CN115116812B - High-precision electron microscope - Google Patents
High-precision electron microscope Download PDFInfo
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- CN115116812B CN115116812B CN202211041702.5A CN202211041702A CN115116812B CN 115116812 B CN115116812 B CN 115116812B CN 202211041702 A CN202211041702 A CN 202211041702A CN 115116812 B CN115116812 B CN 115116812B
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 38
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 15
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 15
- 241001330002 Bambuseae Species 0.000 claims description 15
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 15
- 239000011425 bamboo Substances 0.000 claims description 15
- 238000001179 sorption measurement Methods 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 5
- 230000000007 visual effect Effects 0.000 claims description 4
- 239000013013 elastic material Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 4
- 238000010894 electron beam technology Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a high-precision electron microscope, which belongs to the technical field of microscopes and comprises a microscope body and a sample chamber matched with the microscope body, wherein a visible opening is formed in the bottom of the sample chamber, an attachment positioning disc is arranged in the visible opening in a matched manner, a central through hole corresponding to the visible opening is formed in the center of the attachment positioning disc, a plurality of groups of radial displacement adjusting components used for adjusting the position of the sample chamber are arranged between the sample chamber and the attachment positioning disc, the annular chamber is connected to an air pump, air is introduced into the annular chamber through the air pump, an adjusting screw can inflate an air bag after opening a channel with an outer fixing barrel, and the air bag pushes an inner sliding barrel to move after expanding, so that the inner sliding barrel drives the sample chamber and the attachment positioning disc to generate relative displacement. The device can facilitate an operator to find the optimal viewing and amplifying area, and reduce the problem of measurement precision caused by the fact that the position cannot be determined in time.
Description
Technical Field
The invention belongs to the technical field of microscopes, and particularly relates to a high-precision electron microscope.
Background
In order to find the optimal probing point of the probing area, the incidence point of the central electron beam needs to be changed. The invention patent publication CN1035583A discloses a mobile scanning electron microscope, which can adjust the position of a sample chamber by means of a displacement screw connected to the sample chamber, and the inner end of the displacement screw is abutted to a base plate. As shown in fig. 1, the circumferential direction of the sample chamber is provided with displacement screws, and since the inner ends of the displacement screws abut against the base plate, the displacement screws are axially displaced by rotating the displacement screws, so that the position of the sample chamber can be adjusted, and the adjusting method has the defects that: if there is an excessive displacement in the axial direction of one screw during adjustment, the adjustment needs to be compensated for the other screw, and the previous screw needs to be loosened to avoid interference. The reciprocating adjustment position is complicated, the sample chamber is easy to deviate from the original position, the incident position of the electron beam cannot be accurately adjusted all the time, the fixed substrate and the like are influenced, and finally image distortion and electron beam inclination are easy to cause, so that the problem of low measurement precision is solved.
Disclosure of Invention
Accordingly, an object of the present invention is to provide a high-precision electron microscope, which is convenient for an operator to find an optimal magnified region for inspection, and reduces the problem of measurement precision caused by the position being unable to be determined in time.
In order to achieve the purpose, the invention provides the following technical scheme:
the invention relates to a high-precision electron microscope, which comprises a microscope body and a sample chamber matched with the microscope body, wherein a visible opening is formed in the bottom of the sample chamber, an attachment positioning disc is arranged in the visible opening in a matched manner, a central through hole corresponding to the visible opening is formed in the center of the attachment positioning disc, a plurality of groups of radial displacement adjusting components for adjusting the position of the sample chamber are arranged between the sample chamber and the attachment positioning disc, each group of radial displacement adjusting components comprises two radial displacement adjusting components which are arranged in a radial direction oppositely, a first annular groove is formed in the outer side of the attachment positioning disc, an annular neck in sliding sealing fit with the first annular groove is formed in the inner side of the sample chamber, the sample chamber can move in the radial direction of the attachment positioning disc, and the sample chamber and the attachment positioning disc are axially positioned; an annular table is formed on the end face of the sample chamber, and an annular chamber is formed in the annular table; radial displacement adjusting part includes adjusting screw, gasbag, outer fixed cylinder, interior slip section of thick bamboo and spring, the inside wall at annular cavity is fixed to the outer fixed cylinder, outer fixed cylinder towards adhere to positioning disk one end form with interior slip section of thick bamboo complex opening, be provided with the spring between outer fixed cylinder and the interior slip section of thick bamboo, outer fixed cylinder deviates from adhere positioning disk one end and is located the annular cavity is indoor and form with the sealed complex screw hole of adjusting screw, the gasbag is located the space that outer fixed cylinder and interior slip section of thick bamboo are separated from, the screw hole with the gasbag intercommunication, adjusting screw and the sealed cooperation of the lateral wall rotation of annular cavity, annular cavity is connected to the air pump, lets in gas through the air pump to the annular cavity indoor, adjusting screw open with the passageway of outer fixed cylinder after, can aerify to the gasbag, promote interior slip section of thick bamboo removal after the gasbag inflation for interior slip section of thick bamboo drives the sample room and adheres to take place relative displacement between the positioning disk.
