Disclosure of Invention
The invention aims to provide a distance-changing mechanism and a detection device with the same.
The invention provides a distance changing mechanism which comprises a base station, a first track plate, a second track plate, a track changing transmission rod, a sample carrier and a connecting rod group, wherein the base station is connected with the first track plate;
the first track plate and the second track plate are arranged on the base platform in parallel to the feeding direction, the track-changing transmission rod is respectively connected with the first track plate and the second track plate and is respectively and vertically arranged with the first track plate and the second track plate, and at least one of the first track plate and the second track plate is axially movably arranged along the track-changing transmission rod;
the sample carrier is movably sleeved on the track-changing transmission rod;
the connecting rod group comprises a first driving connecting rod group, a second driving connecting rod group and a driven connecting rod;
The first driving connecting rod group and the second driving connecting rod group are respectively connected to the first track plate and the second track plate in a rotating way, the tail ends of the first driving connecting rod group and the second driving connecting rod group are connected to the driven connecting rod in a rotating way, and the first driving connecting rod group and the second driving connecting rod group are distributed in a central symmetry way by taking the center of the driven connecting rod as the center;
The center of the driven connecting rod is rotationally connected to the sample carrying platform, the rotational connecting point is located at the center axial surface of the sample carrying platform parallel to the feeding direction, and when the first track plate and the second track plate move relatively, the driven connecting rod drives the sample carrying platform to move along the track-changing transmission rod.
As a further improvement of the present invention, the first driving link group includes a first link, the second driving link group includes a second link, the first link and the second link are equal in length, the first link is rotatably connected to the first track plate, the second link is rotatably connected to the second track plate, and the ends of the first link and the second link are rotatably connected to the driven link together.
As a further improvement of the invention, the gauge change mechanism further comprises at least one gauge change guide rail pair, the gauge change guide rail pair comprises a gauge change guide rail which is perpendicular to the feeding direction and a gauge change moving member which is movably arranged on the gauge change guide rail, the second track plate and the gauge change guide rail are fixedly arranged on the base, and the first track plate is fixedly arranged on the gauge change moving member.
As a further improvement of the invention, the variable-pitch mechanism comprises two variable-pitch guide rail pairs, namely a first guide rail pair and a second guide rail pair, wherein the first guide rail pair comprises a first guide rail and a first moving piece, the second guide rail pair comprises a second guide rail and a second moving piece, and the first guide rail and the second guide rail are respectively arranged on two sides of the variable-pitch transmission rod.
As a further improvement of the invention, the rail-changing transmission rod is a rail-changing screw rod, which is provided with a first end and a second end which are opposite, the first end of the rail-changing screw rod is arranged on the first rail plate, the second rail plate is provided with a first rail-changing screw rod hole matched with the rail-changing screw rod, the second end of the rail-changing screw rod passes through the first rail-changing screw rod hole, and when the rail-changing screw rod rotates, the rail-changing screw rod drives the first rail plate to move and moves relative to the second rail plate.
As a further improvement of the invention, the pitch-changing mechanism also comprises a driving motor arranged on the base, the driving motor is connected with the track-changing screw rod through a coupler, and the driving motor drives the track-changing screw rod to rotate in a clockwise or anticlockwise direction.
As a further improvement of the invention, the first track plate further comprises a screw rod fixing seat fixedly arranged on the first track plate, the first end of the rail changing screw rod is arranged in the screw rod fixing seat, and when the rail changing screw rod rotates, the first track plate is driven to move through the screw rod fixing seat.
As a further improvement of the invention, the first connecting rod is rotatably connected to the bottom of the screw rod fixing seat, and the connecting point of the first connecting rod and the screw rod is positioned right below the track-changing screw rod.
As a further improvement of the invention, the second track plate further comprises a connecting rod fixing seat fixedly arranged at the bottom of the second track plate, the second connecting rod is rotatably connected to the bottom of the connecting rod fixing seat, and the connecting point of the second connecting rod and the connecting rod is positioned under the track-changing screw rod.
