CN103075618B - Gas floating vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement - Google Patents

Abstract

The air-floating vibration isolation platform based on gas-magnetic zero reference and laser self-collimation measurement belongs to ultra-precision measurement and ultra-precision processing equipment. The vibrating platform body and its load, using a beam splitter and a photoelectric detector to monitor the six-degree-of-freedom attitude of the platform, and vertically and horizontally displacing the actuator between the vibration isolator and the platform body to realize the six-degree-of-freedom attitude adjustment of the platform; In this device, the zero reference device supported by the gas magnetic shock absorber effectively isolates the influence of ground vibration on the reference beam detection, and improves the stability of the laser beam zero reference; the photoelectric detector is used to detect the level drift and Angle drift, and use a pair of wedge prisms that can adjust the relative position distance and angle to adjust the level drift and angle drift of the reference beam in real time to achieve reference beam calibration, which can significantly improve the vibration isolation performance of the platform.

Description

Air-floating vibration isolation platform based on gas-magnetic zero reference and laser self-collimation measurement

technical field

The invention belongs to ultra-precision measurement and ultra-precision processing equipment, and mainly relates to an air-floating vibration-isolation platform based on gas-magnetic zero reference and laser self-collimation measurement.

Background technique

In the field of ultra-precision metrology testing and ultra-precision processing, a platform with a high-quality horizontal attitude is the basic guarantee for precision measurement and large-scale integrated circuit manufacturing. The application of high-quality horizontal attitude air bearing vibration isolation platform is very extensive. In factories related to biological science, electron optics, precision machining, physical and chemical experiments and their research, the horizontal attitude control of the platform will affect the measurement experiment results of machinery and equipment and the performance of instruments and instruments, and will directly affect the air flotation vibration isolation The damping performance of the platform against vibration. With the improvement of the accuracy level of ultra-precision measuring instruments and ultra-precision processing and manufacturing equipment, the impact of environmental vibration on instruments and equipment is increasing. As a new type of vibration isolation equipment, the air-floating vibration isolation platform has also developed with the development of the precision instrument manufacturing industry. The horizontal attitude of the air-floating vibration-isolation platform directly affects the accuracy of the instruments and equipment placed on it, so the stability of the air-floating vibration-isolation platform's attitude is particularly important in the manufacture of precision instruments and scientific research. Especially for my country's scientific research institutes and enterprises, with the rapid development of VLSI manufacturing and the continuous improvement of measurement accuracy and measurement stability requirements, the stability of the basic vibration isolation platform has also been more severely tested.

With the improvement of the requirements for the working environment of ultra-precision instruments and systems, the traditional passive vibration isolation method is restricted by the material characteristics of the vibration isolator, structural stiffness and other factors, and can no longer meet the vibration isolation requirements for low-frequency signals. In response to this problem, researchers combined active vibration isolation technology with passive vibration isolators to achieve the purpose of improving low-frequency vibration isolation performance (Vibration Isolation Apparatus For Stage. US Patent Publication No. US006327024B1). In this method, one or more vibration dampers are installed between the table and the base. The damping device has an electric actuator. The actuator responds to the signal of a position sensor, which acts as active vibration isolation and improves its low frequency. Vibration isolation performance. The problems of this method are: 1) the workbench does not have the function of attitude adjustment; 2) the feedback signal of the position sensor is a relative quantity, there is no absolute zero reference, and the position of the workbench cannot be precisely positioned.

In order to realize the attitude adjustment function of the vibration isolation platform, the China Metrology Institute proposed an aerodynamic attitude adjustment scheme for the vibration isolation platform (vibration isolation foundation precision leveling system. Patent publication number: CN 101353897A). The scheme adopts a two-stage vibration isolation platform. The precision optical vibration isolation platform is placed on the vibration isolation foundation. By measuring the angle between the vibration isolation platform and the horizontal plane, the air spring is controlled to charge and deflate, so as to achieve the purpose of adjusting the attitude of the vibration isolation platform. The problems of this solution are: 1) in the disclosed technical solution, the vibration isolation platform cannot achieve precise positioning; 2) the attitude of the vibration isolation platform is adjusted by charging and deflation of the air spring, and the response speed of the system is slow.

