CN114810560B - Miniature gas transmission device - Google Patents

Abstract

A micro gas transfer device comprising: a micro gas pump for delivering a gas; the micro valve is used for arranging a micro gas pump and is composed of a micro gas collecting plate, a micro valve plate frame, a micro valve plate and a micro gas outlet plate which are sequentially overlapped; the miniature gas collecting plate is provided with a hollow area and a gas leakage fit part; the miniature valve block frame is provided with a valve block accommodating area for positioning the miniature valve block, and the miniature valve block is provided with a plurality of valve holes; a miniature air outlet plate is provided for the miniature valve plate frame and is provided with an air outlet hole and an air leakage diversion groove. The central positions of the valve holes and the central positions of the air outlet holes are of an eccentric design, so that the air output is smooth and the air leakage is complete. When the gas is decompressed, the gas is split and then collected and discharged by the gas-discharging splitter box of the miniature gas-discharging plate, so that noise is avoided.

Description

Micro gas delivery device

[Technical field]

The present invention relates to a gas transmission device, and in particular to a miniaturized gas transmission device.

[Background technology]

With the rapid development of technology, the application of gas delivery devices is becoming more and more diversified, including industrial applications, biomedical applications, health care, electronic cooling, etc., and even the recently popular wearable devices can all be seen. It can be seen that traditional gas delivery devices have gradually tended towards device miniaturization, miniaturization, and flow maximization.

However, the current gas transmission device still has a certain thickness, especially the thickness of the valve therein cannot be reduced, resulting in the overall thickness being difficult to combine with a load device (e.g., a wearable device). Therefore, how to reduce the overall thickness of the gas transmission device so that it can be combined with the load device is an urgent problem that needs to be solved.

Please refer to Figure 1, which is a three-dimensional exploded schematic diagram of a valve of a known gas transmission device. As shown in the figure, it includes a valve 3, and the valve 3 includes: a gas collecting plate 31, a valve plate frame 32, a valve plate 33 and an air outlet plate 34. The gas collecting plate 31 has a hollow area 310, the valve plate frame 32 is provided with a positioning space 320 for positioning the valve plate 33, and the valve plate is provided with a valve hole 330, and the air outlet plate 34 is provided with an air outlet hole 340 and an air leakage hole 341. The valve hole 330 is arranged in the middle position of the air outlet hole 340. When the gas is discharged, the aperture of the valve hole 330 is smaller than the aperture of the air outlet hole 340, which affects the air outlet path of the gas, resulting in unsmooth air outlet. When the gas is depressurized, because the valve hole 330 is set in the middle of the gas outlet hole 340, the gas will flow in through the valve hole 330 after entering from the gas outlet hole 340, so that the valve plate 33 cannot be closely attached to the gas collecting plate 31, resulting in part of the gas not being released through the gas release hole 341, resulting in incomplete gas release. In addition, when the valve 3 is provided with a gas pump (not shown) on it, in order to prevent the gas from leaking out of the gas pump, a layer of sealing glue (not shown) is usually applied on the valve surface where the valve 3 and the gas pump do not overlap, and the sealing glue surrounds the outside of the gas pump and seals the gas pump. However, the disadvantage of this method is that the volume of the valve 3 cannot be reduced when it is combined with the gas pump.

[Summary of the invention]

This case is a micro gas transmission device, and its main purpose is to provide a micro gas pump combined with a micro valve structure, which not only greatly reduces the overall thickness of the gas transmission device, but also effectively solves the problems of blockage and noise during gas outlet and gas release.

