CN1141664C - Fingerprint image sensor based on waveguide holography technology and method for collecting fingerprint images - Google Patents
Fingerprint image sensor based on waveguide holography technology and method for collecting fingerprint images Download PDFInfo
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Abstract
本发明属于光电图像传感器领域,包括:半导体激光器线阵通过微透镜线阵发出的准直相干光照明,光波导利用全反射机理构成封闭光路系统;使用波导全息光栅元件将入射光束耦合出波导基底,利用全反射机理获取指纹图像,并对出射光束进行波前重构;使用光纤簇作光传输与成像元件,利用CMOS成像芯片采集指纹图像,并以数字视频格式传输给计算机。其核心光学元件波导全息光栅使用Ar+激光用干涉条纹曝光方法制备。
The invention belongs to the field of photoelectric image sensors, comprising: a semiconductor laser linear array is illuminated by collimated coherent light emitted by a microlens linear array; an optical waveguide utilizes a total reflection mechanism to form a closed optical path system; a waveguide holographic grating element is used to couple an incident beam out of a waveguide substrate , use the total reflection mechanism to obtain the fingerprint image, and reconstruct the wavefront of the outgoing beam; use the fiber cluster as the optical transmission and imaging element, use the CMOS imaging chip to collect the fingerprint image, and transmit it to the computer in digital video format. Its core optical component, waveguide holographic grating, is fabricated using Ar + laser with interference fringe exposure method.
Description
技术领域 本发明属于光电图像传感器领域,特别涉及用于探测人体指纹表面形貌的波导全息微光学元件的制备及应用。Technical Field The present invention belongs to the field of photoelectric image sensors, in particular to the preparation and application of waveguide holographic micro-optical elements for detecting the surface topography of human fingerprints.
背景技术 指纹识别技术是一项广泛应用的高可靠性身份识别技术。使用指纹图像传感器获取高分辨率、高对比度、低畸变的指纹图像是实现准确的指纹识别的前提。目前广泛应用的指纹采集设备多为全反射棱镜式光电指纹图像传感器,一般体积、重量、功耗较大,制造成本高。因此发展一种新型的高性能、低成本的集成化微型光电指纹图像传感器日益受到国内外专家的重视。Background Art Fingerprint identification technology is a widely used high-reliability identification technology. Using a fingerprint image sensor to obtain a high-resolution, high-contrast, and low-distortion fingerprint image is a prerequisite for accurate fingerprint recognition. At present, most of the widely used fingerprint collection devices are photoelectric fingerprint image sensors of the total reflection prism type, which generally have large volume, weight, power consumption and high manufacturing cost. Therefore, the development of a new type of high-performance, low-cost integrated micro-photoelectric fingerprint image sensor has been paid more and more attention by experts at home and abroad.
目前,指纹图像传感器主要有光电式、电容阵列式、热敏阵列式等几种。其中发展最完善、应用最广泛的全反射棱镜式光电指纹图像传感器工作原理如图1、图2所示,描述如下:At present, fingerprint image sensors mainly include photoelectric, capacitive array, and thermal array. Among them, the working principle of the most well-developed and most widely used photoelectric fingerprint image sensor of total reflection prism is shown in Figure 1 and Figure 2, and is described as follows:
由照明用扩展光源1发出的经准直后的平行入射光束2从全反射棱镜3的直角边入射棱镜内。被采手指4按于棱镜斜边。其中指纹沟部位5不与棱镜表面接触,入射光束2在此发生全反射;指纹脊6部位接触棱镜表面,破坏全反射条件,入射光束2将被散射。由此,入射光束2就被指纹图样调制形成携有指纹图像的出射光束7,进入图像获取系统8,经过进一步处理后可得到指纹的图像。The collimated parallel
在上述的方法中,由于各光学元件分立,并采用开放式空间光路,结构复杂体积较大,并易受背景光噪声干扰。In the above-mentioned method, since each optical element is separated and an open space optical path is adopted, the structure is complex and the volume is large, and it is easily disturbed by background light noise.
发明内容 本发明目的在于克服已有技术的不足之处,提出一种基于波导全息技术的指纹图像传感器,使用波导全息光学元件,采取微型集成化封闭式光路设计,使其具有体积小,不易受背景光噪声干扰,制备成本低,适于大批量生产的特点。SUMMARY OF THE INVENTION The purpose of the present invention is to overcome the deficiencies of the prior art, and propose a fingerprint image sensor based on waveguide holographic technology, which uses waveguide holographic optical elements and adopts a micro-integrated closed optical path design, so that it has a small size and is not easily affected. The background light noise interferes, the preparation cost is low, and the characteristics are suitable for mass production.
