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CN114019903A - Numerical control machine tool spindle precision self-healing method - Google Patents

Numerical control machine tool spindle precision self-healing method Download PDF

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CN114019903A
CN114019903A CN202111291001.2A CN202111291001A CN114019903A CN 114019903 A CN114019903 A CN 114019903A CN 202111291001 A CN202111291001 A CN 202111291001A CN 114019903 A CN114019903 A CN 114019903A
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thermal
error
temperature
machine tool
spindle
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CN114019903B (en
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刘阔
王率峰
班仔优
韩伟
姜少玮
韩灵生
王永青
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Dalian University of Technology
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
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    • G05B2219/35015—Calculate production compensation, heat shrinkage, overetching

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Abstract

The invention discloses a precision self-healing method for a spindle of a numerical control machine tool, and belongs to the field of thermal deformation of the spindle of the numerical control machine tool. The main shaft self-healing system and the method integrate two methods of thermal error compensation and thermal error active regulation and control to restrain thermal errors. And respectively establishing a thermal elongation error, a thermal drift error and a thermal inclination error model and an active thermal regulation and control system model by using the two temperature measuring points, designing an active thermal regulation and control system and a thermal error compensation system, and establishing a precision self-healing strategy and algorithm of the numerical control machine. In actual processing, a thermal compensation method is adopted to restrain axial thermal elongation errors and radial thermal drift errors of the spindle, an active regulation and control system is adopted to carry out thermal regulation and control on two surfaces of the spindle box to restrain thermal inclination errors of the spindle box, and comprehensive compensation of various errors is achieved. The precision self-healing system and the method have the advantages of high accuracy, good robustness and quick response, solve the problem of comprehensive compensation of thermal errors of the numerical control machine tool and improve the machining precision of the machine tool.

Description

Numerical control machine tool spindle precision self-healing method
Technical Field
The invention belongs to the technical field of thermal deformation of numerical control machine tool spindles, and particularly relates to a precision self-healing method for a numerical control machine tool spindle.
Background
With the continuous improvement of the requirements of the manufacturing industry on the machining precision of parts, people have increasingly strict requirements on the machining precision and numerical control machining errors of numerical control machines. The numerical control machine tool gradually develops towards the aspects of high speed and high precision, but the relative motion relationship between a workpiece and a cutter is damaged due to the coupling influence of an internal heat source and an external heat source during the operation of the precise numerical control machine tool, so that the processing precision of the machine tool is reduced. According to statistics, for a high-speed and high-precision machine tool, the proportion of machining and manufacturing errors caused by thermal deformation reaches 40% -70%, so that the study on the thermal deformation behavior of the numerical control machine tool and the control on the thermal errors of the numerical control machine tool are very important for ensuring the machining precision of the machine tool and improving the service performance.
The current methods for controlling thermal errors mainly comprise two methods: thermal error control methods and thermal error compensation methods. The thermal error control method is to eliminate or reduce the thermal error of the machine tool by means of design, manufacture and the like, such as adopting a screw-nut or lathe bed cooling mode, a machine tool thermal symmetric structure design and the like. The compensation method has good effect on the compensation method of the axial thermal extension error thermal error, but the compensation method has limited effect on the compensation of the radial thermal drift error, and can not fundamentally solve the problem that the thermal inclination error generated by the thermal inclination of the main spindle box of the machine tool has great influence on the machining precision of the machine tool. Therefore, it is very critical to provide a spindle precision self-healing system and method that can solve the overall thermal error of the spindle.
In patent CN201310115537.8, high defense in 2006 discloses an active control system and method for a precision machine tool temperature field, which controls a layered independent multi-point temperature control system to realize layered independent temperature control of each part of the machine tool. In 2019, the patent CN201910939356.4 of high defense and the like discloses a measuring device and a measuring method for simulating the structural thermal deformation of a machine tool, aiming at the thermal deformation measurement of large structural members such as a machine tool body, a stand column and the like, the device can meet the detection requirements of simplicity and high precision, and is suitable for the structural thermal deformation detection of medium and high-grade numerical control machine tools. However, none of the above patent inventions relates to a precision self-healing system and method for a spindle of a numerical control machine tool.
