CN114810561A - Thin gas transmission device - Google Patents

Abstract

A thin gas delivery device, comprising: a base plate having: a first bottom surface; a second bottom surface; the accommodating groove is formed by sinking from the first bottom surface and is provided with an accommodating bottom surface; the air outlet groove is formed by sinking from the accommodating bottom surface and is provided with an air outlet channel; the positioning part surrounds the accommodating groove; the vent hole is positioned on the positioning part and is provided with an air inlet end and a vent end, the vent end is communicated with the containing groove, and the vent hole is gradually reduced from the vent end to the air inlet end; an air inlet pipe and an air outlet pipe; the check valve is arranged in the accommodating groove; the gas pump is arranged on the check valve; and the top cover is fixedly arranged on the positioning part and covers the accommodating groove in a sealing manner.

Description

Low profile gas delivery device

【Technical field】

This case is about a thin gas transmission device, especially a thin gas transmission device that can avoid gas backflow.

【Background technique】

With the rapid development of science and technology, the application of gas delivery devices has become more and more diversified, such as industrial applications, biomedical applications, medical care, electronic cooling, etc., and even the recent popular wearable devices. The pump has gradually moved towards the miniaturization of the device and the maximization of the flow rate.

After the current thin gas transmission device inflates an airbag, when the inflation is completed and the operation of the thin gas transmission device stops, the phenomenon of gas backflow often occurs, so that the air pressure in the inflation load is insufficient. Therefore, how to stop the thin gas transmission device At present, avoiding gas backflow is a difficult problem that needs to be solved at present.

Please refer to FIGS. 1A and 1B. FIGS. 1A and 1B are a thin gas transmission device 200 of the prior art, including a lower plate 201, a gas pump 202, and an upper plate 203. The lower plate 201 has an accommodating area 2011 and a through hole 2012, an air plug 2013, an air inlet end 2014 and an air outlet end 2015, the air pump 202 is arranged in the accommodating area 2011, the air plug 2013 is arranged in the through hole 2012, the upper plate 203 covers the accommodating area 2011, and the air pump 202 operates After that, the gas in the accommodating area 2011 is sucked and moved to the gas outlet end 2015. At this time, the accommodating area 2011 is under negative pressure, and the gas will enter the through hole 2012 through the intake end 2014, and push the air plug 2013 in the through hole 2012. When the gas pump 202 is stopped, the gas plug 2013 is elastically returned to the through hole 2012 to close the through hole 2012 .

In the prior art, the gas plug 2013 is used to prevent gas backflow, but the size of the gas plug 2013 is extremely small, and it is easy to maintain the quality of the gas plug 2013 due to tolerances when manufacturing the gas plug 2013, but the gas plug 2013 must match the through hole 2012, If the two cannot be matched, the gas will flow back or cannot be assembled. Therefore, it is necessary to find another method to prevent the back flow of the gas.

[Content of the Invention]

The main purpose of this case is to provide a thin gas transmission device that uses a check valve to achieve the effect of prohibiting gas backflow.

A generalized implementation aspect of the present case is a thin gas transmission device, comprising: a casing having: a casing surface; an accommodating groove recessed from the casing surface and having an accommodating bottom surface; The accommodating bottom surface is concavely formed; a positioning part protrudes from the surface of the shell and surrounds the accommodating groove; a ventilation hole is located in the positioning part, and has an air inlet end and a ventilation end, and the ventilation end communicates with the accommodating groove , the vent hole is tapered from the vent end to the intake end; an intake pipe, disposed on the housing, has an intake channel, and the intake channel communicates with the intake end of the vent hole; and an air outlet pipe, which is arranged on the casing and has an air outlet channel, and the air outlet channel communicates with the air outlet groove; a check valve is arranged in the accommodating groove, and includes: a blocking piece, which is arranged on the accommodating bottom surface And covering the air outlet groove, it has: a first surface; a second surface, opposite to the first surface; a protruding part, protruding from the second surface, located in the air outlet groove; and a plurality of through holes surrounding the air outlet a protruding part; a valve plate, disposed on the second surface, having: a valve part, having a valve hole, the valve hole corresponding to the protruding part vertically; a fixing part, located in the valve part; wherein, the valve plate By combining the fixing part to the second surface, the protruding part abuts the valve part and blocks the valve hole; a gas pump is installed on the first surface; and a top cover is fixed on the positioning part and seals Cover the accommodating groove.

