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CN114236688B - Multimode waveguide chirped Bragg grating delay line chip with the highest order being even-numbered - Google Patents

Multimode waveguide chirped Bragg grating delay line chip with the highest order being even-numbered Download PDF

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CN114236688B
CN114236688B CN202111394290.9A CN202111394290A CN114236688B CN 114236688 B CN114236688 B CN 114236688B CN 202111394290 A CN202111394290 A CN 202111394290A CN 114236688 B CN114236688 B CN 114236688B
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grating
multimode waveguide
delay line
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waveguide
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CN114236688A (en
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高旭东
朱宇鹏
董建绩
张帆
袁文杰
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CETC 38 Research Institute
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/124Geodesic lenses or integrated gratings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/1209Multimode
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/12107Grating

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Abstract

The invention provides a multimode waveguide chirped Bragg grating delay line chip with even-order highest order, which comprises a multimode waveguide and Bragg gratings positioned on two sides of the multimode waveguide; the two groups of Bragg gratings on two sides of the multimode waveguide are of an asymmetric structure at an initial position, the relative displacement is delta L=lambda/2, lambda is a grating period, then the relative displacement gradually decreases, the two groups of Bragg gratings are completely symmetric at a position between 20% and 90% of the multimode waveguide, and the duty ratio of the gratings sequentially increases from the initial position to the terminal. The invention adopts multimode waveguide supporting high-order modes, and adds symmetrical gratings on two sides, thereby constructing high-order multimode gratings; adopting an antisymmetric-symmetrical gradual grating apodization mode to inhibit delay jitter and side lobes; the gradient design of the grating duty ratio is adopted to realize the chirp dispersion delay of the Bragg grating, and two modes of changing the duty ratio gradient interval and changing the tooth length of the externally protruded grating are provided aiming at the chirp dispersion interval regulation and control.

Description

最高阶为偶数阶的多模波导啁啾布拉格光栅延时线芯片Multimode waveguide chirped Bragg grating delay line chip with the highest order being even-numbered

技术领域Technical field

本发明涉及集成光电子技术领域,更具体涉及一种最高阶为偶数阶的多模波导啁啾布拉格光栅延时线芯片。The invention relates to the field of integrated optoelectronics technology, and more specifically to a multi-mode waveguide chirped Bragg grating delay line chip whose highest order is an even-numbered order.

背景技术Background technique

光延时技术在光通信和雷达探测领域有广泛的应用。基于光学真延时线的相控阵列天线可以突破孔径效应限制,实现大瞬时带宽。啁啾光栅延时线芯片具有集成度高、连续延时的优点,因此得到人们的广泛关注,但是其存在损耗大,延时误差大两方面的缺点。Optical delay technology is widely used in the fields of optical communications and radar detection. Phased array antennas based on optical true delay lines can break through the limitations of the aperture effect and achieve large instantaneous bandwidth. The chirped grating delay line chip has the advantages of high integration and continuous delay, so it has received widespread attention. However, it has the disadvantages of large loss and large delay error.

啁啾光栅延时线芯片有两种类型:双波导反向耦合啁啾布拉格光栅和单波导啁啾布拉格光栅。单波导啁啾布拉格光栅延时线可以较为容易地实现螺旋结构,延时线结构紧凑,芯片尺寸较小[APL Photonics,2020,5(10):101302]。There are two types of chirped grating delay line chips: dual-waveguide reverse-coupled chirped Bragg grating and single-waveguide chirped Bragg grating. The single waveguide chirped Bragg grating delay line can easily achieve a spiral structure. The delay line structure is compact and the chip size is small [APL Photonics, 2020, 5(10):101302].

