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CN115411007B - A kind of special-shaped multi-applicability lead-free composite solder and its preparation method - Google Patents

A kind of special-shaped multi-applicability lead-free composite solder and its preparation method Download PDF

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CN115411007B
CN115411007B CN202211062172.2A CN202211062172A CN115411007B CN 115411007 B CN115411007 B CN 115411007B CN 202211062172 A CN202211062172 A CN 202211062172A CN 115411007 B CN115411007 B CN 115411007B
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lead
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solder
composite solder
free composite
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CN115411007A (en
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岳武
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Lanzhou Institute of Technology
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    • H10W72/334
    • H10W72/352

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Abstract

本发明公开了一种异形多适用性无铅复合钎料及制备方法,包括无铅复合钎料本体,所述无铅复合钎料本体包括有异形基体、第一连接面和第二连接面,且无铅复合钎料本体由异形基体、第一连接面和第二连接面上的钎料合金薄膜构成,所述第一连接面和第二连接面之间的空间位向和尺寸依据所要连接的芯片上焊盘结构而确定,在空间坐标系中,复合钎料的两个连接面所决定的对应坐标轴之间的夹角根据所要连接芯片上的凸点结构确定,所述第一连接面和第二连接面两个连接面的中心连线在基准坐标系中的投影。本发明公开的异形多适用性无铅复合钎料及制备方法具有突破微焊点设计与制造的传统思路,为综合改善电子产品的可靠性提供了新的思路和途径。

The invention discloses a special-shaped multi-applicability lead-free composite solder and a preparation method thereof, comprising a lead-free composite solder body, the lead-free composite solder body includes a special-shaped matrix, a first connection surface and a second connection surface, and The lead-free composite solder body is composed of a special-shaped substrate, a solder alloy film on the first connection surface and the second connection surface, and the spatial orientation and size between the first connection surface and the second connection surface are based on the components to be connected. The structure of the pad on the chip is determined. In the spatial coordinate system, the angle between the corresponding coordinate axes determined by the two connection surfaces of the composite solder is determined according to the bump structure on the chip to be connected. The first connection surface The projection of the line connecting the centers of the two connecting surfaces with the second connecting surface in the datum coordinate system. The special-shaped multi-applicability lead-free composite solder and the preparation method disclosed by the invention break through the traditional idea of designing and manufacturing micro solder joints, and provide a new idea and approach for comprehensively improving the reliability of electronic products.

Description

一种异形多适用性无铅复合钎料及制备方法A kind of special-shaped multi-applicability lead-free composite solder and its preparation method

技术领域technical field

本发明涉及金属材料加工技术领域,尤其涉及一种异形多适用性无铅复合钎料及制备方法。The invention relates to the technical field of metal material processing, in particular to a special-shaped multi-applicability lead-free composite solder and a preparation method thereof.

背景技术Background technique

随着对微型化、多功能化和高可靠性的不断追求,电子产品的封装密度越来越高,随之封装结构向三维方向发展、互连焊点的尺寸和间距持续减小,上述变化可引发诸多可靠性问题。第一,三维封装结构越来越复杂,封装系统中采用的非对称性焊点将越来越多,电路设计和制造越来越困难;第二,三维封装结构散热困难,容易导致热应力失配;第三,焊点尺度的减小要求单个焊点中承载的电流密度越来越高,而高密度电流容易驱使焊点中的金属原子发生定向扩散迁移,出现电迁移问题;第四,焊点尺度减小后使自身和整个封装系统的强度受到极大削弱。With the continuous pursuit of miniaturization, multi-functionality and high reliability, the packaging density of electronic products is getting higher and higher. With the development of packaging structure in three-dimensional direction, the size and spacing of interconnection solder joints continue to decrease. The above changes Many reliability issues can arise. First, the three-dimensional packaging structure is becoming more and more complex, and more and more asymmetric solder joints will be used in the packaging system, making circuit design and manufacturing more and more difficult; second, the heat dissipation of the three-dimensional packaging structure is difficult, which easily leads to thermal stress loss. thirdly, the reduction of solder joint size requires higher and higher current density in a single solder joint, and the high-density current is easy to drive the metal atoms in the solder joint to undergo directional diffusion and migration, resulting in electromigration problems; fourth, The reduced size of the solder joint greatly weakens the strength of itself and the entire packaging system.