本发明提出一种基于波导全息技术的指纹图像传感器,其特征在于,包括The present invention proposes a fingerprint image sensor based on waveguide holography technology, which is characterized in that it includes
一边倾斜形成重构光入射角的光学波导板和紧贴在其上表面的波导全息片,该光学波导倾斜的一端安装有半导体激光器线阵和微透镜阵列,该半导体激光器的工作波长与所说的光学波导板的重构光入射角相匹配,该波导板的下表面与光纤簇的大端紧密贴,该光纤簇的小端与CMOS成像芯片紧密贴,该CMOS成像芯片安装在信号调理及接口电路板上。One side is inclined to form an optical waveguide plate that reconstructs the incident angle of light and a waveguide hologram attached to its upper surface. The inclined end of the optical waveguide is equipped with a semiconductor laser line array and a microlens array. The operating wavelength of the semiconductor laser is the same as the said The reconstructed light incident angle of the optical waveguide plate is matched, the lower surface of the waveguide plate is closely attached to the large end of the fiber cluster, and the small end of the optical fiber cluster is closely attached to the CMOS imaging chip. The CMOS imaging chip is installed in the signal conditioning and interface board.
本发明所说的波导全息片由厚1.8~2.5mm的光学玻璃底板和位于其一侧表面的制作在厚5~15μm的卤化银感光乳剂层上的全息光栅两部分组成。The waveguide holographic sheet of the present invention consists of two parts: an optical glass base plate with a thickness of 1.8-2.5 mm and a holographic grating on one side of the plate made on a silver halide photosensitive emulsion layer with a thickness of 5-15 μm.
根据全息衍射光栅理论和波导全息理论,选取波导全息片上的感光乳剂层的折射率稍小于光学波导板,因此制作出的全息光栅形成体全息结构。According to the holographic diffraction grating theory and the waveguide holographic theory, the refractive index of the photosensitive emulsion layer on the waveguide hologram is slightly smaller than that of the optical waveguide plate, so the holographic grating formed forms a volume holographic structure.
所说的半导体激光器线阵的工作波长为650nm红光,光学波导板的重构光入射角为70°。The working wavelength of the semiconductor laser line array is 650nm red light, and the reconstructed light incident angle of the optical waveguide plate is 70°.
本发明还提出一种指纹图像传感器采集指纹图像的方法,其特征在于,由一边经倾斜形成重构光入射角的光学波导板和紧贴在其上表面的波导全息片,半导体激光器线阵,CMOS成像芯片及信号调理及接口电路板所组成的指纹图像传感器,采集指纹图像具体包括以下步骤:The present invention also proposes a method for collecting fingerprint images by a fingerprint image sensor, which is characterized in that an optical waveguide plate formed by tilting one side to form a reconstructed light incident angle, a waveguide hologram closely attached to its upper surface, and a semiconductor laser line array, The fingerprint image sensor composed of CMOS imaging chip, signal conditioning and interface circuit board, the collection of fingerprint images specifically includes the following steps:
1)指纹图像传感器与上位计算机联机,待采集指纹的手指平压于波导全息片上方;1) The fingerprint image sensor is connected to the upper computer, and the finger to be collected is pressed flat on the waveguide hologram;
2)指纹图像传感器点亮照明光源,发出入射光束通过基底光学平板玻璃进入波导全息片,按照全反射采集指纹图像的原理,出射光束携有指纹图像,并在通过波导全息光栅时,发生衍射并导致波前重构;2) The fingerprint image sensor lights up the lighting source, and emits an incident light beam that passes through the base optical flat glass and enters the waveguide hologram. According to the principle of total reflection to collect fingerprint images, the outgoing light beam carries the fingerprint image, and when passing through the waveguide holographic grating, diffraction occurs and leading to wavefront reconstruction;
3)波前重构后的出射光束通过光纤簇会聚成像于CMOS成像芯片上;3) The outgoing beam after the wavefront reconstruction is converged and imaged on the CMOS imaging chip through the fiber cluster;
4)计算机控制CMOS成像芯片以快照方式获取指纹图像;4) The computer controls the CMOS imaging chip to obtain the fingerprint image in a snapshot mode;
5)指纹图像传感器通过传输电缆将数字格式的指纹传输给计算机。5) The fingerprint image sensor transmits the fingerprint in digital format to the computer through the transmission cable.
