CN102519587B - Device for Measuring the Light Intensity Distribution of a Laser Beam - Google Patents
Device for Measuring the Light Intensity Distribution of a Laser Beam Download PDFInfo
- Publication number
- CN102519587B CN102519587B CN201110452954.2A CN201110452954A CN102519587B CN 102519587 B CN102519587 B CN 102519587B CN 201110452954 A CN201110452954 A CN 201110452954A CN 102519587 B CN102519587 B CN 102519587B
- Authority
- CN
- China
- Prior art keywords
- light intensity
- laser beam
- intensity distribution
- coil
- focusing lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
本发明涉及激光光束光强的测量技术,具体是一种快速测量激光光束光强分布的简易装置。本发明解决了现有激光光束光强测量技术无法快速对激光光束横向光强分布进行测量、测量不灵活、以及操作繁琐的问题。快速测量激光光束光强分布的简易装置包括电动式扬声器、聚焦透镜、光电探测器、BNC连接线、积分电路、以及数字示波器;所述电动式扬声器包括支柱、永磁体、阻尼材料层、线圈、黑色遮光板、顶盖、以及线圈连接线;永磁体的下端面固定于支柱上端面。本发明有效解决了现有激光光束光强测量技术无法快速对激光光束横向光强分布进行测量、测量不灵活、以及操作繁琐的问题,适用于对激光光束横截面光强分布进行快速的测量。
The invention relates to a measurement technique for the light intensity of a laser beam, in particular to a simple device for rapidly measuring the light intensity distribution of a laser beam. The invention solves the problems that the existing laser beam light intensity measurement technology cannot quickly measure the transverse light intensity distribution of the laser beam, the measurement is inflexible, and the operation is cumbersome. The simple device for quickly measuring the light intensity distribution of the laser beam includes an electrodynamic loudspeaker, focusing lens, photodetector, BNC connecting wire, integrating circuit, and digital oscilloscope; the electrodynamic loudspeaker includes a pillar, a permanent magnet, a damping material layer, a coil, Black shading plate, top cover, and coil connecting wire; the lower end surface of the permanent magnet is fixed on the upper end surface of the pillar. The invention effectively solves the problems that the existing laser beam light intensity measurement technology cannot quickly measure the transverse light intensity distribution of the laser beam, the measurement is inflexible, and the operation is cumbersome, and is suitable for fast measurement of the cross-sectional light intensity distribution of the laser beam.
Description
技术领域 technical field
本发明涉及激光光束光强的测量技术,具体是一种测量激光光束光强分布的装置。 The invention relates to a measurement technique for the light intensity of a laser beam, in particular to a device for measuring the distribution of the light intensity of a laser beam.
背景技术 Background technique
自激光器诞生后,激光作为一种高亮度、方向性、单色性和相干性都很好的光源已被广泛应用在科研、测量、加工、医疗、通信以及军事等领域。在这些应用中,激光光束横向的光强分布(即光强在与光束传播方向垂直的横截面上的分布)作为评价激光光束质量的一项重要的技术性能指标一直受到人们的重视。根据共焦谐振腔理论,激光器一般输出的光束在与传播方向垂直的横截面上呈现为高斯型。然而,由于实际激光器中采用的谐振腔形式多种多样,可获得激光器输出的激光束千差万别。在激光发展历史上,不同专业的人员根据各自不同的目的对高斯激光光束的光斑质量提出了不同的要求。为了满足各方面的需求,必须知道激光光束在横向截面上的光强分布曲线。 Since the birth of the laser, as a light source with high brightness, directivity, monochromaticity and coherence, the laser has been widely used in scientific research, measurement, processing, medical treatment, communication and military fields. In these applications, the lateral light intensity distribution of the laser beam (that is, the distribution of the light intensity on the cross section perpendicular to the beam propagation direction) has always been valued as an important technical performance index for evaluating the quality of the laser beam. According to the theory of confocal resonator, the beam generally output by the laser is Gaussian in the cross-section perpendicular to the propagation direction. However, due to the variety of resonant cavities used in actual lasers, the laser beams that can be output by lasers vary widely. In the history of laser development, different professionals have put forward different requirements for the spot quality of Gaussian laser beams according to their different purposes. In order to meet the needs of various aspects, it is necessary to know the light intensity distribution curve of the laser beam on the transverse section.
