CN102832535A - Solid-state 698nm deep red laser device with blue laser light-emitting diode (LED) pump - Google Patents
Solid-state 698nm deep red laser device with blue laser light-emitting diode (LED) pump Download PDFInfo
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技术领域 technical field
本发明涉及一种激光器,特别是涉及一种直接采用下转换机制的蓝光激光二极管泵浦698nm深红光固体激光器。The invention relates to a laser, in particular to a blue-light laser diode-pumped 698nm deep-red solid-state laser directly adopting a down-conversion mechanism.
背景技术 Background technique
深红光激光在激光显示、光学存储、激光医疗、光谱学等领域有着广泛应用。采用深红色激光作为激光显示的光源,能获得较大的显示色域,使显示图像更加饱满鲜艳。特别的,波长为698nm的窄线宽深红色激光可以作为锶原子钟的探测光源,对远距离遥控导航、宇宙常数测量有重要的意义。Deep red laser is widely used in laser display, optical storage, laser medical treatment, spectroscopy and other fields. Using deep red laser as the light source of laser display can obtain a larger display color gamut and make the display image more full and vivid. In particular, the narrow-linewidth deep red laser with a wavelength of 698nm can be used as a detection light source for strontium atomic clocks, which is of great significance for long-distance remote navigation and cosmological constant measurement.
然而,目前,工作在698nm的激光器报道很少。获得此波长附近的激光器的技术方法主要由以下几种:However, currently, there are few reports on lasers working at 698nm. The technical methods to obtain lasers near this wavelength are mainly as follows:
1.直接辐射红光的激光二极管。目前商用的已有很多工作在660-670nm的激光二极管,但直接辐射698nm深红激光的二极管未有报导。此类激光器通过控制半导体材料的组分(如InGaAsP)来控制波长,泵浦能量由外部电流注入提供,其优点是易于集成,缺点是输出激光线宽较宽,光束质量差。1. Laser diodes that emit red light directly. At present, there are many laser diodes working at 660-670nm in commercial use, but there are no reports on diodes that directly radiate 698nm deep red laser. This type of laser controls the wavelength by controlling the composition of the semiconductor material (such as InGaAsP). The pump energy is provided by external current injection. The advantage is that it is easy to integrate. The disadvantage is that the output laser linewidth is wide and the beam quality is poor.
2.利用可调谐激光技术。此类技术利用激光材料的宽带增益,附带精密的波长选择器件来选择某个波长的输出。如美国Newport公司生产了一种基于掺钛蓝宝石的宽带可调谐的连续输出激光器3900S,调谐范围为675~1100nm(见http://www.newport.com);德国Toptica公司亦生产了基于半导体的宽带可调谐激光器DL100(见http://www.toptica.com),其调谐范围包含632~1770nm。其中,前者采用闪光灯或者绿光激光器泵浦,后者采用电注入来泵浦。此类激光器使用的增益材料拥有宽带增益,再通过精密波长选择器件(如Littrow光栅)选择出某个波长的激光输出。拥有宽带增益的材料往往增益截面积较小,激光阈值较高;精密波长选择器件的使用引入插入损耗,降低了激光器的效率,同时对激光器的机械设计提出很高的要求,使得整体激光器结构复杂,成本高昂。2. Utilizes tunable laser technology. These techniques take advantage of the broadband gain of laser materials, with sophisticated wavelength-selective devices to select the output at a certain wavelength. For example, Newport Company of the United States produced a broadband tunable continuous output laser 3900S based on titanium-doped sapphire, with a tuning range of 675-1100nm (see http://www.newport.com); Germany Toptica Company also produced semiconductor-based Broadband tunable laser DL100 (see http://www.toptica.com), its tuning range includes 632 ~ 1770nm. Among them, the former is pumped by flash lamp or green laser, and the latter is pumped by electric injection. The gain material used in this type of laser has broadband gain, and then the laser output of a certain wavelength is selected by a precise wavelength selection device (such as Littrow grating). Materials with broadband gain tend to have smaller gain cross-sectional areas and higher laser thresholds; the use of precision wavelength selective devices introduces insertion loss, which reduces the efficiency of the laser, and at the same time puts forward high requirements on the mechanical design of the laser, making the overall laser structure complex , the cost is high.
