CN102569009B - Process data acquisition method, device and system - Google Patents
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Abstract
The invention provides a process data acquisition method, device and system, and aims to solve the problem that the single data acquirement and transmission adopted in the prior art lower the acquirement efficiency. The method comprises the steps as follows: receiving a batch data acquirement request; obtaining a data acquirement list corresponding to data acquirement list identification information in the request, wherein the data acquirement list includes a plurality of process data type identification information; carrying out traversal on each process data type identification information in the data acquirement list, acquiring process data corresponding to each process data type identification information one by one, and storing; and returning all of process data in batch after process data corresponding to all of process data type identification information is acquired and stored. The technical scheme provided by the invention reduces the cost of communication between a lower computer control system and a data acquirement control system, and improves the data acquirement efficiency.
Description
Technical field
The present invention relates to data acquisition technology, particularly relate to a kind of process data acquisition method, a kind of slave computer device, a kind of data acquisition facility and a kind of process data acquisition system.
Background technology
In semiconducter process, apparatus control system carries out the manufacturing of semiconductor for controlling various semiconductor processing equipment.With reference to Fig. 1, it is a kind of structural drawing of semiconductor equipment control system.Described apparatus control system comprises factor interface 1, host computer device 2, slave computer device 3 and data acquisition facility 4, for realizing the reception and registration of factory's order and the efficient control to semiconductor processing equipment.
Wherein, described slave computer device 3 is directly mutual with various semiconductor processing equipment.Described host computer device 2 is upwards communicated with factory host by factor interface 1, receives and perform the production ordering that factory host issues, and is responsible for the operation information of semiconductor processing equipment to feed back to factory host simultaneously; Be connected with slave computer device 2 downwards, commanded by dispatching algorithm and coordinate the work of slave computer device 2, thus realizing the Automated condtrol of various semiconductor processing equipment.Described data acquisition facility 4 is by being connected with slave computer device 3, time dependent various process data in collection technology process, as pressure data, temperature data, radio-frequency voltage data etc., and plot analysis is carried out to the process data collected, the operation of semiconductor processing equipment is monitored for technologist.
At present, data acquisition facility 4 adopts the mode initiatively read, by slave computer device 3 collection technology data.Data object (i.e. data object) is defined, the process data of the corresponding type of each Data object in described slave computer device 3, as Data object 1 corresponding pressure data, Data object 2 corresponding temperature data, etc.Data object is corresponding with semiconductor processing equipment with channel number by node number, therefore will map directly to semiconductor processing equipment to the read-write operation of Data object.Slave computer device 3 is the remote interface RemoteData that data acquisition facility 4 provides Data object, and providing concrete methods of realizing the getValue () method of this interface, data acquisition facility 4 just can the value (namely corresponding process data) of Remote Acquisitioning Data object by calling getValue () method in remote interface RemoteData.
With reference to Fig. 2, it is the process flow diagram of one-time process data acquisition.
Step 201, data acquisition facility 4 ergodic data acquisition list, comprises multiple Data object in described data acquisition list, extracts a Data object in lists and calls the RemoteData remote interface of this Data object;
Step 202, data acquisition facility 4 sends the individual data collection request of the value obtaining this Data object to the next machine 3 by getValue () method;
Step 203, after slave computer device 3 receives described individual data collection request, gathers should the process data of Data object, and performs write operation to this Data object, using the process data that the collects value as this Data object;
Step 204, slave computer device 3 returns the value of this Data object by getValue () method to data acquisition facility 4;
Step 205, data acquisition facility 4 judges whether data acquisition list has traveled through, and if so, then terminates a gatherer process; If not, then the acquisition that step 201 continues next Data object value is returned.
From above-mentioned flow process, in a gatherer process of data acquisition facility 4, the value of all Data objects all will gather one by one in searching loop, and the collection of the value of each Data object will call the getValue () method of remote interface RemoteData, gathered by slave computer device 3 and return to data acquisition facility 4.Therefore, slave computer device 3 is carried out the value of each Data object and is gathered separately and individual transmission mode.Generally, the process data type gathered is needed about to have 200 in technological process, namely 200 Data objects are approximately comprised in described data acquisition list, if slave computer device 3 carries out gathering and returning one by one, then each gatherer process slave computer device 3 all needs to communicate frequently with data acquisition facility 4, and communicate at every turn and all spend far call and the long-range expense returned, greatly reduce data acquisition efficiency, and then affect the processing power of whole slave computer device 3.
