CN114812924A - High-precision data acquisition and display interaction equipment for vacuum gauge - Google Patents
High-precision data acquisition and display interaction equipment for vacuum gauge Download PDFInfo
- Publication number
- CN114812924A CN114812924A CN202210387287.2A CN202210387287A CN114812924A CN 114812924 A CN114812924 A CN 114812924A CN 202210387287 A CN202210387287 A CN 202210387287A CN 114812924 A CN114812924 A CN 114812924A
- Authority
- CN
- China
- Prior art keywords
- module
- intelligent
- vacuum gauge
- display
- analog signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
- G06F17/10—Complex mathematical operations
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Data Mining & Analysis (AREA)
- Mathematical Analysis (AREA)
- Mathematical Optimization (AREA)
- Computational Mathematics (AREA)
- Pure & Applied Mathematics (AREA)
- Databases & Information Systems (AREA)
- Software Systems (AREA)
- General Engineering & Computer Science (AREA)
- Algebra (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
本申请涉及真空计技术领域，具体而言，涉及一种真空计高精度数采显示交互设备，包括能源分配模块、模拟信号采集模块、智能计算模块、通讯模块以及智能显示与交互模块，其中：能源分配模块分别与智能计算模块以及模拟信号采集模块连接；模拟信号采集模块与智能计算模块连接；通讯模块与智能计算模块连接；智能显示与交互模块与智能计算模块连接。本申请主要用于和电容薄膜真空计进行交互匹配，用户可以自主输入数据以灵活匹配不同参数的传感器，可以有效抑制信号噪声，并通过软件滤波和分段高次拟合算法，大幅提高了测量数据的精度以及设备应用的灵活性和通用性。
The application relates to the technical field of vacuum gauges, and in particular, to a high-precision data acquisition and display interactive device for vacuum gauges, including an energy distribution module, an analog signal acquisition module, an intelligent computing module, a communication module, and an intelligent display and interaction module, wherein: The energy distribution module is respectively connected with the intelligent calculation module and the analog signal acquisition module; the analog signal acquisition module is connected with the intelligent calculation module; the communication module is connected with the intelligent calculation module; the intelligent display and interaction module is connected with the intelligent calculation module. This application is mainly used for interactive matching with capacitive thin-film vacuum gauges. Users can independently input data to flexibly match sensors with different parameters, which can effectively suppress signal noise. Through software filtering and segmented high-order fitting algorithms, the measurement is greatly improved. Accuracy of data and flexibility and versatility of device application.
Description
Technical Field
The application relates to the technical field of vacuum gauges, in particular to a high-precision data acquisition and display interaction device of a vacuum gauge.
Background
The capacitance film vacuum gauge is a common instrument for measuring rough vacuum and low vacuum, is widely applied to the fields of aerospace, nuclear industry, semiconductor manufacturing and the like, and is a necessary measuring instrument in national defense and military industry and semiconductor industrial production. China has no capability of producing a high-precision capacitance film vacuum gauge, and the vacuum gauge mainly depends on foreign import at present.
The capacitance film vacuum gauge mainly comprises a physical part of a sensor and a digital acquisition display and control device, and under the condition that the signal precision of the physical part of the sensor is controlled at a reasonable level, the measurement precision is mainly limited by the design levels of a detection circuit, a data acquisition circuit and a data processing algorithm. Therefore, the high-precision data acquisition display control interaction equipment realizes one of the key equipment for the precise measurement of the instrument.
Disclosure of Invention
The main purpose of the application is to provide a vacuum gauge high-precision data acquisition and display interaction device, which can effectively inhibit signal noise and greatly improve the precision of measured data through software filtering and a segmentation high-order fitting algorithm.
In order to realize the above-mentioned purpose, the application provides a display interaction equipment is adopted to vacuum gauge high accuracy number, including energy distribution module, analog signal collection module, intelligent calculation module, communication module and intelligent display and interaction module, wherein: the energy distribution module is respectively connected with the intelligent calculation module and the analog signal acquisition module; the analog signal acquisition module is connected with the intelligent calculation module; the communication module is connected with the intelligent computing module; the intelligent display and interaction module is connected with the intelligent computing module.
