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CN102820411B - Light-emitting diode chip for backlight unit, preparation method and method for packing - Google Patents

Light-emitting diode chip for backlight unit, preparation method and method for packing Download PDF

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Publication number
CN102820411B
CN102820411B CN201210312384.1A CN201210312384A CN102820411B CN 102820411 B CN102820411 B CN 102820411B CN 201210312384 A CN201210312384 A CN 201210312384A CN 102820411 B CN102820411 B CN 102820411B
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China
Prior art keywords
groove
emitting diode
light
conductive layer
diode chip
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CN201210312384.1A
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CN102820411A (en
Inventor
高志强
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Lite On Electronics Guangzhou Co Ltd
Lite On Technology Corp
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Lite On Electronics Guangzhou Co Ltd
Lite On Technology Corp
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Priority to CN201210312384.1A priority Critical patent/CN102820411B/en
Priority claimed from CN200910037346.8A external-priority patent/CN101515621B/en
Publication of CN102820411A publication Critical patent/CN102820411A/en
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Abstract

The method for packing of a kind of light-emitting diode chip for backlight unit, step comprises: form a protective layer on an encapsulating carrier plate;Pattern this protective layer, to form a perforation running through this protective layer;Etch this encapsulating carrier plate, form the opening groove more than this perforation, make this protective layer of part of this perforation adjacent convexedly stretch in this groove;Form a metal level on this protective layer and this groove, wherein this groove and this protective layer adjacent non-coated metal layer;Remove this protective layer and be positioned at the metal level on this protective layer, forming one and be positioned at the reflector in this groove;And in the reflector that a fixed light-emitting diode chip for backlight unit is in this groove.Chip is located in the metallic reflection cup of groove-like by the present invention, and from chip two electrode unit with metallization process packaging body surface formed bare electrode, without using routing processing procedure, except reducing the fraction defective caused because of broken string, promote encapsulation reliability, also can improve the heat dispersion of chip, and make the assembly program of downstream application end easier.

Description

Light-emitting diode chip for backlight unit, preparation method and method for packing
The application is filing date February 19, Application No. 200910037346.8, innovation and creation in 2009 The divisional application of the application of entitled " light-emitting diode chip for backlight unit, preparation method and method for packing ".
Technical field
The invention relates to a kind of light-emitting diode chip for backlight unit, its preparation method and method for packing, particularly relate to one Kind of encapsulation volume is little and the fireballing light-emitting diode chip for backlight unit of processing procedure, its preparation method and method for packing.
Background technology
As it is shown in figure 1, known light-emitting diode chip for backlight unit 91 is generally by outside on routing mode and support plate 92 Portion's electrode 93 electrically connects.Owing to routing processing procedure needs to take the space that support plate 92 is bigger, and bonding process Being to connect one by one with machine, process efficiency is extremely low, is unfavorable for that system encapsulates (system in package) Or wafer-level packaging (wafer level package).
In order to improve the shortcoming of routing processing procedure, the most common mode is to utilize the side of flip (flip-chip) Formula makees electrical connection, to save routing processing procedure.But flip chip manufacturing process need to plant a large amount of gold goal on single chips, Process is time-consuming, also affects packaging efficiency.In addition to flip mode, some are separately had to be not required to the encapsulation side of routing Formula, such as turning-over of chip will be located in the electrode of chip surface electrode directly and on support plate and stick together and do not use gold Ball, such mode then needs the electrode making chip surface contour, and has splendid flatness, makes precision and wants Ask higher, relatively make processing procedure difficulty higher.Another way is to adjust chip structure, makes chip electrode by core Sheet surface extends to die bottom surface, such as the chip system disclosed in Japanese Patent Publication case JP2008-130875 Make method, as shown in Figures 2 and 3, be perforate 941 on chip 94, plate conductive layer 95, make to lead The electrode 96 on chip 94 surface is connected with the electrode 97 of chip 94 bottom surface by electric layer 95 by perforate 941, And make chip 94 electrode 97 can be located at its bottom surface.But in JP2008-130875 case, it defines perforate The wall of 941 is vertical wall, when being coated with conductive layer, has the shortcoming that step coverage is bad, holds It is easily caused conductive layer uneven and affect electric conductivity.
Summary of the invention
In order to solve aforesaid problem, the present invention utilizes and forms sloped sidewall in light-emitting diode chip for backlight unit both sides, The inclined-plane produced by sloped sidewall, can make conductive layer easily uniform deposition on inclined-plane, to avoid ladder to cover The shortcoming that lid is bad, and by the conductive layer on inclined-plane, the electrode on light-emitting diode chip for backlight unit surface is extended To substrate both sides or the bottom surface of substrate of chip, follow-up encapsulation procedure, what is more, it is not required to make Use routing, the volume of encapsulating structure can be reduced.
Further, the present invention also provides preparation method and the light-emitting diodes of the reflector utilizing manufacture of semiconductor technology The method for packing of pipe, can be applicable to system encapsulation or wafer-level packaging.The preparation method of reflector of the present invention only needs profit The groove structure that can complete to have reflecting layer with optical cover process, needs twice light compared to conventional process Cover processing procedure, it is possible to reduce processing time and cost of manufacture.And the method for packing that the present invention provides need not routing Processing procedure can be formed with the wire of encapsulating carrier plate and electrically connect, and can not only save processing time, promote and produce effect Rate, moreover it is possible to reduce the volume of encapsulating structure.
