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CN103503253B - Optical communication lenses and semiconductor modules - Google Patents

Optical communication lenses and semiconductor modules Download PDF

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Publication number
CN103503253B
CN103503253B CN201280013685.2A CN201280013685A CN103503253B CN 103503253 B CN103503253 B CN 103503253B CN 201280013685 A CN201280013685 A CN 201280013685A CN 103503253 B CN103503253 B CN 103503253B
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lens
optical
path difference
optical path
communication according
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CN103503253A (en
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三森满
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Konica Minolta Inc
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1876Diffractive Fresnel lenses; Zone plates; Kinoforms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1866Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/125Optical beam sources therefor, e.g. laser control circuitry specially adapted for optical storage devices; Modulators, e.g. means for controlling the size or intensity of optical spots or optical traces
    • G11B7/127Lasers; Multiple laser arrays
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1353Diffractive elements, e.g. holograms or gratings
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1365Separate or integrated refractive elements, e.g. wave plates
    • G11B7/1367Stepped phase plates
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372Lenses
    • G11B7/1374Objective lenses
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372Lenses
    • G11B7/1376Collimator lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/02208Mountings; Housings characterised by the shape of the housings
    • H01S5/02212Can-type, e.g. TO-CAN housings with emission along or parallel to symmetry axis
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0225Out-coupling of light
    • H01S5/02253Out-coupling of light using lenses

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Lenses (AREA)

Abstract

Provided are a lens for optical communication and a semiconductor module using the same, wherein the semiconductor module is provided in a compact module, and variation in coupling efficiency can be suppressed by further suppressing the effective NA to a small value. Since the diffraction structure DS is provided only on one surface OF the optical coupling lens CL, the diffraction pitch is narrowed as a whole, and at the point where the optical coupling lens section CL converges on the end surface OF the optical fiber OF, the light quantity at the peripheral portion becomes lower than the light quantity passing through the vicinity OF the optical axis OF the lens, so that the point becomes thick and the effective NA increases. This reduces the variation in coupling efficiency when a temperature change occurs.

Description

光通信用的透镜以及半导体模块Optical communication lenses and semiconductor modules

技术领域 technical field

本发明涉及在光通信等中使用,例如将半导体激光器的激光与光纤进行耦合的光通信用的透镜以及半导体模块。 The present invention relates to an optical communication lens and a semiconductor module for coupling laser light from a semiconductor laser to an optical fiber, which are used in optical communication or the like.

背景技术 Background technique

在光通信等中,要求半导体激光器或者受光元件和光纤进行高效率地耦合。因此,为了聚光来自半导体激光器的光束而使用光耦合透镜。但是,在以往的光耦合透镜中主要使用玻璃透镜,但具有非球面的玻璃透镜一般价格高,存在引起成本高的问题。因而,开发了高精度的非球面的成形容易并且可以大量生产的塑料制的光耦合透镜。可是,存在塑料和玻璃相比热膨胀系数大,另外塑料材质的折射率因温度而发生变化的问题。因此,如果使用塑料透镜,则当把半导体激光器和透镜间距离固定的情况下,因为与环境温度的变化相应地焦点距离即光纤方向的成像位置发生变化,所以耦合效率降低。对此,还考虑了使用让透镜在光轴方向移动的作动器,可是还存在因可动部的增大引起成本增加,以及如何供电的问题。 In optical communication and the like, efficient coupling between a semiconductor laser or a light receiving element and an optical fiber is required. Therefore, an optical coupling lens is used to condense the light beam from the semiconductor laser. However, glass lenses are mainly used in conventional optical coupling lenses, but glass lenses having aspherical surfaces are generally expensive, causing a problem of high cost. Therefore, an optical coupling lens made of plastic that is easy to form a high-precision aspheric surface and can be mass-produced has been developed. However, plastic has a larger coefficient of thermal expansion than glass, and there is a problem that the refractive index of the plastic material changes with temperature. Therefore, if a plastic lens is used, when the distance between the semiconductor laser and the lens is fixed, the coupling efficiency decreases because the focal distance, that is, the imaging position in the fiber direction changes according to changes in the ambient temperature. In this regard, the use of an actuator that moves the lens in the direction of the optical axis is also considered, but there are still problems in the increase in cost due to the increase in the size of the movable part, and how to supply power.

对此,在专利文献1中公开了在塑料透镜的两面设置衍射构造的光通信用的半导体模块。根据专利文献1的技术,通过在塑料透镜的两面设置衍射构造,能够抑制衍射间距变得过小的现象,容易进行透镜的成形。 In contrast, Patent Document 1 discloses a semiconductor module for optical communication in which a diffraction structure is provided on both surfaces of a plastic lens. According to the technique of Patent Document 1, by providing a diffraction structure on both surfaces of a plastic lens, it is possible to suppress the phenomenon that the diffraction pitch becomes too small, and to facilitate lens molding.

另外,在专利文献2中,实现通过在塑料透镜的一面设置浮凸型的衍射构造,在抑制从透镜中心部到周边部的衍射效率的分布的同时,抑制由温度引起的焦点位置变动。 In addition, in Patent Document 2, by providing an embossed diffraction structure on one surface of a plastic lens, it is realized that the distribution of diffraction efficiency from the center to the periphery of the lens is suppressed, and the focus position variation due to temperature is suppressed.

专利文献1:日本特开平11-274646号公报 Patent Document 1: Japanese Patent Application Laid-Open No. 11-274646

专利文献2:国际公开第00/17691号小册子 Patent Document 2: International Publication No. 00/17691 Pamphlet

可是,在专利文献1的透镜中的1个问题是,在2面使用衍射构造的结果,各自的面的衍射形状的误差累积地具有影响,发生不需要的衍射光等,反而容易出现制造误差,是不理想的。另外专利文献2中的透镜的问题是,因为具有浮凸形状的衍射构造,所以衍射效率低,因此对光纤的耦合效率也变低,并且多发生不需要的衍射光,因为产生用针孔等遮挡不需要的光束的需求,所以在使用上不理想。 However, one of the problems with the lens of Patent Document 1 is that, as a result of using a diffractive structure on two surfaces, the errors in the diffraction shapes of the respective surfaces have an cumulative effect, and unnecessary diffracted light and the like are generated, and manufacturing errors tend to occur on the contrary. , is not ideal. In addition, the problem of the lens in Patent Document 2 is that since it has an embossed diffraction structure, the diffraction efficiency is low, so the coupling efficiency to the optical fiber is also low, and unnecessary diffracted light often occurs, because pinholes, etc. The need to block unwanted beams is not ideal for use.

发明内容 Contents of the invention

本发明就是鉴于上述这样的问题而提出的,其目的在于提供一种使半导体模块成为紧凑的模块,虽然是简单的结构,但通过将温度变化等的灵敏度抑制得小而能够抑制耦合效率的变动的光通信用的透镜以及使用该透镜的半导体模块。 The present invention has been made in view of the above problems, and an object of the present invention is to provide a compact semiconductor module that can suppress fluctuations in coupling efficiency by suppressing sensitivity to temperature changes and the like in spite of a simple structure. A lens for optical communication and a semiconductor module using the lens.

技术方案1所述的光通信用的透镜是对从半导体激光器射出的波长λ的光束进行聚光的光通信用的透镜,其特征在于:上述透镜是塑料制,上述透镜只在光学面的1个面形成抑制温度变化时的焦点位置变动的光程差赋予构造,上述光程差赋予构造包含以上述透镜的光轴为中心的多个环形带,利用通过上述透镜的光轴的面切断的上述环形带的剖面形状是闪耀型形状,通过上述透镜的光束的光瞳透过率分布满足条件式(1), The lens for optical communication according to claim 1 is a lens for optical communication that condenses a beam of wavelength λ emitted from a semiconductor laser, and is characterized in that the above-mentioned lens is made of plastic, and the above-mentioned lens is only on 1 of the optical surface. Each surface forms an optical path difference imparting structure that suppresses a change in the focal point position when the temperature changes. The above-mentioned optical path difference imparting structure includes a plurality of annular zones centered on the optical axis of the above-mentioned lens, and is cut by a plane passing through the optical axis of the above-mentioned lens. The cross-sectional shape of the annular zone is a blazed shape, and the pupil transmittance distribution of the light beam passing through the above-mentioned lens satisfies the conditional expression (1),

0.5≤T1/T0≤0.85(1), 0.5≤T1/T0≤0.85 (1),

其中,T0:上述透镜的光轴附近的透过率,T1:上述透镜的周边的透过率。 Here, T0: the transmittance near the optical axis of the above-mentioned lens, and T1: the transmittance around the periphery of the above-mentioned lens.

而且,所谓“光轴附近”是在将光轴设置为0,将透镜光学面外周设置为1时,优选在0~0.05的范围内,所谓“周边”优选是在0.95~1的范围内。 The term "near the optical axis" is preferably in the range of 0 to 0.05 when the optical axis is set to 0 and the outer periphery of the lens optical surface is set to 1, and the so-called "periphery" is preferably in the range of 0.95 to 1.

本发明人专心研究的结果发现:通过使用闪耀型形状的光程差赋予构造能够提高衍射效率,另外通过只在光学面的1面设置光程差赋予构造,抑制耦合效率的变化。首先,如果闪耀型的衍射构造与在专利文献2的透镜所设置的浮凸形状的衍射构造相比,则具有不需要的衍射光少、并且能够确保更高的衍射效率的优点。即,在闪耀型形状的光程差赋予构造中,特别容易发生影子的影响、且容易通过控制环形带间的阶梯控制衍射效率。 As a result of intensive studies, the present inventors have found that the diffraction efficiency can be improved by using a blazed optical path difference providing structure, and that the change in coupling efficiency can be suppressed by providing the optical path difference providing structure on only one of the optical surfaces. First, compared with the embossed diffractive structure provided in the lens of Patent Document 2, the blazed diffractive structure has the advantage of less unnecessary diffracted light and higher diffraction efficiency. That is, in the optical path difference providing structure of the blazed shape, the influence of shadows is particularly likely to occur, and it is easy to control the diffraction efficiency by controlling the steps between the annular zones.