然而,以往的改善措施大多主要针对其中的某一问题而展开。例如,为了解决结构复杂化问题,封装时经常采用球删阵列和引线键合相结合的技术,但制造工艺复杂;为解决散热问题,在堆叠结构常插入散热层以增强散热效果,然而这削弱了封装的高密度化;颗粒增强或优化焊点结构是最常见的提高焊点抗电迁移性能和力学性能的方法,但又会引起热应力问题。虽然上述方法可以解决某一问题,但还不能全面解决其它可靠性问题。目前,封装领域还缺乏综合解决上述问题的思路和技术。However, most of the improvement measures in the past were mainly aimed at one of the problems. For example, in order to solve the problem of complex structure, the technology of combining ball array and wire bonding is often used in packaging, but the manufacturing process is complicated; in order to solve the problem of heat dissipation, a heat dissipation layer is often inserted in the stacked structure to enhance the heat dissipation effect, but this weakens The high density of the package; particle reinforcement or optimization of the solder joint structure is the most common method to improve the electromigration resistance and mechanical properties of the solder joint, but it will cause thermal stress problems. While the above approach can solve one problem, it cannot fully solve other reliability problems. At present, the packaging field still lacks ideas and technologies to comprehensively solve the above problems.

发明内容Contents of the invention

本发明公开一种异形多适用性无铅复合钎料及制备方法,本发明的目的在于克服现有电子产品中微焊点在制造和服役过程中出现的工艺复杂、热应力失配和电迁移等问题,而提供的一种可连接封装系统中不同角度和不同形状焊盘之间思路和方法,与之对应的是一种具有非对称结构的异形多适用性复合钎料及其制备方法,该复合钎料将突破微焊点设计与制造的传统思路,为综合改善电子产品的可靠性提供了新的思路和途径。The invention discloses a special-shaped multi-applicability lead-free composite solder and its preparation method. The purpose of the invention is to overcome the complex process, thermal stress mismatch and electromigration that occur in the process of manufacturing and serving micro solder joints in existing electronic products problem, and provide a kind of idea and method for connecting different angles and different shapes of pads in the packaging system, corresponding to it is a kind of special-shaped multi-applicability composite solder with asymmetric structure and its preparation method, the composite Solder will break through the traditional ideas of micro-solder joint design and manufacture, and provide new ideas and ways for comprehensively improving the reliability of electronic products.

为了实现上述目的,本发明采用了如下技术方案:In order to achieve the above object, the present invention adopts the following technical solutions:

一种异形多适用性无铅复合钎料,包括无铅复合钎料本体,所述无铅复合钎料本体包括有异形基体2、第一连接面1和第二连接面3,且无铅复合钎料本体由异形基体2、第一连接面1和第二连接面3上的钎料合金薄膜构成,所述第一连接面1和第二连接面3之间的空间位向和尺寸依据所要连接的芯片上焊盘结构而确定,在空间坐标系中,所述无铅复合钎料本体的两个连接面所决定的对应坐标轴ox与o’x’、oy与o’y’、oz与o’z’之间的夹角α、β、γ根据所要连接芯片上的凸点结构确定,其值分别在0~2π、0~π、0~π之间调整,所述第一连接面1和第二连接面3两个连接面的中心连线在基准坐标系中的投影,即距离a、b、c根据连接芯片上的凸点结构和尺寸而决定,大小在数微米至几百微米之间变化。A special-shaped multi-applicability lead-free composite solder, comprising a lead-free composite solder body, the lead-free composite solder body includes a special-shaped matrix 2, a first connection surface 1 and a second connection surface 3, and the lead-free composite The solder body is composed of a special-shaped substrate 2, a solder alloy film on the first connection surface 1 and the second connection surface 3, and the spatial orientation and size between the first connection surface 1 and the second connection surface 3 are based on the desired In the spatial coordinate system, the corresponding coordinate axes ox and o'x', oy and o'y', oz determined by the two connection surfaces of the lead-free composite solder body The angles α, β, and γ between o'z' and o'z' are determined according to the bump structure on the chip to be connected, and their values are adjusted between 0~2π, 0~π, and 0~π respectively. The first connection The projection of the center line of the two connection surfaces of surface 1 and second connection surface 3 in the reference coordinate system, that is, the distances a, b, and c are determined according to the structure and size of the bumps on the connection chip, and the size is from a few microns to several Varies between hundreds of microns.

在一个优选的方案中,所述第一连接面1和第二连接面3两个连接面的形状为圆形、矩形或圆形和矩形结合后的复合形状中任意一种,或者是它们之间的任意组合;所述第一连接面1和第二连接面3两个连接面之间的形状随加工后的掩膜形状而定,所述第一连接面1和第二连接面3表面上的钎料合金厚度在1~6μm之间,所用合金为普通商用且不涉及其它专利中权利要求的无铅钎料,所述无铅复合钎料本体的基体形状由所要连接的芯片结构而定,其材质为易导电、导热材料,成型时借助于掩膜并利用喷溅或电镀的方法制备。In a preferred solution, the shape of the two connection surfaces of the first connection surface 1 and the second connection surface 3 is any one of a circle, a rectangle, or a compound shape combining a circle and a rectangle, or one of them any combination between; the shape between the first connection surface 1 and the second connection surface 3 depends on the shape of the mask after processing, and the surface of the first connection surface 1 and the second connection surface 3 The thickness of the solder alloy on the board is between 1 and 6 μm, and the alloy used is a common commercial lead-free solder that does not involve claims in other patents. The shape of the matrix of the lead-free composite solder body is determined by the structure of the chip to be connected. It is determined that its material is an easily conductive and thermally conductive material, and it is prepared by sputtering or electroplating with the help of a mask during molding.