Further, the present invention also provide for a kind of the electrode of light-emitting diode chip for backlight unit can be extended to encapsulation The method for packing of the bottom surface of support plate, and it is not required to perforate in reflector, to avoid damage to the effect of encapsulating chip, It is the easiest so that electrode to extend to caused chip bottom encapsulating carrier plate by reflector bottom opening to solve Make moist and the problem of fragile structure of encapsulating structure, and its made encapsulating structure can be directly arranged at one The circuit board of application product, is not required to use routing processing procedure, except reducing the fraction defective caused because of broken string, promotes Encapsulation reliability, the assembly program that also can make downstream application end is easier.
Light-emitting diode chip for backlight unit provided by the present invention, makes the conductive layer of connection electrode extend by inclined-plane unit To substrate inclined wall or bottom surface, light-emitting diode chip for backlight unit can be fixedly arranged in encapsulating carrier plate directly formation and be electrically connected Connect, or utilize metallization process to make extension conductive layer formation electrical connection, owing to need not routing processing procedure, have Help wafer-level packaging or system encapsulation, and the packaging time of routing one by one can be saved, and save routing institute The space taken, to reduce volume, has a miniaturization advantage for integrating other photoelectric subassembly, and and other LED technology is integrated, the such as integration of nano-crystals processing procedure, the most elastic.Additionally, the present invention is carried The preparation method of the light-emitting diode chip for backlight unit of confession, by forming sloped sidewall and substrate inclined wall, with on its inclined-plane Utilize metallization process to deposit conductive layer, be easily controlled compared to depositing conductive layer on the vertical plane, therefore can carry Rise process rate, reduce manufacturing cost.
The preparation method of the reflector for LED package provided by the present invention, convexedly stretches in recessed by part The shielding of the protective layer in groove, makes the layer gold layer being coated on groove without departing from slot opening, and can save together Optical cover process, to reduce processing time and cost.
The method for packing of the light emitting diode of present invention offer, can complete the most several on same encapsulating carrier plate The encapsulation of luminous diode chip, also can need not routing processing procedure, therefore more can be suitably used for wafer-level packaging or system Encapsulation, may select applicable method step according to different LED chip constructions, will connect chip electricity The conductive layer of pole extends outside reflector, further, moreover it is possible to by extending to encapsulating carrier plate bottom surface outside reflector, With maintain chip seal integrity, make the method for packing of the present invention can not only save the encapsulation procedure time and Reduce the volume of encapsulating structure, moreover it is possible to facilitate the assembly program of downstream application end.
Accompanying drawing explanation
Referring next to accompanying drawing and related embodiment, the present invention is described in detail and describes:
Fig. 1 is a schematic diagram, and a known light-emitting diode chip for backlight unit is described;
Fig. 2 is a top view, and the luminescence two disclosed in Japanese Patent Publication case JP2008-130875 is described Pole die;
Fig. 3 is the sectional view of Fig. 2;
Fig. 4 (a)~Fig. 4 (f) is the enforcement step of the embodiment 1 of the preparation method that light-emitting diode chip for backlight unit of the present invention is described Flow chart;
Fig. 5 is the top view of Fig. 4 (f), and the position of two electrode units of embodiment 1 is described;
Fig. 6 is a schematic diagram, and the embodiment 1 of light-emitting diode chip for backlight unit of the present invention is described;
Fig. 7 (a)~Fig. 7 (g) is the enforcement step stream of the embodiment 1 that LED encapsulation method of the present invention is described Cheng Tu;
Fig. 8 is the flow chart of hookup 4 (a)~Fig. 4 (f), illustrate light-emitting diode chip for backlight unit of the present invention preparation method it The enforcement step of embodiment 2;
Fig. 9 is a schematic diagram, and the embodiment 2 of light-emitting diode chip for backlight unit of the present invention is described;
Figure 10 (a)~Figure 10 (c) is the flow chart of hookup 7 (a)~Fig. 7 (d), and light emitting diode of the present invention is described The enforcement step of the embodiment 2 of method for packing;
Figure 11 (a)~Figure 11 (f) is the enforcement step of the embodiment 3 that LED encapsulation method of the present invention is described Flow chart;
Figure 12 (a)~Figure 12 (b) is the flow chart of Figure 11 (a)~Figure 11 (d) of continuing, and light-emitting diodes of the present invention is described The enforcement step of the embodiment 4 of pipe method for packing;
Figure 13 (a)~Figure 13 (h) is the enforcement step of the embodiment 5 that LED encapsulation method of the present invention is described Rapid flow chart;
Figure 14 is the top view of Figure 13 (h), and the position of the upper conductive layer of embodiment 5 is described;And
Figure 15 is a schematic diagram, and another encapsulation aspect of the light-emitting diode chip for backlight unit of embodiment 5 is described.
Detailed description of the invention
About addressing other technology contents, feature and effect before the present invention, following cooperation with reference to graphic it In the detailed description of five preferred embodiments, can clearly present.
Before the present invention is described in detail, it is noted that, in the following description content, similar group Part is to be identically numbered to represent.
Embodiment 1
The making of light-emitting diode chip for backlight unit
Refering to Fig. 4 (a)~Fig. 4 (f), the enforcement of the embodiment 1 of the preparation method of light-emitting diode chip for backlight unit of the present invention is described Flow chart of steps.Implementation step comprises:
As shown in Fig. 4 (a), take a master slice 10 having completed epitaxial structure, master slice 10 include a substrate 11 and One is formed at the epitaxial layer unit 12 on substrate 11.Epitaxial layer unit 12 includes that one is formed on substrate 11 The luminescent layer 122 that is formed in the first type semiconductor layer 121 of the first type semiconductor layer 121, one and a shape Become the Second-Type semiconductor layer 123 on luminescent layer 122.In the present embodiment, substrate 11 is sapphire (sapphire) material, thickness about 350 μm;First type semiconductor layer 121 is N-shaped gallium nitride (n-GaN), Second-Type semiconductor layer 123 is p-type gallium nitride (p-GaN).