进而,例如在专利文献1中,为了扩大衍射间距在透镜的两面设置衍射构造。与此相对,本发明人大胆尝试了通过只在透镜的1面设置光程差赋予构造加细衍射间距。如果加细衍射间距,则如条件式(1)那样,特别是在透镜的周边部,由于与折射面的组合,光束的影子的影响增大。对该影响进行说明。 Furthermore, for example, in Patent Document 1, diffractive structures are provided on both surfaces of the lens in order to increase the diffractive pitch. On the other hand, the present inventors made a bold attempt to narrow the diffraction pitch by providing an optical path difference imparting structure only on one surface of the lens. If the diffraction pitch is narrowed, as in the conditional expression (1), especially in the peripheral portion of the lens, the influence of the shadow of the light beam increases due to the combination with the refractive surface. This influence will be described.

参照图1,在此作为光程差赋予构造以将闪耀型形状的衍射构造形成于透镜为例子进行说明。图1(a)是在半导体激光器侧设置了衍射构造的透镜的放大剖面图,图1(b)是在半导体激光器侧设置了衍射构造的透镜的放大剖面图。在图1中,环形带状的衍射构造DS具有朝向未图示的光轴(在图1中下侧)的阶梯面ST、和连结相邻的阶梯面ST的光轴方向外侧端和内侧端的斜面CP。在此,通过斜面CP的光束以透镜的折射面的折射功率和衍射构造DS的衍射功率的和来发挥全部的功率用于聚光,而通过阶梯面ST的光束未被用于聚光,引起透过率的减少。把它称为影子的影响。 Referring to FIG. 1 , an example in which a blazed diffraction structure is formed on a lens will be described as an optical path difference providing structure. FIG. 1( a ) is an enlarged cross-sectional view of a lens provided with a diffractive structure on the semiconductor laser side, and FIG. 1( b ) is an enlarged cross-sectional view of a lens provided with a diffractive structure on the semiconductor laser side. In FIG. 1 , the annular belt-shaped diffractive structure DS has a step surface ST facing the unillustrated optical axis (lower in FIG. 1 ), and a step surface ST connecting the outer end and the inner end in the optical axis direction of the adjacent step surface ST. Inclined CP. Here, the light beam passing through the inclined plane CP exerts all the power for focusing with the sum of the refractive power of the refractive surface of the lens and the diffraction power of the diffraction structure DS, while the light beam passing through the stepped surface ST is not used for light focusing, causing decrease in transmittance. Call it the shadow effect.

然而,相对于在透镜的光轴附近因为光束与光轴平行地射出,所以由影子的影响引起的光量损失小而言,在镜头的周边部因为作为母体非球面的折射面倒塌,所以相对光轴倾斜的光束容易入射,另外,还加上因模具的起模斜度的影响引起的阶梯面ST的倾斜,如图1所示,影子的影响引起的光量损失增大。在此,在聚光点上,相对于通过透镜的光轴附近的光量,如果周边的光量变低,则发生点变粗,即有效NA(数值孔径)降低。如果能够降低有效NA,则能够减小在发生了温度变化时的耦合效率的变动。即,在衍射构造中在影子效应、衍射效率的分布下,通过特意使得具有在透镜中心部和周边部的分布,可以提供耦合效率的变动小的光通信用的透镜。另外,当只由影子效应不能降低周边部的效率的情况下,通过微调整各环形带间的阶梯来调整衍射效率,可以具有因影子效应而不足的量的中心部和周边部的分布。但是,如果T1/T0的值超过(1)式的下限,则NA的降低量过大,不理想。更理想的是满足0.6≤T1/T0≤0.85。 However, compared to the vicinity of the optical axis of the lens, since the light beam is emitted parallel to the optical axis, the loss of light quantity due to the influence of the shadow is small, and the refractive surface as the parent aspheric surface collapses at the peripheral part of the lens, so relative to the light A light beam with an inclined axis is easy to enter, and in addition to the inclination of the step surface ST due to the influence of the draft of the mold, as shown in Fig. 1, the loss of light quantity due to the influence of the shadow increases. Here, at the condensing point, if the amount of light around the lens becomes lower relative to the amount of light passing through the vicinity of the optical axis of the lens, the point becomes thicker, that is, the effective NA (numerical aperture) decreases. If the effective NA can be reduced, it is possible to reduce fluctuations in coupling efficiency when temperature changes occur. That is, in the diffractive structure, under the shadow effect and the distribution of diffraction efficiency, by intentionally making the distribution in the lens center and peripheral part, it is possible to provide a lens for optical communication with little variation in coupling efficiency. In addition, when the efficiency of the peripheral portion cannot be reduced only by the shadow effect, the diffraction efficiency can be adjusted by finely adjusting the steps between the annular zones, so that the distribution of the central portion and the peripheral portion can be provided with an amount insufficient due to the shadow effect. However, if the value of T1/T0 exceeds the lower limit of the formula (1), the amount of decrease in NA is too large, which is not preferable. It is more desirable to satisfy 0.6≤T1/T0≤0.85.

技术方案2所述的光通信用的透镜在技术方案1所述的发明中,其特征在于:来自上述半导体激光器的光束入射侧的NA满足条件式(2), The lens for optical communication according to claim 2 is the invention according to claim 1, wherein the NA on the incident side of the light beam from the semiconductor laser satisfies the conditional expression (2),

0.35≤NA≤0.85(2)。 0.35≤NA≤0.85 (2).

通过满足条件式(2),能够在确保来自半导体激光器的获取光量的同时确保适宜的聚光点的直径。 By satisfying the conditional expression (2), it is possible to secure an appropriate diameter of the focused spot while ensuring the amount of light to be captured from the semiconductor laser.

技术方案3所述的光通信用的透镜在技术方案1或者2所述的发明中,其特征在于:上述光程差赋予构造具有朝向上述透镜的光轴的阶梯。是因为在这种光程差赋予构造中,能够抑制温度变化时的焦点位置、且特别容易发生影子的影响的缘故。 The lens for optical communication according to claim 3 is the invention according to claim 1 or 2, wherein the optical path difference providing structure has a step toward the optical axis of the lens. This is because in such an optical path difference providing structure, the focus position during temperature changes can be suppressed, and the influence of shadows is particularly likely to occur.

技术方案4所述的光通信用的透镜在技术方案1~3中的任意一项所述的发明中,其特征在于:上述光程差赋予构造将上述波长λ的大致整数倍的光程差赋予给通过的光束。由此在具有高的衍射效率的同时能够抑制因温度变化时的透镜折射率变化引起的焦点位置偏移。 The lens for optical communication according to Claim 4 is the invention according to any one of Claims 1 to 3, wherein the optical path difference imparting structure adjusts the optical path difference to approximately an integer multiple of the wavelength λ. Assigned to passing beams. Thereby, it is possible to suppress the shift of the focus position due to the change in the refractive index of the lens when the temperature changes while having high diffraction efficiency.

技术方案5所述的光通信用的透镜在技术方案4所述的发明中,其特征在于:上述光程差赋予构造在上述透镜的有效直径的全范围中,将上述波长λ的1倍的光程差赋予给通过的光束。通过赋予尽可能小的光程差,抑制光程差赋予构造的阶梯的高度,抑制成形误差等,由此能够提高光线透过率。 In the invention of claim 4, the optical communication lens according to claim 5 is characterized in that the optical path difference imparting structure is 1 times the wavelength λ in the entire range of the effective diameter of the lens. An optical path difference is imparted to the passing beam. By providing the optical path difference as small as possible, the height of the steps of the optical path difference providing structure is suppressed, forming errors are suppressed, and the light transmittance can be improved.

技术方案6所述的光通信用的透镜在技术方案1~5中的任意一项所述的发明中,其特征在于:上述光程差赋予构造在上述透镜的光轴附近的中央区域赋予上述波长λ的X倍的光程差,在上述透镜的中央区域的外侧的周围区域,将上述波长λ的Y倍的光程差赋予通过的光束,将X的小数点后一位四舍五入而设为整数的值比将Y的小数点后一位四舍五入而设为整数的值小。由此,能够容易进行转印间距往往变窄的周边区域的光程差赋予构造的模具的加工。 The lens for optical communication according to Claim 6 is the invention according to any one of Claims 1 to 5, wherein the optical path difference providing structure provides the above-mentioned An optical path difference of X times the wavelength λ is given to the passing light beam in the peripheral area outside the central area of the above-mentioned lens by Y times the above-mentioned wavelength λ, and the decimal place of X is rounded up to an integer The value of is less than the value that would round Y to an integer. Thereby, processing of the mold of the optical path difference providing structure in the peripheral region where the transfer pitch tends to be narrow can be easily performed.

技术方案7所述的光通信用的透镜在技术方案6所述的发明中,其特征在于:将上述X的小数点后一位四舍五入而设为整数的值是1,将上述Y的小数点后一位四舍五入而设为整数的值是2。 The lens for optical communication according to claim 7 is the invention according to claim 6, wherein the value of rounding off one digit of the decimal point of the above-mentioned X to an integer is 1, and the value of one decimal point of the above-mentioned Y is Bits are rounded to an integer value of 2.

技术方案8所述的光通信用的透镜在技术方案1~7中的任意一项所述的发明中,其特征在于:上述透镜是在光纤的端面聚光从上述半导体激光器射出的光束的光耦合透镜。 The lens for optical communication according to claim 8 is the invention according to any one of claims 1 to 7, wherein the lens condenses the light of the light beam emitted from the semiconductor laser on the end face of the optical fiber. coupling lens.

技术方案9所述的光通信用的透镜在技术方案8所述的发明中,其特征在于:上述耦合透镜的光学系统倍率M满足以下的条件式(3), The lens for optical communication according to claim 9 is the invention according to claim 8, wherein the optical system magnification M of the coupling lens satisfies the following conditional expression (3),

1.0≤M≤4.0(3)。 1.0 ≤ M ≤ 4.0 (3).

由此,可以在一般的单模光纤中可以获取的NA0.1到NA0.12左右提供最佳的效率。特别理想的是满足以下式子, Accordingly, it is possible to provide the best efficiency at about NA0.1 to NA0.12 that can be obtained in a general single-mode optical fiber. It is particularly desirable to satisfy the following formula,

2.0≤M≤4.0(3’)。 2.0≤M≤4.0 (3').

