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CN102903730A - Mask frame assembly used for organic deposition and package, and manufacturing method and device thereof - Google Patents

Mask frame assembly used for organic deposition and package, and manufacturing method and device thereof Download PDF

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CN102903730A
CN102903730A CN201210295635XA CN201210295635A CN102903730A CN 102903730 A CN102903730 A CN 102903730A CN 201210295635X A CN201210295635X A CN 201210295635XA CN 201210295635 A CN201210295635 A CN 201210295635A CN 102903730 A CN102903730 A CN 102903730A
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mask
framework
frame
axis
minor face
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CN102903730B (en
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邢南伸
崔英默
尹泳锡
吴世正
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Xisi High-tech Co.,Ltd.
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HANSONG CO Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • H10P72/0441

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  • Organic Chemistry (AREA)
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Abstract

本发明涉及白光OLED用电视机制作工艺中的为了制作白光OLED面板的有机沉积及封装用掩模框架组件,其制作方法及制作设备。本发明的为了制作白光OLED面板的有机沉积及封装用掩模框架组件的制作设备,由框架及掩模供给设备、框架装载设备、玻璃基体供给及装载设备、掩模供给设备、掩模与玻璃基体的位置对齐用摄像机设备、将掩模焊接于框架的设备构成,其特征在于,包括:一对相对置的框架短边(Y轴)移动型夹具,把持掩模带的两端,可以在施加张力的情况下沿框架短边方向移动;一对相对置的框架长边(X轴)移动型夹具,把持掩模带的两端,可以在施加张力的情况下沿框架长边方向移动。

The invention relates to a mask frame assembly for organic deposition and packaging of a white OLED panel in the manufacturing process of a white OLED TV, a manufacturing method and manufacturing equipment thereof. The manufacturing equipment of the mask frame assembly for organic deposition and encapsulation of the white light OLED panel of the present invention consists of frame and mask supply equipment, frame loading equipment, glass substrate supply and loading equipment, mask supply equipment, mask and glass The position alignment of the substrate is composed of a camera device and a device for welding the mask to the frame, which is characterized in that it includes: a pair of movable clamps on the short side (Y axis) of the frame opposite to each other, holding both ends of the mask tape, and can be positioned at Move along the short side of the frame when tension is applied; a pair of moving fixtures on the long side of the frame (X axis) hold both ends of the mask tape and move along the long side of the frame under tension.

Description

有机沉积及封装用掩模框架组件,其制作方法及设备Mask frame component for organic deposition and encapsulation, manufacturing method and equipment thereof

技术领域 technical field

本发明一种涉及白光OLED用电视机制作工艺中以便制作白光OLED面板的有机沉积及封装用掩模框架组件,其制作方法及制作设备,更具体地说是涉及一种为了将与有源矩阵有机发光二极体面板(AMOLED)一起备受瞩目的白光OLED大型化到第四代以上,而利用多个金属棒掩模制作的掩模框架组件,与其制作方法及制作设备。The present invention relates to a mask frame assembly for organic deposition and encapsulation of a white OLED panel in the manufacturing process of a white OLED TV, its manufacturing method and manufacturing equipment, and more specifically relates to a method for combining with an active matrix The organic light-emitting diode panel (AMOLED) and the high-profile white OLED have been enlarged to more than the fourth generation, and the mask frame assembly made by using multiple metal rod masks, its manufacturing method and manufacturing equipment.

背景技术 Background technique

OLED(有机发光二极管)的反映速度相比于薄膜晶体管液晶显示器(TFT LCD)要快得多。此外,因为自身可以发光,无需背光灯,因此厚度与重量可以减少三分之一,是具有宽视角与低电耗构造的次世代显示器。The reflection speed of OLED (Organic Light Emitting Diode) is much faster than that of Thin Film Transistor Liquid Crystal Display (TFT LCD). In addition, since it can emit light by itself and does not require a backlight, the thickness and weight can be reduced by one-third, and it is a next-generation display with a wide viewing angle and low power consumption structure.

这样的OLED分为AM方式(主动)与PM方式(被动)。无源矩阵有机发光二极体面板(PMOLED)相比于有源矩阵有机发光二极体面板(AMOLED),生产成本低廉,但在耗电、寿命、分辨率上受到限制。AMOLED在每个像素里都用TFT与电容,在耗电、寿命、分辨率侧面上都很优秀,因此忽略了因为TFT制作而导致的生产成本高的缺点,目前在各个领域中受到广泛的开发与接连不断地量产尝试。AMOLED的最大优点在于其在画质上的竞争力。相比于最大竞争对手的LCD,其对色的再现率高出了30%,对比度甚至优秀20倍之多。LCD最大缺点的影像余象现象在AMOLED中也无从找寻。这是因为,相反于LCD,背光源是将间接光源通过液晶、彩色滤光器等,对于复杂的画面显示,AMOLED是通过有机物质自身发光直接再现自然色的画面。此外,OLED相比于LCD,其构造非常简单,因此在部件侧面也非常有利。Such OLEDs are classified into AM type (active) and PM type (passive). Compared with the active matrix organic light emitting diode panel (AMOLED), the passive matrix organic light emitting diode panel (PMOLED) has lower production cost, but is limited in power consumption, lifespan and resolution. AMOLED uses TFTs and capacitors in each pixel, and is excellent in terms of power consumption, lifespan, and resolution. Therefore, the disadvantage of high production costs caused by TFT production is ignored, and it is widely developed in various fields at present. And continuous mass production attempts. The biggest advantage of AMOLED lies in its competitiveness in picture quality. Compared with the largest competitor's LCD, its color reproduction rate is 30% higher, and the contrast ratio is even 20 times better. The image afterimage phenomenon, which is the biggest shortcoming of LCD, cannot be found in AMOLED. This is because, contrary to LCD, the backlight uses indirect light sources through liquid crystals, color filters, etc. For complex picture displays, AMOLED directly reproduces natural-color pictures through the organic material's own light emission. In addition, compared with LCD, OLED has a very simple structure, so it is also very advantageous on the side of components.

但是,查看OLED材料原价、驱动电路、驱动IC价格时,OLED的贬值比率居然大到,占了总成本的一半。这是因为OLED尚未在消费者之间普及化,导致很难起到通过大规模生产降低生产成本的效果。However, when looking at the original price of OLED materials, driving circuits, and driving IC prices, the depreciation rate of OLED is unexpectedly large, accounting for half of the total cost. This is because OLED has not yet been popularized among consumers, making it difficult to achieve the effect of reducing production costs through mass production.