China Shipbuilding Ninth Design and Research Institute Engineering Co., Ltd. proposed a microvibration isolation foundation (an anti-microvibration foundation with centralized arrangement of multiple precision instruments. Patent publication number: CN 200920078087.9). In this scheme, two independent vibration isolation platforms are designed. The upper layer adopts a T-shaped section vibration isolation seat, and the vibration isolation seat is supported by vibration isolation elements on the lower concrete beam. This structure can reduce the center of mass of the vibration isolation system and improve the vibration isolation efficiency. . The problem with this solution is that low-frequency vibration signals cannot be isolated only by passive vibration isolation.

Chongqing Normal University proposed a precision vibration isolation device (a precision vibration isolation device. Publication number: CN200920207338.9). The scheme adopts two layers of vibration isolation structure. The first layer of passive vibration isolator is composed of air spring and magneto-rheological body connected in parallel, and the second layer of vibration isolator is composed of air spring and micro-actuator in parallel. The two-layer structure is arranged in series. This solution improves the vibration isolation performance of the vibration isolation device for low frequency signals. The problem with this solution is that the vibration isolation platform does not have an attitude adjustment function.

Common problems existing in existing invention patents:

1. The measurements of the vibration isolation platform are all relative positions, and there is no absolute zero reference, so it is impossible to accurately locate the position of the vibration isolation platform;

2. There is no high-precision attitude control scheme for the vibration isolation platform, so the vibration isolation platform cannot obtain high-level vibration isolation performance.

There are many detection schemes for the horizontal attitude of the air-floating vibration isolation platform. The precise positioning method is mainly to detect the horizontal attitude by establishing a rectangular coordinate system, and measure the displacement changes of each degree of freedom of the platform. The displacement measurement of the air-floating vibration-isolation platform body must adopt an optical non-contact measurement method, otherwise the sensor will add stiffness and damping to the vibration-isolation system, destroying the natural frequency of the air-floating vibration-isolation platform and reducing the vibration isolation performance. The traditional methods of non-contact optical displacement measurement include CCD image detection, laser-based frequency discrimination and amplitude discrimination measurement, etc. Since the platform body is a displacement change in six degrees of freedom, and the degrees of freedom interfere with each other, the image-based measurement method cannot be realized; and the method based on laser detection is affected by the drift of the laser itself, and it is difficult to achieve high-precision measurement. . However, the requirements for the vibration isolation performance of the air-floating vibration isolation platform are continuously improved, and the control accuracy of the attitude displacement of the platform body is required to reach the micron level, and the platforms are all large or super large. Therefore, large-scale or super-large air-floating vibration-isolation platforms with high displacement control precision, excellent vibration isolation performance, and above VC-F level are the urgently needed vibration isolation/damping equipment for ultra-precision measurement and processing and manufacturing equipment at home and abroad.

Contents of the invention

The purpose of the present invention is to address the problems existing in the above-mentioned prior art, in combination with actual needs, to design and provide an air-floating vibration isolation platform based on gas-magnetic zero reference and laser self-collimation measurement, so as to improve the stability of the laser beam zero reference The purpose of realizing the calibration of the reference beam and improving the vibration isolation performance of the platform.

Technical solution of the present invention is:

