CN103817466A - Method for efficiently preparing graphene-reinforcing copper-based composite brazing filler metal at low temperature - Google Patents
Method for efficiently preparing graphene-reinforcing copper-based composite brazing filler metal at low temperature Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
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- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/302—Cu as the principal constituent
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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Abstract
一种低温高效制备石墨烯增强铜基复合钎料的方法,本发明涉及制备石墨烯增强铜基复合钎料的方法。本发明要解决传统方法制备石墨烯增强铜基复合钎料时存在的石墨烯分散性差、表面缺陷多、制备温度高及效率低的问题。方法:将铜粉置于等离子体增强化学气相沉积真空装置中,通入氢气,并在高温下保温,再通入氩气和碳源气体进行沉积,沉积结束后,停止通入碳源气体,最后冷却至室温以下,得到石墨烯/铜复合粉末,再将金属粉末或合金粉末与石墨烯/铜复合粉末混合均匀,即得到石墨烯增强铜基复合钎料。本发明用于一种低温高效制备石墨烯增强铜基复合钎料的方法。
The invention discloses a low-temperature and high-efficiency method for preparing graphene-reinforced copper-based composite solder, and the invention relates to a method for preparing graphene-reinforced copper-based composite solder. The invention aims to solve the problems of poor graphene dispersion, many surface defects, high preparation temperature and low efficiency when the graphene-reinforced copper-based composite solder is prepared by the traditional method. Method: Put the copper powder in the plasma-enhanced chemical vapor deposition vacuum device, pass in hydrogen gas, keep it warm at high temperature, and then pass in argon gas and carbon source gas for deposition. After the deposition is completed, stop the introduction of carbon source gas. Finally, cool down to below room temperature to obtain graphene/copper composite powder, and then mix metal powder or alloy powder with graphene/copper composite powder evenly to obtain graphene-reinforced copper-based composite solder. The invention is used for a low-temperature and high-efficiency method for preparing graphene-reinforced copper-based composite solder.
Description
技术领域technical field
本发明涉及制备石墨烯增强铜基复合钎料的方法。The invention relates to a method for preparing graphene-reinforced copper-based composite solder.
背景技术Background technique
钎焊是三大焊接方法(熔焊、压焊、钎焊)的一种,主要是采用比母材熔点低的金属材料作钎料,将焊件和钎料加热到高于钎料熔点,低于母材熔化温度,利用液态钎料润湿母材,填充接头间隙并与母材相互扩散实现连接焊件的方法。在机械、电机、仪表、电子技术等诸多领域都有着广泛应用。钎焊接头的强度、硬度、耐热性、耐腐蚀性等性能指标都与钎料有着直接关系,在钎料中添加颗粒、纤维、层片等增强体可以有效改善钎焊接头性能。随着科学技术的不断发展,纳米材料(如纳米颗粒、纳米线、纳米片等)作为增强体增强钎料已成为焊接领域的研究热点。Brazing is one of the three major welding methods (fusion welding, pressure welding, and brazing). It mainly uses metal materials with a lower melting point than the base metal as the solder, and heats the weldment and the solder to a temperature higher than the melting point of the solder. Below the melting temperature of the base metal, the liquid solder is used to wet the base metal, fill the joint gap and diffuse with the base metal to realize the connection of the weldment. It is widely used in many fields such as machinery, electrical machinery, instrumentation, and electronic technology. The strength, hardness, heat resistance, corrosion resistance and other performance indicators of the brazed joint are directly related to the solder. Adding reinforcements such as particles, fibers, and layers to the solder can effectively improve the performance of the brazed joint. With the continuous development of science and technology, nanomaterials (such as nanoparticles, nanowires, nanosheets, etc.) have become a research hotspot in the field of welding as reinforcements to enhance solder.
石墨烯是一种由碳原子构成的单层片状结构的新材料。由于石墨烯结构的特殊性,与其他材料相比,石墨烯具有出色的电学性能、热学性能以及机械性能。在电子器件、复合材料及电化学储能材料等诸多方面展现出巨大的应用前景。已有研究证明,在Sn-Ag-Cu钎料中加入0.1%的氧化还原方法制备的石墨烯片可显著提高钎料的润湿性能及力学性能。由此可见,石墨烯在强化钎料、提高钎料性能等方面具有广阔的应用前景。Graphene is a new material with a single-layer sheet structure composed of carbon atoms. Due to the special structure of graphene, graphene has excellent electrical, thermal and mechanical properties compared with other materials. It shows great application prospects in many aspects such as electronic devices, composite materials and electrochemical energy storage materials. Studies have shown that adding 0.1% of graphene sheets prepared by redox method to Sn-Ag-Cu solder can significantly improve the wettability and mechanical properties of the solder. It can be seen that graphene has broad application prospects in strengthening solder and improving the performance of solder.