在一个优选的方案中,所述无铅复合钎料本体的基体材质为纯铜,同时不排除其它易导电、导热材料,所述无铅复合钎料本体与第一连接面1和第二连接面3之间的夹角关系为:当α=90°、β=0°、γ=90°时,该无铅复合钎料本体的横截面为直角三角形,而当α=β=0°、γ=180°时,则构成横截面为线性或锥形的复合钎料。In a preferred solution, the base material of the lead-free composite solder body is pure copper, while other easily conductive and thermally conductive materials are not excluded, and the lead-free composite solder body is connected to the first connection surface 1 and the second connection surface 1. The angle relationship between the surfaces 3 is: when α=90°, β=0°, γ=90°, the cross section of the lead-free composite solder body is a right triangle, and when α=β=0°, When γ=180°, a composite solder with a linear or tapered cross section is formed.

一种异形多适用性无铅复合钎料的制备方法,主要包括以下步骤:A method for preparing a special-shaped multi-applicability lead-free composite solder mainly includes the following steps:

S1:钎料合金薄膜制备:将底模放置于平板上,并将第一掩膜装配于底模上,利用喷溅或电镀方法制备钎料合金薄膜,合金薄膜厚度控制在1~6μm之间;S1: Preparation of brazing alloy film: place the bottom mold on a flat plate, and assemble the first mask on the bottom mold, and prepare a brazing alloy film by sputtering or electroplating, and the thickness of the alloy film is controlled between 1 and 6 μm ;

S2:异形基体制备:去掉第一掩膜,将第二掩膜装配于底模上,利用喷溅或电镀方法制备异形铜基体,基体的尺寸和形状随掩膜而定;S2: Preparation of special-shaped substrate: remove the first mask, assemble the second mask on the bottom mold, and prepare a special-shaped copper substrate by sputtering or electroplating. The size and shape of the substrate depend on the mask;

S3:钎料合金薄膜制备将上模安装于第二掩膜上,再次利用喷溅或电镀方法在另一连接面上制备厚度为1~6μm的钎料合金薄膜;S3: Preparation of solder alloy thin film Install the upper mold on the second mask, and prepare a solder alloy thin film with a thickness of 1-6 μm on the other connecting surface by sputtering or electroplating again;

S4:翻转去掉上模,并将底模、第二掩膜和复合钎料共同翻转后放置于平板上;S4: Turn over and remove the upper mold, and place the bottom mold, the second mask and the composite solder on the flat plate after turning over together;

S5:保温、脱模在钎料熔点以上3~5°C保温10~30s,依次去掉底模和第二掩膜形成前述的异形多适用性复合钎料;S5: heat preservation and demoulding, heat preservation at 3-5°C above the melting point of the solder for 10-30s, remove the bottom mold and the second mask in turn to form the aforementioned special-shaped multi-applicability composite solder;

所述异形多适用性复合钎料需在钎料合金熔点以上3~5°C保温10~30s,所形成的界面金属间化合物厚度不应超过钎料层厚度的1/4,为了简化封装工艺,如果复合钎料的两个连接面的面积大小不同,脱模后应将较大的连接面作为底面。The special-shaped multi-applicability composite solder needs to be kept at 3-5°C above the melting point of the solder alloy for 10-30s, and the thickness of the intermetallic compound formed at the interface should not exceed 1/4 of the thickness of the solder layer. In order to simplify the packaging process , if the two connecting surfaces of the composite solder have different sizes, the larger connecting surface should be used as the bottom surface after demolding.