Disclosure of Invention
The invention provides a precision self-healing system and method capable of solving comprehensive thermal errors of a numerical control machine tool by combining thermal error control and a thermal error compensation method, aiming at the main technical problem that the traditional thermal error compensation method cannot completely solve the thermal inclination errors of the numerical control main shaft machine tool.
The technical scheme of the invention is as follows:
a numerical control machine tool spindle precision self-healing method utilizes the synergistic effect of an active heat control system and a thermal error compensation system to realize the comprehensive compensation of the thermal elongation error, the thermal drift error and the thermal tilt error of the numerical control machine tool based on a spindle precision self-healing strategy, thereby improving the machine tool precision;
the method comprises the following specific steps:
step 1, developing a thermal state characteristic test of a machine tool; arranging temperature sensors at the position of the numerical control machine tool close to the heat source and near the machine tool for measuring the temperature of the key point of the machine tool; the method adopts a five-point method to measure the anisotropic thermal error of the tail end of the main shaft by using five eddy current displacement sensors 12-2, 5 displacement sensors are arranged on three mutually perpendicular axes parallel to the stroke motion of a machine tool and are respectively arranged in the X1, X2, Y1, Y2 and Z directions of the tail end of the main shaft, wherein the displacement sensor 112-2-a measures the thermal deformation value e in the Y1 direction1The measured thermal deformation value e of the displacement sensor 212-2-b in the Y2 direction2The measured thermal deformation value e of the displacement sensor 312-2-c in the X1 direction3Measurement of thermal deformation value e of displacement sensor 412-2-d in X2 direction4The thermal deformation value e of the displacement sensor 512-2-e in the Z direction5(ii) a Selecting the main shaft rotating speed of the machine tool under the common working condition, and acquiring the temperature { T } of the machine tool by using a temperature acquisition system and displacement acquisition softwarei(t) and thermal error data e1,e2,e5In which the thermal elongation error is e5Thermal drift error of e1And e2Thermal tilt error eθThen it is calculated according to the following formula:
Figure RE-GDA0003409516540000031
in the formula, eθCalculating a thermal tilt error value; e.g. of the type1,e2The measured values of displacement sensor 112-2-a and displacement sensor 212-2-b, respectively, and L is the distance between the displacement sensors in the same direction;
step 2, selecting a machine tool thermal regulation point; according to the thermal error test result and the temperature sensor data { T }i(t) } and thermal tilt error eθSelecting thermal elongation error e by using a cluster analysis method and a correlation analysis method5The temperature measuring point with large correlation is used as a thermal elongation modeling point, and a thermal inclination error e is selectedθThermal drift error e2The temperature measuring points with large correlation are used as thermal inclination and thermal drift modeling points, and the thermal inclination points are used as thermal regulation and control points;
step 3, establishing a spindle thermal elongation error model and a thermal inclination error model; based on the thermal state characteristic test result, identifying the parameters in the theoretical model by adopting a parameter identification method, and establishing a temperature and main shaft thermal elongation error e5The mathematical relationship between the two is shown in the formula (1.2); establishing temperature and spindle thermal drift error e1And e2The mathematical relationship between the two is shown in the formula (1.3) and (1.4);
e5(i)＝k*(e5(i-1)+γ*(α*T1(i)+β*T2(i)-e5(i-1))) (0.2)
e2(i)＝k1T3(i)+k2T4(i)+β1 (0.3)
e1(i)＝k3T3(i)+k4T4(i)+β2 (0.4)
in the formula, e5(i) -spindle tip thermal elongation error at time i; e.g. of the type5(i-1) -i-1 moment of spindle end thermal elongation error; t is1(i) -the measured value of the temperature sensor 1(5-1) at time i; t is2(i) Time-i temperature sensingThe measured value of the device 25-2; e.g. of the type2(i) -spindle tip thermal drift error at time i; t is3(i) -the measured value of the temperature sensor 35-3 at time i; t is4(i) -the measured value of the temperature sensor 45-4 at time i; wherein k, gamma, alpha, beta, k1、k2、 k3、k4、β1、β2All are identified parameters;