To achieve the above purpose, a micro gas transmission device, a micro gas pump; a micro valve, for the micro gas pump to be set; wherein the micro valve includes a micro gas collecting plate, a micro valve frame, a micro valve plate and a micro gas outlet plate stacked in sequence; the micro gas collecting plate has a hollow area, and a gas release fitting portion is convexly arranged in the hollow area; the micro valve frame has a valve plate accommodating area; the micro valve plate is positioned in the valve plate accommodating area and has at least a plurality of valve holes, and the plurality of valve holes are misaligned with the hollow area of the micro gas collecting plate; and a micro gas outlet plate, for the micro valve frame to be arranged and having a gas outlet groove and a gas outlet hole. The center position of the plurality of valve holes and the center position of the gas outlet hole form an eccentric design, so that the gas output is smooth and the gas release is complete. When the gas is depressurized, the gas is forced to be divided into two paths by the gas release diversion groove of the micro gas outlet plate, and then the gas is collected and discharged to avoid noise.

【Brief Description of the Drawings】

FIG. 1 is a three-dimensional schematic diagram of a known valve.

FIG. 2A is a three-dimensional schematic diagram of the micro gas transmission device of the present invention.

FIG. 2B is a three-dimensional schematic diagram of the micro gas transmission device of the present invention from another angle.

FIG. 3A is an exploded schematic diagram of the micro gas pump of the present invention.

FIG. 3B is an exploded schematic diagram of the micro gas pump of the present invention from another angle.

FIG. 4A is a cross-sectional schematic diagram of the micro gas pump of the present invention.

4B to 4D are schematic diagrams showing the operation of the micro gas pump of the present invention.

FIG. 5A is an exploded schematic diagram of a micro valve and a micro gas pump.

FIG. 5B is an exploded schematic diagram of the micro valve and the micro gas pump from another angle.

FIG. 6 is a schematic plan view of the micro gas transmission device of the present invention.

FIG. 7 is a schematic diagram of a gas output cross section of the micro gas transmission device according to the present invention, taken along the A-A section line of FIG. 6 .

FIG8 is a schematic plan view of the gas output of the micro gas transmission device of the present invention.

FIG9 is a schematic diagram of a gas pressure relief cross section of the micro gas transmission device according to the present invention along the B-B section line of FIG6 .

FIG. 10 is a schematic plan view of gas pressure relief of the micro gas transmission device of the present invention.

【Explanation of symbols】

1: Micro gas pump

100: Micro gas transmission device

11: Air intake plate

111: First surface

112: Second surface

113: Air Intake Hole

114: Confluence chamber

115: Intake air duct

12: Resonance sheet

121: Center hole

122: Vibration Department

123: Fixed part

13: Actuator

131: Vibration plate

131a: Upper surface

131b: Lower surface

131c: convex part

132: Framework

132a: first conductive pin

133: Connection

134: Piezoelectric sheet

135: Gas channel

14: First insulation frame

15: Conductive frame

151: Framework

152: Electrode Department

153: Second conductive pin

16: Second insulation frame

17: Vibration Chamber

2: Micro valve

21: Micro gas collecting plate

210: Hollow Area

211: Deflating Fit

2110: Splitting end

22: Micro valve frame

220: Valve plate accommodation area

23: Micro valve

230: Valve hole

24: Micro air outlet plate

240: Exhaust surface

241: Deflated Surface

242: Vent groove

243: Vent

244: Deflation diversion trough

245: Pressure relief hole

246: Pressure relief ditch

3: Valve

31: Gas collecting plate

310: Hollow Area

32: Valve frame

320: Positioning Space

33: Valve plate

330: Valve hole

34: Air outlet plate

340: Vent

341: Vent

[Specific implementation method]

Embodiments that embody the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can have various variations in different aspects without departing from the scope of the present invention, and the descriptions and illustrations therein are essentially for illustrative purposes rather than for limiting the present invention.

Please refer to Figures 2A and 2B, Figure 2A is a three-dimensional schematic diagram of the micro gas transmission device of the present invention, and Figure 2B is a three-dimensional schematic diagram of the micro gas transmission device of the present invention from another angle. The present invention provides a micro gas transmission device 100, including a micro gas pump 1 and a micro valve 2, wherein the micro gas pump 1 is disposed on the micro valve 2.