技术方案10所述的光通信用的透镜在技术方案1~9中的任意一项所述的发明中,其特征在于:上述光程差赋予构造设置于来自上述半导体激光器的光束射出的面。 The lens for optical communication according to claim 10 is the invention according to any one of claims 1 to 9, wherein the optical path difference providing structure is provided on a surface from which a light beam from the semiconductor laser emits.

在图1(a)中,因为在半导体激光器侧设置衍射构造DS,所以入射到阶梯面ST中的光束的比例增高,影子的影响变大。另一方面,在图1(b)中,因为在和半导体激光器相反一侧设置衍射构造DS,所以光束往往在沿着环形带的阶梯面ST的方向前进,即,入射到阶梯面ST的光束的比例相对地变低,影子的影响变小。即,通过在来自半导体激光器的光束射出的面具有衍射构造,即使因制造误差,环形带的阶梯面ST发生倾斜了的情况下,耦合效率也难以降低,能够实现对于制造误差耐受强的透镜,另外,与激光器侧相比,光纤侧的光学面的面积相对地变宽,所以设置衍射构造的面积变宽,因此相应地可以扩大环形带的间距,容易抑制透过率的降低。 In FIG. 1( a ), since the diffraction structure DS is provided on the side of the semiconductor laser, the ratio of the light beam incident on the stepped surface ST increases, and the influence of shadows increases. On the other hand, in Fig. 1(b), since the diffraction structure DS is provided on the side opposite to the semiconductor laser, the light beam tends to advance in the direction along the stepped surface ST of the annular zone, that is, the light beam incident on the stepped surface ST The proportion of relatively becomes lower, and the influence of the shadow becomes smaller. That is, by having a diffractive structure on the surface from which the light beam from the semiconductor laser exits, even if the step surface ST of the annular zone is inclined due to a manufacturing error, the coupling efficiency is hardly lowered, and a lens that is highly resistant to manufacturing errors can be realized. , In addition, compared with the laser side, the area of the optical surface on the fiber side is relatively wider, so the area where the diffraction structure is provided becomes wider, so the pitch of the annular zone can be enlarged accordingly, and the decrease in transmittance can be easily suppressed.

技术方案11所述的半导体模块,其特征在于:将技术方案1~10中的任意一项所述的光通信用的透镜和半导体激光器一体地组装而成。 The semiconductor module according to Claim 11 is characterized in that the optical communication lens and the semiconductor laser according to any one of Claims 1 to 10 are integrally assembled.

技术方案12所述的半导体模块,在技术方案11所述的发明中,其特征在于:上述透镜安装于将上述半导体激光器密封的筐体。 In the semiconductor module according to claim 12, in the invention according to claim 11, the lens is mounted on a housing that seals the semiconductor laser.

技术方案13所述的半导体模块,在技术方案11所述的发明中,其特征在于:上述透镜和密封上述半导体激光器的筐体是一体的。 The semiconductor module according to claim 13, in the invention according to claim 11, is characterized in that the lens and the housing sealing the semiconductor laser are integral.

所谓“半导体激光器”是利用半导体的再耦合发光的激光器,一般是在环境温度上升时振荡波长变长,在环境温度下降时振荡波长变短。 The so-called "semiconductor laser" is a laser that emits light by re-coupling of a semiconductor. Generally, the oscillation wavelength becomes longer when the ambient temperature rises, and the oscillation wavelength becomes shorter when the ambient temperature falls.

所谓透镜包含:对从半导体激光器射出的光束进行聚光的透镜、对从光纤的端面射出的光束进行聚光的透镜、特别将从半导体激光器射出的光束聚光到光纤的端面的光耦合透镜、将从光纤的端面射出的光束聚光到受光元件的受光面的光耦合透镜。透镜是塑料制。 The so-called lens includes: a lens that condenses the light beam emitted from the semiconductor laser, a lens that condenses the light beam emitted from the end face of the optical fiber, an optical coupling lens that condenses the light beam emitted from the semiconductor laser to the end face of the optical fiber, Optical coupling lens that condenses the light beam emitted from the end face of the optical fiber to the light receiving surface of the light receiving element. The lens is made of plastic.

在本说明书中所说的所谓光程差赋予构造是对入射光束附加光程差的构造的总称。在光程差赋予构造中还包含赋予相位差的相位差赋予构造。另外,在相位差赋予构造中包含衍射构造。本发明的光程差赋予构造优选衍射构造。光程差赋予构造具有阶梯,优选具有多个阶梯。通过该阶梯在入射光束中附加光程差以及/或者相位差。通过光程差赋予构造附加的光程差既可以是入射光束的波长的整数倍,也可以是入射光束的波长的非整数倍。阶梯既可以在光轴垂直方向以周期性的间隔进行配置,也可以在光轴垂直方向以非周期性的间隔进行配置。另外,当设置有光程差赋予构造的透镜是单片非球面透镜的情况下,由于距离光轴的高度致使光束对镜头的入射角度不同,所以光程差赋予构造的阶梯差针对各环形带的每个而不同。例如,当镜头是单片非球面的凸透镜的情况下,即使是赋予相同光程差的光程差赋予构造,一般也是越远离光轴,越呈现阶梯差增大的趋势。 The so-called optical path difference imparting structure referred to in this specification is a generic term for structures that add an optical path difference to incident light beams. A phase difference providing structure that provides a phase difference is also included in the optical path difference providing structure. In addition, the phase difference imparting structure includes a diffractive structure. The optical path difference imparting structure of the present invention is preferably a diffractive structure. The optical path difference providing structure has a step, and preferably has a plurality of steps. This step adds an optical path difference and/or a phase difference to the incident light beam. The optical path difference added by the optical path difference imparting structure may be an integer multiple of the wavelength of the incident light beam or a non-integer multiple of the wavelength of the incident light beam. The steps may be arranged at periodic intervals in the direction perpendicular to the optical axis, or may be arranged at non-periodic intervals in the direction perpendicular to the optical axis. In addition, when the lens provided with the optical path difference providing structure is a single aspheric lens, the incident angle of the light beam to the lens is different due to the height from the optical axis, so the step difference of the optical path difference providing structure is different for each annular zone. Each of them is different. For example, when the lens is a single aspheric convex lens, even with an optical path difference imparting structure that imparts the same optical path difference, the step difference generally tends to increase as the distance from the optical axis increases.

另外,在本说明书中所说的所谓衍射构造是具有阶梯,具有因衍射而使光束收敛或者发散的作用的构造的总称。例如,包含如下那样的构造:通过单位形状以光轴为中心排列多个来构成,对于各个单位形状入射光束,透过的光的波阵面在相邻的每个环形带上发生损耗,其结果,通过形成新的波阵面使光收敛或者发散。衍射构造具有多个阶梯,阶梯既可以在光轴垂直方向以周期性的间隔来配置,也可以在光轴垂直方向以非周期性的间隔来配置。另外,当设置有衍射构造的透镜是单片非球面透镜的情况下,由于距离光轴的高度不同,光束对透镜的入射角度不同,所以衍射构造的阶梯差针对各环形带的每个有些许不同。例如,当透镜是单片非球面的凸透镜的情况下,即使是发生相同衍射级数的衍射光的衍射构造,一般也是距离光轴越远,越呈现阶梯差变大的趋势。 In addition, the so-called diffractive structure referred to in this specification is a general term for a structure having steps and having a function of converging or diverging light beams by diffraction. For example, it includes a structure in which a plurality of unit shapes are arranged around the optical axis, and the wavefront of transmitted light is lost in each adjacent annular zone for each unit shape incident on the light beam. As a result, the light is either converged or diverged by forming new wavefronts. The diffractive structure has a plurality of steps, and the steps may be arranged at periodic intervals in the direction perpendicular to the optical axis, or may be arranged at non-periodic intervals in the direction perpendicular to the optical axis. In addition, when the lens provided with the diffractive structure is a single aspherical lens, since the height from the optical axis is different, the incident angle of the light beam to the lens is different, so the step difference of the diffractive structure is slightly different for each annular zone. different. For example, when the lens is a single aspherical convex lens, even if it is a diffraction structure that produces diffracted light of the same order of diffraction, the step difference tends to increase as the distance from the optical axis increases.

可是,光程差赋予构造优选具有以光轴为中心的同心圆状的多个环形带。另外,光程差赋予构造一般可以取各种剖面形状(在包含光轴的面中的剖面形状),包含光轴的剖面形状大致分为闪耀型构造和台阶型构造。 However, the optical path difference providing structure preferably has a plurality of concentric ring-shaped zones centering on the optical axis. In addition, the optical path difference imparting structure can generally take various cross-sectional shapes (cross-sectional shapes in a plane including the optical axis), and the cross-sectional shapes including the optical axis are roughly classified into a flare structure and a stepped structure.

所谓闪耀型构造是指如图2(a)、(b)所示那样,具有光程差赋予构造的光学元件的包含光轴的截面形状为锯齿状的形状。此外,在图2的例子中,上方为光源侧,下方为光盘侧,在作为母体非球面的平面形成有光程差赋予构造。在闪耀型构造中,将一个闪耀单位的光轴垂直方向的长度称为间距P(参照图2(a)、(b))。另外,将与闪耀的光轴平行方向的阶梯的长度称为阶梯差B(参照图2(a))。而且,在闪耀型形状中,如图1所示,例如为了容易用车刀切削模具,也可以不将阶梯面设置成和光轴平行,而设置成些许倾斜,这种情况下,优选一个闪耀的顶点的位置在光轴正交方向间距的0~25%的范围内。 The blazed structure means that, as shown in FIGS. 2( a ) and ( b ), an optical element having an optical path difference providing structure has a zigzag cross-sectional shape including the optical axis. In addition, in the example of FIG. 2, the upper side is the light source side, the lower side is the optical disc side, and the optical path difference providing structure is formed in the plane which is a mother aspheric surface. In the blazed structure, the length in the direction perpendicular to the optical axis of one blazed unit is referred to as a pitch P (see FIG. 2( a ), ( b )). In addition, the length of the step in the direction parallel to the optical axis of the blaze is referred to as a step B (see FIG. 2( a )). Moreover, in the blazed shape, as shown in Fig. 1, for example, in order to easily cut the mold with a turning tool, the stepped surface may not be set parallel to the optical axis, but may be set at a slight inclination. In this case, a blazed shape is preferred. The position of the apex is within the range of 0 to 25% of the pitch in the direction perpendicular to the optical axis.

