CN103928840A - High purity water cooling device of semiconductor laser unit - Google Patents
High purity water cooling device of semiconductor laser unit Download PDFInfo
- Publication number
- CN103928840A CN103928840A CN201310014105.8A CN201310014105A CN103928840A CN 103928840 A CN103928840 A CN 103928840A CN 201310014105 A CN201310014105 A CN 201310014105A CN 103928840 A CN103928840 A CN 103928840A
- Authority
- CN
- China
- Prior art keywords
- water
- filter
- cooling
- electromagnetically operated
- operated valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 65
- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- 239000012498 ultrapure water Substances 0.000 title abstract 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 126
- 239000000498 cooling water Substances 0.000 claims abstract description 24
- 239000011347 resin Substances 0.000 claims abstract description 16
- 229920005989 resin Polymers 0.000 claims abstract description 16
- 239000002826 coolant Substances 0.000 claims description 10
- 239000003595 mist Substances 0.000 claims description 10
- 238000011084 recovery Methods 0.000 claims description 3
- 238000001914 filtration Methods 0.000 abstract description 7
- 238000004891 communication Methods 0.000 abstract description 2
- 238000000746 purification Methods 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000002242 deionisation method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- RECVMTHOQWMYFX-UHFFFAOYSA-N oxygen(1+) dihydride Chemical compound [OH2+] RECVMTHOQWMYFX-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Lasers (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
A high purity water cooling device of a semiconductor laser unit is characterized in that a conductivity meter is arranged on a water tank, the water tank is connected with the input end of a water pump, the output end of the water pump is both connected with a first electromagnetic valve and a water filter through a tee joint, a high precision PP folding filter element is arranged in the water filter, the first electromagnetic valve is connected with a resin filter and is connected with a water return tank through the resin filter, the output end of the water filter, used as a cooling water outlet of a water cooling system, is a reserved port connected with the laser unit, cooling water flowing through the laser unit uses an inlet of the water cooling system as a starting point of the cooling water return tank, the inlet of the water cooling system is both connected with a second electromagnetic valve and a flow temperature gauge through a tee joint, then the cooling water returns to the water tank through a third electromagnetic valve, and a one-way valve is connected with the second electromagnetic valve to be used as a blowback air water return port. The high purity water cooling device of the semiconductor laser unit has the function of high purity filtration, the function of rapid ion purification, the function of a blowback air water return loop, and the function of being in communication with an upper computer and controlling the upper computer, and is applied to semiconductor laser unit water cooling systems.
Description
Technical field
The present invention relates to a kind of semiconductor laser, particularly relate to a kind of high-purity semiconductor laser water cooling plant.This high-purity semiconductor laser water cooling plant have high-purity filter, fast ion cleaning, blowback air water return loop and with the function of upper machine communication and control, be applied in semiconductor laser water-cooling system.
Background technology
In semiconductor laser, water-cooling system is absolutely necessary and for semiconductor stack, carries out the device of cooling.But current semiconductor laser is all to adopt conventional water-cooling control device, and conventional water-cooling control device only possesses simple filtration and basic temperature control device.Semiconductor laser is a kind of to the exigent equipment of cooling water, and the quality of its cooling water will directly affect its useful life.At present, on market, not yet there is the Special water cooling system of developing for semiconductor laser specially.And the water-cooling system of selling on market all can not meet semiconductor laser for the needs of water-cooling system, the following problem of ubiquity.
The first, filtering accuracy is lower, cannot meet water route, the microchannel design that semiconductor laser adopts, and meeting is because of the excessive microchannel of stopping up of particle in water, thus the life-span that causes semiconductor laser.
Second, conventional water-cooling system lacks the control to cooling water conductivity, semiconductor laser has strict requirement to cooling electrical conductivity of water, can not be too low also can not be too high, even cannot accomplish the control to conductivity therefore conventional water-cooling system has also to the detection of conductivity, when it is used, to the replacing of water and frequent, to user, use and brought many troubles, and conductivity is too high, will have the fatal damage that necessarily may cause semiconductor laser.
The 3rd, current water-cooling system does not possess reverse air blowing water return function, has brought a lot of unnecessary troubles to a certain extent to user.
For this reason, people urgently wish to have a kind of water cooling plant that can be good at, is applicable to very easily semiconductor laser, can have high filtering precision, quick ion cleaning, blowback air backwater and standardized electrical control interface.
