CN1038859A - Turbine type molecular vacuum pump - Google Patents
Turbine type molecular vacuum pump Download PDFInfo
- Publication number
- CN1038859A CN1038859A CN 88103767 CN88103767A CN1038859A CN 1038859 A CN1038859 A CN 1038859A CN 88103767 CN88103767 CN 88103767 CN 88103767 A CN88103767 A CN 88103767A CN 1038859 A CN1038859 A CN 1038859A
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- path
- packing
- rotor
- groove
- dynamic seal
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- 238000012856 packing Methods 0.000 claims description 50
- 230000000740 bleeding effect Effects 0.000 claims description 26
- 244000309464 bull Species 0.000 claims description 9
- 238000005086 pumping Methods 0.000 abstract description 9
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 239000004215 Carbon black (E152) Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000205 computational method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 210000000527 greater trochanter Anatomy 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
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Abstract
The turbo molecular vacuum pump comprises a hollow stator 1 in which a hollow rotor 2 is mounted, between which passages 3, 4 of the turbo molecular pumping stage and the molecular pumping stage are arranged, which are open to the atmosphere by dynamically sealed passages 34, 36, the passages 34, 36 consisting of grooves in the form of a multi-start rectangular thread made on an inner surface section 37 of the rotor 2 and an outer surface section 35 of the shaft 14 of the rotor 2, and surfaces of the rotor 2 and of the bearing 16 facing these surface sections 35, 37 respectively, the bearing 16 being located inside the hollow rotor 2, and one end of the shaft 14 of the rotor 2 being mounted in the bearing.
Description
The invention belongs to the on-positive displacement rotor pump of bleeding, and relate to the axial-flow pump that is used to produce high vacuum, i.e. turbomolecular vacuum pump.
Development of modern science and technology, need the turbomolecular vacuum pump with various different performances (particularly pumping speed and gas compression ratio) of a large amount of models, pumping speed and gas compression ratio will determine the overall sizes of each main structural components of turbomolecular vacuum pump.
Turbomolecular vacuum pump contains hollow stator, in its axial bore sleeve rotor is housed, and this rotor is rigidly connected with the axle that drives its rotation.Between rotor and stator two surfaces respect to one another, be formed with the turbomolecular path that level and molecule bleed grade of bleeding.
The molecule level of bleeding can be pressurized to 100 pools (Pa) to the pressure of institute's gas bleeding discharging side, and in order further the pressure of institute's gas bleeding to be increased to barometric pressure, then need the forevacuum level of bleeding, in the conventional construction of turbomolecular vacuum pump, this forevacuum level of bleeding is the independent preevacuation pump of connecting with turbomolecular vacuum pump.But the volume from the inner chamber of preevacuation pump to the technology confined chamber that will extract out flows along the path of bleeding hydrocarbon molecule is arranged, this situation will seriously reduce degree of vacuum, and will reduce at last go out the quality of product.In order to eliminate moving of hydrocarbon molecule, for example can adopt nitrogenous adsorber, this adsorber structurally will make the manufacturing of turbomolecular vacuum pump complicated, and price is improved.
Also know a kind of turbomolecular vacuum pump, wherein dynamic seal (packing) play a part forevacuum bleed the level, the path of sealing is between the two cylindrical surface of two structural elements of turbomolecular vacuum pump, one of them structural element is ordered about rotation.Gap between the two cylindrical surface is generally 0.015～0.03mm.The path of dynamic seal (packing) is generally formed by being produced on the groove that is bull square threaded form pattern that is driven in rotation on the element surface.The degree of depth of groove is decreased to 0.03mm by 0.1mm equably from suction side to exhaust side.In addition, the width of groove equals the width of back between two adjacent grooves, and this width is determined by calculating in some way according to the characteristic of bleeding of desired turbomolecular vacuum pump.
Known another turbomolecular vacuum pump (FR, B, 222409), this pump contains hollow stator, sleeve rotor wherein is housed, be provided with between stator and the rotor turbomolecular bleed the level path, and the molecule that communicates with it bleed the level path, a kind of path in back is communicated with the path of dynamic seal (packing), and the path of dynamic seal (packing) communicates with atmosphere, and by the internal surface of the bearing that is positioned at sleeve rotor (end of rotor shaft is loaded on this bearing) be produced on the groove that is bull square threaded form pattern on the rotating shaft outer surface section and formed, the degree of depth of groove reduces equably from suction side to exhaust side.
