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CN103506819B - Surface coated cutting tool - Google Patents

Surface coated cutting tool Download PDF

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Publication number
CN103506819B
CN103506819B CN201310225253.4A CN201310225253A CN103506819B CN 103506819 B CN103506819 B CN 103506819B CN 201310225253 A CN201310225253 A CN 201310225253A CN 103506819 B CN103506819 B CN 103506819B
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degree
layer
inclination angle
degrees
normal
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CN103506819A (en
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五十岚诚
奥出正树
长田晃
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/28Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/403Oxides of aluminium, magnesium or beryllium

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The invention provides a surface coated cutting tool, a hard coated layer plays roles of excellent knife broken resistance and wear resistance in high-speed interrupted cutting processing. The surface coated cutting tool is coated and formed with a Ti compound layer and an Al2O3 layer on a matrix surface, wherein for crystal particles of the Al2O3 layer, when inclination angle distribution is obtained, the inclination angles being angles of a normal of a measuring (0001) surface relative to a normal of the matrix surface, peak values with peak intensities of I1 and I respectively exit in an inclination angle division area in a range of more than 0 DEG and less than 5 DEG, and an inclination angle division area in a range of more than 5 DEG and less than 10 DEG. The ratio of the peak intensities I1/I2 satisfies 1<I1/I2<3, and ratios of degrees exist in the inclination angle division areas are 45-70% and 15-40%. In addition, between adjacent crystal particles, crystal boundary ratio that angular difference formed by the normal of the (0001) surface is lower than 5 DEG is more than 80%, and crystal boundary ratio that angular difference formed by the normal of a (10-10) surface is 5-30 DEG is more than 80%.

Description

Surface-coated cutting tool
Technical field
The present invention relates to a kind of surface-coated cutting tool(Hereinafter referred to as coating tool), its hard coating layer is in steel or casting Iron etc. produces with hyperpyrexia and cutting edge is applied to play excellent resistance in the high rate intermittent machining of impact load Collapse knife and wear resistance.
Background technology
Conventionally, there is known generally by tungsten carbide(Represented with WC below)Base cemented carbide or titanium carbonitride(Hereinafter use TiCN is represented)The matrix that based ceramic metal is constituted(Hereinafter they are referred to tool base)Surface on formed by following(a) And(b)The coating tool of the hard coating layer of composition:
(a)Lower layer is Ti compound layers, and it is by the carbide for carrying out the Ti that chemical vapor deposition is formed(Hereinafter, with TiC tables Show)Layer, nitride(Hereinafter, represented with TiN)Layer, carbonitride(Hereinafter, represented with TiCN)Layer, oxycarbide(Hereinafter, with TiCO is represented)Layer and carbon nitrogen oxide(Hereinafter, represented with TiCNO)More than the two-layer in layer constitute, and it is total with 3~20 μm Average thickness,
(b)The aluminum oxide that upper layer is formed for chemical vapor deposition(Below with Al2O3Represent)Layer, it has 1~25 μm flat Equal thickness.
Also, above-mentioned conventional coating tool, although wear resistance is relatively excellent, but under high rate intermittent machining condition Easily produce when using and collapse the abnormal wears such as knife, therefore the structure to hard coating layer proposes various schemes.
For example, propose as Patent Document 1 in the instrument base being made up of WC base cemented carbides, TiCN based ceramic metals On the surface of body cladding be formed be made up of Ti compound layers lower layer, by Al2O3The coating tool of the upper layer that layer is constituted In, coat to form Al as upper layer2O3Layer realizing the scheme of the resistance to improvement for collapsing knife, wherein, scanned using field emission type Electron microscope and EBSD image device, to each be present in the measurement range in surface grinding face with six The crystal plane that the crystal grain of prismatic crystal lattice irradiates electron ray to determine the crystal grain is i.e.(0001)The normal in face is relative to matrix surface Normal formed by inclination angle and when making inclination angle number of degrees scatter chart, the Al2O3Layer is displayed in the range of 0~10 degree There is peak-peak in inclination angle zoning, and the total of the number of degrees being present in the range of this 0~10 degree accounts for the inclination angle number of degrees The inclination angle number of degrees scatter chart of the ratio of the number of degrees are overall in scatter chart more than 45%.