Further, the energy distribution module comprises an AC/DC module and a DC/DC module, wherein the AC/DC module is connected with the commercial power through a high-voltage EMC filter and is connected with the DC/DC module through a low-voltage EMC filter.
Further, the DC/DC module comprises a first DC/DC module and a second DC/DC module, wherein the input ends of the first DC/DC module and the second DC/DC module are connected with the low-voltage EMC filter, and the output ends of the first DC/DC module and the second DC/DC module are connected with the LC filter.
Further, the analog signal acquisition module adopts AD7732 as a digital-to-analog converter.
Furthermore, the input end of the analog signal acquisition module is connected with the vacuum gauge through a single-ended/differential detection circuit.
Furthermore, the output end of the analog signal acquisition module is connected with the intelligent calculation module through an SPI bus.
Furthermore, the intelligent calculation module adopts 8051F340 as a core processor, and is configured to perform digital filtering on the acquired data, and calculate corresponding vacuum degree data from the filtered data.
Furthermore, the intelligent calculation module adopts a sliding window filtering algorithm to carry out digital filtering, and adopts a segmented high-order fitting algorithm to calculate the corresponding vacuum degree data.
Furthermore, the intelligent display and interaction module is an LCD touch display screen.
Further, the intelligent computer system also comprises a storage module, and the storage module is connected with the intelligent computing module.
The invention provides a high-precision data acquisition and display interaction device of a vacuum gauge, which has the following beneficial effects:
the method is mainly used for interactive matching with the capacitance film vacuum gauge, a user can independently input data to flexibly match sensors with different parameters, signal noise can be effectively inhibited, and the precision of measured data and the flexibility and the universality of equipment application are greatly improved through software filtering and a segmentation high-order fitting algorithm.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, serve to provide a further understanding of the application and to enable other features, objects, and advantages of the application to be more apparent. The drawings and their description illustrate the embodiments of the invention and do not limit it. In the drawings:
FIG. 1 is a schematic structural diagram of a vacuum gauge high-precision data acquisition display interaction device provided according to an embodiment of the application;
FIG. 2 is a schematic diagram of an energy distribution module of a vacuum gauge high-precision data acquisition display interaction device provided according to an embodiment of the application;
FIG. 3 is a schematic diagram of an analog signal acquisition module of a vacuum gauge high-precision data acquisition display interaction device provided according to an embodiment of the application;
FIG. 4 is a schematic flow chart of a vacuum gauge high-precision data acquisition display interaction device provided according to an embodiment of the application;
in the figure: the system comprises an energy distribution module 1, an 11-AC/DC module, a 12-first DC/DC module, a 13-second DC/DC module, a 14-high voltage EMC filter, a 15-low voltage EMC filter, a 16-LC filter, a 2-analog signal acquisition module, a 3-intelligent calculation module, a 4-communication module, a 5-intelligent display and interaction module and a 6-storage module.
Detailed Description
In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances in order to facilitate the description of the embodiments of the application herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.
Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.
In addition, the term "plurality" shall mean two as well as more than two.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
As shown in fig. 1, the present application provides a display interaction device is adopted to high accuracy number of vacuum gauge, including energy distribution module 1, analog signal acquisition module 2, intelligent calculation module 3, communication module 4 and intelligent display and interaction module 5, wherein: the energy distribution module 1 is respectively connected with the intelligent computing module 3 and the analog signal acquisition module 2; the analog signal acquisition module 2 is connected with the intelligent calculation module 3; the communication module 4 is connected with the intelligent computing module 3; the intelligent display and interaction module 5 is connected with the intelligent computing module 3.
