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CN114823353A - Method for manufacturing BGA process device of glass substrate - Google Patents

Method for manufacturing BGA process device of glass substrate Download PDF

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Publication number
CN114823353A
CN114823353A CN202210378573.2A CN202210378573A CN114823353A CN 114823353 A CN114823353 A CN 114823353A CN 202210378573 A CN202210378573 A CN 202210378573A CN 114823353 A CN114823353 A CN 114823353A
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China
Prior art keywords
glass substrate
bga
process device
metal copper
photosensitive
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CN202210378573.2A
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Chinese (zh)
Inventor
张晟
赵文忠
刘志丹
金星
陈帅
张飞
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CETC 20 Research Institute
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CETC 20 Research Institute
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Priority to CN202210378573.2A priority Critical patent/CN114823353A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01Manufacture or treatment
    • H10W70/05Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H10W70/093Connecting or disconnecting other interconnections thereto or therefrom, e.g. connecting bond wires or bumps

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  • Manufacturing Of Printed Wiring (AREA)

Abstract

本发明提供了一种玻璃基板的BGA工艺器件制作方法,透过玻璃基板可以看到工艺器件的BGA焊球,不需要高端设备即可人工观测到BGA器件底部,可作为用于研究BGA回流焊接过程的工艺器件,也可作为研究BGA底部填充绝缘胶的工艺器件,既能节省试验成本,又能完整的观察整个实验过程,便于工艺试验分析。本发明用于印制板电子装联表面贴装回流焊接效果判断,分析回流焊接温度曲线的合理性,及时调整并修正印制板回流焊接曲线,节省了高端X光机的设备检测费用,既能节省试验成本,又能完整的观察整个实验过程,便于工艺试验分析,极大地的降低了高端的专用设备的检测费用,工艺试验成本也得到降低。

Figure 202210378573

The invention provides a BGA process device manufacturing method of a glass substrate. The BGA solder balls of the process device can be seen through the glass substrate, and the bottom of the BGA device can be observed manually without high-end equipment, which can be used for researching BGA reflow soldering The process device of the process can also be used as a process device for studying the BGA underfill insulating adhesive, which can not only save the test cost, but also completely observe the entire experimental process, which is convenient for process test analysis. The invention is used for judging the effect of surface mount reflow soldering of printed board electronic assembly, analyzes the rationality of the reflow soldering temperature curve, adjusts and corrects the reflow soldering curve of the printed board in time, saves the equipment testing cost of high-end X-ray machines, and not only The test cost can be saved, and the entire experimental process can be completely observed, which is convenient for process test analysis, greatly reduces the detection cost of high-end special equipment, and the process test cost is also reduced.