目前,石墨烯常用的制备方法有机械剥离法、氧化还原石墨法、化学气相沉积法等三种方法。机械剥离法制备出的石墨烯质量高,但是工艺复杂,产率低,难以实际应用。氧化还原石墨法虽然具有成本低、产量大等特点,但工艺较复杂,石墨烯结构破坏严重、表面缺陷极多,电学和力学等性能较差。化学气相沉积法制备的石墨烯尺寸大、缺陷少,但制备温度较高且时间长、效率低,难以实际应用。At present, the commonly used preparation methods of graphene include mechanical exfoliation method, redox graphite method and chemical vapor deposition method. The graphene prepared by mechanical exfoliation is of high quality, but the process is complex and the yield is low, making it difficult for practical application. Although the redox graphite method has the characteristics of low cost and large output, the process is relatively complicated, the structure of graphene is severely damaged, there are many surface defects, and the electrical and mechanical properties are poor. Graphene prepared by chemical vapor deposition has large size and few defects, but the preparation temperature is high, the time is long, and the efficiency is low, which is difficult for practical application.
由于石墨烯材料的制备工艺限制,导致了石墨烯增强复合钎料的制备方法中,存在两个难点:(1)石墨烯分散性问题,传统机械球磨难以实现石墨烯在复合钎料中的均匀分散,常通过表面化学改性方法实现石墨烯的均匀分散,工艺较复杂。(2)石墨烯结构缺陷问题,根据实际制备工艺要求及添加量需求,常采用氧化还原石墨法获得的石墨烯,为此复合钎料中石墨烯结构缺陷较多。由于在较高温度下,结构破损的石墨烯极易与复合钎料中活性元素相互反应,限制了石墨烯材料在复合钎料中的广泛应用。Due to the limitations of the preparation process of graphene materials, there are two difficulties in the preparation method of graphene-reinforced composite solder: (1) the dispersion of graphene, it is difficult to achieve the uniformity of graphene in composite solder by traditional mechanical ball milling Dispersion, the uniform dispersion of graphene is often achieved by surface chemical modification methods, and the process is more complicated. (2) The problem of graphene structure defects. According to the actual preparation process requirements and the requirements of the addition amount, the graphene obtained by the redox graphite method is often used. For this reason, there are many graphene structure defects in the composite solder. Due to the fact that the structurally damaged graphene easily reacts with the active elements in the composite solder at higher temperatures, the wide application of graphene materials in composite solder is limited.
发明内容Contents of the invention
本发明要解决传统方法制备石墨烯增强铜基复合钎料时存在的石墨烯分散性差、表面缺陷多、制备温度高及效率低的问题,而提供一种低温高效制备石墨烯增强铜基复合钎料的方法。The present invention solves the problems of poor graphene dispersion, many surface defects, high preparation temperature and low efficiency when preparing graphene-reinforced copper-based composite solder by traditional methods, and provides a low-temperature and high-efficiency preparation of graphene-reinforced copper-based composite solder. method of feeding.
一种低温高效制备石墨烯增强铜基复合钎料的方法,具体是按照以下步骤进行的:A low-temperature and high-efficiency method for preparing graphene-reinforced copper-based composite solder, specifically carried out according to the following steps:
一、将铜粉置于等离子体增强化学气相沉积真空装置中,抽真空至压强为5Pa以下,以气体流量为18sccm~22sccm通入氢气,调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为190Pa~210Pa,并在压强为190Pa~210Pa和氢气气氛下40min内将温度升温至为500℃~700℃,并在温度为500℃~700℃下保温25min~35min;1. Put the copper powder in the plasma-enhanced chemical vapor deposition vacuum device, evacuate until the pressure is below 5Pa, feed hydrogen gas with a gas flow rate of 18sccm-22sccm, and adjust the vacuuming speed to put the plasma-enhanced chemical vapor deposition in the vacuum device. The pressure is controlled at 190Pa~210Pa, and the temperature is raised to 500℃~700℃ within 40min under the pressure of 190Pa~210Pa and hydrogen atmosphere, and the temperature is kept at 500℃~700℃ for 25min~35min;
二、通入氩气和碳源气体,调节氢气的气体流量为40sccm、氩气气体流量为80sccm、碳源气体的气体流量为1sccm~8sccm,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为800Pa~1000Pa,然后在沉积系统射频电源频率为13.56MHz、射频功率为190W~210W、压强为800Pa~1000Pa和温度为500℃~700℃条件下进行沉积,沉积时间为10s~300s,沉积结束后,关闭射频电源和加热电源,停止通入碳源气体,继续以氢气的气体流量为40sccm、氩气气体流量为80sccm通入氢气和氩气,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为150Pa~200Pa,在压强为150Pa~200Pa和氢气及氩气气氛下从温度为500℃~700℃冷却至室温,即得到石墨烯/铜复合粉末;2. Introduce argon and carbon source gas, adjust the gas flow of hydrogen to 40 sccm, argon gas to 80 sccm, and carbon source gas to 1 sccm to 8 sccm, and adjust the vacuuming speed to vacuum the plasma-enhanced chemical vapor deposition The pressure in the device is controlled at 800Pa to 1000Pa, and then the deposition is carried out under the conditions of the deposition system RF power frequency of 13.56MHz, RF power of 190W to 210W, pressure of 800Pa to 1000Pa and temperature of 500°C to 700°C, and the deposition time is 10s to 300s, after the deposition is over, turn off the radio frequency power supply and the heating power supply, stop feeding the carbon source gas, continue to feed hydrogen and argon with the gas flow rate of hydrogen at 40 sccm and the gas flow of argon at 80 sccm, and adjust the vacuuming speed to draw the plasma The pressure in the enhanced chemical vapor deposition vacuum device is controlled at 150Pa to 200Pa, and the graphene/copper composite powder is obtained by cooling from a temperature of 500°C to 700°C to room temperature under a pressure of 150Pa to 200Pa and an atmosphere of hydrogen and argon;
三、将金属粉末或合金粉末与步骤二制备的石墨烯/铜复合粉末放入球磨机中,进行研磨并搅拌至粉体混合均匀,即得到石墨烯增强铜基复合钎料。3. Put the metal powder or alloy powder and the graphene/copper composite powder prepared in
本发明的有益效果是:1、本发明利用等离子增强化学气相沉积法(PECVD),通过射频作用可以将碳源(CH4)非常快速的分解成具有相高活性的碳基团,经过金属催化剂的催化反应就可以短时间的在金属表面生长出石墨烯。即可实现低温有效的在Cu粉表面生长出石墨烯。The beneficial effects of the present invention are: 1. The present invention utilizes plasma-enhanced chemical vapor deposition (PECVD) to decompose the carbon source (CH 4 ) very quickly into highly active carbon groups through the action of radio frequency. The catalytic reaction can grow graphene on the metal surface in a short time. It can realize the effective growth of graphene on the surface of Cu powder at low temperature.