目前,啁啾布拉格光栅延时线基本都基于单模波导设计。在单波导单模啁啾布拉格光栅延时线中,反射基模(TE0)光和入射基模光混在一起,需要通过特殊设计,如图1a,引入3dB耦合器,来分离入射光和反射光[OPTICS EXPRESS,20(10):11242]。在这种结构中,入射光通过3dB耦合器进入两根一样的光延时线,两路光需要具有很好的幅相一致性,才能实现较好的光分离效果。但是由于加工误差,两根延时波导难以完全一致,且3dB耦合器存在一定的功分不均衡,因此会引入损耗和较大的串扰,串扰的存在会产生延时误差。另外,单模波导损耗较大,相比而言,多模宽波导的损耗要小很多。At present, chirped Bragg grating delay lines are basically based on single-mode waveguide design. In a single-waveguide single-mode chirped Bragg grating delay line, the reflected fundamental mode (TE 0 ) light and the incident fundamental mode light are mixed together. Special design is required, as shown in Figure 1a, and a 3dB coupler is introduced to separate the incident light and reflected light. Light [OPTICS EXPRESS,20(10):11242]. In this structure, the incident light enters two identical optical delay lines through the 3dB coupler. The two paths of light need to have good amplitude and phase consistency to achieve a good light separation effect. However, due to processing errors, it is difficult for the two delay waveguides to be completely consistent, and the 3dB coupler has a certain power imbalance, which will introduce losses and large crosstalk. The existence of crosstalk will produce delay errors. In addition, the loss of single-mode waveguide is relatively large, and in comparison, the loss of multi-mode wide waveguide is much smaller.

近几年,多模布拉格光栅的上传下载滤波器被广泛研究[Photonics Research,2021,9(5):759;optics Letters,2019,44(6):1304],它可以实现单色光信号向传输干线的上传和下载功能。如图1b所示,基于多模波导和反对称布拉格光栅设计,正向传输的基模(TE0)与反向传输的一阶模(TE1)发生耦合,进而实现入射TE0光向反射TE1光的转变,然后通过模分解复用器将反射TE1光从干线上分离出来,与此同时,TE1模转变为TE0In recent years, multi-mode Bragg grating upload and download filters have been widely studied [Photonics Research, 2021, 9 (5): 759; optics Letters, 2019, 44 (6): 1304], which can realize monochromatic optical signal direction. Upload and download functions of the transmission trunk. As shown in Figure 1b, based on the multi-mode waveguide and antisymmetric Bragg grating design, the fundamental mode of forward transmission (TE 0 ) and the first-order mode of reverse transmission (TE 1 ) are coupled, thereby achieving reflection of the incident TE 0 light The TE 1 light is converted, and then the reflected TE 1 light is separated from the main line through the mode demultiplexer. At the same time, the TE 1 mode is converted to TE 0 .

发明内容Contents of the invention

本发明所要解决的技术问题在于如何解决高阶模多模波导的布拉格光栅的啁啾色散延时问题。The technical problem to be solved by the present invention is how to solve the chirped dispersion delay problem of the Bragg grating of a high-order mode multi-mode waveguide.

本发明通过以下技术手段实现解决上述技术问题的:The present invention solves the above technical problems through the following technical means:

最高阶为偶数阶的多模波导啁啾布拉格光栅延时线芯片,包括多模波导和位于多模波导两侧的布拉格光栅;所述多模波导两侧的两组布拉格光栅在初始位置为非对称结构,相对位移量为ΔL=Λ/2,其中Λ为光栅周期,随后相对位移量逐渐减小,随后在位于多模波导的20%至90%位置开始两组布拉格光栅达到完全对称,相对位移ΔL=0;之后两组布拉格光栅继续保持对称,所述光栅自初始位置至终端占空比依次增大。The multimode waveguide chirped Bragg grating delay line chip with the highest order being an even number includes a multimode waveguide and Bragg gratings located on both sides of the multimode waveguide; the two sets of Bragg gratings on both sides of the multimode waveguide are in non-zero initial positions. Symmetric structure, the relative displacement is ΔL=Λ/2, where Λ is the grating period, and then the relative displacement gradually decreases, and then the two sets of Bragg gratings reach complete symmetry starting from 20% to 90% of the multi-mode waveguide. Displacement ΔL=0; after that, the two sets of Bragg gratings continue to maintain symmetry, and the duty cycle of the gratings increases sequentially from the initial position to the terminal position.