另外,所谓台阶型构造是指如图2(c)、(d)所示那样,具有光程差赋予构造的光学元件的包含光轴的截面形状为具有多个小台阶状的结构(称为台阶单位)的形状。而且,在本说明书中,所谓“V级”是指在台阶型构造的一个台阶单位中与光轴垂直方向对应(朝向)的环形带的面(以下有时也称为台面)用阶梯划分,针对V个环形带面的每个进行分割,特别是大于等于3级的台阶型构造具有小的阶梯和大的阶梯。 In addition, the so-called stepped structure means that as shown in Fig. 2(c) and (d), the cross-sectional shape of the optical element having the optical path difference imparting structure including the optical axis is a structure with a plurality of small steps (referred to as the shape of the step unit). Moreover, in this specification, the so-called "V class" means that the surface of the annular zone corresponding to (orienting to) the direction perpendicular to the optical axis (hereinafter sometimes referred to as a mesa) in one step unit of the stepped structure is divided by steps. Each of the V endless belt surfaces is divided, and in particular, a stepped structure having three or more stages has small steps and large steps.

例如,将图2(c)所示的光程差赋予构造称为5级台阶型构造,将图2(d)所示的光程差赋予构造称为2级台阶型构造(也称为双重构造)。以下说明2级台阶型构造。包含以光轴为中心的同心圆状的多个环形带,包含物镜的光轴的多个环形带的剖面形状由与光轴平行延伸的多个阶梯面Pa、Pb、连结相邻的阶梯面Pa、Pb的光源侧端部彼此之间的光源侧台面Pc、连结相邻的阶梯面Pa、Pb的光盘侧端部彼此之间的光盘侧台面Pd来形成,光源侧台面Pc和光盘侧台面Pd沿着与光轴交叉的方向交替配置。 For example, the optical path difference providing structure shown in FIG. 2(c) is called a 5-stage stepped structure, and the optical path difference providing structure shown in FIG. 2(d) is called a 2-stage stepped structure (also called a double structure). The two-stage stepped structure will be described below. The cross-sectional shape of the plurality of annular zones including the optical axis of the objective lens is composed of a plurality of concentric annular zones centered on the optical axis, and the adjacent stepped surfaces are connected by a plurality of stepped surfaces Pa and Pb extending parallel to the optical axis. The light source side mesa Pc between the light source side ends of Pa and Pb is formed by connecting the disc side mesa Pd between the disc side ends of the adjacent stepped surfaces Pa and Pb, and the light source side mesa Pc and the disc side mesa are formed. The Pds are alternately arranged in a direction intersecting the optical axis.

而且,光程差赋予构造优选某一个单位形状周期性重复的构造。这里所说的“单位形状周期性重复”当然包含同一形状以同一周期重复的形状。进而,成为周期的1个单位的单位形状具有规律性,周期逐渐变长或者逐渐变短的形状也包含在“单位形状周期性重复”之中。 Furthermore, the optical path difference providing structure is preferably a structure in which a certain unit shape is periodically repeated. The term "periodically repeating a unit shape" as used herein naturally includes shapes in which the same shape repeats at the same period. Furthermore, the unit shape which becomes one unit of a period has regularity, and the shape which a period gradually becomes longer or becomes shorter is also included in "the unit shape which repeats periodically".

光程差赋予构造在具有闪耀型构造的情况下,变成作为单位形状的锯齿状的形状重复的形状。既可以如图2(a)所示同一锯齿状形状重复,也可以如图2(b)所示随着在从光轴向离开的方向前进,锯齿状形状的间距(还称为衍射间距)逐渐变长的形状,或者也可以是间距逐渐变短的形状。此外,在某一区域上,也可以设置成闪耀型构造的阶梯向着与光轴(中心)侧相反的形状,在其他的区域上,设置成闪耀型构造的阶梯向着光轴(中心)侧的形状,在其间设置成设置有为了切换闪耀型构造的阶梯的朝向而所需要的转移区域的形状。而且,当这样设置成在中途切换闪耀型构造的阶梯朝向的构造的情况下,可以扩大环形带间距,能够抑制由光程差赋予构造的制造误差引起的透过率降低。 When the optical path difference providing structure has a blazed structure, it becomes the shape which repeats the zigzag shape which is a unit shape. Either the same saw-tooth shape can be repeated as shown in Figure 2(a), or the pitch of the saw-tooth shape (also known as the diffraction pitch) can be increased as it advances in the direction away from the optical axis as shown in Figure 2(b). A shape that gradually becomes longer, or a shape that gradually becomes shorter in pitch. In addition, in a certain area, the steps of the blazed structure may be provided in a shape opposite to the optical axis (center) side, and in other areas, the steps of the blazed structure may be provided in a shape facing the optical axis (center) side. The shape is provided in a shape in which a transition area required for switching the direction of the steps of the sparkle structure is provided therebetween. Furthermore, in the case where the step direction of the blazed structure is switched midway, the annular zone pitch can be enlarged, and the decrease in transmittance due to the manufacturing error of the optical path difference providing structure can be suppressed.

光程差赋予构造在具有台阶型构造的情况下,可以得到如图2(c)所示那样的5级台阶单位重复那样的形状等。进而,可以是随着在从光轴离开的方向前进台阶单位的间距逐渐变长的形状、台阶单位的间距逐渐变短的形状。而且当利用台阶型形状对闪耀型形状进行近似了的情况下,虽然衍射效率降低,但可以得到和本发明同样的效果。 In the case where the optical path difference providing structure has a stepped structure, a shape such as a repeating five-stage step unit can be obtained as shown in FIG. 2( c ). Furthermore, it may be a shape in which the pitch of the step unit gradually becomes longer as it advances in a direction away from the optical axis, or a shape in which the pitch of the step unit gradually becomes shorter. Furthermore, when the blazed shape is approximated by the stepped shape, although the diffraction efficiency is lowered, the same effect as the present invention can be obtained.

光程差赋予构造优选具有朝向透镜的光轴的阶梯。所谓“阶梯朝向光轴”是指图3(a)那样的状态。 The optical path difference providing structure preferably has a step toward the optical axis of the lens. "The step faces the optical axis" refers to a state as shown in FIG. 3( a ).

光程差赋予构造优选将波长λ的大致整数倍的光程差赋予通过的光束。所谓大致整数倍是指在将除了0以外的整数设为N时,大于等于(N-0.4)λ,小于等于(N+0.4)λ。光程差赋予构造优选,在透镜的有效直径的全范围中赋予波长λ的1倍的光程差、或者在透镜的光轴附近的中央区域赋予波长λ的1倍的光程差,在透镜的中央区域的外侧的周边区域赋予波长λ的2倍的光程差。中央区域和周边区域的边界优选为例如距离有效直径的2/3的光轴的高度。 The optical path difference providing structure preferably provides an optical path difference substantially an integer multiple of the wavelength λ to the passing light beam. The term “approximately integer multiple” means that when N is an integer other than 0, it is greater than or equal to (N−0.4)λ and less than or equal to (N+0.4)λ. The optical path difference imparting structure is preferably such that an optical path difference of 1 time the wavelength λ is provided in the entire range of the effective diameter of the lens, or an optical path difference 1 time the wavelength λ is provided in the central region near the optical axis of the lens, and the optical path difference of λ is provided in the lens. The peripheral region outside the central region imparts an optical path difference twice the wavelength λ. The boundary between the central area and the peripheral area is preferably, for example, at a height from the optical axis of 2/3 of the effective diameter.

优选通过了透镜的光束的光瞳透过率分布满足条件式(1)。所谓光瞳透过率分布是射出光瞳面的透过率分布,相当于相对均匀强度的入射光束的射出光瞳面的亮度分布。而且,所谓透镜的光轴附近例如是在距离有效直径的1/3的光轴的高度以内,更理想的是在0.2以内,所谓透镜的周边例如是在距离有效直径的2/3光轴的高度的外侧,更理想的是在0.8的外侧。 It is preferable that the pupil transmittance distribution of the luminous flux passing through the lens satisfies conditional expression (1). The so-called pupil transmittance distribution is the transmittance distribution of the exit pupil surface, which corresponds to the luminance distribution of the exit pupil surface of an incident light beam of relatively uniform intensity. Moreover, the vicinity of the optical axis of the so-called lens is, for example, within the height of the optical axis of 1/3 of the effective diameter, more preferably within 0.2, and the so-called periphery of the lens is, for example, within the height of the optical axis of 2/3 of the effective diameter. The outer side of the height, more ideally the outer side of 0.8.

0.4≤T1/T0≤0.8(1) 0.4≤T1/T0≤0.8 (1)

T0:上述透镜的光轴附近的透过率 T0: Transmittance near the optical axis of the above lens

T1:上述透镜的周边的透过率 T1: Transmittance around the above lens

来自半导体激光器的光束入射侧的NA优选满足条件式(2) The NA from the beam incident side of the semiconductor laser preferably satisfies the conditional formula (2)

0.30≤NA≤0.85(2) 0.30≤NA≤0.85 (2)

进而理想的是优选满足条件式(4)。 Furthermore, it is desirable to preferably satisfy conditional expression (4).

0.35≤NA≤0.65(4) 0.35≤NA≤0.65 (4)

根据本发明,提供一种将半导体模块设置成紧凑的模块,进而通过将光纤侧的聚光点的有效NA抑制得小,从而能够抑制耦合效率的变动的光通信用的透镜以及使用该透镜的半导体模块。 According to the present invention, there are provided a lens for optical communication in which a semiconductor module is provided in a compact module, and furthermore, by suppressing the effective NA of the light-converging point on the fiber side to be small, fluctuations in coupling efficiency can be suppressed, and a lens using the same can be provided. semiconductor module.