step 4, designing an active thermal regulation and control system; optimizing the thickness b of the radiating fin by using a thermal error test result and based on a semiconductor thermoelectric refrigeration principle and taking the lowest temperature of a thermal regulation point as a target2And the interval b between the radiating fins1The contact area s of the refrigeration area is used for developing an active heat regulation and control system based on the thermoelectric refrigeration principle, and the active heat regulation and control system comprises a thermoelectric refrigeration chip and a programmable direct-current power supply; based on the characteristics of the semiconductor cooling fins, a thermoelectric refrigeration test is carried out, a programmable direct current power supply 10 is used for outputting a group of pseudo-random binary sequences, and the current input I (T) and the temperature T of a thermal control point of an active thermal control system are established3(t) relationship:
T3(t)＝G(I(t)) (0.5)
step 5, designing a thermal error compensation system; the thermal error compensation system includes: the device comprises a temperature sensor 15-1, a temperature sensor 25-2, a temperature acquisition system 7 and a thermal error compensation module 8, wherein the temperature acquisition system acquires a signal of the temperature sensor and transmits the signal to the thermal error compensation module 8 to compensate a spindle thermal elongation error and a thermal drift error;
step 6, designing a precision self-healing strategy and developing an algorithm of the numerical control machine; for thermal tilt error eθ(i) Under actual working conditions, the temperature acquisition system 7 acquires the temperature T of the temperature sensor 35-33(i) Temperature T of temperature sensor 45-44(i) Calculating the thermal elongation error e of the spindle of the current machine tool according to the formula (1.4)1(i) (ii) a With eθ(i) 0 is taken as a control target, and the target temperature of the thermal regulation point is calculated as T3(t) substituting the formula (1.5) to obtain the current input I (t) of the programmable DC power supply 10; in addition, a thermal elongation error model formula (1.2) and a thermal drift error model formula (1.3) are established, and under the actual working condition, the temperature is collectedSystem 7 obtains temperature T of temperature sensor 15-11(i) Temperature T of temperature sensor 25-22(i) Calculating the thermal elongation error e of the spindle of the current machine tool according to the formula (1.2)5(i) (ii) a The temperature acquisition system 7 acquires the temperature T of the temperature sensor 35-33(i) Temperature T of temperature sensor 45-44(i) Calculating the radial thermal drift error e of the current machine tool spindle according to the formula (1.3)2(i) (ii) a The thermal error compensation module 8 is used for communicating with the numerical control system 9, the tail end of the spindle is moved through an original point offset instruction, and a spindle thermal elongation error and a spindle thermal drift error are compensated;
step 7, testing and verifying; and (3) processing by adopting a standard sample piece, checking various processing precision sizes of the sample piece under the self-healing method and the self-healing system, and verifying the effectiveness of the main shaft precision self-healing system and the main shaft precision self-healing method.
The invention has the beneficial effects that: the built heat control system and the heat error compensation system are combined with a heat regulation and control method and a heat compensation method to restrain various heat errors such as axial errors, radial errors, heat inclination errors and the like of the numerical control machine tool, so that the precision self-healing of the numerical control machine tool spindle is realized, and the machining precision of the machine tool is improved. The method has the advantages of high accuracy, good robustness, quick response and strong adaptability, solves the problem of comprehensive inhibition of the spindle thermal error of the numerical control machine tool, and improves the machine tool precision.
