CN102817055B - Ultrathin palladium plating and gold plating process for lead wire frame - Google Patents
Ultrathin palladium plating and gold plating process for lead wire frame Download PDFInfo
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Abstract
本发明公开了一种引线框超薄镀钯镀金工艺,包括以下步骤:电解除油、引线框架基体活化处理、电沉积镀镍层、镍层活化处理、电沉积镀钯薄层、高频脉冲电沉积镀金薄层:将镀钯后的引线框架基体放入金镀液中电沉积10~20s,然后用金回收水清洗再吹干、过金保护,即可。本发明在确保测试试验通过的前提下,形成超薄的金、钯镀层,电镀的钯层厚度为0.02~0.1um,远低于现有工艺电镀的钯层厚度2~5um,电镀的金层厚度为0.003~0.01um,远低于现有工艺电镀的金层厚度0.3~1.2um,保证原有钯镀层和金镀层的优良性能的同时,减少了金、钯的消耗,极大的降低贵金属使用,有效的提高金属利用率,节约成本。The invention discloses an ultra-thin palladium-plated gold-plated process for a lead frame, which comprises the following steps: electrolytic degreasing, lead frame substrate activation treatment, electrodeposited nickel layer, nickel layer activation treatment, electrodeposited palladium thin layer, high-frequency pulse Electrodeposition of gold-plated thin layer: Put the palladium-plated lead frame substrate into the gold plating solution for electrodeposition for 10-20 seconds, then wash with gold recovery water, dry it, and protect it with gold. The present invention forms an ultra-thin gold and palladium coating on the premise of ensuring that the test is passed. The thickness of the electroplated palladium layer is 0.02-0.1um, which is far lower than the thickness of the electroplated palladium layer of the existing process of 2-5um. The electroplated gold layer The thickness is 0.003-0.01um, which is far lower than the thickness of the gold layer electroplated by the existing process of 0.3-1.2um. While ensuring the excellent performance of the original palladium coating and gold coating, it reduces the consumption of gold and palladium, and greatly reduces the cost of precious metals. Use, effectively improve metal utilization and save costs.
Description
【技术领域】 【Technical field】
本发明涉及一种引线框电镀工艺,特别地涉及一种引线框超薄镀钯镀金工艺,属于集成电路芯片加工制造技术领域。The invention relates to an electroplating process for a lead frame, in particular to an ultra-thin palladium-plating and gold-plating process for a lead frame, and belongs to the technical field of integrated circuit chip processing and manufacturing.
【背景技术】 【Background technique】
金具有极高的化学稳定性,不溶于普通酸,只溶于王水,因此金镀层耐蚀性强,有良好的抗变色能力,并且镀层延展性好,易抛光,故常用作装饰性镀层,如镀首饰、钟表零件、艺术品等。金的导电性好,易焊接,耐高温,金的导热率为银的70%。因而广泛用于精密仪器仪表、印刷版、集成电路、军用电子管壳、电接点等要求电参数性能长期稳定的零件的电镀。Gold has extremely high chemical stability, insoluble in common acids, only soluble in aqua regia, so the gold coating has strong corrosion resistance, good anti-tarnish ability, and the coating has good ductility and is easy to polish, so it is often used as a decorative coating , such as plated jewelry, watch parts, artwork, etc. Gold has good electrical conductivity, is easy to weld, and can withstand high temperatures. The thermal conductivity of gold is 70% of that of silver. Therefore, it is widely used in the electroplating of precision instruments, printed plates, integrated circuits, military electronic tube shells, electrical contacts and other parts that require long-term stable electrical parameters.
钯是一种优良的电接触材料(电阻系数为0.099Ωmm/m)。镀层厚度一般是2~5μm。钯镀层焊接性好,钯镀层是一种有效的扩散阻挡层,高频元件往往用钯做中间层,以防止基体金属向外表面扩散。钯镀层的主要缺点是对某些有机物特别敏感,表面易形成“褐粉”,使接触电阻大大增加。Palladium is an excellent electrical contact material (resistivity of 0.099Ωmm/m). The coating thickness is generally 2 to 5 μm. The palladium coating has good weldability, and the palladium coating is an effective diffusion barrier layer. High-frequency components often use palladium as the middle layer to prevent the base metal from diffusing to the outer surface. The main disadvantage of palladium coating is that it is particularly sensitive to certain organic substances, and "brown powder" is easily formed on the surface, which greatly increases the contact resistance.
采用现有工艺的引线框架,钯镀层厚度为2~5μm,金镀层厚度要达到0.3-1.2μm以上才能满足客户的产品试验要求,通常增加金/钯层厚度可以提高引线框架的质量和可靠性。但是,随着贵金属价格的不断上涨,成本也随之提高。这样,就在技术上面临着如何既能降低金/钯层厚度节省成本又保持甚至提高引线框架的质量和可靠性的挑战。For the lead frame using the existing technology, the thickness of the palladium coating is 2-5 μm, and the thickness of the gold coating must reach 0.3-1.2 μm or more to meet the customer’s product test requirements. Usually, increasing the thickness of the gold/palladium layer can improve the quality and reliability of the lead frame. . However, as the price of precious metals continues to rise, so do costs. In this way, it is technically faced with the challenge of how to reduce the thickness of the gold/palladium layer to save costs while maintaining or even improving the quality and reliability of the lead frame.