3.利用固体激光器倍频技术。这是获得高光束质量的红色激光的最常用技术,经文献检索,目前仍未有工作于698nm的固体激光倍频激光器。此类最典型的技术是利用工作与800nm附近的半导体激光器泵浦掺钕增益介质(如Nd:YAG、Nd:YVO4、Nd:YLF、Nd:GdVO4等),先获得工作于1.3μm附近的红外激光,有时也利用可调谐技术将红外激光微调到所需波长。再利用倍频晶体(如KTP、LBO、PPLN等)将此激光倍频,从而获得红光激光。此类激光器是通过“红外半导体激光器泵浦掺钕介质,从而获得红外固体激光”+“红外固体激光倍频”两步实现的红光激光器,倍频技术引入了非线性过程,不仅对温度、角度等环境因素非常敏感,而且多出的一次频率转换大大限制了激光效率的提高;同时,激光器结构复杂,成本较高。3. Using solid-state laser frequency doubling technology. This is the most commonly used technology to obtain red laser with high beam quality. According to literature search, there is still no solid-state laser frequency-doubled laser working at 698nm. The most typical technology of this type is to use a semiconductor laser working near 800nm to pump neodymium-doped gain media (such as Nd:YAG, Nd:YVO 4 , Nd:YLF, Nd:GdVO 4 , etc.), first to obtain a working near 1.3μm Infrared lasers, sometimes using tunable technology to fine-tune the infrared laser to the desired wavelength. Then use frequency doubling crystals (such as KTP, LBO, PPLN, etc.) to double the laser frequency to obtain red laser light. This type of laser is a red laser achieved by two steps of "infrared semiconductor laser pumping neodymium-doped medium to obtain infrared solid laser" + "infrared solid laser frequency doubling". The frequency doubling technology introduces a nonlinear process, not only for temperature, Environmental factors such as angles are very sensitive, and the extra frequency conversion greatly limits the improvement of laser efficiency; at the same time, the structure of the laser is complex and the cost is high.
除以上技术外,利用掺镨增益介质,可获得直接下转换方式的红光激光。目前,激光二极管泵浦的掺镨激光器仅报道的红光输出波长有640nm、721nm、747nm、662nm(见参考文献1:F.Cornacchia,A.Di Lieto,M.Tonelli,A.Richter,E.Heumann,and G.Huber,“Efficientvisible laser emission of GaN laser diode pumped Pr-doped fluoride scheelite crystals,”Opt.Express 16,15932-15941(2007);参考文献2:M.Fibrich,H.Jelínková,J.K.Nejezchleb,andV.“Visible cw laser emission GaN-diode pumped Pr:YAlO3 crystal,”Appl.Phys.B 97,363-367(2009);参考文献3:M.Fibrich,H.Jelínková,J.K.Nejezchleb,and V.“Pr:YAlO3 micochip laser at 662nm,”Laser Phys.Lett.8,116-119(2011).)。然而,目前有关掺镨激光器的研究基本还停留在实验室阶段,且激光二极管泵浦的掺镨激光器实现的698nm红光激光器仍未见报道。汉堡大学激光物理研究所曾研制了此波长附近的染料激光器泵浦掺镨脉冲激光器(见参考文献4:T.Danger,T.Sandrock,E.Heumann,G.Huber,and B.Chai,“Pulsedlaser action of Pr:GdLiF4 at room temperature,”Appl.Phys.B 57,239-241(1993).),并对其有性能报道。但其激光器只能输出一个个的脉冲,不能实现连续稳定输出;并且采用染料激光器或者氩离子激光器泵浦,直接导致激光器体积复杂,依赖复杂的水冷装置,稳定性差,效率低下,且染料激光器寿命较低。In addition to the above technologies, the use of praseodymium-doped gain media can obtain red lasers in direct down-conversion mode. At present, the red light output wavelengths of praseodymium-doped lasers pumped by laser diodes are only reported to be 640nm, 721nm, 747nm, and 662nm (see reference 1: F. Cornacchia, A. Di Lieto, M. Tonelli, A. Richter, E. Heumann, and G. Huber, "Efficient visible laser emission of GaN laser diode pumped Pr-doped fluoride sceelite crystals," Opt. Express 16, 15932-15941 (2007); Reference 2: M. Fibrich, H. Jelínková, J. K. Nejezchleb, and V. "Visible cw laser emission GaN-diode pumped Pr:YAlO 3 crystal," Appl. Phys. B 97, 363-367 (2009); Reference 3: M. Fibrich, H. Jelínková, J. K. Nejezchleb, and V. "Pr:YAlO 3 micochip laser at 662nm," Laser Phys. Lett.8, 116-119(2011).). However, the current research on praseodymium-doped lasers is basically still in the laboratory stage, and the 698nm red laser realized by laser diode-pumped praseodymium-doped lasers has not been reported yet. The Institute of Laser Physics of the University of Hamburg has developed a dye laser pumped praseodymium-doped pulsed laser near this wavelength (see reference 4: T.Danger, T.Sandrock, E.Heumann, G.Huber, and B.Chai, "Pulsedlaser action of Pr:GdLiF 4 at room temperature,"Appl.Phys.B 57,239-241(1993).), and reports on its performance. However, its laser can only output pulses one by one, and cannot achieve continuous and stable output; and the use of dye lasers or argon ion lasers for pumping directly leads to complex volumes of lasers, relying on complex water cooling devices, poor stability, low efficiency, and lifespan of dye lasers lower.
发明内容 Contents of the invention
本发明的目的在于克服当前波长为698nm附近的激光器效率低、体积复杂、成本较高、光束质量欠佳等缺点,提供一种蓝光激光二极管泵浦698nm深红光固体激光器,该激光器利用直接下转换的方式获得698nm深红光激光,其结构紧凑、转换效率高,有很大的应用潜力。The object of the present invention is to overcome the disadvantages of low efficiency, complex volume, high cost, and poor beam quality of current lasers with a wavelength near 698nm, and provide a blue-light laser diode-pumped 698nm deep-red solid-state laser. The 698nm deep red laser is obtained by conversion, which has a compact structure and high conversion efficiency, and has great application potential.
本发明在一光路上依次设有半导体激光器、准直透镜、聚焦透镜、平面输入镜、激光介质和平凹输出镜,所述半导体激光器、准直透镜、聚焦透镜、平面输入镜、激光介质和平凹输出镜位于同一光轴,所述半导体激光器为中心波长为444nm的蓝光激光二极管,所述激光介质为掺镨氟化钇锂晶体(以下简称Pr:YLF);所述平面输入镜、激光介质和平凹输出镜构成平凹稳定腔结构。In the present invention, a semiconductor laser, a collimating lens, a focusing lens, a plane input mirror, a laser medium and a plano-concave output mirror are sequentially arranged on an optical path, and the semiconductor laser, a collimating lens, a focusing lens, a plane input mirror, a laser medium and a plano-concave output mirror are sequentially arranged. The output mirrors are located on the same optical axis, the semiconductor laser is a blue laser diode with a center wavelength of 444nm, and the laser medium is a praseodymium-doped yttrium lithium fluoride crystal (hereinafter referred to as Pr:YLF); the planar input mirror, laser medium and flat The concave output mirror constitutes a plano-concave stable cavity structure.
所述泵浦源泵浦掺镨氟化钇锂(Pr:YLF)晶体采用蓝光半导体激光器,所述半导体激光器为中心波长为444nm的蓝光激光二极管;所述平面输入镜镀制444nm高透过率及698nm高反射率(R>99.5)的介质膜,所述平凹输出镜镀制698nm部分透射(T<5%)的介质膜,并且2个介质膜保持在640nm和720nm足够高的透射率。The pumping source pumps praseodymium-doped yttrium lithium fluoride (Pr:YLF) crystal using a blue semiconductor laser, and the semiconductor laser is a blue laser diode with a center wavelength of 444nm; the plane input mirror is plated with a high transmittance of 444nm And 698nm high reflectance (R>99.5) dielectric film, the plano-concave output mirror is coated with 698nm partial transmission (T<5%) dielectric film, and the two dielectric films maintain sufficiently high transmittance at 640nm and 720nm .