本发明采用支持高阶模的多模波导,并在两侧增加对称光栅,进而构建高阶多模光栅;采用反对称→对称渐变的光栅切趾方式来抑制延时抖动和旁瓣;采用光栅占空比的渐变设计,实现布拉格光栅的啁啾色散延时,并针对啁啾色散区间调控,提出了改变占空比渐变区间和改变外突出光栅齿长两种方式。The present invention uses a multi-mode waveguide that supports high-order modes, and adds symmetrical gratings on both sides to construct a high-order multi-mode grating; the anti-symmetric → symmetric gradient grating apodization method is used to suppress delay jitter and side lobes; and the grating duty is used The ratio gradient design realizes the chirped dispersion delay of the Bragg grating, and for the control of the chirped dispersion interval, two methods are proposed, namely changing the duty cycle gradient interval and changing the length of the outer protruding grating teeth.

进一步的,所述光栅采用反对称→对称渐变的横向错位切趾。Furthermore, the grating adopts anti-symmetric to symmetric gradient transverse dislocation apodization.

进一步的,所述光栅切趾曲线为但不限于高斯函数。Further, the grating apodization curve is but is not limited to a Gaussian function.

进一步的,所述光栅占空比以线性渐变。Further, the grating duty cycle changes linearly.

进一步的,所述光栅周期Λ的参数选择根据以下公式:Further, the parameter selection of the grating period Λ is based on the following formula:

λ=[n1d(z)+n2(1-d(z))]Λ=[(n1-n2)d(z)+n2]Λ (1)λ=[n 1 d(z)+n 2 (1-d(z))]Λ=[(n 1 -n 2 )d(z)+n 2 ]Λ (1)

其中,λ为反射光波长,n1、n2分别表示光栅梳齿区域和非光栅梳齿区域的有效折射率,该有效折射率为TE0模和最高阶模的有效折射率之和的平均值,z为光在光栅延时线中传输的位置,d(z)表示光栅占空比。Among them, λ is the wavelength of reflected light, n 1 and n 2 represent the effective refractive index of the grating comb area and the non-grating comb area respectively. The effective refractive index is the average of the sum of the effective refractive index of the TE0 mode and the highest order mode. , z is the position of light transmission in the grating delay line, and d(z) represents the grating duty cycle.

进一步的,所述多模波导z位置处反射的光的波长Further, the wavelength of the light reflected at the z position of the multi-mode waveguide

λ(z)=[n1d(z)+n2(1-d(z))]Λ=[(n1-n2)d(z)+n2]Λ (2)λ(z)=[n 1 d(z)+n 2 (1-d(z))]Λ=[(n 1 -n 2 )d(z)+n 2 ]Λ (2)

其中,z为光在光栅延时线中传输的位置,λ(z)为在z位置处反射的光的波长。Among them, z is the position where the light is transmitted in the grating delay line, and λ(z) is the wavelength of the light reflected at the z position.

进一步的,所述光栅占空比为0%≤d(z)≤100%,占空比渐变区间≤(0%-100%)。Further, the grating duty cycle is 0%≤d(z)≤100%, and the duty cycle gradient interval is ≤(0%-100%).

进一步的,还包括模分解复用器;所述模分解复用器包括输入波导和输出波导;所述入射波导与多模波导的初始端连通。Further, it also includes a mode demultiplexer; the mode demultiplexer includes an input waveguide and an output waveguide; the incident waveguide is connected to the initial end of the multi-mode waveguide.

进一步的,啁啾色散区间的调控方式有两种:改变占空比渐变区间和/或改变外突出光栅齿长。Furthermore, there are two ways to control the chirp dispersion interval: changing the duty cycle gradient interval and/or changing the length of the outer protruding grating teeth.

