CN114441505B - Water vapor in-situ calibration device for Raman probe, calibration method and application - Google Patents
Water vapor in-situ calibration device for Raman probe, calibration method and application Download PDFInfo
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- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 104
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 90
- 239000000523 sample Substances 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims abstract description 37
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 34
- 238000001514 detection method Methods 0.000 claims abstract description 23
- 239000013307 optical fiber Substances 0.000 claims description 9
- 238000012360 testing method Methods 0.000 claims description 7
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- 238000012544 monitoring process Methods 0.000 description 2
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
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- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
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Abstract
The utility model discloses a water vapor in-situ calibration device for a Raman probe, a calibration method and application thereof, comprising the following steps: s1: assembling the calibration device; s2: setting Raman signal acquisition parameters; s3: setting a temperature and humidity value; s4: vacuumizing the sealed calibration cabin, and opening the temperature and humidity generator; s5: collecting data of a Raman spectrometer, a hygrothermograph and a pressure sensor; s6: obtaining Iw, temperature t and RH at that temperature t The gas pressure P is calculated to obtain P W And RH (relative humidity) 20 The method comprises the steps of carrying out a first treatment on the surface of the S7: repeating the steps S3 to S6 to finish the calibration and detection of the water vapor under a plurality of groups of humiture; s8: drawing P W 、RH 20 And I W Is a standard working curve of (2). The utility model can simultaneously complete the calibration of the water vapor content and the water vapor in-situ calibration of the Raman probe, thereby avoiding the problems of greatly reduced precision caused by time domain change, environmental temperature fluctuation and the like of the conventional probe air probe calibration, and improving the precision of the calibration method.
Description
Technical Field
The utility model relates to the technical field of Raman spectrum detection, in particular to a water vapor in-situ calibration device for a Raman probe, a calibration method and application.
Background
Water vapor, a ubiquitous gas component, is one of the key detection objects in industrial production and environmental monitoring. The accurate monitoring of the water vapor content plays an important role in the fields of national defense science and technology, analytical chemistry, industrial fermentation, pharmaceutical engineering, metal heat treatment and the like. With other common gases, e.g. N 2 、O 2 、CO 2 The gas is different, and the steam content in the test space (whether sealed or open space) is very small but is very easily influenced by the ambient temperature and the like. For sealing special containers or atmosphere (mainly N) 2 、O 2 、CO 2 、H 2 O, etc.), atmosphere detection is generally performed by gas chromatography or mass spectrometry techniques using a sampling method. However, the sampling detection method is easy to cause gas pollution, and particularly for water vapor detection, the sampling detection often causes larger errors.
The gas Raman spectrum technology can realize in-situ and rapid detection of water vapor and other multi-component gases, and has technical advantages. However, because the scattering interface of the gas molecules is small, the raman effect of the gas molecules is relatively weak, the content of water vapor in the gas is low, and the application of raman spectrum in the aspect of water vapor detection is limited.
The applicant provides a multiple reflection cavity probe for Raman spectrum gas detection in an issued patent ZL202022818946.2, which can solve the problems of low excitation efficiency, weak signal strength and lower detection limit of the traditional Raman probe. When the probe detects the atmosphere in the air, trace water vapor in the air can be detected. In order to realize accurate quantitative analysis and detection of water vapor by utilizing the Raman probe and gas Raman technology and realize simultaneous detection of water vapor and gas components in air such as nitrogen, oxygen and the like, a water vapor calibration device and a calibration method for the Raman probe are urgently needed to be designed; however, when the probe is calibrated by conventional air detection, the precision is greatly reduced due to time domain change and fluctuation of the ambient temperature.
In view of this, the present utility model has been made.
Disclosure of Invention
The utility model aims to solve the technical problems, and provides the water vapor in-situ calibration device and the calibration method for the Raman probe, which can simultaneously complete the calibration of the water vapor content and the water vapor in-situ calibration of the Raman probe, avoid the problem that the precision is greatly reduced due to time domain change, environmental temperature fluctuation and the like of the conventional probe calibration by detecting air, and improve the precision of the calibration method.