由上可知,一种异形多适用性无铅复合钎料,包括无铅复合钎料本体,所述无铅复合钎料本体包括有异形基体2、第一连接面1和第二连接面3,且无铅复合钎料本体由异形基体2、第一连接面1和第二连接面3上的钎料合金薄膜构成,所述第一连接面1和第二连接面3之间的空间位向和尺寸依据所要连接的芯片上焊盘结构而确定,在空间坐标系中,所述无铅复合钎料本体的两个连接面所决定的对应坐标轴ox与o’x’、oy与o’y’、oz与o’z’之间的夹角α、β、γ根据所要连接芯片上的凸点结构确定,其值分别在0~2π、0~π、0~π之间调整,所述第一连接面1和第二连接面3两个连接面的中心连线在基准坐标系中的投影,即距离a、b、c根据连接芯片上的凸点结构和尺寸而决定,大小在数微米至几百微米之间变化。本发明提供的异形多适用性无铅复合钎料及制备方法具有以下技术效果:It can be seen from the above that a lead-free composite solder with special shape and multiple applicability includes a lead-free composite solder body, and the lead-free composite solder body includes a special-shaped matrix 2, a first connecting surface 1 and a second connecting surface 3, And the lead-free composite solder body is composed of a special-shaped substrate 2, a solder alloy film on the first connection surface 1 and the second connection surface 3, and the spatial orientation between the first connection surface 1 and the second connection surface 3 is and dimensions are determined according to the pad structure on the chip to be connected. In the spatial coordinate system, the corresponding coordinate axes ox and o'x', oy and o' determined by the two connection surfaces of the lead-free composite solder body The angles α, β, and γ between y', oz, and o'z' are determined according to the bump structure on the chip to be connected, and their values are adjusted between 0~2π, 0~π, and 0~π respectively. Describe the projection of the center line of the two connection surfaces of the first connection surface 1 and the second connection surface 3 in the reference coordinate system, that is, the distances a, b, and c are determined according to the bump structure and size on the connection chip, and the size is between ranging from a few microns to hundreds of microns. The special-shaped multi-applicability lead-free composite solder and the preparation method provided by the invention have the following technical effects:

1.适用范围广:由于钎料的结构可随所要连接芯片上两个焊盘之间的空间位向、大小和形状而定,两个连接面之间的角度、距离和面积大小可调节,因此该思路可满足不同的封装结构,适用范围广;1. Wide range of applications: Since the structure of the solder can be determined by the spatial orientation, size and shape between the two pads on the chip to be connected, and the angle, distance and area between the two connection surfaces can be adjusted, the The idea can meet different packaging structures and has a wide range of applications;

2.结构简单:该复合钎料虽然是非对称性结构,但其仅由基体和连接面上钎料合金薄膜构成,结构非常简单;2. Simple structure: Although the composite solder has an asymmetric structure, it is only composed of a solder alloy film on the substrate and the connecting surface, and the structure is very simple;

3.综合性能好:由于铜是导电性和导热性最好的常见金属,整体铜基体的引入可增加封装系统的散热能力,同时,钎料合金薄膜厚度的控制,限制了复合钎料中钎料合金的总量,可大幅提高微焊点的强度和抗电迁移性能;3. Good overall performance: Since copper is the common metal with the best electrical and thermal conductivity, the introduction of the overall copper matrix can increase the heat dissipation capacity of the packaging system. At the same time, the control of the thickness of the solder alloy film limits the solder alloy in the composite solder. The total amount can greatly improve the strength and anti-electromigration performance of micro solder joints;

4.工艺简单:该钎料在成型过程中主要利用掩膜控制其形状和大小,制备时通过简单安装、翻转和脱模即可完成。4. The process is simple: the shape and size of the brazing material are mainly controlled by a mask during the forming process, and the preparation can be completed by simple installation, flipping and demoulding.

附图说明Description of drawings

图1为本发明提出的一种异形多适用性无铅复合钎料及制备方法的异形多适用性复合钎料连接面的空间坐标系中心之间的投影关系示意图。Fig. 1 is a schematic diagram of the projection relationship between the centers of the space coordinate system of the connection surface of a special-shaped multi-adaptability lead-free composite solder and the preparation method proposed by the present invention.

图2为本发明提出的一种异形多适用性无铅复合钎料及制备方法的连接面的形状示意图。Fig. 2 is a schematic diagram of the shape of the connection surface of a special-shaped multi-adaptability lead-free composite solder and its preparation method proposed by the present invention.

图3为本发明提出的一种异形多适用性无铅复合钎料及制备方法的为矩形与矩形的组合连接面组合后的异形复合钎料示意图。Fig. 3 is a schematic diagram of a special-shaped composite solder with a combination of rectangular and rectangular joint surfaces according to a special-shaped multi-applicability lead-free composite solder and its preparation method proposed by the present invention.

图4为本发明提出的一种异形多适用性无铅复合钎料及制备方法的圆形与圆形的组合连接面组合后的异形复合钎料示意图。Fig. 4 is a schematic diagram of a special-shaped composite solder after combining circular and circular combined joint surfaces of a special-shaped multi-applicability lead-free composite solder and its preparation method proposed by the present invention.

图5为本发明提出的一种异形多适用性无铅复合钎料及制备方法的矩形与矩形的组合连接面组合后的异形复合钎料示意图。FIG. 5 is a schematic diagram of a special-shaped composite solder after combining rectangular and rectangular combined connection surfaces of a special-shaped multi-applicability lead-free composite solder and its preparation method proposed by the present invention.

