CN103018812A - Near-infrared narrow-band optical filter used for somatosensory recognition system - Google Patents
Near-infrared narrow-band optical filter used for somatosensory recognition system Download PDFInfo
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- CN103018812A CN103018812A CN201210548652XA CN201210548652A CN103018812A CN 103018812 A CN103018812 A CN 103018812A CN 201210548652X A CN201210548652X A CN 201210548652XA CN 201210548652 A CN201210548652 A CN 201210548652A CN 103018812 A CN103018812 A CN 103018812A
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- 230000003287 optical effect Effects 0.000 title abstract description 26
- 230000003238 somatosensory effect Effects 0.000 title abstract 6
- 238000000034 method Methods 0.000 claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims abstract description 7
- 230000008447 perception Effects 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 31
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- 239000011521 glass Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 11
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 3
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- 238000000151 deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
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- 210000000988 bone and bone Anatomy 0.000 description 1
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- 238000002360 preparation method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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Abstract
The invention discloses a near-infrared narrow-band optical filter used for a somatosensory recognition system. The near-infrared narrow-band optical filter used for the somatosensory recognition system comprises a base plate and a narrow-band optical filter main film system and a cut-off film system which are respectively arranged on two opposite surfaces of the base plate. The narrow-band optical filter main film system and the cut-off film system are respectively stacked by high refractive index film layers and low refractive index film layers in alternative mode, the high refractive index film layers and the low refractive index film layers are deposited through a vacuum film coating method, and the central wavelength of a passing band of the narrow-band optical filter main film system is identical with that of an infrared emission light source of the somatosensory recognition system. The near-infrared narrow-band optical filter used for the somatosensory recognition system adopts the single base plate, and utilizes the scheme of stacking the main film system and the cut-off film system through double-face vacuum film coating; achieves the characteristics of being large in cut-off width, high in central wavelength transmission ratio and good in rectangular degree of the narrow-band optical filter of the somatosensory recognition system; reduces thickness of the optical filter; effectively prevents warping and deformation of the base plate caused by film layer stress; requires no optical adhesive; avoids multiple reflection; an can adapt to different temperature environments.
Description
Technical field
The present invention relates to optical filter, relate in particular to a kind of near infrared narrow band pass filter for the other system of body perception.
Background technology
The other technology of body perception causes extensive concern along with the Xbox360 Kinect of Microsoft body sensing system sells fast.Along with the exploitation that the other system of body perception deepens continuously, following body perception will not obtain to use widely in every field such as industry manufacturing, man-machine interaction, amusement, multimedia, game application, shopping.The other system of body perception adopts the optical imagery mode at present, formed by infrared light supply, 3D depth of field detector, RGB image detector, wherein the most key is exactly 3D depth of field explorer portion, this part is to extract the action body of the Infrared irradiation of infrared transmitter emission, its reflected light is obtained by depth of field camera by 3D depth of field detector, catch the depth information of person each several part bone action with this, be converted into information command, realize the real-time interactive of people and software, equipment.The mutual escape of machine has been made us in body sense interaction handle, distant bar, the restriction of mouse or telepilot makes the user that itself becomes telepilot, realizes real personalized man-machine interaction.In order to guarantee the accurate identification to human action, require very accurately to the detection of flashlight, 3D depth of field detector will have very strong antijamming capability.Narrow band pass filter mainly is to isolate stray light, sees through flashlight, fully highlights useful information, reduces interfere information, for follow-up image processing and identification lay the foundation.In the other system of body perception, the general Infrared that adopts laser diode emission 808nm, 828nm or infrared LED emission 830nm, 850nm, 870nm or 940nm or be positioned at this wave band occurs in infrared transmitter.At present the common 828nm LD(for the use of body sensing system is laser diode) and 850nmLED as infrared transmitter.The effective service band of depth of field detector is generally interval at 400nm-1100nm, will will be positioned at 400nm-1100nm interval other band spectrums except flashlight by narrow band pass filter like this and all curb.