2、本发明利用等离子增强射频作用,不仅避免了高温热解碳源气体,而且也大幅度提高碳源气体(CH4)的分解效率,即通入少量的碳源气体(CH4)也会产生大量的活性碳基团,从而有效降低了制备温度、提高了制备效率。2. The present invention utilizes plasma to enhance the effect of radio frequency, which not only avoids high-temperature pyrolysis of carbon source gas, but also greatly improves the decomposition efficiency of carbon source gas (CH 4 ), that is, feeding a small amount of carbon source gas (CH 4 ) will also A large number of active carbon groups are generated, thereby effectively reducing the preparation temperature and improving the preparation efficiency.
3、本发明的方法简单,高效,低成本,便于工业化生产,制备出的石墨烯增强铜基复合钎料中石墨烯的质量高且均匀分散,可以有效提高铜基复合钎料的性能。3. The method of the present invention is simple, efficient, low-cost, and convenient for industrial production. The graphene in the prepared graphene-enhanced copper-based composite solder has high quality and uniform dispersion, and can effectively improve the performance of the copper-based composite solder.
本发明用于一种低温高效制备石墨烯增强铜基复合钎料的方法。The invention is used for a low-temperature and high-efficiency method for preparing graphene-reinforced copper-based composite solder.
附图说明Description of drawings
图1为实施例一中石墨烯/铜复合粉末的拉曼光谱图;1为D峰;2为G峰;3为2D峰;Fig. 1 is the Raman spectrogram of graphene/copper composite powder in embodiment one; 1 is D peak; 2 is G peak; 3 is 2D peak;
图2为实施例一中石墨烯转移到SiO2/Si基底的光学显微镜图;Fig. 2 is the optical microscope picture that graphene is transferred to SiO 2 /Si substrate in embodiment one;
图3为实施例一中石墨烯转移到SiO2/Si基底的拉曼光谱图;1为D峰;2为G峰;3为2D峰。3 is a Raman spectrum of graphene transferred to SiO 2 /Si substrate in Example 1; 1 is D peak; 2 is G peak; 3 is 2D peak.
具体实施方式Detailed ways
本发明技术方案不局限于以下所列举的具体实施方式,还包括各具体实施方式之间的任意组合。The technical solution of the present invention is not limited to the specific embodiments listed below, but also includes any combination of the specific embodiments.