Also, propose to be coated on the surface of tool base as shown in patent document 2 and be formed with by Ti compound layer structures Into lower layer, by Al2O3Layer constitute upper layer coating tool in, by upper layer is constituted by upper layer and lower layer come Improve the resistance to scheme that collapse knife of the hard coating layer in the processing of high speed heavy cut, wherein, determine the crystallization of the crystal grain of upper layer Face is(0001)Making during the number of degrees scatter chart of inclination angle, upper layer is displayed in 0~15 at inclination angle formed by the normal in face Total degree of accounting for of the number of degrees that the inclination angle zoning in the range of degree has peak-peak and is present in the range of this 0~15 degree The inclination angle number of degrees scatter chart of the ratio of more than the 50% of number entirety, lower layer is displayed in the inclination in the range of 75~90 degree The number of degrees that angle zoning has peak-peak and is present in the range of this 75~90 degree it is total account for the number of degrees it is overall 50% with On ratio inclination angle number of degrees scatter chart.
Also, propose the cladding on the surface of tool base as shown in patent document 3 to be formed with by granular crystal tissue TiN layer, TiCN layer constitute adhesive bond layer, be made up of the l-TiCN layers with longitudinal growth crystalline structure tough layer, In the coating tool of the reinforcement hard layer being made up of the aluminum oxide organized with α types crystalline texture and granular crystal, by being formed Strengthen hard layer to improve the resistance to scheme that collapse knife of the hard coating layer in the processing of high speed heavy cut, wherein, for by the oxygen Change the reinforcement hard layer that aluminium is constituted, determine the crystal plane of alumina grain(0001)Method of the normal in face relative to surface grinding face Inclination angle formed by line and when making inclination angle number of degrees scatter chart, at least the 7~15 of number of degrees scatter chart at inclination angle There is peak value in inclination angle zoning in the range of degree and the inclination angle zoning in the range of 0~7 degree, and to incline Account for the overall ratio of the number of degrees in angle number scatter chart, the number of degrees being present in the range of described 7~15 degree add up to 35~ 50%, the number of degrees that are present in the range of described 0~7 degree add up to 25~40%.
Patent document 1:Japanese Unexamined Patent Publication 2005-205586 publications
Patent document 2:Japanese Unexamined Patent Publication 2007-152491 publications
Patent document 3:Japanese Unexamined Patent Publication 2006-123031 publications
Present situation is as follows:In recent years, the high performance of topping machanism significantly, on the one hand the saving labourization to machining and The requirement of energy-saving and cost degradation is strong, and with this more high speed, efficient trend are machined with.Also, from scheme The thick-film that hard coating layer is also required from the viewpoint of the life of life tools is sought, but, for example realize hard Clad(The Al of such as upper layer2O3Layer)Thick-film when, above-mentioned conventional coating tool, especially by it be used for machining condition Harsh high rate intermittent cutting, i.e., produce with hyperpyrexia and apply interrupted impact repeatedly to cutting edge portion with extremely short spacing When the high rate intermittent of load cuts, it cannot be said that the Al of upper layer2O3The elevated temperature strength of layer, toughness, adhesiveness are sufficient, therefore Cutting edge portion is also easy to produce and collapses knife, as because reaching service life within the shorter time.
The content of the invention
Therefore, the present inventor etc. from the above point of view, in order to the resistance to of hard coating layer for improving coating tool collapses knife And make hard coating layer that excellent wear resistance is played in Long-Time Service, it is conceived to the Al for constituting upper layer2O3Crystal grain Orientation form, orientation ratio etc. repeat the result furtherd investigate, and have obtained following opinion.
Find as follows:When in the tool base being made up of tungsten carbide base carbide alloy or base titanium carbonitride Surface, evaporation forms Ti compound layers as lower layer, carbide (TiC) layer, nitride (TiN) of the Ti compound layers by Ti One layer or two-layer above structure in layer, carbonitride (TiCN) layer, oxycarbide (TiCO) layer and carbon nitrogen oxide (TiCNO) layer Into, and with 3~20 μm of overall average thickness, also, evaporation forms aluminum oxide (Al2O3) layer as upper layer, the alumina layer With 1~25 μm of average thickness, now, after the lower layer being made up of Ti compound layers is formed, above, for example, lead to Cross common chemical evaporation plating device and form Al2O3Core, then, to the Al2O3The surface of core is implemented after gas etch process, will The Al of desired thickness2O3Layer evaporation is formed as upper layer, then be deposited with the Al of the upper layer of formation2O3Can be formed on layer and be had Special orientation form, the Al of orientation ratio2O3Crystal grain.