本发明采用直接下转换机制获得红光激光,不采用任何倍频器件。采用蓝光半导体激光器作为泵浦源泵浦掺镨氟化钇锂(Pr:YLF)晶体,使镨离子完成基态到3P2能级的跃迁,接着镨离子从3P2能级弛豫到3P0能级,最终在3P0能级→3F3能级的直接下转换跃迁中获得698nm深红光激光。The present invention adopts the direct down-conversion mechanism to obtain the red laser light without any frequency doubling device. Using a blue semiconductor laser as the pump source to pump praseodymium-doped yttrium lithium fluoride (Pr:YLF) crystals, the praseodymium ions complete the transition from the ground state to the 3 P 2 energy level, and then the praseodymium ions relax from the 3 P 2 energy level to the 3 P 0 energy level, and finally obtain 698nm deep red laser in the direct down-conversion transition from 3 P 0 energy level → 3 F 3 energy level.
本发明通过上述的腔体膜系设计,在Pr:YLF晶体中首次实现了蓝光二极管泵浦的698nm深红光激光输出,单管泵浦条件下连续运转功率最高达156mW,这在掺镨激光器领域有重要的学术意义和应用价值。本发明的突出效果将在具体实施方式中加以说明。Through the above-mentioned cavity film system design, the present invention realizes the 698nm deep red laser output pumped by the blue light diode for the first time in the Pr:YLF crystal. The field has important academic significance and application value. The outstanding effects of the present invention will be described in the specific implementation manner.
附图说明 Description of drawings
图1为本发明实施例的结构示意图。Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
图2为本发明实施例的蓝光激光二极管泵浦698nm激光输出功率与吸收泵浦激光功率的关系曲线。对应平凹输出镜在698nm处的透射率为0.5%。FIG. 2 is a relationship curve between the output power of the blue laser diode pumped 698nm laser and the power of the absorbed pump laser according to an embodiment of the present invention. The transmittance corresponding to the plano-concave output mirror at 698nm is 0.5%.
图3为本发明实施例的蓝光激光二极管泵浦698nm激光输出功率与吸收泵浦激光功率的关系曲线。对应平凹输出镜在698nm处的透射率为0.9%。横坐标为吸收功率(mW),纵坐标为输出功率(mW)。FIG. 3 is a graph showing the relationship between the blue laser diode pumped 698nm laser output power and the absorbed pump laser power according to an embodiment of the present invention. The transmittance corresponding to the plano-concave output mirror at 698nm is 0.9%. The abscissa is the absorbed power (mW), and the ordinate is the output power (mW).
图4为本发明实施例698nm输出激光的光谱图。其中光谱分辨率为0.14nm。横坐标为波长λ(nm),纵坐标为光功率(dBm)。Fig. 4 is a spectrum diagram of the 698nm output laser according to the embodiment of the present invention. The spectral resolution is 0.14nm. The abscissa is the wavelength λ (nm), and the ordinate is the optical power (dBm).
图5为本发明实施例698nm输出激光的光谱图。其中光谱分辨率为0.01nm。横坐标为波长λ(nm),纵坐标为光功率(a.u)。Fig. 5 is a spectrum diagram of 698nm output laser according to the embodiment of the present invention. The spectral resolution is 0.01nm. The abscissa is the wavelength λ (nm), and the ordinate is the optical power (a.u).
具体实施方式 Detailed ways
本发明包含三个部分:泵浦光准直聚焦系统、晶体设计和谐振腔体设计。The invention includes three parts: pumping light collimation and focusing system, crystal design and resonant cavity design.