附图说明 Description of drawings

图1(a)是在半导体激光器侧设置了衍射构造的透镜的放大剖面图,(b)是在半导体激光器侧设置了衍射构造的透镜的放大剖面图。 1( a ) is an enlarged cross-sectional view of a lens provided with a diffractive structure on the semiconductor laser side, and FIG. 1( b ) is an enlarged cross-sectional view of a lens provided with a diffractive structure on the semiconductor laser side.

图2是表示光程差赋予构造的例子的放大剖面图,(a)、(b)是表示闪耀型构造的例子的图,(c)、(d)是表示台阶型构造的例子的图。 2 is an enlarged cross-sectional view showing an example of an optical path difference providing structure, (a) and (b) are diagrams showing examples of a blazed structure, and (c) and (d) are diagrams showing examples of a stepped structure.

图3(a)是表示阶梯向着光轴方向的状态,(b)是表示阶梯向着与光轴相反方向的状态的图。 FIG. 3( a ) is a diagram showing a state where the steps face the direction of the optical axis, and FIG. 3( b ) is a view showing a state where the steps face the direction opposite to the optical axis.

图4(a)是涉及第1实施方式的半导体模块LM的光轴方向剖面图,(b)是放大表示用箭头IVB表示的透镜表面的图。 4( a ) is a sectional view in the optical axis direction of the semiconductor module LM according to the first embodiment, and FIG. 4( b ) is an enlarged view showing a lens surface indicated by an arrow IVB.

图5(a)是涉及第2实施方式的半导体模块LM的光轴方向剖面图,(b)是放大表示用箭头VB表示的透镜表面的图。 5( a ) is a sectional view in the optical axis direction of the semiconductor module LM according to the second embodiment, and FIG. 5( b ) is an enlarged view showing a lens surface indicated by an arrow VB.

图6(a)是涉及第3实施方式的光耦合透镜CL的光轴方向剖面图,(b)是放大表示用箭头VIB表示的透镜表面的图。 6( a ) is a sectional view in the optical axis direction of the optical coupling lens CL according to the third embodiment, and ( b ) is an enlarged view showing a lens surface indicated by an arrow VIB.

图7是实施例1~4和比较例中的耦合效率的曲线图。 FIG. 7 is a graph of coupling efficiency in Examples 1 to 4 and a comparative example.

图8是实施例5~8和比较例中的耦合效率的曲线图。 FIG. 8 is a graph of coupling efficiency in Examples 5 to 8 and a comparative example.

图9是实施例9中的耦合效率的曲线图。 FIG. 9 is a graph of coupling efficiency in Example 9. FIG.

图10是表示用衍射构造的阶梯赋予的相位差和衍射效率的关系的图。 FIG. 10 is a graph showing the relationship between the phase difference given by the steps of the diffraction structure and the diffraction efficiency.

符号说明 Symbol Description

AP:开口 AP: opening

BS:基座 BS: base

CG:盖玻璃 CG: cover glass

CL:光耦合透镜或者光耦合透镜部 CL: Optical coupling lens or optical coupling lens unit

CV:盖 CV: cover

DS:衍射构造 DS: diffractive structure

FL:凸缘部 FL: Flange

LD:半导体激光器 LD: semiconductor laser

LG:管脚部 LG: pin part

LM:半导体模块 LM: semiconductor module

OF:光纤 OF: optical fiber

PD:光电二极管 PD: Photodiode

PDa:受光面 PDa: light-receiving surface

S1:半导体激光器侧光学面 S1: Semiconductor laser side optical surface

S2:反半导体激光器侧光学面 S2: Anti-semiconductor laser side optical surface

具体实施方式 Detailed ways

以下根据附图说明本发明的实施方式。图4是涉及第1实施方式的半导体模块LM的光轴方向剖面图。在具有供电用的3根管脚部LG的基座BS安装有半导体激光器LD的衬底,射出波长λ的光束的半导体激光器LD用具有开口AP的盖(筐体)CV覆盖。开口AP从内侧用透明盖玻璃CG遮盖,将半导体激光器LD与外部大气隔开密封。 Embodiments of the present invention will be described below with reference to the drawings. 4 is a sectional view in the optical axis direction of the semiconductor module LM according to the first embodiment. A substrate of a semiconductor laser LD is mounted on a base BS having three pins LG for power supply, and the semiconductor laser LD emitting a beam of wavelength λ is covered with a cover (casing) CV having an opening AP. The opening AP is covered with a transparent cover glass CG from the inside to seal the semiconductor laser LD from the outside atmosphere.

设为覆盖开口AP的外侧,光耦合透镜部CL的凸缘部FL与盖CV粘接。塑料制的光耦合透镜CL具有作为半导体激光器侧的折射面的光学面S1、其相反侧的光学面S2,在光学面S2在折射面上形成有衍射构造DS。光学面S1的曲率半径比光学面S2的曲率半径大。闪耀型形状的衍射构造DS在波长λ的光束入射时,赋予波长λ的整数倍的光程差。 The flange portion FL of the optical coupling lens portion CL is bonded to the cover CV so as to cover the outside of the opening AP. The optical coupling lens CL made of plastic has an optical surface S1 as a refraction surface on the semiconductor laser side, and an optical surface S2 on the opposite side thereof, and a diffraction structure DS is formed on the refraction surface on the optical surface S2. The radius of curvature of optical surface S1 is larger than the radius of curvature of optical surface S2. The blazed diffractive structure DS imparts an optical path difference that is an integer multiple of the wavelength λ when a beam of wavelength λ is incident.

半导体模块LM的基座BS经由未图示的筐体,以规定的距离与光纤OF连接。而且,光纤OF用外皮SL覆盖。 The base BS of the semiconductor module LM is connected to the optical fiber OF at a predetermined distance via a housing not shown. Furthermore, the optical fiber OF is covered with a sheath SL.

说明本实施方式的半导体模块LM的动作。如果经由管脚部LG供电,则半导体激光器LD发光,其射出光束通过盖玻璃CG以及开口AP入射到光耦合透镜CL。入射到光耦合透镜CL的光束在折射面发生折射,并且通过衍射构造DS射出,聚光于光纤OF的端面,其后在光纤OF内进行传播。 The operation of the semiconductor module LM of this embodiment will be described. When power is supplied through the pin portion LG, the semiconductor laser LD emits light, and the emitted light beam enters the optical coupling lens CL through the cover glass CG and the opening AP. The light beam incident on the optical coupling lens CL is refracted on the refraction plane, exits through the diffraction structure DS, is focused on the end face of the optical fiber OF, and then propagates in the optical fiber OF.

如果环境温度上升(或者下降),因为半导体激光器LD的振荡波长增大(或者降低),与之相应从衍射构造DS发生的衍射光的衍射角发生变化,由此能够补正因环境温度变化造成的光耦合透镜CL的折射率的变化引起的焦点位置偏移。另外,根据本实施方式,因为只在光耦合透镜CL的一面设置了衍射构造DS,所以衍射间距整体上变窄,在用光耦合透镜部CL聚光到光纤OF的端面的点上,因为周边部的光量相对于通过了透镜的光轴附近的光量变低,所以发生点变粗,有效NA降低。由此,发生温度变化时的耦合效率的变动变小。 If the ambient temperature rises (or falls), because the oscillation wavelength of the semiconductor laser LD increases (or decreases), the diffraction angle of the diffracted light from the diffraction structure DS changes accordingly, thereby making it possible to correct for changes in the ambient temperature. The shift of the focus position caused by the change in the refractive index of the optical coupling lens CL. In addition, according to this embodiment, since the diffraction structure DS is provided only on one side of the optical coupling lens CL, the diffraction pitch becomes narrow as a whole. The amount of light in the portion becomes lower than the amount of light passing through the vicinity of the optical axis of the lens, so the dots become thicker and the effective NA decreases. As a result, fluctuations in coupling efficiency when temperature changes occur are reduced.

图5是涉及第2实施方式的半导体模块LM的光轴方向剖面图。在具有供电用的3根管脚部LG的基座BS安装有半导体激光器LD的衬底。在本实施方式中,密封地覆盖射出波长λ的光束的半导体激光器LD的盖(筐体)CV是塑料制的帽子状,在该遮挡端侧一体地形成光耦合透镜部CL。 5 is a sectional view in the optical axis direction of the semiconductor module LM according to the second embodiment. A substrate of a semiconductor laser LD is mounted on a base BS having three pins LG for power supply. In the present embodiment, the cover (casing) CV sealingly covering the semiconductor laser LD that emits the light beam of wavelength λ is in the shape of a plastic hat, and the optical coupling lens portion CL is integrally formed on the shielding end side.

光耦合透镜部CL具有作为半导体激光器侧的折射面的光学面S1、作为该相反侧的折射面的光学面S2,在光学面S2在折射面上形成衍射构造DS。光学面S1的曲率半径比光学面S2的曲率半径大。闪耀型形状的衍射构造DS在波长λ的光束入射时,赋予波长λ的整数倍的光程差。 The optical coupling lens portion CL has an optical surface S1 as a refraction surface on the semiconductor laser side and an optical surface S2 as a refraction surface on the opposite side, and a diffraction structure DS is formed on the refraction surface on the optical surface S2. The radius of curvature of optical surface S1 is larger than the radius of curvature of optical surface S2. The blazed diffractive structure DS imparts an optical path difference that is an integer multiple of the wavelength λ when a beam of wavelength λ is incident.

半导体模块LM的基座BS经由未图示的筐体以规定的距离与光纤OF连接。而且,光纤OF用外皮SL覆盖。 The base BS of the semiconductor module LM is connected to the optical fiber OF at a predetermined distance via a housing not shown. Furthermore, the optical fiber OF is covered with a sheath SL.

说明本实施方式的半导体模块LM的动作。如果经由管脚LG供电,则半导体激光器LD发光,其射出光束直接入射到光耦合透镜部CL。入射到光耦合透镜部CL的光束在折射面折射,并且通过衍射构造DS而射出,聚光于光纤OF的端面,其后在光纤OF内传播。 The operation of the semiconductor module LM of this embodiment will be described. When power is supplied through the pin LG, the semiconductor laser LD emits light, and the emitted light beam directly enters the optical coupling lens portion CL. The light beam incident on the optical coupling lens unit CL is refracted on the refraction surface, exits through the diffraction structure DS, is condensed on the end surface of the optical fiber OF, and then propagates in the optical fiber OF.