An air-floating vibration-isolation platform based on gas-magnetic zero reference and laser self-collimation measurement, the body of the air-floating vibration-isolation platform is configured on more than 3 evenly distributed vibration isolators, and the vibration isolators are configured on the base , the vibration isolator is composed of a vibration isolator base, a vibration isolator bracket and a vibration isolator table, the vibration isolator table is installed in the vibration isolator base, and the vibration isolator bracket is arranged on the vibration isolator base On the outer side, a vertical displacement actuator and a horizontal displacement actuator are arranged between each vibration isolator and the air-floating vibration isolation platform body, and the vertical displacement actuator adopts a vertically placed rotary voice coil motor, The rotary voice coil motor mover of the vertical displacement actuator is fixedly connected with the body of the air-floating vibration isolation platform, the rotary voice coil motor stator of the vertical displacement actuator is arranged on the vibration isolator support, and the horizontal displacement execution The actuator adopts a horizontally placed rotary voice coil motor. The rotary voice coil motor mover of the horizontal displacement actuator is fixedly connected with the air-floating vibration isolation platform body, and the rotary voice coil motor stator of the horizontal displacement actuator is arranged on the vibration isolator. On the bracket; the laser position measurement optical route for measuring the six-degree-of-freedom attitude of the air-floating vibration-isolation platform is composed of a He-Ne laser, a laser self-collimation system, a zero reference device, a photoelectric detector for the attitude of the platform, and a beam-splitting prism for the attitude of the platform , wherein the stage body attitude photoelectric detector and the stage body attitude beam-splitting prism are fixedly installed on the lower end surface of the air-floating vibration isolation platform, and the platform attitude beam-splitting prism includes a first beam-splitting prism, a second beam-splitting prism, a third beam-splitting prism A prism and a fourth beam-splitting prism, and the first beam-splitting prism is located on the transmitted laser light path of the laser self-collimation system, the second beam-splitting prism is located on the transmitted light path of the first beam-splitting prism, and the third beam-splitting prism is located on the reflected light path of the first beam-splitting prism On the road, the fourth dichroic prism is located on the reflected light path of the third dichroic prism; the photodetector for the attitude of the platform includes a first photodetector, a second photodetector, a third photodetector and a fourth photodetector, Wherein the first photodetector is located on the transmitted light path of the second dichroic prism, the second photodetector is located on the reflected light path of the second dichroic prism, the third photodetector is located on the transmitted light path of the fourth dichroic prism, and the fourth photodetector The device is located on the reflected light path of the fourth beam splitting prism; the laser autocollimation system consists of a laser beam expander collimation system, a convex lens, a photoelectric detector for flat drift and angle drift detection, a beam adjustment mechanism, and a flat drift and angle drift detection light splitter Composed of prisms, the beam adjustment mechanism is located between the laser beam expansion collimation system and the horizontal drift and angular drift detection beam splitter prism, the convex lens is located between the horizontal drift and angular drift detection beam splitter prism, the flat drift and angular drift detection photodetector, the beam adjustment mechanism It includes wedge-corner prisms and wedge-corner prisms that can adjust the relative position spacing and angle; the zero reference device includes a zero reference photoelectric detector installation platform and a passive shock absorber with a natural frequency lower than 0.5Hz, and a zero reference photoelectric The detector installation platform is installed on the base through a passive shock absorber, and is located on the lower refraction optical path of the laser autocollimation system; The detector is fixed on the installation platform of the zero reference device, the zero reference photoelectric detector, and the flat drift and angular drift photoelectric detectors The receiving surfaces are respectively perpendicular to the respective moving directions, and the center of the receiving surface coincides with the center of the corresponding light beam.

The photoelectric detector for platform attitude, flat drift and angle drift detection includes a position sensitive device PSD, an image sensor CCD, a four-quadrant detector QPD and a silicon photocell.

The passive shock absorber adopts an aeromagnetic structure, and the passive shock absorber is a zero-stiffness shock absorber.

The technical innovation of the present invention and the good effect that produce are:

1) The zero reference device of the device is supported by a passive shock absorber. The natural frequency of the passive shock absorber is lower than 0.5Hz, which can effectively isolate the influence of ground vibration on the reference beam detection and greatly improve the stability of the laser beam zero reference. , which is one of the innovative points and outstanding advantages of the present invention.

2) The present invention uses two photodetectors to detect the flat drift and angular drift of the reference beam respectively, and uses a pair of wedge angle prisms that can adjust the relative position distance and angle to reduce the flat drift and angular drift of the reference beam in real time, so as to realize the calibration of the reference beam ;A photoelectric detector and a beam splitting prism are used to monitor the attitude of the platform with six degrees of freedom, and the vertical displacement actuator and the horizontal displacement actuator respectively realize the high-precision control of the vertical direction and horizontal attitude movement of the vibration isolation/reduction platform, which improves the vibration isolation of the platform Performance, this is innovation point and two of outstanding advantages of the present invention.

Description of drawings:

Figure 1 is a schematic diagram of the three-dimensional structure of the air-floating vibration isolation platform based on the gas-magnetic zero reference and laser self-collimation measurement;

Figure 2 is a schematic structural diagram of an air-floating vibration isolation platform based on gas-magnetic zero reference and laser self-collimation measurement;

Fig. 3 is the top view of Fig. 2;

Fig. 4 is a schematic structural diagram of a laser self-collimation system;

Fig. 5 is a structural schematic diagram of a zero reference device;

Fig. 6 is a structural schematic diagram of two schemes of the beam adjustment mechanism;

Fig. 7 is a schematic diagram of the detection principle of laser beam flat drift and angular drift;

Fig. 8 is a schematic diagram of the assembly structure of the vibration isolator, the vertical displacement actuator and the horizontal displacement actuator.