Also, for this Al2O3Crystal grain, determine (0001) face normal relative to matrix surface normal formed by incline Oblique angle come when obtaining the inclination angle number of degrees and being distributed, at 0 degree less than the inclination angle zoning in the range of 5 degree and more than 5 degree And less than the inclination angle zoning in the range of 10 degree, it is respectively present the peak value that peak intensity is I1, I2, the ratio of the peak intensity I1/I2Meet 1 < I1/I2< 3, also, be present in respective inclination angle zoning number of degrees ratio be 45~70%, 15~ 40%, in addition, being imported into relative to tool base normal to a surface direction, angle formed by the normal in (0001) face of neighboring die Degree difference is the crystal boundary that angulation difference between less than 5 degree, and the normal in (10-10) face of neighboring die is 5~30 degree, by This, Al2O3The elevated temperature strength and toughness of layer is improved.
Therefore, though the cutting coating tool that will be provided with as above hard coating layer be used for such as steel or cast iron etc. with When hyperpyrexia is produced and applies the high rate intermittent machining of interrupted impact load to cutting edge, due to upper layer have it is excellent Elevated temperature strength and toughness, therefore can also suppress to collapse the generation of knife, and can play excellent wear-resisting in Long-Time Service Damage property.
The present invention is completed according to above-mentioned result of study, with following feature:
A kind of " surface-coated cutting tool, what is be made up of tungsten carbide base carbide alloy or base titanium carbonitride On the surface of tool base, cladding is formed with the hard coating layer being made up of following (a) lower layer and (b) upper layer, wherein,
A () lower layer is by the carbide lamella of Ti, nitride layer, carbonitride layer, oxycarbide layer and carbon nitrogen oxide More than one layer in layer or two-layer constitute, and with the Ti compound layers of 3~20 μm of overall average thickness,
B () upper layer is the alumina layer with 1~25 μm of average thickness, wherein,
(c)For above-mentioned(b)Alumina layer, using field emission type SEM and EBSD figure As device, the crystal grain with hexagoinal lattice being present in each in the measurement range in surface grinding face irradiates electron ray to survey The crystal plane of the fixed crystal grain(0001)Normal relative to matrix surface normal formed by inclination angle, will it is described measure incline In oblique angle inclination angle is determined by being divided per 0.25 degree of spacing in the range of 0~45 degree, and measure adds up to and deposits When being that the inclination angle number of degrees of the number of degrees in each zoning are distributed, at 0 degree less than inclining in the range of 5 degree Oblique angle zoning and 5 degree are respectively present peak intensity for I less than the inclination angle zoning in the range of 10 degree1、I2 Peak value, and the ratio I of the peak intensity1/I2Meet 1 < I1/I2< 3, also, it is present in above-mentioned 0 degree less than 5 degree In the range of inclination angle zoning in the number of degrees total number of degrees for accounting in the number of degrees scatter chart of inclination angle it is overall 45 ~70% ratio, is present in above-mentioned 5 degree less than the total of the number of degrees in the inclination angle zoning in the range of 10 degree The ratio of the 15~40% of the number of degrees entirety accounted in the number of degrees scatter chart of inclination angle, surveys in addition, in adjacent crystal grain each other It is fixed(0001)During the normal angulation difference in face, it is more than 80% that differential seat angle is less than 5 degree of crystal boundary ratio, also, adjacent Crystal grain each other, determine(10-10)Between the normal in face during angulation difference, differential seat angle is 5~30 degree of crystal boundary ratio For more than 80%.”
Then, more specific description is carried out to the structure sheaf of the hard coating layer of the coating tool of the present invention.
Ti compound layers(Lower layer):
Ti compound layers itself have elevated temperature strength, and hard coating layer possesses elevated temperature strength by its presence, except this Outside, it is Al with tool base and upper layer2O3Layer is adhered to securely, thus relative with hard coating layer is favorably improved In the effect of the adhesiveness of tool base, if but its overall average thickness is less than 3 μm, above-mentioned effect cannot be given full play to, it is another Aspect, if its overall average thickness is more than 20 μm, particularly easily causes heat in high thermogenetic high rate intermittent cutting Plastic deformation, the reason for this becomes partial wear, therefore, its overall average thickness is set to into 3~20 μm.
Al2O3Layer(Upper layer):
Al2O3Layer typically has excellent high temperature hardness and heat resistance, is favorably improved the wear resistance of hard coating layer, If but its average thickness is less than 1 μm, hard coating layer cannot be made to play sufficient wear resistance.On the other hand, in order to realize The life of life tools, can be averaged thickness and thicken to 25 μm, but become if average thickness is more than 25 μm Thickness, easily produces and collapses knife, therefore, it is averaged thickness and is set to 1~25 μm.