如果环境温度上升(或者下降),因为半导体激光器LD的振荡波长增大(或者降低),与之相应从衍射构造DS发生的衍射光的衍射角发生变化,由此能够补正因环境温度变化造成的光耦合透镜部CL的折射率的变化引起的焦点位置偏移。另外,由于温度上升(或者降低),透镜膨胀(或者收缩),进而能够补正焦点位置偏移。根据本实施方式,因为只在光耦合透镜部CL的外侧面设置衍射构造DS,所以衍射间距整体上变窄,在用光耦合透镜部CL聚光于光纤OF的端面的点上,因为周边部的光量相对于通过了透镜的光轴附近的光量变低,所以发生点变粗,有效NA降低。由此,发生温度变化时的耦合效率的变动减小。 If the ambient temperature rises (or falls), because the oscillation wavelength of the semiconductor laser LD increases (or decreases), the diffraction angle of the diffracted light from the diffraction structure DS changes accordingly, thereby making it possible to correct for changes in the ambient temperature. The focus position shifts due to the change in the refractive index of the optical coupling lens portion CL. In addition, the lens expands (or shrinks) due to temperature rise (or fall), thereby enabling correction of focus position shift. According to this embodiment, because the diffraction structure DS is provided only on the outer surface of the optical coupling lens portion CL, the diffraction pitch becomes narrow as a whole. The amount of light that passes through the lens near the optical axis becomes lower, so the dots become thicker and the effective NA decreases. Thus, fluctuations in coupling efficiency when temperature changes occur are reduced.

图6是涉及第3实施方式的光耦合透镜CL的光轴方向剖面图。在本实施方式中,从未图示的半导体激光器经由光纤OF传播,从其端面射出的光束经由光耦合透镜CL聚光到光电二极管PD的受光面PDa。在光耦合透镜CL的一面的光学面(光纤OF侧的光学面)S1的折射面上,设置补正温度变化时的焦点位置偏移的闪耀型的衍射构造DS。另一光学面S2只由折射面组成。光学面S1的曲率半径比光学面S2的曲率半径小。而且,CG是光电二极管的盖玻璃。 6 is a sectional view in the optical axis direction of the optical coupling lens CL according to the third embodiment. In this embodiment, a semiconductor laser (not shown) propagates through the optical fiber OF, and the light beam emitted from the end surface thereof is condensed to the light receiving surface PDa of the photodiode PD through the optical coupling lens CL. On the refractive surface of one optical surface (optical surface on the optical fiber OF side) S1 of the optical coupling lens CL, a blazed diffraction structure DS for correcting focal position shift due to temperature changes is provided. The other optical surface S2 consists only of refractive surfaces. The radius of curvature of optical surface S1 is smaller than the radius of curvature of optical surface S2. Also, CG is the cover glass of the photodiode.

根据本实施方式,因为只在光耦合透镜CL的一面S1设置了闪耀型的衍射构造DS,所以衍射间距整体上变窄,在用光耦合透镜CL聚光到光电二极管PD的受光面PDa的点上,因为周边部的光量相对于通过透镜的光轴附近的光量变低,所以发生点变粗,有效NA增大。由此,发生温度变化时的耦合效率的变动减小。其他效果和上述的实施方式一样。 According to this embodiment, since the blazed diffraction structure DS is provided only on one side S1 of the optical coupling lens CL, the diffraction pitch is narrowed as a whole, and at the point where the optical coupling lens CL condenses light onto the light receiving surface PDa of the photodiode PD On the other hand, since the amount of light in the peripheral portion is lower than the amount of light passing through the vicinity of the optical axis of the lens, the occurrence point becomes thicker and the effective NA increases. Thus, fluctuations in coupling efficiency when temperature changes occur are reduced. Other effects are the same as the above-mentioned embodiment.

(实施例) (example)

以下,说明能够在上述实施方式中使用的实施例。实施例1~4都是树脂透镜,是适合于图4所示的半导体模块的光耦合透镜。另外,作为比较例子参照没有衍射构造的玻璃透镜和树脂透镜。表1中表示实施例1~4的半导体模块的规格,表2中表示实施例5~8的半导体模块的规格,表3中表示实施例9的半导体模块的规格,表4中表示实施例1~4的各材质的折射率,表5中表示实施例5~8的各材质的折射率,表6中表示实施例9的各材质的折射率。 Examples that can be used in the above-mentioned embodiments will be described below. Examples 1 to 4 are all resin lenses, and are optical coupling lenses suitable for the semiconductor module shown in FIG. 4 . In addition, a glass lens and a resin lens without a diffractive structure are referred to as comparative examples. Table 1 shows the specifications of the semiconductor modules of Examples 1 to 4, Table 2 shows the specifications of the semiconductor modules of Examples 5 to 8, Table 3 shows the specifications of the semiconductor module of Example 9, and Table 4 shows the specifications of the semiconductor module of Example 1. The refractive index of each material of -4 shows the refractive index of each material of Examples 5-8 in Table 5, and shows the refractive index of each material of Example 9 in Table 6.

[表1] [Table 1]

半导体模块的规格 Specifications of semiconductor modules

LD半值全角 LD half value full width 32 32 Spend NA NA 0.4 0.4 耦合倍率 Coupling ratio 4 4 times 温度变化时的波长变动 Wavelength change with temperature change 0.2 0.2 nm/degC nm/degC

[表2] [Table 2]

半导体模块的规格 Specifications of semiconductor modules

LD半值全角 LD half value full width 32 32 Spend NA NA 0.4 0.4 耦合倍率 Coupling ratio 2.5 2.5 times 温度变化时的波长变动 Wavelength change with temperature change 0.2 0.2 nm/degC nm/degC 线膨胀系数 Linear expansion coefficient 0.00006 0.00006 cm/cm℃ cm/cm℃

[表3] [table 3]

半导体模块的规格 Specifications of semiconductor modules

LD半值全角 LD half value full width 32 32 Spend NA NA 0.4 0.4 耦合倍率 Coupling ratio 4 4 times 温度变化时的波长变动 Wavelength change with temperature change 0.2 0.2 nm/degC nm/degC

[表4] [Table 4]

实施例中的折射率 Refractive index in examples

温度(℃) temperature (°C) 波长(nm) wavelength (nm) 折射率(玻璃) Refractive Index (Glass) 折射率(树脂) Refractive Index (Resin) 0 0 1305 1305 1.52313 1.52313 1.52504 1.52504 25 25 1310 1310 1.52311 1.52311 1.52311 1.52311 40 40 1313 1313 1.52309 1.52309 1.52179 1.52179 60 60 1317 1317 1.52307 1.52307 1.51946 1.51946

80 80 1321 1321 1.52305 1.52305 1.51671 1.51671

[表5] [table 5]

实施例中的折射率 Refractive index in examples

温度(℃) temperature (°C) 波长(nm) wavelength (nm) 折射率(玻璃) Refractive Index (Glass) 折射率(树脂) Refractive Index (Resin) 0 0 1305 1305 1.52313 1.52313 1.52504 1.52504 25 25 1310 1310 1.52311 1.52311 1.52311 1.52311 40 40 1313 1313 1.52309 1.52309 1.52179 1.52179 60 60 1317 1317 1.52307 1.52307 1.51946 1.51946 80 80 1321 1321 1.52305 1.52305 1.51671 1.51671

[表6] [Table 6]

实施例中的折射率 Refractive index in examples

温度(℃) temperature (°C) 波长(nm) wavelength (nm) 折射率(玻璃) Refractive Index (Glass) 折射率(树脂) Refractive Index (Resin) 0 0 1305 1305 1.52313 1.52313 1.52504 1.52504 25 25 1310 1310 1.52311 1.52311 1.52311 1.52311 40 40 1313 1313 1.52309 1.52309 1.52179 1.52179 60 60 1317 1317 1.52307 1.52307 1.51946 1.51946 80 80 1321 1321 1.52305 1.52305 1.51671 1.51671

而且,光耦合透镜的光学面形成为以分别在数1式中代入表1表示的系数的公式规定的、围绕光轴轴对称的非球面。 Furthermore, the optical surface of the optical coupling lens is formed as an aspheric surface that is axisymmetric around the optical axis and defined by the equations in which the coefficients shown in Table 1 are respectively substituted into the equations.

[数1] [number 1]

Xx (( hh )) == (( hh 22 // rr )) 11 ++ 11 -- (( 11 ++ κκ )) (( hh // rr )) 22 ++ ΣΣ tt == 00 1010 AA 22 ii hh 22 ii

在此,X(h)是光轴方向的轴(把光的前进方向作为正),k是圆锥系数,Ai是非球面系数,h是距离光轴的高度,r是近轴曲率半径。 Here, X(h) is the axis in the direction of the optical axis (taking the forward direction of light as positive), k is the conic coefficient, Ai is the aspheric coefficient, h is the height from the optical axis, and r is the paraxial radius of curvature.

另外,在使用了衍射构造的实施例的情况下,用该衍射构造对各波长的光束给予的光程差用在数2式的光程差函数中代入表所示的系数的公式来规定。 In addition, in the case of an embodiment using a diffractive structure, the optical path difference given to the light beams of each wavelength by the diffractive structure is defined by a formula in which the coefficients shown in the table are substituted into the optical path difference function in Equation 2.

(数2) (number 2)

Φ(h)=B2h2×λ×m/λB Φ(h)=B 2 h 2 ×λ×m/λB

在此,λ:使用波长,m:衍射级数,λB:闪耀化波长,h:从光轴起在光轴垂直方向的距离。 Here, λ: wavelength used, m: diffraction order, λB: blazed wavelength, h: distance from the optical axis in the direction perpendicular to the optical axis.