[Description of drawings]

FIG. 1A and FIG. 1B are schematic diagrams of a thin gas transmission device of the prior art.

FIG. 2A is a perspective view of the thin gas transmission device of the present invention.

FIG. 2B is an exploded view of the thin gas delivery device of the present invention.

FIG. 2C is another perspective exploded view of the thin gas transmission device of the present invention.

FIG. 2D is a bottom view of the thin gas transmission device of the present invention.

FIG. 2E is a perspective view of the bottom plate of the present invention.

FIG. 3A is an exploded schematic diagram of the gas pump of the present invention.

FIG. 3B is another perspective exploded schematic view of the gas pump of the present invention.

4A is a schematic cross-sectional view of the gas pump of the present invention.

4B to 4D are schematic diagrams of the operation of the gas pump of the present invention.

FIG. 5A is a cross-sectional view A-A in FIG. 2D .

FIG. 5B is a B-B sectional view in FIG. 2D .

FIG. 5C is a schematic diagram of avoiding gas backflow in this case.

【Symbol Description】

100: Low Profile Gas Delivery Device

1: Shell

11: Shell surface

12: Bottom surface

13: accommodating slot

131: accommodating bottom surface

14: Air outlet slot

15: Positioning part

151: Positioning Structure

152: Fixing hole

16: Air vents

161: Intake end

162: Vent end

17: Intake pipe

171: Intake passage

18: Outlet tube

181: Air outlet channel

1a: first side wall

1b: Second side wall

1c: Third side wall

1d: Fourth side wall

2: Check valve

21: Barrier sheet

211: First Surface

212: Second Surface

213: Projection

214: Perforation

215: Positioning notches

22: valve plate

22a: valve hole

221: Valve Department

222: Fixed part

3: Gas pump

31: Inlet plate

31a: Inlet hole

31b: Bus bar groove

31c: Convergence Chamber

32: Resonance sheet

32a: Hollow hole

32b: Movable part

32c: Fixed part

33: Piezoelectric Actuators

33a: Hoverboard

33b: Outer frame

33c: Bracket

33d: Piezo Components

33e: Gap

33f: convex part

34: The first insulating sheet

35: Conductive sheet

36: Second insulating sheet

37: Chamber Space

4: Top cover

41: Fixed tenon

A-A, B-B: Section lines

200: Low Profile Gas Delivery Device

201: Lower Board

2011: Containment area

2012: Through Hole

2013: Airlock

2014: Air intake

2015: Outlet

202: Gas Pump

203: Upper Board

【Detailed ways】

Embodiments embodying the features and advantages of the present case will be described in detail in the description of the latter paragraph. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are essentially for illustration purposes, rather than for limiting this case.

Please refer to FIGS. 2A to 2B , the present application provides a thin gas transmission device 100 , which includes a casing 1 , a check valve 2 , a gas pump 3 and a top cover 4 , and the gas pump 3 is arranged on the check valve 2 . The two are accommodated in the casing 1 , and finally covered by the top cover 4 .

Please refer to FIG. 2E , the casing 1 is a square casing, but not limited to this, including a casing surface 11 , a bottom surface 12 , an accommodating groove 13 , an air outlet groove 14 , a positioning portion 15 , A vent hole 16, an air inlet pipe 17, an air outlet pipe 18, a first side wall 1a, a second side wall 1b, a third side wall 1c and a fourth side wall 1d, the shell surface 11 and the bottom surface 12 are On two opposite surfaces, the accommodating groove 13 is formed concavely from the shell surface 11 and has a accommodating bottom surface 131 , the air outlet groove 14 is concavely formed from the accommodating bottom surface 131 , and the positioning portion 15 protrudes from the casing surface 11 and surrounds the accommodating groove 13 The ventilation hole 16 is located on the positioning portion 15, and has an air inlet end 161 and a ventilation end 162. The ventilation end 162 communicates with the accommodating groove 13, and the ventilation end 162 to the air inlet end 161 is in a constricted shape, and the air inlet end 162 is in a constricted shape. The air pipe 17 is arranged on the first side wall 1a of the housing 1 and has an air intake passage 171 which communicates with the air inlet end 161 of the vent hole 16 , and the air outlet pipe 18 is arranged on the first side of the housing 1 . The third side wall 1c opposite the wall 1a has an air outlet channel 181 that communicates with the air outlet groove 14, wherein the air inlet pipe 17 and the air outlet pipe 18 are dislocated; it is worth noting that the air inlet pipe 17 and the air outlet pipe 18 can also be arranged The opposite second side wall 1b or the fourth side wall 1d, or the same side, such as being disposed on the first side wall 1a at the same time, is not limited to this.