【发明内容】 【Content of invention】
本发明要解决的技术问题是克服现有技术的不足,提供一种保证原有钯镀层和金镀层的优良性能的同时减小钯镀层和金镀层厚度、降低贵金属消耗,节约成本的引线框超薄镀钯镀金工艺。The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art, and provide a lead frame ultra-thin lead frame that ensures the excellent performance of the original palladium coating and gold coating, reduces the thickness of the palladium coating and the gold coating, reduces the consumption of precious metals, and saves costs. Thin palladium-plated gold-plated process.
本发明为解决上述技术问题,采用以下技术方案:In order to solve the problems of the technologies described above, the present invention adopts the following technical solutions:
一种引线框超薄镀钯镀金工艺,其特征在于包括以下步骤:A lead frame ultra-thin palladium-plated gold-plated process is characterized in that comprising the following steps:
a、电解除油:将引线框架基体放入电解溶液中电解20~30s,然后用自来水清洗吹干;a. Electrolytic degreasing: Put the lead frame substrate into the electrolytic solution for 20-30 seconds, then wash and dry with tap water;
b、引线框架基体活化处理:将电解除油的引线框架基体放入室温的活化溶液中浸泡10~20s,然后用自来水清洗,再用去离子水清洗吹干;b. Activation treatment of the lead frame substrate: soak the electrolytically degreased lead frame substrate in an activation solution at room temperature for 10 to 20 seconds, then wash it with tap water, and then wash it with deionized water and dry it;
c、电沉积镀镍层:将活化处理过的引线框架基体放入镍镀液中电沉积50~60s,然后用去离子水清洗,吹干引线框架;c. Electrodeposited nickel plating layer: Put the activated lead frame substrate into the nickel plating solution for electrodeposition for 50-60 seconds, then wash it with deionized water, and dry the lead frame;
d、镍层活化处理:将镀镍层的引线框架基体放入镍活化溶液中浸泡5-12s,然后用去离子水清洗再吹干;d. Nickel layer activation treatment: put the nickel-plated lead frame substrate into the nickel activation solution and soak for 5-12s, then clean it with deionized water and dry it;
e、电沉积镀钯薄层:将镍活化后的引线框架基体放入钯镀液中电沉积10~20s,然后用去离子水清洗再吹干;e. Electrodeposition of palladium-plated thin layer: put the nickel-activated lead frame substrate into the palladium plating solution for electrodeposition for 10-20 seconds, then wash it with deionized water and dry it;
f、高频脉冲电沉积镀金薄层:将镀钯后的引线框架基体放入金镀液中电沉积10~20s,然后用金回收水清洗再吹干;f. High-frequency pulse electrodeposition gold-plated thin layer: put the palladium-plated lead frame substrate into the gold plating solution for electrodeposition for 10-20 seconds, then wash it with gold recovery water and dry it;
g、过金保护:将镀金的引线框架放入金保护溶液中浸泡5-20s,然后用去离子水清洗吹干,即得超薄钯镀层金镀层的引线框架。g. Over-gold protection: Put the gold-plated lead frame into the gold protection solution and soak for 5-20s, then wash and dry it with deionized water, and obtain the lead frame with ultra-thin palladium-coated gold-coated layer.
如上所述的引线框超薄镀钯镀金工艺,其特征在于所述的电解溶液含碱性脱脂剂,所述的碱性脱脂剂由除油粉和湿润剂组成,所述的除油粉的含量为60~80g/L,电解的电流密度为5~25安培/平方分米,电解溶液的温度为50~60℃。The ultra-thin palladium-plated gold-plating process for lead frames as described above is characterized in that the electrolytic solution contains an alkaline degreasing agent, and the alkaline degreasing agent is composed of degreasing powder and a wetting agent, and the degreasing powder is composed of The content is 60-80g/L, the current density of electrolysis is 5-25 amps/dm2, and the temperature of the electrolytic solution is 50-60°C.
上述碱性脱脂剂的商品名为Ronaclean DLF,市售可得。The trade name of the above-mentioned alkaline degreasing agent is Ronaclean DLF, which is commercially available.
如上所述的引线框超薄镀钯镀金工艺,其特征在于所述的活化溶液为酸性除氧化剂,含开缸盐80~120g/L,所述的开缸盐为导电活化盐。The ultra-thin palladium-plating and gold-plating process for lead frames as described above is characterized in that the activation solution is an acidic oxidizing agent containing 80-120 g/L of a cracking salt, and the cracking salt is a conductive activation salt.
上述酸性氧化剂所含开缸盐的商品名Actronal 988开缸盐,市售可得。The trade name of the crack salt contained in the above-mentioned acidic oxidizing agent is Actronal 988 crack salt, which is commercially available.
