CN103177999A - 一种沉积减反射膜工序用的石墨框 - Google Patents
一种沉积减反射膜工序用的石墨框 Download PDFInfo
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- CN103177999A CN103177999A CN2011104310094A CN201110431009A CN103177999A CN 103177999 A CN103177999 A CN 103177999A CN 2011104310094 A CN2011104310094 A CN 2011104310094A CN 201110431009 A CN201110431009 A CN 201110431009A CN 103177999 A CN103177999 A CN 103177999A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 62
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 62
- 239000010439 graphite Substances 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title abstract description 6
- 230000008021 deposition Effects 0.000 title abstract description 4
- 230000003667 anti-reflective effect Effects 0.000 title abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 46
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 46
- 239000010703 silicon Substances 0.000 claims abstract description 46
- 238000000151 deposition Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 abstract 4
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
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Abstract
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104310094A CN103177999A (zh) | 2011-12-20 | 2011-12-20 | 一种沉积减反射膜工序用的石墨框 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2011104310094A CN103177999A (zh) | 2011-12-20 | 2011-12-20 | 一种沉积减反射膜工序用的石墨框 |
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| Publication Number | Publication Date |
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| CN103177999A true CN103177999A (zh) | 2013-06-26 |
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| CN2011104310094A Pending CN103177999A (zh) | 2011-12-20 | 2011-12-20 | 一种沉积减反射膜工序用的石墨框 |
Country Status (1)
| Country | Link |
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| CN (1) | CN103177999A (zh) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005139524A (ja) * | 2003-11-07 | 2005-06-02 | Kaneka Corp | Cvd装置及びcvd方法 |
| CN201397821Y (zh) * | 2009-05-07 | 2010-02-03 | 锦州华昌光伏科技有限公司 | 石墨载板 |
| CN201712951U (zh) * | 2010-06-10 | 2011-01-19 | 常州天合光能有限公司 | 减反射膜设备用石墨框 |
| CN201788990U (zh) * | 2010-07-22 | 2011-04-06 | 苏州阿特斯阳光电力科技有限公司 | 一种用于硅片镀膜的承载装置 |
-
2011
- 2011-12-20 CN CN2011104310094A patent/CN103177999A/zh active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005139524A (ja) * | 2003-11-07 | 2005-06-02 | Kaneka Corp | Cvd装置及びcvd方法 |
| CN201397821Y (zh) * | 2009-05-07 | 2010-02-03 | 锦州华昌光伏科技有限公司 | 石墨载板 |
| CN201712951U (zh) * | 2010-06-10 | 2011-01-19 | 常州天合光能有限公司 | 减反射膜设备用石墨框 |
| CN201788990U (zh) * | 2010-07-22 | 2011-04-06 | 苏州阿特斯阳光电力科技有限公司 | 一种用于硅片镀膜的承载装置 |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Applicant after: China National Building Materials Group Corporation Jetion Solar (China) Co., Ltd. Address before: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Applicant before: Jetion Solar(China) Co., Ltd. |
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| COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: JETION TECHNOLOGY CO., LTD. TO: CNBM JETION SOLAR (CHINA) TECHNOLOGY CO., LTD. |
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20130626 |