Please refer to FIG. 2B and FIG. 2C again, the check valve 2 is disposed in the accommodating groove 13 of the housing 1 , and the check valve 2 includes a blocking sheet 21 and a valve sheet 22 .

The blocking sheet 21 is disposed on the accommodating bottom surface 131 of the accommodating groove 13 and covers the air outlet groove 14, and has a first surface 211, a second surface 212, a protruding part 213 and a plurality of through holes 214; the first surface 211 and the first surface 211 The two surfaces 212 are opposite to each other, the second surface 212 is attached to the accommodating bottom surface 131 , so that the check valve 2 is fixed to the accommodating groove 13 , and the protruding portion 213 protrudes from the second surface 212 . When accommodating the bottom surface 131, the protruding portion 213 is located in the air outlet groove 14, and the number of through holes 214 in this embodiment is four, but not limited to this, and the four through holes 214 surround the periphery of the protruding portion 213; The first surface 211 of the blocking sheet 21 is punched to form the protruding portion 213, so that the protruding portion 213 can protrude from the second surface 212, and the blocking sheet 21 can be formed of a metal material, in this embodiment, can be made of copper , aluminum, stainless steel or other alloys, and the thickness of the barrier sheet 21 formed of metal material is less than 0.05mm, its material and thickness are limited by the mechanical strength required by the barrier sheet 21, as long as the mechanical strength of the barrier sheet 21 is sufficient to withstand Stamping process, and can not be excessively deformed under the reaction force of air pressure.

The valve sheet 22 is disposed on the second surface 212 of the blocking sheet 21, and has a valve portion 221 and a fixing portion 222. The valve portion 221 has a valve hole 22a in the center thereof, and the valve hole 22a is vertically corresponding to the protruding portion 213 of the blocking sheet 21. The fixing part 222 is located around the valve part 221. When the valve piece 22 is fixed on the second surface 212 of the blocking piece 21 through the fixing part 222, the protruding part 213 of the blocking piece 21 abuts against the valve part 221 and blocks the valve hole 22a, wherein , the valve part 221 of the valve plate 22 can be made of elastic materials, such as silicone, rubber, polyimide film (PI film) and other elastic materials, the fixed part 222 can be a glue layer, and glue is arranged around the valve part 221 The layer forms a fixing portion 222 , and the valve portion 221 is adhered to the second surface 212 of the barrier sheet 21 through an adhesive layer (fixing portion 222 ) to fix the valve sheet 22 to the barrier sheet 21 .

It is worth noting that the protruding portion 213 of the check valve 2 is in the shape of a flat cylinder, and in order to block the valve hole 22a, the diameter of the protruding portion 213 cannot be smaller than the diameter of the valve hole 22a. The diameter of the protruding portion 213 is larger than the diameter of the valve hole 22a. In addition, in order to make the protruding portion 213 abut the valve portion 221, the thickness of the protruding portion 213 shall not be less than the thickness of the fixing portion 222. In this embodiment, the thickness of the protruding portion 213 is greater than The thickness of the fixing portion 222 enables the protruding portion 213 to slightly deform the valve portion 221 around the valve hole 22a downward, resulting in a better anti-return effect.

The thickness of the valve portion 221 of the above-mentioned valve 22 is 2 mm, the diameter of the valve hole 22a is 3 mm, the thickness of the fixed portion 222 is 0.14 mm, and the diameter of the perforation 214 of the barrier sheet 21 is 1 mm, and the diameter of the protruding portion 213 needs to be larger than the valve hole. 22a, the diameter of the protruding portion 213 is between 4 mm and 5 mm, and the thickness of the protruding portion 213 needs to be greater than the thickness of the fixing portion 222, so the thickness of the protruding portion 213 is 0.2 mm.