The invention has the beneficial effects that:
compared with a screw pushing mode, the device provided by the invention has the following advantages that:
1. adopt the promotion mode of pneumatic inflation, when the radial displacement adjusting part of one side had excessive displacement, close this radial displacement adjusting part, the corresponding same group radial displacement adjusting part inflation of in time control, reverse promotion sample room need not to adjust original inflation position, can play the accurate compensation effect of displacement, compares in the control mode of screw, and the adjustment mode is simple, can not harm the sample room.
2. The pneumatic expansion pushing mode is controlled more simply, the adjusting screw only plays a role of a valve, the adjusting screw needing to be controlled is opened, the adjusting action of radial displacement can be achieved, the plurality of radial displacement adjusting assemblies can be integrally controlled through the annular chamber, and the control mechanism is simple and convenient.
3. The mode that pneumatic promotion has certain flexibility, can avoid the position skew problem that the device vibration leads to, and whole control process is more stable, can greatly improve staff's measurement of efficiency.
Additional advantages, objects, and features of the invention will be set forth in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims thereof.
Drawings
In order to make the object, technical scheme and beneficial effect of the invention more clear, the invention provides the following drawings for explanation:
FIG. 1 is a schematic diagram of prior art tuning;
FIG. 2 is a schematic structural view of the present invention;
FIG. 3 is an enlarged view of FIG. 2 at A;
FIG. 4 is a schematic view of the puck attached for suction with an arcuate probing region;
FIG. 5 is a schematic view of a radial displacement adjustment assembly distribution;
fig. 6 is a schematic structural view of the radial displacement adjustment assembly.
The drawings are numbered as follows: microscope body 1, sample room 2, visual opening 3, adhere to positioning disk 4, central through hole 5, radial displacement adjusting part 6, adjusting screw 6a, gasbag 6b, outer fixed cylinder 6c, interior slip section of thick bamboo 6d, spring 6e, opening 6f, screw hole 6g, second ring groove 6h, first limiting plate 6i, third ring groove 6j, second limiting plate 6k, outer fringe connecting portion 6l, first ring groove 7, collar length 8, ring platform 9, annular chamber 10, outer fringe board 11, position circle 12, adsorb chamber 13, adsorption hole 14, inhale passageway 15, open slot 16, location scale 17.
Detailed Description
As shown in fig. 2 to 6, the high-precision electron microscope of the present invention includes a microscope body 1 and a sample chamber 2 fitted to the microscope body 1. The microscope body 1 adopts the existing structure, the objective lens of the microscope body is positioned in the sample chamber 2, the upper end of the sample chamber 2 is hermetically connected with the microscope body 1, and the side surface of the microscope body can be connected to the negative pressure adsorption device so as to generate the vacuum effect in the subsequent use.
The bottom of the sample chamber 2 is provided with a visible opening 3, the visible opening 3 is larger than the area of the electron beam emission of the objective lens, an attached positioning disc 4 is arranged in the visible opening 3 in a matching way, and the center of the attached positioning disc 4 is provided with a central through hole 5 corresponding to the visible opening 3 for the electron beam to pass through. The main structure of the attached positioning disc 4 is cylindrical, the attached positioning disc is inserted into the visible opening 3, and a sealing ring is arranged at a sliding position between the visible opening and the visible opening to prevent air leakage.
Specifically, a plurality of groups of radial displacement adjusting components 6 for adjusting the position of the sample chamber 2 are arranged between the sample chamber 2 and the attachment positioning plate 4, and each group of radial displacement adjusting components 6 comprises two radial displacement adjusting components which are arranged in a radial direction oppositely. The present embodiment provides three sets of radial displacement adjustment assemblies 6, each two of which are in one set, namely six. When there is adjustment of excessive displacement in a certain direction, it is sufficient to adjust one group individually. First annular 7 has been seted up in the outside of adhering to positioning disk 4, and the inboard of sample room 2 is formed with the collar 8 with first annular 7 sliding seal cooperation, and the diameter of collar 8 is located between the internal diameter and the external diameter of first annular 7, and sample room 2 can be followed the radial movement who adheres to positioning disk 4 like this, and both are fixed a position through the combination between the plane in axial positioning simultaneously, avoid the relative slope of electron beam.