Based on of the invention by the Al with special crystalline orientation form, orientation ratio2O3The upper layer that layer is constituted, example If to be formed to be deposited with by evaporation forming method shown below.
That is, formed after the lower layer being made up of Ti compound layers with common chemical vapor deposition method, on the lower layer, Common chemical evaporation plating device is for example used,
" the 1st stage "
In following condition(Referred to as Al2O3Core formation condition)Under, Al is formed till thickness becomes 300~500nm2O3 Core,
Reacting gas is constituted(Capacity %):AlCl30.1~0.5%, CO28~12%, HCl6~10%, residue H2
Reaction atmosphere temperature:750~900 DEG C,
Reaction atmosphere pressure:6~10kPa.
" the 2nd stage "
In following condition(Referred to as etching condition)Under, implement etch processes,
Reacting gas is constituted(Capacity %):AlCl30.1~0.5%, HCl1~3%, residue H2
Reaction atmosphere temperature:750~900 DEG C,
Reaction atmosphere pressure:6~10kPa.
" the 3rd stage "
In following condition(Referred to as secondary evaporation formation condition)Under, until it reaches evaporation is formed till the thickness of target top Al2O3,
Reacting gas is constituted(Capacity %):AlCl32~5%, CO23~8%, HCl6~10%, H2S0.25~0.6%, residue H2
Reaction atmosphere temperature:950~1020 DEG C,
Reaction atmosphere pressure:6~10kPa.
In 3 above-mentioned stages, Al is formed by evaporation2O3, can be formed by with special orientation form, orientation The Al of ratio2O3The upper layer that layer is constituted.
In addition, forming Al by the evaporation in above-mentioned 3 stages2O3To form the machine of special orientation form, orientation ratio Reason is not yet elucidated with, but is considered by the Al in the 1st stage2O3Karyomorphism into and the 2nd stage etch processes, aufwuchsplate occur Change and cause the change that the preferred growth of crystal grain is orientated.
Also, in the upper layer, in adjacent crystal grain(0001)The normal in face is relative to tool base normal to a surface The differential seat angle at angle formed by direction is that less than 5 degree of crystal boundary is imported into more than 80% crystal boundary ratio, in addition, in adjacent crystalline substance Grain is each other(10-10)The poor crystal boundary for 5~30 degree of angulation is led with more than 80% crystal boundary ratio between the normal in face Enter.
Also, it is less relative to the composition in the inclined direction of tool base normal direction on this crystal boundary, torsional direction Composition occupies the majority, therefore periodic structure is formed in the clad direction of growth, plays excellent grain-boundary strength, as a result, tool Standby excellent elevated temperature strength and toughness, and the effect of the propagation/progress with the crackle for suppressing to be produced in layer, therefore in companion There is hyperpyrexia to produce and cutting edge is applied in the high rate intermittent machining of interrupted impact load, play and excellent resistance to collapse knife Property, wear resistance.
For the Al to the upper layer of above-mentioned middle evaporation formation2O3Layer, carries out dividing for crystalline orientation form, orientation ratio etc. Analysis, using field emission type SEM and EBSD image device, to each surface grinding face is present in Measurement range in hexagoinal lattice crystal grain irradiation electron ray come determine the crystal grain crystal plane i.e.(0001)Face Normal relative to matrix surface normal formed by inclination angle, and 0~45 degree of scope will be in the measure inclination angle The interior inclination angle that determines determines the number of degrees that total is present in each zoning by being divided per 0.25 degree of spacing The distribution of the inclination angle number of degrees, as a result at 0 degree less than the inclination angle zoning in the range of 5 degree and more than 5 degree And less than the inclination angle zoning in the range of 10 degree peak intensity is respectively present for I1、I2Peak value, and the ratio of the peak intensity Value I1/I2Meet 1 < I1/I2< 3.
Additionally, there are in above-mentioned 0 degree less than the total of the number of degrees in the inclination angle zoning in the range of 5 degree The ratio of the 45~70% of the number of degrees entirety accounted in the number of degrees scatter chart of inclination angle, and it is present in 5 degree less than 10 degree In the range of inclination angle zoning in the number of degrees total number of degrees for accounting in the number of degrees scatter chart of inclination angle it is overall 15 ~40% ratio.
Figure 1 illustrates of measurement result of the inclination angle number of degrees distribution of normal for matrix surface.