As a further improvement of the invention, the sample carrier is provided with a second orbital transfer screw hole matched with the orbital transfer screw, the orbital transfer screw passes through the second orbital transfer screw hole, the driven connecting rod is rotationally connected to the bottom of the sample carrier, and the driven connecting rod drives the sample carrier to move along the orbital transfer screw when moving.
As a further improvement of the present invention, the base is provided with a window region penetrating through the upper and lower surfaces thereof, and the first drive link group, the second drive link group, and the driven link are disposed in the window region.
As a further improvement of the invention, the distance changing mechanism further comprises at least one carrier guide rail pair, wherein the carrier guide rail pair comprises a carrier guide rail which is perpendicular to the feeding direction and a carrier moving part which is movably arranged on the carrier guide rail, the carrier guide rail is fixedly arranged on the base, and the sample carrier is fixedly arranged on the carrier movement.
As a further improvement of the invention, the distance changing mechanism comprises two carrier guide rail pairs, namely a third guide rail pair and a fourth guide rail pair, wherein the third guide rail pair comprises a third guide rail and a third moving part, the fourth guide rail pair comprises a fourth guide rail and a fourth moving part, and the third guide rail and the fourth guide rail are respectively arranged at two sides of the rail changing transmission rod.
The invention also provides a detection device, which comprises the distance changing mechanism
The distance-changing mechanism has the beneficial effects that the connecting rod group is arranged between the first track plate and the second track plate which can adjust the distance, so that the sample bearing table driven and controlled by the connecting rod group can be kept at the central positions of the two track plates in a self-adaptive way all the time when the distance between the track plates is adjusted, no additional debugging is needed, the convenience is high, meanwhile, the precision is excellent, the whole structure of the distance-changing mechanism is simple, the whole structure of the connecting rod group is realized in a purely mechanical mode, and the reliability is high.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be clearly and completely described below in conjunction with the detailed description of the present application and the corresponding drawings. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, are intended to fall within the scope of the present application.
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present invention and are not to be construed as limiting the present invention.
For purposes of illustration, terms such as "upper," "lower," "rear," "front," and the like, are used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. The term spatially relative position may include different orientations of the device in use or operation than that illustrated in the figures. For example, if the device in the figures is turned over, elements described as "below" or "over" other elements or features would then be oriented "below" or "over" the other elements or features. Thus, the exemplary term "below" can encompass both a spatial orientation of below and above.
The present embodiment provides a distance-varying mechanism that can be applied to a wafer inspection apparatus as a material distance-varying mechanism of the inspection apparatus, and in other embodiments, the distance-varying mechanism provided by the present invention can also be applied to other apparatuses.
As shown in fig. 1,2 and 3, the pitch-changing mechanism comprises a base 1, a first track plate 2, a second track plate 3, a track-changing transmission rod 4, a sample carrier 5 and a connecting rod group 6.
The base 1 is used for carrying each component of the distance changing mechanism, and the base 1 is provided with an upper surface and a lower surface which are opposite, and in the embodiment, the upper surface and the lower surface are rectangular, wherein the direction of the long side is the feeding direction.
The first track plate 2 and the second track plate 3 are arranged on the base 1 in parallel to the feeding direction, the track transfer transmission rod 4 is respectively connected with the first track plate 2 and the second track plate 3 and is respectively perpendicular to the first track plate 2 and the second track plate 3, and at least one of the first track plate 2 and the second track plate 3 is axially movably arranged along the track transfer transmission rod 4.
The first track plate 2 and the second track plate 3 are respectively provided with a conveying belt 71 and a transmission wheel set 72, a ball spline 8 is arranged between the first track plate 2 and the second track plate 3, and a ball spline 8 driving motor drives the transmission wheel set 72 to drive the conveying belt 71 to move along the feeding direction by controlling the ball spline 8. When the pitch mechanism is started, the product is placed on the conveyor belt 71 and moves along the conveyor belt 71 between the first track plate 2 and the second track plate 3.
The first track plate 2 and the second track plate 3 are movably arranged along the track transfer transmission rod 4, so that the distance between the first track plate 2 and the second track plate 3 can be adjusted according to the width sizes of different products, and the distance changing mechanism can be suitable for the measurement requirements of the products with different width sizes.