What the infrared narrow band filter that adopts with the body sensing system had identity function is the infrared fileter that is used at present recognition of face or fingerprint, bio-identification aspect, its major function all is to extract flashlight, the near infrared light outside establishment visible light and the flashlight.The patent No. is " ZL200710304305.1 ", the infrared fileter that denomination of invention is made in conjunction with film plating process for the listed employing infrared glass of the Chinese invention patent of " being used for infrared fileter of recognition of face and preparation method thereof " has arrowband and the high cut-off degree of depth, but this patent adopts the thickness of infra-red-transmitting glass to reach the 3-9 millimeter, for working as the small camera lens of the other system of precursor perception, the optical filter that this method is made is too thick, can't meet the demands.The patent No. is " ZL201020248861.9 ", the listed employing of utility model patent that name is called " a kind of infrared fileter for recognition of face " is coated with regular master tape pass filter film system at transparent glass substrate, glue together again the infrared method that sees through glass or glue together the infrared long wave pass filter that passes through, although realized that also passband rectangle degree is good, the high characteristics of the cut-off degree of depth, but adopt the method for gummed, the optical filter integral thickness is difficult to accomplish the magnitude less than 1mm, and the glass substrate gummed time can produce a plurality of inner boundaries, thereby generation Multi reflection, larger on the imaging system impact, use simultaneously tackifier, its anti-environmental stability can be relatively poor, particularly in the larger place of temperature variation.Modern camera product, more and more less to volume requirement, to image quality, color rendition requires more and more higher, and being embedded in infrared narrow band filter before the CMOS depth of field detector, general thickness requires to only have 0.3mm-0.75mm, so thin substrate thickness space, if adopt infrared glass in conjunction with the method for plated film or adopt the method for gluing together again infrared glass behind the white glass plated film, all can't be implemented in the effect that the ultra thin substrate thickness condition is issued to very high narrow-band-filter.
Summary of the invention
The technical matters that the present invention mainly solves provides a kind of near infrared narrow band pass filter that is used for the other system of body perception of realizing wide cut-off scope at single thin substrate.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of near infrared narrow band pass filter for the other system of body perception is provided, comprise substrate and the narrow band pass filter master film system that lays respectively at described substrate two opposing surfaces and cut film system, described narrow band pass filter master film system and cut film system replace stacking forming by high refractive index layer and low-index film respectively, and described high refractive index layer and low-index film form by the vacuum coating method deposition; The passband centre wavelength of described narrow band pass filter master film system is consistent with the other system of body perception infrared emission light source centre wavelength.
Wherein, described narrow band pass filter master film is the structure of long-pass membrane stack and the stack of short-pass membrane stack, and the passband centre wavelength that described narrow band pass filter master film is is 850nm, and passband width is 20nm ~ 50nm.
Wherein, described long-pass membrane stack is to form underlying membrane stacking adding of 0.5HL0.5H by a plurality of versions, and described short-pass membrane stack is to form underlying membrane stacking adding of 0.5LH0.5L by a plurality of versions, wherein, H represents high refractive index layer, and L represents low-index film.
Wherein, total rete number of described narrow band pass filter master film system is 40 layers ~ 55 layers.
Wherein, described cut film is the long-pass film stacking structure, and the cut-off scope that described cut film is is 400nm ~ 630nm, and free transmission range is 750nm～1000nm.
Wherein, described long-pass membrane stack is to form underlying membrane stacking adding of 0.5HL0.5H by a plurality of versions, and wherein, H represents high refractive index layer, and L represents low-index film.
Wherein, total rete number of described cut film system is 30 layers ~ 45 layers.
Wherein, described substrate is transparent glass substrate, and thickness is 0.3mm ~ 0.75mm.