The patterning process utilizing manufacture of semiconductor technology defines a plurality of predetermined formation one on master slice 10 The position of chip and the position (not shown) of the predetermined groove formed between two chips.Following steps to be said The bright sidewall and the electrode unit that how to utilize etching and metallization process to form each chip, rise for convenience of description See, graphic in the implementation process between two adjacent chips is only shown.As shown in Fig. 4 (b), in predetermined formation The position of groove 21 utilizes etch process to be etched to part the first type quasiconductor by Second-Type semiconductor layer 123 Layer 121, makes the first type semiconductor layer 121 exposed, and forms the groove 21 that an opening is expanded outward, the most just It is to say to be formed in the side of each chip 1 down to be extended to part the first type half by Second-Type semiconductor layer 123 side One first inclined-plane 131 of conductor layer 121 side.As shown in Fig. 4 (c), then between two recessed in the middle of chips 1 Bottom groove 21, the partial denudation surface of the i.e. first type semiconductor layer 121, the position of definition one second groove 22 Put, then etch that the first type semiconductor layer 121 to substrate 11 surface forms that an opening is expanded outward second Groove 22, and make the part surface of substrate 11 exposed, thereby formed in the side of each chip 1 and be positioned at first One second inclined-plane 132 and of type semiconductor layer 121 side adjacent substrate 11 is connected to the first inclined-plane 131 With the platform 133 on the second inclined-plane 132, and the 131, second inclined-plane 132, the first inclined-plane and platform 133 i.e. shape Become one of epitaxial layer unit 12 down and the sloped sidewall 13 of past outer incline.The epitaxial layer unit of each chip 1 The opposite side of 12 is also formed one down also toward the inclination of outer incline from another group groove 21 and the second groove 22 Sidewall 13.Aforementioned etch process may utilize dry-etching or Wet-type etching, can be according to epitaxial layer unit 12 The etching mode that material selection is suitable, this is the known technology in field of the present invention, repeats no more in this.It is worth It is noted that the enforcement step being previously formed groove 21 and the second groove 22 is only the one of embodiment, Its also available different photoresistance thickness or halftoning site (halftone) processing procedure define simultaneously groove 21 with The position of the second groove 22, and an available etching step or twice etching step formed groove 21 with Second groove 22, is not limited with the present embodiment.
As shown in Fig. 4 (d), bottom the second groove 22, the most exposed substrate 11 surface, etch formation one The substrate recess 23 that opening is expanded outward, thereby the chip 1 in substrate recess 23 both sides formed respectively one with The substrate inclined wall 14 that its adjacent sloped sidewall 13 tilts in the same direction.Similarly, the substrate 11 of each chip 1 Opposite side concurrently form another substrate recess 23, and form another sloped sidewall 13 being adjacent in the same direction The substrate inclined wall 14 tilted.Etch process may utilize dry-etching or Wet-type etching equally herein, at this In embodiment, it is to utilize Wet-type etching mode, is mixed and heated using phosphoric acid and water and etches substrate as etching solution 11, make the inclination angle of substrate inclined wall 14 about between 40~60 degree.
As shown in Fig. 4 (e), utilize metallization process, on each chip 1, form two electrode units, be respectively One forms, with the first type semiconductor layer 121, the first electrode unit 151 electrically connected, and one partly leads with Second-Type Body layer 123 forms the second electrode unit 152 of electrical connection.First electrode unit 151 includes that one is located therein The electrode 1511 on platform 133 surface of one sloped sidewall 13, and one by electrode 1511 along adjacent second Inclined-plane 132 extends to the conductive layer 1512 on substrate inclined wall 14.Second electrode unit 152 includes that one sets In the electrode 1521 on Second-Type semiconductor layer 123 surface, and one by electrode 1521 along another sloped sidewall 13 Extend to the conductive layer 1522 on substrate inclined wall 14.And the conductive layer 1522 of the second electrode unit 152 And it is initially formed an insulating barrier 153 between corresponding sloped sidewall 13, to avoid the first electrode unit 151 With the second electrode unit 152 short circuit.First electrode unit 151 and the second electrode unit 152 are at chip 1 On distribution can coordinate the top view refering to Fig. 5.Before forming electrode 1521, also partly can lead at Second-Type Body layer 123 surface is coated to transparency electrode, if tin indium oxide (ITO) film (not shown) is to increase conduction all Even property.
As shown in Fig. 4 (f), grind the bottom surface 111 of the substrate 11 being positioned at epitaxial layer unit 12 opposition side, will be each Substrate recess 23 is worn out, makes the conductive layer 1512,1522 on each substrate inclined wall 14 expose bottom surface 111. In this embodiment, substrate 11 thickness after grinding is about 50~100 μm.Afterwards, cutting master slice 10 is with shape Become the most several independent chip 1.