如上所述的引线框超薄镀钯镀金工艺,其特征在于所述镍镀液含氨基磺酸鎳50~70g/L,含硼酸35~55g/L,镍镀液温度为50~60℃,pH值为3.5~4.5,电镀的电流密度为5~25安培/平方分米。The above-mentioned ultra-thin palladium-plated gold-plated process for lead frames is characterized in that the nickel plating solution contains 50-70 g/L of nickel sulfamate, 35-55 g/L of boric acid, and the temperature of the nickel plating solution is 50-60 ° C. The pH value is 3.5-4.5, and the current density of electroplating is 5-25 ampere/square decimeter.
如上所述的引线框超薄镀钯镀金工艺,其特征在于所述的电镀镍层的厚度为0.5~2μm。The above-mentioned ultra-thin palladium-plating gold-plating process for lead frame is characterized in that the thickness of the electroplated nickel layer is 0.5-2 μm.
如上所述的引线框超薄镀钯镀金工艺,其特征在于所述的镍活化溶液含镍活化剂100~200ml/L,含硫酸10~30ml/L,镍活化溶液的温度为室温。The ultra-thin palladium-plating and gold-plating process for lead frames as described above is characterized in that the nickel activation solution contains 100-200ml/L of nickel activator, 10-30ml/L of sulfuric acid, and the temperature of the nickel activation solution is room temperature.
本发明所用镍活化剂的商品名为PC-1镍活化剂,市售可得。The trade name of the nickel activator used in the present invention is PC-1 nickel activator, which is commercially available.
如上所述的引线框超薄镀钯镀金工艺,其特征在于所述的钯镀液含钯盐溶液50~70ml/L,开缸盐250~500ml/L,钯镀液的温度为40~50℃,pH值为7.2~8.0,电流密度为1~10安培/平方分米。The above-mentioned ultra-thin palladium-plated gold-plated process for lead frames is characterized in that the palladium plating solution contains 50-70ml/L of palladium salt solution, 250-500ml/L of open-cylinder salt, and the temperature of the palladium plating solution is 40-50 ℃, the pH value is 7.2-8.0, and the current density is 1-10 ampere/square decimeter.
上述的钯盐溶液为Palladure 200(罗门哈斯电子材料钯溶液,市售可得),所述的开缸盐为Palladure 200开缸盐(市售可得)。The above-mentioned palladium salt solution is Palladure 200 (Rohm and Haas electronic material palladium solution, commercially available), and the described salt for opening the cylinder is Palladure 200 salt for opening the cylinder (available commercially).
上述钯镀液中钯含量要控制在5.0~7.0g/L,钯镀液的比重控制在5~15,钯镀液的比重可以由Palladure导电盐调整(Palladure导电盐市售可得)。The palladium content in the above-mentioned palladium plating solution should be controlled at 5.0-7.0g/L, and the specific gravity of the palladium plating solution should be controlled at 5-15. The specific gravity of the palladium plating solution can be adjusted by Palladure conductive salt (Palladure conductive salt is commercially available).
如上所述的引线框超薄镀钯镀金工艺,其特征在于所述的金镀液含预镀金开缸剂850~950ml/L,氰化金钾2.2~3.6g/L,所述的金镀液的温度为40~45℃,pH值为3.5~4.0,电流密度为3~10安培/平方分米。所述的预镀金开缸剂的商品名为Auro Strike GP-3 SEA(市售可得)。The above-mentioned ultra-thin palladium-plated gold-plated process for lead frames is characterized in that the gold plating solution contains 850-950 ml/L of pre-plating gold-plated potting agent, 2.2-3.6 g/L of potassium gold cyanide, and the gold-plated The temperature of the liquid is 40-45° C., the pH value is 3.5-4.0, and the current density is 3-10 ampere/square decimeter. The trade name of described pre-plated cylinder opener is Auro Strike GP-3 SEA (commercially available).
上述金镀液的金含量控制在1.0~3.0g/L,金镀液的比重控制在8~12,可以用商品名为Auro Strike GP-3SEA导电盐来调整,该导电盐市售可得。The gold content of the above-mentioned gold plating solution is controlled at 1.0-3.0g/L, and the specific gravity of the gold plating solution is controlled at 8-12, which can be adjusted with the trade name Auro Strike GP-3SEA conductive salt, which is commercially available.
本发明中清洗金镀层的金回收水为RO水,即反渗透水。The gold recovery water for cleaning the gold coating in the present invention is RO water, i.e. reverse osmosis water.
如上所述的引线框超薄镀钯镀金工艺,其特征在于所述的金保护溶液的温度为20~40℃,pH值为2.0~3.5。The ultra-thin palladium-plating and gold-plating process for lead frames as described above is characterized in that the temperature of the gold protection solution is 20-40° C., and the pH value is 2.0-3.5.
上述金保护溶液含有商品名为PostDip XP-680823-B MU(市售可得)的组份140~160ml/L,商品名为PostDip XP-680823-BAntifoam(市售可得)的组分5~20ml/L。The above-mentioned gold protection solution contains 140-160 ml/L of components with trade name PostDip XP-680823-B MU (commercially available), and components 5-160 ml/L of trade name PostDip XP-680823-BAntifoam (commercially available). 20ml/L.
