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CN103001000B - A kind of artificial electromagnetic material with broadband high refraction index and low dispersion characteristics - Google Patents

A kind of artificial electromagnetic material with broadband high refraction index and low dispersion characteristics Download PDF

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CN103001000B
CN103001000B CN201110275377.4A CN201110275377A CN103001000B CN 103001000 B CN103001000 B CN 103001000B CN 201110275377 A CN201110275377 A CN 201110275377A CN 103001000 B CN103001000 B CN 103001000B
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artificial electromagnetic
electromagnetic material
artificial
man
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CN103001000A (en
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余铨强
陈俊融
寇超锋
栾琳
刘若鹏
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Kuang-Chi Institute of Advanced Technology
Kuang Chi Innovative Technology Ltd
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Kuang-Chi Institute of Advanced Technology
Kuang Chi Innovative Technology Ltd
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Abstract

The present invention relates to a kind of artificial electromagnetic material with broadband high refraction index and low dispersion characteristics, comprise at least one artificial electromagnetic material lamella, each artificial electromagnetic material lamella comprises the first substrate and second substrate that are oppositely arranged, described first substrate on the surface of second substrate, be attached with at least one man-made microstructure, described each man-made microstructure comprise about at least two arrange I-shaped.The artificial electromagnetic material of this structure has higher refractive index in wider frequency band range and variations in refractive index is relatively more steady, and can meet the demand of special occasions, such as the field such as semiconductor manufacturing and antenna manufacture, has broad application prospects.

Description

一种具有宽频高折射率和低色散特性的人工电磁材料An artificial electromagnetic material with broadband high refractive index and low dispersion properties

技术领域 technical field

本发明涉及一种人工电磁材料,更具体地说,涉及一种具有宽频高折射率和低色散特性的人工电磁材料。The invention relates to an artificial electromagnetic material, more specifically, an artificial electromagnetic material with broadband, high refraction index and low dispersion characteristics.

背景技术 Background technique

人工电磁材料,俗称超材料,是一种能够对电磁波产生响应的新型人工合成材料,由基板和附着在基板上的人造微结构组成。由于人造微结构通常是由导电材料排布成的具有一定几何图案的结构,因此能够对电磁波产生响应,从而使超材料整体体现出不同于基板的电磁特性,例如介电常数ε和磁导率μ不同,根据折射率公式可知,折射率n也不同。Artificial electromagnetic material, commonly known as metamaterial, is a new type of artificial synthetic material that can respond to electromagnetic waves. It consists of a substrate and an artificial microstructure attached to the substrate. Since the artificial microstructure is usually a structure with a certain geometric pattern arranged by conductive materials, it can respond to electromagnetic waves, so that the metamaterial as a whole exhibits electromagnetic properties different from those of the substrate, such as the dielectric constant ε and magnetic permeability. μ is different, according to the refractive index formula It can be seen that the refractive index n is also different.

现有的人工电磁材料,其人造微结构通常采用图3所示的ELC结构,包括两个开口相对的开口环和连接两个开口环的连接线,其折射率特性如图4所示,由折射率特性曲线图可知:其折射率比较低,在2GHz~20GHz之间折射率变化比较大即色散特性比较高,而且宽频特性也不够好。所以很难满足一些特殊场合对高折射率宽频和低色散特性的需求,比如半导体制造以及天线制造等领域。The artificial microstructure of existing artificial electromagnetic materials usually adopts the ELC structure shown in Figure 3, which includes two split rings with opposite openings and a connecting line connecting the two split rings, and its refractive index characteristics are shown in Figure 4. The refractive index characteristic curve shows that the refractive index is relatively low, and the refractive index changes greatly between 2GHz and 20GHz, that is, the dispersion characteristic is relatively high, and the broadband characteristic is not good enough. Therefore, it is difficult to meet the requirements of high refractive index broadband and low dispersion characteristics in some special occasions, such as semiconductor manufacturing and antenna manufacturing.

发明内容 Contents of the invention

本发明要解决的技术问题在于,针对现有技术的缺陷,提供一种具有宽频高折射率和低色散特性的人工电磁材料。The technical problem to be solved by the present invention is to provide an artificial electromagnetic material with broadband, high refractive index and low dispersion characteristics in view of the defects of the prior art.

