CN103116251A - Anti-deformation round development nozzle and preparation method thereof - Google Patents
Anti-deformation round development nozzle and preparation method thereof Download PDFInfo
- Publication number
- CN103116251A CN103116251A CN2013100185484A CN201310018548A CN103116251A CN 103116251 A CN103116251 A CN 103116251A CN 2013100185484 A CN2013100185484 A CN 2013100185484A CN 201310018548 A CN201310018548 A CN 201310018548A CN 103116251 A CN103116251 A CN 103116251A
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- Prior art keywords
- runner
- functional part
- accessory
- sprue
- developing nozzle
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- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 12
- 238000005260 corrosion Methods 0.000 claims description 14
- 230000007797 corrosion Effects 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 7
- 238000003754 machining Methods 0.000 claims description 6
- 229920006351 engineering plastic Polymers 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 abstract description 7
- 238000005507 spraying Methods 0.000 abstract description 2
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 229920003023 plastic Polymers 0.000 description 6
- 239000004033 plastic Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000002131 composite material Substances 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000003913 materials processing Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
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Abstract
The invention relates to an anti-deformation round development nozzle and a preparation method thereof. The nozzle comprises a strip-shaped main body, a main runner which is arranged in the main body, a liquid inlet which is communicated with the main runner and used for leading development liquid, and multiple branch runners which are communicated with the main runner and used for spraying out the development liquid, wherein the main body consists of a strip-shaped functional component and a strip-shaped auxiliary component; a through hole penetrating through two end surfaces is formed in the functional component along the long side direction; a plug is mounted at the mouth part of the through hole to encircle the main runner; the multiple branch runners are arranged on one side of the main runner; a first hole part of the liquid inlet is arranged in the middle of the other side of the main runner; the auxiliary component is fastened by multiple screws and attached to one side of the functional component opposite to the branch runners; a second hole part of the liquid inlet is arranged on the auxiliary component; and the first hole part and the second hole part are coaxial. The method combines the billets of the auxiliary component and the functional component before the runner is processed. The nozzle provided by the invention has strong anti-deformation capability and a simple structure and is easy to process.
Description
Technical field
The present invention relates to developing nozzle, more particularly, relate to the round developing nozzle, and relate to its preparation method.
Background technology
Because developing nozzle needs to contact with developer solution for a long time, and developer solution corrosivity is stronger, existing developing nozzle is often formed by the strong engineering plastics class materials processing of resistance to corrosion, this plastics have the characteristic of stronger suction distortion, and permanent deformation easily occurs when bearing machining, it is inhomogeneous that this has caused developer solution to apply, and causes the developing process defective.And high to the stability requirement of equipment performance in the IC industry, therefore require developing nozzle to have very strong non-deformability.
Summary of the invention
The objective of the invention is provides a kind of round developing nozzle for the poor defective of existing round developing nozzle non-deformability.
for reaching above-mentioned purpose, the present invention is from the angle of structure, a kind of resistance to deformation round developing nozzle is provided, it comprises the main body of strip, be arranged on the sprue in main body, be communicated with the inlet opening that is used for importing developer solution with sprue, and be communicated with sprue for the some runners that spray developer solution, wherein, described main body is comprised of the functional part of strip and the accessory of strip, described functional part arranges the through hole that connects two end faces along long side direction, and surround described sprue at the oral area installation plug of through hole, sprue one side arranges described some runners, the middle part of sprue opposite side arranges the first hole section of inlet opening, described accessory is by some screw fastenings and be fitted in a side relative with described runner on functional part, accessory arranges the second hole section of inlet opening, the first hole section and the second hole section are coaxial.
Preferably, for the mutual location between assurance function parts and accessory, and further improve nozzle-integrated rigidity, the faying face of described functional part and accessory is provided with fixing structure.
Preferably, described some runners are arranged by row along the long side direction of described functional part, play two ends from the middle part of runner formation, and it is intensive that the distribution of runner becomes gradually, and the diameter of runner increases gradually.
Preferably, described functional part is made by corrosion-resistant engineering plastics, and described accessory is made by steel.
Preferably, in described the second hole section, interference fit is installed the corrosion resistant metal sleeve.
Preferably, described some screws are divided into two rows, are spaced apart and arranged in respectively two long edge positions of main body end face, wherein, are separately positioned on the left and right sides of the center line of nozzle long side direction with close two screws of inlet opening.