本发明获得指纹图像的原理是:半导体激光器光源发出中心波长位于红光范围内的入射光束经斜劈的基底光学平板玻璃一端以与入射光中心波长相匹配的入射角入射。入射光束通过基底光学平板玻璃进入波导全息片,并在其上表面发生全反射。出射光束将被指纹作幅度调制,携有指纹图像。出射光束在通过波导全息片下表面的全息光栅层时,将发生衍射并导致波前重构,从而改变传播方向,向正下方进入光纤簇,并会聚成像于CMOS成像芯片的光敏单元阵列上,光强信号经调理与接口电路调理后以数字视频格式送往计算机或其它中央控制器。The principle of the present invention to obtain the fingerprint image is: the semiconductor laser light source emits an incident light beam with a central wavelength within the red light range, and enters the obliquely split base optical plate glass at an incident angle matching the central wavelength of the incident light. The incident light beam enters the waveguide hologram through the base optical flat glass, and is totally reflected on its upper surface. The outgoing beam will be amplitude modulated by the fingerprint, carrying the fingerprint image. When the outgoing beam passes through the holographic grating layer on the lower surface of the waveguide hologram, it will diffract and cause the wavefront to be reconstructed, thereby changing the propagation direction, entering the fiber cluster directly below, and converging on the photosensitive unit array of the CMOS imaging chip. The light intensity signal is sent to the computer or other central controllers in digital video format after conditioning and interface circuit conditioning.
本发明的特点包括:Features of the present invention include:
1、使用光学波导,利用全反射机理形成封闭光路;1. Using optical waveguide, using the total reflection mechanism to form a closed optical path;
2、使用半导体激光器线阵和微透镜线阵形成准直相干光束照明;2. Use semiconductor laser line array and microlens line array to form collimated coherent beam illumination;
3、使用波导全息光栅元件将入射光束耦合出波导,形成全反射获取指纹图像,并对出射光束波前重构;3. Use the waveguide holographic grating element to couple the incident beam out of the waveguide, form total reflection to obtain the fingerprint image, and reconstruct the wavefront of the outgoing beam;
本发明的优点在于:The advantages of the present invention are:
1、采用封闭式光路设计,可有效屏蔽环境杂光引入的噪声;1. The closed optical path design can effectively shield the noise introduced by ambient stray light;
2、有效集成使用集成光学和光纤光学元件,系统紧凑体积小;2. Effectively integrate the use of integrated optics and fiber optic components, the system is compact and small;
3、核心波导全息元件制备成本低,适于大批量生产。3. The core waveguide holographic element has low manufacturing cost and is suitable for mass production.
附图说明Description of drawings
图1是目前全反射棱镜式光电指纹图像传感器工作原理。Figure 1 is the working principle of the current total reflection prism photoelectric fingerprint image sensor.
图2是使用全反射方法提取指纹图像的原理。Figure 2 is the principle of using the total reflection method to extract fingerprint images.
图3是本发明的波导全息集成化指纹图象传感器系统装置图。Fig. 3 is a device diagram of the waveguide holographic integrated fingerprint image sensor system of the present invention.
图4是本发明的波导全息元件的工作原理。Fig. 4 is the working principle of the waveguide holographic element of the present invention.
图5是波导全息元件的制备装置图。Fig. 5 is a diagram of a manufacturing device for a waveguide holographic element.
