CN115289855A - Vacuum furnace body structure capable of flexibly changing configuration function - Google Patents

Abstract

The invention discloses a vacuum furnace body structure that can flexibly change the configuration function, including a vacuum furnace body, the vacuum furnace body is provided with a coating cavity, the vacuum furnace body is a rectangular parallelepiped structure, and comprises a first side and a second side disposed oppositely. The second side, the third side, the fourth side, the fifth side and the sixth side; the first side is provided with a feeding port that communicates with the coating cavity, and the second side is provided with a feeding port that communicates with the coating cavity , and the discharge port corresponding to the feeding port; the third side and the fourth side, the fifth side and the sixth side are respectively provided with a plurality of target installation ports corresponding to each other; the fifth side is provided with a plurality of Vacuum pump interface; when the application is used, target installation ports and vacuum pump interfaces at different positions can be used according to the coating requirements, or different target sources can be connected to different target installation ports, so that the vacuum furnace body can be flexible according to the coating needs. Change the configuration function to adapt to different coating processes.

Description

Vacuum furnace structure that can flexibly change configuration functions

technical field

The invention relates to the technical field of vacuum coating, in particular to a vacuum furnace body structure that can flexibly change configuration functions.

Background technique

Vacuum coating is to separate the atoms of the material from the heating source in the vacuum furnace and strike them on the surface of the object to be plated. The traditional vacuum furnace is usually a monolithic structure, and the door is opened on the side of the vacuum furnace, and the plated parts are put in and taken out through the door every time they are coated, and the coating efficiency is low; and the functional configuration of each vacuum furnace is fixed, which means Make its coating function relatively simple, cost performance is lower.

Contents of the invention

Aiming at the defects in the prior art, the object of the present invention is to provide a vacuum furnace body structure that can flexibly change configuration functions.

The technical scheme adopted in the present invention is:

The vacuum furnace body structure that can flexibly change the configuration function includes a vacuum furnace body with a coating chamber, and the vacuum furnace body is a rectangular parallelepiped structure, which includes a first side, a second side, and a third side that are oppositely arranged and the fourth side, the fifth side and the sixth side; the first side is provided with a feed port communicated with the coating cavity, and the second side is provided with the coating cavity and communicated with the coating cavity The discharge port corresponding to the feed port; the third side and the fourth side, the fifth side and the sixth side are respectively provided with a plurality of target installation ports corresponding to each other; the fifth side is provided with a plurality of Vacuum pump interface.

Further, multiple functional interfaces are provided on the fifth side and the sixth side.

Further, the functional interface is one or more of a columnar heating tube interface, a high-pressure cleaning rod interface or an ion source interface.

Further, a plurality of observation ports are opened on the third side and the fourth side.

Further, both the feed inlet and the discharge outlet are vertically arranged rectangular structures.

Further, a plurality of reinforcement blocks are fixed on the third side, the fourth side, the fifth side or/and the sixth side, and each reinforcement block is provided with at least one through hole or/and notch.

Further, the outer wall of the third side, the fourth side, the fifth side or/and the sixth side is provided with a groove for fixing the hose, and the groove is arranged in a serpentine shape.

Further, the tank body is formed by U-shaped stainless steel fixed on the outer wall of the third side, the fourth side, the fifth side or/and the sixth side.

Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application.

Description of drawings

In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings that need to be used in the description of the specific embodiments or the prior art. Throughout the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, elements or parts are not necessarily drawn in actual scale.

Fig. 1 is a schematic diagram of the structure of a vacuum furnace that can flexibly change configuration functions provided by the embodiment of the present application.

Among them, the second side 1, the discharge port 2, the fifth side 3, the vacuum pump interface 4, the target installation port 5, the functional interface 6, the observation port 7, the reinforcement block 8, the third side 9, and the tank body 10.

Detailed ways

Embodiments of the technical solutions of the present invention will be described in detail below in conjunction with specific embodiments. The following examples are only used to illustrate the technical solutions of the present invention more clearly, and therefore are only examples, rather than limiting the protection scope of the present invention.

It should be noted that, unless otherwise specified, the technical terms or scientific terms used in this application shall have the usual meanings understood by those skilled in the art to which the present invention belongs.

Referring to Fig. 1, a vacuum furnace body structure that can flexibly change the configuration function of the present application includes a vacuum furnace body with a coating chamber, and the vacuum furnace body is a rectangular parallelepiped structure, which includes oppositely arranged first sides And the second side 1, the third side 9 and the fourth side and the fifth side 3 and the sixth side; the first side is provided with a feed port communicated with the coating cavity, and the second side 1 is provided with There is a discharge port 2 communicating with the coating chamber and corresponding to the feed port; the third side 9 and the fourth side, the fifth side 3 and the sixth side are respectively provided with a plurality of corresponding A target installation port 5 ; multiple vacuum pump ports 4 are provided on the fifth side 3 .