The present invention also provides a kind of preparation method of resistance to deformation round developing nozzle, the method is: at first the hair of machining functions parts is gone bad and accessory, by screw, they are fixed as one, process sprue and runner again on the hair of functional part is bad, then the plane at processing runner endpiece place on the hair of functional part is bad.
The present invention adopts functional part and accessory to consist of the nozzle body of composite beam structure, has utilized the composite beam structural rigidity to be better than the principle of single beam, can effectively improve the anti-deformation of round developing nozzle, and it is simple in structure, is easy to processing.
Preparation method of the present invention utilizes accessory rigidity that the functional part hair is bad to promote, makes or not the larger distortion of material production when machine work, and the plane of working nozzle liquid outlet end in the end, can guarantee its flatness.
Description of drawings
Fig. 1 is the structural representation of one embodiment of the invention round developing nozzle;
Fig. 2 is its front view;
Fig. 3 is its cut-open view;
Fig. 4 is its vertical view;
Fig. 5 is its side view.
Embodiment
The present invention is described further below in conjunction with drawings and Examples.
Fig. 1-5 show the structure of one embodiment of the invention round developing nozzle.As shown in Fig. 1-5, this round developing nozzle comprise strip main body 10, be arranged on sprue 10a in main body 10, be communicated with sprue 10a and be used for importing the inlet opening 10b of developer solution and be communicated with sprue 10a for the some runner 10c that spray developer solution.Main body 10 is comprised of the functional part 2 of strip and the accessory 1 of strip.Functional part 2 arranges through hole 2a along long side direction, and through hole 2a connects two end face 2b and the 2c of functional part 2, and at the oral area at two ends, through hole 2a left and right, the plug (not shown) is installed, thereby surrounds sprue 10a.Sprue 10a downside arranges described some runner 10c, and the middle part of sprue 10a upside arranges the first hole 10b1 of section of inlet opening 10b.The accessory 1 and upside that be fitted in functional part 2 fastening by some screws 3 (namely, a side relative with runner 10c), the second hole 10b2 of section of inlet opening 10b is set on accessory 1, and the first hole 10b1 of section and the second hole 10b2 of section are coaxial, have consisted of together inlet opening 10b.Plug adopts resistant material (as fluorine-containing rubber or corrosion-resistant plastic) preparation.
With reference to Fig. 1 and Fig. 5, faying face at functional part 2 and accessory 1 is provided with fixing structure, this fixing structure comprises the raised line 2d that is arranged on functional part 2 end faces middle parts and the groove 1a that is arranged on accessory 1 middle part, bottom surface, tablings and fitting tightly both, on the one hand can assurance function parts 2 and accessory 1 between mutual location, can further improve simultaneously nozzle-integrated rigidity.Further can the little conical surface be set in the bight of groove 1a oral area edge and raised line 2d, so that assembling.
As shown in Figure 3, some runner 10c arrange by row along the long side direction of functional part 2, play two ends from the middle part of runner formation, the distribution of runner 10c becomes gradually intensive (that is, the interval between adjacent two runner 10c reduces gradually), and the diameter of runner increases gradually, namely, in Fig. 3, the runner 10c diameter at middle part is minimum, and the runner 10c diameter on both sides is maximum.
As shown in Figure 3, in the present embodiment, be nested with corrosion resistant metal sleeve 4 at the second hole 10b2 of section of inlet opening 10b, corrosion resistant metal sleeve 4 can be the stainless steel sleeve, is fixed on the second hole 10b2 of section inwall by interference fit.Functional part 2 is made as the PEEK material by corrosion-resistant engineering plastics, can guarantee the Long contact time developer solution and obvious surface corrosion does not occur.Accessory 1 is made by No. 45 steel, has good rigidity.But the present invention is not limited to this, for example, if accessory 1 adopts rigidity better and erosion-resisting metal material (as stainless steel) is made, corrosion resistant metal sleeve 4 can be set.When selecting the material of accessory 1, two conditions are arranged: rigidity better and anticorrosive, in two conditions to guarantee that rigidity is as the most important condition.
As shown in Figure 4, the some screws 3 that are used for combined functionality component 2 and accessory 1 are divided into two rows, be spaced apart and arranged in respectively two long edge positions of main body 10 end faces, wherein, be separately positioned on the left and right sides of the centre line L 1 of nozzle long side direction with close two screws of inlet opening 10b.So not only assurance function parts 2 and accessory 1 joint portion are that whole face fits tightly, and make both to become as a whole, and can avoid the accessory 1 of nozzle to reduce rigidity because the middle part punching is more.