The gas pump 3 is disposed on the first surface 211 of the blocking plate 21 , please refer to FIG. 3A and FIG. 3B again, the gas pump 3 includes an inlet plate 31 , a resonance plate 32 , a piezoelectric actuator 33 , a first The insulating sheet 34 , a conductive sheet 35 and a second insulating sheet 36 are stacked and assembled in sequence. The inflow plate 31 has at least one inflow hole 31a, at least one confluence groove 31b and a confluence chamber 31c, the inflow hole 31a is used for introducing gas, the inflow hole 31a corresponds to the through-flow groove 31b, and the confluence groove 31b The gas is confluenced into the confluence chamber 31c, so that the gas introduced by the inflow hole 31a can be confluenced into the confluence chamber 31c. In this embodiment, the numbers of the inflow holes 31a and the busbar grooves 31b are the same, and the numbers of the inflow holes 31a and the busbar grooves 31b are respectively four, which are not limited to this, and the four inflow holes 31a are connected to each other. to the 4 busbar grooves 31b, and the 4 busbar grooves 31b are merged to the busbar chamber 31c.

Please refer to FIG. 3A , FIG. 3B and FIG. 4A , the above-mentioned resonance sheet 32 is assembled on the inlet plate 31 by lamination, and the resonance sheet 32 has a hollow hole 32 a , a movable portion 32 b and a fixed portion The hollow hole 32a is located at the center of the resonance plate 32 and corresponds to the confluence chamber 31c of the inlet plate 31, and the movable part 32b is arranged around the hollow hole 32a and is opposite to the confluence chamber 31c, and The fixing portion 32 c is provided on the outer peripheral portion of the resonance sheet 32 and is fixed to the air inlet plate 31 .

Please continue to refer to FIG. 3A , FIG. 3B and FIG. 4A , the above-mentioned piezoelectric actuator 33 is joined to the resonance plate 32 , and includes a suspension plate 33 a , an outer frame 33 b , at least one bracket 33 c , and a piezoelectric element 33 d , at least a gap 33e and a convex portion 33f. Among them, the suspension board 33a is in a square shape. The reason why the suspension board 33a is a square is compared with the design of the circular suspension board. For capacitive loads, the power consumption will increase with the increase of the frequency, and the resonant frequency of the long-sided square suspension board 33a is obviously lower than that of the circular suspension board, so the relative power consumption is also significantly lower, that is, the use of this case. The suspension board 33a of square design has the benefit of saving electricity; the outer frame 33b is arranged around the outer side of the suspension board 33a; at least one bracket 33c is connected between the suspension board 33a and the outer frame 33b to provide elastic support for the suspension board 33a. support force; and a piezoelectric element 33d has a side length that is less than or equal to a side length of a suspension board 33a of the suspension board 33a, and the piezoelectric element 33d is attached to a surface of the suspension board 33a for applying a voltage To drive the suspension plate 33a to bend and vibrate; and at least one gap 33e is formed between the suspension plate 33a, the outer frame 33b and the bracket 33c for gas to pass through; the convex portion 33f is arranged on the surface of the suspension plate 33a where the piezoelectric element 33d is attached In the present embodiment, the convex portion 33f may be formed by integrally forming the suspension plate 33a by an etching process and protruding from the opposite surface of the surface to which the piezoelectric element 33d is attached. a convex structure.

Please continue to refer to FIG. 3A , FIG. 3B and FIG. 4A , the above-mentioned inlet plate 31 , resonance sheet 32 , piezoelectric actuator 33 , first insulating sheet 34 , conductive sheet 35 and second insulating sheet 36 are stacked in sequence In combination, a cavity space 37 needs to be formed between the suspension plate 33a of the piezoelectric actuator 33 and the resonance plate 32 , and the cavity space 37 can be used between the resonance plate 32 and the outer frame 33b of the piezoelectric actuator 33 The gap is formed by filling a material, such as conductive glue, but not limited to this, so that a certain depth can be maintained between the resonance plate 32 and a surface of the suspension plate 33a to form the cavity space 37, so that the gas can be guided more quickly Since the suspension plate 33a and the resonance plate 32 keep a proper distance, the contact interference is reduced, and the noise generation can be reduced. Of course, in another embodiment, the outer frame 33b of the piezoelectric actuator 33 can also be used. The height is increased to reduce the thickness of the conductive glue filled in the gap between the resonant plate 32 and the outer frame 33b of the piezoelectric actuator 33, so that the overall structure of the gas pump 3 is assembled without the hot-pressing temperature and the temperature of the conductive glue due to the filling material of the conductive glue. The cooling temperature indirectly affects the actual spacing of the cavity space 37 after molding due to thermal expansion and cold contraction of the filling material of the conductive adhesive, but is not limited thereto. In addition, the chamber space 37 will affect the transmission effect of the gas pump 3, so maintaining a fixed chamber space 37 is very important for the gas pump 3 to provide stable transmission efficiency.