本发明解决其技术问题所采用的技术方案是:一种具有宽频高折射率和低色散特性的人工电磁材料,包括至少一个人工电磁材料片层,每个人工电磁材料片层包括相对设置的第一基板和第二基板,所述第一基板的面向第二基板的表面上附着有至少一个人造微结构,所述每个人造微结构包括至少两个上下排布的工字形。The technical solution adopted by the present invention to solve the technical problem is: a kind of artificial electromagnetic material with broadband high refractive index and low dispersion characteristics, including at least one artificial electromagnetic material sheet, each artificial electromagnetic material sheet includes the first oppositely arranged A substrate and a second substrate, at least one artificial microstructure is attached to the surface of the first substrate facing the second substrate, and each artificial microstructure includes at least two I-shaped arranged up and down.

在本发明的优选实施方式中,相邻基板之间通过组装或者在相邻基板之间填充可连接二者的物质将两者固定在一起。In a preferred embodiment of the present invention, the two adjacent substrates are fixed together by assembling or filling between the adjacent substrates with a substance that can connect them.

在本发明的优选实施方式中,相邻基板之间填充液态基板原料,其在固化后将相邻基板固定在一起。In a preferred embodiment of the present invention, a liquid substrate material is filled between adjacent substrates, which fixes the adjacent substrates together after curing.

在本发明的优选实施方式中,所述人造微结构通过蚀刻附着于所述基板上。In a preferred embodiment of the present invention, the artificial microstructures are attached to the substrate by etching.

在本发明的优选实施方式中,所述人造微结构通过电镀、钻刻或者光刻附着于所述基板上。In a preferred embodiment of the present invention, the artificial microstructure is attached to the substrate by electroplating, drilling or photolithography.

在本发明的优选实施方式中,所述人造微结构通过电子刻或者离子刻附着于所述基板上。In a preferred embodiment of the present invention, the artificial microstructure is attached to the substrate by electron lithography or ion lithography.

在本发明的优选实施方式中,所述基板由FR-4、陶瓷或者聚四氟乙烯制成。In a preferred embodiment of the present invention, the substrate is made of FR-4, ceramics or polytetrafluoroethylene.

在本发明的优选实施方式中,所述基板由铁电材料、铁氧材料或者铁磁材料制成。In a preferred embodiment of the present invention, the substrate is made of ferroelectric material, ferrite material or ferromagnetic material.

在本发明的优选实施方式中,所述人造微结构由导电材料制成。In a preferred embodiment of the present invention, the artificial microstructure is made of conductive material.

在本发明的优选实施方式中,所述人造微结构由银、铜、ITO(铟锡氧化物)、石墨或者碳纳米管制成。In a preferred embodiment of the invention, the artificial microstructure is made of silver, copper, ITO (indium tin oxide), graphite or carbon nanotubes.

实施本发明的人工电磁材料,具有以下有益效果:这种结构的人工电磁材料在较宽的频带范围内具有较高的折射率且折射率变化比较平稳,即具有较好的宽频和低色散特性,可以满足特殊场合的需求,比如半导体制造以及天线制造等领域,具有广阔的应用前景。Implementing the artificial electromagnetic material of the present invention has the following beneficial effects: the artificial electromagnetic material of this structure has a higher refractive index and a relatively stable change in the refractive index in a wider frequency band, that is, it has better broadband and low dispersion characteristics , can meet the needs of special occasions, such as semiconductor manufacturing and antenna manufacturing, and has broad application prospects.

附图说明 Description of drawings

下面将结合附图及实施例对本发明作进一步说明,附图中:The present invention will be further described below in conjunction with accompanying drawing and embodiment, in the accompanying drawing:

图1是本发明所述的人工电磁材料的一个片层的结构示意图;Fig. 1 is a structural representation of a sheet of the artificial electromagnetic material of the present invention;

图2是由图1所示的人工电磁材料片层堆叠形成的人工电磁材料的结构示意图;Fig. 2 is the structural representation of the artificial electromagnetic material formed by stacking the artificial electromagnetic material sheets shown in Fig. 1;

图3是现有技术中人造微结构为ELC结构的每个人工电磁材料片层的拆分结构示意图;3 is a schematic diagram of the split structure of each artificial electromagnetic material sheet in which the artificial microstructure is an ELC structure in the prior art;