Summary of the invention
The invention provides a kind of process data acquisition method, a kind of slave computer device, a kind of data acquisition facility and a kind of process data acquisition system, carry out to solve in prior art the problem that individual data collection and transmission reduce collecting efficiency.
In order to solve the problem, the invention discloses a kind of process data acquisition method, comprising:
Receive batch data collection request, in described batch data collection request, comprise data acquisition List Identification information;
Obtain the data acquisition list that in described batch data collection request, data acquisition List Identification information is corresponding, in described data acquisition list, comprise multiple process data type identification information;
Travel through each process data type identification information in described data acquisition list, gather the process data that each process data type identification information is corresponding one by one, and each process data collected is preserved;
All gather complete when the process data that process data type identification information all in described data acquisition list are corresponding and after preserving, all process data batches preserved returned.
Preferably, described each process data collected to be preserved, comprising: each process data collected is added in array according to traversal order and preserves.
Preferably, according to time interval timing receipt batch data collection request.
Present invention also offers a kind of process data acquisition method, comprising:
Send batch data collection request, comprise data acquisition List Identification information in described batch data collection request, in described data acquisition list, comprise multiple process data type identification information;
Read the process data that in the described data acquisition list collected, multiple process data type identification information is corresponding in batches.
Preferably, described method also comprises: start data acquisition thread and be set to waiting status; Monitoring process status information; After judging that technique starts according to described state of the art information, activate described data acquisition thread and be set to state of activation; Then described transmission batch data collection request and batch are read as: send batch data collection request by described data acquisition thread, and read the process data that in the described data acquisition list collected, multiple process data type identification information is corresponding by described data acquisition thread in batches; After judging that technique terminates according to described state of the art information, described data acquisition thread is set to waiting status.
Preferably, according to time interval timed sending batch data collection request.
Present invention also offers a kind of slave computer device, comprising:
Request receiving module, for receiving batch data collection request, comprises data acquisition List Identification information in described batch data collection request;
List acquisition module, for obtaining the data acquisition list that in described batch data collection request, data acquisition List Identification information is corresponding, comprises multiple process data type identification information in described data acquisition list;
Batch data acquisition module, for traveling through each process data type identification information in described data acquisition list, gathers the process data that each process data type identification information is corresponding one by one, and is preserved by each process data collected;
Data return module, all gather complete and after preserving, returned by all process data batches preserved for the process data corresponding when process data type identification information all in described data acquisition list.
Preferably, described batch data acquisition module comprises: list traversal unit, for traveling through each process data type identification information in described data acquisition list; Data acquisition unit, for gathering process data corresponding to each process data type identification information one by one; Data saving unit, preserves for being added in array according to the traversal order of described list traversal unit by each process data collected.
Preferably, described request receiver module is according to time interval timing receipt batch data collection request.
Present invention also offers a kind of data acquisition facility, comprising:
Request sending module, for sending batch data collection request, comprising data acquisition List Identification information in described batch data collection request, comprising multiple process data type identification information in described data acquisition list;
Data read module, for reading the process data that in the described data acquisition list that collects, multiple process data type identification information is corresponding in batches.
Preferably, described request sending module is according to time interval timed sending batch data collection request.
Preferably, described data acquisition control system also comprises: process monitoring module, for monitoring process status information, and state of the art information is issued described thread control module; Thread control module, for starting data acquisition control thread and being set to waiting status; After judging that technique starts according to described state of the art information, activate described data acquisition control thread and be set to state of activation; After judging that technique terminates according to described state of the art information, described data acquisition control thread is set to waiting status; Wherein, described data acquisition control thread completes batch data obtain for triggering described request sending module and data read module.
Present invention also offers a kind of process data acquisition system, comprising:
Data acquisition facility, for sending batch data collection request, comprising data acquisition List Identification information in described batch data collection request, comprising multiple process data type identification information in described data acquisition list; And read for batch the process data that in the described data acquisition list that slave computer device collects, multiple process data type identification information is corresponding;
Slave computer device, for receiving the batch data collection request that described data acquisition facility sends; Obtain the data acquisition list that in described batch data collection request, data acquisition List Identification information is corresponding; Travel through each process data type identification information in described data acquisition list, gather the process data that each process data type identification information is corresponding one by one, and each process data collected is preserved; All gather complete when the process data that process data type identification information all in described data acquisition list are corresponding and after preserving, all process data batches preserved returned.