具体实施方式一:本实施方式所述的一种低温高效制备石墨烯增强铜基复合钎料的方法,具体是按照以下步骤进行的:Specific embodiment one: a kind of low-temperature high-efficiency method for preparing graphene-reinforced copper-based composite solder described in this embodiment is specifically carried out according to the following steps:
一、将铜粉置于等离子体增强化学气相沉积真空装置中,抽真空至压强为5Pa以下,以气体流量为18sccm~22sccm通入氢气,调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为190Pa~210Pa,并在压强为190Pa~210Pa和氢气气氛下40min内将温度升温至为500℃~700℃,并在温度为500℃~700℃下保温25min~35min;1. Put the copper powder in the plasma-enhanced chemical vapor deposition vacuum device, evacuate until the pressure is below 5Pa, feed hydrogen gas with a gas flow rate of 18sccm-22sccm, and adjust the vacuuming speed to put the plasma-enhanced chemical vapor deposition in the vacuum device. The pressure is controlled at 190Pa~210Pa, and the temperature is raised to 500℃~700℃ within 40min under the pressure of 190Pa~210Pa and hydrogen atmosphere, and the temperature is kept at 500℃~700℃ for 25min~35min;
二、通入氩气和碳源气体,调节氢气的气体流量为40sccm、氩气气体流量为80sccm、碳源气体的气体流量为1sccm~8sccm,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为800Pa~1000Pa,然后在沉积系统射频电源频率为13.56MHz、射频功率为190W~210W、压强为800Pa~1000Pa和温度为500℃~700℃条件下进行沉积,沉积时间为10s~300s,沉积结束后,关闭射频电源和加热电源,停止通入碳源气体,继续以氢气的气体流量为40sccm、氩气气体流量为80sccm通入氢气和氩气,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为150Pa~200Pa,在压强为150Pa~200Pa和氢气及氩气气氛下从温度为500℃~700℃冷却至室温,即得到石墨烯/铜复合粉末;2. Introduce argon and carbon source gas, adjust the gas flow of hydrogen to 40 sccm, argon gas to 80 sccm, and carbon source gas to 1 sccm to 8 sccm, and adjust the vacuuming speed to vacuum the plasma-enhanced chemical vapor deposition The pressure in the device is controlled at 800Pa to 1000Pa, and then the deposition is carried out under the conditions of the deposition system RF power frequency of 13.56MHz, RF power of 190W to 210W, pressure of 800Pa to 1000Pa and temperature of 500°C to 700°C, and the deposition time is 10s to 300s, after the deposition is over, turn off the radio frequency power supply and the heating power supply, stop feeding the carbon source gas, continue to feed hydrogen and argon with the gas flow rate of hydrogen at 40 sccm and the gas flow of argon at 80 sccm, and adjust the vacuuming speed to draw the plasma The pressure in the enhanced chemical vapor deposition vacuum device is controlled at 150Pa to 200Pa, and the graphene/copper composite powder is obtained by cooling from a temperature of 500°C to 700°C to room temperature under a pressure of 150Pa to 200Pa and an atmosphere of hydrogen and argon;
三、将金属粉末或合金粉末与步骤二制备的石墨烯/铜复合粉末放入球磨机中,进行研磨并搅拌至粉体混合均匀,即得到石墨烯增强铜基复合钎料。3. Put the metal powder or alloy powder and the graphene/copper composite powder prepared in
本实施方式中的所涉及到的低温高效制备石墨烯增强铜基复合钎料的基本原理:利用等离子增强化学气相沉积法(PECVD),通过射频作用可以将碳源(CH4)非常快速的分解成碳基团,这些碳基团有非常高的活性,经过金属催化剂的催化反应就可以短时间的在金属表面生长出石墨烯。另外由于射频作用,不仅避免了高温热解碳源气体,而且也大幅度提高碳源气体(CH4)的分解效率,即通入少量的碳源气体(CH4)也会产生大量的活性碳基团,从而有效降低了制备温度、提高了制备效率。本发明所选用铜作为基体,由于碳原子在铜中的溶解度相对较低,故可以通过碳原子吸附自限制的方式生长石墨烯,此种方式形成的石墨烯不仅质量高,而且分散性好。应用这种方法制备的石墨烯增强铜粉末来制作铜基复合钎料,可使复合钎料获得一系列优秀的性质。The basic principle of low-temperature and high-efficiency preparation of graphene-reinforced copper-based composite solder involved in this embodiment: using plasma-enhanced chemical vapor deposition (PECVD), the carbon source (CH 4 ) can be decomposed very quickly by radio frequency These carbon groups have very high activity, and graphene can be grown on the metal surface in a short time after the catalytic reaction of the metal catalyst. In addition, due to the effect of radio frequency, it not only avoids high-temperature pyrolysis of carbon source gas, but also greatly improves the decomposition efficiency of carbon source gas (CH 4 ), that is, a small amount of carbon source gas (CH 4 ) will also produce a large amount of activated carbon. group, thereby effectively reducing the preparation temperature and improving the preparation efficiency. In the present invention, copper is selected as the substrate. Since the solubility of carbon atoms in copper is relatively low, graphene can be grown in a self-limited manner by carbon atom adsorption. The graphene formed in this manner is not only of high quality, but also has good dispersibility. Applying the graphene-reinforced copper powder prepared by this method to make copper-based composite solder can make the composite solder obtain a series of excellent properties.
本实施方式的有益效果是:1、本实施方式利用等离子增强化学气相沉积法(PECVD),通过射频作用可以将碳源(CH4)非常快速的分解成具有相高活性的碳基团,经过金属催化剂的催化反应就可以短时间的在金属表面生长出石墨烯。即可实现低温有效的在Cu粉表面生长出石墨烯。The beneficial effects of this embodiment are: 1. This embodiment utilizes plasma-enhanced chemical vapor deposition (PECVD) to decompose carbon source (CH 4 ) very quickly into highly active carbon groups through radio frequency. The catalytic reaction of the metal catalyst can grow graphene on the metal surface in a short time. It can realize the effective growth of graphene on the surface of Cu powder at low temperature.
2、本实施方式利用等离子增强射频作用,不仅避免了高温热解碳源气体,而且也大幅度提高碳源气体(CH4)的分解效率,即通入少量的碳源气体(CH4)也会产生大量的活性碳基团,从而有效降低了制备温度、提高了制备效率。2. This embodiment utilizes plasma-enhanced radio frequency to not only avoid high-temperature pyrolysis of carbon source gas, but also greatly improve the decomposition efficiency of carbon source gas (CH 4 ), that is, introducing a small amount of carbon source gas (CH 4 ) also A large number of active carbon groups will be produced, thereby effectively reducing the preparation temperature and improving the preparation efficiency.