Wherein, the material of described high refractive index layer is TiO
2, Ta
2O
5, Nb
2O
5In one or more mixing, the material of described low-index film is SiO
2Or MgF
2
The invention has the beneficial effects as follows: the near infrared narrow band pass filter for the other system of body perception provided by the present invention adopts single substrate, by the scheme of two-sided stack narrow band pass filter master film system and cut film system, realized the other system of body perception narrow band pass filter cut-off width greatly, centre wavelength transmitance height and the good characteristic of rectangle degree.Adopt single substrate, avoid using thicker glasses for infrared use, reduced optical filter thickness.Substrate adopts the way of double-face vacuum plated film to form the film system on two surfaces of substrate, owing to select membraneous material of the same race and production technology, the stress that two membrane stacks should rise also is close, realize so the mutual balance of stress on the substrate two sides, at utmost reduce the deformation that causes owing to stress, prevent that effectively the ultra-thin glass substrate is owing to stress in thin film causes warpage, distortion.Need not to use optical adhesive in the optical filter, avoid Multi reflection, and need not to worry because temperature causes the optical adhesive performance change, so that this near infrared narrow band pass filter can be suitable for the different temperatures environment.
Description of drawings
Fig. 1 is the structural representation that the present invention is used for the near infrared narrow band pass filter of the other system of body perception;
Fig. 2 is the spectrum synoptic diagram of narrow band pass filter master film system among near infrared narrow band pass filter one embodiment of the present invention;
Fig. 3 is the spectrum synoptic diagram of cut film system among near infrared narrow band pass filter one embodiment of the present invention;
Fig. 4 is the spectrum synoptic diagram of near infrared narrow band pass filter one embodiment of the present invention.
Label declaration:
10, substrate; 20, narrow band pass filter master film system; 21, high refractive index layer; 22, low-index film; 30, cut film system; 31, high refractive index layer; 32, low-index film.
Embodiment
By describing technology contents of the present invention, structural attitude in detail, realized purpose and effect, below in conjunction with embodiment and cooperate that accompanying drawing is detailed to give explanation.
See also Fig. 1, present embodiment provides a kind of near infrared narrow band pass filter for the other system of body perception, the narrow band pass filter master film that comprises substrate 10 and lay respectively at 10 liang of opposing surfaces of substrate be 20 and cut film be 30.Substrate 10 consists of the agent structure of optical filter, adopts ultra-thin transparent glass substrate, and material is the ordinary optical clear glass, and thickness is between 0.3mm ~ 0.75mm, and regular size is 0.3mm, 0.55mm and 0.7mm, specifically selects according to the actual needs.
Narrow band pass filter master film is 20 to replace stacking forming by high refractive index layer 21 and low-index film 22, cut film is 30 to replace stacking forming by high refractive index layer 31 and low-index film 32 equally, and each rete deposits successively by vacuum coating method and forms.Wherein, high refractive index layer 21,31 material are TiO
2, Ta
2O
5, Nb
2O
5In one or more mixing, described low- index film 22,32 material are SiO
2Or MgF
2For same optical filter, narrow band pass filter master film is 20 to be that high refractive index layer 21 in 30,31 material are identical with cut film, and low- index film 22,32 material are identical.
For the near infrared narrow band pass filter among the present invention, it is consistent with the other system of body perception infrared emission light source centre wavelength that narrow band pass filter master film is 20 passband centre wavelength.Narrow band pass filter master film is 20 mainly to be that the light of the other system of body perception infrared emission light source centre wavelength is passed through, but be subjected to itself structure influence, the bleeder zone can occur in the visible light part wavelength coverage, namely the part visible light can be 20 through narrow band pass filter master film; It mainly is to make visible light cut-off and infrared band sees through that cut film is 30.The cut-off scope of near infrared narrow band pass filter of the present invention is that the interval and cut film of 20 cutoff wavelength is the interval common realizations of 30 cutoff wavelengths by narrow band pass filter master film, free transmission range is that 20 passband and cut film are that 30 passband is realized jointly by narrow band pass filter master film, therefore can obtain wider cut-off scope.