Summary of the invention
The object of the invention is to solve the problem existing in semiconductor laser water cooling plant in the market, a kind of water cooling plant of reliable, multi-functional, the high-purity semiconductor laser with applicability is provided.This water cooling plant uses multiloop to control design, by the control to electric components such as electromagnetically operated valve, flowmeter, temperature sensor, pressure sensors, realized the water-cooling system that a kind of high precision closed loop with high-precision filtration, rapid water ion cleaning, blowback air backwater, real-time discharge and monitoring temperature is controlled.
The technical solution used in the present invention is.
This high-purity semiconductor laser water cooling plant, includes electromagnetically operated valve, water filter, resin filter, flow thermometer, gas delivery system, and its structural feature is.
Conductivity meter 17 is arranged on water tank 1, water tank 1 is connected with the input of water pump 2, the output of water pump 2 connects respectively the first electromagnetically operated valve 3 and water filter 5 by threeway, the high accuracy PP filter core that folds is housed in water filter 5, the first electromagnetically operated valve 3 is connected with resin filter 4, and connect recovery tank 1 through resin filter 4, the spare interface that is connecting laser as water filter 5 outputs of the coolant outlet 6 of water cooling plant, the cooling water of flowing through laser returns the starting point of water tank via the entrance 7 of water cooling plant as cooling water, the entrance 7 of water cooling plant connects respectively the second electromagnetically operated valve 10 and flow thermometer 8 by threeway, by the 3rd electromagnetically operated valve 9, get back to water tank, unidirectional valve 11 is connected with the second electromagnetically operated valve 10, interface as blowback air backwater.
Described gas delivery system is comprised of electromagnetically operated valve, oil mist separator, pressure sensor, unidirectional valve and gas shunt device, gas delivery system entrance 16 communicates with gas shunt device 12 by super oil mist separator 15, gas shunt device 12 communicates with the 4th electromagnetically operated valve 14 and pressure sensor 1 respectively by pipeline, and coolant outlet 6, filter 5, water pump 2 and the water tank 1 of the entrance 7 of gas shunt device 12 by unidirectional valve 11, the second electromagnetically operated valve 10, water cooling plant, laser, water cooling plant communicate.During work, the 4th electromagnetically operated valve 14(is normally closed) close, pressure sensor 13 starts to detect gas pressure, when pressure arrives reservation value, the second electromagnetically operated valve 10(is normally closed) open, the 3rd electromagnetically operated valve 9(often opens) to close, gas blows back water tank 1 through super oil mist separator 15, gas circuit segmenting device 12, unidirectional valve 11, the second electromagnetically operated valve 10, the entrance 7 of water cooling plant, laser, the coolant outlet 6 of water cooling plant, filter 5, water pump 2 by cooling water via air transporting arrangement entrance 16.
Above-mentioned electromagnetically operated valve, water filter, conductivity meter, resin filter, flow thermometer in the main miscellaneous function of water cooling plant are.
Water filter is impurity in filtered water in water cooling plant, and filter core has been selected the PP filter core that folds, and more traditional cotton string filter element has higher useful life, lower water resistance and the filtering accuracy of Geng Gao.
Conductivity meter, resin filter are in order to remove the zwitterion comprising in cooling water, to reach the object of ion cleaning in water cooling plant.
Flow thermometer is that the flow of cooling water and temperature are carried out to real-time detection, to guarantee the normal operation of a whole set of water cooling plant.
Described gas delivery system is comprised of electromagnetically operated valve, oil mist separator, pressure sensor, unidirectional valve and gas circuit dispenser.This device can provide the pure gas of high-purity for laser processing, simultaneously, the control unit forming via electromagnetically operated valve, pressure sensor and unidirectional valve can provide for above-mentioned water cooling plant the function of reverse air blowing backwater, cooling water residual in watering equipment can be blown back in water tank.
Above-mentioned system provides comprehensive electric interfaces, can according to corresponding logical relation, control by host computer.And native system can change the trend in water route, bore accordingly according to the requirement of laser.The all metal partss of native system have all adopted food stage 316L stainless steel material, and connecting line has selected high-quality pvc pipe fitting to carry out the interface channel between each parts.Thereby guaranteed the operation reliably and with long-term of system.
High-purity semiconductor laser water cooling plant key work.