Compared with prior art, the present invention has the following advantages:
The present invention adopts the mode of batch capture and transmission, slave computer device receives the batch data collection request that data acquisition facility is sent, to ask the data of specifying all gather complete after, batch returns to data acquisition facility again, thus the communication overhead decreased between slave computer device and data acquisition facility, and then improve data acquisition efficiency.
And the present invention can ensure that all process datas on a time point are sent to data acquisition facility with the fastest speed, therefore farthest can ensure the timing that batch data gathers and consistance.
Accompanying drawing explanation
Fig. 1 is the structural drawing of a kind of semiconductor equipment control system in prior art;
Fig. 2 is the process flow diagram of one-time process data acquisition in prior art;
Fig. 3 .1 and 3.2 is process flow diagrams of one-time process data acquisition described in the inventive method embodiment;
Fig. 4 is the flowchart of data acquisition control thread in other method embodiment of the present invention;
Fig. 5 is the process flow diagram of one-time process data acquisition in other method embodiment of the present invention;
Fig. 6 is the structural drawing of a kind of slave computer device described in present system embodiment;
Fig. 7 is the structural drawing of a kind of data acquisition facility described in present system embodiment;
Fig. 8 is the structural drawing of a kind of process data acquisition system described in present system embodiment.
Embodiment
For enabling above-mentioned purpose of the present invention, feature and advantage become apparent more, and below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
In the present invention, still with reference to the semiconductor equipment control system shown in Fig. 1, the process data that data acquisition facility still adopts the mode Remote Acquisitioning slave computer device initiatively read to collect, but compared with existing implementation method, in the present invention, slave computer device adopts the mode of batch capture and transmission, can improve collecting efficiency.Be described in detail below by embodiment.
With reference to Fig. 3 .1 and 3.2, it is the process flow diagram of one-time process data acquisition described in the inventive method embodiment.Wherein, the execution flow process of the corresponding slave computer device of Fig. 3 .1, the execution flow process of Fig. 3 .2 corresponding data acquisition device, illustrates below respectively.
In Fig. 3 .1, slave computer device performs following steps:
Step 301, receives batch data collection request, comprises data acquisition List Identification information in described batch data collection request;
Slave computer device receives the batch data collection request that data acquisition facility sends at every turn, instead of the individual data collection request described in existing implementation method.Compared with described individual data collection request, contain the data acquisition List Identification information that will gather in batch data collection request, namely slave computer device gathers the data of specifying in list.
Step 302, obtains the data acquisition list that in described batch data collection request, data acquisition List Identification information is corresponding, comprises multiple process data type identification information in described data acquisition list;
Slave computer device resolves described batch data collection request can obtain data acquisition List Identification information, and slave computer device itself has data acquisition list, just can find corresponding data acquisition list according to resolving the data acquisition List Identification information obtained.Contain multiple process data type identification information that will gather in described data acquisition list, described process data type identification information for distinguishing different process datas, as pressure data, temperature data etc.
Step 303, travels through each process data type identification information in described data acquisition list, gathers the process data that each process data type identification information is corresponding one by one, and preserved by each process data collected;
Slave computer device is by ergodic data acquisition list, and the process data that in acquisition list, process data type identification information is corresponding one by one, has often gathered a process data and just preserved, until all data that data acquisition list is specified all gather complete.Wherein, described data acquisition list can adopt tree.
Preferably, slave computer device, when preserving the process data collected, can adopt array form to preserve, be added to respectively in array by the process data collected during preservation according to the order of ergodic data acquisition list.
Step 304, all gathers complete when the process data that process data type identification information all in described data acquisition list are corresponding and after preserving, the batch process data of preservation is returned.
After all data of specifying when data acquisition list all gather, slave computer device by preserve to all process datas batch of data acquisition list data acquisition facility should be returned to, can the process such as drawing be carried out after data acquisition facility gets batch process data.