Use general mechanical processing tools and equipment can complete processing and assembling to said nozzle, cost is low and can guarantee that the nozzle lower performance that works long hours does not worsen.
The main body of above-mentioned developing nozzle adopts the composite beam structure, make on the one hand and have non-deformability preferably in the later stage use procedure, on the other hand, this structure can promote the rigidity of nozzle body in preparation nozzle process, thereby process more accurately sprue, runner and jet expansion transverse plane on corrosion-resistant plastic, make the better developing nozzle of performance.Specifically can adopt following preparation method to process developing nozzle, make the better developing nozzle of performance: mao bad and accessory 1 of first independent machining functions parts 2, comprise groove 1a (being seam) and the pilot hole (hole that coordinates with screw 3) of processing accessory 1, raised line 2d and the threaded hole of machining functions parts 2, faying face is both fitted tightly, and pass pilot hole with screw 3 and screw in threaded hole, will both be mounted with and be integrated.Processing sprue 10a and runner 10c on the hair of functional part 2 is bad, because the rigidity of accessory 1 with functional part stock (plastics) promotes, can not make parts of plastics produce larger distortion so add like this man-hour again.At last, process the plane at runner 10c endpiece place on the hair of functional part 2 is bad, can guarantee like this flatness of liquid outlet transverse plane.
If have corrosion resistant metal sleeve 4, need at first corrosion resistant metal sleeve 4 to be embedded accessory 1 in above-mentioned preparation method, and then the processing sprue etc.
Cause functional part 2 distortion for fear of assembling, when assembling accessory 1 and functional part 2, first with upper screw 3 near the nozzle middle part, be with one by one again other screw 3, then evenly firmly with all screw lock, rather than first lock one, then locking is next.
Above-mentioned round developing nozzle is mainly used in the developer solution spraying in the integrated circuit (IC) chip developing procedure.It has solved existing round developing nozzle because main material is plastics, its poor rigidity, yielding and the machining of contact liq easily causes the problems such as distortion, and the stability when therefore making the work of round type developing nozzle promoted, and then can improve the development quality in integrated circuit (IC) chip manufacturing process.
The above is only the preferred embodiment of the present invention, and protection scope of the present invention also not only is confined to above-described embodiment, and all technical schemes that belongs under thinking of the present invention all belong to protection scope of the present invention.Should be pointed out that for those skilled in the art, in the some improvements and modifications that do not break away under principle of the invention prerequisite, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (7)
1. resistance to deformation round developing nozzle, the main body (10) that comprises strip, be arranged on the sprue (10a) in main body, be communicated with the inlet opening (10b) that is used for importing developer solution with sprue, and be communicated with sprue for the some runners (10c) that spray developer solution, it is characterized in that: described main body (10) is comprised of the functional part (2) of strip and the accessory (1) of strip, described functional part (2) arranges the through hole (2a) that connects two end faces (2b and 2c) along long side direction, and surround described sprue at the oral area installation plug of through hole (2a), sprue one side arranges described some runners (10c), the middle part of sprue opposite side arranges the first hole section (10b1) of inlet opening (10b), described accessory (1) is fastening and be fitted in the upper side relative with described runner of functional part (2) by some screws (3), accessory arranges the second hole section (10b2) of inlet opening (10b), the first hole section and the second hole section are coaxial.
2. resistance to deformation round developing nozzle according to claim 1, it is characterized in that: the faying face of described functional part and accessory arranges fixing structure (2d and 1a).
3. resistance to deformation round developing nozzle according to claim 1, it is characterized in that: described some runners are arranged by row along the long side direction of described functional part, play two ends from the middle part of runner formation, it is intensive that the distribution of runner becomes gradually, and the diameter of runner increases gradually.
4. resistance to deformation round developing nozzle according to claim 1, it is characterized in that: described functional part is made by corrosion-resistant engineering plastics, and described accessory is made by steel.
5. resistance to deformation round developing nozzle according to claim 1, is characterized in that: described the second hole section (10b2) interior interference fit installation corrosion resistant metal sleeve (4).