Near infrared narrow band pass filter for the other system of body perception provided by the present invention adopts single substrate, by the scheme of two-sided stack narrow band pass filter master film system and cut film system, realized the other system of body perception narrow band pass filter cut-off width greatly, centre wavelength transmitance height and the good characteristic of rectangle degree.Adopt single substrate, avoid using thicker glasses for infrared use, reduced optical filter thickness.Substrate adopts the way of double-face vacuum plated film to form the film system on two surfaces of substrate, owing to select membraneous material of the same race and production technology, the stress that two membrane stacks should rise also is close, realize so the mutual balance of stress on the substrate two sides, at utmost reduce the deformation that causes owing to stress, prevent that effectively the ultra-thin glass substrate is owing to stress in thin film causes warpage, distortion.Need not to use optical adhesive in the optical filter, avoid Multi reflection, and need not to worry because temperature causes the optical adhesive performance change, so that this near infrared narrow band pass filter can be suitable for the different temperatures environment.
Described narrow band pass filter master film is that wavelength is the narrow-band-filter chip architecture of infrared light generator centre wavelength centered by 20, LD or the LED generation wavelength of typical wavelengths for being positioned at 800nm ~ 950nm scope, and common is 850mm.Described narrow band pass filter master film is 20 structures that adopt long-pass membrane stack and short-pass membrane stack to superpose, and realizes that passband centre wavelength is 850nm, and passband width is the narrow band pass filter of 20nm ~ 50nm.Total several differences according to pass band width of rete, modular design is between 40 layers ~ 55 layers.Wherein, the long-pass film stacking structure is (0.5HL0.5H) ^S, is to form underlying membrane stacking adding of 0.5HL0.5H by a plurality of versions namely; The short-pass film stacking structure is (0.5LH0.5L) ^S, is to form underlying membrane stacking adding of 0.5LH0.5L by a plurality of versions namely; Wherein, H represents high refractive index layer, and L represents low-index film, and S represents the periodicity of basic membrane stack.
Described cut film be 30 for the cut-off scope at 400nm ~ 630nm, the free transmission range long-pass film stacking structure at 750nm ~ 1000nm, to guarantee that this cut film is that 30 can not affect narrow band pass filter master film near infrared part be 20 near infrared 850nm or the transmitance requirement of respective wavelength, according to the cut-off depth requirements, cut film is that total rete number of 30 is between 30 layers to 45 layers.Wherein, the long-pass film stacking structure is (0.5HL0.5H) ^S, is to form underlying membrane stacking adding of 0.5HL0.5H by a plurality of versions namely, and H represents high refractive index layer, and L represents low-index film, and S represents the periodicity of basic membrane stack.
Consult Fig. 2, in one embodiment, narrow band pass filter master film is 20 structures that adopt long-pass membrane stack and short-pass membrane stack to superpose, be implemented in the narrow band pass filter of 850nm centre wavelength, 20nm passband width, the underlying membrane pile structure is long-pass (0.5HL0.5H) ^12 and short-pass (0.5LH0.5L) the ^12 formation that superposes, wherein H represents high refractive index layer, adopts TiO
2, L represents low-index film, adopts SiO
2For passband ripple, do further optimization by passband optical admittance coupling after, it is little to obtain passband ripple, the narrow band pass filter that the rectangle degree is high.By seeing among Fig. 2, although this main film is to have realized that the 850nm center sees through, other spectral range cut-offs, but effectively only cover 850nm phase near field between cut-off region, in this embodiment, as shown in Figure 2, be 640nm ~ 800nm and 900nm ~ 1100nm between its cut-off region, the bleeder zone occur at 400nm ~ 640nm, and for the other system CMOS depth of field of body perception detector, its response is interval at 400nm ~ 1100nm, is can't satisfy wide cut-off region to suppress to require so rely on separately this main film.
Consult Fig. 3, present embodiment provides a kind of cut film to be, this cut film system has realized 400nm ~ 640nm scope cut-off, the Requirement of Spectrum that 750nm ~ 1000nm sees through, can guarantee that this cut film ties up to the near infrared part and can not affect the transmitance requirement that main film ties up near infrared 850nm or respective wavelength, the underlying membrane pile structure is long-pass (0.5HL0.5H) ^18, according to the cut-off depth requirements, this film is that total rete number is 37 layers, and total physical thickness is 2.7 microns.