图4是图3所示的人工电磁材料的折射率特性曲线示意图;Fig. 4 is a schematic diagram of the refractive index characteristic curve of the artificial electromagnetic material shown in Fig. 3;

图5是实施例所示的一个人工电磁材料片层的拆分结构示意图;Fig. 5 is a schematic diagram of the split structure of an artificial electromagnetic material sheet shown in the embodiment;

图6是图5中每个人造微结构中的一个工字形的结构示意图;Fig. 6 is a structural representation of an I-shape in each artificial microstructure in Fig. 5;

图7是实施例所示的人工电磁材料的折射率特性曲线示意图。Fig. 7 is a schematic diagram of the refractive index characteristic curve of the artificial electromagnetic material shown in the embodiment.

具体实施方式 Detailed ways

本实施例提供了一种具有宽频高折射率和低色散特性的人工电磁材料,包括至少一个人工电磁材料片层1,如图1所示,每个人工电磁材料片层包括两个相对设置的基板和附着在两基板之间的阵列排布的人造微结构。当人工电磁材料片层1有多个时,各个人工电磁材料片层1沿垂直于片层的方向叠加,并通过机械连接、焊接或粘合的方式组装成一体,如图2所示。This embodiment provides an artificial electromagnetic material with broadband high refractive index and low dispersion characteristics, including at least one artificial electromagnetic material sheet 1, as shown in Figure 1, each artificial electromagnetic material sheet includes two oppositely arranged A substrate and an array of artificial microstructures attached between the two substrates. When there are multiple artificial electromagnetic material sheets 1, each artificial electromagnetic material sheet 1 is stacked in a direction perpendicular to the sheets, and assembled into one body by mechanical connection, welding or bonding, as shown in FIG. 2 .

如图5所示,人工电磁材料片层1包括两块相同的均匀等厚的片状基板,分别为第一基板2和第二基板3。两个基板相向叠加,且第一基板2面向第二基板3的表面上附着有2×3个阵列排布的人造微结构4。As shown in FIG. 5 , the artificial electromagnetic material sheet 1 includes two identical sheet-like substrates of uniform thickness, namely a first substrate 2 and a second substrate 3 . The two substrates are superimposed on each other, and the surface of the first substrate 2 facing the second substrate 3 is attached with 2×3 artificial microstructures 4 arranged in an array.

将两个基板的表面分别虚拟地划分为多个完全相同的4毫米×4毫米正方形网格,每个正方形网格内附着一个人造微结构4,每个人造微结构包括上下排布的9个工字形。第一基板2和第二基板3之间通过填充液态基板原料或者通过组装相互连接在一起。人造微结构4通过蚀刻的方式附着在第一基板3上,当然人造微结构4也可以采用电镀、钻刻、光刻、电子刻或者离子刻等方式附着在第一基板2上。基板采用FR-4材料,当然也可以采用其他材料制成,比如陶瓷、聚四氟乙烯、铁电材料、铁氧材料或者铁磁材料制成。人造微结构4采用铜线制成,当然也可以采用银线、ITO、石墨或者碳纳米管等导电材料制成。Virtually divide the surfaces of the two substrates into multiple identical 4 mm × 4 mm square grids, and attach an artificial microstructure 4 to each square grid, and each artificial microstructure includes 9 vertically arranged I-shape. The first substrate 2 and the second substrate 3 are connected to each other by filling liquid substrate materials or by assembling. The artificial microstructure 4 is attached to the first substrate 3 by etching. Of course, the artificial microstructure 4 can also be attached to the first substrate 2 by means of electroplating, drilling, photolithography, electron etching or ion etching. The substrate is made of FR-4 material, and of course it can also be made of other materials, such as ceramics, polytetrafluoroethylene, ferroelectric material, ferrite material or ferromagnetic material. The artificial microstructure 4 is made of copper wires, of course, it can also be made of conductive materials such as silver wires, ITO, graphite or carbon nanotubes.

如图6所示,本实施例中的人造微结构中的工字形采用宽度b=0.1毫米,厚度c=0.018毫米的铜线制成,每个工字形的长度a=3.9毫米,高度为0.3毫米。As shown in Figure 6, the I-shaped in the artificial microstructure in the present embodiment adopts width b=0.1 millimeter, the copper wire of thickness c=0.018 millimeter is made, the length a=3.9 millimeter of each I-shaped, height is 0.3 mm.