Corresponding above-mentioned Fig. 3 .1, with reference to Fig. 3 .2, data acquisition facility performs following steps:
Step 311, sends batch data collection request, comprises data acquisition List Identification information, comprise multiple process data type identification information in described data acquisition list in described batch data collection request;
The collection request of what described data acquisition facility sent is batch data, instead of individual data collection request.Wherein, described batch data collection request is to slave computer device according to time interval timed sending.
Step 312, reads the process data that in the described data acquisition list collected, multiple process data type identification information is corresponding in batches.
After the next machine has gathered all data according to data acquisition list, in the mode initiatively read, data acquisition facility has required that slave computer device returns gathered data.Wherein, described active is read and can be adopted multiple implementation.
What above-mentioned flow process described is that data acquisition facility sends a batch data collection request, slave computer device responds the process of a batch data collection request, and in whole technological process, slave computer device can according to time interval timing receipt to above-mentioned batch data collection request, and each response request all can carry out the sample and transform of batch data according to above-mentioned steps 301 to 304.Therefore compared with existing implementation method, in the embodiment of the present invention, slave computer device and data acquisition facility often communicate once, just can collect multiple process data, and existing implementation method often communicates and once can only collect a process data, therefore acquisition method described in the embodiment of the present invention can improve collecting efficiency.And the mode of this batch capture and transmission can ensure that all process datas on a time point are sent to data acquisition facility with the fastest speed, therefore farthest can ensure the timing that batch data gathers and consistance.
Based on above content, in another embodiment provided by the invention, describe one implementation more specifically.
In another embodiment described, by defining Data object and remote interface class in slave computer device, the batch data realizing data acquisition facility initiatively reads.Concrete, Data object is defined to represent dissimilar process data in described slave computer device, the pressure data of first reaction chamber as corresponding in Data object 1, the temperature data of corresponding first reaction chamber of Data object 2, the pressure data of corresponding second reaction chamber of Data object 3, the temperature data of corresponding second reaction chamber of Data object 4, etc.Data object is corresponding with semiconductor processing equipment with channel number by node number, therefore will map directly to semiconductor processing equipment to the read-write operation of Data object.
In addition, also in slave computer device, with the addition of a remote interface class RemoteBatchReader, for the value of data acquisition facility from slave computer device active obtaining batch Data object.Slave computer device defines remote method Initialize () and read () in RemoteBatchReader class, wherein Initialize () method is used for object array initialization, and the Data object that namely will gather adds in object array according to traversal order; Read () method is used for the numerical value of all Data objects in long-range reading Data object array, and the result of reading returns according to after same order composition array.Like this, data acquisition facility, and just can the value of Remote Acquisitioning Data object by Initialize () and read () method by calling remote interface class RemoteBatchReader.
In the present embodiment, data acquisition facility starts data acquisition control thread dispatching RemoteBatchReader.With reference to Fig. 4, it is the flowchart of described data acquisition control thread.
Step 401, data acquisition facility wants the Data object array of batch capture by Initialize () method initialization in slave computer device of RemoteBatchReader;
Wherein, described Data object array contains all Data objects in described data acquisition list, the process data of each Data object encoding one type; Described initialization Data object array refers to and arranges initial value to each Data object in Data object array, as being set to 0, after the next machine collects the value of Data object, described initial value is changed into the value of the Data object collected.
Step 402, data acquisition facility starts data acquisition control thread and arranges it for waiting status;
Step 403, the state of the art information of data acquisition facility monitoring slave computer device;
Step 404, if after judging that technique starts according to described state of the art information, then activate described data acquisition control thread and be set to state of activation;
Step 405, data acquisition control thread reads the value of Data object at a certain time interval from slave computer device batch;
Namely data acquisition control thread reads the value of above-mentioned Data object array.
Step 406, data are given data processing threads after completing and once gathering and are carried out the process such as drawing by data acquisition control thread;
Step 407, the collection of data acquisition control thread loops is until technique terminates;
Step 408, after judging that technique terminates according to described state of the art information, is set to waiting status by described data acquisition control thread.
For step 405 wherein, will be described in detail by flow process shown in Fig. 5.
With reference to Fig. 5, it is the process flow diagram of one-time process data acquisition in other method embodiment of the present invention.