本发明中出于节约成本的考虑,还可以在电沉积镀钯薄层后,用RO水清洗引线框架基体后再用清水冲洗,所述RO水为反渗透水。In the present invention, for cost saving consideration, after electrodepositing the palladium thin layer, the lead frame substrate can be washed with RO water and then rinsed with clean water, and the RO water is reverse osmosis water.
本发明与现有技术相比,有以下优点:Compared with the prior art, the present invention has the following advantages:
本发明电镀的钯镀层外观光亮银白,结晶细致平滑,连接性和可焊性好,可代替引线框架的内部引线和衬垫的镀银以及外部引线的镀锡,钯比银、锡便宜,降低了贵金属银和锡的使用;镀钯之后再镀薄金镀层,可使接触电阻稳定,并且在插拔时,金镀层的自润滑作用,可以提高耐磨性。The palladium coating of the present invention is bright and silvery in appearance, fine and smooth in crystallization, and has good connectivity and weldability, and can replace the silver plating of the inner leads and pads of the lead frame and the tin plating of the outer leads. Palladium is cheaper than silver and tin, reducing The use of precious metals silver and tin is eliminated; after palladium plating, a thin gold coating can be plated to stabilize the contact resistance, and the self-lubricating effect of the gold coating can improve wear resistance when plugging and unplugging.
本发明在确保测试试验通过的前提下,形成超薄的金、钯镀层,电镀的钯层厚度为0.02~0.1um,远低于现有工艺电镀的钯层厚度2~5um,电镀的金层厚度为0.003~0.01um,远低于现有工艺电镀的金层厚度0.3~1.2um,保证原有钯镀层和金镀层的优良性能的同时,减少了金、钯的消耗,极大的降低贵金属使用,有效的提高金属利用率,节约成本。The present invention forms an ultra-thin gold and palladium coating on the premise of ensuring that the test is passed. The thickness of the electroplated palladium layer is 0.02-0.1um, which is far lower than the thickness of the electroplated palladium layer of the existing process of 2-5um. The electroplated gold layer The thickness is 0.003-0.01um, which is far lower than the thickness of the gold layer electroplated by the existing process of 0.3-1.2um. While ensuring the excellent performance of the original palladium coating and gold coating, it reduces the consumption of gold and palladium, and greatly reduces the cost of precious metals. Use, effectively improve metal utilization and save costs.
此工艺适合于特殊要求的工业产品及饰品的表面处理,可代替镀金层用于仪表中的导电环、电位计、电刷等电接触元件;可用于导电件、电子元器件镀银后防银变色表层。This process is suitable for the surface treatment of industrial products and accessories with special requirements. It can replace the gold-plated layer for electrical contact components such as conductive rings, potentiometers, and brushes in instruments; it can be used for silver-plated conductive parts and electronic components. Discolored finish.
【具体实施方式】 【Detailed ways】
下面结合具体实施方式对本发明进行详细描述:The present invention is described in detail below in conjunction with specific embodiment:
一种引线框超薄镀钯镀金工艺,其包括以下步骤:An ultra-thin palladium-plated gold-plated process for a lead frame, which comprises the following steps:
a、电解除油:将引线框架基体放入含有除油粉60~80g/L的碱性脱脂剂电解溶液中,在电流密度为5~25安培/平方分米,电解溶液温度为50~60℃下电解20~30s,然后用自来水清洗引线框架基体再吹干;a. Electrolytic degreasing: Put the lead frame substrate into the electrolytic solution of alkaline degreasing agent containing 60-80g/L degreasing powder. Electrolyze at ℃ for 20-30s, then wash the lead frame substrate with tap water and dry it;
b、引线框架基体活化处理:将电解除油的引线框架基体放入室温的含开缸盐80~120g/L的酸性氧化剂溶液中浸泡10~20s,然后用自来水清洗引线框架基体,再用去离子水清洗吹干;b. Lead frame substrate activation treatment: put the electrolytically degreased lead frame substrate into an acidic oxidant solution containing 80-120 g/L of open-cyl salt at room temperature and soak for 10-20 seconds, then wash the lead frame substrate with tap water, and then use it Wash and dry with ion water;
c、电沉积镀镍层:将活化处理过的引线框架基体放入含氨基磺酸鎳50~70g/L,硼酸35~55g/L,温度为50~60℃,pH值为3.5~4.5的镍镀液中以5~25安培/平方分米的电流密度电沉积50~60s,使电镀镍层的厚度为0.5~2μm,然后用去离子水清洗引线框架基体再吹干;c. Electrodeposited nickel plating layer: Put the activated lead frame substrate into a medium containing 50-70g/L of nickel sulfamate, 35-55g/L of boric acid, the temperature is 50-60°C, and the pH value is 3.5-4.5. Electrodeposition in the nickel plating solution at a current density of 5 to 25 amps/dm2 for 50 to 60 s, so that the thickness of the electroplated nickel layer is 0.5 to 2 μm, then clean the lead frame substrate with deionized water and dry it;
d、镍层活化处理:将镀镍层的引线框架基体放入含镍活化剂100~200ml/L,硫酸10~30ml/L,温度为室温的镍活化溶液中浸泡5-12s,然后用去离子水清洗引线框架基体再吹干;d. Nickel layer activation treatment: soak the nickel-plated lead frame substrate in nickel-containing activator 100-200ml/L, sulfuric acid 10-30ml/L, and room temperature nickel activation solution for 5-12s, and then use Clean the lead frame substrate with ion water and dry it;