Also, please refer to FIG. 3A and FIG. 3B , FIG. 3A is an exploded schematic diagram of the micro gas pump, and FIG. 3B is an exploded schematic diagram of the micro gas pump from another angle. The micro gas pump 1 comprises an air inlet plate 11, a resonance plate 12, an actuator 13, a first insulating frame 14, a conductive frame 15 and a second insulating frame 16. The micro gas pump 1 can be a piezoelectric gas pump, and the total thickness is 0.5 to 3 mm, but not limited thereto.

The air inlet plate 11 has a first surface 111, a second surface 112, a plurality of air inlet holes 113, a confluence chamber 114 and a plurality of air inlet channels 115. The first surface 111 and the second surface 112 are two surfaces corresponding to each other. The number of the plurality of air inlet holes 113 is 4 in this embodiment, but not limited thereto, and they are respectively penetrated from the first surface 111 to the second surface 112. The confluence chamber 114 is formed by a depression of the second surface 112 and is located at the center of the second surface 112. The number and position of the plurality of air inlet channels 115 correspond to the air inlet holes 113, so the number is also 4 in this embodiment. One end of the air inlet channel 115 is respectively connected to the corresponding air inlet hole 113, and the other end is respectively connected to the confluence chamber 114, so that after the gas enters from the air inlet hole 113, it will pass through its corresponding air inlet channel 115 and finally converge in the confluence chamber 114.

The resonance plate 12 is combined with the second surface 112 of the air intake plate 11. The resonance plate 12 includes a center hole 121, a vibration portion 122, and a fixing portion 123. The center hole 121 is formed through the center of the resonance plate 12. The vibration portion 122 is located at the peripheral area of the center hole 121. The fixing portion 123 is located at the outer edge of the vibration portion 122. The resonance plate 12 is combined with the air intake plate 11 through the fixing portion 123. When the resonance plate 12 is combined with the air intake plate 11, the center hole 121 and the vibration portion 122 will correspond vertically to the confluence chamber 114 of the air intake plate 11.

The actuator 13 is coupled to the resonance plate 12. The actuator 13 includes a vibration plate 131, a frame 132, a plurality of connecting parts 133, a piezoelectric plate 134 and a plurality of gas channels 135. The vibration plate 131 is in a square shape. The frame 132 is a square outer frame surrounding the periphery of the vibration plate 131 and has a first conductive pin 132a, which extends horizontally from the periphery of the frame 132. The plurality of gas channels 135 are between the vibration plate 131, the frame 132 and the plurality of connecting parts 133. The actuator 13 is coupled to the fixing part 123 of the resonance plate 12 through the frame 132. The number of the plurality of connecting parts 133 is 4 in this embodiment, but is not limited thereto. The connecting parts 133 are respectively connected between the vibration plate 131 and the frame 132 to elastically support the vibration plate 131. The shape and area of the piezoelectric sheet 134 correspond to those of the vibration plate 131. In this embodiment, the piezoelectric sheet 134 is also in a square shape, with a side length less than or equal to that of the vibration plate 131, and is attached to the piezoelectric sheet 134. In addition, the vibration plate 131 has two opposite surfaces: an upper surface 131a and a lower surface 131b. The upper surface 131a has a convex portion 131c, and the piezoelectric sheet 134 is attached to the lower surface 131b.

The first insulating frame 14 and the second insulating frame 16 have the same shape as the frame 132 of the actuator 13, and are both square frames. The conductive frame 15 includes a frame portion 151, an electrode portion 152, and a second conductive pin 153. The frame portion 151 has the same shape as the first insulating frame 14 and the second insulating frame 16, and is a square frame. The electrode portion 152 extends from the inner side of the frame portion 151 to the center, and the second conductive pin 153 extends from the outer periphery of the frame portion 151 in a horizontal direction.