The utility model is realized by the following technical scheme:
the water vapor in-situ calibration device for the Raman probe comprises a sealed calibration cabin, wherein the Raman probe, a hygrothermograph and a pressure sensor are arranged in the sealed calibration cabin; the system also comprises a Raman spectrometer, a data acquisition device, a laser and a temperature and humidity generator which are arranged outside the sealed calibration cabin;
the laser is connected with the input end of the Raman probe and used for transmitting laser to the Raman probe, and the Raman spectrometer is connected with the output end of the Raman probe and used for receiving optical signals transmitted by the Raman probe;
the output ends of the hygrothermograph, the pressure sensor and the Raman spectrometer are connected with the data acquisition device;
and the temperature and humidity generator is communicated with the sealed calibration cabin and is used for adjusting the water vapor content in the sealed calibration cabin.
YAG laser with output power of 0-1000 mw, and connected with Raman probe via input fiber for inputting 532nm wavelength continuous laser to the Raman probe.
The Raman probe is connected with the Raman spectrometer through an output optical fiber.
The Raman probe is connected with the Raman spectrometer through an output optical fiber with the core diameter of 580-620 mu m, is connected with the Nd-YAG laser through an input optical fiber with the core diameter of 48-52 mu m, and the hygrothermograph and the pressure sensor are connected with the data acquisition device through a composite cable.
The Raman probe, the hygrothermograph and the pressure sensor are installed in a wall-penetrating sealing mode, namely the composite cable, the input optical fiber and the output optical fiber are connected in a wall-penetrating mode in a potting mode.
A water vapor in-situ calibration method for a Raman probe comprises the following steps:
s1: the Raman probe and the hygrothermograph are installed and fixed in the sealed calibration cabin, the probe is respectively connected with the Raman spectrometer and the laser, and the Raman spectrometer, the hygrothermograph and the pressure sensor are connected with the data acquisition device;
s2: turning on a power supply of the laser, and adjusting the intensity of the output current of the laser to a specific value; opening Raman testing software of a Raman spectrometer, and setting Raman signal acquisition parameters;
s3: the temperature and humidity generator is turned on, and the temperature and humidity value is set;
s4: vacuumizing the sealed calibration cabin, opening an inflation valve between the temperature and humidity generator and the sealed calibration cabin, and closing the inflation valve of the sealed calibration cabin after the hygrothermograph and the pressure sensor display are stable;
s5: the Raman spectrometer, the hygrothermograph and the pressure sensor measure the gas in the sealed calibration cabin at the same time;
s6: obtaining H in Raman spectrometer 2 Peak area Iw of raman signal peak of O, temperature t displayed by hygrothermograph, and relative humidity RH at that temperature t And the pressure sensor displays the gas pressure P in the sealed calibration cabin; according to temperature t and relative humidity RH t Calculating to obtain water vapor in the test environmentPartial pressure P W And a relative humidity RH equivalent to 20 DEG C 20 ；
S7: repeating the steps S3-S6 to finish the calibration and detection of the water vapor under a plurality of groups of humiture;
s8: respectively drawing the partial pressure P of water vapor W Or equivalent relative humidity RH 20 Raman signal peak with water vapor I W Is a standard working curve of (2).
In a specific embodiment, in step S6, the partial pressure of water vapor Pw and the relative humidity RH equivalent to 20 DEG C 20 The calculation formula of (2) is as follows:
Pw＝RH t *10 [10.03086-1645.74834/(t+227.02)]
RH 20 ＝RH t *10 [6.6624*(t-20)/(t+227.02)]
wherein Pw is the partial pressure of water vapor, and the unit is Pa; t is the temperature in the sealed calibration cabin, and the unit is the temperature (DEG C); RH (relative humidity) t Relative humidity at t ℃; RH (relative humidity) 20 To equivalently convert the relative humidity at temperature t to that at 20 ℃.
