[go: up one dir, main page]

CN102817817A - Piezo-stack pump - Google Patents

Piezo-stack pump Download PDF

Info

Publication number
CN102817817A
CN102817817A CN2012101630038A CN201210163003A CN102817817A CN 102817817 A CN102817817 A CN 102817817A CN 2012101630038 A CN2012101630038 A CN 2012101630038A CN 201210163003 A CN201210163003 A CN 201210163003A CN 102817817 A CN102817817 A CN 102817817A
Authority
CN
China
Prior art keywords
pump
piezoelectric stack
vibrating
piston
upper cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012101630038A
Other languages
Chinese (zh)
Inventor
裘进浩
黄成志
季宏丽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing University of Aeronautics and Astronautics
Original Assignee
Nanjing University of Aeronautics and Astronautics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing University of Aeronautics and Astronautics filed Critical Nanjing University of Aeronautics and Astronautics
Priority to CN2012101630038A priority Critical patent/CN102817817A/en
Publication of CN102817817A publication Critical patent/CN102817817A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Reciprocating Pumps (AREA)

Abstract

本发明公开了一种压电叠堆泵,包括设有流体入口和流体出口的泵基座、泵体、泵上盖和容纳于泵体内的压电叠堆,压电叠堆的一端与泵基座之间设有一振动活塞,压电叠堆另一端与泵上盖之间设有一预紧活塞;所述的振动活塞粘贴在振动薄膜上,所述的振动薄膜与泵基座间形成工作液腔。本发明的压电叠堆泵中所有部件都集中到泵体中,节省了空间,各个部件装配方便,易于加工,工作液腔严格封闭,有效防止泄漏,提高了输出功率。可广泛应用在汽车发动机燃料供给及机器人领域。

Figure 201210163003

The invention discloses a piezoelectric stack pump, which comprises a pump base provided with a fluid inlet and a fluid outlet, a pump body, a pump upper cover and a piezoelectric stack accommodated in the pump body, one end of the piezoelectric stack is connected to the pump A vibrating piston is provided between the bases, and a pre-tightening piston is provided between the other end of the piezoelectric stack and the upper cover of the pump; the vibrating piston is pasted on the vibrating film, and a working force is formed between the vibrating film and the pump base. liquid cavity. All the components of the piezoelectric stack pump of the present invention are integrated into the pump body, saving space, each component is convenient to assemble, easy to process, and the working liquid chamber is strictly sealed to effectively prevent leakage and increase the output power. It can be widely used in the fields of automobile engine fuel supply and robots.

Figure 201210163003

Description

一种压电叠堆泵A piezoelectric stack pump

技术领域 technical field

本发明涉及一种压电泵,尤其涉及一种有阀式压电叠堆泵。 The invention relates to a piezoelectric pump, in particular to a valved piezoelectric stack pump.

  the

背景技术 Background technique

压电泵的研究始于20世纪80年代,它是基于压电驱动原理设计制造的流体泵。压电泵不需要附加驱动电机,而是利用压电材料的逆压电效应,给压电叠堆施加交流电信号,使压电叠堆产生伸缩,再由伸缩变形产生泵腔容积的变化,配合进出口单向阀控制流体方向,从而实现流体输送。由于传统的压电泵多为压电双晶片形式,此类形式的压电泵的优点是结构简单,体积小,重量轻,耗能低,无电磁干扰且成本低,而被广泛应用到制药,医疗,微量试剂配比和化学分析等领域。但是,压电片式或压电双晶片式的压电泵输出压力小,承载能力弱,不能适应于现阶段对压电泵的更高要求。 The research on piezoelectric pumps began in the 1980s. It is a fluid pump designed and manufactured based on the principle of piezoelectric drive. The piezoelectric pump does not need an additional drive motor, but uses the inverse piezoelectric effect of the piezoelectric material to apply an alternating current signal to the piezoelectric stack to cause the piezoelectric stack to expand and contract, and then the volume of the pump chamber changes due to the expansion and contraction deformation. Cooperate with the import and export check valve to control the direction of the fluid, so as to realize the fluid delivery. Since traditional piezoelectric pumps are mostly in the form of piezoelectric bimorphs, the advantages of this type of piezoelectric pump are simple structure, small size, light weight, low energy consumption, no electromagnetic interference and low cost, and are widely used in pharmaceutical , Medical, trace reagent ratio and chemical analysis and other fields. However, piezoelectric pumps of the piezoelectric sheet type or piezoelectric bimorph type have low output pressure and weak carrying capacity, which cannot meet the higher requirements for piezoelectric pumps at the present stage.

  the

发明内容 Contents of the invention

技术问题technical problem

本发明要解决的技术问题是提供一种结构紧凑、输出性能好的有阀式压电叠堆泵。 The technical problem to be solved by the invention is to provide a valve-type piezoelectric stack pump with compact structure and good output performance.