Please refer to FIG. 4A, which is a cross-sectional view of the micro gas pump. The air inlet plate 11, the resonant plate 12, the actuator 13, the first insulating frame 14, the conductive frame 15 and the second insulating frame 16 are stacked in sequence, and a vibration chamber 17 is formed between the resonant plate 12 and the vibration plate 131. In addition, the electrode portion 152 of the conductive frame 15 will contact the piezoelectric plate 134 of the actuator 13 and be electrically connected, so that the first conductive pin 132a of the actuator 13 and the second conductive pin 153 of the conductive frame 15 can receive a driving signal (including a driving voltage and a driving frequency) externally and transmit the driving signal to the piezoelectric plate 134.

Next, the operation of the micro gas pump 1 is described. Please refer to FIG. 4B to FIG. 4D. After the piezoelectric sheet 134 receives the driving signal, it begins to deform due to the piezoelectric effect, thereby driving the vibration plate 131 to move up and down. Please refer to FIG. 4B first. When the vibration plate 131 moves downward, it drives the vibration part 122 of the resonance sheet 12 to move downward, so that the volume of the confluence chamber 114 increases, and begins to draw external gas into the confluence chamber 114 through the air inlet hole 113 and the air inlet channel 115. As shown in FIG. 4C, when the vibration plate 131 is driven upward by the piezoelectric sheet 134, it will push the gas in the vibration chamber 17 from the center to the outside, push it to the gas channel 135, and guide it downward through the gas channel 135. At the same time, the resonance sheet 12 will move upward, pushing the gas in the confluence chamber 114 to be transmitted downward through the center hole 121. Finally, as shown in FIG4D , when the vibration plate 131 is displaced downward to reset, the vibration portion 122 of the resonance plate 12 is simultaneously driven to move downward, and the vibration portion 122 approaches the convex portion 131c of the vibration plate 131, pushing the gas in the vibration chamber 17 to move outward to enter the gas channel 135. Since the vibration portion 122 is displaced downward, the volume of the confluence chamber 114 is greatly increased, and then the external gas is sucked into the confluence chamber 114 through the air inlet hole 113 and the air inlet channel 115. The above actions are repeated continuously to continuously transmit the gas downward to the micro valve 2.

In addition, please refer to Figures 5A and 5B, Figure 5A is an exploded schematic diagram of the micro valve and the micro gas pump, and Figure 5B is an exploded schematic diagram of the micro valve and the micro gas pump from another angle. Among them, a micro gas pump 1 is arranged on a micro valve 2, and the micro valve 2 includes a micro gas collecting plate 21, a micro valve plate frame 22, a micro valve plate 23 and a micro gas outlet plate 24.

The micro gas collecting plate 21 has a hollow area 210, and a gas release fitting portion 211 is protruded from the hollow area 210. The micro valve plate frame 22 has a valve plate accommodating area 220. The micro valve plate 23 is disposed in the valve plate accommodating area 220 and has a plurality of valve holes 230, and the plurality of valve holes 230 are staggered with the hollow area 210 of the micro gas collecting plate 21. In this embodiment, the number of the plurality of valve holes 230 is preferably an even number, preferably 2, but not limited thereto.

The micro air outlet plate 24 has an air outlet surface 240, an air discharge surface 241 which is opposite to the air outlet surface 240, an air outlet groove 242 formed by the depression of the air outlet surface 240, an air outlet hole 243 and a pressure relief hole 245 arranged in the air outlet groove 242, the air outlet hole 243 and the pressure relief hole 245 penetrate the air outlet surface 240 and the air discharge surface 241, an air discharge diversion groove 244 formed by the depression of the air outlet surface 240, the position of the air discharge diversion groove 244 is arranged corresponding to the air discharge fitting portion 211 of the hollow area 210 and is staggered with the air outlet groove 242, and a pressure relief ditch 246 formed by the depression of the air discharge surface 241 and connected to the pressure relief hole 245, and the area of the pressure relief ditch 246 gradually expands from the pressure relief hole 245 toward the direction away from the pressure relief hole 245. In this embodiment, the air leakage diversion groove 244 of the micro air outlet plate 24 is etched by a half-etching process, and when the etching depth is 0.1-0.15 mm, the noise elimination effect is best.