In a specific embodiment, in step S2, the intensity of the laser output current is set to 4.3A.
In a specific embodiment, in step S2, the total time of data acquisition of the raman spectrometer is 200S, wherein the single acquisition time is 20S and the number of acquisitions is 10; the acquisition mode is an accumulation mode.
In a specific embodiment, the gas generated in the temperature and humidity generator is air with different humidity, the range of the humidity of the gas is adjustable between 5% and 90%, the temperature of the gas is set in the range of 20-25 ℃, and the pressure is the local atmospheric pressure (0.096 MPa).
In a specific embodiment, the test environment outside the sealed calibration cabin is a thermostatic chamber with a temperature of 20±2 ℃.
Application of Raman probe water vapor in-situ calibration method, and water vapor partial pressure P drawn by the calibration method W Equivalent relative humidity RH 20 Raman signal peak with water vapor I W For closing spaces or openingAnd (3) quick in-situ detection and accurate quantitative analysis of water vapor in the air space.
Compared with the prior art, the utility model has the following advantages and beneficial effects:
1. the water vapor in-situ calibration device for the Raman probe provided by the embodiment of the utility model can be used for drawing a standard working curve of the water vapor in-situ calibration of the Raman probe;
2. the water vapor in-situ calibration method for the Raman probe can simultaneously complete the calibration of the water vapor content and the water vapor in-situ calibration of the Raman probe, thereby avoiding the problems of greatly reduced precision caused by time domain change, environmental temperature fluctuation and the like of probe calibration by conventional detection air and improving the precision of the calibration method;
3. according to the water vapor in-situ calibration method for the Raman probe, provided by the embodiment of the utility model, the relative humidity or the water vapor partial pressure which is relative to the saturated vapor pressure at 20 ℃ is used as a calibration parameter, the water vapor calibration result is not influenced by the ambient temperature, the calibrated Raman probe can be used for detecting water vapor in any environment, the relative humidity or the water vapor partial pressure of the water vapor in the environment can be accurately obtained, the comparison of the water vapor contents in different environments can be directly realized, the data conversion analysis is not needed according to the temperature, and the convenience of water vapor detection is greatly improved.
4. The water vapor in-situ calibration method for the Raman probe provided by the embodiment of the utility model can respectively obtain the water vapor partial pressure P W Equivalent relative humidity RH 20 Raman signal peak with water vapor I W By means of the standard working curve, the water vapor Raman signal peak I in the space to be detected is measured W The water vapor partial pressure P of the space to be detected can be obtained W And equivalent relative humidity RH 20 The rapid in-situ detection and accurate quantitative analysis of water vapor can be realized.
Drawings
In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present utility model, the drawings that are needed in the examples will be briefly described below, it being understood that the following drawings only illustrate some examples of the present utility model and therefore should not be considered as limiting the scope, and that other related drawings may be obtained from these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a water vapor in-situ calibration device according to an embodiment of the present utility model;
FIG. 2 is a flow chart of a water vapor in-situ calibration method provided by an embodiment of the utility model;
FIG. 3 is a graph showing the Raman spectrum of water vapor with different concentrations according to the embodiment of the present utility model;
FIG. 4 shows a P provided by an embodiment of the present utility model W 、RH 20 Raman signal peak with water vapor I W Standard working curves (37 sets of data plotted);
FIG. 5 shows a P provided by an embodiment of the present utility model W 、RH 20 Raman signal peak with water vapor I W Standard working curves (6 sets of data plotted).
In the drawings, the reference numerals and corresponding part names:
1-sealed calibration cabin, 2-Raman probe, 3-hygrothermograph, 4-pressure sensor, 5-Raman spectrometer, 6-data collector, 7-laser, 8-humiture generator.