Part number in the picture: 1-He-Ne laser; 2-laser self-collimation system; 3-zero reference device; 3a-zero reference photoelectric detector installation platform; 3b-passive vibration absorber; 4-vibration isolator ;4a-vibration isolator base; 4b-vibration isolator bracket; 4c-vibration isolator table; 5-base; 7b-second photodetector; 7c-third photodetector; 7d-fourth photodetector; 8-vertical displacement actuator; 8a-rotary voice coil motor mover; 8b- Rotary voice coil motor stator; 9-horizontal displacement actuator; 9a-rotary voice coil motor mover; 9b-rotary voice coil motor stator; The second beam splitting prism; 10c-the third beam splitting prism; 10d-the fourth beam splitting prism; 11-laser beam expander collimation system; 12-convex lens; 13b-angle drift photodetector; 14-beam adjustment mechanism; 14a-wedge prism A; 14b-wedge prism B; 15-level drift and angle drift detection spectroprism.

Detailed ways

Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:

An air-floating vibration-isolation platform based on gas-magnetic zero reference and laser self-collimation measurement, the air-floating vibration-isolation platform body 6 is arranged on more than three evenly distributed vibration isolators 4, and the vibration isolators 4 are arranged on On the base 5, the vibration isolator 4 is composed of a vibration isolator base 4a, a vibration isolator support 4b and a vibration isolator workbench 4c, and the vibration isolator workbench 4c is installed in the vibration isolator base 4a. The vibrator support 4b is arranged on the outer side of the vibration isolator base 4a, and a vertical displacement actuator 8 and a horizontal displacement actuator 9 are arranged between each vibration isolator 4 and the air-floating vibration isolation platform body 6. The vertical displacement actuator 8 adopts a vertically placed rotary voice coil motor, the rotary voice coil motor mover 8a of the vertical displacement actuator 8 is fixedly connected with the air-floating vibration isolation platform body 6, and the vertical displacement actuator 8 The rotary voice coil motor stator 8b is configured on the vibration isolator support 4b, the horizontal displacement actuator 9 adopts a horizontally placed rotary voice coil motor, and the rotary voice coil motor mover 9a of the horizontal displacement actuator 9 is connected to The body 6 of the air-floating vibration-isolation platform is fixedly connected, and the rotary voice coil motor stator 9b of the horizontal displacement actuator 9 is arranged on the support 4b of the vibration isolator; the laser position measurement for measuring the six-degree-of-freedom attitude of the air-floating vibration-isolation platform body 6 The optical route is composed of He-Ne laser 1, laser self-collimation system 2, zero reference device 3, stage attitude photoelectric detector 7, and stage attitude beamsplitter prism 10, wherein the stage attitude photoelectric detector 7, stage attitude light splitter The prism 10 is fixed on the lower end surface of the platform body 6 of the air-floating vibration isolation platform, and the dichroic prism 10 in the attitude of the platform includes a first dichroic prism 10a, a second dichroic prism 10b, a third dichroic prism 10c and a fourth dichroic prism 10d , and the first dichroic prism 10a is located on the transmitted laser light path of the laser self-collimation system 2, the second dichroic prism 10b is located on the transmitted light path of the first dichroic prism 10a, and the third dichroic prism 10c is located on the reflected light of the first dichroic prism 10a On the way, the fourth beam-splitting prism 10d is located on the reflected light path of the third beam-splitting prism 10c; the described stage body attitude photodetector 7 comprises a first photodetector 7a, a second photodetector 7b, a third photodetector 7c and The fourth photodetector 7d, wherein the first photodetector 7a is located on the transmitted optical path of the second dichroic prism 10b, the second photodetector 7b is located on the reflected optical path of the second dichroic prism 10b, and the third photodetector 7c is located on the second dichroic prism 10b. On the transmission light path of the four beam splitting prisms 10d, the fourth photodetector 7d is located on the reflection light path of the fourth beam splitting prisms 10d; the described laser self-collimation system 2 consists of a laser beam expanding collimation system 11, a convex lens 12, flat drift and Angle drift detection photodetector 13, beam adjustment mechanism 14, flat drift and angle drift detection beam splitting prism 15, wherein the beam adjustment mechanism 14 is located between the laser beam expansion and collimation system 11, flat drift and angle drift detection beam splitting prism 15, convex lens 12 is located between the split prism 15 for flat drift and angle drift detection and the photodetector 13 for level drift and angle drift detection. The zero reference device 3 includes a zero reference photodetector installation platform 3a and a passive shock absorber 3b with a natural frequency lower than 0.5Hz, and the zero reference photodetector installation platform 3a is installed on the base 5 through the passive shock absorber 3b above, and located on the refraction optical path of the lower side of the laser autocollimation system 2; the flat drift and angle drift detection photodetector 13 composed of the flat drift photodetector 13a and the angle drift photodetector 13b is fixed on the zero reference device The zero-position reference photodetector of 3 is installed on the platform 3a, and the receiving surfaces of the flat drift and angular drift photodetectors 13a and 13b are respectively perpendicular to their respective moving directions, and the center of the receiving surface coincides with the center of the corresponding beam.