Step 501, the data acquisition control thread dispatching remote interface class RemoteBatchReader of data acquisition facility;
Step 502, data acquisition control thread and slave computer device set up communication environment;
Step 503, data acquisition control thread is encoded to batch data collection request and organizes bag;
Step 504, data acquisition control thread to the batch data collection request after the next machine transmission group bag, contains data acquisition List Identification information in described batch data collection request by read () method;
Step 505, slave computer device receives described batch data collection request, and carries out unpacking and decoding, and obtains data acquisition List Identification information;
Step 506, slave computer device obtains data acquisition list corresponding to described data acquisition List Identification information, comprises the identification information of multiple Data object in described data acquisition list;
Generally, need the process data type gathered about to have 200 in technological process, namely in described data acquisition list, approximately comprise the identification information of 200 Data objects.
Step 507, slave computer device travels through described data acquisition list, extracts a Data object id information in lists according to traversal order;
Step 508, slave computer device gathers Data object value corresponding to this Data object id information;
Step 509, the Data object value collected is added in Data object array according to traversal order by slave computer device;
Step 510, slave computer device judges whether described data acquisition list has traveled through, and if so, then continues step 511; If not, then the value that step 507 continues to gather next Data object is returned;
Step 511, after Data number of objects class value carries out encoding and organizes bag by slave computer device, is returned to data acquisition control thread by read () method;
Step 512, data acquisition control thread receives the laggard row of Data number of objects class value and unpacks and decode.
Based on above content, under simulated environment, carry out contrast test to the present invention and existing implementation method two kinds of data acquisition modes, test result is as shown in table 1:
Table 1
From table 1, on collecting efficiency and mitigation system pressure, the mode that the present invention uses batch to read is better than existing implementation method greatly.
Based on above content, present invention also offers the embodiment of a kind of slave computer device, a kind of data acquisition facility and a kind of process data acquisition system, specifically as shown in Fig. 6, Fig. 7 and Fig. 8.
With reference to Fig. 6, it is the structural drawing of a kind of slave computer device described in present system embodiment.
Described slave computer device comprises request receiving module 61, list acquisition module 62, batch data acquisition module 63 and data and returns module 64, wherein request receiving module 61 is for receiving batch data collection request, comprises data acquisition List Identification information in described batch data collection request; List acquisition module 62, for obtaining the data acquisition list that in described batch data collection request, data acquisition List Identification information is corresponding, comprises multiple process data type identification information in described data acquisition list; Batch data acquisition module 63, for traveling through each process data type identification information in described data acquisition list, gathers the process data that each process data type identification information is corresponding one by one, and is preserved by each process data collected; Data return module 64 and all gather complete for the process data corresponding when process data type identification information all in described data acquisition list and after preserving, returned by all process data batches preserved.
Wherein, described request receiver module 61 is that namely described slave computer device carries out a batch data collection at interval of a period of time, and returns to data acquisition facility according to time interval timing receipt batch data collection request.
Preferably, described batch data acquisition module 63 can comprise list traversal unit, data acquisition unit and data saving unit further, and wherein list traversal unit is for traveling through each process data type identification information in described data acquisition list; Data acquisition unit is used for gathering process data corresponding to each process data type identification information one by one; Data saving unit is used for each process data collected to add in array according to the traversal order of described list traversal unit to preserve.
With reference to Fig. 7, it is the structural drawing of a kind of data acquisition facility described in present system embodiment.
Described data acquisition facility comprises request sending module 71 and data read module 72, wherein request sending module 71 is for sending batch data collection request, comprise data acquisition List Identification information in described batch data collection request, in described data acquisition list, comprise multiple process data type identification information; Data read module 72 is for reading the process data that in the described data acquisition list that collects, multiple process data type identification information is corresponding in batches.
Wherein, described request sending module 71 is also according to time interval timed sending batch data collection request.
Preferably, described data acquisition facility initiatively can read batch data by the mode of thread from described slave computer device, therefore process monitoring module 73 and thread control module 74 can also be comprised, wherein process monitoring module 73 is for monitoring process status information, and state of the art information is issued described thread control module; Thread control module 74 is for starting data acquisition control thread and being set to waiting status; After judging that technique starts according to described state of the art information, activate described data acquisition control thread and be set to state of activation; After judging that technique terminates according to described state of the art information, described data acquisition control thread is set to waiting status; Wherein, described data acquisition control thread completes batch data obtain for triggering described request sending module 71 and data read module 72.