In order to understand the output operation mode of the gas pump 3 providing gas transmission, please continue to refer to FIG. 4B to FIG. 4D , please refer to FIG. 4B first, the piezoelectric element 33d of the piezoelectric actuator 33 is deformed after being applied with a driving voltage The suspension plate 33a is driven to move downward. At this time, the volume of the chamber space 37 is increased, and a negative pressure is formed in the chamber space 37, so that the gas in the confluence chamber 31c is drawn into the chamber space 37, and the resonance plate 32 is subjected to The influence of the resonance principle is synchronously displaced downward, which increases the volume of the confluence chamber 31c, and because the gas in the confluence chamber 31c enters the chamber space 37, the interior of the confluence chamber 31c is also in a negative pressure state, and further The gas is sucked into the confluence chamber 31c through the inflow hole 31a and the bus bar groove 31b; please refer to FIG. 4C again, the piezoelectric element 33d drives the suspension plate 33a to displace upward, compressing the chamber space 37, and similarly, the resonance plate 32 is The suspension plate 33a is displaced upward due to resonance, forcing the gas in the synchronously pushing chamber space 37 to be transported downward through the gap 33e, so as to achieve the effect of transporting the gas; finally, please refer to FIG. 4D, when the suspension plate 33a returns to its original position , the resonance plate 32 is still displaced downward due to inertia. At this time, the resonance plate 32 will move the gas in the compression chamber space 37 to the gap 33e, and increase the volume in the confluence chamber 31c, so that the gas can continuously pass through the inlet and outlet. The flow holes 31a and the busbar grooves 31b are gathered in the confluence chamber 31c, and the gas pump 3 as shown in FIG. 4B to FIG. 4D provides the gas transmission operation steps by continuously repeating the above-mentioned steps, so that the gas pump 3 can make the gas continuously and automatically feed. The flow hole 31a enters the flow channel formed by the inlet plate 31 and the resonator plate 32 to generate a pressure gradient, which is then transported downward through the gap 33e to make the gas flow at a high speed to achieve the operation operation of the gas pump 3 to transmit the gas output.

Please refer to FIG. 5A and FIG. 5B. FIG. 5A is a schematic cross-sectional view taken along the line A-A of FIG. 2B. After the gas pump 3 starts to operate, the gas between the inlet plate 31 and the top cover 4 starts to enter the inlet hole 31a, At the same time, when the gas in the accommodating groove 13 enters the gas pump 3, the accommodating groove 13 is in a negative pressure state, and the gas outside the thin gas transmission device 100 enters through the air inlet passage 171 of the air inlet pipe 17. , and is introduced into the accommodating groove 13 through the vent hole 16 . When the gas pump 3 continues to operate, the gas will continue to be introduced into the air inlet passage 171 , and then transported downward by the gas pump 3 .

Referring to FIG. 5B again, FIG. 5B is a schematic cross-sectional view of the B-B section line in FIG. 2B . When the gas moves downward to the check valve 2 , it moves to the valve plate 22 through the plurality of perforations 214 on the blocking sheet 21 respectively, and the gas contacts the valve. After removing the sheet 22, push the valve portion 221, so that the valve hole 22a and the valve portion 221 around the valve hole 22a are separated from the protruding portion 213 of the blocking sheet 21, and the valve hole 22a is turned on, so that the gas can enter the gas outlet groove 14 through the valve hole 22a, Finally, it is discharged through the air outlet channel 181 (as shown in FIG. 5A ).