During system works, water pump is inputted semiconductor laser via filter by cooling water by the cooling water after ion cleaning, and flowing through laser turns back to and in water tank, completes circulation by flow thermometer.When needs are dismantled laser, by gas delivery system, be responsible for the reverse water tank that blows back of cooling water residual in laser to facilitate the storage of laser.Whole device is controlled by host computer, and all control points are all undertaken by the logic designing, to guarantee the stable operation of device.
Compared with prior art, the invention has the beneficial effects as follows.
(1) this water cooling plant has good adaptability, can be integrated in any laser water cooling plant.
(2) adopt high accuracy PP foldable filter element, more than filtering accuracy can reach 1um, make the granularity in water be less than 10 of every square meters guaranteeing that its flow is impregnable, and particle maximum gauge is not more than 0.5um simultaneously.
(3) adopt high-purity polishing resin, utilize solenoid control to divide water loop, can be at short notice by conductivity the deionization electrical conductivity of water below 20 be down to 1um.
(4) this device has designed exquisite waterway circulating design, has possessed reverse air blowing water return function, can, by the water blowback recovery tank in watering equipment, facilitate the dismounting of watering equipment.
(5) this device has adopted the electric interfaces design of international standard, can embed easily various host computer dispatch control systems.
Accompanying drawing explanation
Fig. 1 is equipment connection schematic diagram of the present invention.
Mark in figure: 1. water tank, 2. water pump, 3. the first electromagnetically operated valve, 4. resin filter, 5. water filter, the 6. coolant outlet of water cooling plant, 7. the entrance of water cooling plant, 8. flow thermometer, 9. the 3rd electromagnetically operated valve, 10. the second electromagnetically operated valve, 11. unidirectional valves, 12. gas shunt devices, 13. pressure sensors, 14. the 4th electromagnetically operated valves, 15. surpass oil mist separator, 16. gas delivery system entrances, 17. conductivity meters.
Embodiment
Embodiment.
High-purity semiconductor laser water cooling plant comprises electromagnetically operated valve, water filter, resin filter, flow thermometer, gas delivery system, conductivity meter 17 is wherein housed on water tank 1, the input of water pump 2 is connected with water tank, its output connecting tee connects respectively the first electromagnetically operated valve 3 and water filter 5, the high accuracy PP filter core that folds is housed in water filter 5, the first electromagnetically operated valve 3 is connected with resin filter 4, through resin filter 4 water tank 1 that is linked back, the output of water filter 5 is connecting laser spare interface as the coolant outlet 6 of water cooling plant, the cooling water of flowing through laser returns the starting point of water tank 1 via the entrance 7 of water cooling plant as cooling water, the entrance 7 of water cooling plant is connected to and in threeway, connects respectively the second electromagnetically operated valve 10 and flow thermometer 8, by the 3rd electromagnetically operated valve 9, get back to water tank, unidirectional valve 11 is connected with the second electromagnetically operated valve 10, it is the interface for blowback air backwater.
Described gas delivery system is comprised of electromagnetically operated valve, oil mist separator, pressure sensor, unidirectional valve and gas shunt device, gas delivery system entrance 16 communicates with gas shunt device 12 by super oil mist separator 15, gas shunt device 12 communicates with the 4th electromagnetically operated valve 14 and pressure sensor 1 respectively by pipeline, and coolant outlet 6, filter 5, water pump 2 and the water tank 1 of the entrance 7 of gas shunt device 12 by unidirectional valve 11, the second electromagnetically operated valve 10, water cooling plant, laser, water cooling plant communicate.
Working method.
Before device work, can first there is conductivity meter 17 to detect cooling electrical conductivity of water in water tank 1, as conductivity surpasses preset value, the first electromagnetically operated valve 3(is normally closed) open, the 3rd electromagnetically operated valve 9(often opens) close, cooling water is got back to water tank 1 by the first electromagnetically operated valve 3 via resin filter 4 and is started circulation, until the cooling electrical conductivity of water in water tank 1 is down to after preset value, the first electromagnetically operated valve 3(is normally closed) close, the 3rd electromagnetically operated valve 9(often opens) open, cooling water is through water pump 2 filter 5 of flowing through, water cooling plant coolant outlet 6, the entrance 7 of water cooling plant, flow thermometer 8, the 3rd electromagnetically operated valve 9 is got back to water tank, start normal cool cycles.
