CN103203173A - Exhaust gas treatment equipment - Google Patents

Abstract

The invention provides a waste gas treatment device, which is used for treating waste gas and comprises a precipitation tank and a washing device arranged on the precipitation tank, wherein the washing device comprises an air inlet washing tower, an air outlet washing tower and at least one washing tower set, the washing tower set further comprises a first washing tower and a second washing tower, and the first washing tower and the second washing tower are locally communicated with each other; the sedimentation tank is used for containing a washing liquid and is provided with at least two tank bodies; the gas inlet and first washing tower, the gas outlet and second washing tower are communicated with each other through different tank bodies in the settling tank respectively, when waste gas enters the waste gas treatment equipment for treatment, the waste gas sequentially passes through the gas inlet washing tower, the corresponding space in the tank body, the space in the first washing tower, the second washing tower and the other tank body in the settling tank, the gas outlet washing tower, and finally the purified waste gas is discharged from the gas outlet washing tower.

Description

Exhaust gas treatment equipment

technical field

The invention relates to a waste gas treatment device, in particular to a waste gas treatment device composed of at least four washing towers.

Background technique

Process waste gases from general industrial processes often contain toxic substances and are stinky, causing air pollution if the waste gases are not properly treated. In order to remove pollutants in the exhaust gas, the exhaust gas must be treated with air pollution prevention and control equipment so that the concentration of pollutants in the exhaust gas is lower than the limit value stipulated by regulations. The air pollution prevention and control equipment commonly used in the industry is the scrubber exhaust gas treatment system. The scrubber exhaust gas treatment system removes pollutants in the exhaust gas by liquid washing.

Fig. 1 is a schematic diagram of a scrubber waste gas treatment system 1 for treating process waste gas in the prior art. The scrubber waste gas treatment system 1 includes an air intake device 12 , a scrubber supply device 14 , a settling tank 16 , a scrubber 18 and the like. The washing solution supply device 14 further includes a circulation pump 141 , a pipeline 142 and a spraying device (not shown) arranged in the washing tower 18 .

When the scrubber waste gas treatment system 1 is in operation, firstly, the scrubber is transported to the top of the scrubber 18 by the circulation pump 141 through the pipeline 142 , and then enters the scrubber 18 from the top. Next, the washing liquid is evenly sprinkled by the spraying equipment and returned to the bottom of the washing tower 18, and then transported to the top of the tower by the circulation pump 141 to form a cycle. On the other hand, the exhaust gas is introduced into the washing tower 18 from the bottom or top of the tower, and then flows upward or downward and contacts with the washing liquid, so that the pollutants in the exhaust gas dissolve into the washing liquid, and the purified gas is discharged from the top of the tower.

Generally speaking, the greater the contact area between the scrubbing liquid and the exhaust gas, the better the exhaust gas scrubbing effect of the scrubber 18, so the scrubber 18 usually needs to be designed to have a large liquid surface area and the lowest gas pressure loss. In order to achieve the above purpose, packing materials are usually filled in the washing tower 18 to increase the exchange area of liquid and gas, so as to improve the washing efficiency of exhaust gas. Commonly used filling materials such as Raschig rings, etc.

With the development of the technology industry, the semiconductor process is constantly updated, so the waste gas produced contains more and more complex pollutant components, which cannot be properly treated by the scrubber waste gas treatment system of the existing technology.

Contents of the invention

The object of the present invention is to provide a waste gas treatment equipment composed of at least four washing towers to effectively treat the waste gas produced by the new process.