Drawings
FIG. 1 is a schematic diagram of a spindle precision self-healing system of a numerical control machine tool;
FIG. 2 is a schematic diagram of a spindle precision self-healing process of a numerical control machine tool;
FIG. 3 illustrates a control strategy for the active method of the spindle precision self-healing method;
FIG. 4 is a schematic diagram of an active thermal control device-thermoelectric cooling device configuration;
FIG. 5 is a schematic view of a spindle precision self-healing measuring device of a numerical control machine tool;
in the figure: 1, a machine tool base; 2, machine tool upright post; 3, a main spindle box; 4, a main shaft; 5 a temperature sensor; 5-1 temperature sensor 1; 5-2, a temperature sensor 2; 5-3 temperature sensor 3; 5-4 temperature sensor 4; 6, a cutter system; 7, a temperature acquisition system; 8, a thermal error compensation module; 9, a numerical control system; 10 program control power supply; 11 a thermoelectric refrigeration system; 11-1 a radiator fan; 11-2 heat dissipation fins; 11-3 semiconductor refrigerating sheets; 12-1, checking the rod; 12-2 displacement sensors; l the height of the radiating fin; b1 fin width; b2 fin spacing; s the surface area of the semiconductor refrigerating sheet; 12-2-a displacement sensor 1; 12-2-b displacement sensor 2; 12-2-c displacement sensor 3; 12-2-d displacement sensor 4; 12-2-e displacement sensor 5; 12-3, a displacement sensor tool; l longitudinal spacing of the sensors.
Detailed Description
The following detailed description of the embodiments of the invention refers to the accompanying drawings and claims.
As shown in fig. 2, the specific embodiment of the present patent is as follows:
the following detailed description of the embodiments of the invention refers to the accompanying drawings and claims.
As shown in fig. 2, the specific embodiment of the present patent is as follows:
step 1, developing a thermal state characteristic test of a machine tool; the temperature sensor is arranged in the environment close to the heat source of the numerical control machine tool and around the machine tool to measure the temperature of key points of the machine tool, and the measuring device shown in figure 5 adopts a five-point method to measure the anisotropic thermal error of the tail end of the main shaft by using five eddy current displacement sensors 12-2, wherein the 5 displacement sensors are arranged in the X1, X2, Y1, Y2 and Z directions of the tail end of the main shaft along three mutually perpendicular axes parallel to the stroke motion of the machine tool, and the thermal deformation value e of the displacement sensor 112-2-a in the Y1 direction is measured1The measured thermal deformation value e of the displacement sensor 212-2-b in the Y2 direction2The measured thermal deformation value e of the displacement sensor 312-2-c in the X1 direction3Measurement of thermal deformation value e of displacement sensor 412-2-d in X2 direction4The thermal deformation value e of the displacement sensor 512-2-e in the Z direction5(ii) a Selecting the main shaft rotating speed of the machine tool under the common working condition, and acquiring the temperature { T } of the machine tool by using a temperature acquisition system and displacement acquisition softwarei(t) and thermal error data e1,e2,e5In which the thermal elongation error is e5Thermal drift error of e1And e2Thermal tilt error eθThe formula (1.1) is shown as follows:
Figure RE-GDA0003409516540000061
e in formula (1.1)θCalculating a thermal tilt error value; e.g. of the type1,e2The measured values of displacement sensor 112-2-a and displacement sensor 212-2-b, respectively, and L is the distance between the displacement sensors in the same direction;
step 2, selecting a machine tool thermal regulation point; according to the thermal error test result and the temperature sensor data { T }i(t) } and thermal tilt error eθSelecting thermal elongation error e by using a cluster analysis method and a correlation analysis method5The temperature measuring point with large correlation is used as a thermal elongation modeling point, and a thermal inclination error e is selectedθThermal drift e2The temperature measuring points with large correlation are used as thermal inclination and thermal drift modeling points, and the thermal inclination points are used as thermal regulation and control points;
step 3, establishing a spindle thermal elongation error model and a thermal inclination error model; based on the thermal state characteristic test result, identifying the parameters in the theoretical model by adopting a parameter identification method, and establishing a temperature and main shaft thermal elongation error e5The mathematical relationship between the two is shown in the formula (1.2); establishing a mathematical relation between the temperature and the sum of the thermal drift errors of the main shaft, wherein a thermal drift error model is shown as formulas (1.3) and (1.4);