In this application, by setting the vacuum furnace body as a rectangular parallelepiped structure, the first side and the second side 1 of the vacuum furnace body are provided with corresponding inlets and outlets 2, and the plated parts can be moved by the feeding The mouth moves into the coating chamber, and is moved out of the coating chamber through the discharge port 2, without the need for staff to manually open the door to insert or take out the coated parts, so as to realize the continuous coating of the coated parts and improve the coating efficiency; on the third side 9 and the second The four sides, the fifth side 3 and the sixth side are respectively provided with a plurality of corresponding target installation ports 5, and the target installation ports 5 are used to connect with the target source, and a plurality of vacuum pumps are arranged on the fifth side 3 Interface 4, the vacuum pump interface 4 is used to connect with the vacuum pump. When in use, according to the coating needs, use different target position installation ports 5 and vacuum pump interface 4, or connect different target positions to different target position installation ports 5. Source, so that the vacuum furnace body can flexibly change the configuration function according to the coating needs, and adapt to different coating processes.

In an exemplary embodiment, the first side and the second side 1 are respectively located on the right side and the left side of the vacuum furnace body, the feed inlet is set on the first side, and the discharge port 2 is set on the second side 1 ; The feed port and the discharge port 2 are rectangular openings arranged vertically, and the two correspond to each other, which is convenient for the plating parts to enter and exit. Automatic opening and closing doors can also be set on the feed port and discharge port 2; when the plated parts need to be moved into the coating chamber, the door of the feed port is automatically opened; when the plated parts enter the coating chamber completely, the feed port The door of the coating is automatically closed, so that the coating can be coated in a vacuum environment; when the coating is completed, the doors of the inlet and outlet 2 are automatically opened, which is convenient for the coating to be removed and the next coating to be moved in. Continuous coating of plated parts improves coating efficiency and reduces worker strength.

The third side 9 and the fourth side are respectively located at the front side and the rear side of the vacuum furnace body, and the fifth side 3 and the sixth side are respectively located at the upper side and the lower side of the vacuum furnace body. In order to improve the strength of the side wall of the vacuum furnace body, a plurality of reinforcing blocks 8 are fixed on the third side 9, the fourth side, the fifth side 3 or/and the sixth side to enhance the strength of the side wall of the vacuum furnace body. Function, each reinforcing block 8 is provided with at least one through hole or/and gap, which is convenient for various lines or pipelines to pass through.

The third side 9 and the fourth side, the fifth side 3 and the sixth side are respectively provided with a plurality of target installation openings 5 corresponding to each other, and the target installation openings 5 are arranged horizontally, vertically or longitudinally at intervals along each side. During coating, target mounting ports 5 in different positions can be selected according to the coating process to connect different target sources, while unused target mounting ports 5 can be blocked to realize different coating process operations on the same equipment. Easy to use.

The target installation port 5 may include a first target installation port and a second target installation port, and both the first target installation port and the second target installation port can be arranged on the third side 9, the fourth side, and the fifth side 3 and 6 on the side. The diameter of the installation port of the first target position is larger than the diameter of the installation port of the second target position. The installation port of the first target position can be used to connect the magnetron sputtering target source, and the installation port of the second target position can be used to connect the multi-arc ion coating target source.

A plurality of vacuum pump ports 4 are provided on the fifth side 3 for connecting a vacuum pump. In this embodiment, four vacuum pump ports 4 are arranged laterally at intervals along the fifth side 3 , and a maximum of five vacuum pumps can be connected at the same time.

A plurality of functional interfaces 6 are also provided on the fifth side 3 and the sixth side. The functional interface 6 may be one or more of a columnar heating tube interface, a high-pressure cleaning rod interface or an ion source interface. The columnar heating tube interface is used to connect the columnar heating tube, the high-pressure cleaning rod interface is used to connect the high-pressure cleaning rod, and the ion source interface is used to connect the ion source; according to the needs of the coating process, different functional interfaces 6 can be used to connect different functional equipment.

In order to facilitate the observation of the situation in the coating chamber, a plurality of observation ports 7 are opened on the third side 9 and the fourth side.