Specifically, the physical part of the sensors of the capacitive thin film vacuum gauge has batch differences in the production and processing process, and it is not possible to ensure that each parameter of each sensor is completely consistent, and in order to achieve the purpose of high-precision measurement, a commonly adopted method is to customize a dedicated digital acquisition display control interactive device to match with the specific parameter of each vacuum gauge sensor, so that the problem that the universality of the digital acquisition display control interactive device is poor is brought. The high-precision data acquisition and display interaction equipment of the vacuum gauge, which is provided by the embodiment of the application, the analog signal acquisition module 2 can acquire 0-10V analog signals output by a sensor of the vacuum gauge at high precision, the sensor signals are subjected to digital filtering and intelligent calculation by the intelligent calculation module 3 and are displayed by the intelligent display and interaction module 5, data interaction is realized through the communication module 4 and an upper computer, and a user can manually input high-order fitting parameters required by the intelligent calculation module 3 through the intelligent display and interaction module 5, so that the vacuum gauge sensors with different parameters can be flexibly and accurately matched, and the measurement data precision of the vacuum gauge and the use flexibility of the equipment are greatly improved.
Further, as shown in fig. 2, the energy distribution module 1 includes an AC/DC module 11 and a DC/DC module, and the AC/DC module 11 is connected to the commercial power through a high-voltage EMC filter 14 and is connected to the DC/DC module through a low-voltage EMC filter 15. The energy distribution module 1 mainly adopts a mode of combining AC/DC and DC/DC to convert AC220V into DC5V and DC +/-15V secondary power supply for an analog circuit and a digital circuit, and the digital power supply and the analog power supply are supplied separately, so that the interference of the digital circuit to the analog circuit is reduced, and the measurement resolution of the system is improved. The high-voltage EMC filter 14 is mainly used for providing lightning protection and inhibiting alternating current surge protection, and the low-voltage EMC filter 15 is mainly used for providing reverse input protection and slow start functions and improving the EMS performance and the EMI performance of the system. In the embodiment of the present application, the front end of the energy distribution module 1 is connected to the AC220V commercial power through a fuse, the other end of the fuse is connected to the input end of the high-voltage EMC filter 14, the output end of the high-voltage EMC filter 14 is connected to the input end of the AC/DC module 11, pin E of the high-voltage EMC filter 14 is connected to the chassis ground, the output end of the AC/DC module 11 is connected to the input end of the low-voltage EMC filter 15, the output end of the low-voltage EMC filter 15 is connected to the input end of the DC/DC module, and according to practical situations, a 1uF ceramic chip capacitor and a 68uF tantalum capacitor may be respectively connected between the positive and negative electrodes output by the AC/DC module 11.
Further, the DC/DC module includes a first DC/DC module 12 and a second DC/DC module 13, and the input terminals of the first DC/DC module 12 and the second DC/DC module 13 are connected to a low voltage EMC filter 15, and the output terminals are connected to an LC filter 16. The DC/DC module is arranged as a first DC/DC module 12 and a second DC/DC module 13, which are mainly used for respectively providing DC5V and DC +/-15V secondary power supplies for an analog circuit and a digital circuit, and the output end is provided with an LC filter 16 which is mainly used for improving the quality of the output of the secondary power supplies, avoiding the output interference of the DC/DC modules and achieving the purpose of accurate measurement.
Further, as shown in fig. 3, the analog signal acquisition module 2 adopts AD7732 as a digital-to-analog converter. The analog signal acquisition module 2 is mainly used for acquiring analog signals output by a vacuum gauge sensor, an AD7732 is used as a digital-to-analog converter, a DC +15V power supply is converted into a high-stability DC +5V power supply by an AD7105 for the analog signal acquisition module 2 to use, and an AD780 is used for providing ultrahigh-precision 2.5V reference standard for the AD 7732. In the embodiment of the application, 6 pins of the AD780 are respectively connected with 11 pins, 14 pins, 18 pins and 21 pins of the AD7732, 5V analog power supply is provided for the AD7732 by using the AD7105, a digital ground (DGNG) and an Analog Ground (AGND) are connected through magnetic beads at a position as close to the AD7732 as possible, and the Analog Ground (AGND) and a chassis ground (KGND) are connected in a single electric mode.