Figure 202210378573

Description

Method for manufacturing BGA process device of glass substrate
Technical Field
The invention relates to the field of electronic components, in particular to a method for manufacturing a BGA process device of a glass substrate.
Background
With the rapid development of integrated circuit packaging technology, BGA (ball grid array) packaged devices are becoming more and more widely used. The BGA package uses the array solder balls at the bottom as the signal transmission terminals, and the quality of the solder balls soldered to the printed board significantly affects the performance of the circuit. For the reliability and shock resistance of the BGA device, it is selected to fill the bottom with a thermally conductive insulating paste. Compared with circuit design engineers, SMT (surface mount technology) process engineers pay more attention to the reflow soldering process of BGA devices and the filling effect of the heat conducting insulating glue, and from the aspect of cost, process engineers may select BGA process devices for SMT process testing. Compared with the conventional BGA device, the BGA process device has the advantages of consistent packaging structure, appearance and material, and no specific electrical property. After performing the process test by using the conventional process device, the process device needs to be inspected and analyzed, for example, the BGA soldering quality is detected by X-ray, and the underfill quality of the BGA device is detected by CT. The detection requires the use of high-end special equipment, resulting in high process test cost. The detection result is only the final result, and no way is available for observing the BGA soldering process and the BGA bottom insulating glue filling process in real time, so that a process device capable of observing the BGA device bottom heat conduction insulating glue filling process in real time is needed.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a method for manufacturing a BGA process device of a glass substrate. The BGA welding balls of the process device can be seen through the glass substrate, the bottom of the BGA device can be observed manually without high-end equipment, the BGA welding ball can be used as the process device for researching the BGA reflow soldering process, the process device for researching the BGA underfill insulation glue can also be used as the process device for researching the BGA reflow soldering process, the test cost can be saved, the whole experimental process can be observed completely, and the process test analysis is facilitated.
The technical scheme adopted by the invention for solving the technical problem comprises the following steps:
step 1: preparing a required glass substrate, wherein the glass substrate is high-temperature-resistant and high-light-transmission glass, the high temperature resistance is higher than 300 ℃, the high-light-transmission index light transmittance is higher than 90%, the glass substrate is sequentially cleaned by adopting acetone, absolute ethyl alcohol and deionized water, the cleaning method is ultrasonic cleaning, and the glass substrate is dried once after the sequential cleaning is finished;
step 2: generating a layer of metal copper on one surface of the glass substrate by using a physical vapor deposition mode;
and step 3: thickening the metal copper subjected to physical vapor deposition in the step 2 to 18-25 μm in an electroplating way;
and 4, step 4: coating a layer of photosensitive curing material on the metal copper, and sequentially carrying out pattern transfer film, ultraviolet exposure and development to enable the curing part of the photosensitive material to cover the metal copper; then, chemically etching to expose the metal copper which is not photosensitive, finally removing the film, removing the photosensitive curing material on the metal copper of the covering pattern, and exposing the metal copper on the glass substrate;
and 5: firstly plating a nickel layer and then plating a gold layer on the metal copper in an electroplating way;
step 6: placing a special solder ball for a BGA device on the surface of the gold layer, heating the glass substrate to a temperature 30-40 ℃ higher than the melting temperature of the solder ball in a refluxing manner, and cooling to room temperature;
and 7: silk-screen printing characters, trademarks and part marks on the glass substrate;
and 8: and cutting the glass substrate into a single BGA process device along the overall dimension direction by using a milling cutter or a cutting cutter wheel or laser, wherein the cutting direction is the peripheral overall dimension edge of the BGA process device, grinding and polishing the edge of the BGA process device, and removing redundant sharp corners and edges to finish the manufacture of the glass-based BGA process device.
In the step 2, the thickness of the metal copper is 0.3-1 μm, the target material adopted by the physical vapor deposition is copper with the purity of more than 99.9%, and the gas adopted by the physical vapor deposition is argon Ar with the purity of more than 99.99%.
In the step 4, the photosensitive curing material is photosensitive glue or photosensitive ink.
In the step 5, the thickness of the nickel layer is 3-5 μm, and the thickness of the gold layer is 0.05-0.1 μm.
In the step 6, the solder ball alloy is Sn63Pb37, and the melting point is 183 ℃.