e5(i)＝k*(e5(i-1)+γ*(α*T1(i)+β*T2(i)-e5(i-1))) (0.6)
e2(i)＝k1T3(i)+k2T4(i)+β1 (0.7)
e1(i)＝k3T3(i)+k4T4(i)+β2 (0.8)
in the formula e5(i) -spindle tip thermal elongation error at time i; e.g. of the type5(i-1) -i-1 moment of spindle end thermal elongation error; t is1(i) -the measured value of the temperature sensor 1(5-1) at time i; t is2(i) The measured value of the temperature sensor 25-2 at time i; e.g. of the type2(i) -spindle tip thermal drift error at time i; t is3(i) -the measured value of the temperature sensor 35-3 at time i; t is4(i) -the measured value of the temperature sensor 45-4 at time i; wherein k, gamma, alpha, beta, k1、k2、k3、 k4、β1、β2All are identified parameters;
step 4, designing an active thermal regulation and control system; optimizing the thickness b of the radiating fin by using a thermal error test result and based on a semiconductor thermoelectric refrigeration principle and taking the lowest temperature of a thermal regulation point as a target2And the interval b between the radiating fins1Developing an active heat regulation and control system based on a thermoelectric refrigeration principle, wherein the active heat regulation and control system comprises a thermoelectric refrigeration chip and a programmable direct-current power supply; based on the characteristics of the semiconductor cooling fins, a thermoelectric refrigeration test is carried out, a programmable direct-current power supply 10 is used for outputting a group of pseudo-random binary sequences which are not 1, namely 0, and the current input I (T) and the temperature T of a thermal control point of an active thermal control system are established3(t) relationship:
T3(t)＝G(I(t)) (0.9)
step 5, designing a thermal error compensation system; as shown in fig. 1, the thermal error compensation system includes: the device comprises a temperature sensor 15-1, a temperature sensor 25-2, a temperature acquisition system 7 and a thermal error compensation module 8, wherein the temperature acquisition system acquires a signal of the temperature sensor and transmits the signal to the thermal error compensation module to compensate a spindle thermal elongation error and a thermal drift error;
step 6, designing a precision self-healing strategy and developing an algorithm of the numerical control machine; as shown in fig. 3, the precision self-healing whole strategy of the numerical control machine is provided; for thermal tilt error eθ(i) Under actual working conditions, the temperature acquisition system 7 acquires the temperature T of the temperature sensor 35-33(i) Temperature T of temperature sensor 45-44(i) Calculating the thermal elongation error e of the spindle of the current machine tool according to the formula (1.4)1(i) (ii) a With eθ(i) 0 is taken as a control target, and the target temperature of the thermal regulation point is calculated as T3(t) substituting the formula (1.5) to obtain the current input I (t) of the programmable DC power supply 10; in addition, a thermal elongation error model is establishedThe temperature acquisition system 7 acquires the temperature T of the temperature sensor 15-1 under the actual working condition according to the formula (1.2) and the thermal drift error model formula (1.3)1(i) Temperature T of temperature sensor 25-22(i) Calculating the thermal elongation error e of the spindle of the current machine tool according to the formula (1.2)5(i) (ii) a The temperature acquisition system 7 acquires the temperature T of the temperature sensor 35-33(i) Temperature T of temperature sensor 45-44(i) Calculating the radial thermal drift error e of the current machine tool spindle according to the formula (1.3)2(i) (ii) a The thermal error compensation module 8 is used for communicating with the numerical control system 9, the tail end of the spindle is moved through an original point offset instruction, and a spindle thermal elongation error and a spindle thermal drift error are compensated;
step 7, testing and verifying; and (3) processing by adopting a standard sample piece, checking various processing precision sizes of the sample piece under the self-healing method and the self-healing system, and verifying the effectiveness of the main shaft precision self-healing system and the main shaft precision self-healing method.
It should be noted that the above-mentioned embodiments of the present invention are only used for illustrating the principle and flow of the present invention, and do not limit the present invention. Therefore, any modifications and equivalents made without departing from the spirit and scope of the present invention should be considered as included in the protection scope of the present invention.