As shown in FIG. 5C, FIG. 5C is a schematic diagram of stopping the gas reverse flow. When the gas pump 3 is stopped, the gas pressure in the gas outlet groove 14 is higher than the gas pressure in the accommodating groove 13, causing the gas to flow back instantly, and the backflow gas pushes The valve portion 221 of the valve plate 22 is reset upward, the valve portion 221 returns to being pushed back by the protruding portion 213, and at the same time blocks the valve hole 22a, the valve hole 22a is closed by the protruding portion 213, and the gas cannot flow back to the gas through the valve hole 22a. Pump 3 to achieve the effect of stopping gas backflow.

2B and FIG. 2C again, the positioning portion 15 of the casing 1 has a plurality of positioning structures 151 , the casing 1 and the accommodating groove 13 in this embodiment are both square, and the positioning portion 15 is matched with the accommodating groove 13 , Therefore, it is also a square, but not limited to this. The positioning portion 15 has a plurality of positioning structures 151 and a plurality of fixing holes 152. In this embodiment, there are four positioning structures 151, which are respectively arranged at four corners of the positioning portion 15 at intervals, and the number of the fixing holes 152 is three, respectively. Located on different positioning structures 151 , wherein the positioning structure 151 adjacent to the air intake pipe 17 is used to set the ventilation holes 16 so that the gas can be introduced into the accommodating groove 13 by a short route, so the positioning structure adjacent to the air intake pipe 17 is The structure 151 is not provided with the fixing holes 152. In addition, the top cover 4 has a plurality of fixing tenons 41. The fixing tenons 41 are arranged corresponding to the fixing holes 152, so the number of the fixing tenons 41 is also three. In the fixing hole 152, to fix the top cover 4 on the positioning portion 15 and cover the accommodating groove 13, the position and number of the fixing tenon 41 and the fixing hole 152 are 3, besides fixing, they can also be used for precise positioning, Avoid misdirection of the cap.

The blocking piece 21 of the check valve 2 has a plurality of positioning notches 215, and the plurality of positioning notches 215 and the positioning structure 151 are matched with each other in appearance. For example, the positioning notches 215 are arc-shaped When the inverse valve 2 is disposed in the accommodating groove 13, the positioning notch 215 is aligned with the positioning structure 151, so that the positioning can be performed quickly and accurately.

To sum up, the thin gas transmission device provided in this case uses the gas pump set on the check valve. When the gas pump is activated, the gas can be continuously output. After the gas pump stops, the check valve can quickly close the valve hole. It can effectively prevent gas backflow, and the check valve is easy to manufacture and has a high yield. It will not be difficult to maintain quality due to the small size and tolerance during mass production, resulting in low yield and difficult assembly. sex.

This case can be modified by Shi Jiangsi, a person who is familiar with this technology, but it does not deviate from the protection of the scope of the patent application.

Claims (23)

1. A thin gas delivery device, comprising:

a housing having:

a shell surface;

a containing groove formed by the surface of the shell in a concave way and provided with a containing bottom surface;

an air outlet groove formed by sinking from the bottom of the containing groove;

a positioning part protruding from the shell surface and surrounding the accommodating groove;

the vent hole is positioned in the positioning part and is provided with an air inlet end and a vent end, the vent end is communicated with the containing groove, and the vent hole is gradually reduced from the vent end to the air inlet end;

the air inlet pipe is arranged in the shell and is provided with an air inlet channel, and the air inlet channel is communicated with the air inlet end of the vent hole; and

the air outlet pipe is arranged on the shell and is provided with an air outlet channel, and the air outlet channel is communicated with the air outlet groove;

a check valve disposed in the accommodating groove, comprising:

a separation sheet, which is arranged on the containing bottom surface and covers the air outlet groove, and is provided with:

a first surface;

a second surface opposite to the first surface;

a convex part protruding from the second surface and located in the air outlet groove; and

a plurality of perforations surrounding the protrusion;

a valve plate, set up this second surface, have:

a valve part having a valve hole vertically corresponding to the protrusion part; and

a fixed portion located at the valve portion;

the valve plate is combined to the second surface through the fixing part, and the bulge part abuts against the valve part and blocks the valve hole;

a gas pump disposed on the first surface; and

and the top cover is fixedly arranged on the positioning part and covers the accommodating groove.

2. The thin gas delivery device as claimed in claim 1, wherein the protrusion of the check valve has a cylindrical shape, and the diameter of the protrusion is larger than the diameter of the valve hole of the valve plate.