e、电沉积镀钯薄层:将镍活化后的引线框架基体放入含Palladure 200罗门哈斯电子材料钯溶液50~70ml/L,Palladure 200开缸盐250~500ml/L,温度为40~50℃,pH值为7.2~8.0,电流密度为1~10安培/平方分米的钯镀液中电沉积10~20s,用钯回收水清洗后再用去离子水清洗引线框架基体再吹干;e. Electrodeposition of palladium-plated thin layer: Put the nickel-activated lead frame substrate into Palladure 200 Palladium solution containing 50-70ml/L of Rohm and Haas electronic materials, Palladure 200 salt 250-500ml/L, and the temperature is 40 ~50℃, pH value 7.2~8.0, current density 1~10 amps/dm2 in the palladium plating solution for 10~20s, wash with palladium recovery water, then clean the lead frame substrate with deionized water and blow Dry;
f、高频脉冲电沉积镀金薄层:将镀钯后的引线框架基体放入含预镀金开缸剂850~950ml/L,氰化金钾2.2~3.6g/L,温度为40~45℃,pH值为3.5~4.0的金镀液中以电流密度3~10安培/平方分米电沉积10~20s,得到完成电镀的引线框架,然后用金回收水清洗引线框架再吹干;f. High-frequency pulse electrodeposition gold-plated thin layer: put the palladium-plated lead frame substrate into the pre-plated gold cylinder containing 850-950ml/L, potassium gold cyanide 2.2-3.6g/L, and the temperature is 40-45°C , in a gold plating solution with a pH value of 3.5 to 4.0, electrodeposit for 10 to 20 seconds at a current density of 3 to 10 amperes per square decimeter to obtain a lead frame that has been electroplated, and then wash the lead frame with gold recovery water and dry it;
g、过金保护:将镀金的引线框架放入含PostDip XP-680823-B MU140~160ml/L,PostDip XP-680823-B Antifoam 5~20ml/L,温度为20~40℃,pH值为2.0~3.5的金保护溶液中浸泡5~20s,然后用去离子水清洗吹干,即得超薄钯镀层金镀层的引线框架。g. Over-gold protection: Put the gold-plated lead frame into the containing PostDip XP-680823-B MU140~160ml/L, PostDip XP-680823-B Antifoam 5~20ml/L, the temperature is 20~40℃, and the pH value is 2.0 Soak in ~3.5 gold protection solution for 5 ~ 20s, and then wash and dry with deionized water to obtain an ultra-thin palladium-coated gold-coated lead frame.
以上工艺为浸镀工艺,可在常用设备如电镀槽中完成。The above process is an immersion plating process, which can be completed in common equipment such as electroplating tanks.
下面通过实施例来进一步说明本发明:The present invention is further described below by way of embodiment:
实施例1:Example 1:
将引线框架基体放入含有除油粉60g/L的碱性脱脂剂电解溶液中,在电流密度为5安培/平方分米,电解溶液温度为50℃下电解30s,然后用自来水清洗引线框架基体再吹干;Put the lead frame base into an alkaline degreasing electrolytic solution containing 60g/L of degreasing powder, electrolyze for 30s at a current density of 5 amperes/dm2, and an electrolytic solution temperature of 50°C, and then wash the lead frame base with tap water blow dry again;
将上述的引线框架基体放入室温的含开缸盐80g/L的酸性氧化剂溶液中浸泡20s,然后用自来水清洗引线框架基体,再用去离子水清洗吹干;Soak the above-mentioned lead frame substrate in an acidic oxidant solution containing 80 g/L of open-pot salt at room temperature for 20 seconds, then wash the lead frame substrate with tap water, and then wash and dry it with deionized water;
将上述的引线框架基体放入含氨基磺酸鎳50g/L,硼酸55g/L,温度为50℃,pH值为4.5的镍镀液中以5安培/平方分米的电流密度电沉积60s,使电镀镍层的厚度为0.5~2μm,然后用去离子水清洗引线框架基体再吹干;Put the above-mentioned lead frame substrate into a nickel plating solution containing 50 g/L of nickel sulfamate and 55 g/L of boric acid at a temperature of 50° C. and a pH value of 4.5 for 60 seconds at a current density of 5 amps/dm2. The thickness of the electroplated nickel layer is 0.5-2 μm, and then the lead frame substrate is cleaned with deionized water and then dried;
将上述的引线框架基体放入含镍活化剂100ml/L,硫酸10ml/L,温度为室温的镍活化溶液中浸泡5s,然后用去离子水清洗引线框架基体再吹干;Put the above-mentioned lead frame substrate into 100ml/L nickel-containing activator, 10ml/L sulfuric acid, and soak for 5s in a nickel activation solution at room temperature, then wash the lead frame substrate with deionized water and dry it;
将上述的引线框架基体放入含Palladure 200罗门哈斯电子材料钯溶液50ml/L,Palladure 200开缸盐250ml/L,温度为50℃,pH值为7.2,电流密度为1安培/平方分米的钯镀液中电沉积10s,用钯回收水清洗后再用去离子水清洗引线框架基体再吹干;Put the above-mentioned lead frame substrate into 50ml/L of Palladure 200 Rohm and Haas electronic material palladium solution, 250ml/L of Palladure 200 opening salt, the temperature is 50°C, the pH value is 7.2, and the current density is 1 ampere/square minute Electrodeposit in the palladium plating solution of rice for 10s, wash the lead frame substrate with deionized water after washing with palladium recovery water, and then blow dry;