In addition, in order to guarantee the given characteristic of bleeding, gas compression ratio is particularly made the length of which outer surface section of dynamic seal (packing) groove in rotating shaft, should be not less than the diameter of rotating shaft.But, to increase the length of rotating shaft like this, and can increase the contilever load of bearing and the axle moments of inertia of the rotating shaft of rotor is housed, thereby will limit the rotational speed of rotating shaft, thereby the gas compression that has also just limited the characteristic of bleeding, particularly pump of turbomolecular vacuum pump is compared and the main pumping speed relevant with the rotating shaft rotational speed.
Basic task of the present invention is a kind of turbomolecular vacuum pump of development, and such dynamic seal (packing) will be arranged, and under the situation of the overall sizes that does not strengthen pump, guarantees to improve the axle gas characteristic of turbomolecular vacuum pump.
This task that is proposed is to solve like this, in containing the turbomolecular vacuum pump of hollow stator, sleeve rotor is housed in the stator, between stator and rotor, be provided with turbomolecular bleed the level path, and the molecule that communicates with it bleed the level path, a kind of path in back is communicated with the path of dynamic seal (packing), and the path of dynamic seal (packing) communicates with atmosphere, and by the internal surface of the bearing that is positioned at sleeve rotor (end of rotor shaft is loaded on this bearing) be produced on the groove that is bull square threaded form pattern on the outer surface section of axle and formed, the degree of depth of groove reduces equably from suction side to exhaust side, according to the present invention, be provided with and dynamic seal (packing) primary path and the molecule additional dynamic seal path that grade path communicates of bleeding, this path is formed with the outer surface of the bearing of relative this internal surface section by being produced on the groove that is bull square threaded form pattern on the rotor inner surface section.
In order to improve pumping speed and gas compression ratio, in turbomolecular vacuum pump, when making the groove of dynamic seal (packing) primary path and additional via, it is suitable making these two kinds of grooves have opposite hand of spiral, and the degree of depth of additional via groove reduces equably from exhaust side to suction side.
In order to improve the reliability of turbomolecular vacuum pump work, when making the groove of dynamic seal (packing) primary path and additional via, it is favourable making it have identical hand of spiral, and the degree of depth of additional via groove reduces equably from suction side to exhaust side.
Because what be produced on the formed dynamic seal (packing) additional via of groove on the rotor inner cylindrical surface exists that (diameter of rotor is twice than the diameter of rotating shaft at least, in rotating shaft, be manufactured with the primary path of dynamic seal (packing)), compare with the sectional area that passes through of dynamic seal (packing) primary path, can increase the sectional area that passes through of dynamic seal (packing) additional via, so also can improve the characteristic of bleeding of turbomolecular vacuum pump.
In addition, this situation also can shorten the length of dynamic seal (packing) primary path, can reduce the axle moments of inertia of the rotating shaft that rotor is housed like this, and by means of the rotating speed that adds greater trochanter, under the situation of the overall sizes that does not increase pump, can improve 20% to the pumping speed of turbomolecular vacuum pump at least.
Hereinafter will be with implementing instantiation of the present invention and description of drawings the present invention, each figure is described as follows:
According to the present invention, Fig. 1 is total figure (longitudinal section) of turbomolecular vacuum pump;
According to the present invention, Fig. 2 is the components A that has on Fig. 1 of magnification ratio, and the groove that forms the dynamic seal (packing) additional via is arranged on it, and the hand of spiral of this groove is opposite with the hand of spiral of the groove of formation dynamic seal (packing) primary path.
According to the present invention, Fig. 3 is the components A identical with Fig. 2, and the groove that forms the dynamic seal (packing) additional via is arranged on it, and the hand of spiral of this groove is identical with the hand of spiral that forms dynamic seal (packing) primary path groove.