Light-emitting diode chip for backlight unit
As shown in Figure 6, the embodiment 1 that chip 1 is light-emitting diode chip for backlight unit of the present invention that abovementioned steps prepares, Comprise: substrate 11, epitaxial layer unit 12, two inclined-plane unit 16 and two electrode units 151,152. Substrate 11 has surface 112 and a bottom surface 111.Epitaxial layer unit 12 is positioned at the surface 112 of substrate 11, And include one first type semiconductor layer 121, luminescent layer 122 and a Second-Type semiconductor layer 123, first Type semiconductor layer 121 is positioned at substrate 11 surface 112, and luminescent layer 122 is positioned at the first type semiconductor layer 121 And between Second-Type semiconductor layer 123.Two inclined-plane unit 16 lay respectively at two opposite sides, each inclined-plane unit 16 be the direction, bottom surface 111 from epitaxial layer unit 12 towards substrate 11 down and toward outer incline, respectively include position In one of epitaxial layer unit 12 sloped sidewall 13, and it is positioned at one of substrate 11 substrate inclined wall 14.Respectively incline Tiltedly sidewall 13 also includes that one is down extended to part the first type semiconductor layer by Second-Type semiconductor layer 123 side First inclined-plane 131 of 121 sides and the second inclined-plane 132 of an adjacent substrate 11, and the first inclined-plane 131 and It is connected by a platform 133 between two inclined-planes 132.Two electrode units 151,152 are respectively one and first First electrode unit 151 of type semiconductor layer 121 electric connection, and one with Second-Type semiconductor layer 123 Second electrode unit 152 of electric connection.First electrode unit 151 includes that one is located therein a sloped sidewall The electrode 1511 on platform 133 surface of 13 and and one being prolonged along the second adjacent inclined-plane 132 by electrode 1511 Extend the conductive layer 1512 on substrate inclined wall 14.Second electrode unit 152 includes being located at Second-Type half The electrode 1521 on conductor layer 123 surface, and one extended to base by electrode 1521 along another sloped sidewall 13 Conductive layer 1522 on plate inclined wall 14.And the conductive layer 1522 of the second electrode unit 152 is with corresponding Sloped sidewall 13 between be additionally provided with an insulating barrier 153.Additionally, substrate 11 also can be the base of tool electric conductivity Plate, if substrate has electric conductivity, need to set insulating barrier on substrate inclined wall.In the present embodiment, substrate The inclination angle of inclined wall 14, about between 40-60 degree, is conducive to being coated with extension on encapsulating carrier plate again during encapsulation and leads Electric layer is connected with conductive layer 1512,1522, about the packaged type of light-emitting diode chip for backlight unit 1, and will be in It is illustrated below.
The encapsulation of light emitting diode
Fig. 7 (a)~(g) illustrate the implementing procedure of the embodiment 1 of the method for packing of light emitting diode of the present invention, its Middle Fig. 7 (a)~Fig. 7 (d) also illustrate the preparation method of the reflector of the present invention.As shown in Fig. 7 (a), carry in an encapsulation Form a protective layer 31 on plate 3, then pattern protective layer 31, to form a perforation running through protective layer 31 311.In the present embodiment, encapsulating carrier plate 3 material is silicon, and protective layer 31 material is SiNx.Encapsulation carries Plate 3 also can be other non-conductive material, the such as ceramic material such as aluminium nitride or aluminium oxide.Protective layer 31 material Matter is alternatively SiOx、SiNx/SiOx, or metal (such as Ni, Au) etc., the formation side of protective layer 31 Method can use vapour deposition process (CVD) or high humidity high temperature furnace according to its material selection, such as non-metallic material Processing procedure, metal material can be by modes such as plating, sputter or evaporations.
As shown in Fig. 7 (b), utilize etching solution by perforation 311 etching encapsulating carrier plate 3, form an opening 321 More than the groove 32 of perforation 311, the partial protection layer 31 of adjacent perforated 311 is made to convexedly stretch in groove 32. In the present embodiment, etching solution is KOH solution, and the KOH solution of concentration 30vol% is in 80 DEG C or dense The KOH solution of degree 45vol% is under the conditions of 85 DEG C, and etch-rate is about 1 μm/min.The choosing of etching solution With adjusting according to actual demand, it is not limited with the present embodiment.
As shown in Fig. 7 (c), on protective layer 31 and groove 32, form a metal level 33,34, and by portion Divide the shielding of the protective layer 31 convexedly stretched in groove 32, make at the adjacent protective layer of groove 32 31 (adjacent to opening At mouth 321) non-coated metal layer 34.Metal level 33,34 can deposit by sputter or evaporation mode, material Matter can be Ti/Al, Ti/Ni/Ag or other the most common reflecting layer material that may be used to reflect light. As shown in Fig. 7 (d), remove protective layer 31 and the metal level 33 being positioned on protective layer 31, be left at groove Metal level 34 in 32, i.e. forms a reflector 34 being positioned in groove 32.Formed by abovementioned steps Reflector 34 only pattern protective layer 31 time need to use one optical cover process to define perforation 311 Position, the shielding of recycling protective layer 31 so that do not deposit metal level at adjacent recess 32 opening 321 34, so reflector 34 is without departing from groove 32 opening 321, and definition reflector 34 opening can be saved Region is to avoid the optical cover process beyond groove 32 opening 321.
As shown in Fig. 7 (e), take an aforementioned prepared light-emitting diode chip for backlight unit 1 and be fixedly arranged in reflector 34.More Further, light-emitting diode chip for backlight unit 1 is to utilize a crystal-bonding adhesive 38 to be fixed in reflector 34, at this In embodiment, crystal-bonding adhesive 38 is isolation material so that the conductive layer 1512 of the first electrode unit 151 and The conductive layer 1522 of two electrode units 152 is electrically isolated with reflector 34.
For another example shown in Fig. 7 (f), forming two extension conductive layers 35 with metallization process, each extension conductive layer 35 is respectively The conductive layer 1512 of the first electrode unit 151 of connecting luminous diode chip 1 and the second electrode unit 152 Conductive layer 1522, and by substrate inclined wall 14 connect, the most also can be connected by sloped sidewall 13, The first electrode unit 151 and the second electrode unit 152 is made to extend reflector by each extension conductive layer 35 On encapsulating carrier plate 3 outside 34, in the present embodiment, it is conduction due to reflector 34 and encapsulating carrier plate 3 Body, so before forming extension conductive layer 35, needing first preboarding on reflector 34 and encapsulating carrier plate 3 The position becoming to extend conductive layer 35 forms an insulating barrier 36, to avoid extending conductive layer 35 and reflector 34 And encapsulating carrier plate 3 contacts.As shown in Fig. 7 (g), in reflector 34, fill printing opacity glue material 37, to seal Light-emitting diode chip for backlight unit 1.Printing opacity glue material 37 can be containing fluorescent material or without fluorescent material, depending on use demand Fixed.