In order to achieve the above object, the present invention provides a waste gas treatment equipment for treating waste gas, including a settling tank and a washing device installed on the settling tank, the settling tank has at least two pools for containing a washing liquid The scrubbing device includes an inlet scrubber, an outlet scrubber, and at least one scrubber group, and the scrubber group further includes a first scrubber and a second scrubber, and the first scrubber and the second scrubber are partially connected to each other connected, the inlet scrubber and the first scrubber are located above the same pool of the settling tank, while the outlet scrubber and the second scrubber are located above another pool in the settling tank, when the settling tank is filled with When the washing liquid is used, a space is formed between the liquid level of the washing liquid in each pool and the bottom of the washing device; when the waste gas enters the waste gas treatment equipment for treatment, the waste gas will pass through the washing tower and the sedimentation tank in sequence The corresponding space in the tank, the first scrubber, the second scrubber, the space in another tank in the sedimentation tank, the exhaust scrubber, and finally the purified waste gas is discharged from the exhaust scrubber.

Using the waste gas treatment equipment with at least four washes of the present invention can effectively treat the waste gas produced by the new process, and corresponding to the increase in the amount of waste gas, the washing flow path can be effectively extended, while the size of the equipment remains unchanged. The waste gas treatment equipment of the present invention can effectively utilize the clean room space and solve problems that cannot be solved in the prior art.

Description of drawings

Fig. 1 is a schematic diagram of a scrubber waste gas treatment system for treating process waste gas in the prior art.

Fig. 2 is a schematic structural view of the waste gas treatment equipment of the present invention.

Fig. 3 is a schematic structural view of the settling tank of the waste gas treatment equipment of the present invention.

Fig. 4 is a schematic structural view of the washing device of the exhaust gas treatment equipment of the present invention.

5A and 5B are schematic diagrams of the flow direction of the waste gas entering the waste gas treatment equipment of the present invention.

Fig. 6 is a schematic structural view of the washing liquid supply device of the present invention.

Fig. 7 is a schematic cross-sectional top view of another embodiment of the washing device of the exhaust gas treatment equipment of the present invention.

Wherein, the reference signs are explained as follows:

1: Scrubber waste gas treatment system

12: Air intake device

14: Washing liquid supply device

141: Circulation pump

142: pipeline

16: Sedimentation tank

18: scrubber

2: Exhaust gas treatment equipment

21: washing device

21A: Air inlet scrubber

21B: The first scrubber

21C: Second scrubber

21D: Gas outlet scrubber

21E: The third scrubber

21F: The fourth scrubber

213: hollow tube

214: intake pipe

215: Outlet pipe

23: Sedimentation tank

232: The first pool body

233: Second pool body

25: Washing liquid supply device

251: Circulation pump

252: pipeline

253: spray unit

Detailed ways

The embodiments of the present invention will be described in more detail below in conjunction with the accompanying drawings, so that those skilled in the art can implement them after studying this specification.

The waste gas treatment equipment of the present invention is used for treating the waste gas produced by the semiconductor process.

Fig. 2 is a schematic structural diagram of the waste gas treatment equipment 2 of the present invention. The exhaust gas treatment equipment 2 includes a washing device 21 , a sedimentation tank 23 and a washing liquid supply device 25 . The washing device 21 is arranged above the sedimentation tank 23 and connected with the sedimentation tank 23 . The washing liquid supply device 25 is arranged on one side of the sedimentation tank 23 and inside the washing device 21 .

Fig. 3 is a structural diagram of the settling tank 23 of the exhaust gas treatment device 2 of the present invention. The settling tank 23 has at least two tank bodies 232, 233, which can be used to contain washing liquid (not shown). Right above each pool body 232, 233, two washing towers (not shown) are arranged. The tank body 232, 233 communicates with the inner space of the washing tower installed thereon.

