Because radio frequency is to the microwave spectrum application and development, particularly as the research natural material, the important means of synthetic material and bio-tissue, and the application aspect communication and electronic countermeasure, complex permittivity ε=ε '-j the ε " and complex permeability μ=μ '-j μ " that measures various organic and inorganic dielectrics, semiconductor, ferrite etc. more and more increases its importance, in, the existing many reliable measuring methods of low-loss material; For high consumable material, the past is extensively adopted the open circuit-short-circuit method of slotted line, but when the sample loss was increased, the measuring error of this method significantly raise, and sensitivity descends, and its measurement result is difficult to meet the demands.ADA 100764, ADA120577 have introduced two scattering system S that utilize microwave vector network analyzer to measure setting-out product device
11And S
21, by the complex permeability of relevant formula calculating microwave absorbing material.This test macro is used to measure scattering coefficient S by microwave signal source
11And S
21Setting-out product device and microwave vector network analyzer constitute, utilize the computing machine accuracy to develop skill, can satisfy present requirement.
Yet microwave vector network analyzer does not possess the function of direct measurement material electromagnetic parameter, when the needs this respect is used, also will solve some special technique problem and calculation procedures.For example to design the setting-out product device of strip line or other structures voluntarily, and the X-over relevant with these structures; Or dispose high performance coaxial-waveguide transitions.These all are highly difficult work, and often are difficult to obtain satisfied result.Although the upper limiting frequency of microwave vector network analyzer has reached 100GHz, the highest frequency of measuring ε, μ with it is about 20GHz.In addition, such network analyzer cost an arm and a leg (the 8510A type of hp company is to 180,000 dollars of a complete set of instrument prices of 20GHz).
The purpose of this invention is to provide a kind of complex permittivity of microwave absorbing material and the method for testing and the system of complex permeability.Adopt common microwave device and electronic device to constitute interference unit and the setting-out product device that can carry out four kinds of different measurings conversions, adopt calibration technology and matching measurement method, realize basic electromagnetic parameter with the high consumable material of low price instrument high-acruracy survey.
In order to achieve the above object, the present invention has taked following measures:
S parameter measurement unit microwave interference method; Setting-out product device is used for reference signal to S
11And S
21Calibration measurement, reflection measurement, the conversion of transmission measurement; Utilize calibration technology and matching measurement method to obtain scattering coefficient S
11And S
21Said calibration technology and matching measurement method are to measure S
11And S
21Before, respectively reference signal is calibrated measurement, measure the variation that standing wave node after the signal of sample reflection and transmission and reference signal are interfered and attenuator reading correspond to when calibrating then respectively and obtain scattering coefficient S
11And S
21The S parameter measurement unit is made up of attenuator, standing wave measurement line, isolator, power sensor and indicator.The setting-out product device that can carry out four kinds of different measuring conversions contains the element that reference signal is carried out two kinds of calibrations.
The present invention can combine with ready-made microwave unit, device and electronic device, does not need to design in addition the device of setting-out product.Sample is the rectangular parallelepiped of processing easily, it is all fairly simple with operation to set up system, do not need computing machine to carry out error correction, be applicable to the broad frequency range of 3~40GHz, the price of each waveguide frequency range is no more than 30,000 yuans, but getable measuring accuracy is not less than the result who obtains with microwave network analyzer.
Be described in further detail below in conjunction with accompanying drawing.
Microlock signal source (1) is passed through isolator (2), 10dB directional coupler (3) with the signal separated into two parts, after wherein a part enters the waveguide segment (19) of setting-out product by isolator (4), 3dB directional couple (5) and matched load (6) output source signal (II), absorbed by matched load (22).Its reflected signal (III) and transmission signal (IV) feed out by two 10dB directional couplers (15) and (21) respectively.Choose one of them by waveguide switch (23) and enter isolator (14) to standing wave measurement line (11).Export reference signal from another part signal (I) that directional coupler (3) comes out by isolator (7), variable attenuator (8) and precision rotating formula variable attenuator (9), enter isolator (10) to standing wave measurement line (11).The adjustable reference signal of amplitude is interfered with the reflected signal (or transmission signal) that comes out through directional coupler in slotted line (11), forms standing wave.With high sensitivity microwave power sensor (10
-9~10
-10Watt) (12) and power indicator (13) survey and indicate.Waveguide switch (16) is dressed up by two waveguide switches, can be operated in (a) and (b), (c) three positions, when (16) in the position when (a), with S
11Scale elements (17) connect, be used for reference signal to S
11Calibration measure.When (16) in the position when (b), with S
21Scale elements (18) connect; When (16), are connected with the waveguide segment (19) of setting-out product when (c) in the position.(18), (19) be one section waveguide with same length, waveguide switch (20) can be connected with (18), (19) respectively.Locate at (b) when (16), (20) are located at (d), then are used for reference signal S
21Calibration measure; Locate at (c) when (16), (20) are located at (e), cooperate waveguide switch (23) then can reflect respectively and transmission measurement.The element that reference signal is carried out two kinds of calibrations is to be led by a joint shortwave to constitute with short board and be made of a joint waveguide separately.