In sum, in the embodiment of the present invention, slave computer device and data acquisition facility often communicate once, just can collect multiple process data, and existing implementation method often communicates and once can only collect a process data, therefore the embodiment of the present invention can improve collecting efficiency.And the mode of this batch capture and transmission can ensure that all process datas on a time point are sent to data acquisition facility with the fastest speed, therefore farthest can ensure the timing that batch data gathers and consistance.
With reference to Fig. 8, it is the structural drawing of a kind of process data acquisition system described in present system embodiment.
Described process data acquisition system comprises data acquisition facility 81 and slave computer device 82, wherein data acquisition facility 81 is for sending batch data collection request to described slave computer device 82, comprise data acquisition List Identification information in described batch data collection request, in described data acquisition list, comprise multiple process data type identification information; Also read for batch the process data that in the described data acquisition list that collects of lower computer control system, multiple process data type identification information is corresponding.The batch data collection request that described slave computer device 82 sends for receiving described data acquisition facility; Obtain the data acquisition list that in described batch data collection request, data acquisition List Identification information is corresponding; Travel through each process data type identification information in described data acquisition list, gather the process data that each process data type identification information is corresponding one by one, and each process data collected is preserved; All gather complete when the process data that process data type identification information all in described data acquisition list are corresponding and after preserving, all process data batches preserved returned.
Further, described slave computer device 82 can comprise request receiving module, list acquisition module, batch data acquisition module and data and return module, and described request receiver module is for receiving described batch data collection request; List acquisition module, for obtaining the data acquisition list that in described batch data collection request, data acquisition List Identification information is corresponding, comprises multiple process data type identification information in described data acquisition list; Batch data acquisition module, for traveling through each process data type identification information in described data acquisition list, gathers the process data that each process data type identification information is corresponding one by one, and is preserved by each process data collected; Data return module and all gather complete for the process data corresponding when process data type identification information all in described data acquisition list and after preserving, all process data batches preserved returned to described data acquisition facility 81.
Described data acquisition facility 81 can content shown in Figure 7, and described slave computer device 82 can content shown in Figure 6, is not described in detail in this.
In addition, described process data acquisition system can also comprise the factor interface shown in Fig. 1 and upper computer control system, specifically can describe see Fig. 1.
Each embodiment in this instructions all adopts the mode of going forward one by one to describe, and what each embodiment stressed is the difference with other embodiments, between each embodiment identical similar part mutually see.For system embodiment, due to itself and embodiment of the method basic simlarity, so description is fairly simple, relevant part illustrates see the part of embodiment of the method.
Above to the process data acquisition method in a kind of semiconductor fabrication processes provided by the present invention, a kind of slave computer device, a kind of data acquisition facility and a kind of process data acquisition system, be described in detail, apply specific case herein to set forth principle of the present invention and embodiment, the explanation of above embodiment just understands method of the present invention and core concept thereof for helping; Meanwhile, for one of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.
Claims (11)
1. a process data acquisition method, is characterized in that, comprising:
Receive batch data collection request, in described batch data collection request, comprise data acquisition List Identification information;
Obtain the data acquisition list that in described batch data collection request, data acquisition List Identification information is corresponding, comprise multiple process data type identification information in described data acquisition list, described process data type identification information is for distinguishing different process datas;
Travel through each process data type identification information in described data acquisition list, gather the process data that each process data type identification information is corresponding one by one, and each process data collected is preserved;
All gather complete when the process data that process data type identification information all in described data acquisition list are corresponding and after preserving, all process data batches preserved returned.
2. method according to claim 1, is characterized in that, is describedly preserved by each process data collected, and comprising:
The each process data collected is added in array according to traversal order and preserves.
3. method according to claim 1 and 2, is characterized in that:
According to time interval timing receipt batch data collection request.
4. a process data acquisition method, is characterized in that, comprising:
Send batch data collection request, data acquisition List Identification information is comprised in described batch data collection request, comprise multiple process data type identification information in described data acquisition list, described process data type identification information is for distinguishing different process datas;
Read the process data that in the described data acquisition list collected, multiple process data type identification information is corresponding in batches; Start data acquisition thread and be set to waiting status;
Monitoring process status information;
After judging that technique starts according to described state of the art information, activate described data acquisition thread and be set to state of activation;
Then described transmission batch data collection request and batch are read as: send batch data collection request by described data acquisition thread, and read the process data that in the described data acquisition list collected, multiple process data type identification information is corresponding by described data acquisition thread in batches;
After judging that technique terminates according to described state of the art information, described data acquisition thread is set to waiting status.