A ring platform 9 is formed on the end face of the sample chamber 2, the ring platform 9 is formed by the surface protrusion of the ring platform, and a closed annular chamber 10 is formed in the ring platform 9; specifically, the radial displacement adjusting assembly 6 comprises an adjusting screw 6a, an air bag 6b, an outer fixed cylinder 6c, an inner sliding cylinder 6d and a spring 6e, wherein the adjusting screw 6a plays a role of adjusting a switch, the middle part of the outer fixed cylinder 6c is fixed on the inner side wall of the annular chamber 10, the outer end of the outer fixed cylinder is exposed in the annular chamber 10, an opening 6f matched with the inner sliding cylinder 6d is formed at one end, facing the attachment positioning plate 4, of the outer fixed cylinder 6c, and the end, facing the outer fixed cylinder 6c, of the opening 6f of the inner sliding cylinder 6d is arranged in the outer fixed cylinder 6c in a sliding mode. If the connection tightness of the air bag 6b is good enough, the inner sliding barrel 6d and the outer fixed barrel 6c do not need to be in sealing fit, and the process difficulty is reduced in sequence.
In this embodiment, a spring 6e is arranged between the outer fixing cylinder 6c and the inner sliding cylinder 6d, the spring 6e may also adopt other elastic connection modes, and one end of the outer fixing cylinder 6c, which is far away from the attachment positioning plate 4, is located in the annular chamber 10 and forms a threaded hole 6g in sealing fit with the adjusting screw 6 a. When the outer fixed cylinder 6c is screw-engaged with the adjusting screw 6a, the screw hole 6g can be closed, thereby preventing gas from entering the air bag 6b from the annular chamber 10, which is in a closed state. The air bag 6b is positioned in a space separated by the outer fixed cylinder 6c and the inner sliding cylinder 6d, the threaded hole 6g is communicated with the air bag 6b, and the adjusting screw 6a is in rotating sealing fit with the outer side wall of the annular chamber 10. When using, adhere to the surface that positioning disk 4 fixed at the object that awaits measuring, after the vacuum takes place, annular chamber 10 is connected to the air pump, lets in gas in to annular chamber 10 through the air pump, adjusting screw 6a open with outer solid fixed cylinder 6 c's passageway after, can aerify to gasbag 6b, promote the radial inward movement of interior slip section of thick bamboo 6d after gasbag 6b expands for interior slip section of thick bamboo 6d drives sample room 2 and adheres to and takes place relative displacement between the positioning disk 4.
In this embodiment, the inner wall of the outer fixed cylinder 6c has been seted up the second annular 6h, the second annular 6h internal fixation has first limiting plate 6i, first limiting plate 6i is located and is close to and adheres to positioning disk 4 one side, third annular 6j has been seted up in the outside of the interior sliding cylinder 6d, third annular 6j internal fixation has second limiting plate 6k, second limiting plate 6k is located and keeps away from and adheres to positioning disk 4 one side, the both ends of spring 6e respectively with first limiting plate 6i and second limiting plate 6k fixed connection, second annular 6h and the cooperation of third annular 6j form the flexible space that is used for spring 6e to stretch out and draw back, the width of second annular 6h and third annular 6j is the same, by the inside sunken formation of inner wall, can compact structure.
In this embodiment, an annular outer edge connecting portion 6l is arranged at an opening 6f of the airbag 6b, the airbag 6b is fastened at an outer circumferential edge of the threaded hole 6g through the outer edge connecting portion 6l, the opening 6f of the airbag 6b is exactly in sealing butt joint with the threaded hole 6g and is used for receiving air introduced from the threaded hole 6g, and the airbag 6b is made of a material which is easy to expand, so that the expansion reaction of the airbag is more sensitive.