When water cooling plant need to be cleared up cooling water residual in laser, the 4th electromagnetically operated valve 14(is normally closed) close, pressure sensor 13 starts to detect gas pressure, when pressure arrives reservation value, the second electromagnetically operated valve 10(is normally closed) open, the 3rd electromagnetically operated valve 9(often opens) to close, gas blows back water tank 1 through super oil mist separator 15, gas shunt device 12, unidirectional valve 11, the second electromagnetically operated valve 10, the entrance 7 of water cooling plant, laser, the coolant outlet 6 of water cooling plant, filter 5, water pump 2 by cooling water via gas delivery system entrance 16.
Claims (2)
1. a high-purity semiconductor laser water cooling plant, includes conductivity meter, electromagnetically operated valve, water filter, resin filter, flow thermometer, gas delivery system, it is characterized in that:
Conductivity meter 17 is arranged on water tank 1, water tank 1 is connected with the input of water pump 2, the output of water pump 2 connects respectively the first electromagnetically operated valve 3 and water filter 5 by threeway, the high accuracy PP filter core that folds is housed in water filter 5, the first electromagnetically operated valve 3 is connected with resin filter 4, and connect recovery tank 1 through resin filter 4, the spare interface that is connecting laser as water filter 5 outputs of the coolant outlet 6 of water-cooling system, the cooling water of flowing through laser returns the starting point of water tank via the entrance 7 of water-cooling system as cooling water, the entrance 7 of water-cooling system connects respectively the second electromagnetically operated valve 10 and flow thermometer 8 by threeway, by the 3rd electromagnetically operated valve 9, get back to water tank, unidirectional valve 11 is connected with the second electromagnetically operated valve 10, interface as blowback air backwater.
2. high-purity semiconductor laser water cooling plant according to claim 1, it is characterized in that described gas delivery system is by electromagnetically operated valve, oil mist separator, pressure sensor, unidirectional valve and gas shunt form, gas delivery system entrance 16 communicates with gas shunt device 12 by super oil mist separator 15, gas shunt device 12 communicates with the 4th electromagnetically operated valve 14 and pressure sensor 1 respectively by pipeline, gas shunt device 12 is by unidirectional valve 11, the second electromagnetically operated valve 10, the entrance 7 of water cooling plant, laser, the coolant outlet 6 of water cooling plant, filter 5, water pump 2 and water tank 1 communicate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310014105.8A CN103928840B (en) | 2013-01-15 | 2013-01-15 | High purity water cooling device of semiconductor laser unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310014105.8A CN103928840B (en) | 2013-01-15 | 2013-01-15 | High purity water cooling device of semiconductor laser unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103928840A true CN103928840A (en) | 2014-07-16 |
| CN103928840B CN103928840B (en) | 2017-05-17 |
Family
ID=51146967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310014105.8A Expired - Fee Related CN103928840B (en) | 2013-01-15 | 2013-01-15 | High purity water cooling device of semiconductor laser unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103928840B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107754433A (en) * | 2017-11-23 | 2018-03-06 | 昌微系统科技(上海)有限公司 | A kind of filter for micro element |
| CN116940434A (en) * | 2021-06-30 | 2023-10-24 | 弗罗纽斯国际有限公司 | Welded part cooling systems with coolant-specifying devices, and welded parts including such welded part cooling systems |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10335727A (en) * | 1997-06-03 | 1998-12-18 | Meidensha Corp | Cooling structure of semiconductor element |
| JP2004122038A (en) * | 2002-10-04 | 2004-04-22 | Orion Mach Co Ltd | Water cooling apparatus having water quality control unit |
| US20060016790A1 (en) * | 2003-01-31 | 2006-01-26 | Trimedyne, Inc. | Generation of efficient solid-state laser pulse trains |
| CN2922220Y (en) * | 2006-04-29 | 2007-07-11 | 北京工业大学 | Low conductivity circulating water cooling device |
| CN101154795A (en) * | 2006-09-29 | 2008-04-02 | 武汉楚天激光（集团）股份有限公司 | High-precision water cooling system and its control method |