In addition, as can be known from Fig. 1,0 degree of peak intensity I less than the inclination angle zoning in the range of 5 degree1For 100(Relative intensity), number of degrees ratio be 53%, on the other hand, 5 degree less than the inclination angle zoning in the range of 10 degree Peak intensity I2For 50(Relative intensity), number of degrees ratio be 35%, I1/I2Value be about 2, meet 1 < I1/I2< 3, and exist In 0 degree less than the inclination angle zoning in the range of 5 degree number of degrees ratio meet 45~70%, and be present in 5 degree with Upper and less than the inclination angle zoning in the range of 10 degree number of degrees ratio meets 15~40%.
Also, the test such as the present inventor confirms as follows:In the Al to upper layer2O3The above-mentioned inclination angle number of degrees distribution of layer In measure, peak-peak depart from 0 degree occur less than 5 degree of scope when or 0 degree less than 5 degree of scope Number of degrees ratio depart from 45~70% when, it is impossible to give full play to(0001)The normal in face is relative to tool base normal to a surface side To being present in 0 degree of Al less than 5 degree of scope2O3The high temperature hardness that crystal grain possesses, also, peak intensity I2 occurs without 5 degree less than 10 degree of scope when or 5 degree of number of degrees ratios less than 10 degree of scope depart from 15~40% When, it is impossible to give full play to(0001)The normal in face relative to tool base normal to a surface direction be present in 5 degree less than Al in the range of 10 degree2O3The toughness that crystal grain possesses.
In addition, as upper layer, be intended to obtain it is resistance to collapse knife it is excellent while excellent in wear resistance Al2O3Layer, for above-mentioned Peak intensity I1、I2Ratio I1/I2, need to meet 1 < I1/I2< 3.
That is, I1/I2Value be less than 1 when, Al2O3Layer cannot play sufficient high temperature hardness, therefore the nothing in Long-Time Service Method shows gratifying wear resistance, on the other hand, I1/I2Value be more than 3 when, be able to maintain that sufficient high temperature hardness, but Sufficient toughness, therefore elevated temperature strength and toughness relative reduction cannot be played, is produced with hyperpyrexia and interrupted is applied to cutting edge Impact load high rate intermittent machining in, it is impossible to play and excellent resistance to collapse knife.
Therefore, in the present invention, by the above-mentioned peak intensity I of upper layer1、I2Ratio be set to 1 < I1/I2< 3.
In addition, the Al of upper layer2O3It is mutual in adjacent crystal grain in layer(0001)The normal in face is relative to tool base Normal to a surface direction formed by angle differential seat angle be less than 5 degree of crystal boundary ratio less than 80%, or(10-10)The method in face When the poor crystal boundary ratio for 5~30 degree of angulation is less than 80% between line, the ratio for inclining composition and reverse composition on crystal boundary Example is insufficient, and its result cannot be played and sufficiently resistance to collapse knife.Therefore, will be mutual in adjacent crystal grain in the present invention(0001) The normal in face is set to relative to the crystal boundary ratio that the differential seat angle at angle formed by tool base normal to a surface direction is less than 5 degree More than 80%, also,(10-10)The poor crystal boundary ratio for 5~30 degree of angulation is set to more than 80% between the normal in face.
The lower layer that is made up of Ti compound layers is formed with as hard coating layer evaporation and by Al2O3The top that layer is constituted In the coating tool of the invention of layer, with regard to the Al of upper layer2O3Layer, right(0001)The inclination angle number of degrees distribution of the normal in face In measure, it is present in 0 degree less than the inclination angle zoning in the range of 5 degree and is present in 5 degree less than 10 degree In the range of inclination angle zoning the number of degrees it is total account for respectively the number of degrees it is overall 45~70%, 15~40% ratio, also, In respective inclination angle zoning, peak intensity is respectively present for I1、I2Peak value, I1/I2Value meet 1 < I1/I2< 3, In addition, in adjacent crystal grain each other(0001)Face normal angulation difference for less than 5 degree crystal boundary ratio for 80% with On, also, in adjacent crystal grain each other(10-10)Angulation difference is 5~30 degree of crystal boundary ratio between the normal in face For more than 80%, therefore upper layer possesses excellent high temperature hardness, elevated temperature strength and toughness, is producing with hyperpyrexia and to cutting Sword applies in the high rate intermittent machining of interrupted impact load, and the excellent resistance to knife, resistance to of collapsing is played in Long-Time Service Abrasiveness.