技术方案Technical solutions

为了解决上述的技术问题,本发明的压电叠堆泵包括设有流体入口和流体出口的泵基座、泵体、泵上盖和容纳于泵体内的压电叠堆,所述的压电叠堆的一端与泵基座之间设有一振动活塞,压电叠堆另一端与泵上盖之间设有一预紧活塞;所述的振动活塞粘贴在振动薄膜上,所述的振动薄膜与泵基座间形成工作液腔。所述的泵基座、泵体和泵上盖形成一个封闭的空间,压电叠堆容纳于该空间内;所述的泵基座上加工有一个圆形凹腔,振动薄膜将该圆形凹腔密封形成工作液腔。 In order to solve the above-mentioned technical problems, the piezoelectric stack pump of the present invention includes a pump base provided with a fluid inlet and a fluid outlet, a pump body, a pump upper cover, and a piezoelectric stack housed in the pump body. A vibrating piston is provided between one end of the stack and the pump base, and a pre-tightening piston is provided between the other end of the piezoelectric stack and the pump upper cover; the vibrating piston is pasted on the vibrating film, and the vibrating film and the A working fluid cavity is formed between the pump bases. The pump base, the pump body and the pump upper cover form a closed space, and the piezoelectric stack is accommodated in the space; the pump base is processed with a circular concave cavity, and the vibrating membrane vibrates the circular cavity. The concave cavity is sealed to form a working fluid cavity.

所述的振动薄膜设置于压电叠堆和泵基座之间,为了保证振动薄膜与所述圆形凹腔之间的密封性,通过一固定在另一圆形凹腔内的压环将振动薄膜压紧。 The vibrating membrane is arranged between the piezoelectric stack and the pump base. In order to ensure the sealing between the vibrating membrane and the circular concave cavity, a pressure ring fixed in another circular concave cavity will The vibrating membrane is compressed.

更进一步地,所述的泵上盖上设置有一对预紧活塞施加预紧力的预紧螺钉,由于预紧活塞同时又与压电叠堆接触,所以当预紧螺钉对预紧活塞施加预紧力时,也即对压电叠堆施加预紧力,通过预紧螺钉的微调可实现对压电叠堆预紧程度的微调。所述的泵上盖亦可加工具有一个圆形凹腔,预紧活塞位于该圆形凹腔内。一般地,本技术方案的压电叠堆泵中,泵体为具有圆柱形空腔的中空结构,并且预紧活塞的直径略小于泵体的内腔直径和泵上盖圆形凹腔的直径,以保证预紧活塞周向固定但可以上下移动。 Furthermore, the pump upper cover is provided with a pair of preload screws for applying preload to the preload piston. Since the preload piston is in contact with the piezoelectric stack at the same time, when the preload screw applies preload When the tightening force is applied, that is, the pre-tightening force is applied to the piezoelectric stack, and the fine-tuning of the pre-tightening degree of the piezoelectric stack can be realized by fine-tuning the pre-tightening screw. The pump upper cover can also be processed with a circular concave cavity, and the pre-tightening piston is located in the circular concave cavity. Generally, in the piezoelectric stack pump of this technical solution, the pump body is a hollow structure with a cylindrical cavity, and the diameter of the preloaded piston is slightly smaller than the diameter of the inner cavity of the pump body and the diameter of the circular cavity of the pump upper cover. , to ensure that the preload piston is fixed circumferentially but can move up and down.

泵体与泵基座和泵上盖之间都通过螺钉连接,相互之间的间隙用密封材料进行填充以保证压电泵整体的密封性。 The pump body, the pump base and the pump upper cover are connected by screws, and the gaps between them are filled with sealing materials to ensure the overall sealing of the piezoelectric pump.