FIG. 4 is a schematic structural view of the washing device 21 of the exhaust gas treatment equipment 2 of the present invention. The scrubber 21 includes an inlet scrubber 21A, an outlet scrubber 21D and at least one scrubber group, and the scrubber group further includes a first scrubber 21B and a second scrubber 21C. Wherein, the first washing tower 21B and the second washing tower 21C are partially communicated with each other. In this embodiment, there is a hollow pipe 213 between the first washing tower 21B and the second washing tower 21C, which communicates with the first washing tower 21B and the second washing tower 21C, but the communication method is not limited to the hollow pipe 213 . Each strip washing tower has related exhaust gas filtering devices (not shown in the figure), such as spraying units, filter layers formed by Raschig rings, etc., to perform related treatment on exhaust gas. Since the relevant filter devices in the strip washing tower can be selected with different structures or types for different waste gases, they are not shown in the figure, and the structure in the strip washing tower of the present invention is therefore not limited.

In addition, the washing device 21 further has at least one exhaust gas inlet pipe 214 and an exhaust gas outlet pipe 215 . The intake pipe 214 is arranged at the top of the intake air scrubber 21A for exhaust gas to enter from the top of the intake air scrubber 21A. The gas outlet pipe 215 is arranged at the top of the gas scrubber 21D for exhaust gas to be discharged from the gas scrubber 21D. The installation position of the waste gas intake pipe 214 is not limited thereto, and can also be disposed on the side, middle or other positions of the intake air scrubber 21A. Similarly, the position where the outlet pipe 215 is installed in the outlet scrubber 21D can also be changed.

In the present invention, the inlet scrubber 21A, the outlet scrubber 21D, the first scrubber 21B and the second scrubber 21C of the scrubber 21 are installed on the settling tank 23 in a square shape.

As shown in Figures 2 to 4, the intake scrubber 21A and the first scrubber 21B are located directly above the same pool of the sedimentation tank 23; the second scrubber 21C and the outlet scrubber 21D are located in another pool of the sedimentation tank 23 Directly above. In this embodiment, the intake air scrubber 21A and the first scrubber 21B are located above the pool body 232, so the inner space of the two towers is connected with the inner space of the pool body 232; Just above the body 233, the space in the two towers is also connected with the space in the pool body 233.

5A and 5B are schematic diagrams of the flow direction of the waste gas entering the waste gas treatment equipment of the present invention. Wherein, for clear illustration, Fig. 5 A only shows the pond body 232 of inlet washing tower 21A, first washing tower 21B and sedimentation tank 23; Fig. 5 B only shows second washing tower 21C, outlet gas washing tower 21D and sedimentation tank 23 The pool body 233.

As shown in Figures 5A and 5B, when utilizing the waste gas treatment equipment of the present invention to treat process waste gas, at first, the washing liquid is contained in the settling tank 23, and the liquid level of the washing liquid is located below the bottom of the washing device 21, so that the washing liquid A space is formed between the liquid surface and the horizontal surface at the bottom of the washing device 21 . Preferably, the liquid level of the washing liquid is only 1/2 to 2/3 of the height of the sedimentation tank 23 .

When the exhaust gas (the arrow in the figure represents the flow direction of the exhaust gas) enters the scrubber 21, the exhaust gas enters from the top of the intake scrubber 21A, reaches the bottom of the intake scrubber 21A, and passes through the space on the liquid surface in the tank body 232 , enter below the first washing tower 21B, then enter the top of the second washing tower 21C through the hollow pipe 213 from the top of the first washing tower 21B, and reach below the second washing tower 21C downwards, and pass through the space on the liquid surface in the pool body 233 , and enter below the outlet gas scrubber 21D, and then discharge from the top of the outlet gas scrubber 21D.

