CN1153067C - Reflection interference type longitudinal electric field detector for electro-optical organic material - Google Patents
Reflection interference type longitudinal electric field detector for electro-optical organic material Download PDFInfo
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Abstract
The present invention discloses an electric field detector for organic electrooptical materials. The orientation of organic electric dipolar molecules is perpendicular to a substrate plate, and a selective reflecting film is coated on the outer surface of the substrate plate. The propagation direction of beams, the polarization direction of organic molecules and the electric field direction of a detected signal are approximately parallel. Because of the coherence stack of reflecting components on a front interface and a back interface of an electrooptical medium of lasers, the intensity of the reflected light is linearly modulated by a detected electric field and becomes a signal detector of the electric field. The organic electrooptical material of the present invention has the advantages of small dielectric constant and high electrooptical coefficient, and therefore, the intrusion on the detected electric field caused by the electric field sensor is small, and voltage sensitivity, space resolution and time resolution of an electrooptical detection system can be improved.
Description
Technical field
The present invention is a kind of electric field signal detector.
Background technology
The development of modern information industry presses for the speed that improves information processing, and this requirement reduces the device size in integrated circuit (IC) chip, improves the integrated level of IC, improves the operating rate of IC.In the evolution of this high speed integrated circuit, the problems such as uncertainty of the thermal effect in the IC chip, parasitic parameter effect and device parameter make the design of IC and development work need experience a perfecting process gradually.In this process, need the dynamic perfromance on each circuit node of IC chip internal be detected, provide the data necessary data for improving design and manufacturing process.But this detecting instrument will possess necessary voltage sensitivity, temporal resolution and spatial resolution simultaneously.The detection technique of existing this respect does not also reach and satisfies high speed integrated circuit and develop needed level.
The high resolution detection technology that can support utilization at present mainly contains three kinds: scanning electron microscope, atomic force microscope and electro-optic sampling detector.
Scanning electron microscope can reach sufficiently high spatial resolution, but its temporal resolution can not be very high.In this measurement, IC chip to be measured is placed in the vacuum chamber of scanning electron microscope, on the signal transmssion line of IC chip internal, use the electron beam excitation secondary, the variation of signal electric field shows as it to the repulsion of secondary electron and the variation of attractive force, according to the variation measured signal voltage waveform of collected secondary electron stream.In order to measure the high speed signal among the IC, need use the pulse sampling method, thereby to require the electron beam of Electronic Speculum be the ultrashort pulse electron beam.Can only help scanning electron microscope to produce ultrashort heavy current pulse electron beam with ultrashort light pulse, the pulse width of equipment complexity and electron beam can not be very narrow, that is to say for this reason, and its temporal resolution also can not be very high.And the collecting field of electron-beam excitation secondary and secondary electron can change the electric field of measured signal, makes the measurement result distortion.
Atomic force microscope has nano level spatial resolution.The contact that on its cantilever made from goldleaf, has a Nano pointed cone, during microstrip line in the nanometer tip fully gets close to the IC chip, intraatomic electric field on the tip and the signal electric field on the microstrip line are had an effect, the variation of signal electric field shows as this variation of force, cause the fluctuating of cantilever, and with the variation of the fluctuating characterization signal electric field of this cantilever.The mechanical vibration of cantilever can not respond very high-frequency variation, can only detect the harmonic signal in the monolithic integrated microwave circuit (MMIC) with the method for difference frequency.For the digital pulse signal or the simulating signal of the complexity in the high speed integrated circuit, it is impossible response.