本实施例的人工电磁材料其折射率特性如图7所示,在较宽的频段内(0~20GHz)折射率非常平稳具有较好的宽频特性和低色散特性,而且折射率都大于8.225具有较高的折射率,与现有技术中ELC结构的人工电磁材料的折射率相比可知,本发明提供的人工电磁材料具有更好的折射率特性,可以满足特殊场合的需求,比如半导体制造以及天线制造等领域,具有广阔的应用前景。The refractive index characteristics of the artificial electromagnetic material of this embodiment are as shown in Figure 7, the refractive index is very stable in a wide frequency band (0-20GHz) and has good broadband characteristics and low dispersion characteristics, and the refractive index is greater than 8.225. Higher refractive index, compared with the refractive index of the artificial electromagnetic material of ELC structure in the prior art, the artificial electromagnetic material provided by the present invention has better refractive index characteristics, which can meet the needs of special occasions, such as semiconductor manufacturing and Antenna manufacturing and other fields have broad application prospects.

上面结合附图对本发明的实施例进行了描述,但是本发明并不局限于上述的具体实施方式,上述的具体实施方式仅仅是示意性的,而不是限制性的,本领域的普通技术人员在本发明的启示下,在不脱离本发明宗旨和权利要求所保护的范围情况下,还可做出很多形式,这些均属于本发明的保护之内。Embodiments of the present invention have been described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementations, and the above-mentioned specific implementations are only illustrative, rather than restrictive, and those of ordinary skill in the art will Under the enlightenment of the present invention, many forms can also be made without departing from the gist of the present invention and the protection scope of the claims, and these all belong to the protection of the present invention.

Claims (8)

1. one kind has the artificial electromagnetic material of broadband high refraction index and low dispersion characteristics, it is characterized in that, comprise at least one artificial electromagnetic material lamella, each artificial electromagnetic material lamella comprises the first substrate and second substrate that are oppositely arranged, described first substrate on the surface of second substrate, be attached with at least one man-made microstructure, each described man-made microstructure comprise about at least two arrange I-shaped;
Filling liquid raw substrate between adjacent substrate, adjacent substrate is fixed together by after hardening.
2. artificial electromagnetic material according to claim 1, is characterized in that, described man-made microstructure is attached on described substrate by etching.
3. artificial electromagnetic material according to claim 1, is characterized in that, described man-made microstructure is carved by plating, brill or photoetching is attached on described substrate.
4. artificial electromagnetic material according to claim 1, is characterized in that, described man-made microstructure is carved by electronics or ion is attached on described substrate quarter.
5., according to the arbitrary described artificial electromagnetic material of Claims 1-4, it is characterized in that, described substrate is made up of FR-4, pottery or polytetrafluoroethylene.
6., according to the arbitrary described artificial electromagnetic material of Claims 1-4, it is characterized in that, described substrate is made up of ferroelectric material, ferrite material or ferromagnetic material.
7., according to the arbitrary described artificial electromagnetic material of Claims 1-4, it is characterized in that, described man-made microstructure is made up of electric conducting material.
8. artificial electromagnetic material according to claim 7, is characterized in that, described man-made microstructure is made up of silver, copper, ITO, graphite or carbon nano-tube.
CN201110275377.4A 2011-09-16 2011-09-16 A kind of artificial electromagnetic material with broadband high refraction index and low dispersion characteristics Active CN103001000B (en)

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Citations (1)

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Publication number Priority date Publication date Assignee Title
CN101389998A (en) * 2004-07-23 2009-03-18 加利福尼亚大学董事会 Metamaterial

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US9116302B2 (en) * 2008-06-19 2015-08-25 Ravenbrick Llc Optical metapolarizer device
US9570814B2 (en) * 2008-09-11 2017-02-14 Nec Corporation Structure, antenna, communication device and electronic component
CN102800973B (en) * 2011-06-17 2014-07-23 深圳光启高等理工研究院 Broadband artificial electromagnetic material

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Publication number Priority date Publication date Assignee Title
CN101389998A (en) * 2004-07-23 2009-03-18 加利福尼亚大学董事会 Metamaterial

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