FIG. 6 is a schematic structural diagram of the washing liquid supply device 25 of the present invention. When the exhaust gas treatment equipment 2 of the present invention is in operation, it needs to be used in conjunction with the recycling of the washing liquid, and the purpose of the washing liquid circulation is achieved through the washing liquid supply device 25. This figure is only an embodiment of the present invention, and does not therefore limit the protection of the present invention. scope. The washing liquid supply device 25 of the present invention comprises a circulating pump 251, a pipeline 252 and four spraying units 253 respectively arranged above the inside of the four washing towers 21A-21D, and each spraying unit 253 is located above the filter layer (not shown in the figure) . The spraying unit 253 is used for spraying washing liquid. The arrows in the figure indicate the flow direction of the washing liquid pumped by the circulation pump 251 in the pipeline 252 . The working mode and principle of the washing liquid supply device 25 are the same as those of the prior art, and will not be repeated here. In the present invention, the washing liquid can be tap water or condensed water. In addition, the washing liquid can also contain at least one of sulfuric acid, hydrochloric acid or liquid caustic soda to more effectively remove toxic substances in the exhaust gas. For example, hydrochloric acid and sulfuric acid can remove ammonia from exhaust gas. Liquid caustic soda can treat chlorine gas in waste gas and ammonium nitrogen derived from the aforementioned treatment.

The number of scrubber groups of the exhaust gas treatment equipment of the present invention is not limited, can be one of the above-mentioned groups, can also be two groups or more than two groups, so the scrubber quantity then is at least 4, also can be 6, 8 or more, no limit.

The following is another embodiment of the present invention. In this embodiment, the settling tank has three tank bodies, and two washing towers are arranged directly above each tank body, which means that there are six washing towers in total.

FIG. 7 is a schematic top view cross-sectional view of another embodiment of the washing device 21 of the exhaust gas treatment equipment of the present invention. Washing device 21 also comprises a first scrubber group and a second scrubber group except comprising inlet scrubber 21A and outlet gas scrubber 21D, and the first scrubber group includes first scrubber 21B and second scrubber 21C , the second scrubber group includes a third scrubber 21E and a fourth scrubber 21F. Wherein, the tops of the first scrubbing tower 21B and the second scrubbing tower 21C communicate with each other, and the tops of the third scrubbing tower 21E and the fourth scrubbing tower 21F communicate with each other. In this embodiment, there is a hollow pipe 213 between the first washing tower 21A and the second washing tower 21C, which communicates with the first washing tower 21A and the second washing tower 21C, and between the third washing tower 21E and the fourth washing tower 21F. It also has a hollow pipe 213 and communicates with the third scrubber 21E and the fourth scrubber 21F.

The inlet washing tower 21A and the first washing tower 21B are located directly above the same pond body of the sedimentation tank (not shown); the second washing tower 21C and the third washing tower 21E are located directly above the same pond body of the sedimentation tank, and the second The four washing towers 21F and the outlet washing tower 21D are located directly above the same pool body of the settling tank.

When the exhaust gas enters the scrubber 21, the exhaust gas enters from the intake scrubber 21A, reaches below the intake scrubber 21A, passes through the space formed between the liquid level of the scrubbing liquid and the horizontal surface at the bottom of the scrubber 21, and enters below the first scrubber 21B. , then enter the top of the second scrubber 21C from the top of the first scrubber 21B, reach below the second scrubber 21C downwards, pass through this space, and enter below the third scrubber 21E, then enter the third scrubber 21E above the third scrubber The top of the fourth scrubber 21F reaches the bottom of the fourth scrubber 21F, passes through this space, enters the bottom of the outlet scrubber 21D, and then discharges from the top of the outlet scrubber 21D. Therefore, it can be seen that the flow direction of the waste gas in this embodiment is the same as that of the above embodiment, and this embodiment only adds two washing procedures of the third washing tower 21E and the fourth washing tower 21F.

In addition, each of the inlet scrubber, the first scrubber, the second scrubber, the third scrubber, the fourth scrubber and the outlet scrubber of the scrubber of the present invention may also include a filter layer (not shown), which The washing liquid can be retained to increase the action time between the exhaust gas and the washing liquid, and at least one Raschig ring is included in the filter layer, which can increase the contact area between the exhaust gas and the washing liquid. The structure and function of the filter layer are the same as those of the prior art, and will not be repeated here.

It is worth noting that the number of tank bodies in the sedimentation tank of the present invention will be one more than the number of washing tower groups.