为了有利于流体在压电泵内的流动,所述的流体入口设置有入口单向阀,所述的流体出口设置有出口单向阀。 In order to facilitate the flow of fluid in the piezoelectric pump, the fluid inlet is provided with an inlet one-way valve, and the fluid outlet is provided with an outlet one-way valve.

本技术方案的压电叠堆泵中,振动薄膜与振动活塞粘贴在一起,在外加交流电信号的作用下,压电叠堆带动振动活塞,振动活塞再带动振动薄膜运动,振动薄膜的形变实现泵腔即工作液腔内部容积的变化,从而泵腔内外产生压力差,由进液口单向阀和出液口单向阀控制着液体的进出。当工作液腔容积减小时,工作液腔内压强大于外界压强,则出液口被动阀打开,流体流出;当工作液腔容积增大时,工作液腔内压强小于外界压强,则进液口被动阀打开,流体流入,如此循环以实现液体的连续的单向流动。 In the piezoelectric stack pump of this technical solution, the vibrating membrane and the vibrating piston are pasted together. Under the action of an external AC signal, the piezoelectric stack drives the vibrating piston, and the vibrating piston then drives the vibrating membrane to move, and the deformation of the vibrating membrane is realized. The pump cavity is the change of the internal volume of the working liquid cavity, so that the pressure difference between the inside and outside of the pump cavity is generated, and the liquid inlet and outlet are controlled by the one-way valve at the liquid inlet and the one-way valve at the liquid outlet. When the volume of the working fluid chamber decreases and the pressure inside the working fluid chamber is greater than the external pressure, the passive valve of the liquid outlet opens and the fluid flows out; when the volume of the working liquid chamber increases, the pressure inside the working liquid chamber is The passive valve opens and fluid flows in, and so on to achieve a continuous one-way flow of fluid.

  the

有益效果Beneficial effect

本发明的压电叠堆中,所有的部件都能够集中到泵体中,节省了设计所需的空间,非常紧凑,且各个部件装配方便,易于加工,工作液腔严格封闭,有效防止泄漏,提高了输出功率,克服了双晶片式压电泵输出压力小,承载能力相对较弱的问题,输出压力可达5bar,最大输出流量可达350ml/min。 综合本发明的输出压力大,体积小,承载能力大的优点,本发明的压电叠堆泵可广泛应用在汽车发动机燃料供给及机器人领域,尤其是航空航天领域,当其连接上液压缸之类的作动器,便能将压力流体输出转化为力输出,推动飞行器舵面运动。 In the piezoelectric stack of the present invention, all components can be integrated into the pump body, which saves the space required for design, is very compact, and each component is easy to assemble and easy to process. The working fluid chamber is strictly sealed to effectively prevent leakage. The output power is improved, and the problem of low output pressure and relatively weak carrying capacity of the double-chip piezoelectric pump is overcome. The output pressure can reach 5bar, and the maximum output flow can reach 350ml/min. Integrating the advantages of large output pressure, small volume and large carrying capacity of the present invention, the piezoelectric stack pump of the present invention can be widely used in the fields of automobile engine fuel supply and robotics, especially in the field of aerospace, when it is connected to the hydraulic cylinder Such actuators can convert the pressure fluid output into force output, and push the rudder surface of the aircraft to move.

  the

说明书附图Instructions attached

图1是本发明的一个实施例的结构示意图; Fig. 1 is the structural representation of an embodiment of the present invention;

图2是本发明的一个实施例的泵基座结构示意图; Fig. 2 is a schematic structural view of a pump base according to an embodiment of the present invention;

图3是本发明的一个实施例的泵上盖结构示意图。 Fig. 3 is a schematic diagram of the structure of the upper cover of the pump according to an embodiment of the present invention.