The electro-optic sampling technology can reach the temporal resolution of psec, but its spatial resolution is still unsatisfactory, still in improvement.The electro-optic sampling technology has two kinds, a kind of is substrate interior electro-optic sampling technology, it requires the substrate of IC chip is the compound semiconductor crystal that GaAs or InP etc. have linear electro-optic effect, and require substrate back by optical polish, make and survey light from substrate back incident and be focused on the signal transmssion line of IC, the signal electric field changes the birefringence of electro-optic crystal, surveys polarized state of light thereby change, and reaches electric signal is modulated to effect on the light wave.In the scheme that this substrate interior electro-optic sampling detects, require to survey the band gap wavelength of light wavelength, to guarantee that surveying light is not absorbed by the IC substrate greater than substrate.The optimal wavelength of selecting for use at present is 1.3 microns laser that semiconductor laser produces, and it also just defines about about 1 micron of the spot size that sampling surveys.Although so, existing experimental result proves, for the detection light and 65 of 1.3 micron wave lengths */the microcobjective head of 0.7NA, the spatial resolution of this electro-optic detection can reach 0.5 micron.The advantage of this substrate interior electro-optic sampling measuring method is its nothing invasion property, its shortcoming is, its spatial resolution is subjected to the restriction of band gap wavelength, and it is not suitable for the device that substrates such as Si or Ge do not have electrooptical effect, also is not suitable for the device that is encapsulated on the base.
With the most close background technology of the present invention is alternative substrate external electro-optical sampling technique.The device that adopts the sampling of substrate external electro-optical that the dynamic perfromance on each circuit node of IC chip internal is detected can be referring to one piece of article of Microelectronic Engineering 31 (1996) 365～376, and exercise question is New Aspects inElectro-Optic Sampling.This device is made up of photoelectric probe and two parts of electro-optic detection optical unit.Attached to constituting electrooptic probe on the transparency carrier, and substrate links together through the microcobjective head of a micropositioning stage and long-focus large-numerical aperture a fritter GaAs or other electro-optic crystal thin slice.The electro-optic detection optical unit is passed transparency carrier again and is injected electrooptic probe by the detecting light beam process polarization beam apparatus and the compensation wave plate of laser diode output.The front end surface of electrooptic probe is coated with reflectance coating, and detecting light beam is reflected there fully.When the front end surface of electrooptic probe was got close to the device side of IC chip, the signal electric field penetration film in the microstrip transmission line of IC entered electro-optic crystal, and the birefringence of crystal is changed.When surveying light and be focused on the microstrip line, to survey polarized state of light and modulated by the signal electric field, this modulation is that the change via crystal birefringence realizes.When surveying light when electrooptic probe reflects back into polarization beam apparatus, Polarization Modulation is converted into the duplicate of tested electric signals by means of the analyzing effect.The advantage of this substrate external electro-optical sampling and measuring method is the measurement that it is applicable to all electronic device chip bulk properties, can be Si or Ge substrate, also can be GaAs or InP substrate; Can be the tube core on the sheet of garden, also can be the tube core that is encapsulated on the base.Its shortcoming is, because it is all bigger to supply the specific inductive capacity of electro-optic crystal of usefulness, and ε/ε
0＞10, when the electrooptic probe made from it gets close to the signal transmssion line of IC chip, electric field intensity and specific inductive capacity that the signal electric field enters electro-optic crystal are inversely proportional to, the major part of electric field component is compressed in the air-gap between electrooptic probe and the chip under test, the result descends the voltage sensitivity of this substrate external electro-optical probe, tested electric field space distributes by disturbance, and the spatial resolution of detection also descends.About 2 microns of the spatial resolution that present this external electro-optical sampling and measuring is reached, this can not satisfy the needs of integrated circuit development.
Summary of the invention
The present invention puts forward for the problem that solves above-mentioned substrate external electro-optical sampling and measuring existence just.