The exhaust gas treatment equipment with at least four washes of the present invention can effectively treat the exhaust gas produced by the new process, and corresponding to the increase in the amount of exhaust gas, the washing flow path can be effectively extended, while the size of the equipment remains unchanged. The exhaust gas treatment equipment of the present invention can effectively utilize the clean room space. The exhaust gas treatment equipment of the present invention can solve the problems that cannot be solved by the prior art, so it is inventive.

The above descriptions are only preferred embodiments for explaining the present invention, and are not intended to limit the present invention in any form. Therefore, any modification or change of the present invention made under the same spirit of the invention, All should still be included within the protection scope of the present invention.

Claims (10)

1. waste gas treatment equipment in order to handle waste gas, comprises:

One stillpot has at least two pond bodies, and this stillpot is in order to the splendid attire cleaning solution;

One wash mill, be installed on this stillpot, comprise the air inlet scrubbing tower, go out gas wash tower and at least one scrubbing tower group, this scrubbing tower group further comprises first scrubbing tower and second scrubbing tower, this first scrubbing tower and this second scrubbing tower part interconnect, this air inlet scrubbing tower and this first scrubbing tower are positioned at body top, the same pond of this stillpot, this goes out gas wash tower and this second scrubbing tower then is positioned at another body top, pond of this stillpot, when this this cleaning solution of stillpot splendid attire, form a space between the liquid level of cleaning solution and this wash mill bottom in each pond body;

When in this waste gas enters this waste gas treatment equipment, handling, waste gas will be in regular turn in air inlet scrubbing tower, corresponding pond intracorporeal space, first scrubbing tower, second scrubbing tower, stillpot the space in another pond body, go out gas wash tower, the waste gas after having purified at last goes out gas wash tower by this again and discharges.

2. waste gas treatment equipment as claimed in claim 1 wherein has a hollow tube between this first scrubbing tower and this second scrubbing tower, is communicated with this first scrubbing tower and this second scrubbing tower.

3. waste gas treatment equipment as claimed in claim 1 wherein has waste gas filter in this each scrubbing tower.

4. waste gas treatment equipment as claimed in claim 1, wherein this waste gas enters from this air inlet scrubbing tower top or side, and this give vent to anger scrubbing tower top or side are discharged certainly.

5. waste gas treatment equipment as claimed in claim 1, wherein the quantity of this pond body Duos 1 than the quantity of this scrubbing tower group.

6. waste gas treatment equipment as claimed in claim 1, wherein the liquid level of this cleaning solution only is 1/2 to 2/3 of this stillpot height.

7. waste gas treatment equipment as claimed in claim 1, wherein this cleaning solution is running water or condensed water.

8. waste gas treatment equipment as claimed in claim 1, this cleaning solution more comprises a medicament, and one of them forms this medicament at least by sulfuric acid, hydrochloric acid and liquid caustic soda.

9. waste gas treatment equipment as claimed in claim 1, wherein the air inlet scrubbing tower of this wash mill, first scrubbing tower that goes out gas wash tower and this scrubbing tower group and second scrubbing tower are matrix pattern and are installed on this stillpot.

10. waste gas treatment equipment as claimed in claim 1, wherein this stillpot has three pond bodies, and this wash mill further comprises the first scrubbing tower group and the second scrubbing tower group, this first scrubbing tower group comprises this first scrubbing tower and this second scrubbing tower, this second scrubbing tower group comprises the 3rd scrubbing tower and the 4th scrubbing tower, wherein, first scrubbing tower and second scrubbing tower top interconnect, the 3rd scrubbing tower and the 4th scrubbing tower top interconnect this air inlet scrubbing tower and first scrubbing tower, this second scrubbing tower and the 3rd scrubbing tower, and the 4th scrubbing tower and go out three groups of gas wash towers etc. be positioned at respectively this stillpot three pond bodies directly over.

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