Although during in the present embodiment, light-emitting diode chip for backlight unit 1 is provided in reflector 34, but being previously formed The enforcement step extending conductive layer 35 is equally applicable to general support plate, or general reflector.
Embodiment 2
The making of light-emitting diode chip for backlight unit
The enforcement step of the embodiment 2 of the preparation method of light-emitting diode chip for backlight unit of the present invention and embodiment 1 substantially phase With, can coordinate refering to Fig. 4 (a)~Fig. 4 (f), be in place of its difference, as shown in Figure 8, at grinding base plate After the bottom surface 111 ' of 11 ' is to expose the conductive layer 1512 ', 1522 ' of each substrate inclined wall 14 ', embodiment 2 profit With metallization process formed in bottom surface 111 ' two respectively with the conductive layer 1512 ' of each substrate inclined wall 14 ', The conductive layer 1513 ', 1523 ' that 1522 ' connect, makes the conduction of first, second electrode unit 151 ', 152 ' Layer 1512 ', 1513 ', 1522 ', 1523 ' extends to substrate 11 ' bottom surface 111 '.Additionally, in this metallization Before fabrication steps, also can comprise further and bottom surface 111 ' is polished to provide a flatter and smooth surface Step.Afterwards, each chip 1 ' on cutting master slice 10 ' is to form the most several independent chips 1 '.
Light-emitting diode chip for backlight unit
As it is shown in figure 9, the embodiment 2 that chip 1 ' is light-emitting diode chip for backlight unit of the present invention that abovementioned steps prepares, Roughly the same with embodiment 1, it is in place of its difference, the first electrode unit 151 ' of embodiment 2 contains Including a conductive layer 1513 ' extending substrate 11 ' bottom surface 111 ', and the second electrode unit 152 ' is containing including One conductive layer 1523 ' extending substrate 11 ' bottom surface 111 '.
The encapsulation of light emitting diode
Figure 10 (a)~(c) illustrate the implementing procedure of the embodiment 2 of the method for packing of light emitting diode of the present invention, use To encapsulate aforementioned light-emitting diode chip for backlight unit 1 '.
As shown in Figure 10 (a), prior to predetermined set light-emitting diode chip for backlight unit 1 ' bottom surface defined in reflector 34 ' The position (scheming non-label) of two conductive layers 1513 ', 1523 ' of 111 ', and utilize metallization process to form two Extend conductive layer 35 ', make each extension conductive layer 35 ' respectively by the pre-determined bit of each conductive layer 1513 ', 1523 ' Put and extend on reflector 34 ' encapsulating carrier plate 3 ' outward.In the present embodiment, the reality of reflector 34 ' is formed Execute step same as in Example 1, see Fig. 7 (a)~Fig. 7 (d).Due to reflector 34 ' and encapsulating carrier plate 3 ' It is electric conductor, so before forming extension conductive layer 35 ', needing first at reflector 34 ' and encapsulating carrier plate 3 ' The upper predetermined position forming extension conductive layer 35 ' forms an insulating barrier 36 ', to avoid extending conductive layer 35 ' Contact with reflector 34 ' and encapsulating carrier plate 3 '.
As shown in Figure 10 (b), a light-emitting diode chip for backlight unit 1 ' is fixedly arranged in reflector 34 ', and makes two to lead Electric layer 1513 ', 1523 ' electrically connects with corresponding each conductive layer 35 ' that extends respectively.
As shown in Figure 10 (c), in reflector 34 ', fill printing opacity glue material 37 ', to seal light-emitting diode chip for backlight unit 1 '. Printing opacity glue material 37 ' can be containing fluorescent material or without fluorescent material, depending on use demand.
Although in the present embodiment, light-emitting diode chip for backlight unit 1 ' is provided in reflector 34 ', but is previously formed extension The enforcement step that conductive layer 35 ' connects with light-emitting diode chip for backlight unit 1 ' again is equally applicable to general support plate, or General reflector.
Embodiment 3
Figure 11 (a)~Figure 11 (f) illustrates the embodiment 3 of LED encapsulation method of the present invention.
As shown in Figure 11 (a), it is coated to a guarantor in the front 411 of an encapsulating carrier plate 41 and the back side 412 the most respectively Sheath 42, then pattern protective layer 42 and form plurality of through holes 421,422, arranges reflector defining reservation Groove location 421, and lay respectively at groove location 421 both sides predetermined set and wear groove 44 (refering to Figure 11 (b)) Wear groove location 422.Be positioned at front 411 and the back side 412 to wear groove location about 422 corresponding.Such as figure Shown in 11 (b), recycling etching solution etching encapsulating carrier plate 41, by the perforation 421 of protective layer 42 in encapsulation Support plate 41 front 411 forms the groove 43 of a predetermined set reflector 471 (refering to Figure 11 (c)), makes recessed The opening 431 of groove 43 is more than perforation 421, and by each perforation 422 by the front 411 of encapsulating carrier plate 41 And the back side 412 relatively etch and formed two be respectively adjacent to groove 43 wear groove 44.Groove 44 is worn by each Form the sidewall 45 of its adjacent two encapsulating structures 4, and each sidewall 45 has one by encapsulating carrier plate 41 front 411 toward the top incline 451 and of middle flare from encapsulating carrier plate 41 back side 412 toward centre flare under Inclined plane 452.In the present embodiment, the material of encapsulating carrier plate 41 is silicon, the material of protective layer 42 and erosion Quarter, mode can refer to embodiment 1, no longer repeats in this.