Illustratively, in the present embodiment, the base 1 is provided with a first rail plate 2 and a second rail plate 3, the first rail plate 2 is a movable rail plate, the second rail plate 3 is a fixed rail plate, and a material feeding passage is formed between the first rail plate 2 and the second rail plate 3. In other embodiments of the invention, a plurality of track plates parallel to the feed direction may also be provided, with adjacent track plates being movably disposed therebetween, thereby forming a plurality of material feed channels.
Further, the gauge mechanism further comprises at least one gauge guide rail pair 21, the gauge guide rail pair 21 comprises a gauge guide rail 211 arranged perpendicular to the feeding direction and a gauge variable moving member 212 movably arranged on the gauge guide rail 211, the second track plate 3 and the gauge variable guide rail 211 are fixedly arranged on the base 1, the first track plate 2 is fixedly arranged on the gauge variable moving member 212, and the first track plate 2 can slide on the gauge variable guide rail 211 through the gauge variable moving member 212, so that the relative movement between the first track plate 2 and the second track plate 3 is realized, and the gauge variable guide rail 211 is parallel to the gauge variable transmission rod 4, namely, the first track plate 2 is movably arranged along the axial direction of the gauge variable transmission rod 4.
In other embodiments of the invention, both the first rail plate 2 and the second rail plate 3 may be provided movably, or a moving member may be integrally provided on the first rail plate 2 such that the first rail plate 2 is directly slidably provided on the gauge change rail 211.
Specifically, in the present embodiment, the pitch mechanism includes two pitch guide rail pairs 21, namely, a first guide rail pair 21a and a second guide rail pair 21b, the first guide rail pair 21a includes a first guide rail 211a and a first moving member 212a, the second guide rail pair 21b includes a second guide rail 211b and a second moving member 212b, the first guide rail 211a and the second guide rail 211b are respectively disposed on two sides of the pitch transmission rod 4, and the guide rails disposed on two sides of the pitch transmission rod 4 are used for guiding the movement of the first track plate 2 more accurately, so that the structure of the pitch mechanism is more stable.
In other embodiments of the present invention, the lengths of the first track plate 2 and the second track plate 3 may be specifically adjusted according to the actual application field of the feeding device, and the number of the gauge guide rail pairs 21 may be adaptively adjusted, so that the structure of the gauge mechanism is more stable.
The sample carrier 5 is movably sleeved on the track-changing transmission rod 4, and the sample carrier 5 plays a supporting role on the incoming materials or can be used for bearing the incoming materials. Illustratively, in the present embodiment, the sample stage 5 has a flat upper surface having a rectangular shape to function as a carrier wafer, which is provided at a center position of the long side of the base 1. Further, the distance-changing mechanism further comprises at least one carrier guide rail pair 51, the carrier guide rail pair 51 comprises a carrier guide rail 511 arranged perpendicular to the feeding direction and a carrier moving member 512 movably arranged on the guide rail, the carrier guide rail 511 is fixedly arranged on the base 1, and the sample carrier 5 is fixedly arranged on the carrier moving member 512. The sample carrier 5 can slide on the carrier guide rail 511 by the carrier moving member 512, thereby playing a role in guiding movement of the sample carrier 5 and stabilizing the structure of the distance changing mechanism.
Specifically, in the present embodiment, the pitch mechanism includes two stage rail pairs 51, namely, a third rail pair 51a and a fourth rail pair 51b, the third rail pair 51a includes a third rail 511a and a third moving member 512a, the fourth rail pair 51b includes a fourth rail 511b and a fourth moving member 512b, and the third rail 511a and the fourth rail 511b are disposed on both sides of the pitch transmission rod 4, respectively. The carrier guide rail pairs 51 respectively arranged on the two sides of the track-changing transmission rod 4 can ensure the surface evenness of the sample carrier 5, and avoid the situation that the sample carrier 5 tilts in the reciprocating motion process.
In other embodiments of the present invention, parameters such as the size and shape of the sample carrier 5 may be specifically adjusted according to the actual application field of the feeding device, and the number of carrier rail pairs 51 may be adaptively adjusted to ensure the reliability of the sample carrier 5 during use.