本发明的优点在于:The advantages of the present invention are:

1.采用支持高阶模的多模波导来降低波导的传输损耗,并在两侧增加对称光栅,进而构建高阶多模光栅;1. Use a multi-mode waveguide that supports high-order modes to reduce the transmission loss of the waveguide, and add symmetrical gratings on both sides to construct a high-order multi-mode grating;

2.采用反对称→对称渐变的光栅切趾方式来抑制延时抖动和旁瓣;2. Use the antisymmetric → symmetric gradient grating apodization method to suppress delay jitter and side lobes;

3.采用光栅占空比的渐变设计,实现布拉格光栅的啁啾色散延时,并针对啁啾色散区间调控,提出了改变占空比渐变区间和改变外突出光栅齿长两种方式。3. The gradient design of the grating duty cycle is used to realize the chirped dispersion delay of the Bragg grating, and for the control of the chirped dispersion interval, two methods are proposed: changing the duty cycle gradient interval and changing the length of the outer protruding grating teeth.

附图说明Description of drawings

图1a为现有技术与本发明实施例中多模啁啾布拉格光栅延时线图1b的比对;Figure 1a is a comparison of the multi-mode chirped Bragg grating delay line Figure 1b in the prior art and the embodiment of the present invention;

其中,(a)为基于3dB耦合器分光的单模啁啾布拉格光栅延时线,(b)为基于模分解复用分光的多模布拉格光栅滤波器,图1b为本发明实施例中的多模啁啾布拉格光栅延时线;Among them, (a) is a single-mode chirped Bragg grating delay line based on 3dB coupler splitting, (b) is a multi-mode Bragg grating filter based on mode demultiplexing splitting, and Figure 1b is a multi-mode chirped Bragg grating filter in an embodiment of the present invention. Modular chirped Bragg grating delay line;

图2为本发明实施例中多模啁啾布拉格光栅延时线的设计要点和结构示意图;Figure 2 is a schematic diagram of the design points and structure of a multi-mode chirped Bragg grating delay line in an embodiment of the present invention;

图3为可实现TE0/TE2模式转变的多模波导布拉格光栅;Figure 3 shows a multi-mode waveguide Bragg grating that can achieve TE 0 / TE 2 mode conversion;

图4为反对称→对称渐变切趾光栅的示意图;Figure 4 is a schematic diagram of an antisymmetric → symmetric gradient apodized grating;

图5为采用本发明实施例中啁啾布拉格光栅延时线的仿真结果图,其中,(a)光栅占空比:40%-60%,wg=180nm;(b)光栅占空比:35%-65%,wg=180nm;(c)光栅占空比:40%-60%,wg=250nm;Figure 5 is a simulation result diagram using a chirped Bragg grating delay line in an embodiment of the present invention, wherein (a) grating duty cycle: 40%-60%, w g =180nm; (b) grating duty cycle: 35%-65%, w g =180nm; (c) Grating duty cycle: 40%-60%, w g =250nm;

图6为本发明实施例中带有模分解复用器的多模波导啁啾布拉格光栅。Figure 6 is a multi-mode waveguide chirped Bragg grating with a mode demultiplexer in an embodiment of the present invention.

具体实施方式Detailed ways

为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are part of the present invention. Examples, not all examples. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present invention.

如图2所示,多模啁啾布拉格光栅延时线的设计要点包括三方面:1.采用支持TE2模的多模波导1,并在两侧增加对称光栅2,进而构建高阶多模光栅;2.采用反对称→对称渐变的光栅切趾方式来抑制延时抖动和旁瓣;3.采用光栅占空比的渐变设计,实现布拉格光栅的啁啾色散延时,并针对啁啾色散区间调控,提出了改变占空比渐变区间和改变外突出光栅齿长两种方式。As shown in Figure 2, the design points of the multi-mode chirped Bragg grating delay line include three aspects: 1. Use a multi-mode waveguide 1 that supports TE2 mode, and add symmetrical gratings 2 on both sides to construct a high-order multi-mode grating. ; 2. Use the antisymmetric → symmetric gradient grating apodization method to suppress delay jitter and side lobes; 3. Use the gradient design of the grating duty cycle to achieve the chirped dispersion delay of the Bragg grating, and target the chirped dispersion interval For control, two methods are proposed: changing the duty cycle gradient interval and changing the length of the protruding grating teeth.