In this embodiment, be formed with outer fringe plate 11 on attaching to the terminal surface of positioning disk 4, the edge of outer fringe plate 11 is provided with a plurality of position circles 12 with one heart, and position circle 12 all adopts the same rubber circle of height, is separated by between two adjacent position circles 12 and forms the absorption chamber 13, offers the absorption hole 14 with adsorbing chamber 13 intercommunication on the outer fringe plate 11, and absorption hole 14 is connected to the one end of adsorbing the passageway. This embodiment forms and has two at least absorption chamber 13, when answering the curved region of exploring to adsorb, is close to the absorption chamber 13 at the center and can take the lead to adsorb on exploring regional surface, and along with vacuum adsorption's continuation goes on, the adsorption affinity can arouse this outer fringe board 11 regional deformation near the absorption chamber 13 around the center, makes an absorption chamber 13 in the outside can adsorb on exploring regional surface more easily after the deformation, increases the adsorption effect. In the same way, the adsorption cavities 13 are correspondingly adsorbed on the surface of the exploration area in sequence, and after the adsorption cavities are sequentially adsorbed from inside to outside, the outer edge plate 11 can be completely adsorbed on the surface of the arc exploration area, so that the problem that the positioning disc 4 is difficult to attach on an arc-shaped product to fix is solved.
In this embodiment, the other end of the adsorption channel extends to the inner wall of the central through hole 5, so that each adsorption cavity 13 can be communicated with the sample chamber 2, and by introducing the vacuum generating device in the sample chamber 2, the use of the device can be reduced, the control process is simpler, and the cost is lower.
In this embodiment, outer fringe plate 11 and position ring 12 all adopt elastic material to make, and when position ring 12 and investigation regional surface butt, outer fringe plate 11 and position ring 12 all can adapt to the surface shape deformation of surveying the region under the effect of negative pressure. At least one set of open slot 16 has been seted up in the outside of adhering to positioning disk 4 along the axial of adhering to positioning disk 4, and open slot 16 is located the downside of first annular 7, and open slot 16 is towards the radial extension of adhering to positioning disk 4 for outer fringe board 11 reduces the influence to first annular 7 when warping as far as, thereby can let sample room 2 and the cooperation of adhering to between the positioning disk 4 more stable. The microscope body 1 is in rotary sealing fit with the sample chamber 2. A positioning scale 17 is fixed in the sample chamber 2, and the positioning scale 17 can correspond to the position of one group of radial displacement adjusting components 6.
Finally, it is noted that the above-mentioned preferred embodiments illustrate rather than limit the invention, and that, although the invention has been described in detail with reference to the above-mentioned preferred embodiments, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the scope of the invention as defined by the appended claims.
Claims (9)
1. The utility model provides a high accuracy electron microscope, including microscope mirror body, with microscope mirror body complex sample room, the bottom of sample room is provided with visual opening, the cooperation is provided with in the visual opening adheres to the positioning disk, the center of adhering to the positioning disk seted up with the central through-hole that visual opening corresponds, the sample room with adhere to and be provided with a plurality of radial displacement adjusting part of group, its characterized in that are used for adjusting the sample room position between the positioning disk: each group of radial displacement adjusting components comprises two radial displacement adjusting components which are arranged in a radial opposite mode, a first ring groove is formed in the outer side of the attachment positioning disc, a ring neck in sliding sealing fit with the first ring groove is formed in the inner side of the sample chamber, the sample chamber can move in the radial direction of the attachment positioning disc, and the sample chamber and the attachment positioning disc are axially positioned; an annular table is formed on the end face of the sample chamber, and an annular chamber is formed in the annular table; radial displacement adjusting part includes adjusting screw, gasbag, outer fixed cylinder, interior slip section of thick bamboo and spring, the inside wall at annular cavity is fixed to the outer fixed cylinder, outer fixed cylinder towards adhere to positioning disk one end form with interior slip section of thick bamboo complex opening, be provided with the spring between outer fixed cylinder and the interior slip section of thick bamboo, outer fixed cylinder deviates from adhere positioning disk one end and is located the annular cavity is indoor and form with the sealed complex screw hole of adjusting screw, the gasbag is located the space that outer fixed cylinder and interior slip section of thick bamboo are separated from, the screw hole with the gasbag intercommunication, adjusting screw and the sealed cooperation of the lateral wall rotation of annular cavity, annular cavity is connected to the air pump, lets in gas through the air pump to the annular cavity indoor, adjusting screw open with the passageway of outer fixed cylinder after, can aerify to the gasbag, promote interior slip section of thick bamboo removal after the gasbag inflation for interior slip section of thick bamboo drives the sample room and adheres to take place relative displacement between the positioning disk.