表7表示实施例1~4和比较例的透镜数据,表8表示实施例5~8的透镜数据,表9表示实施例9的透镜数据。实施例中的各衍射构造的间距、阶梯变成用表7、8、9所示的光程差函数、衍射级数、闪耀化波长最佳化后的形状。 Table 7 shows lens data of Examples 1 to 4 and Comparative Example, Table 8 shows lens data of Examples 5 to 8, and Table 9 shows lens data of Example 9. The pitch and step of each diffractive structure in the examples were optimized using the optical path difference function, diffraction order, and blaze wavelength shown in Tables 7, 8, and 9.

[表7] [Table 7]

[表8] [Table 8]

[表9] [Table 9]

如参照表1说明的那样,具有衍射构造的透镜因与衍射环形带的阶梯制造误差相应增大的影子的影响引起耦合效率降低。耦合效率降低具有环形带间距越窄就变得越大的趋势,在本实施例中,在设中心部的透过率为100%时,表10~12表示针对此的透镜有效直径附近的降低程度(T1/T0)。 As explained with reference to Table 1, the coupling efficiency of the lens having a diffractive structure is lowered due to the influence of shadows that increase in accordance with the step manufacturing error of the diffractive annular zone. The decrease in coupling efficiency tends to increase as the pitch between the annular zones becomes narrower. In this example, when the transmittance at the central portion is assumed to be 100%, Tables 10 to 12 show the decrease in the vicinity of the effective diameter of the lens. degree (T1/T0).

在没有衍射构造的玻璃透镜和树脂透镜中,理论上,在透镜有效直径附近不发生透过率的减少,但在实施例1~9中了解到至少发生大于等于15%的透过率减少。 In glass lenses and resin lenses without a diffractive structure, theoretically, no decrease in transmittance occurs near the effective diameter of the lens, but it was found that at least 15% or greater decrease in transmittance occurred in Examples 1 to 9.

[表10] [Table 10]

玻璃透镜 glass lens 树脂透镜 resin lens 实施例1 Example 1 实施例2 Example 2 实施例3 Example 3 实施例4 Example 4 T1/T0(%) T1/T0 (%) 100 100 100 100 59 59 64 64 79 79 84 84

[表11] [Table 11]

实施例5 Example 5 实施例6 Example 6 实施例7 Example 7 实施例8 Example 8 T1/T0(%) T1/T0 (%) 85 85 75 75 68 68 60 60

[表12] [Table 12]

实施例9 Example 9 T1/T0(%) T1/T0 (%) 80 80

以下,在图7~图9中表示实施例和比较例中的耦合效率的曲线图。在图7~图9中,纵轴是耦合效率,横轴是环境温度。参照图7~图9可知因为玻璃透镜完全没有因温度引起的折射率变动,所以效率的变动少。但是,因为价格高所以存在提高半导体模块的成本的问题。其次,知道没有衍射构造的树脂透镜因环境温度产生的折射率变动的影响,具有大的效率变动,例如在环境温度80℃下耦合效率低于10%。 Graphs of coupling efficiency in Examples and Comparative Examples are shown below in FIGS. 7 to 9 . In FIGS. 7 to 9 , the vertical axis is the coupling efficiency, and the horizontal axis is the ambient temperature. Referring to FIGS. 7 to 9, it can be seen that since the glass lens has no change in refractive index due to temperature, there is little change in efficiency. However, there is a problem of increasing the cost of the semiconductor module because of the high price. Secondly, it is known that a resin lens without a diffractive structure has a large efficiency fluctuation due to the influence of the refractive index fluctuation caused by the ambient temperature, for example, the coupling efficiency is lower than 10% at an ambient temperature of 80°C.

与此相对,具有衍射构造的实施例1~9全部是具有衍射构造的树脂透镜,而与没有衍射构造的树脂透镜相比,知道能够将效率变动抑制得小。特别是在实施例2中,如果只考虑效率变动,则抑制成与玻璃透镜相当。而且在实施例4中,在环境温度是0℃下,耦合效率小于等于20%,但尽管如此耦合效率的变动也比没有衍射构造的树脂透镜小。进而,在实施例4中在高温侧的60℃左右,与其他的实施例相比耦合效率增高。即,因半导体激光器LD的发光,半导体模块的温度上升,在始终在60℃左右使用那样的环境的情况下,实施例4是有效的。进而,实施例9是在抑制由环境温度变化引起的耦合效率变化的同时在60℃左右使用的情况下能够实现耦合效率10%的透镜。而且,通过不仅考虑利用影子的影响还考虑闪耀的深度来制造透镜,对只在影子的效应下T1/T0约为80%的地方,根据如图10所示那样的相位差和衍射效率的关系,以在有效直径附近约为50%的效率的相位差的成为0.6λ或者1.4λ的阶梯的方式进行相位差调整,实现T1/T0=80%×50%=40%。此时,光轴附近设为1λ,对于直到有效直径之间的阶梯,分段地调整相位差,逐渐变成0.6λ或者1.4λ。 In contrast, Examples 1 to 9 having a diffractive structure are all resin lenses having a diffractive structure, and it is known that fluctuations in efficiency can be suppressed to be small compared to resin lenses without a diffractive structure. In particular, in Example 2, if only efficiency variation is considered, it is suppressed to be equivalent to a glass lens. Furthermore, in Example 4, the coupling efficiency was 20% or less at an ambient temperature of 0° C., but even so, the variation in coupling efficiency was smaller than that of a resin lens without a diffractive structure. Furthermore, in Example 4, at about 60° C. on the high temperature side, the coupling efficiency is higher than that of other Examples. That is, the temperature of the semiconductor module rises due to the light emission of the semiconductor laser LD, and the fourth embodiment is effective in an environment where the temperature of the semiconductor module is always used at about 60°C. Furthermore, Example 9 is a lens capable of achieving a coupling efficiency of 10% when used at about 60° C. while suppressing a change in coupling efficiency due to a change in ambient temperature. Furthermore, by manufacturing the lens in consideration of not only the influence of the shadow but also the depth of the flare, the relationship between the phase difference and the diffraction efficiency is shown in Fig. , the phase difference adjustment is performed in such a way that the phase difference of the efficiency of about 50% near the effective diameter becomes 0.6λ or 1.4λ steps, and T1/T0=80%×50%=40%. At this time, the vicinity of the optical axis is set to 1λ, and the phase difference is adjusted stepwise to gradually become 0.6λ or 1.4λ for the step up to the effective diameter.

另一方面,实施例7、8是适合于图4所示的实施方式,除了当环境温度上升(或者下降)的情况下,与半导体激光器LD的振荡波长增大(或者降低)相应地改变从衍射构造DS产生的衍射光的衍射角的作用以外,通过调整由盖CV的热膨胀引起的光源和光耦合透镜CL间的距离,能够补正因由环境温度变化产生的光耦合透镜CL的折射率的变化引起的焦点位置偏移。在此,盖CV的线膨胀系数是0.00006cm/cm℃。 On the other hand, Examples 7 and 8 are suitable for the implementation shown in FIG. 4, except that when the ambient temperature rises (or falls), the oscillation wavelength of the semiconductor laser LD increases (or decreases) and changes from In addition to the effect of the diffraction angle of the diffracted light generated by the diffraction structure DS, by adjusting the distance between the light source and the optical coupling lens CL caused by the thermal expansion of the cover CV, it is possible to correct the change in the refractive index of the optical coupling lens CL caused by the change in ambient temperature. focus position shift. Here, the linear expansion coefficient of the cover CV is 0.00006 cm/cm°C.

从图8可知,但在实施例7、8中,如果只考虑效率变动则抑制成与玻璃透镜相当。 As can be seen from FIG. 8 , in Examples 7 and 8, if only efficiency fluctuations are considered, they are suppressed to be equivalent to glass lenses.

本发明并不限于说明书所述的实施例,包含其他的实施例、变形例的方案对于本领域的技术人员来说根据从记载在本说明书中的实施例和思想就能明白。 The present invention is not limited to the embodiments described in the specification, and those including other embodiments and modified examples will be clear to those skilled in the art from the examples and concepts described in the specification.

Claims (32)