到目前为止,人们发展了许多技术来测量激光光束的光强分布,如小孔探针法,CCD法和刀口法。其中,小孔探针法由于实验上很难做到孔与激光光束同心,因而在测光束光斑大小时精度难以保证,且测量光强时也不能很快地直接得到光强的分布曲线。CCD法虽然精度高,但只适合测低功率光束光斑的大小,有着明显的局限性,且不能定量地反映光强的变化。目前,刀口法被广泛用于测量高斯光束光强的分布。刀口法通常是将刀片固定在光学平移台上,可沿与光束传播方向垂直的方向切割光束,但需慢慢通过平移台调节多次测量透过刀口边缘的激光功率,因此不能快速地得到激光光束的光强分布曲线。基于上述理由,有必要发明一种可以快速、准确、灵活地测量激光光束横截面光强分布的简易装置,以解决现有激光光束光强测量技术无法快速对激光光束横向光强分布进行测量、测量不灵活、以及操作繁琐的问题。 So far, people have developed many techniques to measure the light intensity distribution of laser beams, such as small hole probe method, CCD method and knife edge method. Among them, the small hole probe method is difficult to achieve the concentricity of the hole and the laser beam in the experiment, so it is difficult to guarantee the accuracy when measuring the beam spot size, and the light intensity distribution curve cannot be obtained directly when measuring the light intensity. Although the CCD method has high precision, it is only suitable for measuring the spot size of low-power beams, has obvious limitations, and cannot quantitatively reflect the change of light intensity. At present, the knife-edge method is widely used to measure the intensity distribution of Gaussian beams. The knife-edge method usually fixes the blade on the optical translation stage, which can cut the beam along the direction perpendicular to the beam propagation direction, but needs to slowly adjust the translation stage to measure the laser power passing through the edge of the knife edge for many times, so the laser cannot be obtained quickly. The light intensity distribution curve of the beam. Based on the above reasons, it is necessary to invent a simple device that can quickly, accurately and flexibly measure the light intensity distribution of the cross-section of the laser beam to solve the problem that the existing laser beam light intensity measurement technology cannot quickly measure the transverse light intensity distribution of the laser beam. The problem of inflexible measurement and cumbersome operation.
发明内容 Contents of the invention
本发明为了解决现有激光光束光强测量技术无法快速对激光光束横向光强分布进行测量、测量不灵活、以及操作繁琐的问题,提供了一种测量激光光束光强分布的装置。 In order to solve the problems that the existing laser beam light intensity measurement technology cannot quickly measure the laser beam transverse light intensity distribution, the measurement is inflexible, and the operation is cumbersome, a device for measuring the laser beam light intensity distribution is provided.
本发明是采用如下技术方案实现的:测量激光光束光强分布的装置,包括电动式扬声器、聚焦透镜、光电探测器、BNC连接线、积分电路、以及数字示波器;所述电动式扬声器包括支柱、永磁体、阻尼材料层、线圈、黑色遮光板、顶盖、以及线圈连接线;永磁体的下端面固定于支柱上端面;阻尼材料层固定于永磁体的上端面;线圈套接于永磁体的中部;黑色遮光板垂直固定于线圈上端面;顶盖固定于阻尼材料层上端面;线圈连接线连接于线圈两端;光电探测器位于聚焦透镜后侧焦点上;光电探测器的输出端通过BNC连接线与积分电路的输入端连接;积分电路的输出端与数字示波器的输入端连接;黑色遮光板位于聚焦透镜前侧。 The present invention is realized by adopting the following technical scheme: the device for measuring the light intensity distribution of the laser beam includes a dynamic loudspeaker, a focusing lens, a photodetector, a BNC connection line, an integrating circuit, and a digital oscilloscope; the dynamic loudspeaker includes a pillar, Permanent magnet, damping material layer, coil, black light-shielding plate, top cover, and coil connection wire; the lower end surface of the permanent magnet is fixed on the upper end surface of the pillar; the damping material layer is fixed on the upper end surface of the permanent magnet; the coil is sleeved on the permanent magnet The middle part; the black shading plate is vertically fixed on the upper end surface of the coil; the top cover is fixed on the upper end surface of the damping material layer; the coil connecting wire is connected to both ends of the coil; the photodetector is located on the rear focus of the focusing lens; the output of the photodetector is through BNC The connection line is connected with the input end of the integrating circuit; the output end of the integrating circuit is connected with the input end of the digital oscilloscope; the black shading plate is located at the front side of the focusing lens.