3、本实施方式的方法简单,高效,低成本,便于工业化生产,制备出的石墨烯增强铜基复合钎料中石墨烯的质量高且均匀分散,可以有效提高铜基复合钎料的性能。3. The method of this embodiment is simple, efficient, low-cost, and convenient for industrial production. The graphene in the prepared graphene-reinforced copper-based composite solder has high quality and uniform dispersion, which can effectively improve the performance of the copper-based composite solder.
具体实施方式二:本实施方式与具体实施方式一不同的是:步骤一中所述的铜粉纯度为99%~99.99%,颗粒直径为100nm~100μm。其它与具体实施方式一相同。Embodiment 2: This embodiment differs from
具体实施方式三:本实施方式与具体实施方式一或二之一不同的是:步骤二中所述的碳源气体为甲烷。其它与具体实施方式一或二相同。Embodiment 3: This embodiment differs from
具体实施方式四:本实施方式与具体实施方式一至三之一不同的是:步骤三中所述的金属粉末纯度为99%~99.99%,颗粒直径为100nm~100μm;所述的合金粉末纯度为99%~99.99%,颗粒直径为100nm~100μm。其它与具体实施方式一至三相同。Embodiment 4: This embodiment differs from
具体实施方式五:本实施方式与具体实施方式一至四之一不同的是:步骤三中所述的金属粉末为Sn粉末、Ag粉末、P粉末或Mn粉末。其它与具体实施方式一至四相同。Embodiment 5: This embodiment differs from
具体实施方式六:本实施方式与具体实施方式一至五之一不同的是:步骤三中所述的合金粉末为Sn-Ag粉末或Ag-Zn粉末。其它与具体实施方式一至五相同。Embodiment 6: This embodiment differs from
采用以下实施例验证本发明的有益效果:Adopt the following examples to verify the beneficial effects of the present invention:
实施例一:Embodiment one:
本实施例所述的一种低温高效制备石墨烯增强铜基复合钎料的方法,具体是按照以下步骤进行的:A kind of low-temperature and high-efficiency method for preparing graphene-reinforced copper-based composite solder described in this embodiment is specifically carried out according to the following steps:
一、将铜粉置于等离子体增强化学气相沉积真空装置中,抽真空至压强为5Pa以下,以气体流量为20sccm通入氢气,调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为200Pa,并在压强为200Pa和氢气气氛下40min内将温度升温至为600℃,并在温度为600℃下保温30min;1. Put the copper powder in the plasma-enhanced chemical vapor deposition vacuum device, evacuate until the pressure is below 5Pa, feed hydrogen gas with a gas flow rate of 20 sccm, adjust the vacuuming speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device 200Pa, and the temperature is raised to 600°C within 40min under the pressure of 200Pa and hydrogen atmosphere, and the temperature is kept at 600°C for 30min;
二、通入氩气和CH4,调节氢气气体流量为40sccm、氩气气体流量为80sccm及CH4气体流量为2sccm,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为1000Pa,然后在沉积系统射频电源频率为13.56MHz、射频功率为200W、压强为1000Pa和温度为600℃条件下进行沉积,沉积时间为60s,沉积结束后,关闭射频电源和加热电源,停止通入碳源气体,继续以氢气气体流量为40sccm及氩气气体流量为80sccm通入氩气和氢气,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为200Pa,在压强为200Pa和氢气及氩气气氛下从温度为600℃冷却至室温,即得到石墨烯/铜复合粉末;2. Introduce argon and CH 4 , adjust the flow rate of hydrogen gas to 40 sccm, the flow rate of argon gas to 80 sccm and the gas flow rate of CH 4 to 2 sccm, and adjust the vacuum speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device to 1000Pa , and then deposited under the conditions of RF power frequency of 13.56MHz, RF power of 200W, pressure of 1000Pa and temperature of 600°C, the deposition time was 60s. After the deposition, the RF power and heating power were turned off, and the carbon Source gas, continue to pass into argon and hydrogen with the hydrogen gas flow rate of 40 sccm and the argon gas flow rate of 80 sccm, and adjust the vacuum speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device to 200Pa, when the pressure is 200Pa and hydrogen and cooling from a temperature of 600°C to room temperature under an argon atmosphere to obtain a graphene/copper composite powder;
三、将金属Sn粉末与步骤二制备的石墨烯/铜复合粉末放入球磨机中,进行研磨并搅拌45min至粉体混合均匀,即得到石墨烯增强铜基复合钎料。3. Put the metal Sn powder and the graphene/copper composite powder prepared in
步骤一中所述的铜粉纯度为99.9%~99.95%,颗粒直径为300目。The copper powder described in
步骤三中所述的金属Sn粉末纯度为99.95%,颗粒直径为300目。The metal Sn powder described in step three has a purity of 99.95% and a particle diameter of 300 mesh.