6. resistance to deformation round developing nozzle according to claim 1, it is characterized in that: described some screws (3) are divided into two rows, be spaced apart and arranged in respectively two long edge positions of main body (10) end face, wherein, be separately positioned on the left and right sides of the center line (L1) of nozzle long side direction with close two screws of inlet opening (10b).
7. the preparation method of a resistance to deformation round developing nozzle, it is characterized in that: at first the hair of machining functions parts is gone bad and accessory, by screw, they are fixed as one, process sprue and runner again on the hair of functional part is bad, then the plane at processing runner endpiece place on the hair of functional part is bad.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100185484A CN103116251A (en) | 2013-01-18 | 2013-01-18 | Anti-deformation round development nozzle and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100185484A CN103116251A (en) | 2013-01-18 | 2013-01-18 | Anti-deformation round development nozzle and preparation method thereof |
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| Publication Number | Publication Date |
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| CN103116251A true CN103116251A (en) | 2013-05-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2013100185484A Pending CN103116251A (en) | 2013-01-18 | 2013-01-18 | Anti-deformation round development nozzle and preparation method thereof |
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| Country | Link |
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| CN (1) | CN103116251A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103576470A (en) * | 2013-10-31 | 2014-02-12 | 清华大学深圳研究生院 | Development process nozzle |
| CN103698986A (en) * | 2013-12-23 | 2014-04-02 | 清华大学深圳研究生院 | Sharp nozzle slit type technical nozzle of outflow structure |
| CN108828908A (en) * | 2018-06-27 | 2018-11-16 | 山东傲天环保科技有限公司 | A kind of development liquid processing device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1188433A (en) * | 1996-02-21 | 1998-07-22 | 松下电器产业株式会社 | Liquid spraying nozzle, liquid spraying nozzle manufacturing method, liquid spraying method, liquid spraying apparatus, and cathode ray tube manufacturing method |
| CN1444740A (en) * | 2000-07-25 | 2003-09-24 | 硅谷集团公司 | Improvement method of development process in wafer photolithography |
| WO2004010220A1 (en) * | 2002-07-19 | 2004-01-29 | Steag Hama Tech Ag | Nozzle assembly for applying a liquid to a substrate |
| CN1772501A (en) * | 2004-11-10 | 2006-05-17 | 索尼德国有限责任公司 | Stamp for soft lithography, in particular for micro-contact printing, and method for the production thereof |
| CN101549583A (en) * | 2008-03-31 | 2009-10-07 | 兄弟工业株式会社 | Liquid discharging head and method for manufacturing the same |
-
2013
- 2013-01-18 CN CN2013100185484A patent/CN103116251A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1188433A (en) * | 1996-02-21 | 1998-07-22 | 松下电器产业株式会社 | Liquid spraying nozzle, liquid spraying nozzle manufacturing method, liquid spraying method, liquid spraying apparatus, and cathode ray tube manufacturing method |
| CN1444740A (en) * | 2000-07-25 | 2003-09-24 | 硅谷集团公司 | Improvement method of development process in wafer photolithography |
| WO2004010220A1 (en) * | 2002-07-19 | 2004-01-29 | Steag Hama Tech Ag | Nozzle assembly for applying a liquid to a substrate |
| CN1772501A (en) * | 2004-11-10 | 2006-05-17 | 索尼德国有限责任公司 | Stamp for soft lithography, in particular for micro-contact printing, and method for the production thereof |
| CN101549583A (en) * | 2008-03-31 | 2009-10-07 | 兄弟工业株式会社 | Liquid discharging head and method for manufacturing the same |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103576470A (en) * | 2013-10-31 | 2014-02-12 | 清华大学深圳研究生院 | Development process nozzle |
| CN103576470B (en) * | 2013-10-31 | 2016-04-06 | 清华大学深圳研究生院 | A kind of developing process nozzle |
| CN103698986A (en) * | 2013-12-23 | 2014-04-02 | 清华大学深圳研究生院 | Sharp nozzle slit type technical nozzle of outflow structure |
| CN103698986B (en) * | 2013-12-23 | 2016-04-27 | 清华大学深圳研究生院 | A kind of sharp mouth slit goes out flow structure technique nozzle |
| CN108828908A (en) * | 2018-06-27 | 2018-11-16 | 山东傲天环保科技有限公司 | A kind of development liquid processing device |
| CN108828908B (en) * | 2018-06-27 | 2021-11-19 | 上海德迈世欧化工有限公司 | Developing solution processing device |
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Application publication date: 20130522 |