图6为本发明提出的一种异形多适用性无铅复合钎料及制备方法的矩形与复合型连接面组合后的异形复合钎料示意图。Fig. 6 is a schematic diagram of a special-shaped composite solder with multiple applicability and its preparation method after combining a rectangle and a composite connection surface according to the present invention.

图7为本发明提出的一种异形多适用性无铅复合钎料及制备方法的复合钎料的横截面示意图。Fig. 7 is a schematic cross-sectional view of a special-shaped multi-applicability lead-free composite solder and the composite solder of the preparation method proposed by the present invention.

图8为本发明提出的一种异形多适用性无铅复合钎料及制备方法的异形多适用性复合钎料制备过程中模具装配和操作过程示意图。Fig. 8 is a schematic diagram of mold assembly and operation process in the preparation process of a special-shaped multi-adaptability lead-free composite solder and its preparation method proposed by the present invention.

图9为本发明提出的一种异形多适用性无铅复合钎料及制备方法的异形基体的结构示意图。Fig. 9 is a structural schematic diagram of a special-shaped multi-applicability lead-free composite solder and a preparation method of a special-shaped substrate proposed by the present invention.

图中:1-第一连接面;2-异形基体;3-第二连接面。In the figure: 1 - the first connection surface; 2 - the special-shaped base; 3 - the second connection surface.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

一种异形多适用性复合钎料由具有非对称结构的异形铜基体或其它易导电、导热的材质基体和两个连接面上的钎料合金薄膜组成。其中,异形铜基体或其它材质基体的形状和大小根据所要连接芯片上焊盘之间的位向和大小而定,基体材料的成分及纯度可根据导电和导热及强度而定;钎料合金薄膜厚度为1~6μm,钎料合金为普通商用无铅钎料。A special-shaped multi-applicability composite solder is composed of a special-shaped copper substrate with an asymmetric structure or other easily conductive and heat-conductive material substrates and solder alloy films on two connecting surfaces. Among them, the shape and size of the special-shaped copper substrate or other material substrates are determined according to the orientation and size of the pads on the chip to be connected, and the composition and purity of the substrate material can be determined according to electrical and thermal conductivity and strength; solder alloy film The thickness is 1-6 μm, and the solder alloy is common commercial lead-free solder.

一种异形多适用性复合钎料的制备方法通过以下步骤实现:A preparation method of special-shaped multi-applicability composite solder is realized through the following steps:

1.底模、第一掩膜和第二掩膜与上模的制作选择与Sn近似不发生冶金反应的铝材作为上述模具的基材,加工底模时其上的连接面大小和形状与所要连接面的大小和形状而定,且该连接面的空间位向与另一连接面的空间位向相对应,以满足连接两个特定焊盘的目的;第二掩膜的形状和尺寸依据两个连接面之间的空间位向和加工条件而定;1. The production of the bottom mold, the first mask and the second mask and the upper mold selects an aluminum material that is similar to Sn and does not have a metallurgical reaction as the base material of the above-mentioned mold. The size and shape of the second mask depends on the size and shape of the connection surface, and the spatial orientation of the connection surface corresponds to the spatial orientation of the other connection surface to meet the purpose of connecting two specific pads; the shape and size of the second mask are based on the two It depends on the spatial orientation and processing conditions between the connecting surfaces;

2.底模连接面上钎料合金薄膜的制备将底模放置于平板上,并将第一掩膜装配于底模上,利用喷溅或电镀方法制备钎料合金薄膜,合金薄膜厚度控制在1~6μm之间;2. Preparation of solder alloy film on the connecting surface of the bottom mold Place the bottom mold on a flat plate, and assemble the first mask on the bottom mold, and prepare the solder alloy film by sputtering or electroplating. The thickness of the alloy film is controlled at 1~ Between 6μm;

3.异形铜基体或其它材质的异形基体的制备去掉第一掩膜,将第二掩膜装配于底模上,利用喷溅或电镀方法制备异形铜基体或其它材质的异形基体;3. Preparation of special-shaped copper substrate or special-shaped substrate of other materials Remove the first mask, assemble the second mask on the bottom mold, and prepare special-shaped copper substrate or other materials of special-shaped substrate by sputtering or electroplating;

4.上模连接面上钎料合金薄膜的制备将上模安装于第二掩膜上,再次利用喷溅或电镀方法在另一连接面上制备厚度为1~6μm的钎料合金薄膜;4. Preparation of solder alloy thin film on the connection surface of the upper mold Install the upper mold on the second mask, and prepare a solder alloy film with a thickness of 1-6 μm on the other connection surface by sputtering or electroplating again;

5.翻转、去上模将底模、第二掩膜和复合钎料共同翻转放置于平板上后去掉上模;5. Turn over and remove the upper mold. Turn the bottom mold, the second mask and the composite solder together and place them on the flat plate, then remove the upper mold;