图1是本发明实施例的结构示意图。由图1可见,本发明的蓝光激光二极管泵浦698nm红光固体激光器,在一光路上依次由半导体激光器1、准直透镜2、聚焦透镜3、平面输入镜4、激光介质5、平凹输出镜6组成。半导体激光器1为中心波长为444nm的蓝光激光二极管,激光介质5采用Pr:YLF晶体。Fig. 1 is a schematic structural diagram of an embodiment of the present invention. As can be seen from Fig. 1, the blue-ray laser diode pumping 698nm red-light solid-state laser of the present invention is followed by a semiconductor laser 1, a
由于蓝光激光二极管发散角较大,须采用准直透镜对其准直,使其变成发散角较小的准平行光。之后,聚焦透镜将蓝光激光泵浦光束汇聚到晶体入射端面附近。采用焦距为50mm的平凸透镜作为聚焦透镜,在激光介质内形成的泵浦光斑半径约为60μm。进一步提高泵浦光光斑质量可通过在准直透镜后添加光束整形器件来实现。Due to the large divergence angle of the blue laser diode, a collimator lens must be used to collimate it so that it becomes a quasi-parallel light with a small divergence angle. Afterwards, the focusing lens converges the blue laser pump beam near the incident end face of the crystal. A plano-convex lens with a focal length of 50 mm is used as the focusing lens, and the pump spot radius formed in the laser medium is about 60 μm. Further improving the quality of the pump light spot can be achieved by adding a beam shaping device after the collimator lens.
为保证蓝光泵浦激光尽可能多的被Pr:YLF晶体吸收,晶体放置方向为晶体c轴方向与蓝光二极管输出激光的偏振方向平行。由于不采用倍频方式(即不使用对温度十分敏感的倍频晶体),且当前蓝光激光二极管单管功率不超过1.6W,激光晶体放置于铜制普通晶体座中,无需采用额外的制冷或控温装置。In order to ensure that the blue pumping laser light is absorbed by the Pr:YLF crystal as much as possible, the crystal is placed in a direction parallel to the c-axis direction of the crystal and the polarization direction of the blue light diode output laser. Since the frequency doubling method is not used (that is, the frequency doubling crystal that is very sensitive to temperature is not used), and the current single-tube power of the blue laser diode does not exceed 1.6W, the laser crystal is placed in a copper common crystal seat, and no additional cooling or cooling is required. Temperature control device.
对于谐振腔体,选取易调节的、易于实现模式匹配的、有大可控模体积的平凹稳定腔结构,由平面输入镜、Pr:YLF晶体和平凹输出镜构成。晶体的位置靠近平面输入镜,平面输入镜至平凹输出镜的距离接近于平凹输出镜的曲率半径,以期得到低的激光阈值和更高的输出功率。本发明的平面输入镜镀制444nm高透过率及698nm高反射率(R>99.5)的介质膜,作为激光器的输入腔镜;平凹输出镜镀制698nm部分透射(T<5%)的介质膜,作为激光器的输出腔镜。由于Pr:YLF激光采用蓝光激光二极管泵浦的方式在红光波段已经实现了640nm、720nm两个波长的激光激射,其中640nm谱线的增益最大,720nm谱线的增益次之,而698nm谱线的增益最小,且波长处于两个更强增益谱线中间。为了抑制这两条最近且增益更强的谱线,本发明采用特殊的膜系设计,使得输入镜和输出镜的透射率在640nm和720nm处要比698nm处大得多,导致它们的激光起振阈值比698nm大,这样,使得在谱线竞争中698nm谱线最先激射,产生激光,并抑制640nm和720nm这两条更强谱线产生激射。最终,得到稳定输出的698nm这一单一波长激光。For the resonant cavity, choose a plano-concave stable cavity structure that is easy to adjust, easy to achieve mode matching, and has a large controllable mode volume. It is composed of a planar input mirror, a Pr:YLF crystal, and a plano-concave output mirror. The position of the crystal is close to the planar input mirror, and the distance from the planar input mirror to the plano-concave output mirror is close to the curvature radius of the plano-concave output mirror, in order to obtain low laser threshold and higher output power. The planar input mirror of the present invention is coated with a dielectric film with high transmittance of 444nm and high reflectivity of 698nm (R>99.5) as the input cavity mirror of the laser; the plano-concave output mirror is coated with a 698nm partial transmission (T<5%) The dielectric film is used as the output cavity mirror of the laser. Since the Pr:YLF laser is pumped by a blue laser diode, it has achieved laser lasing at two wavelengths of 640nm and 720nm in the red light band, among which the gain of the 640nm spectral line is the largest, the gain of the 720nm spectral line is the second, and the gain of the 698nm spectral line is the largest. The gain of the line is the smallest, and the wavelength is in the middle of two stronger gain spectral lines. In order to suppress these two recent spectral lines with stronger gain, the present invention adopts a special film system design, so that the transmittance of the input mirror and the output mirror is much larger at 640nm and 720nm than at 698nm, causing their lasers to The vibration threshold is larger than 698nm, so that in the spectral line competition, the 698nm spectral line is first lased to generate laser light, and the two stronger spectral lines of 640nm and 720nm are suppressed to generate lasing. Finally, a single-wavelength laser with a stable output of 698nm was obtained.