The linkage 6 includes a first drive linkage 61, a second drive linkage 62, and a driven linkage 63. The first driving connecting rod group 61 and the second driving connecting rod group 62 are respectively connected to the first track plate 2 and the second track plate 3 in a rotating way, the tail ends of the first driving connecting rod group 61 and the second driving connecting rod group 62 are connected to the driven connecting rod 63 in a rotating way, and the first driving connecting rod group 61 and the second driving connecting rod group 62 are distributed in a central symmetry way by taking the center of the driven connecting rod 63 as the center. That is, the first drive link group 61 can rotate with respect to the first track plate 2 and the driven link 63 at two connection points thereof, and the second drive link group 62 can rotate with respect to the second track plate 3 and the driven link 63 at two connection points thereof, respectively.
Further, the center of the driven connecting rod 63 is rotatably connected to the sample carrier 5, and the rotational connection point is located at the center axis of the sample carrier 5 parallel to the feeding direction, and when the first track plate 2 and the second track plate 3 relatively move, the driven connecting rod 63 drives the sample carrier 5 to move along the track-transferring transmission rod 4.
In the link group 6, the first driving link group 61 and the second driving link group 62 are arranged in a central symmetry manner with the center of the driven link 63 as the center, that is, the entire structure of the link group 6 is also in a central symmetry manner with the center of the driven link 63 as the center. The center point of the driven connecting rod 63 is rotatably connected to the sample carrying platform 5, which can only rotate around the connection point, and the track-transferring transmission rod 4 limits the sample carrying platform 5 to move along the track-transferring transmission rod, so that when the first track plate 2 moves, the whole connecting rod group 6 is kept to be symmetrical with the center of the driven connecting rod 63 as the center through the rotation adjustment among the connecting rods, namely, the rotation angle of the first driving connecting rod group 61 relative to the first track plate 2 and the driven connecting rod 63 is the same as the rotation angle of the second driving connecting rod group 62 relative to the second track plate 3 and the driven connecting rod 63 respectively. At this time, the connection point of the driven link 63 and the sample stage 5 is always located at the center between the first rail plate 2 and the second rail plate 3, and, since the rotational connection point is located at the center axis of the sample stage 5 parallel to the feeding direction, that is, the sample stage 5 is always kept at the center between the first rail plate 2 and the second rail plate 3 during the movement of the first rail plate 2.
According to the above, when the first track plate 2 moves, the sample carrier 5 can be kept at the middle position of the first track plate 2 and the second track plate 3 in a self-adaptive manner all the time through the arrangement of the connecting rod group 6, no additional adjustment of the sample carrier 5 by an operator is needed, the operation is convenient, and the whole structure of the distance changing mechanism is concise and the position precision is high.
It should be noted that the first drive linkage 61 and the second drive linkage 62 are used herein in a broad sense, and each may include only one link, rather than at least including a plurality of links.
Specifically, in the present embodiment, the first drive link group 61 includes a first link 61a, the second drive link group 62 includes a second link 62a, and the first link 61a and the second link 62a are equal in length. The first link 61a is rotatably connected to the first track plate 2 at a rotational connection point on the same vertical plane as the track-change transmission rod 4. The second link 62a is rotatably connected to the second track plate 3 at a rotational connection point on the same vertical plane as the track-change transmission rod 4. The ends of the first link 61a and the second link 62a are connected to the driven link 63 in a common rotation. Namely, on a plane, the first connecting rod 61a, the driven connecting rod 63 and the orbital transfer transmission rod 4 form a first triangle, the second connecting rod 62a, the driven connecting rod 63 and the orbital transfer transmission rod 4 form a second triangle, and the first triangle and the second triangle are kept to be congruent triangles at any time along with the movement of the first track plate 2. The three connecting rod groups 6 form the connecting rod group 6, so that the structure is simple and stable, the reliability is high, and the adjustment, the maintenance and the repair are easy in the use process.