下面按照设计的逻辑一步步介绍:The following is a step-by-step introduction based on the design logic:

1.高阶多模光栅设计1. High-order multi-mode grating design

光波导的损耗主要来自于波导侧壁粗糙引起的散射损耗,波导宽度越宽,侧壁模场强度越低,损耗越低。相对于上传下载滤波器中采用的TE1多模波导(波导宽度1.1um),TE2多模波导(波导宽度1.3um)的损耗无疑会更低。本发明采用了TE2多模布拉格光栅,其结构如图3所示。首先,根据高阶模阶数确定波导宽度,对于TE2模式,通过仿真计算,合适的波导宽度是1.3um。然后,在多模波导两侧引入周期结构,构成布拉格光栅,针对TE2的对称场分布特性,布拉格光栅也需要采用对称设计,即上下光栅无错位,来实现TE0/TE2模式反向耦合。光栅周期Λ的参数选择根据以下公式:The loss of optical waveguides mainly comes from the scattering loss caused by the roughness of the waveguide sidewalls. The wider the waveguide width, the lower the sidewall mode field intensity, and the lower the loss. Compared with the TE 1 multi-mode waveguide (waveguide width 1.1um) used in the upload and download filters, the loss of the TE 2 multi-mode waveguide (waveguide width 1.3um) will undoubtedly be lower. The present invention adopts TE 2 multi-mode Bragg grating, whose structure is shown in Figure 3. First, determine the waveguide width based on the high-order mode order. For TE 2 mode, through simulation calculation, the appropriate waveguide width is 1.3um. Then, periodic structures are introduced on both sides of the multi-mode waveguide to form a Bragg grating. In view of the symmetrical field distribution characteristics of TE 2 , the Bragg grating also needs to adopt a symmetric design, that is, there is no misalignment of the upper and lower gratings to achieve TE 0 / TE 2 mode reverse coupling. . The parameter selection of the grating period Λ is based on the following formula:

λ=[n1d+n2(1-d)]Λ=[(n1-n2)d+n2]Λ (1)λ=[n 1 d+n 2 (1-d)]Λ=[(n 1 -n 2 )d+n 2 ]Λ (1)

其中,λ为反射光波长,n1、n2分别表示光栅梳齿区域和非光栅梳齿区域的有效折射率,该有效折射率为正向传播TE0模和反向传播TE2模的有效折射率之和的平均值,即(n_TE0+n_TE2)/2,n_TE0、n_TE2的值与波导宽度w、光栅齿长wg相关,通过仿真计算可以得到。Among them, λ is the wavelength of reflected light, n 1 and n 2 represent the effective refractive index of the grating comb area and the non-grating comb area respectively. The effective refractive index is the effective refractive index of the forward propagating TE 0 mode and the reverse propagating TE 2 mode. The average value of the sum of refractive indices, that is, (n_TE 0 +n_TE 2 )/2, the values of n_TE 0 and n_TE 2 are related to the waveguide width w and the grating tooth length w g , which can be obtained through simulation calculations.

引入对称光栅后,多模波导中正向传输的TE0模和反向传输的TE2模发生耦合,这种耦合使得TE0模入射光转变为TE2模反射光,从原路返回。这种反射是针对特定波长的,通过合理地设计光栅周期Λ,占空比d等参数,可以改变波长。After the symmetrical grating is introduced, the TE 0 mode transmitted in the forward direction and the TE 2 mode transmitted in the reverse direction are coupled in the multi-mode waveguide. This coupling causes the TE 0 mode incident light to be converted into TE 2 mode reflected light and returned from the original path. This reflection is for a specific wavelength, and the wavelength can be changed by reasonably designing the grating period Λ, duty cycle d and other parameters.