The platform attitude photodetector 7 and the level drift and angle drift detection photodetector 13 include a position sensitive device PSD, an image sensor CCD, a four-quadrant detector QPD and a silicon photocell.

The passive shock absorber 3b adopts an aeromagnetic structure, and the passive shock absorber 3b is a zero-stiffness shock absorber.

Work process of the present invention is as follows:

The attitude of the stage body is measured by the laser position measurement optical path. A beam of source laser light emitted by the laser 1 first passes through the laser autocollimation system 2, and two beams of reference beams are separated by the level drift and angle drift detection beam splitter prism 15, which are respectively detected by the level drift photoelectric Receiver 13a and angle drift photodetector 13b, detect the level drift and angle drift of the reference beam itself, and finally adjust the level drift and angle drift in real time through the beam adjustment mechanism 14. Flat drift and angular drift detection The photoelectric detector 13 effectively isolates the impact of vibrations greater than 0.5 Hz on the reference beam detection, and realizes the isolation of the zero reference device 3 from the platform and the ground, and serves as an air-floating vibration isolation platform with six degrees of freedom The position absolute zero reference. The light beam is divided into four beams by the stage attitude beam splitter 10, and finally received by the stage attitude photoelectric detector 7, thereby realizing the position detection of the six degrees of freedom of the stage attitude, and then through the vertical displacement after solving The actuator 8 and the horizontal displacement actuator 9 realize the real-time adjustment and control of the six degrees of freedom of the platform attitude.

Since the laser beam has flat drift and angular drift, the reference optical path will have a certain deviation, so it needs to be adjusted every moment to ensure the accuracy of the reference beam. Ensuring the level of the reference beam is the basis for ensuring the level attitude of the platform. The flat drift and angular drift of the reference beam are measured by the flat drift and angular drift detection photodetector 13 fixed on the zero reference device 3 . The beam drift is detected by a photodetector 13a, and the beam angle drift is detected by a photodetector 13b with a convex lens 12, and both are suppressed by a beam adjustment mechanism 14. The light beam adjustment mechanism 14 suppresses the angle drift and flat drift of the light beam by adjusting the angle and the relative position distance of the two wedge corner prisms. After determining the reference beam, record and calibrate the flat drift and angle drift to detect the output value of the photodetector 13 as an initial value, and it is enough to make the output value approach the calibrated initial value during calibration.

When working, the reference beam is calibrated in real time, and the photodetector is sampled in real time. Each time 12 values are taken to remove a maximum value and a minimum value, and the remaining 10 values are averaged to compare with their respective initial values. After processing, the attitude change of the air-floating vibration-isolation platform body 6 under the influence of ground vibration can be obtained. The control system controls the vertical displacement actuator 8 and the horizontal displacement actuator 9 according to the measured value to adjust the posture error of the platform body in six degrees of freedom, so that the platform body of the air-floating vibration-isolation platform is in a relatively stable state, so that the air-floating vibration-isolation platform has a relatively high performance. Small vibration transmission rate to achieve vibration isolation/reduction.