Further, the input end of the analog signal acquisition module 2 is connected with the vacuum gauge through a single-ended/differential detection circuit. Analog signals output by a vacuum gauge sensor are transmitted to the analog signal acquisition module 2 through a single-ended/differential detection circuit, the AD7732 is configured to be in a differential input mode, detected signals are respectively connected to positive and negative differential input ends of the AD7732 through metal mesh shielding cables, and a cable shielding layer is well lapped with a machine shell ground (KGND).
Furthermore, the output end of the analog signal acquisition module 2 is connected with the intelligent calculation module 3 through an SPI bus. In this embodiment of the application, there is 6.144MHz crystal oscillator to provide digital time sequence for AD7732, and AD7732 and intelligent computing module 3 pass through SPI bus connection, and the signal that analog signal acquisition module 2 gathered passes through SPI bus transmission to intelligent computing module 3 in.
Further, the intelligent calculation module 3 adopts 8051F340 as a core processor, and is configured to perform digital filtering on the acquired data, and calculate corresponding vacuum degree data from the filtered data. In the embodiment of the application, the intelligent computing module 3 uses 8051F340 as a core processor, the core processor is connected with the analog signal acquisition module 2 through an SPI bus, a UART0 of the core processor is connected with the communication module 4 to realize data interaction with an upper computer, and a UART1 interface of the core processor is connected with an intelligent display and interaction module 5 composed of a serial touch screen.
Furthermore, the intelligent calculation module 3 adopts a sliding window filtering algorithm to perform digital filtering, and adopts a piecewise high-order fitting algorithm to calculate the corresponding vacuum degree data. In the embodiment of the application, the noise level of the acquired signal is suppressed by measures such as hardware filtering, shielding, grounding and the like; the signal-to-noise ratio of the detected signal is further improved through a sliding window filtering algorithm, and the implementation process of the sliding window filtering algorithm is as follows: configuring the AD7732 into a highest-precision sampling mode, wherein the time for completing one sampling in the mode is 1.35ms, continuously starting 30 times of AD conversion, sequencing 30 converted data and storing the data in a global array, taking the average value of 10 groups of data in the middle of the array as new data of sliding window filtering, setting the length of a sliding window filtering window as 4 groups of data, sequencing the data in the sliding window array according to the time sequence, removing the earliest data and then storing the earliest data in the sliding window filtering operation, averaging the four groups of data in the sliding window array, and transmitting the averaged data as final filtering data to the next function for processing. The measurement error caused by nonlinearity between the measured value and the vacuum value is counteracted through a piecewise high-order fitting algorithm, and the realization process of the piecewise high-order fitting algorithm is as follows: firstly, putting a capacitance film vacuum gauge into a standard device, obtaining the corresponding relation between data after sliding window filtration and standard vacuum degree in a full-range, finding 3 points aiming at the nonlinear condition between the data and the standard vacuum degree, respectively dividing the full-range into 4 sections with better linearity, respectively carrying out three times of fitting on the 4 sections of data, and obtaining a fitting function: y is Ax 3 +Bx 2 + Cx + D, 3 boundary value data and 4 fitting parameters A, B, C, D are input and sent to the core processor 8051F340 through the touch screen, and the intelligent computing module 3 writes the received user data intoOld data are stored in the storage module 6 and are covered, and the data after the sliding window is filtered are converted into vacuum degree data by using the latest user data according to a segmentation high-order fitting formula when the vacuum degree is calculated each time.
Further, the intelligent display and interaction module 5 is an LCD touch display screen. The intelligent display and interaction module 5 is used for displaying the vacuum degree data calculated by the intelligent calculation module 3 on one hand, and on the other hand, a user can input the segmentation boundary value and the fitting formula parameter required by the segmentation high-order fitting algorithm according to the LCD touch display screen and send corresponding instructions through the touch display screen, so that the measurement of the vacuum gauge sensors with different parameters is realized, and the universality of the whole equipment is improved.