The polarization organic polymer is a kind of amorphous state organic polymer thin film that is spin-coated on the transparency carrier, under the polarized electric field effect, make the eelctric dipole molecule of organic polymer form orderly arrangement, having produced is the ∞ mm symmetry of optical axis Z with the polarization orientation, and the electrooptical property that is similar to the 6mm crystal symmetry is arranged.The electrooptical coefficient of this class material can be up to 20～70pm/V, and is high more a lot of than the electrooptical coefficient of inorganic electrooptical materials such as GaAs or CdTe, and its specific inductive capacity is approaching with quartz glass.When doing electrooptic probe with this material, voltage sensitivity is very high, and is very little to the interference meeting of tested signal Electric Field Distribution, helps improving spatial resolution.Suitably select the component of material, make the short-wavelength limit of its transparent optical wave band shift to the ultraviolet region, we can adopt short-wave laser to do detecting light beam, make spatial resolution reach 0.1 micron.
We have developed a kind of polar polymer, form addition product with bisphenol A type epoxy resin and the amine substance reaction that can polarize, and form the polarizable polymkeric substance with photo-crosslinking or heat cross-linking with the substance reaction with Photocrosslinkable or heat cross-linking again.Its molecular structural formula as shown in Figure 1, the epoxy resin family macromolecule is as main chain, the molecule of polarizable phenyl amines material is the second nonlinear chromophore and is connected on the main chain as side chain, on main chain, be linked with simultaneously Photocrosslinkable or heat cross-linking side-chain radical.The selection of material makes the short-wavelength limit of transparent optical wave band be extended to black light.
This polymer dissolution dilution, be spun to then and form the uniform film of thickness on the transparency carrier.Heating up also to the thin polymer film that forms, added electric field polarizes or adds the corona polarization, at the after-stage of polarization with UV-irradiation or heating, make the crosslinked group of electro-optical organic material finish crosslinked mutually, form network structure, the polarization orientation of chromophore in the stabilizing material, cool the temperature to room temperature at last, make the orderly arrangement of eelctric dipole molecule " be frozen " knot.
Under our situation, polarization orientation as optical axis z, can prove that the induction refractive index on x and y both direction equates to this surperficial normal direction perpendicular to the surface of thin polymer film.In the electrooptic probe of our design, detecting light beam can be considered the optical axis z incident that is parallel to polar polymer and reflection, as shown in Figure 2, can be considered as linearly polarized light approx.Survey light in the incident and reflection process of 32 li on the electro-optical organic material layer of electrooptic probe shown in Figure 2, the effect of the device electric fields to the IC chip that arrived, but do not produce relative bit phase delay between the polarized component on x and y two directions, thereby the modulation that does not produce polarization state, only produce the modulation mutually of identical position.The upper surface of the transparency carrier 31 of electrooptic probe, promptly the surface among Fig. 2 33 can be coated with antireflecting film, and the interface 34 of transparency carrier 31 and electro-optical organic material layer 32 exists the reflection and the transmission of detecting light beam.When surveying light when the surface 35 of the electro-optical organic material layer 32 of signal transmssion line top and interface 34 reflect, the reflected light that has the position to modulate is mutually interfered the result who superposes with the reflected light that modulate mutually the nothing position, the phototransformation that the position is modulated mutually is the receivable intensity-modulated signal of photodetector, thereby makes us obtain the duplicate of electric signal in the IC chip.The outside surface 35 of electro-optical organic material layer 32 can be coated with high reflecting medium film.This is the vertical electro-optic sampling detector operation of the reflection interference type principle of our electro-optical organic material that designs.