5. method according to claim 4, is characterized in that:
According to time interval timed sending batch data collection request.
6. a slave computer device, is characterized in that, comprising:
Request receiving module, for receiving batch data collection request, comprises data acquisition List Identification information in described batch data collection request;
List acquisition module, for obtaining the data acquisition list that in described batch data collection request, data acquisition List Identification information is corresponding, comprise multiple process data type identification information in described data acquisition list, described process data type identification information is for distinguishing different process datas;
Batch data acquisition module, for traveling through each process data type identification information in described data acquisition list, gathers the process data that each process data type identification information is corresponding one by one, and is preserved by each process data collected;
Data return module, all gather complete and after preserving, returned by all process data batches preserved for the process data corresponding when process data type identification information all in described data acquisition list.
7. slave computer device according to claim 6, is characterized in that, described batch data acquisition module comprises:
List traversal unit, for traveling through each process data type identification information in described data acquisition list;
Data acquisition unit, for gathering process data corresponding to each process data type identification information one by one;
Data saving unit, preserves for being added in array according to the traversal order of described list traversal unit by each process data collected.
8. the slave computer device according to claim 6 or 7, is characterized in that:
Described request receiver module is according to time interval timing receipt batch data collection request.
9. a data acquisition facility, is characterized in that, comprising:
Request sending module, for sending batch data collection request, data acquisition List Identification information is comprised in described batch data collection request, comprise multiple process data type identification information in described data acquisition list, described process data type identification information is for distinguishing different process datas;
Data read module, for reading the process data that in the described data acquisition list that collects, multiple process data type identification information is corresponding in batches;
Process monitoring module, for monitoring process status information, and issues thread control module by state of the art information;
Thread control module, for starting data acquisition control thread and being set to waiting status; After judging that technique starts according to described state of the art information, activate described data acquisition control thread and be set to state of activation; After judging that technique terminates according to described state of the art information, described data acquisition control thread is set to waiting status;
Wherein, described data acquisition control thread completes batch data obtain for triggering described request sending module and data read module.
10. data acquisition facility according to claim 9, is characterized in that:
Described request sending module is according to time interval timed sending batch data collection request.
11. 1 kinds of process data acquisition systems, is characterized in that, comprising:
Data acquisition facility, for sending batch data collection request, data acquisition List Identification information is comprised in described batch data collection request, comprise multiple process data type identification information in described data acquisition list, described process data type identification information is for distinguishing different process datas; And read for batch the process data that in the described data acquisition list that slave computer device collects, multiple process data type identification information is corresponding;
Slave computer device, for receiving the batch data collection request that described data acquisition facility sends; Obtain the data acquisition list that in described batch data collection request, data acquisition List Identification information is corresponding; Travel through each process data type identification information in described data acquisition list, gather the process data that each process data type identification information is corresponding one by one, and each process data collected is preserved; All gather complete when the process data that process data type identification information all in described data acquisition list are corresponding and after preserving, all process data batches preserved returned.
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| CN106325224B (en) * | 2015-06-17 | 2019-10-08 | 北京北方华创微电子装备有限公司 | A kind of control method and device of apparatus for production line |
| CN106469338A (en) * | 2015-08-11 | 2017-03-01 | 上海合印包装服务有限公司 | A kind of have the print order system that technique describes identification function |
| CN110177127B (en) * | 2019-04-15 | 2021-12-07 | 创新先进技术有限公司 | Data transmission method, device and equipment based on grpc framework |
| CN110321323A (en) * | 2019-07-15 | 2019-10-11 | 北京北方华创微电子装备有限公司 | Process data management method and apparatus |
| CN110990239B (en) * | 2019-11-13 | 2023-08-08 | 北京思维造物信息科技股份有限公司 | System and method for collecting user data in user equipment based on soft sensor |
| CN111651390A (en) * | 2020-05-19 | 2020-09-11 | 北京北方华创微电子装备有限公司 | Serial port data acquisition method, device and equipment of semiconductor equipment |
| CN114385667A (en) * | 2022-01-12 | 2022-04-22 | 中国银行股份有限公司 | Transaction monitoring method and device |
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