Further, the intelligent computer system also comprises a storage module 6, wherein the storage module 6 is connected with the intelligent computing module 3. In the embodiment of the application, the intelligent computing module 3 stores the user input data by using the external EEPROM of the I2C bus as a power-down memory for storing the user data.
Specifically, as shown in fig. 4, the working flow of the vacuum gauge high-precision data acquisition display interaction device provided by the embodiment of the present application is as follows: after the device is started, firstly, system initialization is carried out, wherein the system initialization comprises 8051F340 initialization and AD7732 initialization, then the processor sends a handshake signal to the AD7732, if a correct handshake reply signal cannot be received, the communication between the core processor 8051F340 and the AD7732 is not normal, and at the moment, the core processor 8051F340 sends a fault instruction to the LCD touch display screen and the fault instruction is displayed by the LCD touch display screen; if the handshake is successful, firstly inquiring whether an instruction of the LCD touch display screen exists or not and executing (including a zero adjustment instruction and a full adjustment instruction), then starting the AD7732 to collect signals, carrying out sliding window filtering processing on the collected signal data, carrying out segmentation high-order fitting calculation on the filtered data according to a user instruction and configuration parameters, and finally storing the calculated vacuum degree data and covering the old data. In the whole process, user interactive operation is completed by a key interruption function (UART1 interruption), when an instruction is sent by a soft key of an LCD touch display screen, a program enters the key interruption function, the instruction type is analyzed and the corresponding instruction flag bit is changed in the key interruption function, and a key instruction flag is inquired once in each period in a main function and is executed; data display is accomplished by timer 1 interrupt function and LCD touch display screen cooperation, and timer 1 triggers once per 300ms to break off, and the touch-sensitive screen data that starts to update after advancing the interrupt, accomplishes data display's refresh, and RS485 serial communication is controlled by timer 0 interrupt, advances timer 0 interrupt and sends a packet of status data through the serial ports once per second, and the host computer of being convenient for detects equipment.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. The utility model provides a mutual equipment of demonstration is adopted to vacuum gauge high accuracy number which characterized in that, includes energy distribution module, analog signal acquisition module, intelligent calculation module, communication module and intelligent display and interactive module, wherein:
the energy distribution module is respectively connected with the intelligent calculation module and the analog signal acquisition module;
the analog signal acquisition module is connected with the intelligent calculation module;
the communication module is connected with the intelligent computing module;
the intelligent display and interaction module is connected with the intelligent computing module.
2. The vacuum gauge high precision data acquisition display interaction device of claim 1, wherein the energy distribution module comprises an AC/DC module and a DC/DC module, the AC/DC module being connected to the utility power through a high voltage EMC filter and to the DC/DC module through a low voltage EMC filter.
3. The vacuum gauge high-precision data acquisition display interaction device according to claim 2, wherein the DC/DC module comprises a first DC/DC module and a second DC/DC module, the input ends of the first DC/DC module and the second DC/DC module are connected with the low-voltage EMC filter, and the output ends of the first DC/DC module and the second DC/DC module are connected with the LC filter.
4. The vacuum gauge high precision digital acquisition display interaction device of claim 1, wherein the analog signal acquisition module employs AD7732 as a digital-to-analog converter.
5. The vacuum gauge high-precision data acquisition display interaction device according to claim 4, wherein an input end of the analog signal acquisition module is connected with the vacuum gauge through a single-ended/differential detection circuit.
6. The vacuum gauge high-precision data acquisition and display interaction device as claimed in claim 4, wherein the output end of the analog signal acquisition module is connected with the intelligent calculation module through an SPI bus.
7. The vacuum gauge high-precision data acquisition and display interaction device as claimed in claim 1, wherein the intelligent computing module adopts 8051F340 as a core processor and is used for digitally filtering the acquired data and computing corresponding vacuum degree data through the filtered data.
8. The vacuum gauge high-precision data acquisition and display interaction device of claim 7, wherein the intelligent calculation module performs digital filtering by using a sliding window filtering algorithm, and calculates corresponding vacuum degree data by using a piecewise high-order fitting algorithm.