The light signal of the electro-optic crystal probe output of generally adopting at present is a Polarization Modulation.In its optical system, need the light signal of Polarization Modulation to be converted into the light signal of intensity modulated, and need in light path, insert a compensation wave plate, the working point is moved on to the linear work district with analyzer.And the electrooptic probe of our invention, the light signal of its output has been the light signal of intensity modulated, so just do not need the analyzer and the compensation wave plate of the sort of type in our optical system.Our designed light path as shown in Figure 3.Wherein, parts 1 are the drive unit of laser instrument, measure as doing electro-optic sampling, can select for use suitable parts 1 to make laser instrument 2 output ultrashort pulsed beams; Survey as doing continuous light, parts 1 are a direct current biasing power supply just.Detecting light beam by laser instrument 2 outputs is transformed to directional light through collimation lens 3, determine its polarization direction by polarization beam apparatus 4, be transformed to the garden polarized light by λ/4 wave plates 5, make the slightly larger in diameter of detecting light beam in the clear aperature of microcobjective head 9 through beam expander 6.The infrared illumination that lighting source 16 sends is through the reflection of beam splitter 7, joins with the detecting light beam from beam expander 6, projects on the beam splitter 8 and is reflected to composition lens 9.Detecting light beam and illumination light are converged to 10 li of electrooptic probes by composition lens 9, and the focus of detecting light beam is fallen on the surface of electro-optical organic material layer, i.e. the surface that is coated with choice reflective film 5 among Fig. 2.Detecting light beam is by this surface reflection, infrared illumination then sees through this surface irradiation to the device surface of IC chip 13, light path when reflecting reflected light along incident is therefrom returned, at beam splitter 8 places, sub-fraction is surveyed light and most of infrared illumination and can be seen through beam splitter 8 and arrive video cameras 17, and at device pattern that demonstrates the IC chip on the camera monitor and detecting light beam focus point the position in device pattern.Utilize the fine position device 12 and the probe bracket 11 of electrooptic probe to lift the device surface of electrooptic probe 10 or be placed on certain position of device surface from IC chip 3.With the device on microwave probe 14 driving IC chip, utilize the fine position mechanism of microwave probe platform 15 can select the position of surveying in the larger context.Device on the IC chip respectively is in certain level when working, thereby produces electric field separately.When electrooptic probe 10 drops on the surface of IC chip 3, the electric field of device can enter in the electro-optical organic material layer of probe 13, causes that the induction refractive index is with the signal electric field change, as previously described, detection light is put in place modulate mutually, and be transformed to intensity modulated by the reflection interference process in the probe.The major part of the detection light that reflects from probe is reflected by beam splitter 8, by beam splitter 7 and beam expander 6, the garden polarized light is transformed to linearly polarized light again when arriving λ/4 wave plates 5, but perpendicular when its polarization direction and incident, so be polarized beam splitter reflection to photodetector 19.The electric signal of detector 19 outputs is the duplicate of the electric signal on the IC chip 13, and it is imported into the amplification/display device 20 of weak signal.
The electro-optic detection optical system of above-mentioned we invention is that with existing other the difference of electro-optic detection optical system the effect of the λ here/4 wave plates 5 and polarization beam apparatus 4 just all reflexes to photodetector 19 for following the light that reflects of condition in the coaxial light path of maintenance.We also can not adopt the axis light line structure, as shown in Figure 4, replace polarizing beam splitter mirror 4 and wave plate 5 in the coaxial light path shown in Figure 3 with wedge reflector.Light path is simplified, and optical loss reduces, and vibration interference also reduces.This feature of our optical system originates from the principle of work of novelty of the vertical electrooptic probe of reflection interference type of the electro-optical organic material of our invention.
In sum, the reflection interference type longitudinal electric field detector of electro-optical organic material of the present invention is made of electrooptic probe 10 and electro-optic detection optical unit; The structure of said electro-optic detection optical unit has by optical propagation direction: laser instrument 2, collimation lens 3, beam expander 6, beam splitter 8, microcobjective head 9, photodetector 19, amplification/display device 20 and beam splitter 7, lighting source 16 and video camera 17, monitor 18; With background technology different be, said electrooptic probe 10 is formed by transparency carrier 31 with attached to the electro-optical organic material layer 32 on the substrate, be placed on microcobjective head 9 belows, the electro-optical medium polarised direction of electro-optical organic material layer (32), the detecting light beam direction of propagation and measured signal electric field method are parallel to each other to Z component; Probe bracket 11 and fine position device 12 are housed on transparency carrier 31; Microwave probe 14 is installed on the microwave probe platform 15 below the electrooptic probe 10; Polarization beam apparatus 4, λ/4 wave plates 5 are installed after collimation lens 3, polarization beam apparatus 4 is mounted in the light intersection of collimation lens 3 and photodetector 19, constitute the axis light line structure, wedge reflector 21 perhaps is installed between collimation lens 3 and beam expander 6, constitute the disalignment light channel structure.