实施例一中制备出的石墨烯/铜复合粉末的拉曼光谱图如图1所示,1为D峰;2为G峰;3为2D峰;激光波长为488nm;由图可知说明获得的材料质量好;The Raman spectrogram of the graphene/copper composite powder prepared in embodiment one is as shown in Figure 1, and 1 is D peak; 2 is G peak; 3 is 2D peak; Good material quality;
对于石墨烯的光学显微镜观测只能将石墨烯转移到SiO2/Si基体上,石墨烯转移到SiO2/Si基底的光学显微镜图如2所述,石墨烯转移到SiO2/Si基底的拉曼光谱图如图3所述,1为D峰;2为G峰;3为2D峰;可知转移之后没有明显的质量缺陷,尺寸均一,转移之前也没有,方便转移也是PECVD法的优势之一。The optical microscope observation of graphene can only transfer graphene to SiO 2 /Si substrate. The optical microscope image of graphene transferred to SiO 2 /Si substrate is as described in 2. As shown in Figure 3, 1 is the D peak; 2 is the G peak; 3 is the 2D peak; it can be seen that there is no obvious quality defect after the transfer, the size is uniform, and there is no before the transfer. Convenient transfer is also one of the advantages of the PECVD method .
制备出的石墨烯增强铜基复合钎料中石墨烯的质量高且均匀分散,可以有效提高铜基复合钎料的性能。The graphene in the prepared graphene-reinforced copper-based composite solder has high quality and uniform dispersion, which can effectively improve the performance of the copper-based composite solder.
实施例二:Embodiment two:
本实施例所述的一种低温高效制备石墨烯增强铜基复合钎料的方法,具体是按照以下步骤进行的:A kind of low-temperature and high-efficiency method for preparing graphene-reinforced copper-based composite solder described in this embodiment is specifically carried out according to the following steps:
一、将铜粉置于等离子体增强化学气相沉积真空装置中,抽真空至压强为5Pa以下,以气体流量为20sccm通入氢气,调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为200Pa,并在压强为200Pa和氢气气氛下40min内将温度升温至为500℃,并在温度为500℃下保温30min;1. Put the copper powder in the plasma-enhanced chemical vapor deposition vacuum device, evacuate until the pressure is below 5Pa, feed hydrogen gas with a gas flow rate of 20 sccm, adjust the vacuuming speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device 200Pa, and the temperature is raised to 500°C within 40min under the pressure of 200Pa and hydrogen atmosphere, and the temperature is kept at 500°C for 30min;
二、通入氩气和CH4,调节氢气气体流量为40sccm、氩气气体流量为80sccm及CH4气体流量为2sccm,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为1000Pa,然后在沉积系统射频电源频率为13.56MHz、射频功率为200W、压强为1000Pa和温度为500℃条件下进行沉积,沉积时间为90s,沉积结束后,关闭射频电源和加热电源,停止通入碳源气体,继续以氢气气体流量为40sccm及氩气气体流量为80sccm通入氩气和氢气,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为200Pa,在压强为200Pa和氢气及氩气气氛下从温度为500℃冷却至室温,即得到石墨烯/铜复合粉末;2. Introduce argon and CH 4 , adjust the flow rate of hydrogen gas to 40 sccm, the flow rate of argon gas to 80 sccm and the gas flow rate of CH 4 to 2 sccm, and adjust the vacuum speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device to 1000Pa , and then deposited under the conditions of RF power frequency of 13.56MHz, RF power of 200W, pressure of 1000Pa, and temperature of 500°C. The deposition time was 90s. After the deposition, the RF power and heating power were turned off, and the introduction of carbon Source gas, continue to pass into argon and hydrogen with the hydrogen gas flow rate of 40 sccm and the argon gas flow rate of 80 sccm, and adjust the vacuum speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device to 200Pa, when the pressure is 200Pa and hydrogen and cooling from a temperature of 500°C to room temperature under an argon atmosphere to obtain a graphene/copper composite powder;
三、将金属Sn粉末与步骤二制备的石墨烯/铜复合粉末放入球磨机中,进行研磨并搅拌45min至粉体混合均匀,即得到石墨烯增强铜基复合钎料。3. Put the metal Sn powder and the graphene/copper composite powder prepared in
步骤一中所述的铜粉纯度为99.9%~99.95%,颗粒直径为300目。The copper powder described in
步骤三中所述的金属Sn粉末纯度为99.95%,颗粒直径为300目。The metal Sn powder described in step three has a purity of 99.95% and a particle diameter of 300 mesh.
本实施例制备出的石墨烯/铜复合粉末中石墨烯尺寸均一,缺陷很少,石墨烯大部分为1-3层。The graphene in the graphene/copper composite powder prepared in this embodiment is uniform in size, has few defects, and most of the graphene is 1-3 layers.
制备出的石墨烯增强铜基复合钎料中石墨烯的质量高且均匀分散,可以有效提高铜基复合钎料的性能。The graphene in the prepared graphene-reinforced copper-based composite solder has high quality and uniform dispersion, which can effectively improve the performance of the copper-based composite solder.