9. The vacuum gauge high-precision data acquisition display interaction device according to claim 1, wherein the intelligent display and interaction module is an LCD touch display screen.
10. The vacuum gauge high-precision data acquisition display interaction device of claim 1, further comprising a storage module connected with the intelligent computing module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210387287.2A CN114812924A (en) | 2022-04-12 | 2022-04-12 | High-precision data acquisition and display interaction equipment for vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210387287.2A CN114812924A (en) | 2022-04-12 | 2022-04-12 | High-precision data acquisition and display interaction equipment for vacuum gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114812924A true CN114812924A (en) | 2022-07-29 |
Family
ID=82536173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210387287.2A Pending CN114812924A (en) | 2022-04-12 | 2022-04-12 | High-precision data acquisition and display interaction equipment for vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114812924A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115755849A (en) * | 2022-11-18 | 2023-03-07 | 广西电网有限责任公司电力科学研究院 | Transformer temperature control device detector and power supply system |
| CN115790963A (en) * | 2022-12-25 | 2023-03-14 | 兰州空间技术物理研究所 | Micro-capacitance detection device and calibration method for MEMS capacitance film vacuum gauge |
| CN115901079A (en) * | 2022-11-15 | 2023-04-04 | 北京卫星环境工程研究所 | MEMS full-range Pirani gauge and pressure measurement method thereof |
| CN116165955A (en) * | 2023-03-09 | 2023-05-26 | 上海航天电子通讯设备研究所 | Extensible multichannel high-precision satellite load remote sensing data acquisition system |
| CN119509799A (en) * | 2024-11-18 | 2025-02-25 | 兰州空间技术物理研究所 | A slave capacitance film vacuum gauge readout device based on EtherCAT bus |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5475619A (en) * | 1991-02-22 | 1995-12-12 | Smc Kabushiki Kaisha | Method of and apparatus for processing vacuum pressure information |
| CN202853839U (en) * | 2012-11-01 | 2013-04-03 | 机械工业真空设备质量检验中心 | Integrated type vacuum gauge |
| CN103196628A (en) * | 2013-03-08 | 2013-07-10 | 成都倍特科技有限责任公司 | Vacuum degree on-line detecting system |
| CN206348099U (en) * | 2017-01-13 | 2017-07-21 | 成都兴睿宝电子科技有限公司 | Multichannel follows inspection resistance vacuum gauge |
| CN109681495A (en) * | 2018-12-19 | 2019-04-26 | 中国石油化工股份有限公司 | A kind of electro-hydraulic actuator control system |
| CN209559401U (en) * | 2019-04-30 | 2019-10-29 | 国网安徽省电力有限公司培训中心 | A kind of accurate electron vacuum gage of reverse-filling |
| CN209992108U (en) * | 2019-05-24 | 2020-01-24 | 南开大学 | A device for measuring vacuum |
| CN113899494A (en) * | 2021-12-09 | 2022-01-07 | 北京晨晶电子有限公司 | Detection circuit of capacitance type film vacuum gauge, vacuum gauge and vacuum degree detection method |
-
2022
- 2022-04-12 CN CN202210387287.2A patent/CN114812924A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5475619A (en) * | 1991-02-22 | 1995-12-12 | Smc Kabushiki Kaisha | Method of and apparatus for processing vacuum pressure information |
| CN202853839U (en) * | 2012-11-01 | 2013-04-03 | 机械工业真空设备质量检验中心 | Integrated type vacuum gauge |
| CN103196628A (en) * | 2013-03-08 | 2013-07-10 | 成都倍特科技有限责任公司 | Vacuum degree on-line detecting system |
| CN206348099U (en) * | 2017-01-13 | 2017-07-21 | 成都兴睿宝电子科技有限公司 | Multichannel follows inspection resistance vacuum gauge |
| CN109681495A (en) * | 2018-12-19 | 2019-04-26 | 中国石油化工股份有限公司 | A kind of electro-hydraulic actuator control system |
| CN209559401U (en) * | 2019-04-30 | 2019-10-29 | 国网安徽省电力有限公司培训中心 | A kind of accurate electron vacuum gage of reverse-filling |
| CN209992108U (en) * | 2019-05-24 | 2020-01-24 | 南开大学 | A device for measuring vacuum |