1.一种光通信用的透镜,是对从半导体激光器射出的波长λ的光束进行聚光的光通信用的透镜,其特征在于:1. A lens for optical communication is a lens for optical communication that condenses the beam of wavelength λ emitted from a semiconductor laser, characterized in that: 上述透镜是塑料制,The above lens is made of plastic, 只在上述透镜的光学面的1个面形成抑制温度变化时的焦点位置变动的光程差赋予构造,Only one of the optical surfaces of the above-mentioned lens is formed with an optical path difference imparting structure that suppresses changes in the focus position when the temperature changes, 上述光程差赋予构造包含以上述透镜的光轴为中心的多个环形带,由通过上述透镜的光轴的面切断的上述环形带的剖面形状是闪耀型形状,The above-mentioned optical path difference imparting structure includes a plurality of annular zones centered on the optical axis of the above-mentioned lens, and the cross-sectional shape of the above-mentioned annular zone cut by a plane passing through the optical axis of the above-mentioned lens is a blazed shape, 通过上述透镜的光束的光瞳透过率分布满足条件式(1),The pupil transmittance distribution of the beam passing through the above lens satisfies the conditional expression (1), 0.5≤T1/T0≤0.85(1),0.5≤T1/T0≤0.85 (1), 其中,in, T0:上述透镜的光轴附近的透过率,T0: Transmittance near the optical axis of the above lens, T1:上述透镜的周边的透过率。T1: Transmittance at the periphery of the above-mentioned lens. 2.根据权利要求1所述的光通信用的透镜,其特征在于:2. The lens for optical communication according to claim 1, characterized in that: 来自上述半导体激光器的光束入射侧的NA即数值孔径满足条件式(2),The NA of the incident side of the beam from the above-mentioned semiconductor laser, that is, the numerical aperture satisfies the conditional formula (2), 0.35≤NA≤0.85(2)。0.35≤NA≤0.85 (2). 3.根据权利要求1所述的光通信用的透镜,其特征在于:3. The lens for optical communication according to claim 1, characterized in that: 上述光程差赋予构造具有朝向上述透镜的光轴的阶梯。The optical path difference providing structure has a step toward the optical axis of the lens. 4.根据权利要求2所述的光通信用的透镜,其特征在于:4. The lens for optical communication according to claim 2, characterized in that: 上述光程差赋予构造具有朝向上述透镜的光轴的阶梯。The optical path difference providing structure has a step toward the optical axis of the lens. 5.根据权利要求1所述的光通信用的透镜,其特征在于:5. The lens for optical communication according to claim 1, characterized in that: 上述光程差赋予构造将上述波长λ的大致整数倍的光程差赋予给通过的光束。The optical path difference providing structure provides an optical path difference substantially an integer multiple of the wavelength λ to the passing light beam. 6.根据权利要求2所述的光通信用的透镜,其特征在于:6. The lens for optical communication according to claim 2, characterized in that: 上述光程差赋予构造将上述波长λ的大致整数倍的光程差赋予给通过的光束。The optical path difference providing structure provides an optical path difference substantially an integer multiple of the wavelength λ to the passing light beam. 7.根据权利要求3所述的光通信用的透镜,其特征在于:7. The lens for optical communication according to claim 3, characterized in that: 上述光程差赋予构造将上述波长λ的大致整数倍的光程差赋予给通过的光束。The optical path difference providing structure provides an optical path difference substantially an integer multiple of the wavelength λ to the passing light beam. 8.根据权利要求4所述的光通信用的透镜,其特征在于:8. The lens for optical communication according to claim 4, characterized in that: 上述光程差赋予构造将上述波长λ的大致整数倍的光程差赋予给通过的光束。The optical path difference providing structure provides an optical path difference substantially an integer multiple of the wavelength λ to the passing light beam. 9.根据权利要求5所述的光通信用的透镜,其特征在于:9. The lens for optical communication according to claim 5, characterized in that: 上述光程差赋予构造在上述透镜的有效直径的全范围中,将上述波长λ的1倍的光程差赋予给通过的光束。The optical path difference imparting structure imparts an optical path difference of one time the wavelength λ to the passing light beam over the entire range of the effective diameter of the lens. 10.根据权利要求6所述的光通信用的透镜,其特征在于:10. The lens for optical communication according to claim 6, characterized in that: 上述光程差赋予构造在上述透镜的有效直径的全范围中,将上述波长λ的1倍的光程差赋予给通过的光束。The optical path difference imparting structure imparts an optical path difference of one time the wavelength λ to the passing light beam over the entire range of the effective diameter of the lens. 11.根据权利要求7所述的光通信用的透镜,其特征在于:11. The lens for optical communication according to claim 7, characterized in that: 上述光程差赋予构造在上述透镜的有效直径的全范围中,将上述波长λ的1倍的光程差赋予给通过的光束。The optical path difference imparting structure imparts an optical path difference of one time the wavelength λ to the passing light beam over the entire range of the effective diameter of the lens. 12.根据权利要求8所述的光通信用的透镜,其特征在于:12. The lens for optical communication according to claim 8, characterized in that: 上述光程差赋予构造在上述透镜的有效直径的全范围中,将上述波长λ的1倍的光程差赋予给通过的光束。The optical path difference imparting structure imparts an optical path difference of one time the wavelength λ to the passing light beam over the entire range of the effective diameter of the lens. 13.根据权利要求1~12中的任意一项所述的光通信用的透镜,其特征在于:13. The lens for optical communication according to any one of claims 1 to 12, characterized in that: 上述光程差赋予构造在上述透镜的光轴附近的中央区域,将上述波长λ的X倍的光程差赋予通过的光束,在上述透镜的中央区域的外侧的周围区域,将上述波长λ的Y倍的光程差赋予通过的光束,将X的小数点后一位四舍五入而设为整数的值比将Y的小数点后一位四舍五入而设为整数的值小。The above-mentioned optical path difference imparting structure is in the central area near the optical axis of the above-mentioned lens, and the optical path difference of X times the above-mentioned wavelength λ is given to the light beam passing through, and in the peripheral area outside the central area of the above-mentioned lens, the optical path difference of the above-mentioned wavelength λ An optical path difference of Y times is given to the passing light beam, and the value obtained by rounding off one decimal place of X to an integer is smaller than the value obtained by rounding off one decimal place of Y to an integer. 14.根据权利要求13所述的光通信用的透镜,其特征在于:14. The lens for optical communication according to claim 13, characterized in that: 将上述X的小数点后一位四舍五入而设为整数的值是1,将上述Y的小数点后一位四舍五入而设为整数的值是2。The value obtained by rounding off one decimal place of said X to an integer is 1, and the value obtained by rounding off one decimal place of said Y to an integer is 2. 15.根据权利要求1~12中的任意一项所述的光通信用的透镜,其特征在于:15. The optical communication lens according to any one of claims 1 to 12, characterized in that: 上述透镜是在光纤的端面聚光从上述半导体激光器射出的光束的光耦合透镜。The lens is an optical coupling lens that condenses the light beam emitted from the semiconductor laser on the end face of the optical fiber. 16.根据权利要求13所述的光通信用的透镜,其特征在于:16. The lens for optical communication according to claim 13, characterized in that: 上述透镜是在光纤的端面聚光从上述半导体激光器射出的光束的光耦合透镜。The lens is an optical coupling lens that condenses the light beam emitted from the semiconductor laser on the end face of the optical fiber. 17.根据权利要求14所述的光通信用的透镜,其特征在于:17. The lens for optical communication according to claim 14, characterized in that: 上述透镜是在光纤的端面聚光从上述半导体激光器射出的光束的光耦合透镜。The lens is an optical coupling lens that condenses the light beam emitted from the semiconductor laser on the end face of the optical fiber. 18.根据权利要求15所述的光通信用的透镜,其特征在于:18. The lens for optical communication according to claim 15, characterized in that: 上述耦合透镜的光学系统倍率M满足以下的条件式(3),The optical system magnification M of the above-mentioned coupling lens satisfies the following conditional formula (3), 1.0≤M≤4.0(3)。1.0 ≤ M ≤ 4.0 (3). 19.根据权利要求16所述的光通信用的透镜,其特征在于:19. The lens for optical communication according to claim 16, characterized in that: 上述耦合透镜的光学系统倍率M满足以下的条件式(3),The optical system magnification M of the above-mentioned coupling lens satisfies the following conditional formula (3), 1.0≤M≤4.0(3)。1.0 ≤ M ≤ 4.0 (3). 20.根据权利要求17所述的光通信用的透镜,其特征在于:20. The lens for optical communication according to claim 17, characterized in that: 上述耦合透镜的光学系统倍率M满足以下的条件式(3),The optical system magnification M of the above-mentioned coupling lens satisfies the following conditional formula (3), 1.0≤M≤4.0(3)。1.0 ≤ M ≤ 4.0 (3). 21.根据权利要求1~12中的任意一项所述的光通信用的透镜,其特征在于:21. The lens for optical communication according to any one of claims 1 to 12, characterized in that: 上述光程差赋予构造设置于来自上述半导体激光器的光束射出的面。The said optical path difference providing structure is provided in the surface from which the light beam from the said semiconductor laser emits. 22.根据权利要求13所述的光通信用的透镜,其特征在于:22. The lens for optical communication according to claim 13, characterized in that: 上述光程差赋予构造设置于来自上述半导体激光器的光束射出的面。The said optical path difference providing structure is provided in the surface from which the light beam from the said semiconductor laser emits. 23.根据权利要求14所述的光通信用的透镜,其特征在于:23. The lens for optical communication according to claim 14, characterized in that: 上述光程差赋予构造设置于来自上述半导体激光器的光束射出的面。The said optical path difference providing structure is provided in the surface from which the light beam from the said semiconductor laser emits. 24.根据权利要求15所述的光通信用的透镜,其特征在于:24. The lens for optical communication according to claim 15, characterized in that: 上述光程差赋予构造设置于来自上述半导体激光器的光束射出的面。The said optical path difference providing structure is provided in the surface from which the light beam from the said semiconductor laser emits. 25.根据权利要求16所述的光通信用的透镜,其特征在于:25. The lens for optical communication according to claim 16, characterized in that: 上述光程差赋予构造设置于来自上述半导体激光器的光束射出的面。The said optical path difference providing structure is provided in the surface from which the light beam from the said semiconductor laser emits. 26.根据权利要求17所述的光通信用的透镜,其特征在于:26. The lens for optical communication according to claim 17, characterized in that: 上述光程差赋予构造设置于来自上述半导体激光器的光束射出的面。The said optical path difference providing structure is provided in the surface from which the light beam from the said semiconductor laser emits. 27.根据权利要求18所述的光通信用的透镜,其特征在于:27. The lens for optical communication according to claim 18, characterized in that: 上述光程差赋予构造设置于来自上述半导体激光器的光束射出的面。The said optical path difference providing structure is provided in the surface from which the light beam from the said semiconductor laser emits. 28.根据权利要求19所述的光通信用的透镜,其特征在于:28. The lens for optical communication according to claim 19, characterized in that: 上述光程差赋予构造设置于来自上述半导体激光器的光束射出的面。The said optical path difference providing structure is provided in the surface from which the light beam from the said semiconductor laser emits. 29.根据权利要求20所述的光通信用的透镜,其特征在于:29. The lens for optical communication according to claim 20, characterized in that: 上述光程差赋予构造设置于来自上述半导体激光器的光束射出的面。The said optical path difference providing structure is provided in the surface from which the light beam from the said semiconductor laser emits. 30.一种半导体模块,其特征在于:30. A semiconductor module characterized by: 将权利要求1~29中的任意一项所述的光通信用的透镜和半导体激光器一体地组装而成。A lens for optical communication according to any one of claims 1 to 29 is integrally assembled with a semiconductor laser. 31.根据权利要求30所述的半导体模块,其特征在于:31. The semiconductor module according to claim 30, characterized in that: 上述透镜安装于将上述半导体激光器密封的筐体。The lens is attached to a housing that seals the semiconductor laser. 32.根据权利要求30所述的半导体模块,其特征在于:32. The semiconductor module according to claim 30, characterized in that: 上述透镜和密封上述半导体激光器的筐体是一体的。The above-mentioned lens is integrated with a casing that seals the above-mentioned semiconductor laser.
CN201280013685.2A 2011-03-18 2012-03-14 Optical communication lenses and semiconductor modules Expired - Fee Related CN103503253B (en)

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