具体实施方式 本发明的一种基于波导全息技术的指纹图像传感器的实施例结合附图详细说明如下:DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of a fingerprint image sensor based on waveguide holography technology of the present invention is described in detail as follows in conjunction with the accompanying drawings:
本发明提出的指纹图像传感器结构实施例如图3、图4所示:The fingerprint image sensor structure embodiment that the present invention proposes is shown in Figure 3, Figure 4:
该指纹图像传感器的核心光学元件是一边经70°斜劈的光学波导11和紧贴在其上表面的波导全息片12。波导全息片12与光学波导11之间用折射率匹配由13保证二者的紧密贴合。光学波导被斜劈的一端安装有半导体激光器线阵(中心波长650nm)9,运用微透镜线阵对激光束准直形成照明光束。波导板的下表面与光纤簇16的大端紧密贴和安装,光纤簇的小端与CMOS成像芯片17紧密贴和安装。CMOS成像芯片安装在信号调理及接口电路板上18。本发明的核心光学元件是波导全息片12,由厚2mm的光学玻璃底板和位于其下表面的厚6μm的全息光栅层两部分组成。根据全息衍射光栅理论和波导全息理论,该元件上全息光栅形成体全息结构,即选取感光乳剂的折射率稍小于波导片。在工作波长为650nm红光,重构光入射角为70°,物光入射角0°的情况下,全息光栅15的条纹间距为: The core optical elements of the fingerprint image sensor are an
对应全息光栅15的空间频率为
为得到高对比度和高分辨率的指纹图像,应使入射光束10通过全息光栅15的透射率和出射光束14通过全息光栅15的衍射率相近,故对应的全息光栅15的衍射效率应为0.4~0.6。In order to obtain a high-contrast and high-resolution fingerprint image, the transmittance of the
本发明中核心光学元件波导全息片12的制备方法实施例如图5所示。本方法使用一面涂有均匀感光乳剂涂层的商用全息干板19(乳剂层厚度6μm)对波导全息干涉图样进行曝光制作。使用波长为λ’=514nm的Ar+激光器20作光源。为满足(1)中的参数d,则制作波导全息片时,物光和参考光的夹角应为:Ar+激光器20的光束首先通过一个由显微物镜21和针孔22组成的针孔滤波器滤去高频噪声,然后通过球面凸透镜23形成准直光束24,由分束器25分成物光26和参考光27两束,经平面镜调整至夹角为53.9°,并使用柱面镜29调整使物光和参考光光斑覆盖面积大致重合。全息干板19充分曝光后,经显影、定影、烘干后可得到符合参数要求的振幅式波导全息片。An embodiment of the method for preparing the core optical
为得到高对比度和高分辨率的指纹图像,在后期制作中需要对全息光栅进行漂白处理形成相全息光栅,以提高全息光栅的衍射效率。In order to obtain high-contrast and high-resolution fingerprint images, it is necessary to bleach the holographic grating to form a phase holographic grating in post-production, so as to improve the diffraction efficiency of the holographic grating.
用本发明的方法提取人体指纹可用中心波长650nm红光发光二极管线阵作光源,光纤簇可使用Edmund Scientific Co.公司产品Part No.52362,CMOS成像芯片及其附属信号调理电路使用OmniVision公司OV7710黑白CMOS图像传感芯片及其信号接口处理板,以USB(通用串行总线)与计算机联机。被测手指平按于波导全息片上表面,由计算机给出提取指纹指令,CMOS图像传感芯片可通过信号接口处理板及USB总线以每秒15帧采样速率向计算机传输获取的指纹图象,当计算机给出停止采集指令时可停止采集。本发明在使用两端面积比为3∶1的光纤簇作成像系统,使用光敏单元数大于640×480,数字量化深度大于8bit的面阵CMOS成像芯片时,可以得到分辨率大于600dpi,对比度优于250∶1,畸变率小于1%的指纹图像。Using the method of the present invention to extract human fingerprints can use the red light-emitting diode line array with a central wavelength of 650nm as the light source, the fiber cluster can use Edmund Scientific Co.’s product Part No.52362, and the CMOS imaging chip and its subsidiary signal conditioning circuit can use OmniVision’s OV7710 black and white The CMOS image sensing chip and its signal interface processing board are connected to the computer via USB (Universal Serial Bus). The finger to be tested is pressed flat on the upper surface of the waveguide hologram, and the computer gives instructions to extract fingerprints. The CMOS image sensor chip can transmit the acquired fingerprint images to the computer at a sampling rate of 15 frames per second through the signal interface processing board and USB bus. The collection can be stopped when the computer gives an instruction to stop the collection. When the present invention uses an optical fiber cluster with an area ratio of both ends of 3:1 as an imaging system, and uses an area array CMOS imaging chip with a photosensitive unit number greater than 640×480 and a digital quantization depth greater than 8 bits, the resolution can be greater than 600dpi, and the contrast ratio is excellent. At 250:1, the distortion rate is less than 1% of the fingerprint image.
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| CN111061089B (en) * | 2019-12-13 | 2021-04-27 | 武汉华星光电技术有限公司 | Display device |
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2001
- 2001-05-18 CN CNB011181362A patent/CN1141664C/en not_active Expired - Fee Related
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