Detailed Description
For the purpose of making apparent the objects, technical solutions and advantages of the present utility model, the present utility model will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present utility model and the descriptions thereof are for illustrating the present utility model only and are not to be construed as limiting the present utility model.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. However, it will be apparent to one of ordinary skill in the art that: no such specific details are necessary to practice the utility model. In other instances, well-known structures and methods have not been described in detail in order to avoid obscuring the present utility model.
Throughout the specification, references to "one embodiment," "an embodiment," "one example," or "an example" mean: a particular feature, structure, or characteristic described in connection with the embodiment or example is included within at least one embodiment of the utility model. Thus, the appearances of the phrases "in one embodiment," "in an example," or "in an example" in various places throughout this specification are not necessarily all referring to the same embodiment or example. Furthermore, the particular features, structures, or characteristics may be combined in any suitable combination and/or sub-combination in one or more embodiments or examples. Moreover, those of ordinary skill in the art will appreciate that the illustrations provided herein are for illustrative purposes and that the illustrations are not necessarily drawn to scale. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrated; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description of the present utility model, unless explicitly stated and limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, or may include both the first and second features not being in direct contact but being in contact by another feature therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
Example 1
Assembling and connecting the water vapor in-situ calibration device according to the structure shown in fig. 1, installing and fixing a Raman probe 2 and a hygrothermograph 3 in a sealed calibration cabin, respectively connecting the probe with a Raman spectrometer 5 and a laser 7, and connecting the Raman spectrometer 5, the hygrothermograph 3 and a pressure sensor 4 with a data acquisition device 6; the calibration method is as shown in figure 2, the temperature and humidity generator 8 is opened to set the temperature at 23 ℃ and the relative humidity at 60%, the sealed calibration cabin 1 is vacuumized, the valve of the air charging port between the temperature and humidity generator 8 and the sealed calibration cabin 1 is opened, and after the readings of the hygrothermograph 3 and the pressure sensor 5 are stable, the air charging valve of the sealed calibration cabin 1 is closed;
starting and opening power switches of the laser 7, the Raman spectrometer 5, the hygrothermograph 3 and the pressure sensor 4; setting the current value of the laser to be 4.3A, setting the acquisition time of the Raman spectrometer to be 200s, wherein the single acquisition time is 20s, the acquisition times are 10 times, and the acquisition mode is an accumulation mode;
collecting data of a Raman spectrometer 5, a hygrothermograph 3 and a pressure sensor 4 to obtain H in the Raman spectrometer 5 2 Peak area Iw of raman signal peak of O, temperature t displayed by hygrothermograph 3, and relative humidity RH at that temperature t And the pressure sensor 4 displays the gas pressure P in the sealed calibration cabin;
according to temperature t and relative humidity RH t Using the formula pw=rh t *10 [10.03086-1645.74834/(t+227.02)] And RH (relative humidity) 20 ＝RH t *10 [6.6624*(t-20)/(t+227.02)] Respectively calculating and obtaining partial pressure P of water vapor in test environment W And a relative humidity RH equivalent to 20 DEG C 20 The method comprises the steps of carrying out a first treatment on the surface of the The experiment measurement times are not less than 3 times, the temperature and humidity and the change of spectrum signals in the test process are observed, and the experiment data are shown in table 1.
Table 1 example 1 multiple parallel measurements (calibration and calibration data) at the same relative humidity
Examples 2 to 37
Based on example 1, the relative humidity of the temperature and humidity generator was set to other values (the range of the relative humidity set value of the temperature and humidity generator can be adjusted according to actual needs), and groups 2 to 37 Iw and P were obtained by the same operation W And RH (relative humidity) 20 The values are specified in table 2 below.