因为这种现实问题,白光OLED技术成为了最近新兴的显示技术。对白光OLED进行简单说明就是,将LCD面板的优点与AMOLED面板的优点融合在一起的技术。Because of this practical problem, white light OLED technology has become a recently emerging display technology. A brief description of white OLED is a technology that combines the advantages of LCD panels with the advantages of AMOLED panels.

即,在显示色彩的R/G/B原色滤镜上放置具有切换功能的白光OLED及TFT,将自身发光的白光OLED切换为TFT来显示R/G/B原色彩色滤镜的显示技术。That is, a white light OLED and TFT with switching function are placed on the R/G/B primary color filter that displays the color, and the self-luminous white light OLED is switched to a TFT to display the display technology of the R/G/B primary color filter.

如果可以将这种白光OLED面板实现大型化,可以提供LCD级别的量产收率与AMOLED相当的普及型高品质显示面板。If this white OLED panel can be enlarged, it can provide a popular high-quality display panel with LCD-level mass production yield comparable to that of AMOLED.

但是,目前的实情为,还没有提供可以大量制作出现在大众普及的LCD或PDP级别的40英寸以上或第八代以上的白光OLED面板的技术,因此普及高品质的显示面板是遥远的实情。However, the current reality is that there is no technology that can mass-produce white OLED panels of 40 inches or more that appear in popular LCDs or PDPs, or 8th generation or more. Therefore, it is far away to popularize high-quality display panels.

确实是可以具备大尺寸的线圈实现单张方式,但是很难利用单张形成的掩模实现大型化的理由是,掩模原材料的线圈供给的大小,没有以大型化所需的大小尺寸生产。即,因为盈利性问题,线圈生产商不会去生产白光OLED显示厂商所需大小的线圈。It is true that large-sized coils can be realized in a single sheet, but the reason why it is difficult to increase the size of a mask formed on a single sheet is that the coil supply size of the mask raw material is not produced in the size required for enlargement. That is, because of profitability issues, coil manufacturers will not produce coils of the size required by white light OLED display manufacturers.

此外,为了大量制作第四代以上的白光OLED面板,如果具有高精细,同时还能沉积白光OLED的白光OLED用掩模框架组件的制作技术做铺垫,就可以克服收率问题实现量产,但大部分的掩模框架组件的制作技术或设备都是为了LCD或AMOLED面板制作的用途,因此很难直接应用为白光OLED用掩模框架组件。In addition, in order to produce a large number of white OLED panels of the fourth generation or above, if the mask frame assembly technology for white OLEDs with high definition and white OLEDs can be deposited at the same time, it can overcome the yield problem and achieve mass production. Most of the fabrication techniques or equipment of mask frame components are for the production of LCD or AMOLED panels, so it is difficult to be directly applied as a mask frame component for white OLED.

具体的理由是以往形成大型化的LCD或正在开发着大型化技术的AMOLED用掩模框架组件的制作方法或制作设备中,如FMM Type OLED,为了使R/G/B用有机物沉淀,利用在各像素中形成了对应的密集的槽的金属掩模(Fine Metal MASK),利用开放式掩模对Metal进行沉积及封装。但是白光OLED与之不同,为了对应R/G/B色彩,使用了LCD制作工艺中使用的滤色镜,因此在White有机物沉积与金属沉积及封装工艺中都利用了开放式掩模。因此,不需要应用金属掩模,开放式掩模的制作在单张内部取多面制作时,会因为Mask Coil Size的限制性而很难应用。The specific reason is that in the manufacturing method or manufacturing equipment of the mask frame assembly for AMOLED that has formed a large-scale LCD or is currently developing a large-scale technology, such as FMM Type OLED, in order to deposit organic substances for R/G/B, it is used in A metal mask (Fine Metal MASK) corresponding to dense grooves is formed in each pixel, and Metal is deposited and packaged using an open mask. But white OLED is different. In order to correspond to R/G/B colors, the color filter used in the LCD manufacturing process is used. Therefore, open masks are used in the White organic deposition, metal deposition and packaging processes. Therefore, there is no need to apply a metal mask. When the open mask is fabricated on multiple sides within a single sheet, it will be difficult to apply due to the limitation of the Mask Coil Size.

此外,如图11所示,在单张内部取多面制作的以往的方式,很难使掩模在没有下坠的情况下,维持张力、精密地进行安置,因此,很难制作出大面积的白光OLED用掩模框架组件。In addition, as shown in Figure 11, it is difficult to maintain the tension and place the mask precisely without falling down in the conventional way of making multiple sides inside a single sheet. Therefore, it is difficult to produce a large area of white light. Mask frame assembly for OLED.

即,掩模如果不具有张力,会因为位置不够精密导致掩模的中央出现下垂,对阴影(Shadow)与沉积位置有影响,因此无法提供高精细的白光OLED用面板,出现收率降低的问题。That is, if the mask does not have tension, the center of the mask will sag due to insufficient positioning, which will affect the shadow (Shadow) and deposition position. Therefore, it is impossible to provide a high-definition white OLED panel, and there is a problem of lower yield. .

发明内容 Contents of the invention

(要解决的技术问题)(technical problem to be solved)

为了解决如上所述问题,本发明的目的在于提供一种掩模框架组件及其制作方法与制作设备,为了使第四代以上的白光OLED面板得到量产,将掩模棒移动并定位到将槽分割成可以容纳所需大镜框面积的位置。分割时为了不使掩模的中央部分发生下坠等,对其施加张力后焊接的制作方法及制作设备,用其来制作掩模框架组件。In order to solve the above problems, the object of the present invention is to provide a mask frame assembly and its manufacturing method and manufacturing equipment. In order to achieve mass production of white light OLED panels of the fourth generation or above, the mask rods are moved and positioned to The slots are divided into locations that can accommodate the large frame area required. In order to prevent the central part of the mask from falling during division, etc., the production method and production equipment are welded after applying tension to the mask frame assembly.

(解决问题的设备)(equipment to solve the problem)

为了达成如上所述目的并去除以往的缺点,本发明的目的在于提供白光OLED用电视机制作工艺中的,为了制作白光OLED面板的有机沉积及封装用掩模框架组件的制作方法,其特征在于,包括:In order to achieve the above purpose and remove the previous shortcomings, the object of the present invention is to provide a method for manufacturing a white OLED panel for organic deposition and packaging mask frame assembly in the manufacturing process of a white OLED TV, which is characterized in that ,include:

(A)为了确定掩模带的附着位置,而进行玻璃基体定位的阶段;(A) the stage of positioning the glass substrate in order to determine the attachment position of the mask tape;

(B)为了通过焊接掩模带进行固定,而进行框架载入的阶段;(B) Stage of frame loading for fixation by solder mask tape;

(C)将掩模带的两端在框架短边(Y轴)移动型夹具或框架长边(X轴)移动型夹具进行把持的阶段;(C) A stage where both ends of the mask tape are held by a movable jig on the short side of the frame (Y axis) or a movable jig on the long side of the frame (X axis);

(D)将两端的框架短边(Y轴)移动型夹具沿框架短边方向或框架长边(Z轴)移动型夹具沿框架长边方向移动到焊接点后,施加张力在玻璃基体上形成的掩模带显示部进行对齐的阶段;(D) After moving the short side (Y axis) movable fixtures of both ends of the frame along the short side of the frame or the long side (Z axis) of the frame to the welding point along the long side of the frame, tension is applied to form on the glass substrate. The stage of mask strip display part alignment;

(E)为了防止与玻璃基体显示部维持对齐的掩模带的弯曲,利用框架短边移动型夹具或长边(X轴)移动型夹具上具备的θ角度调节电机调节θ角度的阶段;(E) In order to prevent the bending of the mask tape which maintains alignment with the glass substrate display part, the θ angle is adjusted by the θ angle adjustment motor provided on the short side movable jig or the long side (X-axis) movable jig of the frame;

(F)将确定位置及调节完θ角度的掩模带的两端焊接于框架上的阶段;(F) The stage of welding the two ends of the mask tape whose position has been determined and the θ angle has been adjusted to the frame;

(G)重复(C)阶段至(F)阶段的阶段,使得需要设置在框架的短边(Y轴)或长边(X轴)上的掩模带数。(G) The stages (C) to (F) are repeated so that the number of mask stripes required to be set on the short side (Y axis) or the long side (X axis) of the frame.

本发明作为优选实施例,由所述(F)或(G)阶段中,利用框架长边(X轴)移动型夹具,确定位置及调节完θ角度的掩模带的两端焊接于框架上后,在框架短边上焊接与已设置的掩模带交叉部的阶段构成。As a preferred embodiment of the present invention, in the (F) or (G) stage, using the frame long side (X-axis) movable fixture, the two ends of the mask tape whose position is determined and the θ angle has been adjusted are welded to the frame Finally, the stage of welding the intersecting part with the mask tape set on the short side of the frame is constituted.

本发明作为优选实施例,所述焊接顺序可以先在框架短边焊接掩模带后再在框架长边焊接掩模带。As a preferred embodiment of the present invention, the welding sequence may first weld the mask strip on the short side of the frame and then weld the mask strip on the long side of the frame.

本发明作为优选实施例,所述框架的短边及长边上的焊接顺序可以以从内侧到外侧的方向进行焊接。As a preferred embodiment of the present invention, the welding sequence on the short side and the long side of the frame can be welded from the inside to the outside.

本发明作为优选实施例,所述以框架短边方向焊接的多个掩模带中,两侧的掩模带与长边框架全面接触并焊接;As a preferred embodiment of the present invention, among the plurality of mask strips welded in the direction of the short side of the frame, the mask strips on both sides are in full contact with the long side frame and welded;

所述以框架长边方向焊接的多个掩模带中,两侧的掩模带与短边框架全面接触并焊接。Among the plurality of mask strips welded in the direction of the long side of the frame, the mask strips on both sides are in full contact with the short side frame and welded.

本发明以另一实施形态,提供白光OLED用电视机制作工艺中,为了制作白光OLED面板的有机沉积及封装用掩模框架组件的制作设备,所述白光OLED面板制作用掩模框架组件制作设备由框架及掩模供给设备、框架装载设备、玻璃基体供给及装载设备、掩模供给设备、掩模与玻璃基体的位置对齐用摄像机设备、将掩模焊接于框架的设备构成,其特征在于,包括:In another embodiment, the present invention provides the manufacturing equipment of the mask frame assembly for organic deposition and packaging of the white OLED panel in the manufacturing process of the white OLED TV, and the manufacturing equipment of the mask frame assembly for the white OLED panel It consists of frame and mask supply equipment, frame loading equipment, glass substrate supply and loading equipment, mask supply equipment, camera equipment for aligning the mask and glass substrate, and equipment for welding the mask to the frame, characterized in that, include:

一对对置的框架短边(Y轴)移动型夹具,把持掩模带的两端,可以在施加张力的情况下沿框架短边方向移动;A pair of movable fixtures on the short side of the frame (Y axis) hold both ends of the mask tape and can move along the short side of the frame under tension;

一对对置的框架长边(X轴)移动型夹具,把持掩模带的两端,可以在施加张力的情况下沿框架长边方向移动。A pair of opposite frame long side (X-axis) movable clamps hold both ends of the mask tape and can move along the long side of the frame under tension.

本发明作为优选实施例,所述框架短边(Y轴)移动型夹具及框架长边(X轴)移动型夹具的构成更包括:θ角度调节电机,调节移送到的掩模带θ角度;θ轴调节缓冲设备,在另一方向支持,因与所述θ角度调节电机的旋转而前进的连杆的接触而旋转的把持气缸及气缸部。As a preferred embodiment of the present invention, the composition of the frame short side (Y axis) movable fixture and the frame long side (X axis) movable fixture further includes: a θ angle adjustment motor to adjust the θ angle of the transferred mask tape; The θ-axis adjustment cushioning device supports in the other direction the holding cylinder and the cylinder part that rotate due to contact with the connecting rod advanced by the rotation of the θ-angle adjustment motor.

本发明作为优选实施例,所述框架短边(Y轴)移动型夹具及框架长边(X轴)移动型夹具安装于直线伺服电机上进行精密的往复运动。As a preferred embodiment of the present invention, the short side (Y axis) movable fixture of the frame and the long side (X axis) movable fixture of the frame are installed on a linear servo motor for precise reciprocating motion.

本发明以另一实施形态,提供白光OLED用电视机制作工艺中的,为了制作白光OLED面板的有机沉积及封装用掩模框架组件,其特征在于,包括:由所述掩模框架组件制作方法制作的,形成外围的框架;In another embodiment, the present invention provides a mask frame assembly for the organic deposition and packaging of a white OLED panel in the manufacturing process of a white OLED TV, which is characterized in that it includes: a method for manufacturing the mask frame assembly Manufactured, forming a peripheral frame;

一个以上的掩模带,横跨内部空间在所述框架的长边及短边上进行焊接设置;one or more masking strips welded across the interior space on the long and short sides of the frame;

掩模带,与所述框架的长边及短边全面接触并焊接;masking strips fully contacted and welded to the long and short sides of the frame;

多个白光OLED沉积用槽,由所述框架的短边或长边上焊接的掩模带,形成于内部空间。A plurality of grooves for white light OLED deposition are formed in the inner space by masking strips welded on the short side or the long side of the frame.

(发明的效果)(effect of invention)

如上所述的本发明具有,为了可以制作第四代以上大面积化的白光OLED面板,提供有机沉积及封装用掩模框架组件的优点;As mentioned above, the present invention has the advantages of providing a mask frame assembly for organic deposition and packaging in order to manufacture large-area white OLED panels of the fourth generation or above;

此外,利用各一对框架长边与短边方向上对置的总共四个夹具把持供给的掩模带后,在想要的位置上将掩模带精密定位的优点;In addition, the advantage of precisely positioning the mask tape at the desired position after gripping the supplied mask tape with a total of four jigs facing each other in the direction of the long side and the short side of the frame;

此外,可以在掩模带上施加张力并定位时,调节θ角度来放置弯曲及下坠,由此制作高精细的白光OLED面板,来防止阴影现象等的优点的有用发明,其在产业上的利用备受期待。In addition, when tension is applied to the mask tape and positioning is performed, the θ angle can be adjusted to prevent bending and slumping, thereby producing a high-definition white OLED panel, preventing shadowing phenomenon, and other useful inventions, and its industrial application Highly anticipated.

附图说明 Description of drawings

图1是表示根据本发明的一实施例的使用掩模带分割槽的白光OLED用掩模框架组件的平面示意图。FIG. 1 is a schematic plan view showing a mask frame assembly for a white OLED using a mask strip dividing groove according to an embodiment of the present invention.

图2是表示根据本发明的另一实施例的使用掩模带分割槽的白光OLED用掩模框架组件的平面示意图。FIG. 2 is a schematic plan view showing a mask frame assembly for a white OLED using a mask strip dividing groove according to another embodiment of the present invention.

图3是表示根据本发明的一实施例的利用移动型夹具的框架中焊接掩模的流程示意图。FIG. 3 is a schematic flow diagram showing a solder mask in a frame using a movable jig according to an embodiment of the present invention.

图4是表示根据本发明的一实施例的利用移动型夹具的框架中焊接掩模的设备的示意图。FIG. 4 is a schematic diagram illustrating an apparatus using a solder mask in a frame of a movable jig according to an embodiment of the present invention.

图5是表示根据本发明的一实施例的整体构成概略图。FIG. 5 is a schematic diagram showing the overall configuration of an embodiment according to the present invention.

图6是表示根据本发明的一实施例的θ角度的校正设备的示意图。FIG. 6 is a schematic diagram illustrating a correction device for the θ angle according to an embodiment of the present invention.

图7是表示根据本发明的一实施例的框架及玻璃基体上下拉动设备的示意图。Fig. 7 is a schematic diagram showing a frame and a glass substrate pulling up and down device according to an embodiment of the present invention.

图8是表示根据本发明的一实施例的掩模带装载设备的示意图。FIG. 8 is a schematic diagram showing a mask tape loading apparatus according to an embodiment of the present invention.

图9是表示根据本发明的一实施例的影像及激光焊接设备的示意图。FIG. 9 is a schematic diagram showing an image and laser welding device according to an embodiment of the present invention.

图10是表示本发明的掩模框架组件的制作方法流程图。Fig. 10 is a flowchart showing a method of manufacturing the mask frame assembly of the present invention.

图11是表示以往在单张内部取多面制作白光OLED用掩模框架组件的示意图。FIG. 11 is a schematic view showing a conventional mask frame assembly for manufacturing white OLEDs by taking multiple faces inside a single sheet.

(附图标记说明)(Description of Reference Signs)

1:框架                      2a、2b:掩模带1: Frame 2a, 2b: Masking tape

3:槽                        4a:框架短边(Y轴)移动型夹具3: Groove 4a: Short side of the frame (Y-axis) movable fixture

4b:框架长边(X轴)移动型夹具4b: Frame long side (X-axis) movable fixture

5:直线伺服电机              41a、41b:气缸5: Linear servo motor 41a, 41b: Cylinder

42a、42b:把持气缸42a, 42b: control cylinder

6:框架及玻璃基体的上下拉动设备6: Up and down pulling equipment for frame and glass substrate

7:掩模带装载设备7: Mask tape loading equipment

8:影像及激光焊接设备8: Image and laser welding equipment

9:影像及激光焊接设备移送用直线伺服电机9: Linear servo motor for video and laser welding equipment transfer

10:θ轴铰链                 11:θ角度调节电机10: θ axis hinge 11: θ angle adjustment motor

12:θ轴调节缓冲设备         13:θ轴固定设备12: Theta-axis adjustment buffer equipment 13: Theta-axis fixing equipment

15:移动型夹具Up/Down电机15: Mobile Fixture Up/Down Motor

具体实施方式 Detailed ways

下面参照附图,对本发明的实施例的构成与其作用进行具体说明。此外,在说明本发明的过程中,当判断认为对相关众所周知的功能或构成的具体说明可能会混淆本发明要旨时,省略其具体说明。The configuration and functions of the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In addition, in describing the present invention, when it is judged that a specific description of related well-known functions or configurations may obscure the gist of the present invention, its specific description will be omitted.

图1是表示根据本发明的一实施例的使用掩模带分割槽的白光OLED用掩模框架组件的平面示意图。图2是表示根据本发明的另一实施例的使用掩模带分割槽的白光OLED用掩模框架组件的平面示意图。FIG. 1 is a schematic plan view showing a mask frame assembly for a white OLED using a mask strip dividing groove according to an embodiment of the present invention. FIG. 2 is a schematic plan view showing a mask frame assembly for a white OLED using a mask strip dividing groove according to another embodiment of the present invention.

如图所示,根据本发明的掩模框架组件的构造包括:形成周边的框架1;一个以上的掩模带2a,横跨所述框架的内部空间并焊接在其长边及短边上;掩模带2b,与所述框架的长边及短边全面接触并焊接;多个白光OLED沉积用槽3,通过焊接于所述框架的短边或长边的掩模带形成于框架内部空间。As shown in the figure, the configuration of the mask frame assembly according to the present invention includes: a frame 1 forming a perimeter; more than one mask strip 2a spanning the inner space of the frame and welded on its long and short sides; A mask strip 2b is fully in contact with and welded to the long and short sides of the frame; a plurality of slots 3 for white light OLED deposition are formed in the inner space of the frame by mask strips welded to the short or long sides of the frame .

所述掩模带2a为其内部没有如槽等任何加工的长条形式的压缩分割掩模。The mask strip 2a is a compressed split mask in the form of a strip without any processing such as grooves inside.

本发明的掩模框架组件是使用于制作白光OLED中的有机沉积(Evaporation)及封装(Passivation)的掩模框架组件。The mask frame assembly of the present invention is a mask frame assembly used for organic deposition (Evaporation) and encapsulation (Passivation) in manufacturing white light OLEDs.

适用于所述掩模框架组件的框架为沉积用框架(Frame),其材质使用铁镍合金(Invar36)及不锈钢(SUS420)。此时优选使用的厚度为30mmt及20mmt,厚度公差为100μmt以下、平坦度为50μm以下。当然,这仅仅为提出的优选例子而已,本发明并不限定于如上所述的数值中。A frame suitable for the mask frame assembly is a deposition frame (Frame), and its material is an iron-nickel alloy (Invar36) and stainless steel (SUS420). In this case, the thicknesses preferably used are 30 mmt and 20 mmt, the thickness tolerance is 100 μmt or less, and the flatness is 50 μm or less. Of course, this is merely a preferred example, and the present invention is not limited to the numerical values described above.

此外,所述掩模带的材质优选使用可以焊接的厚度为100μm口10%的铁镍合金(Invar)、不锈钢(Stainless Steel)、镍-钴合金(Ni-Co Alloy)。In addition, the material of the mask strip is preferably weldable iron-nickel alloy (Invar), stainless steel (Stainless Steel), nickel-cobalt alloy (Ni-Co Alloy) with a thickness of 100 μm ~ 10%.

此外,利用所述框架与掩模带制作掩模框架组件时,为了最小化温度变化引起的影响,框架与掩模带优选使用相同的材质。In addition, when using the frame and the mask strip to make the mask frame assembly, in order to minimize the influence caused by temperature changes, the frame and the mask strip are preferably made of the same material.

因为具备了如上所述构成的掩模框架组件,使得作为有机物的白光OLED沉积源可以通过所述白光OLED沉积用槽3,沉积于对象玻璃基板上,由此使第四代(玻璃基板的基准横竖分别为780mm与920mm的大小)以上的大面积白光OLED面板的制作变得可能。如果这种白光OLED面板制作出来,可以在其正面附着R/G/B原色滤镜,并通过白光OLED切换动作的发光时,用色彩表示来进行显示。Owing to possessing the mask frame assembly constituted as described above, the white light OLED deposition source as an organic substance can pass through the white light OLED deposition groove 3 and be deposited on the object glass substrate, thereby making the fourth generation (the benchmark of the glass substrate) It becomes possible to manufacture large-area white OLED panels with a size of 780mm and 920mm (horizontally and vertically). If this kind of white OLED panel is produced, it can attach R/G/B primary color filters to its front, and display it in color when the white OLED switches light.

图3是表示根据本发明的一实施例的利用移动型夹具的框架中焊接掩模的流程示意图,图4是表示根据本发明的一实施例的利用移动型夹具的框架中焊接掩模的设备的示意图。3 is a schematic flow diagram showing a solder mask in a frame using a movable fixture according to an embodiment of the present invention, and FIG. 4 is a schematic diagram showing an apparatus for soldering a mask in a frame using a movable fixture according to an embodiment of the present invention. schematic diagram.

如图所示,本发明的掩模框架组件不同于以往的固定型夹具,而是利用移动型夹具将掩模带在框架上定位并焊接构成。As shown in the figure, the mask frame assembly of the present invention is different from the conventional fixed fixture, but uses a movable fixture to position and weld the mask strip on the frame.

为此,本发明的掩模框架组件由,将框架隔在中间并对置的一对框架短边(Y轴)移动型夹具4a与将框架隔在中间并对置的一对框架长边(X轴)移动型夹具4b构成。使用总共4个移动型夹具将掩模带移动在想要移动到的特定位置,施加张力并焊接与框架上。Therefore, the mask frame assembly of the present invention is composed of a pair of frame short side (Y-axis) moving jigs 4a that separate the frame and face each other, and a pair of frame long sides ( X-axis) movable fixture 4b constitutes. Use a total of 4 movable jigs to move the masking tape to the specific position you want to move it to, apply tension and weld it to the frame.

此时,优选的焊接顺序为,先在框架的短边焊接掩模带后再框架的长边焊接掩模带,短边及长边上由内侧到外侧的方向焊接。根据图示的一实施例具体说明短边中的焊接顺序为由内侧①、②位置向外侧方向③、④位置的顺序进行。此外,长边中的焊接顺序为由内侧⑤位置向外侧方向⑥、⑦位置的顺序进行。如果如图面所分割时并不限定于如上的顺序。At this time, the preferred welding sequence is to first weld the mask strip on the short side of the frame and then weld the mask strip on the long side of the frame, and weld the short side and the long side from the inside to the outside. According to an embodiment shown in the figure, it is specifically described that the welding sequence in the short side is from the inner side ①, ② position to the outer direction ③, ④ position. In addition, the order of welding on the long side is performed in the order from the inner side ⑤ position to the outer direction ⑥, ⑦ position. If it is divided as shown in the screen, it is not limited to the above order.

但,所述框架短边方向进行焊接的多个掩模带中,两侧的掩模带总会与长边框架全面接触并焊接;所述框架长边方向进行焊接的多个掩模带中,两侧的掩模带总会与短边框架全面接触并焊接。由此构成防止宽度相比于长度方向短的掩模带的下坠或扭曲。However, among the plurality of mask strips welded in the short side direction of the frame, the mask strips on both sides will always be in full contact with the long side frame and welded; among the plurality of mask strips welded in the long side direction of the frame , the masking strips on both sides are always in full contact with the short side frame and welded. In this way, it is configured to prevent falling or twisting of the mask tape whose width is shorter than the longitudinal direction.

如上所述进行焊接,因为框架没有扭曲使完成的掩模框架组件的构造变得坚固。Soldering is performed as described above because the lack of distortion of the frame makes the construction of the finished mask frame assembly strong.

若根据图4进行更加具体地说明,即一对框架短边(Y轴)移动型夹具4a与框架长边(X轴)移动型夹具4b分别在设置在其下部的直线伺服电机(Liner servo motor,5)上进行精密地往返运动。即,这一对所述框架短边(Y轴)移动型夹具总是在直线伺服电机(Liner servo motor,5)上进行联动运动。一对框架长边(X轴)移动型夹具也如上,设置于直线伺服电机上进行联动运动。If more specifically described according to FIG. 4, a pair of frame short side (Y-axis) movable clamps 4a and frame long side (X-axis) movable clamps 4b are respectively arranged on the linear servo motor (Liner servo motor) at the bottom thereof. , 5) Carry out precise reciprocating motion on it. That is, this pair of frame short side (Y-axis) movable clamps always carry out linked motion on a linear servo motor (Liner servo motor, 5). A pair of frame long side (X-axis) movable fixtures are also set on the linear servo motor for linkage movement as above.

此外,框架短边(Y轴)移动型夹具4a与框架长边(X轴)移动型夹具4b不仅可以在直线伺服电机(Liner servo motor,5)上进行往返运动,还为了可以在与此正交的方向进行前后运动,其内部分别构成气缸41a、41b为了把持装载的掩模带,在夹具前后运动后由把持气缸42a、42b把持掩模带。把持后,掩模带在直线伺服电机上做直线运动,移送到焊接的位置并停止。移动停止后,将后叙到的影像及激光焊接设备进行移动,使掩模带的位置与玻璃基体间对齐并进行焊接。In addition, the frame short-side (Y-axis) movable jig 4a and the frame long-side (X-axis) movable jig 4b can not only perform reciprocating motion on a linear servo motor (Liner servo motor, 5), but also It moves back and forth in the crossing direction, and cylinders 41a and 41b are formed inside to hold the loaded mask tape, and the mask tape is held by the holding cylinders 42a and 42b after the jig moves back and forth. After grasping, the mask tape moves linearly on the linear servo motor, moves to the welding position and stops. After the movement stops, the image and laser welding equipment mentioned later are moved to align the position of the mask tape with the glass substrate and perform welding.

装载如上所述的掩模带时可以按照图3所示的顺序,先在框架的短边焊接掩模带后,在框架的长边焊接掩模带。When loading the masking tape as described above, the sequence shown in FIG. 3 can be followed, first welding the masking tape to the short side of the frame, and then welding the masking tape to the long side of the frame.

图5是表示根据本发明的一实施例的整体构成概略图,图6是表示根据本发明的一实施例的θ角度的校正设备的示意图,图7是表示根据本发明的一实施例的框架及玻璃基体上下拉动设备的示意图,图8是表示根据本发明的一实施例的掩模带装载设备的示意图,图9是表示根据本发明的一实施例的影像及激光焊接设备的示意图。Fig. 5 is a schematic diagram showing the overall structure according to an embodiment of the present invention, Fig. 6 is a schematic diagram showing a correction device for angle θ according to an embodiment of the present invention, and Fig. 7 is a schematic diagram showing a framework according to an embodiment of the present invention 8 is a schematic diagram showing a mask tape loading device according to an embodiment of the present invention, and FIG. 9 is a schematic diagram showing an image and laser welding device according to an embodiment of the present invention.

如图所示,本发明的掩模框架组件,其构成包括:影像及玻璃基体上下拉动设备6,可以装载包括直线伺服电机5上设置的框架短边(Y轴)移动型夹具4a与框架长边(X轴)移动型夹具4b在内的整体设备并在其下部定位玻璃基体;掩模带装载设备7,可以将框架短边(Y轴)移动型夹具4a与框架长边(X轴)移动型夹具4b把持并移送的掩模带进行上下拉动;影像及激光焊接设备8,其内部具备摄像机、激光位移传感器、激光焊接设备,可以将掩模带与玻璃基体进行对齐并将框架与掩模带进行焊接;与影像及激光焊接设备移送用直线伺服电机(Liner servo motor,9),可以移送所述影像及激光焊接设备。As shown in the figure, the mask frame assembly of the present invention comprises: an image and glass substrate up and down pulling device 6, which can be loaded with a frame short side (Y axis) moving fixture 4a and a frame length The overall device including the side (X-axis) movable jig 4b and positioning the glass substrate at its lower part; the mask tape loading device 7, which can connect the short side (Y-axis) movable jig 4a of the frame to the long side (X-axis) of the frame The mask tape held and transferred by the movable fixture 4b is pulled up and down; the image and laser welding equipment 8 is equipped with a camera, a laser displacement sensor, and a laser welding device inside, which can align the mask tape with the glass substrate and align the frame with the mask. The mold belt is welded; and the image and laser welding equipment are transferred with a linear servo motor (Liner servo motor, 9), which can transfer the image and laser welding equipment.

此外,可以具备θ角度调节电机11,细微地调节框架短边(Y轴)移动型夹具4a或框架长边(X轴)移动型夹具4b在移送中发生的θ角。In addition, a θ angle adjustment motor 11 may be provided to finely adjust the θ angle generated during the transfer of the frame short side (Y axis) movable gripper 4a or the frame long side (X axis) movable gripper 4b.

即,框架短边(Y轴)移动型夹具4a或框架长边(X轴)移动型夹具4b把持并移送中的掩模带即使通过精密的直线伺服电机进行移送,也可能在出现细微角度变化的情况下被移送。如果在这种状态下不进行补正直接焊接于框架上会生产出劣质的掩模框架组件,而无法使用。以往的方式,如果出现如上所述θ角度时,会把掩模带调回到初始位置并重新进行移送,这样的作业不仅会由增加繁杂的工艺数、增加消耗时间的缺点,还无法保障θ角度正确地进行校正。为了解决这样的问题,本发明具备了在对应位置上可以实施补正作业的校正设备。That is, even if the mask tape being held and transferred by the frame short side (Y axis) movable jig 4a or the frame long side (X axis) movable jig 4b is transferred by a precise linear servo motor, slight angle changes may occur. case was transferred. If it is directly welded to the frame without correction in this state, a poor-quality mask frame assembly will be produced and cannot be used. In the past method, if the above-mentioned θ angle occurs, the mask tape will be adjusted back to the initial position and transferred again. Such an operation will not only increase the number of complicated processes and increase time-consuming shortcomings, but also cannot guarantee θ The angle is corrected correctly. In order to solve such a problem, the present invention provides a calibration device that can perform correction work at a corresponding position.

可以替代θ角度调节电机11,可以使用被动式千分尺,但使用θ角度调节电机11可以进行精密控制。这种电机优选使用如伺服电机或步进电机等精密控制电机。Instead of the θ angle adjustment motor 11, a passive micrometer can be used, but fine control can be performed using the θ angle adjustment motor 11. Such motors preferably use precision-controlled motors such as servo motors or stepper motors.

具体地说,本发明为了补正θ角度,以设置在框架短边(Y轴)移动型夹具4a或框架长边(X轴)移动型夹具4b下部的θ轴铰链10为中心,设置θ角度调节电机11以及θ轴调节缓冲设备12,所述θ角度调节电机11旋转设置把持气缸42a、42b及气缸41a、41b的部分;与θ角度调节电机11对置的方向设置θ轴调节缓冲设备12,在另一方向支持,因与所述θ角度调节电机11的旋转而前进的连杆111的接触而旋转的把持气缸42a、42b及气缸41a、41b部。Specifically, in order to correct the θ angle, the present invention sets the θ angle adjustment centered on the θ axis hinge 10 arranged at the lower part of the frame short side (Y axis) movable fixture 4a or the frame long side (X axis) movable fixture 4b. Motor 11 and θ axis adjustment buffer device 12, described θ angle adjustment motor 11 is rotated and set to hold the part of cylinder 42a, 42b and cylinder 41a, 41b; The direction opposite to θ angle adjustment motor 11 is provided with θ axis adjustment buffer device 12, The holding cylinders 42a, 42b and cylinders 41a, 41b that rotate due to contact with the link 111 advanced by the rotation of the θ angle adjustment motor 11 are supported in the other direction.

根据所述θ角度调节电机11的细微旋转带动连杆前进而造成的θ角,会被位于后方的拉杆式或螺杆式θ轴固定设备13固定为所调整的θ角。According to the slight rotation of the θ angle adjustment motor 11, the θ angle caused by the forward movement of the connecting rod will be fixed to the adjusted θ angle by the rod-type or screw-type θ-axis fixing device 13 located at the rear.

在所述框架短边(Y轴)移动型夹具4a或框架长边(X轴)移动型夹具4b下部具备移动型夹具Up/Down电机14,利用其进行反复的Up/Down来测量位置的反复程度。即,框架及玻璃基体上下拉动设备6上设置指示器(Indicator-未图示)后,以20mm反复移动框架短边(Y轴)移动型夹具4a或框架长边(X轴)移动型夹具4b来测量位置。测量次数为各夹具(Gripper)20次左右,使其达到10um以下。A movable fixture Up/Down motor 14 is provided at the lower part of the frame short side (Y-axis) movable fixture 4a or the frame long side (X-axis) movable fixture 4b, and the repeated Up/Down is used to measure the repetition of the position degree. That is, after setting the indicator (Indicator-not shown) on the device 6 for pulling the frame and the glass substrate up and down, move the movable jig 4a on the short side of the frame (Y axis) or the movable jig 4b on the long side of the frame (X axis) repeatedly by 20 mm to measure the position. The number of measurements is about 20 times for each gripper (Gripper) to make it less than 10um.

所述框架及玻璃基体上下拉动设备6是通过多个气缸进行升降的构成,具备支持框架及玻璃基体的夹具等,如上构成为一般的上下拉动设备的构成,具有通常知识的技术人员可以通过图面简单地进行实施,因此省略仔细的说明。The frame and the glass substrate up and down pulling device 6 are liftable by a plurality of air cylinders, equipped with clamps for supporting the frame and the glass substrate, etc., as above, constituted as a general up and down pulling device. Since the implementation is simple, a detailed description is omitted.

所述掩模带装载设备7是通过多个气缸进行升降的构成,具备支持掩模带的夹具等,如上构成为一般的装载设备的构成,具有通常知识的技术人员可以通过图面简单地进行实施,因此省略仔细的说明。The mask tape loading device 7 is configured to be lifted and lowered by a plurality of air cylinders, and is equipped with jigs for supporting the mask tape, etc., and is configured as a general loading device as described above, and technicians with common knowledge can easily carry out the process through the drawings. implementation, so a detailed description is omitted.

所述影像及激光焊接设备8;与移动所述影像及激光焊接设备的影像及激光焊接设备移送用直线伺服电机(Liner servo motor,9)的构成为通常的构成,具有通常知识的技术人员可以通过图面简单地进行实施,因此省略仔细的说明。The image and laser welding equipment 8; the image and laser welding equipment that moves the image and the laser welding equipment are transferred with a linear servo motor (Liner servo motor, 9) is a common configuration, and a technician with common knowledge can Since the implementation is simple with reference to the drawings, a detailed description is omitted.

根据如上所述掩模框架组件的制作设备,为了制作白光OLED面板的掩模框架组件的制作方法,根据图10进行阶段性说明如下,由According to the manufacturing equipment of the above-mentioned mask frame assembly, in order to manufacture the method of manufacturing the mask frame assembly of the white light OLED panel, the step-by-step description is as follows according to FIG. 10 , by

(A)为了确定掩模带的附着位置,而进行玻璃基体定位的阶段S100;(A) In order to determine the attachment position of the mask tape, the stage S100 of positioning the glass substrate;

(B)为了通过焊接掩模带进行固定,而进行框架载入的阶段S200;(B) Stage S200 of frame loading for fixing by solder mask tape;

(C)将掩模带的两端在框架短边(Y轴)移动型夹具或框架长边(X轴)移动型夹具进行把持的阶段S300;(C) Stage S300 of holding both ends of the mask tape on the short side of the frame (Y-axis) movable jig or the long side of the frame (X-axis) movable jig;

(D)将两端的框架短边(Y轴)移动型夹具沿框架短边方向或框架长边(Z轴)移动型夹具沿框架长边方向移动到焊接点后,施加张力在玻璃基体上形成的掩模带显示部进行对齐的阶段S400;(D) After moving the short side (Y axis) movable fixtures of both ends of the frame along the short side of the frame or the long side (Z axis) of the frame to the welding point along the long side of the frame, tension is applied to form on the glass substrate. The stage S400 of aligning the display portion of the mask tape;

(E)为了防止与玻璃基体显示部维持对齐的掩模带的弯曲,利用框架短边(Y轴)移动型夹具或长边(X)移动型夹具上具备的θ角度调节电机调节θ角度的阶段S500;(E) In order to prevent the bending of the mask tape which maintains alignment with the glass substrate display part, the θ angle is adjusted by the θ angle adjustment motor provided on the short side (Y axis) movable jig or the long side (X) movable jig of the frame stage S500;

(F)将确定位置及调节完θ角度的掩模带的两端焊接于框架上的阶段S600;(F) The stage S600 of welding the two ends of the mask tape whose position has been determined and the θ angle has been adjusted to the frame;

(G)根据需要设置在框架的短边(Y轴)或长边(X轴)上的掩模带数,重复(C)阶段到(F)阶段的阶段S700构成。(G) According to the number of mask strips set on the short side (Y-axis) or long side (X-axis) of the frame, the configuration of stage S700 is repeated from stage (C) to stage (F).

所述(F)或(G)阶段中,利用框架长边(X轴)移动型夹具确定位置及调节完θ角度的掩模带的两端焊接于框架上后,在框架短边上焊接与已设置的掩模带交叉部的阶段。In the (F) or (G) stage, after the two ends of the mask strip whose position is determined by the movable fixture on the long side of the frame (X axis) and the angle θ has been adjusted are welded to the frame, the short side of the frame is welded to the The stage where the mask strips have been set to intersect.

所述框架的短边及长边上的焊接顺序以从内侧到外侧的方向进行焊接。The welding sequence on the short side and the long side of the frame is from the inner side to the outer side.

所述以框架短边方向焊接的多个掩模带中,两侧的掩模带与长边框架全面接触并焊接;所述以框架长边方向焊接的多个掩模带中,两侧的掩模带与短边框架全面接触并焊接。Among the plurality of mask strips welded in the direction of the short side of the frame, the mask strips on both sides are in full contact with the long side frame and welded; among the plurality of mask strips welded in the direction of the long side of the frame, the mask strips on both sides The masking tape is in full contact with the short side frame and welded.

本发明不限定于上述特定的优选实施例,本发明所属技术领域的普通技术人员应当理解,在不脱离权利要求书范围内所要求的本发明的要旨情况下,可以从中实现多种变形实施,如上变更是在权利要求范围记载的范围内。The present invention is not limited to the specific preferred embodiments described above, and those of ordinary skill in the art to which the present invention belongs should understand that without departing from the gist of the present invention required within the scope of the claims, various variants can be implemented therefrom, Such modifications are within the scope described in the claims.

Claims (9)

1. the manufacture method of a mask frame, it is used for white light OLED and does organic deposit and the encapsulation that technique is made the white light OLED panel with tv mechanism, it is characterized in that, comprising:
(A) in order to determine the attachment position of mask band, and carry out the stage of glass basis location;
(B) in order to fix by the solder mask band, and carry out the stage that framework is written into;
(C) stage that limit (X-axis) mobile model anchor clamps are controlled is grown at framework minor face (Y-axis) mobile model anchor clamps or framework in the two ends of mask band;
(D) framework minor face (Y-axis) the mobile model anchor clamps at two ends are moved to pad along framework short side direction or the long limit (Z axis) of framework mobile model anchor clamps along the framework long side direction after, apply the stage that mask band display part that tension force forms at glass basis aligns;
(E) in order to prevent from keeping with the glass basis display part bending of the mask band that aligns, utilize the θ angular adjustment motor that possesses on framework minor face mobile model anchor clamps or long limit (X-axis) the mobile model anchor clamps to regulate the stage of θ angle;
(F) will determine that position and the two ends of having regulated the mask band of θ angle are welded in the stage on the framework;
(G) repeat the stage in (C) stage to (F) stage, so that need to be arranged on the minor face (Y-axis) of framework or the mask band number on the long limit (X-axis).
2. the manufacture method of mask frame according to claim 1 is characterized in that,
Described (F) or (G) in the stage, after the two ends that utilize the long limit (X-axis) of framework mobile model anchor clamps to determine the position and regulated the mask band of θ angle are welded on the framework, consist of in the stage of framework minor face welding with the mask band cross part that has arranged.
3. the manufacture method of mask frame according to claim 1 is characterized in that,
Described welding sequence is for connecing the mask band in the long side weld of framework more first behind framework minor face solder mask band.
4. the manufacture method of mask frame according to claim 1 is characterized in that,
Welding sequence on the minor face of described framework and the long limit can be welded with the direction from the inboard to the outside.
5. the manufacture method of mask frame according to claim 1 is characterized in that,
In described a plurality of mask bands with the welding of framework short side direction, the mask band of both sides and the comprehensive engagement of long margin frame frame and welding;
In described a plurality of mask bands with the welding of framework long side direction, the mask band of both sides and the comprehensive engagement of minor face framework and welding.
6. the making apparatus of a mask frame, it is used for, and white light OLED is made technique with tv mechanism in order to make organic deposit and the encapsulation of white light OLED panel, this equipment is made of with camera apparatus, equipment that mask is welded in framework the aligned in position of framework and mask supply arrangement, framework charging appliance, glass basis supply and charging appliance, mask supply arrangement, mask and glass basis, it is characterized in that, comprising:
A pair of opposed framework minor face (Y-axis) mobile model anchor clamps are controlled the two ends of mask band, can be in the situation that apply tension force and move along the framework short side direction;
The long limit (X-axis) of a pair of opposed framework mobile model anchor clamps are controlled the two ends of mask band, can be in the situation that apply tension force and move along the framework long side direction.
7. the making apparatus of mask frame according to claim 6 is characterized in that, the formation of the long limit (X-axis) of described framework minor face (Y-axis) mobile model anchor clamps and framework mobile model anchor clamps more comprises:
θ angular adjustment motor is regulated the mask band θ angle that is transplanted on;
The θ axle is regulated buffer device, in the other direction support, controls cylinder and cylinder section because of what contacting of the connecting rod that advances with the rotation of described θ angular adjustment motor rotated.
White light OLED according to claim 6 with tv mechanism do in the technique for the organic deposit of making the white light OLED panel and encapsulation with the making apparatus of mask frame, it is characterized in that,
The long limit (X-axis) of described framework minor face (Y-axis) mobile model anchor clamps and framework mobile model anchor clamps are installed on and carry out accurate reciprocating motion on the linear servo-actuator (Liner servo motor).
9. a white light OLED of being made by the mask frame man assembly making method of any one in the described claim 1 to 5 is made organic deposit and encapsulation mask frame in order to make the white light OLED panel in the technique with tv mechanism, it is characterized in that, comprising:
Form peripheral framework;
More than one mask band welds setting across the inner space at long limit and the minor face of described framework;
The mask band is with long limit and minor face comprehensive engagement and the welding of described framework;
A plurality of white light OLEDs deposition grooves by the minor face of described framework or grow the mask band that welds on the limit, are formed at the inner space.
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