Turbomolecular vacuum pump contains hollow stator 1(Fig. 1), sleeve rotor 2 wherein is housed, be provided with between stator and the rotor turbomolecular bleed the level path 3 and molecule bleed the level path 4, these two kinds of paths communicate with each other.
On turbo-molecular is bled the housing 5 of level, the dish hub 7 have three leaf dishes 8 is installed, these leaf dishes and rotor 2 rigidly connected four impellers 9 between, between leaf dish and impeller, form the bleed path 3 of level of turbomolecular.
As in the structure of other known turbomolecular vacuum pump, the quantity of the quantity of impeller 9 and its corresponding leaf dish 8 can be various.This quantity can be from 2 to more than 20, and well-known, and this quantity is relevant with the geometric parameter of pump structure element, particularly with the blade of impeller 9 between the desired characteristic of bleeding of passing through sectional area and turbomolecular vacuum pump of path relevant.
Molecule bleed the level path 4 form by the groove 11 that is bull square threaded form pattern on the inner cylindrical surface 10 that is produced on stator 1 housing 6 and the external cylindrical surface 12 of rotor 2.The degree of depth of groove 11 is marking with arrow on the suction side V(figure) to exhaust side N(figure, mark with arrow) direction on be reduced to 0.5mm by 30mm equably.Gap 13 between rotor 2 external cylindrical surfaces and stator 1 housing 6 inner cylindrical surfaces is quite little, as everyone knows, this gap is 0.03mm to 0.15mm, and inverted draft is caused bigger resistance, that is prevent gas from exhaust side N to suction side V overflow.
Bearing 16,17 is contained in the housing 20, on the thrust bearing 21 in packing ring 23 is contained in cup-shaped sleeve 22, for example utilizes screw attachment and housing 20 being rigidly connected.
The stator 24 of motor is installed in cup-shaped sleeve 22, and the rotor 25 of motor is positioned at the lower end 26 of axle 14.Shell 27 is fixed in annulus 22.For cooling turbine formula molecular pump, shell 27 is connected with packing ring 28,29 and vent window 30.For retaining washer 28 and 29, between packing ring 28 and annulus 22, locating stud 31 is housed.On the housing 6 of stator 1, be shaped on circular hole 32, and on housing 6, be fixed with coaxially and be used for and the forevacuum sleeve pipe 33 that conduit (not marking on the figure) is connected of bleeding, and conduit is to be used for (not the marking on the figure) of bleeding in advance from confined chamber with circular hole.
In keeping confined chamber under the condition of vacuum, in order to guard against the air-flow that to extract out to flow directly into atmosphere, be provided with dynamic seal (packing) in the structure of turbomolecular vacuum pump, this sealing can guarantee the pressure of wanting gas bleeding is increased to atmospheric pressure from the bleed pressure in grade path 4 outlet ports of molecule.Dynamic seal (packing) comprises primary path 34, and this path is in axle 14 outer surface sections 35 with relatively between bearing 16 internal surfaces of this outer surface section 35.
The primary path 34 of dynamic seal (packing) at suction side V by the gap 38 between rotor 2 surfaces of bearing 16 upper end and relative this end face, and the additional via 36 of dynamic seal (packing) is connected, and additional via is in rotor 2 internal surface sections 37 with relatively between bearing 16 outer surfaces of this internal surface section 37.
The primary path 34 of dynamic seal (packing) exhaust side N by be produced in the bearing 16 radially with longitudinal passage 39,40, the gap between axle 14 and the sleeve 42, and be connected by the radially coaxial line path 43 and 44 that is produced on sleeve 41 and the housing 20.
The additional via 36 of dynamic seal (packing) by rotor 2 internal surface and the gap 45 between two outer surfaces of bearing 16 and housing 20,46, and by between the internal surface of stator 1 housing 6 and the toroidal cavity 47 between housing 20 outer surfaces, be connected with the bleed path 4 of level of molecule.
The primary path 34 of dynamic seal (packing) is by the groove 48(Fig. 2 and 3 on the outer surface section 35 that is bull square threaded form pattern that is produced on 2 14 of rotors) institute forms.The degree of depth 1 of groove 48 is decreased to 0.03mm by 0.1mm equably from suction side V to exhaust side N.