In other embodiments of the present invention, the driving link group 6 may be formed by providing a plurality of links or providing other structural members, as long as the above structural conditions are satisfied.
Further, the base body is provided with a window area 11 penetrating the upper and lower surfaces thereof, the first driving link group 61, the second driving link group 62 and the driven link 63 are disposed in the window area 11, the window area 11 provides a space for movement of the link group 6, and when the link group 6 needs to be adjusted or replaced and maintained, the operation can be performed through the window area 11 under the base 1.
The track change transmission rod 4 is a track change screw rod 4a, the track change screw rod 4a is provided with a first end and a second end which are opposite, the first end of the track change screw rod 4a is arranged on the first track plate 2, the second track plate 3 is provided with a first track change screw rod hole 31 matched with the track change screw rod 4a, the second end of the track change screw rod 4a passes through the first track change screw rod hole 31, and when the track change screw rod 4a rotates, the track change screw rod 4a drives the first track plate 2 to move and makes relative movement with the second track plate 3.
Further, the distance changing mechanism further comprises a driving motor 9 arranged on the base 1, the driving motor 9 is connected with the track changing screw rod 4a through a coupler, and the driving motor 9 drives the track changing screw to rotate in a clockwise or anticlockwise direction, so that the first track plate 2 is driven to move.
Further, the first track plate 2 further comprises a screw rod fixing seat 22 fixedly arranged on the first track plate, the first end of the rail changing screw rod 4a is arranged in the screw rod fixing seat 22, and when the rail changing screw rod 4a rotates, the first track plate 2 is driven to move through the screw rod fixing seat 22.
Specifically, in the present embodiment, the first link 61a is rotatably connected to the bottom of the screw fixing seat 22, and the connection point of the first link and the second link is located directly below the track-transferring screw 4 a. The second track plate 3 further comprises a connecting rod fixing seat 32 fixedly arranged at the bottom of the second track plate, the second connecting rod 62a is rotatably connected to the bottom of the connecting rod fixing seat 32, and the connecting point of the second connecting rod 62a and the connecting rod is located under the track change screw rod 4 a. In other embodiments of the present invention, the first link 61a and the second link 62a may be rotatably coupled in other ways, such as directly rotatably coupled to a track plate, etc.
Further, the sample carrier 5 is provided with a second track change screw hole 51 matched with the track change screw 4a, the track change screw 4a penetrates through the second track change screw hole, the driven connecting rod 63 is rotationally connected to the bottom of the sample carrier 5, and when the driven connecting rod 63 moves, the sample carrier 5 is driven to move along the track change screw 4 a.
The following describes the workflow of a product on a pitch mechanism:
S1, according to the width specification of the product to be detected, the driving motor 9 drives the orbital transfer screw 4a to rotate to adjust the distance between the first track plate 2 and the second track plate 3 so as to adapt to the product to be detected.
S2, products to be detected are placed on the conveyor belt 71 on the first track plate 2 and the second track plate 3, and start to move along the feeding direction along with the conveyor belt 71.
And S3, when the product to be detected moves to the sample carrying platform 5, the detection device detects the product to be detected.
And S3, after the detection is finished, the product to be detected continuously flows downwards along the feeding direction.
The invention also provides a detection device which comprises the distance changing mechanism.
In summary, according to the distance-changing mechanism provided by the invention, the connecting rod group is arranged between the first track plate and the second track plate which can adjust the distance, so that the sample bearing table driven and controlled by the connecting rod group can be kept at the center positions of the two track plates in a self-adaptive manner all the time when the distance between the track plates is adjusted, no additional debugging is needed, convenience is high, meanwhile, excellent accuracy is achieved, the whole structure of the distance-changing mechanism is simple, the whole structure of the connecting rod group is realized in a purely mechanical mode, and reliability is high.
It should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is for clarity only, and that the skilled artisan should recognize that the embodiments may be combined as appropriate to form other embodiments that will be understood by those skilled in the art.
The above list of detailed descriptions is only specific to practical embodiments of the present invention, and is not intended to limit the scope of the present invention, and all equivalent embodiments or modifications that do not depart from the spirit of the present invention should be included in the scope of the present invention.