6.保温、脱模在钎料熔点以上3~5°C保温10~30s,依次去掉底模和第二掩膜后形成异形多适用性复合钎料6. Insulation and demolding Heat preservation at 3-5°C above the melting point of the solder for 10-30s, remove the bottom mold and the second mask in turn to form a special-shaped multi-applicability composite solder

设计阶段:design phase:

如附图9中所示,本发明中的复合钎料由异形铜基体2和用喷溅或电镀方法形成在连接面上的无铅钎料合金薄膜1和3组成,设计时该复合钎料的第一连接面和第二连接面两个连接面之间的空间位向根据所要连接芯片上的焊盘结构确定,在空间坐标系中,第一连接面和第二连接面两个连接面所决定的对应坐标轴ox与o’x’、oy与o’y’、oz与o’z’之间的夹角α、β、γ可根据连接芯片上的凸点结构分别在0~2π、0~π、0~π之间调整,如说明书附图1中所示。同时,两个连接面的中心连线在基准坐标系中的投影,即距离a、b、c根据连接芯片上的凸点结构和尺寸而决定,大小在数微米至几百微米之间变化,如说明书附图1中所示。另外,复合钎料的连接面的形状可在图2中所示的矩形、圆形或圆形和矩形结合后的复合形状中任意选取,也可以是它们的任意组合,而两个连接面之间的过渡形状随加工后的掩膜形状而定。As shown in accompanying drawing 9, composite solder among the present invention is made up of special-shaped copper substrate 2 and the lead-free solder alloy thin film 1 and 3 that are formed on the connecting surface by sputtering or electroplating method, and this composite solder is designed The spatial orientation between the two connection surfaces of the first connection surface and the second connection surface is determined according to the pad structure on the chip to be connected. In the spatial coordinate system, the two connection surfaces of the first connection surface and the second connection surface The determined angles α, β, and γ between the corresponding coordinate axes ox and o'x', oy and o'y', oz and o'z' can be respectively in the range of 0 to 2π according to the bump structure on the connected chip , 0 ~ π, 0 ~ π adjustment, as shown in Figure 1 of the specification. At the same time, the projection of the center line of the two connection surfaces in the reference coordinate system, that is, the distances a, b, and c are determined according to the structure and size of the bumps on the connected chip, and the size varies from several microns to hundreds of microns. As shown in Figure 1 of the description. In addition, the shape of the connection surface of the composite solder can be arbitrarily selected from the composite shape shown in Figure 2 as rectangle, circle or the combination of circle and rectangle, and can also be any combination of them. The shape of the transition between them depends on the shape of the mask after processing.

根据上述思路,本发明中复合钎料的两个连接面的位向、形状和大小可按照所要连接的封装结构灵活确定,将突破过去复合钎料形状和尺寸单一的缺点,具有多适用性的优点。特别地,可列举以下具体实施例子:According to the above ideas, the orientation, shape and size of the two connecting surfaces of the composite solder in the present invention can be flexibly determined according to the packaging structure to be connected, which will break through the shortcomings of the single shape and size of the composite solder in the past, and have multi-applicability advantage. In particular, the following specific implementation examples can be cited:

实施例1Example 1

根据所要连接面的形状,该复合钎料中两个连接面可以设计成矩形与圆形、矩形与矩形、圆形与圆形、圆形或矩形与复合型的组合,分别如摘要附图和说明书附图3所示。连接面的尺度依据所要连接焊盘的尺度而定,同时,本实施过程中并不排除其它的形状及其组合。According to the shape of the connecting surface, the two connecting surfaces in the composite solder can be designed as a combination of rectangle and circle, rectangle and rectangle, circle and circle, circle or rectangle and composite type, respectively as shown in the abstract drawings and As shown in Figure 3 of the description. The size of the connection surface depends on the size of the pads to be connected, and at the same time, other shapes and combinations thereof are not excluded in this implementation process.

实施例2Example 2

根据所要连接面之间的空间角度关系,复合钎料两个连接面之间的角度α、β、γ可分别在0~2π、0~π、0~π之间调整。特别地,γ为180°为线性结构,γ也可设计成角度为90°的直角形或其它角度的结构,其中后者可见说明书附图3-6。According to the spatial angle relationship between the connecting surfaces, the angles α, β, and γ between the two connecting surfaces of the composite solder can be adjusted between 0-2π, 0-π, and 0-π respectively. In particular, γ is 180° for a linear structure, and γ can also be designed as a right-angled structure with an angle of 90° or other angles, wherein the latter can be seen in Figures 3-6 of the specification.

实施例3Example 3

根据所要连接面之间的空间角度关系,复合钎料两个连接面的中心连线在基准坐标中的投影a、b和c的大小可在数微米至几百微米之间调整。According to the spatial angle relationship between the surfaces to be connected, the projections a, b and c of the center line of the two connection surfaces of the composite solder in the reference coordinates can be adjusted from several microns to hundreds of microns.