实施例三:Embodiment three:
本实施例所述的一种低温高效制备石墨烯增强铜基复合钎料的方法,具体是按照以下步骤进行的:A kind of low-temperature and high-efficiency method for preparing graphene-reinforced copper-based composite solder described in this embodiment is specifically carried out according to the following steps:
一、将铜粉置于等离子体增强化学气相沉积真空装置中,抽真空至压强为5Pa以下,以气体流量为20sccm通入氢气,调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为200Pa,并在压强为200Pa和氢气气氛下40min内将温度升温至为600℃,并在温度为600℃下保温30min;1. Put the copper powder in the plasma-enhanced chemical vapor deposition vacuum device, evacuate until the pressure is below 5Pa, feed hydrogen gas with a gas flow rate of 20 sccm, adjust the vacuuming speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device 200Pa, and the temperature is raised to 600°C within 40min under the pressure of 200Pa and hydrogen atmosphere, and the temperature is kept at 600°C for 30min;
二、通入氩气和CH4,调节氢气气体流量为40sccm、氩气气体流量为80sccm及CH4气体流量为8sccm,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为1000Pa,然后在沉积系统射频电源频率为13.56MHz、射频功率为200W、压强为1000Pa和温度为600℃条件下进行沉积,沉积时间为10s,沉积结束后,关闭射频电源和加热电源,停止通入碳源气体,继续以氢气气体流量为40sccm及氩气气体流量为80sccm通入氩气和氢气,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为200Pa,在压强为200Pa和氢气及氩气气氛下从温度为600℃冷却至室温,即得到石墨烯/铜复合粉末;2. Introduce argon and CH 4 , adjust the flow rate of hydrogen gas to 40 sccm, the flow rate of argon gas to 80 sccm and the gas flow rate of CH 4 to 8 sccm, and adjust the vacuuming speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device to 1000Pa , and then deposited under the conditions of RF power frequency of 13.56MHz, RF power of 200W, pressure of 1000Pa and temperature of 600°C, the deposition time was 10s. After the deposition, the RF power and heating power were turned off, and the carbon Source gas, continue to pass into argon and hydrogen with the hydrogen gas flow rate of 40 sccm and the argon gas flow rate of 80 sccm, and adjust the vacuum speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device to 200Pa, when the pressure is 200Pa and hydrogen and cooling from a temperature of 600°C to room temperature under an argon atmosphere to obtain a graphene/copper composite powder;
三、将金属Sn粉末与步骤二制备的石墨烯/铜复合粉末放入球磨机中,进行研磨并搅拌45min至粉体混合均匀,即得到石墨烯增强铜基复合钎料。3. Put the metal Sn powder and the graphene/copper composite powder prepared in
步骤一中所述的铜粉纯度为99.9%~99.95%,颗粒直径为300目。The copper powder described in
步骤三中所述的金属Sn粉末纯度为99.95%,颗粒直径为300目。The metal Sn powder described in step three has a purity of 99.95% and a particle diameter of 300 mesh.
本实施例制备出的石墨烯/铜复合粉末中石墨烯尺寸均一,缺陷很少,石墨烯大部分为1-3层。The graphene in the graphene/copper composite powder prepared in this embodiment is uniform in size, has few defects, and most of the graphene is 1-3 layers.
制备出的石墨烯增强铜基复合钎料中石墨烯的质量高且均匀分散,可以有效提高铜基复合钎料的性能。The graphene in the prepared graphene-reinforced copper-based composite solder has high quality and uniform dispersion, which can effectively improve the performance of the copper-based composite solder.
实施例四:Embodiment four:
本实施例所述的一种低温高效制备石墨烯增强铜基复合钎料的方法,具体是按照以下步骤进行的:A kind of low-temperature and high-efficiency method for preparing graphene-reinforced copper-based composite solder described in this embodiment is specifically carried out according to the following steps:
一、将铜粉置于等离子体增强化学气相沉积真空装置中,抽真空至压强为5Pa以下,以气体流量为20sccm通入氢气,调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为200Pa,并在压强为200Pa和氢气气氛下40min内将温度升温至为600℃,并在温度为600℃下保温30min;1. Put the copper powder in the plasma-enhanced chemical vapor deposition vacuum device, evacuate until the pressure is below 5Pa, feed hydrogen gas with a gas flow rate of 20 sccm, adjust the vacuuming speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device 200Pa, and the temperature is raised to 600°C within 40min under the pressure of 200Pa and hydrogen atmosphere, and the temperature is kept at 600°C for 30min;
二、通入氩气和CH4,调节氢气气体流量为40sccm、氩气气体流量为80sccm及CH4气体流量为8sccm,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为1000Pa,然后在沉积系统射频电源频率为13.56MHz、射频功率为200W、压强为1000Pa和温度为600℃条件下进行沉积,沉积时间为30s,沉积结束后,关闭射频电源和加热电源,停止通入碳源气体,继续以氢气气体流量为40sccm及氩气气体流量为80sccm通入氩气和氢气,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为200Pa,在压强为200Pa和氢气及氩气气氛下从温度为600℃冷却至室温,即得到石墨烯/铜复合粉末;2. Introduce argon and CH 4 , adjust the flow rate of hydrogen gas to 40 sccm, the flow rate of argon gas to 80 sccm and the gas flow rate of CH 4 to 8 sccm, and adjust the vacuuming speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device to 1000Pa , and then deposited under the condition of RF power frequency of 13.56MHz, RF power of 200W, pressure of 1000Pa and temperature of 600°C, the deposition time was 30s. After the deposition, the RF power and heating power were turned off, and the carbon Source gas, continue to pass into argon and hydrogen with the hydrogen gas flow rate of 40 sccm and the argon gas flow rate of 80 sccm, and adjust the vacuum speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device to 200Pa, when the pressure is 200Pa and hydrogen and cooling from a temperature of 600°C to room temperature under an argon atmosphere to obtain a graphene/copper composite powder;
三、将金属Ag粉末与步骤二制备的石墨烯/铜复合粉末放入球磨机中,进行研磨并搅拌45min至粉体混合均匀,即得到石墨烯增强铜基复合钎料。3. Put the metal Ag powder and the graphene/copper composite powder prepared in
步骤一中所述的铜粉纯度为99.9%~99.95%,颗粒直径为300目。The copper powder described in
步骤三中所述的金属Ag粉末纯度为99.95%,颗粒直径为300目。The metal Ag powder described in
本实施例中制备出的石墨烯/铜复合粉末中石墨烯尺寸均一,缺陷较少,石墨烯大部分为3-5层。The graphene in the graphene/copper composite powder prepared in this example is uniform in size, has few defects, and most of the graphene has 3-5 layers.