工作时,激光器输出的激光光束经聚焦透镜会聚成一很细的点光束,点光束完全被位于聚焦透镜后侧焦点上的光电探测器收集。光电探测器将所探测到的光信号转换为电信号,电信号经BNC连接线接入积分电路进行积分处理,积分处理后的电信号连到数字示波器进行显示。具体工作时,向电动式扬声器的线圈通以合适方向的电流,由法拉第电磁感应定律可知,线圈将会上下快速振动。与此同时,黑色遮光板在线圈的带动下向上快速切割激光光束。激光光束的光强随黑色遮光板的移动会发生快速变化。该光强变化的激光光束经聚焦透镜会聚后完全被光电探测器收集且转换为电信号。光电探测器输出的电信号为一条光束横截面上不同位置处光强的快变曲线,而经积分电路处理后的电信号则为光强的分布曲线。由此,本发明所述的测量激光光束光强分布的装置即实现了针对激光光束横截面光强分布进行快速、准确、灵活的测量。在上述过程中,顶盖起到限制线圈向上运动的作用。阻尼材料层则可以减小线圈振动对测量过程的影响,并增加电动式扬声器的使用效率和寿命。基于上述过程,与现有激光光束光强测量技术相比,本发明所述的测量激光光束光强分布的装置实现了快速对激光光束横向光强分布进行测量,同时其测量更加灵活,操作更加简单。 When working, the laser beam output by the laser is converged into a very thin point beam through the focusing lens, and the point beam is completely collected by the photodetector located at the focal point on the rear side of the focusing lens. The photodetector converts the detected optical signal into an electrical signal, and the electrical signal is connected to the integration circuit through the BNC connection line for integration processing, and the integrated electrical signal is connected to a digital oscilloscope for display. During specific work, a current in a suitable direction is passed to the coil of the electrodynamic speaker. According to Faraday's law of electromagnetic induction, the coil will vibrate rapidly up and down. At the same time, the black light shield is driven by the coil to quickly cut the laser beam upwards. The intensity of the laser beam changes rapidly as the black shutter moves. The laser beam with varying light intensity is collected by a photodetector after being converged by a focusing lens and converted into an electrical signal. The electrical signal output by the photodetector is a fast-changing curve of light intensity at different positions on the beam cross section, and the electrical signal processed by the integrating circuit is a distribution curve of light intensity. Therefore, the device for measuring the light intensity distribution of the laser beam in the present invention realizes fast, accurate and flexible measurement of the light intensity distribution in the cross-section of the laser beam. During the above process, the top cover plays a role in restricting the upward movement of the coil. The damping material layer can reduce the influence of coil vibration on the measurement process, and increase the service efficiency and life of the electrodynamic loudspeaker. Based on the above process, compared with the existing laser beam light intensity measurement technology, the device for measuring the laser beam light intensity distribution according to the present invention can quickly measure the transverse light intensity distribution of the laser beam, and at the same time, its measurement is more flexible and the operation is more efficient. Simple.
进一步地,还包括腔体;腔体上开有与聚焦透镜前侧位置正对的通孔;电动式扬声器、聚焦透镜、光电探测器、BNC连接线、积分电路、数字示波器均位于腔体内;黑色遮光板位于通孔与聚焦透镜前侧之间。工作时,激光器输出的激光光束穿过腔体上的通孔到达聚焦透镜进行会聚,最后被位于聚光透镜焦点上的光电探测器收集探测。 Further, it also includes a cavity; the cavity is provided with a through hole facing the front side of the focusing lens; the dynamic speaker, focusing lens, photodetector, BNC connecting line, integrating circuit, and digital oscilloscope are all located in the cavity; The black gobo is located between the through hole and the front side of the focusing lens. When working, the laser beam output by the laser passes through the through hole on the cavity to reach the focusing lens for convergence, and finally is collected and detected by the photodetector located at the focus of the focusing lens.
本发明有效解决了现有激光光束光强测量技术无法快速对激光光束横向光强分布进行测量、测量不灵活、以及操作繁琐的问题,适用于对激光光束横截面光强分布进行快速的测量。 The invention effectively solves the problems that the existing laser beam light intensity measurement technology cannot quickly measure the transverse light intensity distribution of the laser beam, the measurement is inflexible, and the operation is cumbersome, and is suitable for fast measurement of the cross-sectional light intensity distribution of the laser beam.
附图说明 Description of drawings
图1是本发明的结构示意图。 Fig. 1 is a schematic structural view of the present invention.