  the

具体实施方式 Detailed ways

如图1、图2所示,本实施例的压电叠堆泵包括设有流体入口13和流体出口12的泵基座11、泵体6、泵上盖3和容纳于泵体6内的压电叠堆5,流体入口13设有入口单向阀13,流体出口12处设有出口单向阀12;泵体6具有圆柱形空腔,压电叠堆5容纳在该圆柱形空腔内,相应地,压电叠堆5也呈圆柱形。压电叠堆5的一端与泵基座11之间设有一振动活塞8,压电叠堆5另一端与泵上盖3之间设有一预紧活塞4;所述的振动活塞8粘贴在振动薄膜10上,所述的振动薄膜10与泵基座11间形成工作液腔14。 As shown in Fig. 1 and Fig. 2, the piezoelectric stack pump of this embodiment includes a pump base 11 provided with a fluid inlet 13 and a fluid outlet 12, a pump body 6, a pump upper cover 3 and a pump housed in the pump body 6. The piezoelectric stack 5, the fluid inlet 13 is provided with an inlet check valve 13, and the fluid outlet 12 is provided with an outlet check valve 12; the pump body 6 has a cylindrical cavity, and the piezoelectric stack 5 is accommodated in the cylindrical cavity Correspondingly, the piezoelectric stack 5 is also cylindrical. A vibrating piston 8 is provided between one end of the piezoelectric stack 5 and the pump base 11, and a preloaded piston 4 is provided between the other end of the piezoelectric stack 5 and the pump upper cover 3; the vibrating piston 8 is pasted on the vibrating On the membrane 10 , a working fluid cavity 14 is formed between the vibration membrane 10 and the pump base 11 .

具体地,所述的振动薄膜10设置于振动活塞8与泵基座11之间,并且通过一压环9压紧固定。本实施例中,泵基座11上加工有两个圆形凹腔,其中一个圆形凹腔直径为35mm,高度为0.5mm,振动薄膜10覆盖该圆形凹腔的开口处从而将这个腔体密封形成工作液腔,即工作液腔14为由振动薄膜10和泵基座11上的圆形凹腔封密组成,并且与流体出入口相连通,工作液腔的高度即为圆形凹腔的高度。另一个圆形凹腔直径为43 mm,高度为5mm,压环9与这个圆形凹腔配合而将振动薄膜10压紧,所述工作液腔与这个圆形凹腔之间填充密封材料如生料带。如图1所示,泵体6下端与泵基座11通过四个M6X25内六角圆柱头螺钉7相连。 Specifically, the vibrating membrane 10 is arranged between the vibrating piston 8 and the pump base 11 , and is pressed and fixed by a pressure ring 9 . In this embodiment, two circular concave cavities are processed on the pump base 11, one of which has a diameter of 35 mm and a height of 0.5 mm. The vibrating membrane 10 covers the opening of the circular concave cavity so that the cavity The body seal forms the working fluid cavity, that is, the working fluid cavity 14 is composed of the vibrating membrane 10 and the circular concave cavity seal on the pump base 11, and is connected with the fluid inlet and outlet. The height of the working fluid cavity is the circular concave cavity the height of. Another circular concave cavity has a diameter of 43 mm and a height of 5 mm. The pressure ring 9 cooperates with this circular concave cavity to compress the vibrating film 10. The sealing material such as Raw tape. As shown in FIG. 1 , the lower end of the pump body 6 is connected to the pump base 11 through four M6X25 hex socket head cap screws 7 .

如图1、图3所示,所述的泵上盖3上设置有一个对预紧活塞4施加预紧力的M10X20内六角圆柱头螺钉,即预紧螺钉1,通过预紧螺钉1的微调可实现对压电叠堆5预紧程度的微调,从而得到不同的泵工作参数。相应地,如图2所示,泵上盖3设有供预紧螺钉1贯穿的开孔31,泵上盖3朝向泵体6的一侧为一圆形凹腔32,用于容纳预紧活塞4,预紧活塞4直径略小于泵体的直径,即预紧活塞4的整体位置通过预紧螺钉1和压电叠堆5的配合而相对固定,但又可以因振动活塞8的作用而轴向运动。泵上盖3通过两个M6X30内六角圆柱头螺钉2与泵体连接。 As shown in Fig. 1 and Fig. 3, the pump upper cover 3 is provided with a M10X20 hexagon socket head cap screw which exerts a pre-tightening force on the pre-tightening piston 4, that is, the pre-tightening screw 1, and through the fine-tuning of the pre-tightening screw 1 The fine adjustment of the preload degree of the piezoelectric stack 5 can be realized, so as to obtain different pump working parameters. Correspondingly, as shown in Figure 2, the pump upper cover 3 is provided with an opening 31 for the pre-tightening screw 1 to pass through, and the side of the pump upper cover 3 facing the pump body 6 is a circular cavity 32 for accommodating the pre-tightening screw. Piston 4, the diameter of the preloaded piston 4 is slightly smaller than the diameter of the pump body, that is, the overall position of the preloaded piston 4 is relatively fixed through the cooperation of the preloaded screw 1 and the piezoelectric stack 5, but it can be adjusted due to the action of the vibrating piston 8 axial movement. The pump upper cover 3 is connected with the pump body through two M6X30 socket head cap screws 2 .