The outer wall of the third side 9 , the fourth side, the fifth side 3 or/and the sixth side is laid with a tank body 10 for fixing the hose, and the tank body 10 is arranged in a serpentine shape. One end of the tank body 10 is provided with a water inlet, and the other end is provided with a water outlet. The water belt can be penetrated through the water inlet of the tank body 10 and passed through the water outlet. When in use, cooling water can be passed into the water belt. Cooling the vacuum furnace body; setting the tank body 10 as a serpentine structure extends the length of the water belt that can be set, increases the surface cooling area of the vacuum furnace body, and improves the cooling effect.

Specifically, the tank body 10 is formed by U-shaped stainless steel fixed on the outer wall of the third side 9 , the fourth side, the fifth side 3 or/and the sixth side.

The tank body 10 is made of U-shaped stainless steel, which can be fixed on the outer wall of the third side 9, the fourth side, the fifth side 3 or/and the sixth side of the vacuum furnace body by welding or other fixing methods, and the U-shaped stainless steel and the vacuum furnace body The outer walls of each side are combined to form a tank body 10 for penetrating the hose. The width of the tank body 10 is 30-40 mm, which can allow a hose to pass through. On the one hand, it facilitates the fixing of the hose, on the other hand, it further improves the strength of the outer wall of the vacuum furnace to prevent deformation of the vacuum furnace body.

The vacuum furnace body can be made of SUS304 stainless steel. Two manual doors with hinge structure can be set on the front side (third side or fourth side) of the vacuum furnace body, through which the staff can easily enter and exit, and install or overhaul the internal equipment or devices of the vacuum furnace body. The ultimate vacuum of the vacuum furnace body in this application is better than 5.0*10 ^-5 Pa.

In this application, unless otherwise clearly stipulated and limited, the terms "connected", "connected", "fixed" and other terms should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integrated ; It can be an electrical connection; it can be a direct connection or an indirect connection through an intermediary, and it can be an internal communication between two components or an interaction relationship between two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

In the description of the invention, numerous specific details are set forth. However, it is understood that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, systems and techniques have not been shown in detail in order not to obscure an understanding of this description.

In the description of this specification, descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , system, material or feature is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the specific features, systems, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine different embodiments or examples and features of different embodiments or examples described in this specification without conflicting with each other.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than limiting them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: It is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the technical solutions of the various embodiments of the present invention. All of them should be covered by the scope of the claims and description of the present invention.

Claims (8)

1. The vacuum furnace body structure capable of flexibly changing the configuration function comprises a vacuum furnace body, wherein a coating cavity is arranged in the vacuum furnace body, and the vacuum furnace body is characterized in that the vacuum furnace body is of a cuboid structure and comprises a first side surface, a second side surface, a third side surface, a fourth side surface, a fifth side surface and a sixth side surface which are oppositely arranged; the first side surface is provided with a feeding hole communicated with the film coating cavity, and the second side surface is provided with a discharging hole communicated with the film coating cavity and corresponding to the feeding hole; the third side surface, the fourth side surface, the fifth side surface and the sixth side surface are respectively provided with a plurality of target position mounting openings corresponding to each other; and a plurality of vacuum pump interfaces are arranged on the fifth side surface.

2. The vacuum furnace body structure with flexibly changeable configuration functions as claimed in claim 1, wherein a plurality of functional interfaces are provided on the fifth side surface and the sixth side surface.

3. The vacuum furnace body structure with flexibly changeable configuration functions of claim 2, wherein the functional interface is one or more of a columnar heating tube interface, a high pressure cleaning rod interface or an ion source interface.

4. The vacuum furnace body structure capable of flexibly changing configuration functions as claimed in claim 1, wherein a plurality of observation ports are formed on the third side surface and the fourth side surface.

5. The vacuum furnace body structure with the flexibly changeable configuration function according to any one of claims 1 to 4, wherein the feed inlet and the discharge outlet are both vertically arranged rectangular structures.

6. The vacuum furnace body structure capable of flexibly changing configuration functions according to any one of claims 1 to 4, wherein a plurality of reinforcing blocks are fixed on the third side surface, the fourth side surface, the fifth side surface or/and the sixth side surface, and each reinforcing block is provided with at least one through hole or/and notch.

7. The vacuum furnace body structure with flexibly changeable configuration functions as claimed in claim 6, wherein the outer walls of the third side, the fourth side, the fifth side or/and the sixth side are laid with troughs for fixing the water hose, and the troughs are arranged in a serpentine shape.

8. The vacuum furnace body structure with the flexibly changeable configuration function as claimed in claim 7, wherein the trough body is formed by U-shaped stainless steel fixed on the outer wall of the third side, the fourth side, the fifth side or/and the sixth side.

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