图中:1-聚焦透镜,2-光电探测器,3-BNC连接线,4-积分电路,5-数字示波器,6-支柱,7-永磁体,8-阻尼材料层,9-线圈,10-黑色遮光板,11-顶盖,12-线圈连接线,13-腔体,14-通孔。 In the figure: 1-focusing lens, 2-photodetector, 3-BNC connecting wire, 4-integrating circuit, 5-digital oscilloscope, 6-pillar, 7-permanent magnet, 8-damping material layer, 9-coil, 10 -Black shading plate, 11-top cover, 12-coil connecting wire, 13-cavity, 14-through hole.
具体实施方式 Detailed ways
测量激光光束光强分布的装置,包括电动式扬声器、聚焦透镜1、光电探测器2、BNC连接线3、积分电路4、以及数字示波器5; A device for measuring the light intensity distribution of a laser beam, including a dynamic speaker, a focusing lens 1, a photodetector 2, a BNC connection line 3, an integrating circuit 4, and a digital oscilloscope 5;
所述电动式扬声器包括支柱6、永磁体7、阻尼材料层8、线圈9、黑色遮光板10、顶盖11、以及线圈连接线12;永磁体7的下端面固定于支柱6上端面;阻尼材料层8固定于永磁体7的上端面;线圈9套接于永磁体7的中部;黑色遮光板10垂直固定于线圈9上端面;顶盖11固定于阻尼材料层8上端面;线圈连接线12连接于线圈9两端; Described electrodynamic loudspeaker comprises pillar 6, permanent magnet 7, damping material layer 8, coil 9, black light-shielding plate 10, top cover 11, and coil connecting wire 12; The lower end surface of permanent magnet 7 is fixed on pillar 6 upper end surface; Damping The material layer 8 is fixed on the upper end surface of the permanent magnet 7; the coil 9 is sleeved in the middle of the permanent magnet 7; the black light-shielding plate 10 is vertically fixed on the upper end surface of the coil 9; the top cover 11 is fixed on the upper end surface of the damping material layer 8; the coil connecting wire 12 is connected to the two ends of the coil 9;
光电探测器2位于聚焦透镜1后侧焦点上;光电探测器2的输出端通过BNC连接线3与积分电路4的输入端连接;积分电路4的输出端与数字示波器5的输入端连接;黑色遮光板10位于聚焦透镜1前侧; The photodetector 2 is located at the rear focal point of the focusing lens 1; the output terminal of the photodetector 2 is connected to the input terminal of the integrating circuit 4 through the BNC connecting line 3; the output terminal of the integrating circuit 4 is connected to the input terminal of the digital oscilloscope 5; black The shading plate 10 is located on the front side of the focusing lens 1;
还包括腔体13;腔体13上开有与聚焦透镜1前侧位置正对的通孔14;电动式扬声器、聚焦透镜1、光电探测器2、BNC连接线3、积分电路4、数字示波器5均位于腔体13内;黑色遮光板10位于通孔14与聚焦透镜1前侧之间。 Also includes a cavity 13; the cavity 13 is provided with a through hole 14 facing the front side of the focusing lens 1; a dynamic speaker, a focusing lens 1, a photodetector 2, a BNC connecting line 3, an integrating circuit 4, and a digital oscilloscope 5 are located in the cavity 13; the black shading plate 10 is located between the through hole 14 and the front side of the focusing lens 1.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110452954.2A CN102519587B (en) | 2011-12-30 | 2011-12-30 | Device for Measuring the Light Intensity Distribution of a Laser Beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110452954.2A CN102519587B (en) | 2011-12-30 | 2011-12-30 | Device for Measuring the Light Intensity Distribution of a Laser Beam |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102519587A CN102519587A (en) | 2012-06-27 |
| CN102519587B true CN102519587B (en) | 2014-03-05 |
Family
ID=46290587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110452954.2A Expired - Fee Related CN102519587B (en) | 2011-12-30 | 2011-12-30 | Device for Measuring the Light Intensity Distribution of a Laser Beam |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102519587B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106768399A (en) * | 2016-12-07 | 2017-05-31 | 武汉纺织大学 | Rectangular laser spot energy distribution rapid detection system and method |
| CN106644067B (en) * | 2016-12-26 | 2018-07-03 | 深圳市华星光电技术有限公司 | Light trapping fixing device |
| CN108088557B (en) * | 2018-01-17 | 2023-12-05 | 南京先进激光技术研究院 | Mid-infrared laser beam analysis device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5459565A (en) * | 1993-08-20 | 1995-10-17 | Duma Optronics, Ltd. | Laser beam analyzer |
| CN1740759A (en) * | 2005-09-23 | 2006-03-01 | 左昉 | Laser beam parameter measuring method based on image processing |
| CN201622746U (en) * | 2010-01-14 | 2010-11-03 | 嘉应学院 | Gaussian Beam Transformation Law and Characteristic Measurement Teaching Experimental Instrument |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2053761U (en) * | 1989-06-26 | 1990-02-28 | 张燕晶 | High resolution integral scanner |