图2、图3为698nm激光输出功率与吸收泵浦激光功率关系曲线,其中图2对应平凹输出镜在698nm处的透射率为0.5%,图3对应平凹输出镜在698nm处的透射率为0.9%。从图2可以看出,当输出耦合镜透射率为0.5%时,该激光器的阈值为47mW,斜效率为26.9%,吸收泵浦激光功率约为500mW时对应的输出功率为115mW,光光转换效率为22.9%。由图3可以看出,当输出耦合镜透射率为0.9%时,该激光器的阈值为139mW,斜效率为48.7%,吸收泵浦激光功率约为500mW时对应的输出功率为156mW,光光转换效率为31.0%。Figure 2 and Figure 3 are the relationship curves between the 698nm laser output power and the absorption pump laser power, where Figure 2 corresponds to the transmittance of the plano-concave output mirror at 698nm at 0.5%, and Figure 3 corresponds to the transmittance of the plano-concave output mirror at 698nm 0.9%. It can be seen from Figure 2 that when the transmittance of the output coupling mirror is 0.5%, the threshold value of the laser is 47mW, the slope efficiency is 26.9%, and the corresponding output power is 115mW when the absorbed pump laser power is about 500mW. The efficiency is 22.9%. It can be seen from Figure 3 that when the transmittance of the output coupling mirror is 0.9%, the threshold value of the laser is 139mW, the slope efficiency is 48.7%, and the corresponding output power is 156mW when the absorbed pump laser power is about 500mW. The efficiency is 31.0%.
图4为利用光谱分析仪测量的698nm激光光谱,测量分辨率为0.14nm,可见激光器只输出698nm谱线跃迁的激光,而附近的640nm、720nm谱线都被良好抑制,没有起振。当光谱分析仪的分辨率为0.01nm时,测得的激光光谱如图5所示,可见激光光谱由多个峰构成,这是激光器的多纵模光谱。相邻峰值处的波长间隔经测量均为0.03nm,此值是由激光晶体参数决定的。Figure 4 shows the 698nm laser spectrum measured by a spectrum analyzer with a measurement resolution of 0.14nm. It can be seen that the laser only outputs the laser with the transition of the 698nm spectral line, while the nearby 640nm and 720nm spectral lines are well suppressed and there is no vibration. When the resolution of the spectrum analyzer is 0.01nm, the measured laser spectrum is shown in Figure 5. The visible laser spectrum consists of multiple peaks, which is the multi-longitudinal mode spectrum of the laser. The wavelength interval between adjacent peaks is measured to be 0.03nm, which is determined by the laser crystal parameters.
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| CN103199425A (en) * | 2013-04-08 | 2013-07-10 | 青岛大学 | All-solid-state visible light passive mode-locked laser |
| CN103779770A (en) * | 2014-02-08 | 2014-05-07 | 厦门大学 | Blue-light LD pimping praseodymium-doped yttrium lithium fluoride 915 nm near-infrared total-solid laser device |
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