude control signals to the two six-dimensional electric stages; the computer is connected to the optical power meter and the six-dimensional electric stages. In this embodiment, the θz of the six-dimensional electric stage is roughly adjusted with a step of 0.1° to find the best alignment position, and then θz is fine-tuned with a step of 0.05° or 0.01° to determine the optimal alignment position, at this time the output optical power detected by the optical power meter 5 is the maximum. The θx and θy of the six-dimensional electric stage are roughly adjusted with a step of 0.1° to find the best alignment position where the
具体地,所述的耦合对准方法包括:通过计算机控制调节尾纤组件3及光纤环组件2的三维位置及三维角度。运动控制器采用分时复用技术,将2个六维电动台的12轴电机分为2组,每组控制6个维度,利用可编程逻辑控制器的2路脉冲接口控制6个维度。Specifically, the coupling alignment method includes: adjusting the three-dimensional position and three-dimensional angle of the pigtail assembly 3 and the
控制夹持尾纤组件3、光纤环组件2的六维电动台旋转,调整尾纤组件3、光纤环组件2的偏摆和俯仰,减小尾纤组件3、光纤环组件2偏振角和光波导芯片偏振角的角度差。所述计算机记录光功率计输出功率的大小,所有功率最大值时的位置即为光纤与光波导芯片的固定位置。Control the rotation of the six-dimensional electric table holding the pigtail assembly 3 and the
位置初步确认,通过调节六维电动台的X、Y、Z轴,将尾纤组件3、光纤环组件2移动到靠近光波导芯片1的初定位置,通过调节θx、θy,将光纤环组件2与光波导芯片1相接触的接触面、尾纤组件3与光波导芯片1的相接触的接触面调平行。Preliminary confirmation of the position, by adjusting the X, Y, and Z axes of the six-dimensional electric stage, move the pigtail assembly 3 and the
光粗调的范围是:六维电动台以初始位置为中心,使X、Y在边长100um的矩形框内的调节范围、也即正负方向各50um内,分别以1um步距依次调节尾纤组件3、光纤环组件2;θz分别以0.1度的步距进行调节以提取每个步距对应的光功率值,找到功率数值最大时对应的尾纤组件3、光纤环组件2,作为初步确认的耦合点。The range of light coarse adjustment is: the six-dimensional electric platform takes the initial position as the center, makes X, Y within the adjustment range of a rectangular frame with a side length of 100um, that is, within the positive and negative directions of 50um each, and adjusts the tail in turn with a step distance of 1um. Fiber component 3,
微调的范围是:六维电动台以粗调得到的最大功率的初始位置为中心,X、Y在边长5um矩形框内,每移动0.1um,提取一次光功率值,找到最大位置附近的各个步进值对应的光功率,最大光功率对应的位置是最优位置。The range of fine-tuning is: the six-dimensional electric table takes the initial position of the maximum power obtained by rough adjustment as the center, and X and Y are within a rectangular frame with a side length of 5um. Every time it moves 0.1um, extract the optical power value once, and find each The optical power corresponding to the step value, and the position corresponding to the maximum optical power is the optimal position.
光纤环组件2 及尾纤组件3分别以0.01度的步距调节θz的值,找到功率数值最大时对应的尾纤组件3、光纤环组件2的位置,作为最终确认的耦合点。The optical
S5:对所述第一分支122与第一输入光纤240的结合面点固化胶,对所述第二分支124与第二输入光纤242的结合面点固化胶;以及S5: apply curing glue to the bonding surface of the
S6:对固化胶进行固化,使所述第一分支122与第一输入光纤240通过固化胶连接,所述第二分支124与第二输入光纤242通过固化胶连接。所述芯片衬底11的相对两侧面分别与第一衬底20及第二衬底30固定。S6: Curing the curing glue, so that the
可选地,在本发明的其中一个实施例中,所述Y型光波导12的侧表面121与自身纵截面B之间的夹角为10°,所述光纤环组件2的侧表面与自身纵截面之间的夹角为15°。Y型光波导12分别与尾纤组件3及光纤环组件2之间形成一个角度差,使光纤环组件2的端面及尾纤组件3的侧表面分别能抵紧于Y型光波导12的相对端面,降低背向反射造成的耦合损耗。Optionally, in one of the embodiments of the present invention, the angle between the
相比相关技术,本申请提供的一种敏感环耦合结构及耦合方法,只需要采用光功率计及两个六维电动台即能实现对光波导芯片1与尾纤组件3的耦合对准,光波导芯片1只要包括Y分支波导即可,从而无需在光波导芯片1上形成与Y分支波导相对的两侧设置直波导以利用直波导去耦合对准时需要耦合4个端口光纤。Compared with related technologies, the sensitive ring coupling structure and coupling method provided by this application only need to use an optical power meter and two six-dimensional electric stages to realize the coupling and alignment of the
本申请通过调整尾纤组件3、光纤环组件2的位姿,再根据光功率计测量的耦合器返回的光功率值粗调、精调光波导芯片1分别与尾纤组件3、光纤环组件2的耦合点。本发明避免了敏感环耦合结构在用于光纤陀螺时内部有两个熔接点,光纤环组件2光纤采用阵列的方式,简化了光纤陀螺制作工艺,提高了工作效率,减小了光纤熔接引入的背向反射和偏振串音,提高了光纤陀螺测量精度、寿命和质量。In this application, by adjusting the pose of the pigtail assembly 3 and the
最后,采用截断法(即在保偏光纤环的两个尾纤处截断)对制作的敏感环耦合结构100进行了光参数的测试,测试数据如下:常温插入损耗小于3.0dB,分光比优于48/52~52/48,偏振串音优于-30dB;全温范围(-45~70℃)插入损耗变化量典型值为0.3dB,分光比变化量优于2%,光纤环组件2的两个保偏光纤之间的偏振串音最差值优于-30dB。Finally, the optical parameters of the fabricated sensitive
所属领域的技术人员可以清楚地了解到,为了描述的方便和简洁,仅以上述各功能单元、模块的划分进行举例说明,实际应用中,可以根据需要而将上述功能分配由不同的功能单元、模块完成,即将装置的内部结构划分成不同的功能单元或模块,以完成以上描述的全部或者部分功能。Those skilled in the art can clearly understand that for the convenience and brevity of description, only the division of the above-mentioned functional units and modules is used for illustration. In practical applications, the above-mentioned functions can be assigned to different functional units, Completion of modules means that the internal structure of the device is divided into different functional units or modules to complete all or part of the functions described above.
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