2.反对称→对称渐变光栅切趾2. Antisymmetry→symmetric gradient grating apodization

在波导中突然引入光栅结构,会使光栅初始位置产生很强的界面反射,进而引起反射谱旁瓣和延时抖动。为了抑制旁瓣和延时抖动,需要对光栅进行切趾处理。本发明中采用了横向错位切趾的方法,通过两侧光栅相对位移实现耦合强度的改变。针对具有反对称模场的TE1模,光栅的横向错位切趾采用的是反对称→对称渐变光栅切趾。本发明中,由于TE2模具有对称模场,因此设计了对称→反对称渐变光栅切趾。切趾区域的起始端为光栅的初始位置,终止端为光栅的20%-90%之间的任一一个位置,从该位置之后均为两边光栅对称结构。本实施例从50%开始对称。如图4所示,在切趾区域的起始端,光栅齿为非对称结构,相对位移为周期的一半,即ΔL=Λ/2时,两组光栅完全错位,耦合系数为0;在切趾区域的终止端,位移ΔL=0时,两组光栅完全对准,耦合系数达到最大。要使耦合系数从小到大,ΔL应由大到小,并且需要按一定的函数进行变化,如高斯函数、余弦函数、Blackman函数、双曲正切函数、Sinc函数和柯西函数等,图4中,光栅切趾曲线为高斯函数。The sudden introduction of a grating structure into the waveguide will cause strong interface reflection at the initial position of the grating, which will in turn cause reflection spectrum side lobes and delay jitter. In order to suppress side lobes and delay jitter, the grating needs to be apodized. In the present invention, the method of lateral dislocation apodization is adopted, and the coupling intensity is changed through the relative displacement of the gratings on both sides. For the TE 1 mode with an antisymmetric mode field, the lateral dislocation apodization of the grating is antisymmetric → symmetric gradient grating apodization. In the present invention, since the TE 2 mold has a symmetrical mode field, a symmetric → anti-symmetric gradient grating apodization is designed. The starting end of the apodization area is the initial position of the grating, and the ending end is any position between 20% and 90% of the grating. From this position onwards, there is a symmetrical structure of the grating on both sides. This example starts with symmetry at 50%. As shown in Figure 4, at the beginning of the apodization region, the grating teeth have an asymmetric structure, and the relative displacement is half of the period, that is, when ΔL = Λ/2, the two sets of gratings are completely misaligned and the coupling coefficient is 0; at the apodization At the end of the region, when the displacement ΔL=0, the two sets of gratings are completely aligned, and the coupling coefficient reaches the maximum. To make the coupling coefficient from small to large, ΔL should be changed from large to small, and it needs to change according to a certain function, such as Gaussian function, cosine function, Blackman function, hyperbolic tangent function, Sinc function and Cauchy function, etc., in Figure 4 , the grating apodization curve is a Gaussian function.

相比于常见的光栅齿长wg渐变的切趾方式,横向错位切趾法可以保证光栅梳齿在初始位置就具有较大的wg,有效降低光栅梳齿的加工难度,可以与现有芯片加工工艺的最小线宽相匹配。Compared with the common apodization method in which the grating tooth length w g gradually changes, the transverse offset apodization method can ensure that the grating comb teeth have a larger w g at the initial position, effectively reducing the processing difficulty of the grating comb teeth, and can be compared with the existing Match the minimum line width of the chip processing technology.

3.占空比线性渐变实现啁啾色散3. Linear gradient of duty cycle to achieve chirped dispersion

为了实现啁啾色散延时,即不同波长的光在光栅延时线的不同位置反射,需要引入渐变的折射率。光栅占空比为一个周期内存在光栅的长度与周期的比值。渐变的光栅占空比是实现啁啾布拉格光栅的一种重要手段[Scientific Reports,2016,6:30235]。本发明采用了渐变光栅占空比的方案,但是由于其特殊的外突出光栅齿结构,啁啾色散区间的调控方式出现了两种:a.占空比渐变区间,b.外突出光栅齿长。In order to achieve chirped dispersion delay, that is, light of different wavelengths is reflected at different positions of the grating delay line, a gradient refractive index needs to be introduced. The grating duty cycle is the ratio of the length of the grating to the period within one cycle. Gradient grating duty cycle is an important means to realize chirped Bragg grating [Scientific Reports, 2016, 6:30235]. The present invention adopts a scheme of gradient grating duty cycle, but due to its special protruding grating tooth structure, there are two ways to control the chirp dispersion interval: a. Duty cycle gradient interval, b. Protruding grating tooth length .