The invention has the advantages that the glass-based BGA process device can be used as a process device for researching the BGA reflow soldering process, is used for judging the printed board electronic assembly surface mounting reflow soldering effect, analyzes the rationality of a reflow soldering temperature curve by observing the collapse height, the shape, the position form and the like of the glass-based BGA welding ball, timely adjusts and corrects the reflow soldering curve of the printed board, and saves the equipment detection cost of a high-end X-ray machine. Meanwhile, the device can be used as a process device for researching the BGA bottom filling heat conduction insulating adhesive, the filling effect and integrity can be judged through the observation of the heat conduction insulating adhesive filling process, the test cost can be saved, the whole experiment process can be completely observed, and the process test analysis is convenient. The detection of BGA welding quality through X-ray detection is avoided, the effect of filling glue at the bottom of a BGA device is detected through CT, the detection cost of high-end special equipment is greatly reduced, and the process test cost is also reduced.
Drawings
FIG. 1 is a schematic view of a glass substrate according to the present invention.
FIG. 2 is a schematic diagram of the physical vapor deposition of metallic copper according to the present invention.
FIG. 3 is a schematic diagram of the present invention for electroplating thickened copper metal.
FIG. 4 is a schematic view of the present invention of a copper-coated photosensitive material.
FIG. 5 is a schematic illustration of the inventive pattern photocuring.
FIG. 6 is a schematic illustration of the pattern development of the present invention.
FIG. 7 is a schematic diagram of a pattern etch of the present invention.
FIG. 8 is a schematic view of the light-fading sensing material of the present invention.
Fig. 9 is a schematic diagram of the electroplated nickel and gold layers of the present invention.
FIG. 10 is a schematic view of the BGA ball mount solder of the present invention.
FIG. 11 is a schematic view of a stamp mark according to the present invention.
FIG. 12 is a schematic view of the edge cutting of the glass substrate according to the present invention.
FIG. 13 is a schematic view of a completed glass substrate BGA device of the present invention.
The method comprises the following steps of 1-glass, 2-copper, 3-photosensitive film, 4-nickel layer, 5-gold layer, 6-BGA solder ball, 7-mark and 8-BGA cutting edge.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
The invention provides a method for manufacturing a BGA process device of a glass substrate, which comprises the following steps:
step 1: as shown in fig. 1, preparing a glass substrate 1 with high light transmittance glass with temperature resistance of more than 300 ℃ as a process device, cleaning the glass substrate 1 in an ultrasonic cleaning manner, cleaning with acetone for 10-15 min, cleaning with absolute ethyl alcohol for 10-15 min, cleaning with deionized water for 5-10 min, drying in an oven at 100-120 ℃ for 1-3 h after cleaning.
Step 2: as shown in FIG. 2, a layer of copper 2 is formed on the surface of a glass substrate 1 by physical vapor deposition, the thickness of the copper 2 is 0.3-1 μm, the target material for physical vapor deposition is copper (99.9%), the physical vapor deposition gas is argon (Ar), and the power is 200-500 w.
And step 3: as shown in fig. 3, the metal copper 2 is thickened by electroplating, the thickness of the metal copper 2 is 18-25 μm, the electroplating anode is a copper plate (99.9%), the electroplating solution is an acid sulfate copper electroplating solution, and the component of the electroplating solution is CuSO 4 、H 2 SO 4
And 4, step 4: as shown in fig. 4 to 8, a photosensitive material 3 (fig. 4) which is an ultraviolet irradiation photosensitive curing material is coated on the metal copper; the photosensitive material is subjected to curing reaction under the action of an ultraviolet light source through the pattern negative film, and the metal copper 2 is covered by a photosensitive curing part (figure 5); in pattern development, Na is used for the uncured portion 2 CO 3 The solution is removed, and the metal copper 2 (figure 6) which is not covered by the photosensitive film 3 on the glass substrate 1 is exposed; with acidic CuCl 2 Soaking the glass substrate 1 in the solution to etch away the exposed copper metal 2 (fig. 7); the solidified photosensitive film 3 was removed with an alkaline NaOH solution to expose the metallic copper 2 on the glass substrate 1 (fig. 8).
And 5: as shown in fig. 9, a nickel layer 4 is electroplated on the metal copper 2, and then a gold layer 5 is electroplated on the nickel layer 4, wherein the thickness of the nickel layer 4 is 3-5 μm, the thickness of the gold layer 5 is 0.05-0.1 μm, and the nickel layer 4 and the gold layer 5 protect the metal copper 2.
Step 6: as shown in fig. 10, a ball-mounting tool is used to mount a solder ball 6 dedicated for BGA on a gold layer 5, wherein the solder ball alloy 6 is Sn63Pb37 or SAC305, and then a glass substrate 1 is reflowed and heated to a temperature 20 to 40 ℃ above the melting temperature of the solder ball 6, soldered, and cooled.
And 7: as shown in fig. 11, a desired mark 7 is printed on the glass substrate 1 by screen printing, and the mark 7 is cured by ink application by heat or ultraviolet curing.
And 8: as shown in fig. 12, individual BGA process devices are cut on the glass substrate 1 along a cutting direction 8 by using a milling cutter and a cutting cutter wheel, wherein the cutting direction 8 is the peripheral edge of the BGA process device, and the peripheral edge of the BGA process device is polished and polished.
To this end, a BAG process device of a glass substrate is completed as shown in fig. 13.
It will be apparent to those skilled in the art from this disclosure that many changes and modifications can be made, or equivalents modified, in the embodiments of the invention without departing from the scope of the invention. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention are still within the scope of the protection of the technical solution of the present invention, unless the contents of the technical solution of the present invention are departed.