Length L of number of starts and surface section 35 (Fig. 2) or length L
1(Fig. 3) be decided by axle 14 diameter.The width b of groove 48 is identical along the whole length L of surface section 35, and equals 2mm, and the width a of the back 49 between the two adjacent grooves 48 equals the width b of groove 48.
The additional via 36 of dynamic seal (packing) is by the internal surface section 37(Fig. 2 that is bull square threaded form pattern that is produced on rotor 2,3) on groove 50(Fig. 2) or groove 51(Fig. 3) form.The degree of depth l of groove 50,51
1Along internal surface section 37(Fig. 2,3) length H(Fig. 2) or length H
1(Fig. 3) change equably, with the ingress of assurance dynamic seal (packing) path 36 and 34 and the gas pressure difference in outlet port.Groove 50,51 degree of depth l
1Tendency of changes relevant with the hand of spiral of groove 48.
In order to improve pumping speed and gas compression ratio, form groove 50(Fig. 2 of dynamic seal (packing) additional via 36) hand of spiral opposite with the hand of spiral of the groove 48 of composition dynamic seal (packing) primary path 34.Meanwhile, the degree of depth l of groove 50
1Be decreased to 0.03mm by 0.07mm equably from exhaust side N to suction side V.Its width of total length b along groove 50
1All identical, and equal 2mm.The width of the back 52 between adjacent two grooves 50 equals the width b of groove 50
1The length L that axle is shaped on the outer surface section 35 of groove 48 on 14 be about rotating shaft 14 diameters 0.3 to 0.5 and the length H of rotor 2 internal surface sections 37 is approximately 2/3L.Select value and their ratio of L and H to be decided by the desired characteristic of bleeding, and determined in some way with computational methods.In addition, L is always less than the diameter of rotating shaft 14, and H can reduce the axle moments of inertia of the rotating shaft 14 that has rotor 16 so always less than L.
In order to keep the ability to work of turbomolecular vacuum pump, accidental pressure is brought up under the situation of atmospheric pressure, at the toroidal cavity 47(Fig. 1 that communicates with forevacuum main line (not shown on the figure)) in, form groove 51(Fig. 3 of dynamic seal (packing) additional via 36) hand of spiral that had is consistent with the hand of spiral of the groove 48 of composition dynamic seal (packing) primary path 36.In addition, the degree of depth l of groove 51
1Be reduced to 0.03mm by 0.007mm equably from suction side V to exhaust side N.The width of the width of groove 51 and back 53 is equal to 2mm, and this situation is same as the scheme on Fig. 2.The length L of axle 14 outer surface sections 35
1Be 0.5～0.8 of rotating shaft 14 diameters, and the length H of rotor 2 internal surface sections 37
1Be 1/2～2/3L
1
Choose L
1And H
1Occurrence and their the ratio characteristic of bleeding that also is decided by desired turbomolecular vacuum pump, and determined in some way with computational methods.
Turbomolecular vacuum pump is worked in the following manner.When vacuum pump is installed, housing 5(Fig. 1 of stator 1) be communicated with the confined chamber (not shown on the figure) of corresponding operation equipment.Sleeve pipe 33 is connected with the conduit (not shown on the figure) of the level of bleeding in advance.Bleed the conduit of using valve (not shown on the figure) blocking to bleed in advance then in advance from closed chamber.After this pressurized air that with pressure is 0.59 micropoise (μ Pa) is sent into axle 14 and aerostatic bearing 16 and 17 s' gap by groove 18 and 19, and axle 14 will " float " in aerostatic bearing 16 and 17.
Subsequently, the making alive on the stator 24 of motor, the axle 14 that has rotor 2 will order about rotation by the rotor 25 of motor.When rotor 2 rotated, the gas molecule of extracting out in the volume from confined chamber was tangled by the blade of impeller 9, and was depressed into the bleed path 3 of level of turbomolecular, and turbomolecular is bled and grade will be guaranteed that in the outlet port gas pressure is increased to desired calculated value.