将上述的引线框架基体放入含预镀金开缸剂850ml/L,氰化金钾2.2g/L,温度为40℃,pH值为4.0的金镀液中以电流密度3安培/平方分米电沉积10s,得到完成电镀的引线框架,然后用金回收水清洗引线框架再吹干;Put the above-mentioned lead frame substrate into a gold plating solution containing 850ml/L of pre-plating potting agent, 2.2g/L of potassium gold cyanide, a temperature of 40°C, and a pH value of 4.0 at a current density of 3 amperes/square decimeter Electrodeposit for 10s to obtain a lead frame that has been electroplated, then wash the lead frame with gold recovery water and dry it;
最后,将上述的引线框架放入含PostDip XP-680823-B MU140ml/L,PostDip XP-680823-B Antifoam 5ml/L,温度为20℃,pH值为3.5的金保护溶液中浸泡20s,然后用去离子水清洗吹干,即得超薄钯镀层金镀层的引线框架。Finally, put the above-mentioned lead frame into the gold protection solution containing PostDip XP-680823-B MU140ml/L, PostDip XP-680823-B Antifoam 5ml/L, the temperature is 20 ℃, and the pH value is 3.5. Wash and dry with deionized water to obtain a lead frame with an ultra-thin palladium-coated gold-plated layer.
实施例1工艺所镀的钯层厚度为0.02~0.08um,所镀金层厚度为0.003~0.007um。The thickness of the palladium layer plated by the process of embodiment 1 is 0.02-0.08 um, and the thickness of the gold-plated layer is 0.003-0.007 um.
实施例2:Example 2:
将引线框架基体放入含有除油粉70g/L的碱性脱脂剂电解溶液中,在电流密度为10安培/平方分米,电解溶液温度为55℃下电解25s,然后用自来水清洗引线框架基体再吹干;Put the lead frame base into an alkaline degreasing electrolytic solution containing 70g/L degreasing powder, electrolyze for 25s at a current density of 10 amperes/dm2 and a temperature of the electrolytic solution at 55°C, and then wash the lead frame base with tap water blow dry again;
将上述的引线框架基体放入室温的含开缸盐100g/L的酸性氧化剂溶液中浸泡15s,然后用自来水清洗引线框架基体,再用去离子水清洗吹干;Put the above-mentioned lead frame substrate into an acidic oxidant solution containing 100 g/L of open-pot salt at room temperature and soak for 15 seconds, then wash the lead frame substrate with tap water, and then wash and dry it with deionized water;
将上述的引线框架基体放入含氨基磺酸鎳60g/L,硼酸45g/L,温度为55℃,pH值为4.0的镍镀液中以15安培/平方分米的电流密度电沉积55s,使电镀镍层的厚度为0.5~2μm,然后用去离子水清洗引线框架基体再吹干;Put the above-mentioned lead frame substrate into a nickel plating solution containing 60 g/L of nickel sulfamate and 45 g/L of boric acid at a temperature of 55°C and a pH value of 4.0 at a current density of 15 amps/dm2 for 55 seconds. The thickness of the electroplated nickel layer is 0.5-2 μm, and then the lead frame substrate is cleaned with deionized water and then dried;
将上述的引线框架基体放入含镍活化剂150ml/L,硫酸20ml/L,温度为室温的镍活化溶液中浸泡9s,然后用去离子水清洗引线框架基体再吹干;Put the above-mentioned lead frame substrate into 150ml/L nickel-containing activator, 20ml/L sulfuric acid, and soak for 9s in a nickel activation solution at room temperature, then wash the lead frame substrate with deionized water and dry it;
将上述的引线框架基体放入含Palladure 200罗门哈斯电子材料钯溶液60ml/L,Palladure 200开缸盐380ml/L,温度为45℃,pH值为7.6,电流密度为5安培/平方分米的钯镀液中电沉积15s,用钯回收水清洗后再用去离子水清洗引线框架基体再吹干;Put the above lead frame substrate into 60ml/L of Palladure 200 Rohm and Haas electronic material palladium solution, 380ml/L of Palladure 200 salt, the temperature is 45°C, the pH value is 7.6, and the current density is 5 amperes/square minute Electrodeposition in the palladium plating solution of rice for 15s, after cleaning with palladium recovery water, clean the lead frame substrate with deionized water and then blow dry;
将上述的引线框架基体放入含预镀金开缸剂900ml/L,氰化金钾2.9g/L,温度为43℃,pH值为3.8的金镀液中以电流密度6安培/平方分米电沉积15s,得到完成电镀的引线框架,然后用金回收水清洗引线框架再吹干;Put the above-mentioned lead frame substrate into a gold plating solution containing 900ml/L of pre-plating gold-plated potting agent, 2.9g/L of potassium gold cyanide, a temperature of 43°C, and a pH value of 3.8 at a current density of 6 amperes/square decimeter Electrodeposit for 15s to obtain a lead frame that has been electroplated, then wash the lead frame with gold recovery water and dry it;
最后,将上述的引线框架放入含PostDip XP-680823-B MU150ml/L,PostDip XP-680823-B Antifoam 12ml/L,温度为30℃,pH值为3.0的金保护溶液中浸泡15s,然后用去离子水清洗吹干,即得超薄钯镀层金镀层的引线框架。Finally, put the above-mentioned lead frame into the gold protection solution containing PostDip XP-680823-B MU150ml/L, PostDip XP-680823-B Antifoam 12ml/L, the temperature is 30 ℃, and the pH value is 3.0. Wash and dry with deionized water to obtain a lead frame with an ultra-thin palladium-coated gold-plated layer.