Table 2 examples 2-37 single measurement data (calibration data versus calibration data) at different relative humidities
Iw, P obtained in examples 1 to 37 W And RH (relative humidity) 20 Data, respectively drawing water vapor partial pressure P W Equivalent relative humidity RH 20 Raman signal peak with water vapor I W As shown in fig. 4 and 5, wherein fig. 4 is a standard operating curve plotted according to 37 sets of data from example 1-example 37, and fig. 5 is a standard operating curve plotted according to 6 sets of data, i.e., example 2, example 10, example 17, example 26, example 32, and example 37, bolded in table 2. Wherein fig. 3 is a graph of raman spectra of water vapor at different concentrations plotted using the data sets of example 10, example 17, example 26, example 32, and example 37.
After the standard working curve is drawn, the in-situ calibration of the Raman probe is completed; when the water vapor in the space to be detected is required to be detected, the Raman spectrum of the space to be detected is acquired, and a water vapor Raman signal peak I in the space to be detected is obtained W According to the standard working curve, the water vapor partial pressure P of the space to be detected can be obtained W Or equivalent relative humidity RH 20 。
Example 38
Verification standard workerThe accuracy of the curve is as follows: placing the calibrated Raman probe in a space to be detected, and collecting Raman spectrum of the space to be detected according to the same Raman spectrometer setting parameters to obtain a water vapor Raman signal peak I in the space to be detected W According to the standard working curve, the water vapor partial pressure P of the space to be detected can be obtained W Or equivalent relative humidity RH 20 And compares it with the measured value of the hygrothermograph to analyze the measurement error as shown in table 3 below.
TABLE 3 error analysis of standard values and actual measured values calculated from standard operating curves
As can be seen from Table 3, the water vapor Raman signal peak I in the space to be detected is obtained according to the measurement W The water vapor P of the detection space is calculated by using a standard working curve W 、RH 20 The error between the calibration method and the actual measured value is very small, which indicates that the standard working curve drawn by the calibration method has high precision; according to the utility model, relative humidity or partial pressure of water vapor relative to saturated vapor pressure at 20 ℃ is used as a calibration parameter, a water vapor calibration result is not influenced by environmental temperature, the Raman probe calibrated by the method is used for detecting water vapor in any environment, the relative humidity or partial pressure of water vapor in the environment can be accurately obtained, the Raman probe can be directly used for comparing water vapor contents in different environments, data conversion analysis is not needed according to temperature, and convenience of water vapor detection is greatly improved, so that the water vapor content in a closed space or an open space can be rapidly and accurately detected by utilizing the standard working curve of the Raman probe.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the utility model, and is not meant to limit the scope of the utility model, but to limit the utility model to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the utility model are intended to be included within the scope of the utility model.
Claims (8)
1. A water vapor in-situ calibration method for a Raman probe is characterized by comprising the following steps of: the method comprises the following steps:
s1: assembling an in-situ calibration device;
s2: turning on a power supply of a laser (7), and adjusting the intensity of the output current of the laser to a specific value; opening Raman testing software of a Raman spectrometer (5) and setting Raman signal acquisition parameters;
s3: the temperature and humidity generator (8) is turned on, and the temperature and humidity value is set;
s4: vacuumizing the sealed calibration cabin (1), opening an inflation valve between the temperature and humidity generator (8) and the sealed calibration cabin (1), and closing the inflation valve of the sealed calibration cabin (1) after the indication of the hygrothermograph (3) and the pressure sensor (4) is stable;
s5: the Raman spectrometer (5), the hygrothermograph (3) and the pressure sensor (4) measure the gas in the sealed calibration cabin at the same time;