As cut film system among narrow band pass filter master film system and Fig. 3 among Fig. 2 is formed at respectively substrate two opposing surfaces to consist of the near infrared narrow band pass filter for the other system of body perception of the present invention, its spectral transmittance curve as shown in Figure 4, as seen from the figure, the shortwave cut-off scope of described near infrared narrow band pass filter is the interval common realization of shortwave cutoff wavelength cutoff wavelength interval and cut film system that is by main film, free transmission range is jointly to be realized by the long wave passband of the arrowband passband of main film system and cut film system, and the long wave cut-off function scope is that the long wave cut-off function passband interval and that cut film is by main film system consists of.Spectrum after the stack, whole cut-offs have been realized in 400nm ~ 825nm interval, institute covers still that realization ends between 875nm ~ 1100nm is then by the cut-off region of main film system, clearly, by the stack of main film system and cut film system, in the adjacent free transmission range of centre wavelength, other interval light can all be ended, when being used for the other system of body perception, can effectively remove the light of other wavelength to the impact of flashlight detection, improve the identification accuracy of the other system of body perception.
The above only is embodiments of the invention; be not so limit claim of the present invention; every equivalent structure or equivalent flow process conversion that utilizes instructions of the present invention and accompanying drawing content to do; or directly or indirectly be used in other relevant technical fields, all in like manner be included in the scope of patent protection of the present invention.
Claims (9)
1. near infrared narrow band pass filter that is used for the other system of body perception, it is characterized in that, comprise substrate and the narrow band pass filter master film system that lays respectively at described substrate two opposing surfaces and cut film system, described narrow band pass filter master film system and cut film system replace stacking forming by high refractive index layer and low-index film respectively, and described high refractive index layer and low-index film form by the vacuum coating method deposition; The passband centre wavelength of described narrow band pass filter master film system is consistent with the other system of body perception infrared emission light source centre wavelength.
2. the near infrared narrow band pass filter for the other system of body perception according to claim 1, it is characterized in that: described narrow band pass filter master film is the structure of long-pass membrane stack and the stack of short-pass membrane stack, the passband centre wavelength that described narrow band pass filter master film is is 850nm, and passband width is 20nm ~ 50nm.
3. the near infrared narrow band pass filter for the other system of body perception according to claim 2, it is characterized in that: described long-pass membrane stack is to form underlying membrane stacking adding of 0.5HL0.5H by a plurality of versions, described short-pass membrane stack is to form underlying membrane stacking adding of 0.5LH0.5L by a plurality of versions, wherein, H represents high refractive index layer, and L represents low-index film.
4. the near infrared narrow band pass filter for the other system of body perception according to claim 2 is characterized in that: total rete number of described narrow band pass filter master film system is 40 layers ~ 55 layers.
5. the near infrared narrow band pass filter for the other system of body perception according to claim 1, it is characterized in that: described cut film is the long-pass film stacking structure, and the cut-off scope of described cut film system is 400nm ~ 630nm, and free transmission range is 750nm ~ 1000nm.
6. the near infrared narrow band pass filter for the other system of body perception according to claim 5, it is characterized in that: described long-pass membrane stack is to form underlying membrane stacking adding of 0.5HL0.5H by a plurality of versions, wherein, H represents high refractive index layer, and L represents low-index film.
7. the near infrared narrow band pass filter for the other system of body perception according to claim 5 is characterized in that: total rete number of described cut film system is 30 layers ~ 45 layers.
8. each described near infrared narrow band pass filter for the other system of body perception according to claim 1-7, it is characterized in that: described substrate is transparent glass substrate, thickness is 0.3mm ~ 0.75mm.
9. each described near infrared narrow band pass filter for the other system of body perception according to claim 1-7, it is characterized in that: the material of described high refractive index layer is TiO
2, Ta
2O
5, Nb
2O
5In one or more mixing, the material of described low-index film is SiO
2Or MgF
2
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