The reflection interference type longitudinal electric field detector of the electro-optical organic material that the present invention is designed can have following effect:
1. compare with normally used inorganic electro-optic crystal probe, the electrooptic probe of polarization organic material is invaded and harassed minimum to the Electric Field Distribution on the tested IC chip, because the specific inductive capacity of electro-optical organic material is very little.This helps improving the spatial resolution of electric field detecting.
2. not only specific inductive capacity is little for the polarization electro-optical organic material, and electrooptical coefficient is also high.This helps improving voltage sensitivity, also helps improving spatial resolution.
3. suitably select the material of polarizable chromophore, the short-wavelength limit of the transparent optical wave band of polarization electro-optical organic material can be shifted to the black light district, is convenient to adopt the shortwave detecting light beam, reduces the size of focal beam spot.
4. in the electrooptic probe of polarization organic material, utilize the reflection interference effect that the position is modulated mutually and be converted into intensity modulated, the non-linear effects that not brought by half-wave voltage does not need to consider the conversion from the Polarization Modulation to the intensity modulated yet, helps simplifying the light path that electro-optic sampling is surveyed.As shown in Figure 4, do not have polarization beam apparatus 4 and compensation wave plate 5 in this light path, the light beam of only having used a wedge reflector 21 will transport to probe separates with the light beam that reflects from electrooptic probe and gets final product.This simplification helps reducing optical path loss and vibration interference, improves the stability of signal.
Description of drawings:
Fig. 1 is polarizable crosslinked electro-optical organic material monomer feature structure figure of the present invention.
Fig. 2 is the electrooptic probe synoptic diagram of electro-optical organic material of the present invention.
Fig. 3 is the measuring system synoptic diagram of the reflection interference type longitudinal electric field detector of electro-optical organic material of the present invention.
Fig. 4 is the simplified design synoptic diagram that is applicable to electro-optic detection light path of the present invention.
Embodiment
Below in conjunction with description of drawings content of the present invention.
Among Fig. 1, main polymer chain is the bisphenol-A based epoxy resin, R
1Be the polarizable non-linear chromophore of amine, R
2Be photo-crosslinking group or heat cross-linking group.
Among Fig. 2, parts 31 are transparency carrier, 32 is electro-optical organic material layer (organic electric dipole orientation is perpendicular to the surface of this material layer), 33 is the surface of the plating antireflecting film of transparency carrier, 34 interfaces for transparency carrier and electro-optical organic material layer (are coated with choice reflective film on the interface, survey light and reflection and transmission are arranged at this, illumination light has only transmission), 35 is the surface of electro-optical organic material layer, this surface is coated with choice reflective film, and it makes surveys the high reflection of light, illumination light transmission, 36 arrow groups are illustrated in the vibration of surveying light in the special resonator cavity in asymmetric Fabry-pool Lip river that the electro-optical organic material layer forms and reflect, 37 arrows are represented the reflected light from the electro-optical organic material layer, and 38 are the detection light of incident, the 39 reflection interference light beams for electrooptic probe output, 11 is probe bracket, the 12 fine position devices for probe.
The measuring system of the reflection interference type longitudinal electric field detector of the electro-optical organic material of embodiment 3 axis light line structures
Among Fig. 3, parts 1 are the electrical devices of drive laser, and parts 2 are laser instrument, 3 is collimation lens, 4 is polarization beam apparatus, and 5 is λ/4 wave plates, and 6 is beam expander, 7 is beam splitter, 8 is beam splitter, and 9 is long-focus wide-aperture lens head, and 10 is the vertical electrooptic probe of reflection interference type of electro-optical organic material, 11 is probe bracket, 12 fine position devices for probe, 13 is IC chip to be measured, 14 is microwave probe, 15 is probe station, 16 is lighting source, and 17 is camera, and 18 is the camera monitor, 19 is photodetector, and 20 is the amplification and the display device of detector output signal.