本实施例中,压电叠堆5直径为10mm,长度为90mm,工作时电源可调电压为0-150V,频率范围40-200Hz交流电。以水为实验工作介质,泵的输出压力最大可达500Kpa。 In this embodiment, the piezoelectric stack 5 has a diameter of 10 mm and a length of 90 mm. During operation, the adjustable voltage of the power supply is 0-150 V, and the frequency range is 40-200 Hz alternating current. With water as the experimental working medium, the maximum output pressure of the pump can reach 500Kpa.

本实施例中的泵体6、泵基座11和泵上盖3使用铝或有机玻璃加工而成,各部件之间的间隙均进行密封;振动薄膜10为厚度0.2mm、直径43mm铜片,亦可以采用其它类型的弹性材料制成。 The pump body 6, the pump base 11 and the pump upper cover 3 in this embodiment are made of aluminum or plexiglass, and the gaps between the parts are sealed; the vibrating membrane 10 is a copper sheet with a thickness of 0.2 mm and a diameter of 43 mm. It can also be made of other types of elastic materials.

本实施例的压电叠堆泵工作时,在外加交流电信号的作用下,压电叠堆5的叠堆带动振动活塞8,振动活塞8带动振动薄膜10上下运动使振动薄膜10产生形变,实现工作液腔内部容积的变化,从而泵体6内外产生压力差,由进液口单向阀和出液口单向阀控制着液体的进出。当工作液腔容积减小时,工作液腔内压强大于外界压强,则流体出口12的被动阀打开,流体流出;当工作液腔容积增大时,工作液腔内压强小于外界压强,则流体进口13的被动阀打开,流体流入,如此循环以实现液体的连续的单向流动。 When the piezoelectric stack pump in this embodiment is working, under the action of an external AC signal, the piezoelectric stack 5 drives the vibrating piston 8, and the vibrating piston 8 drives the vibrating membrane 10 to move up and down to deform the vibrating membrane 10. Realize the change of the internal volume of the working liquid chamber, so that the pressure difference between the inside and outside of the pump body 6 is generated, and the liquid in and out is controlled by the one-way valve at the liquid inlet and the one-way valve at the liquid outlet. When the volume of the working fluid chamber decreases, the pressure inside the working fluid chamber is greater than the external pressure, and the passive valve of the fluid outlet 12 opens, and the fluid flows out; when the volume of the working fluid chamber increases, the pressure inside the working fluid chamber is The passive valve of 13 is opened, and the fluid flows in, and so circulates to realize the continuous one-way flow of liquid.

Claims (7)