It is worth mentioning that the center points of the two valve holes 230 of the micro valve plate 23 and the outlet hole 243 of the micro outlet plate 24 are not arranged on the same center line, but form an eccentric design, so that the two valve holes 230 are not arranged at the center position of the outlet hole 243, and the shape of the valve plate accommodating area 220 is the same as the shape of the micro valve plate 23, for fixing and positioning the micro valve plate 23. The micro valve plate frame 22 is arranged on the micro gas collecting plate 21, and the micro gas collecting plate 21 is provided for the micro gas pump 1 to be arranged thereon. Please refer to Figures 2A to 2B, Figure 2A is a three-dimensional schematic diagram of the micro gas transmission device, and Figure 2B is a three-dimensional schematic diagram of the micro gas transmission device from another angle. In this embodiment, the above-mentioned micro gas collecting plate 21, micro valve plate frame 22 and micro outlet plate 24 are all made of metal (for example, stainless steel of the same metal material). In addition, the thickness of the micro gas collecting plate 21, the micro valve plate frame 22 and the micro outlet plate 24 are all the same, and their thickness is all 2 mm.

Please refer to FIG. 6 and FIG. 7. FIG. 6 is a schematic plan view of the micro gas transmission device of the present invention, and FIG. 7 is a schematic cross-sectional view of the gas output according to the A-A section of FIG. 6. The micro gas collecting plate 21, the micro valve plate frame 22, the micro valve plate 23 and the micro gas outlet plate 24 of the micro valve 2 are stacked and fixed in sequence from bottom to top. The micro valve plate 23 is accommodated in the valve plate accommodation area 220 of the micro valve plate frame 22, and the micro gas pump 1 is combined with the micro valve 2. When outputting gas, the micro gas pump 1 transmits gas to the micro valve 2, and the gas enters from the hollow area 210 of the micro gas collecting plate 21. At this time, the part of the micro valve plate 23 located in the gas outlet groove 242 is pushed upward due to the gas extrusion, so that the gas enters the gas outlet groove 242, and flows through the two valve holes 230 through the gas outlet hole 243 and is smoothly discharged to a load space (not shown).

Please refer to Fig. 8, which is a schematic diagram of the gas output plane of the micro gas transmission device of the present invention. In order to avoid the situation that the micro gas pump 1 is blocked when outputting gas, the center points of the two valve holes 230 of the micro valve plate 23 and the gas outlet hole 243 of the micro gas outlet plate 24 are not arranged on the same center line to form an eccentric design. At the same time, the two valve holes 230 and the gas outlet hole 243 overlap to form a through hole, so that the gas can be output to the load space through the through hole and the gas outlet hole 243, and the gas output is completed without causing blockage.

Please refer to FIG9, which is a schematic diagram of the gas pressure relief section of the micro gas transmission device of the present invention according to B-B of FIG6. When the micro gas transmission device 100 stops transmitting gas to the load space, the gas pressure in the load space is greater than the external gas pressure, and the pressure relief operation begins through the micro valve 2. When the gas is back-pressed from the gas outlet 243 to the micro gas outlet plate 24, the two valve holes 230 of the micro valve plate 23 and the center point of the gas outlet 243 of the micro gas outlet plate 24 are not arranged on the same center line but are eccentrically designed, so that the two valve holes 230 are not arranged at the center position of the gas outlet 243, so most of the gas cannot flow through the two valve holes 230 and pass through the micro valve plate 23 and flow through the gas relief diversion groove 244. At the same time, the micro valve plate 23 is pushed by the gas and tightly fits on the micro gas collecting plate 21, and the part of the micro valve plate 23 located above the hollow area 210 of the micro gas collecting plate 21 is pushed downward by the gas, so that the gas The gas can enter the hollow area 210 through the top of the micro valve plate 23, and then flow through the gas release diversion groove 244 and output to the pressure relief channel 246 through the pressure relief hole 245 to release pressure outward, thus successfully completing the pressure relief operation. When the gas is released through the pressure relief channel 246, the area of the pressure relief channel 246 is gradually expanded from the pressure relief hole 245 to the direction away from the pressure relief hole 245, so that the gas can release pressure more smoothly.