设多模波导的宽度为w,光栅宽度为wg,光栅周期为Λ,占空比为d(z),在啁啾布拉格光栅中,公式(1)变为:Assume that the width of the multimode waveguide is w, the grating width is w g , the grating period is Λ, and the duty cycle is d(z). In the chirped Bragg grating, formula (1) becomes:

λ(z)=[n1d(z)+n2(1-d(z))]Λ=[(n1-n2)d(z)+n2]Λ (2)λ(z)=[n 1 d(z)+n 2 (1-d(z))]Λ=[(n 1 -n 2 )d(z)+n 2 ]Λ (2)

其中,z为光在光栅延时线中传输的位置,λ(z)为在z位置处反射的光的波长。从式1可以看出,若占空比d(z)线性变化,则λ(z)也会线性变化。占空比线性增大时,可以实现正色散系数的线性延时,与之相反,占空比线性减小时,可以实现负色散系数的线性延时。从式2还可以看出,当周期Λ固定时,λ的变化区间(啁啾色散区间)取决于占空比的渐变区间以及n1和n2的值,其中n1和n2随光栅齿长而变,因此,啁啾色散区间的调控方式有两种:a.占空比渐变区间,b.外突出光栅齿长。Among them, z is the position where the light is transmitted in the grating delay line, and λ(z) is the wavelength of the light reflected at the z position. It can be seen from Equation 1 that if the duty cycle d(z) changes linearly, then λ(z) will also change linearly. When the duty cycle linearly increases, a linear delay with a positive dispersion coefficient can be achieved. On the contrary, when the duty cycle linearly decreases, a linear delay with a negative dispersion coefficient can be achieved. It can also be seen from Equation 2 that when the period Λ is fixed, the variation interval of λ (chirped dispersion interval) depends on the gradient interval of the duty cycle and the values of n 1 and n 2 , where n 1 and n 2 vary with the grating teeth. Therefore, there are two ways to control the chirp dispersion interval: a. Duty cycle gradient interval, b. Outward protruding grating tooth length.

图5为啁啾布拉格光栅延时线的仿真结果图。多模波导宽度w=1.3μm,波导厚度为220nm,光栅宽度wg=180nm,光栅周期Λ=300nm。图5a中,光栅宽度wg=180nm,光栅占空比由40%变化到60%,啁啾色散延时区间为1549~1559nm(带宽10nm)。图5b中,光栅宽度wg=180nm,光栅占空比由30%变化到70%,啁啾色散延时区间为1548~1561nm(带宽12nm)。图5c中,光栅宽度wg=250nm,光栅占空比由40%变化到60%,啁啾色散延时区间为1551~1569nm(带宽18nm)。(a)光栅占空比:40%-60%,wg=180nm;(b)光栅占空比:35%-65%,wg=180nm;(c)光栅占空比:40%-60%,wg=250nm。Figure 5 shows the simulation results of the chirped Bragg grating delay line. The multimode waveguide width w=1.3μm, the waveguide thickness is 220nm, the grating width wg =180nm, and the grating period Λ=300nm. In Figure 5a, the grating width w g =180nm, the grating duty cycle changes from 40% to 60%, and the chirp dispersion delay interval is 1549~1559nm (bandwidth 10nm). In Figure 5b, the grating width w g =180nm, the grating duty cycle changes from 30% to 70%, and the chirp dispersion delay interval is 1548~1561nm (bandwidth 12nm). In Figure 5c, the grating width w g =250nm, the grating duty cycle changes from 40% to 60%, and the chirp dispersion delay range is 1551~1569nm (bandwidth 18nm). (a) Grating duty cycle: 40%-60%, w g =180nm; (b) Grating duty cycle: 35%-65%, w g =180nm; (c) Grating duty cycle: 40%-60 %, w g =250nm.