1.一种压电叠堆泵,包括设有流体入口(13)和流体出口(12)的泵基座(11)、泵体(6)、泵上盖(3)和容纳于泵体(6)内的压电叠堆(5),其特征在于,压电叠堆(5)的一端与泵基座(11)之间设有一振动活塞(8),压电叠堆(5)另一端与泵上盖(3)之间设有一预紧活塞(4);所述的振动活塞(8)粘贴在振动薄膜(10)上,所述的振动薄膜(10)与泵基座(11)间形成工作液腔(14)。 1. A piezoelectric stack pump, including a pump base (11) with a fluid inlet (13) and a fluid outlet (12), a pump body (6), a pump cover (3) and a pump body ( 6) The piezoelectric stack (5) inside is characterized in that a vibrating piston (8) is provided between one end of the piezoelectric stack (5) and the pump base (11), and the other end of the piezoelectric stack (5) There is a pre-tightening piston (4) between one end and the pump upper cover (3); the vibrating piston (8) is pasted on the vibrating film (10), and the vibrating film (10) and the pump base (11 ) to form a working liquid chamber (14). 2.如权利要求1所述的压电叠堆泵,其特征在于,所述的振动薄膜(10)设置于振动活塞(8)与泵基座(11)之间,并且通过一压环(9)压紧固定。 2. The piezoelectric stack pump according to claim 1, characterized in that, the vibrating membrane (10) is arranged between the vibrating piston (8) and the pump base (11), and passes through a pressure ring ( 9) Press and fix. 3.如权利要求1所述的压电叠堆泵,其特征在于,所述的泵上盖(3)上设置有一对预紧活塞(4)施加预紧力的预紧螺钉(1)。 3. The piezoelectric stack pump according to claim 1, characterized in that, the pump upper cover (3) is provided with a pair of pre-tightening pistons (4) to apply pre-tightening screws (1) for pre-tightening force. 4.如权利要求1或2或3所述的压电叠堆泵,其特征在于,所述的泵体(6)为具有圆柱形空腔的泵体。 4. The piezoelectric stack pump according to claim 1, 2 or 3, characterized in that the pump body (6) is a pump body with a cylindrical cavity. 5.如权利要求4所述的压电叠堆泵,其特征在于,所述的预紧活塞(4)直径小于泵体(6)内腔直径。 5. The piezoelectric stack pump according to claim 4, characterized in that, the diameter of the preloaded piston (4) is smaller than that of the inner cavity of the pump body (6). 6.如权利要求1所述的压电叠堆泵,其特征在于,所述的泵体(6)与泵基座(11)和泵上盖(3)之间通过螺钉连接。 6. The piezoelectric stack pump according to claim 1, characterized in that, the pump body (6), the pump base (11) and the pump upper cover (3) are connected by screws. 7.如权利要求1所述的压电叠堆泵,其特征在于,所述的流体入口(13)设置有入口单向阀,所述的流体出口(12)设置有出口单向阀。 7. The piezoelectric stack pump according to claim 1, characterized in that, the fluid inlet (13) is provided with an inlet check valve, and the fluid outlet (12) is provided with an outlet check valve.
CN2012101630038A 2012-05-23 2012-05-23 Piezo-stack pump Pending CN102817817A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012101630038A CN102817817A (en) 2012-05-23 2012-05-23 Piezo-stack pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2012101630038A CN102817817A (en) 2012-05-23 2012-05-23 Piezo-stack pump

Publications (1)

Publication Number Publication Date
CN102817817A true CN102817817A (en) 2012-12-12

Family

ID=47302173

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2012101630038A Pending CN102817817A (en) 2012-05-23 2012-05-23 Piezo-stack pump

Country Status (1)

Country Link
CN (1) CN102817817A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106401921A (en) * 2016-11-08 2017-02-15 绍兴职业技术学院 Micro piezoelectric underwater propulsion robot
CN108591584A (en) * 2018-05-31 2018-09-28 温州大学 A kind of Piexoelectric actuator of control rotary valve
CN109821093A (en) * 2019-03-01 2019-05-31 浙江师范大学 A piezoelectric stack-driven infusion device
CN110259670A (en) * 2019-06-13 2019-09-20 哈尔滨工业大学 a drive
CN112196772A (en) * 2020-09-29 2021-01-08 长春工业大学 Piezoelectric stack pump with double-rhombus mechanism for amplification
WO2023092934A1 (en) * 2021-11-25 2023-06-01 华为技术有限公司 Microfluidic apparatus and electronic device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10163662A1 (en) * 2001-12-21 2003-07-10 Klemens Schwarzer Displacement dosing pump has leakage collection chamber for hydraulic fluid from working chamber sealed from surroundings, connected to working chamber by return line, non-return valve
CN101216027A (en) * 2008-01-11 2008-07-09 吉林大学 Piezo stack pump
DE102007030043A1 (en) * 2007-06-26 2009-01-02 Stefan Barten Piezoelectrically operated dosing pump for conveying and dosing small liquid quantity with higher pressure, has movable piston, which is assigned to piezoelectric stack translator, which varies in length in dependence of applied voltage
US20090311116A1 (en) * 2008-06-16 2009-12-17 Gm Global Technology Operations, Inc. High flow piezoelectric pump
CN101922442A (en) * 2010-03-05 2010-12-22 吉林大学 Dual-chamber dual-drive piezoelectric stack pump
CN102192135A (en) * 2011-06-24 2011-09-21 浙江师范大学 Piezoelectric stack pump provided with sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10163662A1 (en) * 2001-12-21 2003-07-10 Klemens Schwarzer Displacement dosing pump has leakage collection chamber for hydraulic fluid from working chamber sealed from surroundings, connected to working chamber by return line, non-return valve
DE102007030043A1 (en) * 2007-06-26 2009-01-02 Stefan Barten Piezoelectrically operated dosing pump for conveying and dosing small liquid quantity with higher pressure, has movable piston, which is assigned to piezoelectric stack translator, which varies in length in dependence of applied voltage
CN101216027A (en) * 2008-01-11 2008-07-09 吉林大学 Piezo stack pump
US20090311116A1 (en) * 2008-06-16 2009-12-17 Gm Global Technology Operations, Inc. High flow piezoelectric pump
CN101922442A (en) * 2010-03-05 2010-12-22 吉林大学 Dual-chamber dual-drive piezoelectric stack pump
CN102192135A (en) * 2011-06-24 2011-09-21 浙江师范大学 Piezoelectric stack pump provided with sensor