| CN1026153C (en) * | 1991-03-28 | 1994-10-05 | 电子科技大学 | Method and equipment for measuring diameter of object |
| CN2323545Y (en) * | 1998-02-12 | 1999-06-09 | 刘彦雄 | Loudspeaker without magnetic conduct column and magnetic conduct sheet |
| US6559934B1 (en) * | 1999-09-14 | 2003-05-06 | Visx, Incorporated | Method and apparatus for determining characteristics of a laser beam spot |
| TW200608475A (en) * | 2004-08-26 | 2006-03-01 | Adv Lcd Tech Dev Ct Co Ltd | Method of picking up sectional image of laser light |
| CN2916601Y (en) * | 2005-12-29 | 2007-06-27 | 上海无线电设备研究所 | Laser far-field light intensity distribution test device |
-
2011
- 2011-12-30 CN CN201110452954.2A patent/CN102519587B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5459565A (en) * | 1993-08-20 | 1995-10-17 | Duma Optronics, Ltd. | Laser beam analyzer |
| CN1740759A (en) * | 2005-09-23 | 2006-03-01 | 左昉 | Laser beam parameter measuring method based on image processing |
| CN201622746U (en) * | 2010-01-14 | 2010-11-03 | 嘉应学院 | Gaussian Beam Transformation Law and Characteristic Measurement Teaching Experimental Instrument |
Non-Patent Citations (2)
| Title |
|---|
| Marijia S. Scholl.Measurement spatial properties of the cw Nd:YAG laser beam.《APPLIED OPTICS》.1980,第19卷(第21期),3655-3659. |
| Measurement spatial properties of the cw Nd:YAG laser beam;Marijia S. Scholl;《APPLIED OPTICS》;19801101;第19卷(第21期);3655-3659 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102519587A (en) | 2012-06-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102519587B (en) | Device for Measuring the Light Intensity Distribution of a Laser Beam | |
| CN103278893B (en) | Terahertz wave transmitting/receiving integrated module | |
| CN104165754B (en) | A kind of measuring method of laser bar device for measuring focal length of thermal lens | |
| CN109683082A (en) | A kind of test macro and test method for optical chip | |
| CN108287059B (en) | High-precision near-infrared laser beam quality measurement and analysis device | |
| JP7003182B2 (en) | Photoelectron measuring device | |
| CN105953739A (en) | Transverse deformation measuring system and method based on laser irradiation intensity variation | |
| CN203365739U (en) | Terahertz wave transmitting/receiving integrated module | |
| CN104458216B (en) | Device and method for detecting weak absorption of optical element | |
| CN205157037U (en) | Focus supersound focus acoustic pressure measuring instrument | |
| CN103884418B (en) | Method and device for measuring resonant frequency of tuning fork quartz crystal oscillator based on acoustic excitation | |
| CN106770181A (en) | A kind of multifocal point type Raman spectrum Acquisition Instrument based on diffraction optical element | |
| CN201788317U (en) | Optical center adjustment device for galvanometer scanning module | |
| CN204758758U (en) | High pressure gold utensil corona detector | |
| CN103323395A (en) | Single-light-source multi-channel optical system applied to flow analyzer | |
| CN106768267A (en) | One kind focuses on ultrasound focus sound pressure measurement instrument | |
| CN206095586U (en) | Novel optic fibre refraction index profile measures device | |
| CN108254340A (en) | Flying-spot microscope based on linear polarization modulation | |
| CN210923529U (en) | An online monitoring device for surface hardness in the forming process of 3D printed parts | |
| CN103884656B (en) | Micro-nano optical spectrum imaging device | |
| CN204154989U (en) | Carbuncle type Polarization Controller | |
| CN115436337B (en) | Based on multiplexed anti-resonance hollow core fiber transmission detection module | |
| CN105372816A (en) | Light uniforming method of optical fiber coupling type semiconductor laser | |
| CN105953916A (en) | Laser power sampling method and device | |
| CN204143070U (en) | A kind of high-power semiconductor laser spot shaping device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140305 Termination date: 20191230 |