Send gas molecule to molecule the bleed path 4 of level from the bleed path 3 of level of turbomolecular, the pressure in the air-flow that extract out in its outlet place will be by 10
-2Pool (Pa) rises to 10
-1Pool (Pa).Secondly, the molecule that extract air-flow out is by toroidal cavity 47, and gap 46 and 45 enters the additional via 36 of dynamic seal (packing).Then, by gap 38 gas is sent into the primary path 34 of dynamic seal (packing), the gas pressure that will extract out in its outlet port is increased to atmospheric pressure.At last, the gas that extract out is by the path 39,40 of bearing 16, and the hole 43 of gap 41 and sleeve 42 and the path 44 of housing 20 drain into atmosphere.Dynamic seal (packing) plays a part fore pump, and guarantees pressure is increased to barometric pressure, and the volume that will extract out of confined chamber can not polluted by hydrocarbon molecule in addition.
When extracting air communication out when crossing dynamic seal (packing) additional via 36, its pressure will raise 4 times at least, thereby can guarantee to reduce the pressure difference of institute's gas bleeding in the dynamic seal (packing) primary path 34, utilize the length that shortens dynamic seal primary path 34 like this, the axle moments of inertia of the rotating shaft 14 that has rotor 2 can be reduced, and the rotational velocity of rotor 2 can be improved.This has just guaranteed under the situation that does not change turbomolecular vacuum pump overall sizes, can improve 20% to the pumping performance of pump at least.
By by groove 50(Fig. 2), its degree of depth reduces equably from exhaust side N to suction side V, and the pressure of the air-flow of the dynamic seal (packing) additional via of forming 36 can improve first power approximately, promptly can improve 30% to the characteristic of bleeding of turbomolecular vacuum pump at least like this.
By by groove 52(Fig. 3), its degree of depth reduces to exhaust side N equably from suction side V, and the pressure of the air-flow of the dynamic seal (packing) additional via 36 of formation approximately raises 4 times, can improve 20% to the characteristic of bleeding of turbomolecular vacuum pump at least like this.
Yet the bigger superiority of making dynamic seal (packing) additional via 36 like this is described as follows:
Owing in this path 36, can set up the resistance of opposing viscosity air-flow, and when 47 li pressure of cavity raise suddenly, additional via can prevent that turbomolecular vacuum pump is damaged.
It is 10 that the turbomolecular vacuum pump of being recommended can be used to produce and keep the vacuum gas residual pressure
-1To 10
-7In the various manufacturing equipments of pool (Pa), for example in electron trade, make microcircuit, generate artificial crystal, and utilize vacuum to carry out in the various research equipments and instrument of work, as the ultimate particles accelerator, mass spectrometer and electron microscope.
Claims (3)
1, turbomolecular vacuum pump contains hollow stator 1, sleeve rotor 2 wherein is housed, between stator and rotor, be provided with turbomolecular bleed the level path 3, and the molecule that communicates with it grade path 4 of bleeding, the dynamic seal (packing) path 34 that a kind of path in back communicates with atmosphere is communicated with, and the dynamic seal (packing) path is by the bearing 16 that is positioned at sleeve rotor 2, the end that rotor is 2 14 is loaded in this bearing, its internal surface section 37 and be produced on the groove that is bull square threaded form pattern on the outer surface section 35 of axle 14 and form, the degree of depth of groove reduces equably from suction side V to exhaust side N, the characteristics of this turbomolecular vacuum pump are, contain and dynamic seal (packing) primary path 34 and the molecule dynamic seal (packing) additional via 36 that grade path 4 communicates of bleeding, this path is made up of the outer surface of the bearing 16 that is produced on the groove that is bull square threaded form pattern on the rotor inner surface section 39 and relative this internal surface section 37.
2, according to claim 1, the characteristics of turbomolecular vacuum pump are, at the groove 48,50 o'clock that making has the dynamic seal (packing) primary path 34 of opposite threads direction and additional via 36, the degree of depth of additional via 36 grooves 50 reduces equably from suction side to exhaust side.