Please refer to FIG. 10 , which is a schematic diagram of the gas pressure relief plan of the micro gas transmission device of the present invention. In order to prevent the micro gas pump 1 from generating noise when the micro gas pump 1 is performing pressure relief, a gas relief fitting portion 211 is provided at the position of the hollow area 210 of the micro gas collecting plate 21 corresponding to the gas relief diversion groove 244 of the micro gas outlet plate 24. During gas relief, the gas relief fitting portion 211 is closely attached to the gas relief diversion groove 244. Therefore, when the gas enters through the gas outlet hole 243 and flows to the gas relief diversion groove 244, the gas is forced to be divided into two paths and then gathered together and discharged from the micro gas transmission device 100 through the pressure relief hole 245, completing the pressure relief operation. By designing the gas relief diversion groove 244, the noise caused by the gas directly impacting the gas relief diversion groove 244 can be effectively reduced regardless of whether the gas is divided or converged. In this embodiment, the air leakage diversion groove 244 is generally V-shaped and is provided with a V-shaped diversion structure, which is vertically corresponding to the air leakage fitting portion 211.

Therefore, after describing the structure and operation of the micro gas transmission device 100, it can be known that the present invention has the following effects:

First, the micro valve 2 composed of the micro gas collecting plate 21, the micro valve frame 22, the micro valve plate 23 and the micro gas outlet plate 24 can significantly reduce the overall thickness of the micro gas transmission device 100, especially the thickness of the micro gas collecting plate 21, the micro valve frame 22 and the micro gas outlet plate 24 can be reduced to 2mm, so that the total thickness of the micro valve 2 is only 6mm. In addition, the design of coating the sealing glue on the micro valve 2 is cancelled in this case, so that the outer dimensions of the micro gas pump 1 and the micro valve 2 are consistent, further achieving the effect of reducing the overall volume of the micro gas transmission device 100.

Second, the micro valve plate 23 of the present invention is changed from the original one hole set in the middle position of the air outlet 243 to two valve holes 230, and the center points of the two valve holes 230 and the air outlet 243 are not set on the same center line but are eccentrically designed. This design can avoid incomplete pressure relief operation caused by gas passing through the two valve holes 230 during back pressure, and ensure smooth gas release.

Thirdly, in this case, the hollow area 210 of the micro gas collecting plate 21 is provided with a gas release fitting portion 211 at the position corresponding to the gas release diversion groove 244 of the micro gas outlet plate 24. When the gas is released, the gas release fitting portion 211 is closely attached to the gas release diversion groove 244, so that the gas enters through the gas outlet hole 243 and flows to the gas release diversion groove 244. The gas is forced to be divided into two paths and then gathered together and discharged from the micro gas transmission device 100 through the pressure relief hole 245, completing the pressure relief operation. Therefore, whether the gas is divided or converged, the noise generated by the gas impact can be effectively reduced.

Claims (15)

1. A micro gas transfer device comprising:

a micro gas pump for delivering a gas;

A micro valve for setting the micro gas pump; wherein the method comprises the steps of

The micro valve comprises a micro gas collecting plate, a micro valve plate frame, a micro valve plate and a micro gas outlet plate which are sequentially overlapped;

the miniature gas collecting plate is provided with a hollow area;

the miniature valve block frame is provided with a valve block accommodating area;

The miniature valve plate is positioned in the valve plate accommodating area and is provided with a plurality of valve holes, and the valve holes are staggered with the hollowed-out area of the miniature gas collecting plate; and