实施例2工艺所镀的钯层厚度为0.02~0.01um,所镀金层厚度为0.003~0.01um。The thickness of the palladium layer plated by the process of embodiment 2 is 0.02-0.01 um, and the thickness of the gold-plated layer is 0.003-0.01 um.
实施例3:Example 3:
将引线框架基体放入含有除油粉80g/L的碱性脱脂剂电解溶液中,在电流密度为25安培/平方分米,电解溶液温度为60℃下电解20s,然后用自来水清洗引线框架基体再吹干;Put the lead frame base into an alkaline degreasing electrolytic solution containing 80g/L of degreasing powder, electrolyze for 20s at a current density of 25 amps/dm2, and an electrolytic solution temperature of 60°C, then wash the lead frame base with tap water blow dry again;
将上述的引线框架基体放入室温的含开缸盐120g/L的酸性氧化剂溶液中浸泡10s,然后用自来水清洗引线框架基体,再用去离子水清洗吹干;Soak the above-mentioned lead frame substrate in an acidic oxidant solution containing 120 g/L of open-pot salt at room temperature for 10 seconds, then wash the lead frame substrate with tap water, and then wash and dry it with deionized water;
将上述的引线框架基体放入含氨基磺酸鎳70g/L,硼酸35g/L,温度为60℃,pH值为3.5的镍镀液中以25安培/平方分米的电流密度电沉积50s,使电镀镍层的厚度为0.5~2μm,然后用去离子水清洗引线框架基体再吹干;Put the above-mentioned lead frame substrate into a nickel plating solution containing 70 g/L of nickel sulfamate and 35 g/L of boric acid at a temperature of 60° C. and a pH value of 3.5 for 50 seconds at a current density of 25 amps/dm2. The thickness of the electroplated nickel layer is 0.5-2 μm, and then the lead frame substrate is cleaned with deionized water and then dried;
将上述的引线框架基体放入含镍活化剂200ml/L,硫酸30ml/L,温度为室温的镍活化溶液中浸泡12s,然后用去离子水清洗引线框架基体再吹干;Put the above-mentioned lead frame substrate into 200ml/L nickel-containing activator, 30ml/L sulfuric acid, and soak for 12s in a nickel activation solution at room temperature, then wash the lead frame substrate with deionized water and dry it;
将上述的引线框架基体放入含Palladure 200罗门哈斯电子材料钯溶液70ml/L,Palladure 200开缸盐500ml/L,温度为40℃,pH值为8.0,电流密度为10安培/平方分米的钯镀液中电沉积20s,用钯回收水清洗后再用去离子水清洗引线框架基体再吹干;Put the above lead frame substrate into 70ml/L of Palladure 200 Rohm and Haas Electronic Materials palladium solution, 500ml/L of Palladure 200 opening salt, the temperature is 40°C, the pH value is 8.0, and the current density is 10 amperes/square minute Electrodeposition in the palladium plating solution of rice for 20s, wash with palladium recovery water and then clean the lead frame substrate with deionized water and then blow dry;
将上述的引线框架基体放入含预镀金开缸剂950ml/L,氰化金钾3.6g/L,温度为45℃,pH值为3.5的金镀液中以电流密度10安培/平方分米电沉积20s,得到完成电镀的引线框架,然后用金回收水清洗引线框架再吹干;Put the above-mentioned lead frame substrate into a gold plating solution containing 950ml/L of pre-plating gold-plated potting agent, 3.6g/L of potassium gold cyanide, a temperature of 45°C, and a pH value of 3.5 at a current density of 10 amperes/square decimeter Electrodeposition for 20s to obtain a lead frame that has been electroplated, then wash the lead frame with gold recovery water and dry it;
最后,将上述的引线框架放入含PostDip XP-680823-B MU160ml/L,PostDip XP-680823-B Antifoam 20ml/L,温度为40℃,pH值为2.0的金保护溶液中浸泡5s,然后用去离子水清洗吹干,即得超薄钯镀层金镀层的引线框架。Finally, put the above-mentioned lead frame into the gold protection solution containing PostDip XP-680823-B MU160ml/L, PostDip XP-680823-B Antifoam 20ml/L, the temperature is 40℃, and the pH value is 2.0 for 5s, and then use Wash and dry with deionized water to obtain a lead frame with an ultra-thin palladium-coated gold-plated layer.