Description of the drawings
Fig. 1 is the Al with regard to constituting the upper layer of the hard coating layer of coating tool 1 of the present invention2O3Layer(0001)Face The inclination angle number of degrees scatter chart of normal.
Specific embodiment
Then, the coating tool of the present invention is specifically described by embodiment.
[embodiment]
Used as material powder, preparation is respectively provided with WC powder, TiC powder, ZrC powder, the VC powder of 1~3 μm of average grain diameter End, TaC powder, NbC powder, Cr3C2Powder, TiN powder and Co powder, by these material powders with the cooperation shown in synthesis table 1 Composition, further adds paraffin, in acetone ball milling mixing 24 hours, and after drying under reduced pressure, the pressure punch forming with 98MPa is The pressed compact of predetermined shape, is kept for 1 hour in the vacuum of 5Pa by the pressed compact with the predetermined temperature in the range of 1370~1470 DEG C Under the conditions of carry out vacuum-sintering, after sintering, by cutting edge portion implement R:The cutting edge reconditioning of 0.07mm processes to manufacture respectively Go out the WC base cemented carbide tool bases A~D with blade shapes specified in iso standard CNMG120408.
Also, used as material powder, preparation is respectively provided with the TiCN of 0.5~2 μm of average grain diameter(It is by quality ratio TiC/ TiN=50/50)Powder, Mo2C powder, ZrC powder, NbC powder, TaC powder, WC powder, Co powder and Ni powder, by these Material powder with the pressure of 98MPa with being combined into, with ball mill wet mixed 24 hours, after being dried, being rushed shown in synthesis table 2 It is molded for pressed compact, the pressed compact is carried out in the blanket of nitrogen of 1.3kPa under conditions of the temperature with 1540 DEG C is kept for 1 hour Sintering, after sintering, by implementing R to cutting edge portion:The cutting edge reconditioning of 0.07mm processes to be formed with iso standard The TiCN based ceramic metal tool bases a~d of the blade shapes of CNMG120412.
Then, using common chemical evaporation plating device, the surface of these tool bases A~D and tool base a~d with Condition shown in table 3 and with the combination shown in table 5 and target thickness, evaporation forms Ti compound layers as under hard coating layer Portion's layer,
Then, it is deposited with the Al to be formed as upper layer with the condition shown in table 4 and using the target thickness shown in table 52O3Layer, So as to produce coating tool of the present invention 1~13 respectively.
Also, with the purpose for comparing, with the condition shown in table 3 and with the combination shown in table 5 and target thickness, evaporation is formed With the identical Ti compound layer of coating tool of the present invention 1~13 as hard coating layer lower layer,
Then, under the conditions shown in Table 4, and using the target thickness shown in table 6 it is deposited with the Al to be formed as upper layer2O3 Layer, so as to produce comparative example coating tool 1~13 respectively.
Then, for the upper layer of the hard coating layer that constitutes the invention described above coating tool and comparative example coating tool Al2O3Layer, carries out inclination angle number of degrees distribution and surveys using field emission type SEM and EBSD image device It is fixed.
First, inclination angle number of degrees scatter chart is made by following:By the Al of upper layer2O3The surface of layer is used as grinding In the state of flour milling, it is placed in the lens barrel of field emission type SEM, relative to the abradant surface, with 70 degree of incidence Angle and the crystalline substance with hexagoinal lattice each being present in the irradiation electric current of 1nA in the measurement range in the surface grinding face The electron ray of the accelerating potential of grain irradiation 15kV, using EBSD image device, with the interval of 0.1 μm/step, It is to the crystal face of crystal grain described in 30 × 50 μm of area tests(0001)Normal of the normal in face relative to the surface grinding face Formed inclination angle, according to the measurement result, by the measure inclination angle in the measure inclination angle in the range of 0~45 degree By being divided per 0.25 degree of spacing, and total number of degrees being present in each zoning.Also, in the above-mentioned inclination angle number of degrees In scatter chart, by the way that peak-peak is obtained into the intensity at each peak as 100 normalization.For each crystal grain, determine described The crystal plane of crystal grain is(0001)The normal in face relative to the surface grinding face normal formed by inclination angle, obtain adjacent Crystal grain each other, it is above-mentioned(0001)The differential seat angle at inclination angle formed by the normal in face is less than 5 degree of crystal boundary length, by this Crystal boundary length is obtained divided by the total crystal boundary length in measurement range(0001)The differential seat angle at inclination angle formed by the normal in face is 5 Crystal boundary ratio below degree.