2. The high-precision electron microscope according to claim 1, wherein: the inner wall of an outer fixed cylinder is provided with a second annular groove, a first limiting plate is fixed in the second annular groove, a third annular groove is formed in the outer side of an inner sliding cylinder, a second limiting plate is fixed in the third annular groove, two ends of the spring are fixedly connected with the first limiting plate and the second limiting plate respectively, and the second annular groove and the third annular groove are matched to form a telescopic space for the spring to stretch.
3. The high-precision electron microscope according to claim 2, wherein: the opening part of gasbag is provided with annular outer fringe connecting portion, the gasbag passes through outer fringe connecting portion lock joint in the excircle edge of screw hole.
4. The high-precision electron microscope according to claim 1, wherein: adhere to and be formed with the outer fringe board on the terminal surface of positioning disk, the edge of outer fringe board is provided with a plurality of position circles with one heart, is separated by between two adjacent position circles and forms the absorption chamber, set up on the outer fringe board with the absorption hole that adsorbs the chamber intercommunication, the absorption hole is connected to the one end of adsorbing the passageway.
5. The high-precision electron microscope according to claim 4, wherein: the other end of the adsorption channel extends to the inner wall of the central through hole, so that each adsorption cavity can be communicated with the sample chamber.
6. The high precision electron microscope of claim 5, wherein: outer fringe board and position circle all adopt the elastic material to make, when the position circle with explore regional surface butt, outer fringe board and position circle homoenergetic can adapt to the surface shape deformation of exploring the region under the effect of negative pressure.
7. The high precision electron microscope of claim 6, wherein: at least one set of open slot has been seted up in the outside of adhering to the positioning disk along the axial that adheres to the positioning disk, the open slot is located the downside of first annular, the open slot is towards the radial extension of adhering to the positioning disk.
8. The high precision electron microscope of any one of claims 1-7, wherein: the microscope body is in rotary sealing fit with the sample chamber.
9. The high precision electron microscope of claim 8, wherein: and a positioning scale is fixed in the sample chamber and can correspond to the position of one group of radial displacement adjusting components.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211041702.5A CN115116812B (en) | 2022-08-29 | 2022-08-29 | High-precision electron microscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211041702.5A CN115116812B (en) | 2022-08-29 | 2022-08-29 | High-precision electron microscope |
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| CN115116812A CN115116812A (en) | 2022-09-27 |
| CN115116812B true CN115116812B (en) | 2022-11-11 |
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| CN202211041702.5A Active CN115116812B (en) | 2022-08-29 | 2022-08-29 | High-precision electron microscope |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116136504B (en) * | 2023-04-17 | 2024-01-05 | 北京中科科仪股份有限公司 | Film detection device |
| CN120674295B (en) * | 2025-08-22 | 2025-10-24 | 苏州华合检测科技有限公司 | Sample stage of field ion microscope |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1035583A (en) * | 1987-12-18 | 1989-09-13 | 特斯拉公司 | Postable scanning electron microscope |
| JPH09320937A (en) * | 1996-05-29 | 1997-12-12 | Hitachi Ltd | Wafer transfer device for electron beam lithography system |
| CN104377104A (en) * | 2013-08-12 | 2015-02-25 | Fei公司 | Method of using an environmental transmission electron microscope |
| CN107636791A (en) * | 2015-08-21 | 2018-01-26 | 韩国标准科学研究院 | Sample chamber device for electron microscope and electron microscope equipped with same |
| CN114446746A (en) * | 2022-01-21 | 2022-05-06 | 中国科学院水生生物研究所 | Microscopic observation equipment with sample support function |
-
2022
- 2022-08-29 CN CN202211041702.5A patent/CN115116812B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1035583A (en) * | 1987-12-18 | 1989-09-13 | 特斯拉公司 | Postable scanning electron microscope |
| JPH09320937A (en) * | 1996-05-29 | 1997-12-12 | Hitachi Ltd | Wafer transfer device for electron beam lithography system |
| CN104377104A (en) * | 2013-08-12 | 2015-02-25 | Fei公司 | Method of using an environmental transmission electron microscope |
| CN107636791A (en) * | 2015-08-21 | 2018-01-26 | 韩国标准科学研究院 | Sample chamber device for electron microscope and electron microscope equipped with same |
| CN114446746A (en) * | 2022-01-21 | 2022-05-06 | 中国科学院水生生物研究所 | Microscopic observation equipment with sample support function |
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| CN115116812A (en) | 2022-09-27 |
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