3, according to claim 1, the characteristics of turbomolecular vacuum pump are, at the groove 48,50 o'clock that making has identical hand of spiral dynamic seal (packing) primary path 34 and additional via 36, the degree of depth of additional via 36 grooves 50 reduces equably from exhaust side to suction side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 88103767 CN1038859A (en) | 1988-06-23 | 1988-06-23 | Turbine type molecular vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 88103767 CN1038859A (en) | 1988-06-23 | 1988-06-23 | Turbine type molecular vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1038859A true CN1038859A (en) | 1990-01-17 |
Family
ID=4832747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 88103767 Pending CN1038859A (en) | 1988-06-23 | 1988-06-23 | Turbine type molecular vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1038859A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100516540C (en) * | 2004-11-10 | 2009-07-22 | 株式会社大阪真空机器制作所 | Shaft seal dust-proof structure of turbo molecular pump |
| CN100580255C (en) * | 2003-09-17 | 2010-01-13 | 梅科斯特拉克斯勒股份公司 | Magnetic bearing device and vacuum pump |
| CN101243263B (en) * | 2005-08-24 | 2010-08-11 | 梅科斯特拉克斯勒股份公司 | Magnetic bearing device with improved vacuum feed-through |
| CN102428280A (en) * | 2009-05-20 | 2012-04-25 | 爱德华兹有限公司 | Regenerative vacuum pump with axial thrust balancing means |
| CN103998789A (en) * | 2011-11-30 | 2014-08-20 | 埃地沃兹日本有限公司 | Vacuum pump |
| CN105650282A (en) * | 2014-11-12 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Centrifugal non-contact sealing structure |
| CN108678975A (en) * | 2018-07-17 | 2018-10-19 | 中国工程物理研究院机械制造工艺研究所 | A kind of anti-vibration molecular pump |
| CN113906219A (en) * | 2019-05-24 | 2022-01-07 | 爱德华兹有限公司 | Vacuum assembly and vacuum pump with axial channel |
| CN114352553A (en) * | 2021-12-31 | 2022-04-15 | 北京中科科仪股份有限公司 | Vortex mechanism and composite molecular pump |
-
1988
- 1988-06-23 CN CN 88103767 patent/CN1038859A/en active Pending
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100580255C (en) * | 2003-09-17 | 2010-01-13 | 梅科斯特拉克斯勒股份公司 | Magnetic bearing device and vacuum pump |
| CN100516540C (en) * | 2004-11-10 | 2009-07-22 | 株式会社大阪真空机器制作所 | Shaft seal dust-proof structure of turbo molecular pump |
| CN101243263B (en) * | 2005-08-24 | 2010-08-11 | 梅科斯特拉克斯勒股份公司 | Magnetic bearing device with improved vacuum feed-through |
| US9127685B2 (en) | 2009-05-20 | 2015-09-08 | Edwards Limited | Regenerative vacuum pump with axial thrust balancing means |
| US9086071B2 (en) | 2009-05-20 | 2015-07-21 | Edwards Limited | Side-channel pump with axial gas bearing |
| CN102428280A (en) * | 2009-05-20 | 2012-04-25 | 爱德华兹有限公司 | Regenerative vacuum pump with axial thrust balancing means |
| US9334873B2 (en) | 2009-05-20 | 2016-05-10 | Edwards Limited | Side-channel compressor with symmetric rotor disc which pumps in parallel |
| CN103998789A (en) * | 2011-11-30 | 2014-08-20 | 埃地沃兹日本有限公司 | Vacuum pump |
| CN103998789B (en) * | 2011-11-30 | 2016-08-17 | 埃地沃兹日本有限公司 | Vacuum pump |
| CN105650282A (en) * | 2014-11-12 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Centrifugal non-contact sealing structure |
| CN108678975A (en) * | 2018-07-17 | 2018-10-19 | 中国工程物理研究院机械制造工艺研究所 | A kind of anti-vibration molecular pump |
| CN113906219A (en) * | 2019-05-24 | 2022-01-07 | 爱德华兹有限公司 | Vacuum assembly and vacuum pump with axial channel |
| CN114352553A (en) * | 2021-12-31 | 2022-04-15 | 北京中科科仪股份有限公司 | Vortex mechanism and composite molecular pump |
| CN114352553B (en) * | 2021-12-31 | 2024-01-09 | 北京中科科仪股份有限公司 | Vortex mechanism and compound molecular pump |
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