The simplified design of the electro-optic detection light path of embodiment 4 disalignment light channel structures
The parts that parts 1,2,3,6,7,8,9,10,11,12,13,14,15,16,17,18,19,20 among Fig. 4 are identical with numbering among Fig. 3 respectively are same parts, and parts 21 are wedge reflector.
Claims (3)
1. the reflection interference type longitudinal electric field detector of an electro-optical organic material is made of electrooptic probe (10) and electro-optic detection optical unit; The structure of said electro-optic detection optical unit has by optical propagation direction: laser instrument (2), collimation lens (3), beam expander (6), beam splitter (8), microcobjective head (9), photodetector (19) amplification/display device (20) and beam splitter (7), lighting source (16) and video camera (17), monitor (18); It is characterized in that, said electrooptic probe (10) is formed by transparency carrier (31) with attached to the electro-optical organic material layer (32) on the substrate, be placed on microcobjective head (9) below, the electro-optical medium polarised direction of electro-optical organic material layer (32), the detecting light beam direction of propagation and measured signal electric field normal component are parallel to each other; Probe bracket (11) and fine position device (12) are housed on transparency carrier (31); Microwave probe (14) in electrooptic probe (10) below is installed on the microwave probe platform (15); At collimation lens (3) polarization beam apparatus (4), λ/4 wave plates (5) are installed afterwards, polarization beam apparatus (4) is mounted in the light intersection of collimation lens (3) and photodetector (19), constitute the axis light line structure, perhaps between collimation lens (3) and beam expander (6), wedge reflector (21) is installed, constitutes the disalignment light channel structure.
2. according to the reflection interference type longitudinal electric field detector of the described electro-optical organic material of claim 1, it is characterized in that the upper surface (33) of transparency carrier (31), be coated with antireflecting film; Be coated with choice reflective film on the interface (34) of transparency carrier (31) and electro-optical organic material layer (32), surveying light has reflection and transmission at this; The outside surface (35) of electro-optical organic material layer (32) is coated with high reflecting medium film.
3. according to the reflection interference type longitudinal electric field detector of claim 1 or 2 described electro-optical organic materials, it is characterized in that, the material of said electro-optical organic material layer (32) is to be main chain with the bisphenol A type epoxy resin material, polarizable amine material is second nonlinear chromophore side chain and is connected on the main chain, the side-chain radical of while keyed jointing Photocrosslinkable or heat cross-linking on main chain.
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| CN102288839B (en) * | 2011-05-12 | 2013-05-01 | 清华大学 | Optoelectronic integration three-dimensional electric field sensor system |
| CN106392312B (en) * | 2016-11-02 | 2018-08-14 | 莆田学院 | A fiber laser processing device |
| CN106392308B (en) * | 2016-11-02 | 2018-07-24 | 莆田学院 | A kind of femtosecond laser processing device |
| CN106392315B (en) * | 2016-11-02 | 2018-07-24 | 莆田学院 | A kind of femtosecond laser processing light path system |
| CN106392306B (en) * | 2016-11-02 | 2018-07-24 | 莆田学院 | A kind of optical-fiber laser processing light path system |
| CN107894608B (en) * | 2017-12-06 | 2023-09-26 | 中国工程物理研究院激光聚变研究中心 | An ultra-broadband neutron detector based on changes in optical refractive index |
| CN111458106B (en) * | 2019-01-02 | 2021-06-11 | 上海和辉光电股份有限公司 | Homogeneity detection device of polycrystalline silicon rete |
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