As shown in Figure 11 (c), then deposited a metal level 47 by encapsulating carrier plate 41 front 411, make groove 43 And respectively wear the top incline 451 coated metal layer 47 of groove 44, its further groove 43 and protective layer 42 adjacent Non-coated metal layer 47, and in groove 43, form a reflector 471.
As shown in Figure 11 (d), remove the protective layer 42 in encapsulating carrier plate 41 front 411 and the back side 412, due to The encapsulating carrier plate 41 of the present embodiment has electric conductivity, after removing protective layer 42, by encapsulating carrier plate 41 just Face 411 and the back side 412 depositing insulating layer 46.
As shown in Figure 11 (e), formation has predetermined at the back side 412 of encapsulating carrier plate 41 to utilize metallization process The conductive layer 48 of pattern, is extended to each bottom incline 452 by encapsulating carrier plate 41 back side 412 respectively including two Lower conductiving layer 481, and a conducting region 482 being positioned at encapsulating carrier plate 41 back side 412, conducting region 482 It is available for connecting with external radiating device (not shown).Or, conductive layer 48 also can be by lift-off processing procedure Make.
As shown in Figure 11 (f), take light-emitting diode chip for backlight unit 1 as described in Example 1 and be fixedly arranged on reflector 471 In, coordinating refering to the step described in Fig. 7 (e)~Fig. 7 (g), the present embodiment 3 makes in embodiment 1 further Extension conductive layer 35 extends to each top incline 451 and forms conductive layer 483 on two, each upper conductive layer 483 Be connected with corresponding each lower conductiving layer 481 respectively and respectively with the first electrode unit 151 and the second electrode Unit 152 electrically connects, and makes first, second electrode unit 151,152 may extend to the back of the body of encapsulating carrier plate 41 Face 412.In reflector 471, fill a printing opacity glue material 49 sealed by light-emitting diode chip for backlight unit 1, with Form an encapsulating structure 4.The visual demand of printing opacity glue material 49 contains fluorescent material or without fluorescent material.Aforementioned reality Execute step and can complete the most several encapsulating structure 4 on same encapsulating carrier plate 41, many via preparing after cutting Several independent encapsulating structures 4, each independent encapsulating structure 4 can be directly arranged at the circuit of an application product Plate (not shown), is not required to use routing processing procedure, and facilitates the assembly program of downstream application end. The packaged type of embodiment 3 utilizes is wearing groove 44 reflector 471 outside, make conductive layer 483 and under Conductive layer 481 is connected, and can avoid damage to the sealing of light-emitting diode chip for backlight unit 1, and upper conductive layer 483 are respectively formed at top incline 451 and bottom incline 452 with lower conductiving layer 481, can make by inclined-plane Metal level easily deposits, and can promote process rate.
Embodiment 4
Embodiment 4 is another embodiment of encapsulating light emitting diode chip for backlight unit 1 ' (refering to Fig. 9), and it is implemented Step part is identical with the enforcement step of embodiment 3, refering to Figure 11 (a)~Figure 11 (d).Referring next to Figure 12 (a), Metallization process is utilized to form the conductive layer 48 with predetermined pattern, bag at the back side 412 of encapsulating carrier plate 41 Include two lower conductiving layers 481 being extended to each bottom incline 452 respectively by encapsulating carrier plate 41 back side 412, and One conducting region 482 being positioned at encapsulating carrier plate 41 back side 412, conducting region 482 is available for and external radiating device (not shown) connects.And in the predetermined set light-emitting diode chip for backlight unit 1 ' end defined in reflector 471 The position of the conductive layer 1513 ', 1523 ' of first, second electrode unit 151 ', 152 ' in face, recycling gold Genusization processing procedure forms conductive layer 483 ' on two, makes each upper conductive layer 483 ' respectively by first, second electrode list The precalculated position (scheming non-label) of unit 151 ', 152 ' extends to each top incline 451, and with each lower conduction Layer 481 is connected.Similarly, conductive layer 48 and the conductive layer 483 ' that powers on also may utilize lift-off processing procedure system Make.
Refering to Figure 12 (b), fixed light-emitting diode chip for backlight unit 1 ' in reflector 471, and make two conductive layers 1513 ', 1523 ' electrically connect with corresponding each upper conductive layer 483 ' respectively, that is, make each upper conductive layer 483 ' respectively With first, second corresponding electrode unit 151 ', 152 ' electrical connection.Fill thoroughly in reflector 471 Optical cement material 49, to seal light-emitting diode chip for backlight unit 1 '.Printing opacity glue material 49 can be containing fluorescent material or without fluorescence Powder, depending on use demand.
Embodiment 5
Figure 13 (a)~Figure 13 (h) illustrates the enforcement step of the embodiment 5 of LED encapsulation method of the present invention. The enforcement step of embodiment 5 can be used for encapsulating general electrode and is positioned at the light-emitting diode chip for backlight unit 5 in front. Refering to Figure 13 (a) and Figure 13 (b), implementation step is roughly the same with Figure 11 (b) with Figure 11 (a) of embodiment 3, Encapsulating carrier plate 41 is formed a groove 43 and two and wears groove 44, only, protective layer 42 and base plate for packaging 41 Between also have an insulating barrier 46.
Refering to Figure 13 (c), by groove 43 and wear the exposed surface oxidation of groove 44 and form oxide layer using as insulation Layer 46 '.
Refering to Figure 13 (d), then deposited a metal level 47 by encapsulating carrier plate 41 front 411, make groove 43 and Respectively wearing the top incline 451 coated metal layer 47 of groove 44, its further groove 43 is with protective layer 42 adjacent not Coated metal layer 47, and in groove 43, form a reflector 471.