Claims (1)

1.一种数控机床主轴精度自愈方法，其特征在于，利用一种主动热控制系统和热误差补偿系统协同作用基于主轴精度自愈策略实现数控机床热伸长误差、热漂移误差、热倾斜误差的综合补偿，提高机床精度；1. A self-healing method for the precision of a CNC machine tool spindle, it is characterized in that, utilizing a kind of active thermal control system and thermal error compensation system synergy based on the spindle precision self-healing strategy to realize the thermal elongation error, thermal drift error, thermal tilt of CNC machine tools Comprehensive compensation of errors to improve machine tool accuracy; 具体步骤如下：Specific steps are as follows: 步骤1，开展机床热态特性试验；在数控机床靠近热源的地方以及机床附近布置温度传感器用于测量机床关键点温度；采取“五点法”利用五个电涡流位移传感器(12-2)测量主轴末端的各向热误差，5个位移传感器是沿平行于机床行程运动的三个相互垂直的轴线上，分别布置于主轴末端X1、X2、Y1、Y2及Z方向，其中位移传感器1(12-2-a)的测量Y1方向的热变形值e1，位移传感器2(12-2-b)的测量Y2方向的热变形值e2，位移传感器3(12-2-c)的测量X1方向的热变形值e3，位移传感器4(12-2-d)的测量X2方向的热变形值e4，位移传感器5(12-2-e)的测量Z方向的热变形值e5；选取机床常用工作工况的主轴转速，利用温度采集系统和位移采集软件获取机床温度{Ti(t)}和热误差数据{e1,e2,e5}，其中，热伸长误差为e5，热漂移误差为e1和e2，热倾斜误差eθ则依据如下公式计算：Step 1, carry out the thermal characteristic test of the machine tool; arrange temperature sensors near the heat source of the CNC machine tool and near the machine tool to measure the temperature of the key points of the machine tool; adopt the "five-point method" to measure the temperature with five eddy current displacement sensors (12-2) Anisotropic thermal error at the end of the spindle, the five displacement sensors are along three mutually perpendicular axes parallel to the machine tool stroke, and are respectively arranged in the directions of X1, X2, Y1, Y2 and Z at the end of the spindle, among which the displacement sensor 1 (12 -2-a) measurement of thermal deformation value e 1 in Y1 direction, displacement sensor 2 (12-2-b) measurement of thermal deformation value e 2 in Y2 direction, measurement of displacement sensor 3 (12-2-c) X1 The thermal deformation value e 3 in the direction, the thermal deformation value e 4 in the X2 direction measured by the displacement sensor 4 (12-2-d), and the thermal deformation value e 5 in the Z direction measured by the displacement sensor 5 (12-2-e); Select the spindle speed of the common working conditions of the machine tool, and use the temperature acquisition system and displacement acquisition software to obtain the machine tool temperature {T i (t)} and thermal error data {e 1 , e 2 , e 5 }, where the thermal elongation error is e 5 , the thermal drift errors are e 1 and e 2 , and the thermal tilt error e θ is calculated according to the following formula:
Figure FDA0003334818870000011
Figure FDA0003334818870000011
 式中，eθ为热倾斜误差计算值；e1,e2分别为位移传感器1(12-2-a)和位移传感器2(12-2-b)的测量值，L为同一方向上位移传感器之间的距离；In the formula, e θ is the calculated value of thermal tilt error; e 1 , e 2 are the measured values of displacement sensor 1 (12-2-a) and displacement sensor 2 (12-2-b) respectively, and L is the displacement in the same direction distance between sensors; 步骤2，机床热调控点遴选；根据热误差测试结果、温度传感器数据{Ti(t)}和热倾斜误差eθ，利用聚类分析法和相关性分析法，选取热伸长误差e5相关性较大的温度测点作为热伸长建模点，选取热倾斜误差eθ、热漂移误差e2相关性较大的温度测点作为热倾斜、热漂移建模点，并将热倾斜点作为热调控点；Step 2, selection of thermal control points of the machine tool; according to the thermal error test results, temperature sensor data {T i (t)} and thermal tilt error e θ , using cluster analysis method and correlation analysis