Also, the crystal plane for as hereinbefore, determining crystal grain is(10-10)Inclination angle formed by the normal in face, obtains In adjacent crystal grain each other, it is above-mentioned(10-10)The differential seat angle at inclination angle formed by the normal in face is that less than 5 degree of crystal boundary is long Degree, is obtained by the crystal boundary length divided by the total crystal boundary length in measurement range(10-10)Inclination angle formed by the normal in face Differential seat angle be less than 5 degree of crystal boundary ratio.
Illustrate in table 5, table 6 in by the inclination angle number of degrees scatter chart obtained in the above described manner, more than 0 degree And determine less than the inclination angle zoning in the range of 10 degree less than the inclination angle zoning in the range of 5 degree and 5 degree Respective number of degrees ratio, value I of respective peak intensity for going out1、I2And I1/I2Value,(0001)The normal angulation in face Difference for less than 5 degree crystal boundary ratio,(10-10)The differential seat angle at inclination angle formed by the normal in face is less than 5 degree of crystal boundary ratio Value.
As one, represent in FIG as obtained by inclination angle number of degrees measure of spread is carried out to coating tool of the present invention 1 Inclination angle number of degrees scatter chart.
Such as it is respectively shown in table 5, table 6, with regard to the Al of coating tool of the present invention2O3Layer, in inclination angle number of degrees distribution curve In figure, 0 degree less than the inclination angle zoning in the range of 5 degree and 5 degree less than in the range of 10 degree Peak value, also, respective peak intensity I are observed respectively in inclination angle zoning1、I2Ratio I1/I2More than 1 and less than 3 In the range of, additionally, there are the number of degrees ratio in respective inclination angle zoning and meet 45~70%, 15~40%.
In contrast, in comparative example coating tool, any one departs from necessary bar specified in the present invention in following condition Part:Only 0 degree less than the inclination angle zoning in the range of 5 degree or 5 degree less than the inclination in the range of 10 degree Observe peak value in arbitrary zoning of angle zoning;0 degree less than the inclination angle zoning in the range of 5 degree or 5 degree are not observed peak value less than the inclination angle zoning in the range of 10 degree;And at 0 degree less than 5 degree of models Inclination angle zoning in enclosing or 5 degree less than in the inclination angle zoning in the range of 10 degree respectively it was observed that peak Value, but peak intensity I2It is relatively low, therefore peak intensity I1、I2Ratio I1/I2Become 3 with first-class.
In addition, using scanning electron microscope to above-mentioned coating tool of the present invention 1~13 and comparative example coating tool 1 The thickness of~13 each layer carries out longitudinal section measure, as a result show substantially with the average thickness of target thickness identical(Survey The mean value of fixed five points).
[table 1]
[table 2]
[table 3]
[table 4]
Then, in the state of the leading section that above-mentioned various coating tools are anchored on instrument steel lathe tool with stationary fixture Under, to coating tool of the present invention 1~13 and comparative example coating tool 1~13,
With following condition(Machining condition A)Carry out the wet type high rate intermittent cutting test of carbon steel(Common cutting speed is 300m/min),
Workpiece:On the length direction of JISS30C be formed with equal intervals 4 pods pole,
Cutting speed:450m/min、
Cutting depth:1.3mm、
Feed speed:0.15mm/rev、
Cutting time:6 minutes,
With following condition(Machining condition B)Carry out the wet type high rate intermittent cutting test of steel alloy(Common cutting speed For 250m/min),
Workpiece:Be formed with equal intervals on the length direction of JISSCM415 4 pods pole,
Cutting speed:450m/min、
Cutting depth:2.0mm、
Feed speed:0.15mm/rev、
Cutting time:6 minutes,
With following condition(Machining condition C)Carry out the dry type high rate intermittent cutting test of plain cast iron(Common cutting speed Spend for 300m/min),
Workpiece:Be formed with equal intervals on the length direction of JISFC300 4 pods pole,
Cutting speed:440m/min、
Cutting depth:1.5mm、
Feed speed:0.3mm/rev、
Cutting time:6 minutes,
The wear of the tool flank width of cutting edge is determined in arbitrary cutting test.
Its measurement result is shown in table 7.