上述所列实施例子仅为解释本发明的设计思路,不应认为是对本发明设计思路的限制,任何根据本发明的设计思路和技术方案进行的变化或改进,都应包括在本发明的保护范围之内。The implementation examples listed above are only to explain the design ideas of the present invention, and should not be considered as limitations to the design ideas of the present invention. Any changes or improvements carried out according to the design ideas and technical solutions of the present invention should be included in the protection scope of the present invention within.

制备阶段:Preparation stage:

根据前述设计思路,以图3和7中所示复合钎料为例说明制备过程,包括:According to the aforementioned design ideas, the preparation process is illustrated by taking the composite solder shown in Figures 3 and 7 as an example, including:

(1)第一连接面上的钎料合金薄膜制备将底模放置于平板上并将第一掩膜装配于底模上,见图5;利用喷溅或电镀方法制备钎料合金薄膜,厚度控制在1~6μm之间;(1) Preparation of solder alloy film on the first connection surface Place the bottom mold on a flat plate and assemble the first mask on the bottom mold, see Figure 5; prepare the solder alloy film by sputtering or electroplating, the thickness Controlled between 1 ~ 6μm;

(2)异形基体制备:去掉第一掩膜,将第二掩膜装配于底模上;利用喷溅或电镀方法制备异形铜或其它材质基体,基体的尺寸和形状随掩膜而定;(2) Preparation of special-shaped substrate: remove the first mask, and assemble the second mask on the bottom mold; use sputtering or electroplating to prepare special-shaped copper or other material substrates, and the size and shape of the substrate are determined by the mask;

(3)第二连接面上的钎料合金薄膜制备:将上模安装于第二掩膜上;再次利用喷溅或电镀方法在另一连接面上制备厚度为1~6μm的钎料合金薄膜;(3) Preparation of solder alloy film on the second connection surface: install the upper mold on the second mask; again prepare a solder alloy film with a thickness of 1-6 μm on the other connection surface by sputtering or electroplating ;

(4)翻转去掉上模,将底模、第二掩膜和复合钎料一起共同翻转后放置于平板上;(4) Turn over and remove the upper mold, turn over the bottom mold, the second mask and the composite solder together and place them on the flat plate;

(5)保温、脱模在钎料熔点以上3~5°C保温10~30s,以保证两个连接面上的钎料合金与连接面之间发生冶金反应并形成界面金属间化合物,其厚度不超过钎料合金薄膜厚度的1/4;最后依次去掉底模和第二掩膜形成前述的异形多适用性复合钎料。(5) Heat preservation and demoulding. Heat preservation at 3-5°C above the melting point of the solder for 10-30s to ensure that the metallurgical reaction between the solder alloy on the two joint surfaces and the joint surface occurs and an intermetallic compound at the interface is formed. No more than 1/4 of the thickness of the solder alloy film; finally remove the bottom mold and the second mask in sequence to form the aforementioned special-shaped multi-applicability composite solder.

特别地,根据上述制备过程还可列举以下具体实施例子:In particular, according to the above preparation process, the following specific implementation examples can also be enumerated:

实施例4Example 4

图5中所示各个模具为整体模,根据所要连接焊盘之间的空间关系和对应的设计思路,如需要,上述整体模可变化为拼装模具,例如对半、多个模具拼装等。模具的材质应选用与钎料合金不容易发生反应的材料,如铝;但也不排除硬质合金或其它材料。Each mold shown in Figure 5 is an integral mold. According to the spatial relationship between the pads to be connected and the corresponding design ideas, if necessary, the above-mentioned integral mold can be changed into an assembled mold, such as half-and-half, multiple mold assembly, etc. The material of the mold should be a material that does not easily react with the solder alloy, such as aluminum; but it does not exclude cemented carbide or other materials.

实施例5Example 5

具有非对称结构的异形基体的材质选取易导电、导热的材料,通常选用工业纯铜,也可选择符合上述要求的其它材料,包括其它金属或非金属材料。The material of the special-shaped substrate with an asymmetric structure is selected from materials that are easy to conduct electricity and heat, usually industrial pure copper, or other materials that meet the above requirements, including other metal or non-metal materials.

实施例6Example 6

钎料合金选用普通商用且不涉及其它专利中权利要求的无铅钎料。复合钎料脱模前需在钎料熔点以上3~5°C保温10~30s,以保证钎料合金与基体之间发生冶金反应并形成稳定的界面金属间化合物层,并控制化合物厚度在合金薄膜厚度的1/4以内。The solder alloy is selected from lead-free solder that is commercially available and does not involve claims in other patents. Before the composite solder is demoulded, it needs to be kept at 3-5°C above the melting point of the solder for 10-30s to ensure the metallurgical reaction between the solder alloy and the matrix and form a stable interface intermetallic compound layer, and to control the thickness of the compound in the alloy. Within 1/4 of the film thickness.