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106401921A (en) * 2016-11-08 2017-02-15 绍兴职业技术学院 Micro piezoelectric underwater propulsion robot
CN106401921B (en) * 2016-11-08 2018-05-29 绍兴职业技术学院 A kind of miniature piezoelectric underwater propulsion robot
CN108591584A (en) * 2018-05-31 2018-09-28 温州大学 A kind of Piexoelectric actuator of control rotary valve
CN108591584B (en) * 2018-05-31 2024-04-12 温州大学 Piezoelectric driving device for controlling rotary valve
CN109821093A (en) * 2019-03-01 2019-05-31 浙江师范大学 A piezoelectric stack-driven infusion device
CN109821093B (en) * 2019-03-01 2021-03-12 浙江师范大学 Piezoelectric stack driven infusion set
CN110259670A (en) * 2019-06-13 2019-09-20 哈尔滨工业大学 a drive
CN112196772A (en) * 2020-09-29 2021-01-08 长春工业大学 Piezoelectric stack pump with double-rhombus mechanism for amplification
WO2023092934A1 (en) * 2021-11-25 2023-06-01 华为技术有限公司 Microfluidic apparatus and electronic device

Similar Documents

Publication Publication Date Title
CN103899518B (en) Digital hydraulic pump based on Piezoelectric Ceramic
CN102817817A (en) Piezo-stack pump
CN101846059B (en) Self-adaptive piezoelectric pump with active valve
CN204436756U (en) A kind of mode of resonance piezoelectric pump based on inertial drive
CN102691693A (en) Precision stepping hydraulic cylinder driven by piezo-electricity wafer
CN107091256B (en) An electro-hydraulic actuator driven by active valve distribution and multi-smart materials
CN104832404A (en) Piezoelectric micropump based on PDMS (Polydimethylsiloxane)
CN101354052A (en) Piezoelectric hydraulic linear motor
CN206448925U (en) Semi-flexible valve piezoelectric pump
CN105386966A (en) Micro diaphragm pump
CN107524584A (en) New more oscillator piezoelectric pumps
CN203404051U (en) Cantilever type piezoelectric diaphragm pump
CN107420291A (en) A kind of laminated film piezoelectric micropump based on variable elasticity modulus
CN106762566A (en) Semi-flexible valve piezoelectric pump and its method of work
CN104088778A (en) Digital hydraulic pump based on Terfenol-D drive
CN105089994B (en) A Valveless Piezoelectric Pump with Dual Cantilever Vibrators
CN201723421U (en) Piezoelectric pump for self-adapting active valve
CN108204355A (en) A kind of 3 points of clamped membrane valve piezoelectric pumps
CN102966521A (en) Piezo-stack pump capable of driving double-piston in tandem connection
CN100585180C (en) A High Frequency Inertial Check Valve Hydraulic Pump Based on Piezoelectric Ceramics
JPS61171891A (en) Piezo-electric pump
CN112081729B (en) Resonant piezoelectric stack pump with slide valve
CN203670126U (en) Magnetostriction type micropump
CN204755273U (en) Curved complex excitation active type water -jet propulsion system is indulged to paster sandwich
CN201190661Y (en) A valveless piezoelectric pump

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20121212