3. The thin gas delivery device according to claim 2, wherein the protrusion of the check valve has a thickness greater than that of the fixing portion of the valve plate.

4. A thin gas delivery device according to claim 3, wherein the thickness of the fixing portion is 0.14 mm.

5. The thin gas delivery device according to claim 4, wherein the thickness of the protrusion is 0.2 mm.

6. A thin gas delivery device according to claim 3 wherein the valve portion is a flexible material.

7. The thin gas delivery device as claimed in claim 6, wherein the fixing portion of the valve is a glue layer, and the glue layer is disposed around the valve plate to form the fixing portion, so that the valve is fixed to the barrier plate.

8. The thin gas delivery device according to claim 6, wherein the flexible material is selected from the group consisting of a silicone, a rubber, and a polyimide film.

9. The thin gas delivery device according to claim 6, wherein the thickness of the valve portion is 0.2 mm.

10. The thin gas delivery device according to claim 3, wherein the blocking plate of the check valve is formed of a metal material.

11. The thin gas delivery device according to claim 10, wherein the metal material is copper, aluminum or stainless steel.

12. The thin gas delivery device according to claim 10, wherein the barrier sheet has a thickness of 0.05 mm.

13. A thin gas transfer device according to claim 2 wherein the diameter of the valve opening is 3 mm.

14. The thin gas delivery device according to claim 13, wherein the diameter of the protrusion is between 4mm and 5 mm.

15. The thin gas delivery device according to claim 1, wherein the plurality of perforations are each 1mm in diameter.

16. The thin gas delivery device according to claim 1, wherein the positioning portion has a plurality of positioning structures, and the plurality of positioning structures are spaced apart from each other.

17. The thin gas delivery device as claimed in claim 16, wherein the positioning portion has a plurality of fixing holes, the positioning holes are respectively located on the positioning structures, and the top cover has a plurality of fixing tenons, and the fixing tenons are respectively inserted into the fixing holes.

18. The thin gas delivery device according to claim 16, wherein the vent hole is located in one of the plurality of positioning structures.

19. The thin gas delivery device according to claim 16, wherein the blocking plate of the check valve has a plurality of positioning notches, and the positioning notches and the positioning structures are matched with each other.

20. The thin gas delivery device according to claim 19, wherein the plurality of positioning notches are arcuate.

21. The thin gas delivery device according to claim 1, wherein the gas pump comprises:

the inflow plate is provided with at least one inflow hole, at least one bus groove and a confluence chamber, wherein the inflow hole is used for introducing a gas, the inflow hole correspondingly penetrates through the bus groove, the bus groove is confluent to the confluence chamber, and the gas introduced by the inflow hole is confluent to the confluence chamber;

a resonance sheet, which is connected on the flow inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the confluence chamber of the flow inlet plate, the movable part is arranged at the area around the hollow hole and opposite to the confluence chamber, and the fixed part is arranged at the outer peripheral part of the resonance sheet and is attached on the flow inlet plate; and

a piezoelectric actuator, which is jointed on the resonance sheet and is arranged corresponding to the resonance sheet;

the resonance plate is provided with a flow inlet hole, a flow outlet hole and a flow inlet hole, wherein a cavity space is arranged between the resonance plate and the piezoelectric actuator, so that when the piezoelectric actuator is driven, the gas is led in from the flow inlet hole of the flow inlet plate, is collected into the flow inlet cavity through the bus groove, flows through the hollow hole of the resonance plate, and is subjected to resonance transmission by the piezoelectric actuator and the movable part of the resonance plate.

22. The thin gas delivery device according to claim 21, wherein the piezoelectric actuator comprises:

a suspension plate having a square shape and capable of bending and vibrating;

the outer frame is arranged around the outer side of the suspension plate;

at least one bracket connected between the suspension plate and the outer frame to provide elastic support for the suspension plate; and

the piezoelectric element is attached to one surface of the suspension plate and used for applying voltage to drive the suspension plate to vibrate in a bending mode.

23. The thin gas delivery device of claim 22, wherein the gas pump further comprises a first insulating plate, a conducting plate and a second insulating plate, wherein the flow inlet plate, the resonator plate, the piezoelectric actuator, the first insulating plate, the conducting plate and the second insulating plate are sequentially stacked and combined.

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