制备出的石墨烯增强铜基复合钎料中石墨烯的质量高且均匀分散,可以有效提高铜基复合钎料的性能。The graphene in the prepared graphene-reinforced copper-based composite solder has high quality and uniform dispersion, which can effectively improve the performance of the copper-based composite solder.
实施例五:Embodiment five:
本实施例所述的一种低温高效制备石墨烯增强铜基复合钎料的方法,具体是按照以下步骤进行的:A kind of low-temperature and high-efficiency method for preparing graphene-reinforced copper-based composite solder described in this embodiment is specifically carried out according to the following steps:
一、将铜粉置于等离子体增强化学气相沉积真空装置中,抽真空至压强为5Pa以下,以气体流量为20sccm通入氢气,调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为200Pa,并在压强为200Pa和氢气气氛下40min内将温度升温至为700℃,并在温度为700℃下保温30min;1. Put the copper powder in the plasma-enhanced chemical vapor deposition vacuum device, evacuate until the pressure is below 5Pa, feed hydrogen gas with a gas flow rate of 20 sccm, adjust the vacuuming speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device 200Pa, and the temperature is raised to 700°C within 40min under the pressure of 200Pa and hydrogen atmosphere, and the temperature is kept at 700°C for 30min;
二、通入氩气和CH4,调节氢气气体流量为40sccm、氩气气体流量为80sccm及CH4气体流量为8sccm,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为1000Pa,然后在沉积系统射频电源频率为13.56MHz、射频功率为200W、压强为1000Pa和温度为700℃条件下进行沉积,沉积时间为30s,沉积结束后,关闭射频电源和加热电源,停止通入碳源气体,继续以氢气气体流量为40sccm及氩气气体流量为80sccm通入氩气和氢气,并调节抽真空速度将等离子体增强化学气相沉积真空装置中压强控制为200Pa,在压强为200Pa和氢气及氩气气氛下从温度为700℃冷却至室温,即得到石墨烯/铜复合粉末;2. Introduce argon and CH 4 , adjust the flow rate of hydrogen gas to 40 sccm, the flow rate of argon gas to 80 sccm and the gas flow rate of CH 4 to 8 sccm, and adjust the vacuuming speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device to 1000Pa , and then deposited under the conditions of RF power frequency of 13.56MHz, RF power of 200W, pressure of 1000Pa and temperature of 700°C. The deposition time was 30s. After the deposition, the RF power and heating power were turned off, and the carbon Source gas, continue to pass into argon and hydrogen with the hydrogen gas flow rate of 40 sccm and the argon gas flow rate of 80 sccm, and adjust the vacuum speed to control the pressure in the plasma-enhanced chemical vapor deposition vacuum device to 200Pa, when the pressure is 200Pa and hydrogen and cooling from a temperature of 700°C to room temperature under an argon atmosphere to obtain a graphene/copper composite powder;
三、将金属Ag粉末与步骤二制备的石墨烯/铜复合粉末放入球磨机中,进行研磨并搅拌45min至粉体混合均匀,即得到石墨烯增强铜基复合钎料。3. Put the metal Ag powder and the graphene/copper composite powder prepared in
步骤一中所述的铜粉纯度为99.9%~99.95%,颗粒直径为300目。The copper powder described in
步骤三中所述的金属Ag粉末纯度为99.95%,颗粒直径为300目。The metal Ag powder described in
本实施例制备出的石墨烯/铜复合粉末中石墨烯尺寸均一,缺陷少,石墨烯大部分为3层以上。The graphene in the graphene/copper composite powder prepared in this embodiment is uniform in size, has few defects, and most of the graphene has more than 3 layers.
制备出的石墨烯增强铜基复合钎料中石墨烯的质量高且均匀分散,可以有效提高铜基复合钎料的性能。The graphene in the prepared graphene-reinforced copper-based composite solder has high quality and uniform dispersion, which can effectively improve the performance of the copper-based composite solder.
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