Refering to Figure 13 (e), remove the protective layer 42 in encapsulating carrier plate 41 front 411 and the back side 412, and utilize gold Genusization processing procedure forms the conductive layer 48 with predetermined pattern at the back side 412 of encapsulating carrier plate 41, including two points Do not extended to the lower conductiving layer 481 of each bottom incline 452 by encapsulating carrier plate 41 back side 412, and one is positioned at The conducting region 482 at encapsulating carrier plate 41 back side 412, conducting region 482 is available for (scheming not with external radiating device Illustrate) connect.
Refering to Figure 13 (f), a light-emitting diode chip for backlight unit 5 is installed in reflector 471, two conducting blocks are set 51 (scheme non-label), wherein at light-emitting diode chip for backlight unit 5 on two electrodes of this light-emitting diode chip for backlight unit 5 Each electrode on be respectively provided with a conducting block 51, make such conducting block 51 protrude outside reflector 471.At this In embodiment, each conducting block 51 is the gold goal of the most about 50~100 μm.Although the present embodiment is the most fixed Light-emitting diode chip for backlight unit 5 arranges conducting block 51 again, but after can also conducting block 51 be first set, then will send out Luminous diode chip 5 is fixedly arranged in reflector 471, but combines this light emitting diode of this two conducting block 51 The whole height of chip 5 need to exceed this reflector 471 degree of depth.
As shown in Figure 13 (g), in reflector 471, fill printing opacity glue material 49 to seal light-emitting diode chip for backlight unit 5.The visual demand of printing opacity glue material 49 contains fluorescent material or without fluorescent material.
As shown in Figure 13 (h), after printing opacity glue material 49 solidifies, grind its surface, and make such conducting block 51 Partial denudation is in printing opacity glue material 49 surface.It is to say, the position of the exposed surface of such conducting block 51 is high Position in reflector 471 opening.Coordinate refering to Figure 14, then it is each to form connection respectively with metallization process Conducting block 51 also extends to conductive layer 483 on the two of top incline 451 ", make each upper conductive layer 483 " respectively Electrically connect with each electrode, and each upper conductive layer 483 " connect with corresponding lower conductiving layer 481 respectively.It Rear step is same as in Example 3, via the cutting the most several independent encapsulating structure 4 ' of feasible one-tenth.
The most applicable general reflector of step shown in aforementioned Figure 13 (f)~Figure 13 (h).As shown in figure 15, when instead Penetrate cup 61 when being located at general encapsulating carrier plate 6, conductive layer 483 on aforementioned two " it is and extends reflector 61 The extension conductive layer 62 on encapsulating carrier plate 6 surface outside opening, extends conductive layer 62 and is available for and outer electrode (figure Not shown) electrical connection.
Concluding above-mentioned, the preparation method of light-emitting diode chip for backlight unit 1,1 ' provided by the present invention, it is by formation Sloped sidewall 13 and substrate inclined wall 14, with utilize on its inclined-plane metallization process deposition conductive layer 1512, 1512 ', it is easily controlled compared to depositing conductive layer on the vertical plane, therefore process rate can be promoted, reduce system Cause this.
Additionally, light-emitting diode chip for backlight unit 1,1 ' provided by the present invention, by inclined-plane unit 16, the 16 ' company of making The conductive layer 1512,1522,1512 ', 1522 ' of receiving electrode 1511,1521,1511 ', 1521 ' extends to Substrate inclined wall 14, the conductive layer 1512,1522,1512 ', 1522 ' that furthers is connected with offer exposed electrical Extension conductive layer 35,35 ' spacing, reduce broken string possibility.
Further, the light-emitting diode chip for backlight unit 1 of the present invention, make connection electrode by inclined-plane unit 16 1511, the conductive layer 1512,1522 of 1521 extends to substrate inclined wall 14, and light-emitting diode chip for backlight unit 1 ' Conductive layer 1513 ', 1523 ' extend to substrate 11 ' bottom surface 111 ', recycling metallization process makes and extends Conductive layer 35,35 ' is formed with light-emitting diode chip for backlight unit 1,1 ' and electrically connects, then need not routing processing procedure, suitable Encapsulate for wafer-level packaging or system, and the packaging time of routing one by one can be saved, and save routing institute The space taken, to reduce volume, has a miniaturization advantage for integrating other photoelectric subassembly, and and other LED technology is integrated, the such as integration of nano-crystals processing procedure, the most elastic.
From the enforcement step described in embodiment 1~embodiment 5, the envelope of the light emitting diode of present invention offer Dress method need not routing processing procedure, can be suitably used for wafer-level packaging or system encapsulation, according to different luminescences two Pole die 1,1 ', 5 structure may select applicable method step.Further, such as embodiment 3~enforcement Described in example 5, moreover it is possible to form the encapsulating structure 4,4 ' of the circuit board that can be directly arranged at an application product, no Routing processing procedure need to be used, the encapsulation procedure time can not only be saved and reduce the volume of encapsulating structure 4,4 ', The assembly program of downstream application end can also be facilitated.
Additionally, such as Fig. 7 (a)-7 (d), 10 (a), 11 (a)-11 (e), 12 (a) and the encapsulation side shown in 13 (a)-13 (e) Method, encapsulating carrier plate framework and reflector framework, do not limit the light-emitting diodes being only applicable to disclosed herein Die 1,1 ', is equally applicable for generally a light emitting diode chip.
Only as described above, only the preferred embodiments of the invention, real when the present invention can not be limited with this The scope executed, becomes according to the simple equivalence that scope of the present invention patent and invention description content are made the most generally Change and modify, being all still covered by the present invention within the scope of the patent.