s6: obtaining Raman signal peak area Iw, temperature t in sealed calibration cabin and relative humidity RH at the temperature t Gas pressure P, according to temperature t and relative humidity RH t Calculating to obtain partial pressure P of water vapor in test environment W And a relative humidity RH equivalent to 20 DEG C 20 The method comprises the steps of carrying out a first treatment on the surface of the Wherein, the calculation formulas of the water vapor partial pressure Pw and the relative humidity RH20 equivalent to 20 ℃ are as follows:
Pw=RHt*10[10.03086-1645.74834/(t+227.02)]
RH20= RHt*10[6.6624*(t-20)/(t+227.02)]；
pw is the partial pressure of water vapor in Pa; t is the temperature in the sealed calibration cabin, and the unit is the temperature (DEG C); RH (relative humidity) t Relative humidity at t ℃; RH (relative humidity) 20 To set the relative humidity RH of temperature t t Equivalent conversion to relative humidity at 20 ℃;
s7: repeating the step S3 to the step S6 to finish the calibration and detection of the water vapor under a plurality of groups of humiture;
s8: respectively drawing the partial pressure P of water vapor W Equivalent relative humidity RH 20 Raman signal peak with water vapor I W Is a standard working curve of (2);
the in-situ calibration device comprises a sealed calibration cabin (1), wherein a Raman probe (2), a hygrothermograph (3) and a pressure sensor (4) are arranged in the sealed calibration cabin (1); the system also comprises a Raman spectrometer (5), a data acquisition device (6), a laser (7) and a temperature and humidity generator (8) which are arranged outside the sealed calibration cabin (1);
the laser (7) is connected with the input end of the Raman probe (2) and used for emitting laser to the Raman probe (2), and the Raman spectrometer (5) is connected with the output end of the Raman probe (2) and used for receiving optical signals emitted by the Raman probe (2);
the output ends of the hygrothermograph (3), the pressure sensor (4) and the Raman spectrometer (5) are connected with the data acquisition device (6);
the temperature and humidity generator (8) is communicated with the sealed calibration cabin (1) and used for adjusting the water vapor content in the sealed calibration cabin (1).
2. The method for calibrating water vapor in situ of a raman probe according to claim 1, wherein in step S2, total time of data acquisition of a raman spectrometer is 200S, wherein single acquisition time is 20S, and acquisition times are 10 times; the acquisition mode is an accumulation mode.
3. The method for calibrating the water vapor in situ of the Raman probe according to claim 1, wherein the gas generated in the temperature and humidity generator is air with different humidity, the range of the gas humidity is adjustable between 5% and 90%, the temperature of the gas is kept at 20-25 ℃, and the pressure is the same as the local atmospheric pressure.
4. A method of calibrating moisture in situ for a raman probe according to claim 1 wherein the temperature of the test environment outside the sealed calibration chamber is a thermostatic chamber at 20 ℃.
5. The water vapor in-situ calibration method for the Raman probe according to claim 1, wherein the laser (7) is a Nd-YAG laser with the output power range of 0-1000 mw, and the laser (7) is connected with the Raman probe (2) through an input optical fiber and is used for inputting continuous laser with the wavelength of 532nm to the Raman probe (2).
6. A method of vapour in situ calibration for a raman probe according to claim 1, characterized in that the raman probe (2) is connected to a raman spectrometer (5) by means of an output optical fiber.
7. The water vapor in-situ calibration method for the Raman probe according to claim 1, wherein the Raman probe (2) is connected with the Raman spectrometer (5) through an output optical fiber with a core diameter of 580-620 μm, and is connected with the laser (7) through an input optical fiber with a core diameter of 48-52 μm.
8. The method for in-situ calibration of water vapor of a Raman probe according to claim 1, wherein the method is used for in-situ detection and quantitative analysis of water vapor in a closed space or an open space.
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| CN202210263558.3A CN114441505B (en) | 2022-03-17 | 2022-03-17 | Water vapor in-situ calibration device for Raman probe, calibration method and application |
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| CN202210263558.3A CN114441505B (en) | 2022-03-17 | 2022-03-17 | Water vapor in-situ calibration device for Raman probe, calibration method and application |
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| CN114441505B true CN114441505B (en) | 2023-08-18 |
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| CN117647484B (en) * | 2023-12-07 | 2024-08-20 | 中国科学院大气物理研究所 | A simple water vapor calibration device and method |
| CN120847017A (en) * | 2025-09-23 | 2025-10-28 | 浙江灵析精仪科技发展有限公司 | Water vapor calibration device and method |
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