实施例3工艺所镀的钯层厚度为0.04~0.1um,所镀金层厚度为0.004~0.01um。The thickness of the palladium layer plated by the process of embodiment 3 is 0.04-0.1 um, and the thickness of the gold-plated layer is 0.004-0.01 um.
实施例4:Example 4:
将引线框架基体放入含有除油粉70g/L的碱性脱脂剂电解溶液中,在电流密度为151安培/平方分米,电解溶液温度为60℃下电解25s,然后用自来水清洗引线框架基体再吹干;Put the lead frame base into an alkaline degreasing electrolytic solution containing 70g/L of degreasing powder, electrolyze for 25s at a current density of 151 amperes/dm2, and an electrolytic solution temperature of 60°C, and then wash the lead frame base with tap water blow dry again;
将上述的引线框架基体放入室温的含开缸盐90g/L的酸性氧化剂溶液中浸泡13s,然后用自来水清洗引线框架基体,再用去离子水清洗吹干;Soak the above-mentioned lead frame substrate in an acidic oxidant solution containing 90 g/L of open-pot salt at room temperature for 13 seconds, then wash the lead frame substrate with tap water, and then wash and dry it with deionized water;
将上述的引线框架基体放入含氨基磺酸鎳65g/L,硼酸40g/L,温度为55℃,pH值为3.5的镍镀液中以10安培/平方分米的电流密度电沉积55s,使电镀镍层的厚度为0.5~2μm,然后用去离子水清洗引线框架基体再吹干;Put the above-mentioned lead frame substrate into a nickel plating solution containing 65 g/L of nickel sulfamate and 40 g/L of boric acid at a temperature of 55° C. and a pH value of 3.5 for 55 seconds at a current density of 10 amps/dm2. The thickness of the electroplated nickel layer is 0.5-2 μm, and then the lead frame substrate is cleaned with deionized water and then dried;
将上述的引线框架基体放入含镍活化剂180ml/L,硫酸25ml/L,温度为室温的镍活化溶液中浸泡10s,然后用去离子水清洗引线框架基体再吹干;Put the above-mentioned lead frame substrate into 180ml/L nickel-containing activator, 25ml/L sulfuric acid, and soak for 10s in a nickel activation solution at room temperature, then wash the lead frame substrate with deionized water and dry it;
将上述的引线框架基体放入含Palladure 200罗门哈斯电子材料钯溶液65ml/L,Palladure 200开缸盐450ml/L,温度为45℃,pH值为7.5,电流密度为7安培/平方分米的钯镀液中电沉积15s,用钯回收水清洗后再用去离子水清洗引线框架基体再吹干;Put the above lead frame substrate into Palladure 200 Palladium solution containing 65ml/L of Rohm and Haas Electronic Materials, 450ml/L of Palladure 200 salt, the temperature is 45°C, the pH value is 7.5, and the current density is 7 amperes/square minute Electrodeposition in the palladium plating solution of rice for 15s, after cleaning with palladium recovery water, clean the lead frame substrate with deionized water and then blow dry;
将上述的引线框架基体放入含预镀金开缸剂900ml/L,氰化金钾2.6g/L,温度为45℃,pH值为3.5的金镀液中以电流密度5安培/平方分米电沉积15s,得到完成电镀的引线框架,然后用金回收水清洗引线框架再吹干;Put the above-mentioned lead frame substrate into a gold plating solution containing 900ml/L of pre-plating gold-plated potting agent, 2.6g/L of potassium gold cyanide, a temperature of 45°C, and a pH value of 3.5 at a current density of 5 amperes/square decimeter Electrodeposit for 15s to obtain a lead frame that has been electroplated, then wash the lead frame with gold recovery water and dry it;
最后,将上述的引线框架放入含PostDip XP-680823-B MU155ml/L,PostDip XP-680823-B Antifoam 15ml/L,温度为35℃,pH值为2.5的金保护溶液中浸泡10s,然后用去离子水清洗吹干,即得超薄钯镀层金镀层的引线框架。Finally, put the above-mentioned lead frame into the gold protection solution containing PostDip XP-680823-B MU155ml/L, PostDip XP-680823-B Antifoam 15ml/L, the temperature is 35 ℃, and the pH value is 2.5. Wash and dry with deionized water to obtain a lead frame with an ultra-thin palladium-coated gold-plated layer.
实施例4工艺所镀的钯层厚度为0.03~0.09um,所镀金层厚度为0.004~0.09um。The thickness of the palladium layer plated by the process of embodiment 4 is 0.03-0.09 um, and the thickness of the gold-plated layer is 0.004-0.09 um.
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| CN105112892A (en) * | 2015-02-13 | 2015-12-02 | 河源西普电子有限公司 | Chemical nickel, palladium and gold plating technique for printed circuit board |
| CN106119915B (en) * | 2016-06-27 | 2019-01-08 | 中山品高电子材料有限公司 | electroplating method of lead frame |
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