method, select thermal elongation error e 5 The temperature measuring points with greater correlation are used as thermal elongation modeling points, and the temperature measuring points with greater thermal tilt error e θ and thermal drift error e 2 are selected as thermal tilt and thermal drift modeling points, and the thermal tilt error e θ and thermal drift error e 2 are selected. point as the thermal control point; 步骤3，主轴热伸长误差模型及热倾斜误差模型建立；基于热态特性试验结果，采用参数辨识方法对理论模型中的参数进行辨识，建立温度与主轴热伸长误差e5之间的数学关系，热伸长误差模型如式(1.2)所示；建立温度与主轴热漂移误差e1和e2之间的数学关系，热漂移误差模型如式(1.3)和(1.4)所示；Step 3, the thermal elongation error model of the main shaft and the thermal tilt error model are established; based on the test results of the thermal state characteristics, the parameters in the theoretical model are identified by the parameter identification method, and the mathematical relationship between the temperature and the thermal elongation error e 5 of the main shaft is established. The thermal elongation error model is shown in formula (1.2); the mathematical relationship between temperature and the thermal drift error e 1 and e 2 of the spindle is established, and the thermal drift error model is shown in formula (1.3) and (1.4); e5(i)＝k*(e5(i-1)+γ*(α*T1(i)+β*T2(i)-e5(i-1))) (0.2)e 5 (i)=k*(e 5 (i-1)+γ*(α*T 1 (i)+β*T 2 (i)-e 5 (i-1))) (0.2) e2(i)＝k1T3(i)+k2T4(i)+β1 (0.3)e 2 (i)=k 1 T 3 (i)+k 2 T 4 (i)+β 1 (0.3) e1(i)＝k3T3(i)+k4T4(i)+β2 (0.4)e 1 (i)=k 3 T 3 (i)+k 4 T 4 (i)+β 2 (0.4) 式中，e5(i)—i时刻主轴末端热伸长误差；e5(i-1)—i-1时刻主轴末端热伸长误差；T1(i)—i时刻温度传感器1(5-1)的测量值；T2(i)—i时刻温度传感器2(5-2)的测量值；e2(i)—i时刻主轴末端热漂移误差；T3(i)—i时刻温度传感器3(5-3)的测量值；T4(i)—i时刻温度传感器4(5-4)的测量值；其中k、γ、α、β、k1、k2、k3、k4、β1、β2均为以辨识的参数；In the formula, e 5 (i)—the thermal elongation error of the spindle end at time i; e 5 (i-1)—the thermal elongation error of the spindle end at time i-1; T 1 (i)—the temperature sensor 1 (5 -1) measurement value; T 2 (i) - the measurement value of temperature sensor 2 (5-2) at time i; e 2 (i) - thermal drift error of the spindle end at time i; T 3 (i) - temperature at time i Measured value of sensor 3 (5-3); T 4 (i)—measured value of temperature sensor 4 (5-4) at time i; wherein k, γ, α, β, k 1 , k 2 , k 3 , k 4. β 1 , β 2 are all identified parameters; 步骤4，主动热调控系统的设计；利用热误差测试结果、基于半导体热电制冷原理，以热调控点温度最低为目标，优化散热片的厚度b2、散热片之间的间隔b1、制冷区域接触面积s，开发基于热电制冷原理的主动热调控系统，包含热热电制冷片和可编程的直流电源；并基于半导体散热片特性，开展热电制冷试验，利用可编程的直流电源(10)输出一组伪随机二进制序列，建立主动热调控系统的电流输入I(t)与热调控点温度T3(t)的关系：Step 4, the design of the active thermal regulation system; using the thermal error test results, based on the principle of semiconductor thermoelectric refrigeration, aiming at the lowest temperature of the thermal regulation point, the thickness b 2 of the heat sink, the interval b 1 between the heat sinks, and the cooling area are optimized. Contact area s, develop an active thermal control system based on the principle of thermoelectric cooling, including thermoelectric cooling fins and a programmable DC power supply; and based on the characteristics of semiconductor heat sinks, carry out thermoelectric cooling experiments, and use the programmable DC power supply (10) to output a A pseudo-random binary sequence is set up to establish the relationship between the current input I(t) of the active