The miniature air outlet plate is used for arranging the miniature valve plate frame and is provided with an air outlet surface, an air outlet surface with two opposite surfaces, an air outlet groove formed by recessing the air outlet surface, an air outlet hole and a pressure relief hole, wherein the air outlet hole penetrates through the air outlet surface and the air outlet surface, the miniature air outlet plate is formed by recessing the air outlet surface into an air outlet diversion groove, the pressure relief hole penetrates through the air outlet surface and is communicated with the air outlet diversion groove, and a pressure relief ditch formed by recessing the air outlet surface is communicated with the pressure relief groove;

The valve holes of the miniature valve plate and the air outlet holes of the miniature air outlet plate are not arranged on the same central line but are eccentrically designed, so that the valve holes are not arranged at the central positions of the air outlet holes, and smooth air outlet and air leakage are ensured.

2. The micro gas transfer device of claim 1, wherein the hollowed-out area is provided with a convex air leakage engaging portion corresponding to the air leakage diversion channel, and when air leakage occurs, the air is forced to be divided into two paths through the air outlet hole after entering the air outlet hole, and then flows through the air leakage diversion channel in a converging way to the pressure release hole to be discharged out of the micro gas transfer device, so that noise generated by direct impact of the air on the air leakage diversion channel is avoided.

3. The micro gas transfer apparatus of claim 1, wherein the venting shunt groove is V-shaped.

4. A micro gas transfer device as claimed in claim 3, wherein the venting shunt groove is provided with a V-shaped shunt structure.

5. The micro gas transfer apparatus of claim 4, wherein the hollowed-out area is provided with a venting engagement portion vertically corresponding to the V-shaped split structure.

6. The micro gas transfer apparatus of claim 1, wherein the micro gas pump is a piezoelectric gas pump and has a total thickness of 0.5-3 mm.

7. The micro gas transfer apparatus of claim 1, wherein the micro gas pump conforms to the peripheral dimensions of the micro valve.

8. The micro gas transfer device of claim 1, wherein the number of the plurality of valve holes of the micro valve plate is an even number.

9. The micro gas transfer device of claim 1, wherein the thickness of the micro gas collecting plate, the micro valve plate frame and the micro gas outlet plate is 2mm.

10. The micro gas transfer device of claim 1, wherein the etch depth of the venting shunt grooves of the micro gas outlet plate is 0.1-0.15 mm.

11. The micro gas transfer apparatus of claim 1, wherein the area of the pressure relief trench gradually expands from the pressure relief hole toward a direction away from the pressure relief hole.

12. The micro gas transfer device of claim 1, wherein the micro gas collecting plate, the micro valve plate frame and the micro gas outlet plate are made of a metal material.

13. The micro gas transfer apparatus of claim 12, wherein the metal material is a stainless steel material.

14. The micro gas transfer apparatus of claim 1, wherein the micro gas pump comprises:

an intake plate, comprising: a first surface and a second surface opposite to the first surface;

The air inlets penetrate through the first surface to the second surface respectively;

a converging chamber concavely formed from the second surface and located in the center of the second surface; and

A plurality of air inlet channels are concavely formed from the second surface, one ends of the air inlet channels are respectively connected with the plurality of air inlet holes, and the other ends of the air inlet channels are connected with the converging chamber;

a resonator plate coupled to the second surface, having:

a center hole located at the center of the resonance plate;

the vibration part is positioned at the periphery of the central hole and corresponds to the converging chamber; and

The fixed part is positioned at the outer edge of the vibration part, and the resonance piece is combined to the air inlet plate through the fixed part; an actuating member coupled to the fixed portion of the resonator plate;

a first insulating frame coupled to the actuator;

A conductive frame combined with the first insulating frame; and

A second insulating frame combined with the conductive frame.

15. The micro gas transfer device of claim 14, wherein the actuator comprises:

A vibrating plate in a square shape;

a frame surrounding the periphery of the vibration plate;

A plurality of connection parts respectively connected between the vibration plate and the frame to elastically support the vibration plate; and

And the piezoelectric sheet corresponds to the vibration plate in shape and area and is attached to the vibration plate.