| CN113899494A (en) * | 2021-12-09 | 2022-01-07 | 北京晨晶电子有限公司 | Detection circuit of capacitance type film vacuum gauge, vacuum gauge and vacuum degree detection method |
Non-Patent Citations (1)
| Title |
|---|
| 董惠等: "《建筑环境测试技术》", 哈尔滨：哈尔滨工程大学出版社, pages: 287 - 288 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115901079A (en) * | 2022-11-15 | 2023-04-04 | 北京卫星环境工程研究所 | MEMS full-range Pirani gauge and pressure measurement method thereof |
| CN115755849A (en) * | 2022-11-18 | 2023-03-07 | 广西电网有限责任公司电力科学研究院 | Transformer temperature control device detector and power supply system |
| CN115790963A (en) * | 2022-12-25 | 2023-03-14 | 兰州空间技术物理研究所 | Micro-capacitance detection device and calibration method for MEMS capacitance film vacuum gauge |
| CN116165955A (en) * | 2023-03-09 | 2023-05-26 | 上海航天电子通讯设备研究所 | Extensible multichannel high-precision satellite load remote sensing data acquisition system |
| CN119509799A (en) * | 2024-11-18 | 2025-02-25 | 兰州空间技术物理研究所 | A slave capacitance film vacuum gauge readout device based on EtherCAT bus |
| CN119509799B (en) * | 2024-11-18 | 2025-09-26 | 兰州空间技术物理研究所 | Slave station capacitance film vacuum gauge reader based on EtherCAT bus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114812924A (en) | High-precision data acquisition and display interaction equipment for vacuum gauge | |
| CN102981041A (en) | A single battery monitoring system | |
| CN110161342A (en) | A kind of electric energy quality monitoring system and method | |
| CN106983509A (en) | A kind of portable brain electric acquisition system with real-time mark function | |
| CN103487778B (en) | A kind of analog quantity bearing calibration and the single CPU low-voltage protection device based on the method | |
| CN101344437B (en) | High-precision strong anti-interference temperature measurement system and method | |
| CN107301006A (en) | A kind of capacitance plate water-proofing treatment pre-judging method | |
| CN113687289B (en) | A measurement and self-calibration method and system for a non-contact miniature voltage sensor | |
| CN115436819A (en) | A high-precision multi-channel isolated battery voltage monitoring device | |
| CN102510285B (en) | Analog signal acquisition method for data acquisition transmission apparatus | |
| CN104316567A (en) | Online pH value monitoring system | |
| CN105769179B (en) | A kind of portable 12 lead electrocardiosignal synchronous acquisition device | |
| CN210466456U (en) | Paper quantity detection device based on capacitive sensor | |
| CN210442295U (en) | Anti-interference multi-parameter online water quality analyzer circuit structure | |
| CN2601395Y (en) | Digitized weighting module | |
| CN203885493U (en) | Automatic calibrator for multi-parameter physiological signal simulator | |
| CN104678345B (en) | Electronic mutual inductor based on synchronized sampling holding circuit is traced to the source device | |
| CN119246964B (en) | Transmission tower grounding resistance value measurement system and method based on multi-frequency measurement | |
| CN208239563U (en) | New Bluetooth DC High Voltage Generator and System | |
| CN206399884U (en) | A kind of multichannel conductivity measuring apparatus | |
| CN202196117U (en) | Power quality disturbance data acquisition device | |
| CN210015227U (en) | Single-phase mutual inductor signal acquisition board and calibrator thereof | |
| CN112327801A (en) | A kind of intelligent steering wheel function test tool and test method thereof | |
| CN218938485U (en) | Configurable multichannel Rogowski coil current measurement automatic calibration device | |
| CN118501534A (en) | Method, device, equipment and medium for measuring harmonic voltage by capacitive voltage transformer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |