CN102879900A - Zoom micro lens based on piezoelectric inverse effect - Google Patents
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- CN102879900A CN102879900A CN2012103330837A CN201210333083A CN102879900A CN 102879900 A CN102879900 A CN 102879900A CN 2012103330837 A CN2012103330837 A CN 2012103330837A CN 201210333083 A CN201210333083 A CN 201210333083A CN 102879900 A CN102879900 A CN 102879900A
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- 239000010409 thin film Substances 0.000 claims abstract 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 4
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- 239000005304 optical glass Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 3
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Abstract
The invention relates to a zoom micro lens based on a piezoelectric inverse effect, belonging to the technical field of optical components. The zoom micro lens comprises a first glass sheet, a piezoelectric ceramic ring and a second glass sheet, wherein a circular hole is formed in the center of the second glass sheet, and an organic thin film is covered on the second glass sheet; the piezoelectric ceramic ring is clamped between the first glass sheet and the second glass sheet; and transparent liquid is filled in an inner space formed by the sealing of the first glass sheet, the piezoelectric ceramic ring and the second glass sheet. The stretching and the shrinkage are caused to piezoelectric ceramic under the action of an electric field by feeding voltage to the piezoelectric ceramic by virtue of the piezoelectric inverse effect, so that the surface shape of the micro lens is driven to change and the regulate function of the focal length of the micro lens is realized. A focal-length-adjustable micro lens provided by the invention has multiple superiorities such as simple structure, simplicity and convenience in design and process production, easiness in realizing of array structure, fast regulation and control speeds, large regulation and control ranges and the like, and has wide application foregrounds in micro-optic systems and micro-optic electromechanical systems.
Description
Technical field
The invention belongs to the optical component technical field, relate to lenticule, especially the variable lenticule of focal length.
Background technology
Lenticular design, making and application thereof are one of important contents of information optics area research.Compare with the body lens, lenticule have volume little, lightweight, be convenient to array and the advantage such as integrated, show in optical communication, photometry calculation, optical interconnection, photoelectronic detecting array, imaging, beam-shaping and control, light display, the numerous areas such as sensing is widely used, and application constantly enlarges, and plays the irreplaceable effect of traditional optical element.In recent years, lenticular research and development is rapid, but designed, as to make lenticule and array thereof, and the micro-optical systems that is consisted of by these elements, usually belong to " static state " element or system, in a single day the design and fabrication that is these elements is finished, and optical property and the function of its element or the micro-optical systems that is made of these elements are just fully definite, can not regulate and control.Along with the self-growth of micro-optic and the promotion of the market demand, the adjustable lenticule of optical property or begun to cause people's concern and attention by the system that it consists of, this new-type element obviously is different from " static state " micro optical element, study the novel micro optical element of this class and can not only expand research range and the application of micro-optic, enrich simultaneously, developed the micro-optic Research connotation.
In recent years, the zoom lenticule has caused people's extensive concern and attention, and this novel optical element has widely potential application at aspects such as imaging, Beam Control and shaping, microfluid sensing, adaptive optics, Biomedical Photonicses.The zoom lenticule refers to add can regulate and control physical quantity (such as power, heat, electricity etc.) and change lenticular shape or index distribution by applying one or more, thereby realizes the corresponding change of its optical property.Its concrete control methods have multiple, and the actual physics effect that produces by regulation process mainly is divided into two large class, i.e. surface configuration regulate and control method and refractive index regulate and control methods.For the surface configuration regulate and control method, usually adopt liquid as the lenticule agent structure, utilize the effects such as pressure, wetting, the thermal deformation of electricity to change lenticular surface curvature, realize the regulation and control to its focal length.The adjustable lenticule of liquid-type has the characteristics such as zooming range is large, numerical aperture is large usually, but has simultaneously following shortcoming: 1) the regulation and control response speed is slow, can not realize quick regulation and control; 2) its control module complex structure, volume are large, are difficult to use in designing and making array type structure.And for the refractive index regulate and control method, change the refractive index of lens by adopting the effects such as electric light, hot light, realize the regulation and control of lenticule focusing performance.Adjustable liquid crystal microlens is one of Typical Representative in this type, have that response speed is relatively very fast, the machinery-free motion, without plurality of advantages such as surface deformation, good stabilities, but its focal length modification scope is less and usually have shortcomings such as polarization dependence, light loss are large.
Summary of the invention
The purpose of this invention is to provide a kind of zoom lenticule based on the piezoelectric inverse effect, by to the piezoelectric ceramics supplying voltage, it is flexible that its piezoelectric ceramics is occured under electric field action, changes thereby drive lenticule face shape, finally realizes the adjusting function of lenticule focal length.This lenticule has that regulation and control speed is fast, modification scope is large, simple in structure, technique is simple for production, be easy to realize the characteristics such as array structure.
Technical solution of the present invention is as follows:
Based on the zoom lenticule of piezoelectric inverse effect, its structure comprises the first glass sheet 1, piezoelectric ceramic ring 2, the second glass sheet 4 as shown in Figure 1; Described the second glass sheet 4 centers have a circular port, the transparent organic film 5 of the surface coverage of the second glass sheet 4; Described piezoelectric ceramic ring 2 is sandwiched between the first glass sheet 1 and the second glass sheet 4, and piezoelectric ceramic ring 2 keeps concentric with the center hole of the second glass sheet 4; Transparency liquid 3 is filled in the inner space that the first glass sheet 1, piezoelectric ceramic ring 2 and 4 sealings of the second glass sheet form.
In the technique scheme:
1, the first glass sheet 1 and the second glass sheet 4 can adopt optical glass.
2, organic film 5 can adopt the dimethyl silicone polymer film.
3, organic film 5 is convex, spill or planar structure at the original shape at the second glass sheet 4 center hole places.
4, transparency liquid 3 can adopt glycerine or other transparency liquid.
5, each parts of zoom lenticule can adopt the uv curable polymers encapsulation.
Principle of work of the present invention can be described as:
Adopt the lenticular piezoelectric ceramic ring 2 of control 6 pairs of above-mentioned zooms of power supply to present control voltage.Because piezoelectric inverse effect, make piezoelectric ceramic ring 2 that telescopic shape change occur, this will cause the pressure of transparency liquid 3 each position of inner encapsulation to change, its pressure is in transparency liquid 3 interior transmission, because transparency liquid 3 can not be compressed, thereby deformation occurs in the transparent organic film 5 that causes the second glass sheet 4 circular hole positions, and namely corresponding change occurs its radius-of-curvature.When the monochromatic plane glistening light of waves from bottom to top incides on these lens, in the second glass sheet 4 circular hole positions by the lenticular focal length that transparent organic film 5 and transparency liquid 3 consist of be:
Wherein r represents lenticular radius-of-curvature, and n represents lenticular refractive index.Because change has occured lenticular radius-of-curvature in the regulation process, respective change also will occur in its focal position, thereby realize the regulation and control of lenticule focal length.
The invention has the beneficial effects as follows:
Zoom lenticule based on the piezoelectric inverse effect provided by the invention, have simple in structure, design and craft is simple for production, regulation and control speed is fast, modification scope is large, be easy to realize the many advantages such as array structure, its micro-optical is unified and is had wide application prospects in the Micro-Opto-Electro-Mechanical Systems.
Description of drawings
Fig. 1 is the zoom lenticule cross-sectional view based on the piezoelectric inverse effect provided by the invention.
Fig. 2 is the vertical view based on piezoelectric ceramic ring 2 in the zoom lenticule of piezoelectric inverse effect provided by the invention.
Fig. 3 is the vertical view based on the second glass sheet 4 in the zoom lenticule of piezoelectric inverse effect provided by the invention.
Fig. 4 is that the zoom lenticule based on the piezoelectric inverse effect provided by the invention uses structural representation.
Fig. 5 is that the lenticular focal length of the zoom based on the piezoelectric inverse effect provided by the invention is with the change curve (horizontal ordinate represents voltage, and unit is volt, and ordinate represents focal length, and unit is micron) of control voltage.
Embodiment
Based on the zoom lenticule of piezoelectric inverse effect, its structure comprises the first glass sheet 1, piezoelectric ceramic ring 2, the second glass sheet 4 as shown in Figure 1; Described the second glass sheet 4 centers have a circular port, the transparent organic film 5 of the surface coverage of the second glass sheet 4; Described piezoelectric ceramic ring 2 is sandwiched between the first glass sheet 1 and the second glass sheet 4, and piezoelectric ceramic ring 2 keeps concentric with the center hole of the second glass sheet 4; Transparency liquid 3 is filled in the inner space that the first glass sheet 1, piezoelectric ceramic ring 2 and 4 sealings of the second glass sheet form.
For technique scheme, the from bottom to top incident of monochromatic plane wave.When piezoelectric ceramic ring 2 did not apply control voltage, the height of establishing its interior cylindrical chamber was H
0, radius is R; When applying voltage and be U, the height of establishing cylindrical cavity becomes H, and at this moment piezoelectric ceramic ring internal cavity volume change is Δ V=π R
2(H-H
0).Here it is pointed out that piezoelectric ceramic ring shrinks under positive field drives, and under reversed electric field drives, stretch.Because transparency liquid is incompressible in the chamber, based on the strong transfer law of liquid internal pressure, the lenticule face shape with the second glass sheet 4 surfaces of central round orifice will change, and the height of establishing lenticule variation front and back is respectively h
0And h, lenticular bottom surface diameter is D, then its volume change is:
Clearly, the decrease of piezoelectric ceramic ring internal cavity volume should equal the recruitment of lenticule volume, or the recruitment of piezoelectric ceramic ring internal cavity volume should equal the decrease of lenticule volume, i.e. Δ V+ Δ V'=0.So the variation according to piezoelectric ceramics annular chamber height utilizes formula Δ V+ Δ V ＇=0, then can obtain easily the height h after the lenticule volume change.Then utilize formula r=(4h
2+ D
2)/(8h) then can obtain lenticular radius-of-curvature, utilizes at last f=r/ (n-1), then can obtain its focal length.In addition, in experimentation, also can directly test the lenticule focal length with the Changing Pattern of regulation and control voltage.
Below in conjunction with accompanying drawing, by example is carried out numerical evaluation the present invention is described.If the high H in piezoelectric ceramic ring interior cylindrical chamber
0For 6mm, radius R are 5mm, be 0.01 μ m/V at stretching and the contraction coefficient of positive field and reversed electric field lower piezoelectric pottery ring cavity.The variation range of control voltage is-100～100V, and lenticular bottom surface diameter D is 1000 μ m, lenticular elemental height h
0Be 5 μ m.By calculating, lenticular focal length variations as shown in Figure 5.When voltage was elevated to 100V gradually from 0V, piezoelectric ceramic ring 2 caused the lenticule height to increase because the piezoelectric inverse effect shrinks, and radius-of-curvature reduces, so that its focal length reduces; And when voltage from 0V change to gradually-during 2.5V, piezoelectric ceramic ring 2 extends because of the piezoelectric inverse effect, its lenticule height is reduced to 0 gradually, and radius-of-curvature is increased to positive infinity gradually, thereby its focal length also is increased to positive infinity (among the figure for drawing) gradually; When voltage from-2.5V change to gradually-during 100V, at this moment lenticule becomes concave, is negative lens, its concave surface degree of depth increases gradually, thereby its focal length is raise gradually by minus infinity.As seen from the figure, its focusing range is very large, be-∞～-1.6mm ,+∞～+ 1.6mm, thus realize lenticular positive and minus focal regulation and control.
The below describes the lenticular main preparation technology of zoom provided by the invention.The lenticular preparation technology of zoom provided by the invention comprises three aspects: (1) has the making of the glass sheet of circular port: adopt laser cutting technique directly to produce circular port at glass sheet, its size and shape can accurately meet design requirement; The transparent organic film on (2) second glass sheet 4 surfaces: several photoresists instil in the glass sheet circular hole position that has prepared first, the glass sheet circular hole is filled, then carry out front baking, then the film forming monomer (liquid) at the transparent organic film of glass sheet coating also solidifies, simultaneously photoresist in the circular hole is exposed, develops, thereby remove photoresist, at last the transparent organic film on the glass sheet is carried out oxygen and process to strengthen transparent organic film at the adhesion of glass surface; (3) piezoelectric ceramic ring 2: existing matured product, can directly buy; (4) encapsulation of described each assembly of elements: adopt uv curable polymers with the unit adhering components, and carry out ultra-violet curing, thereby finish the encapsulation of device.
Scheme proposed by the invention is a kind of zoom lenticule based on the piezoelectric inverse effect, it have simple in structure, be easy to make, be easy to realize array structure, regulation and control speed is fast, modification scope large and regulate and control the various features such as easy.The lenticule implementation of varifocal provided by the present invention has wide application prospects in micro-optical is unified Micro-Opto-Electro-Mechanical Systems (MOEMS).
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| CN2012103330837A CN102879900A (en) | 2012-09-11 | 2012-09-11 | Zoom micro lens based on piezoelectric inverse effect |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106210466A (en) * | 2016-06-30 | 2016-12-07 | 联想(北京)有限公司 | Electronic equipment and photographic head thereof |
| CN107783207A (en) * | 2017-11-27 | 2018-03-09 | 成都信息工程大学 | A kind of adjustable focus microlens array |
| CN108037550A (en) * | 2017-11-24 | 2018-05-15 | 西安交通大学 | A kind of reversion of low voltage drive becomes focus microlens |
| CN109917555A (en) * | 2019-04-02 | 2019-06-21 | 仰恩大学 | A microlens array device that can realize 2D/3D conversion of integrated imaging |
| CN110308551A (en) * | 2019-08-02 | 2019-10-08 | 南京邮电大学 | An Electrically Controllable Liquid Optical Phase Modulator |
| CN110764250A (en) * | 2019-11-19 | 2020-02-07 | 宁波大学 | Zoom lens based on piezoelectric ceramic tube driving |
| CN110998374A (en) * | 2017-06-30 | 2020-04-10 | 珀莱特股份有限公司 | Adaptive lens |
| CN111399213A (en) * | 2020-03-30 | 2020-07-10 | 北京理工大学 | Dual-drive optical beam deflector based on dielectric elastomer and liquid |
| CN112601017A (en) * | 2020-12-10 | 2021-04-02 | 郑州润德光电科技有限公司 | Video detection device |
| CN113467072A (en) * | 2020-03-31 | 2021-10-01 | 中光电智能感测股份有限公司 | Variable focal length optical element |
| CN113885110A (en) * | 2021-09-30 | 2022-01-04 | 珠海格力电器股份有限公司 | Liquid lens, electronic equipment and zooming method of liquid lens |
| CN114325896A (en) * | 2022-01-10 | 2022-04-12 | 西安交通大学 | Zoom lens with radial telescopic-arch amplifying structure and working method thereof |
| CN114859443A (en) * | 2022-04-24 | 2022-08-05 | 武汉大学 | Liquid adjustable micro-lens array based on acoustics and microfluidic technology |
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| WO2008024071A1 (en) * | 2006-08-24 | 2008-02-28 | Agency For Science, Technology And Research | Variable focus zoom lenses |
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| US20100276492A1 (en) * | 2009-04-29 | 2010-11-04 | Hand Held Products, Inc. | Focusing apparatus and terminal comprising variable focus lens assembly |
| CN101950078A (en) * | 2010-09-07 | 2011-01-19 | 华中科技大学 | Varifocal double-liquid lens based on inverse piezoelectric effect |
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2012
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| CN101099095A (en) * | 2004-12-16 | 2008-01-02 | Arc工程学院 | Process for the preparation of plastic material membrane devices and devices obtained therefrom |
| WO2008024071A1 (en) * | 2006-08-24 | 2008-02-28 | Agency For Science, Technology And Research | Variable focus zoom lenses |
| CN101600976A (en) * | 2006-10-11 | 2009-12-09 | 珀莱特公司 | Compact adjustable lens design |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106210466A (en) * | 2016-06-30 | 2016-12-07 | 联想(北京)有限公司 | Electronic equipment and photographic head thereof |
| CN110998374A (en) * | 2017-06-30 | 2020-04-10 | 珀莱特股份有限公司 | Adaptive lens |
| CN108037550A (en) * | 2017-11-24 | 2018-05-15 | 西安交通大学 | A kind of reversion of low voltage drive becomes focus microlens |
| CN108037550B (en) * | 2017-11-24 | 2019-07-02 | 西安交通大学 | A low-voltage driven inversion zoom microlens |
| CN107783207A (en) * | 2017-11-27 | 2018-03-09 | 成都信息工程大学 | A kind of adjustable focus microlens array |
| CN109917555A (en) * | 2019-04-02 | 2019-06-21 | 仰恩大学 | A microlens array device that can realize 2D/3D conversion of integrated imaging |
| CN110308551B (en) * | 2019-08-02 | 2021-03-02 | 南京邮电大学 | Electrically controlled liquid optical phase modulator |
| CN110308551A (en) * | 2019-08-02 | 2019-10-08 | 南京邮电大学 | An Electrically Controllable Liquid Optical Phase Modulator |
| CN110764250A (en) * | 2019-11-19 | 2020-02-07 | 宁波大学 | Zoom lens based on piezoelectric ceramic tube driving |
| CN111399213A (en) * | 2020-03-30 | 2020-07-10 | 北京理工大学 | Dual-drive optical beam deflector based on dielectric elastomer and liquid |
| CN113467072A (en) * | 2020-03-31 | 2021-10-01 | 中光电智能感测股份有限公司 | Variable focal length optical element |
| CN112601017A (en) * | 2020-12-10 | 2021-04-02 | 郑州润德光电科技有限公司 | Video detection device |
| CN113885110A (en) * | 2021-09-30 | 2022-01-04 | 珠海格力电器股份有限公司 | Liquid lens, electronic equipment and zooming method of liquid lens |
| CN114325896A (en) * | 2022-01-10 | 2022-04-12 | 西安交通大学 | Zoom lens with radial telescopic-arch amplifying structure and working method thereof |
| CN114859443A (en) * | 2022-04-24 | 2022-08-05 | 武汉大学 | Liquid adjustable micro-lens array based on acoustics and microfluidic technology |
| CN114859443B (en) * | 2022-04-24 | 2024-02-06 | 武汉大学 | Liquid-tunable microlens array based on acoustics and microfluidic technology |
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Application publication date: 20130116 |