[table 7]
The hurdle of comparative example coating tool one illustrates to collapse the cutting being produced as reason reaches the life-span of the Abnormal damages such as knife Time (minute)
The hurdle of comparative example coating tool one illustrates to collapse the cutting being produced as reason reaches the life-span of the Abnormal damages such as knife Time(Minute)
Knowable to the result shown in table 5~7, in coating tool of the present invention 1~13, the Al of upper layer2O3Layer is right(0001) In the inclination angle number of degrees scatter chart of the normal in face, at 0 degree less than the inclination angle zoning and 5 in the range of 5 degree Degree is respectively present peak intensity for I less than the inclination angle zoning in the range of 10 degree1、I2Peak value, also, I1/I2 Value meet 1 < I1/I2< 3, also, be present in respective inclination angle zoning the number of degrees add up to 45~70%, 15~ 40%, in addition, in adjacent intercrystalline,(0001)Face normal angulation difference for less than 5 degree crystal boundary ratio for 80% with On, also,(10-10)The poor crystal boundary ratio for 5~30 degree of angulation is more than 80% between the normal in face, so as to possess Excellent high temperature hardness, elevated temperature strength and toughness, are producing with hyperpyrexia and to cutting edge are applying interrupted impact load In high rate intermittent machining, play in Long-Time Service and excellent resistance to collapse knife, wear resistance.
In contrast, such as there is no intensity peak I less than the inclination angle zoning in the range of 10 degree at 5 degree2 Comparative example coating tool 1, I1/I2Comparative example coating tool 2 of the value more than 3 shown in, depart from necessary bar specified in the present invention The comparative example coating tool of part, with the reason that is produced as collapsing the Abnormal damages such as knife the life-span is reached at short notice, therefore at a high speed In interrupted cut processing, any comparative example coating tool all cannot play excellent cutting ability in Long-Time Service.
Industrial applicability
As described above, coating tool of the invention not only continuously cutting in the case where the usual conditions of various steel or cast iron etc. are used in Cut or during interrupted cut, and especially produce with hyperpyrexia and interrupted impact load is applied to cutting edge portion being used in When high rate intermittent cuts, also show that it is excellent it is resistance to collapse knife, excellent wear resistance is played in Long-Time Service, therefore, it is possible to Be enough to tackle saving labourization, energy-saving and the cost degradation of the high performance of topping machanism and machining.

Claims (1)

1. a kind of surface-coated cutting tool, in the instrument being made up of tungsten carbide base carbide alloy or base titanium carbonitride On the surface of matrix, cladding is formed with the hard coating layer being made up of following (a) lower layer and (b) upper layer,
A () lower layer is by the carbide lamella of Ti, nitride layer, carbonitride layer, oxycarbide layer and carbon nitrogen oxide layer One layer or two-layer more than constitute, and with the Ti compound layers of 3~20 μm of overall average thickness,
B () upper layer is the alumina layer with 1~25 μm of average thickness,
The surface-coated cutting tool is characterised by,
C the alumina layer of () for above-mentioned (b), is filled using field emission type SEM and EBSD image Put, the crystal grain with hexagoinal lattice being present in each in the measurement range in surface grinding face irradiates electron ray to determine State crystal grain crystal plane (0001) normal relative to matrix surface normal formed by inclination angle, will be at the measure inclination angle In determine inclination angle by being divided per 0.25 degree of spacing in the range of 0~45 degree, and measure adds up to and is present in When the inclination angle number of degrees of the number of degrees in each zoning are distributed, draw less than the inclination angle in the range of 5 degree at 0 degree Subregion and 5 degree are respectively present peak intensity for I less than the inclination angle zoning in the range of 10 degree1、I2Peak value, And the ratio I of the peak intensity1/I2Meet 1 < I1/I2< 3, also, it is present in above-mentioned 0 degree less than in the range of 5 degree Inclination angle zoning in the number of degrees total number of degrees for accounting in the number of degrees scatter chart of inclination angle it is overall 45~70% Ratio, is present in above-mentioned 5 degree and accounts for inclination less than the total of the number of degrees in the inclination angle zoning in the range of 10 degree The ratio of 15~40% of the number of degrees entirety in angle number scatter chart, determines in addition, in adjacent crystal grain each other (0001) during the normal angulation difference in face, it is more than 80% that differential seat angle is less than 5 degree of crystal boundary ratio, also, adjacent Crystal grain each other, when determining angulation difference between the normal in (10-10) face, differential seat angle is 5~30 degree of crystal boundary ratio For more than 80%.
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CN1524653A (en) * 2003-02-28 2004-09-01 �����ۺϲ�����ʽ���� Cermet cutting tool with hard blade-turning preventing surface coating layer
CN1748917A (en) * 2004-06-30 2006-03-22 三菱综合材料株式会社 Surface-coated cermet cutting tool
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