The effect of (1)~(6) is the two-way that microwave signal is divided into enough isolations in the system, i.e. reference signal (I) and source signal (II).(7)~(14) constitute the microwave interference unit, slotted line plays the fine phase meter here.(15)~(23) be configured for reference signal to S
11And S
21Calibration measurement, reflection and the setting-out product device of transmission measurement conversion.Wherein (15), (16), (18), (20), (21), (22) constitute S
21The calibration branch road, (15), (16), (19), (20), (21), (22) constitute the branch road of setting-out product.When the latter did not contain sample, these two branch roads had identical decay and phase performance.And (15), (16), (17) constitute S
11The calibration branch road, the branch road that it is constituted when the short circuit of setting-out product reference field MN place with (15), (16) and (19) has identical decay and phase performance.When utilizing these calibration branch roads to compare measurement with the sample branch road,, obtain scattering coefficient S accurately with regard to the phase place of energy removal system and the error of decay by calibration technology
11And S
21
Therefore, main points of the present invention are to measure, calibrating method: promptly measure with twice calibration, primary event is measured and a transmission measurement is asked for scattering coefficient S
11And S
21, promptly, just can carry out above-mentioned four kinds of different measurements when waveguide switch (16), (20) and (23) during at diverse location:
(1) reference signal is to S
11Calibration measure: waveguide switch (16) is located at (a), and (23) are located at (f).
(2) reflection measurement: waveguide switch (16) is located at (c), and (23) are located at (f), and (20) are located at (e).
(3) reference signal is to S
21Calibration measure: waveguide switch (16) is located at (b), and (20) are located at (d), and (23) are located at (g).
(4) transmission measurement: waveguide switch (16) is located at (c), and (20) are located at (e), and (23) are located at (g).
Measure acquisition S from (one), (two)
11
Measure acquisition S from (three), (four)
21
Be described as follows with formula:
S
11=exp〔-(0.11513A
r+jφ
r)〕,φ
r=π- (4πPr)/(λg) ;
S
21=exp〔-(0.11513A
t+jφ
t)〕,φ
t= (4πP
t)/(λ
g) + (2πl)/(λ
g) 。
λ in the formula
gBe waveguide wavelength (cm) that l is sample length (cm);
A
r=A
Ri-A
RoAttenuator reading (the dB)-S of=reflection measurement
11The attenuator reading (dB) of calibration.
P
r=P
Ro-P
Ri+ n (λ
g)/2=(S
11Standing wave node position (cm)+1/2 integral multiple waveguide wavelength of standing wave node position (cm)-reflection measurement is measured in calibration)<1/2 waveguide wavelength.
A
t=A
Ei-A
EoAttenuator reading (the dB)-S of=transmission measurement
21The attenuator reading (dB) that calibration is measured.
P
t=P
Ti-P
ToThe standing wave node position (cm) of=transmission measurement-to S
21Standing wave node position (cm) when calibration is measured.
From S
11, S
21Calculate formula (but the Ma Ji Du E that ε, μ press the ADA100764 report
01The difference of ripple and TEM ripple) carries out.So only need frequency f, thickness of sample l, scattering coefficient S with signal source
11And S
21The input computing machine is with regard to the printable complex permittivity ε=ε '-j ε " and complex permeability μ=μ '-j μ " that goes out material.
Compare as follows with the measurement result of teflon sample and the result of ADA100764 report:
Native system ADA100764
Frequency range (GHz): 8.2~12.4 9.2~19.2
Measure dot number 23 23
*)
ε ' mean value 2.052 2.057
ε ' standard deviation 0.088 0.139
ε " average fluctuation range+0.101~-0.133+0.159~-0.100
μ ' mean value 0.993 1.00
μ ' standard deviation 0.039 0.058
μ " average fluctuation range+0.0667~-0.0296+0.018~-0.0716
5.98mm
Thickness of sample 12.00mm 180mils
17.88mm
*) delete the point of three deviation maximums from 26 test points.