实施例7Example 7

基体制备时采用喷溅或电镀的方法,其中喷溅时利用氮气、氩气或其它保护气体中的一种进行保护;电镀则为常见的电镀工艺。The method of sputtering or electroplating is used in the preparation of the substrate, and one of nitrogen, argon or other protective gases is used for protection during sputtering; electroplating is a common electroplating process.

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,根据本发明的技术方案及其发明构思加以等同替换或改变,都应涵盖在本发明的保护范围之内。The above is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto, any person familiar with the technical field within the technical scope disclosed in the present invention, according to the technical solution of the present invention Any equivalent replacement or change of the inventive concepts thereof shall fall within the protection scope of the present invention.

Claims (7)

1. The lead-free composite solder body comprises a special-shaped matrix (2), a first connecting surface (1) and a second connecting surface (3), and is composed of solder alloy films on the special-shaped matrix (2), the first connecting surface (1) and the second connecting surface (3), wherein the space orientation and the size between the first connecting surface (1) and the second connecting surface (3) are determined according to the structure of a bonding pad on a chip to be connected, in a space coordinate system, the included angles alpha, beta and gamma between corresponding coordinate axes ox and o 'x', oy and o 'y', oz and o 'z' determined by the two connecting surfaces of the lead-free composite solder body are determined according to the bump structures on the chip to be connected, the values of the included angles are respectively adjusted between 0 pi, 0 pi and pi, and 0 pi, the projection line of the central coordinate system of the first connecting surface (1) and the second connecting surface (3) between the two connecting surfaces in the reference coordinate system, namely, the projection distance between the two connecting surfaces a, c and the chip in a micrometer range is determined according to the change in a micrometer range from a micrometer to a micrometer range, and the micrometer range from a micrometer to a micrometer.
2. The special-shaped multi-applicability lead-free composite solder according to claim 1, wherein the shape of the first connecting surface (1) and the second connecting surface (3) is any one of a round shape, a rectangular shape or a composite shape formed by combining a round shape and a rectangular shape, or any combination of the round shape and the rectangular shape; the shape between the first connecting surface (1) and the second connecting surface (3) depends on the shape of the mask after processing.
3. A shaped multi-applicability lead free composite solder according to claim 1, characterized in that the solder alloy thickness on the surface of the first (1) and second (3) joining surfaces is between 1 and 6 μm.
4. The special-shaped multi-applicability lead-free composite solder according to claim 1, wherein the matrix shape of the lead-free composite solder body is determined by the chip structure to be connected, the lead-free composite solder body is made of a material which is easy to conduct electricity and heat, and the lead-free composite solder is prepared by a mask and by a sputtering or electroplating method during molding.
5. The special-shaped multi-applicability lead-free composite solder according to claim 4, wherein the matrix material of the lead-free composite solder body is pure copper, and the included angle relation between the lead-free composite solder body and the first connecting surface (1) and the second connecting surface (3) is as follows: when α=90 °, β=0°, γ=90°, the lead-free composite solder body has a right triangle cross section, and when α=β=0°, γ=180°, a composite solder having a linear or tapered cross section is formed.
6. A method for preparing a special-shaped multi-applicability lead-free composite solder, which is applied to the special-shaped multi-applicability lead-free composite solder as claimed in any one of claims 1 to 5, and is characterized by mainly comprising the following steps:
s1: preparing a solder alloy film: placing a bottom die on a flat plate, assembling a first mask on the bottom die, and preparing a brazing alloy film by utilizing a sputtering or electroplating method, wherein the thickness of the alloy film is controlled between 1 and 6 mu m;
s2: preparing a special-shaped matrix: removing the first mask, assembling the second mask on the bottom die, and preparing a special-shaped copper matrix by utilizing a sputtering or electroplating method, wherein the size and shape of the matrix are determined according to the mask;
s3: the upper die is arranged on the second mask, and the brazing alloy film with the thickness of 1-6 mu m is prepared on the other connecting surface by a sputtering or electroplating method;
s4: the upper die is removed through overturning, and the bottom die, the second mask and the composite solder are put on a flat plate after being overturned together;
s5: and (3) preserving heat and demoulding, namely preserving heat for 10-30 s at a temperature of 3-5 ℃ above the melting point of the brazing filler metal, and sequentially removing the bottom die and the second mask to form the special-shaped multi-applicability composite brazing filler metal.
7. The method for preparing the special-shaped multi-applicability lead-free composite solder according to claim 6, wherein the special-shaped multi-applicability lead-free composite solder is required to be subjected to heat preservation for 10-30 s at a temperature of 3-5 ℃ above the melting point of a solder alloy, and the thickness of the formed interface intermetallic compound is not more than 1/4 of the thickness of a solder layer.
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