4.模分解复用器分光4. Mode demultiplexer splitting

由于输入模式与反射(输出)模式不同阶,可以利用模分解复用器实现输入与输出光的分离,模分解复用器示意图如图6所示,通过合理设计模分解复用器的几何参数,使得两波导中传输的基模与高阶模的折射率相近,通过波导拉锥,逐步增大多模波导中反射的高阶模式的损耗系数,能够迫使高阶模式的大部分能量转移至另一波导中激发的基模。仿真结果显示,模分解复用器的能量透过率在95%以上,不同端口间串扰<-10dB。Since the input mode and the reflection (output) mode are of different orders, a mode demultiplexer can be used to separate the input and output light. The schematic diagram of the mode demultiplexer is shown in Figure 6. By rationally designing the geometric parameters of the mode demultiplexer , so that the refractive index of the fundamental mode and the higher-order mode transmitted in the two waveguides is similar. Through the waveguide tapering, the loss coefficient of the higher-order mode reflected in the multi-mode waveguide is gradually increased, which can force most of the energy of the higher-order mode to be transferred to the other waveguide. The fundamental mode excited in . The simulation results show that the energy transmittance of the mode demultiplexer is above 95%, and the crosstalk between different ports is <-10dB.

以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。The above embodiments are only used to illustrate the technical solutions of the present invention, but not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions of the foregoing embodiments. The recorded technical solutions may be modified, or some of the technical features thereof may be equivalently replaced; however, these modifications or substitutions shall not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of each embodiment of the present invention.

Claims (9)

1. The multimode waveguide chirped Bragg grating delay line chip with even-order highest order is characterized by comprising a multimode waveguide and Bragg gratings positioned on two sides of the multimode waveguide; the two groups of Bragg gratings on two sides of the multimode waveguide are in an asymmetric structure at an initial position, the relative displacement is delta L=Λ/2, wherein Λ is a grating period, then the relative displacement gradually decreases, and then the two groups of Bragg gratings are completely symmetric at a position between 20% and 90% of the multimode waveguide, and the relative displacement delta L=0; and then the two groups of Bragg gratings continue to be symmetrical, and the duty ratio of the gratings increases from the initial position to the terminal.
2. The multimode waveguide chirped bragg grating delay line chip of even-order highest order according to claim 1, wherein the grating employs antisymmetric→symmetric graded lateral dislocation apodization.
3. The multimode waveguide chirped bragg grating delay line chip of even-order highest order of claim 2 wherein the grating apodization curve is a gaussian function.
4. A multimode waveguide chirped bragg grating delay line chip having an even-order highest order according to any one of claims 1 to 3, wherein the grating duty cycle is linearly graded.
5. A multimode waveguide chirped bragg grating delay line chip with an even-order highest order according to any one of claims 1 to 3, wherein the parameter selection of the grating period Λ is according to the following formula:
λ=[n 1 d(z)+n 2 (1-d(z))]Λ=[(n 1 -n 2 )d(z)+n 2 ]Λ (1)
wherein λ is the wavelength of reflected light, n 1 、n 2 The effective refractive indexes of the grating comb tooth region and the non-grating comb tooth region are respectively represented, the effective refractive index is the average value of the sum of the effective refractive indexes of the TE0 mode and the highest order mode, z is the transmission position of light in a grating delay line, and d (z) represents the grating duty ratio.
6. The even-order highest order multimode waveguide chirped bragg grating delay line chip of claim 5 wherein the wavelength of light reflected at the multimode waveguide z-position
λ(z)=[n 1 d(z)+n 2 (1-d(z))]Λ=[(n 1 -n 2 )d(z)+n 2 ]Λ (2)
Where z is the position where light is transmitted in the grating delay line and λ (z) is the wavelength of light reflected at the z position.
7. The multimode waveguide chirped bragg grating delay line chip of even-order highest order of claim 6 wherein the grating duty cycle is 0% to 100%.
8. A multimode waveguide chirped bragg grating delay line chip having an even-order highest order according to any one of claims 1 to 3, further comprising a mode de-multiplexer; the mode demultiplexer includes an incident waveguide and an output waveguide; the incident waveguide communicates with an initial end of the multimode waveguide.
9. The multimode waveguide chirped bragg grating delay line chip with even-order highest order as claimed in claim 6, wherein the chirped dispersion interval is controlled by two ways: changing the duty cycle transition interval and/or changing the external protrusion grating tooth length.
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