Claims (3)

1. An air-floating vibration-isolation platform based on gas-magnetic zero reference and laser self-collimation measurement, which is characterized in that the air-floating vibration-isolation platform body (6) is arranged on more than three evenly distributed vibration isolators (4), The vibration isolator (4) is arranged on the base (5), and the vibration isolator (4) is composed of a vibration isolator base (4a), a vibration isolator bracket (4b) and a vibration isolator table (4c) , the vibration isolator table (4c) is installed in the vibration isolator base (4a), the vibration isolator bracket (4b) is arranged on the outer side of the vibration isolator base (4a), and each vibration isolator (4) A vertical displacement actuator (8) and a horizontal displacement actuator (9) are arranged between the air-floating vibration isolation platform body (6), and the vertical displacement actuator (8) adopts a vertically placed rotary profile The coil motor, the rotary voice coil motor mover (8a) of the vertical displacement actuator (8) is fixedly connected with the air bearing vibration isolation platform body (6), and the rotary voice coil motor of the vertical displacement actuator (8) The stator (8b) is configured on the vibration isolator support (4b), the horizontal displacement actuator (9) adopts a horizontally placed rotary voice coil motor, and the rotary voice coil motor mover of the horizontal displacement actuator (9) (9a) is fixedly connected with the air-floating vibration isolation platform body (6), and the rotary voice coil motor stator (9b) of the horizontal displacement actuator (9) is arranged on the vibration isolator support (4b); The laser position measurement optical path of the six-degree-of-freedom attitude of the platform body (6) He-Ne laser (1), laser self-collimation system (2), zero reference device (3), and photoelectric detector of the attitude of the platform body (7) 1. It consists of a platform attitude beam-splitting prism (10), wherein the platform attitude photoelectric detector (7) and the platform attitude beam-splitting prism (10) are fixed on the lower end surface of the air-floating vibration isolation platform platform (6), and the The platform posture dichroic prism (10) comprises a first dichroic prism (10a), a second dichroic prism (10b), a third dichroic prism (10c) and a fourth dichroic prism (10d), and the first dichroic prism (10a) is located at On the transmission laser optical path of the laser self-collimation system (2), the second beam splitting prism (10b) is located on the transmission optical path of the first beam splitting prism (10a), and the third beam splitting prism (10c) is located on the first beam splitting prism (10a) On the reflected light path, the fourth beam splitting prism (10d) is located on the reflected light path of the third beam splitting prism (10c); the described platform posture photodetector (7) includes a first photodetector (7a), a second photodetector device (7b), the third photodetector (7c) and the fourth photodetector (7d), wherein the first photodetector (7a) is located on the transmission light path of the second dichroic prism (10b), and the second photodetector (7b) is located on the reflected light path of the second dichroic prism (10b), the third photodetector (7c) is positioned on the transmitted light path of the fourth dichroic prism (10d), and the fourth photodetector (7d) is positioned at the fourth dichroic prism (10d) on the reflected light path; the described laser self-collimation system (2) consists of a laser beam expander collimation system (11), a convex lens (12), a flat drift and an angle drift detection photodetector (13), a light beam adjustment An adjustment mechanism (14), a horizontal drift and an angular drift detection spectroprism (15), wherein the beam adjustment mechanism (14) is located between the laser beam expanding collimation system (11) and a flat drift and an angular drift detection spectroprism (15), The convex lens (12) is located between the split prism (15) for the detection of horizontal drift and angle drift (15) and the photodetector (13) for the detection of horizontal drift and angle drift. (14a), wedge angle prism B (14b); Described zero reference device (3) comprises zero reference photodetector installation platform (3a) and the passive vibration absorber (3b) that natural frequency is lower than 0.5Hz, The zero reference photodetector installation platform (3a) is installed on the base (5) through the passive shock absorber (3b), and is located on the lower refraction optical path of the laser autocollimation system (2); The flat-drift and angle-drift detection photodetector (13) composed of the detector (13a) and the angle drift photodetector (13b) is fixedly mounted on the zero reference photodetector installation platform (3a) of the zero reference device (3) , the receiving surfaces of the flat-drifting and angular-drifting photodetectors (13a, 13b) are respectively perpendicular to their respective moving directions, and the center of the receiving surface coincides with the center of the corresponding light beam. 2. The air-floating vibration-isolation platform based on gas-magnetic zero reference and laser self-collimation measurement according to claim 1, characterized in that the photoelectric detector (7) of the platform attitude (7) is photoelectric for detection of horizontal drift and angular drift. The detector (13) includes a position sensitive device PSD, an image sensor CCD, a four-quadrant detector QPD and a silicon photocell. 3. The air-floating vibration-isolation platform based on gas-magnetic zero reference and laser self-collimation measurement according to claim 1, characterized in that said passive shock absorber (3b) adopts gas-magnetic structure, and passive vibration reduction Device (3b) is a zero stiffness shock absorber.