thermal regulation system and the thermal regulation point temperature T 3 (t): T3(t)＝G(I(t)) (0.5)T 3 (t)=G(I(t)) (0.5) 步骤5，热误差补偿系统设计；热误差补偿系统包括：温度传感器1(5-1)、温度传感器2(5-2)、温度采集系统(7)、热误差补偿模块(8)，其中温度采集系统获取温度传感器的信号，并且将该信号传递给热误差补偿模块(8)，进行主轴热伸长误差和热漂移误差的补偿；Step 5, thermal error compensation system design; thermal error compensation system includes: temperature sensor 1 (5-1), temperature sensor 2 (5-2), temperature acquisition system (7), thermal error compensation module (8), wherein the temperature The acquisition system acquires the signal of the temperature sensor, and transmits the signal to the thermal error compensation module (8) to compensate the thermal elongation error and thermal drift error of the main shaft; 步骤6，数控机床精度自愈策略设计及算法开发；针对热倾斜误差eθ(i)，在实际的工况下，温度采集系统(7)获取温度传感器3(5-3)的温度T3(i)、温度传感器4(5-4)的温度T4(i)，根据式(1.4)计算当前机床主轴热伸长误差e1(i)；以eθ(i)＝0为控制目标，计算热调控点的目标温度为T3(t)，代入式(1.5)中得到可编程的直流电源(10)的电流输入I(t)；此外，建立了热伸长误差模型式(1.2)和热漂移误差模型式(1.3)，在实际的工况下，温度采集系统(7)获取温度传感器1(5-1)的温度T1(i)、温度传感器2(5-2)的温度T2(i)，根据式(1.2)计算当前机床主轴热伸长误差e5(i)；温度采集系统(7)获取温度传感器3(5-3)的温度T3(i)、温度传感器4(5-4)的温度T4(i)，根据式(1.3)计算当前机床主轴径向热漂移误差e2(i)；利用热误差补偿模块(8)与数控系统(9)进行通讯，通过原点偏移指令将主轴末端进行移动，补偿主轴热伸长误差和主轴热漂移误差；Step 6, the precision self-healing strategy design and algorithm development of the CNC machine tool; for the thermal tilt error e θ (i), under the actual working conditions, the temperature acquisition system (7) acquires the temperature T 3 of the temperature sensor 3 (5-3) (i), the temperature T 4 (i) of the temperature sensor 4 (5-4), calculate the thermal elongation error e 1 (i) of the current machine tool spindle according to formula (1.4); take e θ (i)=0 as the control target , the target temperature of the thermal control point is calculated as T 3 (t), which is substituted into the formula (1.5) to obtain the current input I(t) of the programmable DC power supply (10); in addition, the thermal elongation error model formula (1.2) is established. ) and the thermal drift error model formula (1.3), under the actual working conditions, the temperature acquisition system (7) obtains the temperature T 1 (i) of the temperature sensor 1 (5-1), the temperature of the temperature sensor 2 (5-2) Temperature T 2 (i), calculate the thermal elongation error e 5 (i) of the current machine tool spindle according to formula (1.2); the temperature acquisition system (7) obtains the temperature T 3 (i) of the temperature sensor 3 (5-3), the temperature The temperature T 4 (i) of the sensor 4 (5-4), according to the formula (1.3), calculate the radial thermal drift error e 2 (i) of the current machine tool spindle; use the thermal error compensation module (8) and the numerical control system (9) to carry out Communication, the end of the spindle is moved through the origin offset command to compensate for the thermal extension error of the spindle and the thermal drift error of the spindle; 步骤7，试验验证；采用标准样件加工，检验样件在上述自愈方法与系统下其各种加工精度大小，验证主轴精度自愈系统及方法的有效性。Step 7, test verification; use standard sample processing to check the various processing precisions of the sample under the above-mentioned self-healing method and system, and verify the effectiveness of the spindle precision self-healing system and method.
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