| CN201240887Y (en) * | 2008-05-29 | 2009-05-20 | 国网武汉高压研究院 | Water treatment apparatus for power cable test terminal |
-
2013
- 2013-01-15 CN CN201310014105.8A patent/CN103928840B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10335727A (en) * | 1997-06-03 | 1998-12-18 | Meidensha Corp | Cooling structure of semiconductor element |
| JP2004122038A (en) * | 2002-10-04 | 2004-04-22 | Orion Mach Co Ltd | Water cooling apparatus having water quality control unit |
| US20060016790A1 (en) * | 2003-01-31 | 2006-01-26 | Trimedyne, Inc. | Generation of efficient solid-state laser pulse trains |
| CN2922220Y (en) * | 2006-04-29 | 2007-07-11 | 北京工业大学 | Low conductivity circulating water cooling device |
| CN101154795A (en) * | 2006-09-29 | 2008-04-02 | 武汉楚天激光（集团）股份有限公司 | High-precision water cooling system and its control method |
| CN201240887Y (en) * | 2008-05-29 | 2009-05-20 | 国网武汉高压研究院 | Water treatment apparatus for power cable test terminal |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107754433A (en) * | 2017-11-23 | 2018-03-06 | 昌微系统科技(上海)有限公司 | A kind of filter for micro element |
| CN107754433B (en) * | 2017-11-23 | 2023-09-01 | 昌微系统科技(上海)有限公司 | Filtering device for micro device |
| CN116940434A (en) * | 2021-06-30 | 2023-10-24 | 弗罗纽斯国际有限公司 | Welded part cooling systems with coolant-specifying devices, and welded parts including such welded part cooling systems |
| US12059757B2 (en) | 2021-06-30 | 2024-08-13 | Fronius International Gmbh | Welding component cooling system for cooling a welding component |
| CN116940434B (en) * | 2021-06-30 | 2024-08-23 | 弗罗纽斯国际有限公司 | Welding component cooling system with coolant-specifying device and welding component including the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103928840B (en) | 2017-05-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103658883B (en) | The working fluid feedway of electric discharge machining apparatus | |
| CN207016581U (en) | Water shortage detection system for water purifier | |
| CN105858745B (en) | Can auto-flushing filter core and pipeline water purifier and its control method | |
| CN108975543B (en) | Water purification system and water purifier | |
| CN104847369A (en) | Slurry shield tunneling machine flushing water pressure control system and control method | |
| CN203704768U (en) | A temperature-controlled water-cooling system | |
| CN103928840A (en) | High purity water cooling device of semiconductor laser unit | |
| CN216518995U (en) | Hydraulic oil ultrafiltration purification system | |
| CN103911588A (en) | Water temperature control circulating cooling system for diffusion pump of vacuum coating machine | |
| CN104457394A (en) | A temperature-controlled water-cooling system | |
| CN204841422U (en) | Water purifier reverse osmosis membrane washing unit | |
| CN208200387U (en) | A kind of helium online recycling equipment for purifying | |
| CN203272293U (en) | Hydraulic circuit preventing hydraulic motors from rotating reversely | |
| CN211247627U (en) | Hydraulic system pipeline washing device | |
| CN201832476U (en) | Drip filter | |
| CN216200021U (en) | Disc brake hydraulic station for full-normally-closed brake caliper | |
| CN205556293U (en) | Water purifier without water storage tank | |
| CN203264423U (en) | Filtering alarm control device | |
| CN211804257U (en) | Novel discharging oil hydraulic circuit of discharging processing machine | |
| CN204986421U (en) | Automatic cold water moisturizing return circuit outside cold system of current conversion station valve changed | |
| CN211971831U (en) | Full-automatic back washing unit of deionization return circuit | |
| CN104715859A (en) | Auxiliary cooling and filtering system of electrical equipment | |
| CN217309899U (en) | Water cut-off protection device of direct water dispenser | |
| CN204910931U (en) | Negative pressure formula grinding oil filters cooling device | |
| CN108328588A (en) | A kind of helium online recycling equipment for purifying |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181213 Address after: 110136 Shenbei Road 29-3, Shenbei New District, Shenyang City, Liaoning Province Patentee after: SHENYANG DALU LASER ENGINEERING CO.,LTD. Address before: 110136 No. 29 Shenbei Road, Deyi Economic Development Zone, Shenyang New District, Shenyang City, Liaoning Province Patentee before: SHENYANG DALU LASER FLEXIBLE MANUFACTURE TECHNOLOGY Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170517 Termination date: 20220115 |