Claims (8)

1. a method for packing for light-emitting diode chip for backlight unit, utilizes manufacture of semiconductor to make, and step comprises:
Form a protective layer on an encapsulating carrier plate;
Pattern this protective layer, to form a perforation running through this protective layer;
Etch this encapsulating carrier plate, form the opening groove more than this perforation, make the portion of this perforation adjacent This protective layer is divided to convexedly stretch in this groove;
Form a metal level on this protective layer and this groove, wherein this groove and this protective layer adjacent Non-coated metal layer;
Removing this protective layer and be positioned at the metal level on this protective layer, it is anti-that formation one is positioned in this groove Penetrate cup;
Utilize the fixed light-emitting diode chip for backlight unit of isolation material crystal-bonding adhesive reflector in this groove On so that the conductive layer of the first electrode unit of light-emitting diode chip for backlight unit and the conductive layer of the second electrode unit with Reflector is electrically isolated;
Formed two extension conductive layers, this two extend conductive layer be electrically connected this light-emitting diode chip for backlight unit it The conductive layer of the first electrode unit and the conductive layer of the second electrode unit, make this first electrode unit and the second electricity Pole unit extends on the package carrier outside this reflector by respectively this extension conductive layer;And
On this reflector and encapsulating carrier plate, the predetermined position forming extension conductive layer forms an insulating barrier, This insulating barrier to should two extend conductive layers position.
2. according to the method for packing of light-emitting diode chip for backlight unit described in claim 1, it is characterised in that fixed this After step on luminous diode chip reflector in this groove, also comprise:
Filling printing opacity glue material is in this reflector, to seal this light-emitting diode chip for backlight unit.
3. according to the method for packing of the light-emitting diode chip for backlight unit described in claim 1, it is characterised in that this is first years old The conductive layer of the conductive layer of electrode unit and this second electrode unit extends to the base of light-emitting diode chip for backlight unit The bottom surface of plate, and electrically connect with corresponding respectively this extension conductive layer respectively.
4. according to the method for packing of the light-emitting diode chip for backlight unit described in claim 1, it is characterised in that
After etching the step of this encapsulating carrier plate, also comprise
Being formed and be respectively adjacent to the two of this groove and wear groove in this encapsulating carrier plate, wherein, respectively this wears the sidewall of groove Have one from this encapsulating carrier plate front toward the top incline of middle flare and one from this encapsulating carrier plate back side toward in Between the bottom incline of flare;
After this light-emitting diode chip for backlight unit fixed step on this reflector, also comprise
Form two lower conductiving layers being extended to respectively this bottom incline respectively by this encapsulating carrier plate back side;
Formation extends to respectively this top incline, and conductive layer on be connected with respectively this lower conductiving layer two;
It is electrically connected with the first electrode unit and second electricity of respectively conductive layer and this light-emitting diode chip for backlight unit on this Pole unit;And
Fill printing opacity glue material to be sealed by this light-emitting diode chip for backlight unit in this reflector.
5. according to the method for packing of the light-emitting diode chip for backlight unit described in claim 4, it is characterised in that this is first years old The conductive layer of the conductive layer of electrode unit and this second electrode unit extends to the bottom surface of substrate, and difference With corresponding respectively this conductive layer electrical connection on two.
6. according to the method for packing of the light-emitting diode chip for backlight unit described in claim 4 or 5, it is characterised in that being formed should Reflector with this two step wearing groove is:
Form a protective layer at the front of this encapsulating carrier plate and the back side;
Form a plurality of perforation running through respectively this protective layer, to define this groove and this two position wearing groove;
Etching this encapsulating carrier plate and form this groove and this two wears groove, wherein the opening of this groove is right more than it The perforation answered, makes this protective layer of part convexedly stretch in this groove;
Deposit a metal level in this encapsulating carrier plate front, wherein this groove and this protective layer adjacent not by Metal-clad;And
Remove this protective layer in front and the back side, and form this reflector being positioned in this groove.
7. according to the method for packing of the light-emitting diode chip for backlight unit described in claim 4, it is characterised in that form this reflection Form the step of insulating barrier after Bei, make this two lower conductiving layer at this encapsulating carrier plate back side and this lead on two Electric layer is correspondingly formed on this insulating barrier.
8., for an encapsulating structure for light emitting diode chip, comprise:
One encapsulating carrier plate, its upper surface has a groove;
One metal level, is positioned at groove except the residue part of adjacent recess opening part so that formation anti- Penetrate cup without departing from slot opening;
One light-emitting diode chip for backlight unit, has two electrode units, and utilizes an isolation material crystal-bonding adhesive fixed On this reflector so that the conductive layer of the first electrode unit of light-emitting diode chip for backlight unit and the second electrode unit Conductive layer electrically isolated with reflector;
Two extend conductive layer, are electrically connected conductive layer and second electrode unit of this first electrode unit Conductive layer, make this first electrode unit and the second electrode unit extend this by respectively this extension conductive layer anti- Penetrate on the package carrier of cup;
One insulating barrier, the predetermined position forming extension conductive layer on this reflector and encapsulating carrier plate, should Insulating barrier to should two extend conductive layers position;And
One printing opacity glue material, is filled in this reflector, to seal this light-emitting diode chip for backlight unit.
CN201210312384.1A 2009-02-19 2009-02-19 Light-emitting diode chip for backlight unit, preparation method and method for packing Expired - Fee Related CN102820411B (en)

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CN1973355A (en) * 2004-04-15 2007-05-30 泽斯吸气剂公司 Integrated getter for vacuum or inert gas packaged LEDs
CN101038949A (en) * 2006-03-14 2007-09-19 三星电机株式会社 Light emitting diode package

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CN101038949A (en) * 2006-03-14 2007-09-19 三星电机株式会社 Light emitting diode package

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