Claims (5)

1. A method for manufacturing a BGA process device of a glass substrate is characterized by comprising the following steps:
step 1: preparing a required glass substrate, wherein the glass substrate is high-temperature-resistant and high-light-transmission glass, the high-temperature resistance is higher than 300 ℃, the high-light-transmission index light transmittance is higher than 90%, the glass substrate is sequentially cleaned by acetone, absolute ethyl alcohol and deionized water, the cleaning method is ultrasonic cleaning, and the glass substrate is dried once after the sequential cleaning is finished;
step 2: generating a layer of metal copper on one surface of the glass substrate by using a physical vapor deposition mode;
and step 3: thickening the metal copper subjected to physical vapor deposition in the step 2 to 18-25 μm in an electroplating way;
and 4, step 4: coating a layer of photosensitive curing material on the metal copper, and sequentially carrying out pattern transfer film, ultraviolet exposure and development to enable the curing part of the photosensitive material to cover the metal copper; then, chemically etching to expose the metal copper which is not photosensitive, finally removing the film, removing the photosensitive curing material on the metal copper of the covering pattern, and exposing the metal copper on the glass substrate;
and 5: plating a nickel layer on the metal copper in an electroplating mode, and plating a gold layer;
step 6: placing a special solder ball for a BGA device on the surface of the gold layer, heating the glass substrate to a temperature 30-40 ℃ higher than the melting temperature of the solder ball in a refluxing manner, and cooling to room temperature;
and 7: silk-screen printing characters, trademarks and part marks on the glass substrate;
and 8: and cutting the glass substrate into a single BGA process device along the overall dimension direction by using a milling cutter or a cutting cutter wheel or laser, wherein the cutting direction is the peripheral overall dimension edge of the BGA process device, grinding and polishing the edge of the BGA process device, and removing redundant sharp corners and edges to finish the manufacture of the glass-based BGA process device.
2. The method of claim 1, wherein:
in the step 2, the thickness of the metal copper is 0.3-1 μm, the target material adopted by the physical vapor deposition is copper with the purity of more than 99.9%, and the gas adopted by the physical vapor deposition is argon Ar with the purity of more than 99.99%.
3. The method of claim 1, wherein:
in the step 4, the photosensitive curing material is photosensitive glue or photosensitive ink.
4. The method of claim 1, wherein:
in the step 5, the thickness of the nickel layer is 3-5 μm, and the thickness of the gold layer is 0.05-0.1 μm.
5. The method of claim 1, wherein:
in the step 6, the solder ball alloy is Sn63Pb37, and the melting point is 183 ℃.
CN202210378573.2A 2022-04-12 2022-04-12 Method for manufacturing BGA process device of glass substrate Pending CN114823353A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116759390A (en) * 2023-08-16 2023-09-15 长电集成电路(绍兴)有限公司 An analog chip and its preparation method

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JP2000138259A (en) * 1998-10-29 2000-05-16 Sony Corp Semiconductor device and method of manufacturing the same
JP2002083901A (en) * 2001-07-16 2002-03-22 Matsushita Electric Ind Co Ltd Electronic component
US6413851B1 (en) * 2001-06-12 2002-07-02 Advanced Interconnect Technology, Ltd. Method of fabrication of barrier cap for under bump metal
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US20060065976A1 (en) * 2004-09-24 2006-03-30 Min-Chih Hsuan Method for manufacturing wafer level chip scale package structure
KR20070013478A (en) * 2005-07-26 2007-01-31 삼성전자주식회사 Transparent device and substrate mounting test method using the same
US20150333027A1 (en) * 2013-01-28 2015-11-19 Murata Manufacturing Co., Ltd. Method of Forming Solder Bump, and Solder Bump
CN105280508A (en) * 2014-07-25 2016-01-27 颀邦科技股份有限公司 Substrate with bump structure and manufacturing method thereof
CN110400781A (en) * 2019-07-31 2019-11-01 苏州甫一电子科技有限公司 Three-dimensionally integrated encapsulation pinboard based on glass substrate and preparation method thereof

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08250550A (en) * 1995-03-09 1996-09-27 Fujitsu Ltd Semiconductor element mounting method and semiconductor device
JP2000138259A (en) * 1998-10-29 2000-05-16 Sony Corp Semiconductor device and method of manufacturing the same
US6413851B1 (en) * 2001-06-12 2002-07-02 Advanced Interconnect Technology, Ltd. Method of fabrication of barrier cap for under bump metal
JP2002083901A (en) * 2001-07-16 2002-03-22 Matsushita Electric Ind Co Ltd Electronic component
JP2004014552A (en) * 2002-06-03 2004-01-15 Shinwa:Kk Circuit board for bonding inspection, chip component and method of manufacturing circuit board and chip component
US20060065976A1 (en) * 2004-09-24 2006-03-30 Min-Chih Hsuan Method for manufacturing wafer level chip scale package structure
KR20070013478A (en) * 2005-07-26 2007-01-31 삼성전자주식회사 Transparent device and substrate mounting test method using the same
US20150333027A1 (en) * 2013-01-28 2015-11-19 Murata Manufacturing Co., Ltd. Method of Forming Solder Bump, and Solder Bump
CN105280508A (en) * 2014-07-25 2016-01-27 颀邦科技股份有限公司 Substrate with bump structure and manufacturing method thereof
CN110400781A (en) * 2019-07-31 2019-11-01 苏州甫一电子科技有限公司 Three-dimensionally integrated encapsulation pinboard based on glass substrate and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116759390A (en) * 2023-08-16 2023-09-15 长电集成电路(绍兴)有限公司 An analog chip and its preparation method

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