CN102455169A - Zero-position sensor - Google Patents
Zero-position sensor Download PDFInfo
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- CN102455169A CN102455169A CN2010105305506A CN201010530550A CN102455169A CN 102455169 A CN102455169 A CN 102455169A CN 2010105305506 A CN2010105305506 A CN 2010105305506A CN 201010530550 A CN201010530550 A CN 201010530550A CN 102455169 A CN102455169 A CN 102455169A
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- 238000001514 detection method Methods 0.000 claims description 43
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 37
- 230000006698 induction Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 13
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 10
- 238000009434 installation Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000003760 hair shine Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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Abstract
The invention discloses a zero-position sensor, which comprises a host module (1). The host module (1) comprises a base (11). A laser collimating mirror (16) and a light spot position detecting device (17) are arranged on the base (11). The light spot position detecting device (17) is used for receiving parallel beam reflected by a reflective module (2) installed on a work-piece table (3). The reflective module (2) is used for reflecting laser beam emitted by the laser collimating mirror (16) in parallel. The light spot position detecting device (17) is electrically connected with a printed circuit board (15) for converting an inducted optical signal into an electrical signal. The zero-position sensor disclosed by the invention is applied to a position measurement system and has the advantage of being high in measurement precision.
Description
Technical field
The laser interferometer that the present invention relates to a kind of position measuring system for the IC etching machine provides the null pick-up of initial position.
Background technology
In the position measuring system of IC etching machine, the work stage of litho machine adopts laser interferometer with respect to the position measuring system of base station.Laser interferometer is an incremental measuring system; The accurate measurement of relative displacement can only be provided, therefore, utilize before laser interferometer carries out position measurement; Need to use null pick-up as laser interferometer an initial position to be provided, this position is the absolute reference position.When using laser interferometer to carry out displacement measurement, be reference point with this absolute reference position.The general position transducer of one dimension that adopts is confirmed reference point in the prior art.Tested absolute reference position operated by rotary motion has the benchmark object of reference, when position transducer has just touched the benchmark object of reference of tested reference position, will write down the data message of reference position.And this data message of position transducer record is owing to be not the center of tested reference position benchmark object of reference; Therefore the data message of the absolute reference position of position transducer collection produces deviation, so that the absolute reference position that position transducer is gathered is inaccurate.Particularly when the benchmark object of reference of tested reference position is big, because the benchmark object of reference edge of tested reference position differs greatly with the distance at its center, then during its positional information of position transducer collection, the data message of reference point will produce bigger deviation.Because the data message of reference point is inaccurate, then also can there be deviation in the displacement measurement of laser interferometer, thereby has influenced the accurate measurement of laser interferometer.
Summary of the invention
Technical matters to be solved by this invention is, overcomes above deficiency, and a kind of null pick-up that can improve measuring accuracy is provided.
In order to solve the problems of the technologies described above, technical scheme of the present invention is: a kind of null pick-up, comprise host module, and described host module comprises pedestal, described pedestal is provided with laser alignment mirror and facula position detection means; Said facula position detection means receives the parallel beam of the reflecting module reflection that is installed on the work stage; The laser beam that the said laser alignment mirror of described reflecting module reflected in parallel sends, described facula position detection means is electrically connected with the printed circuit board (PCB) that the light signal of its induction is transferred to electric signal.
Further, described pedestal comprises base plate and swash plate, and described base plate is provided with bottom outlet, and described swash plate is provided with first opening and second opening; The medial surface of said swash plate is equipped with the facula position detection means, the center of said second opening of photosensitive region centrally aligned of said facula position detection means.
Further; Described pedestal also comprises adjustable plate; Described adjustable plate comprises the free wall that a fixed head and an end are fixedly connected with said fixed head; Bottom outlet and fixed head that the free end of said free wall passes base plate are fixed on the base plate, and the free end of said free wall is fixedly connected with locating piece; Described locating piece is provided with pilot hole, and the laser alignment mirror is installed in the described pilot hole, and the transmitting terminal of said laser alignment mirror is aimed at described first opening.
Further, described pedestal also comprises at least one block of side plate, and described side plate is all perpendicular to the base plate and the swash plate of said pedestal.
Further, described swash plate medial surface also is provided with locating slot, and described second opening is arranged on the described locating slot, and described facula position detection means is installed in the locating slot.
Further; The lateral surface of said swash plate also is installed with shutter; Described shutter is provided with the 3rd opening and the 4th opening, the center of said first opening of the centrally aligned of described the 3rd opening, the center of described two openings of the centrally aligned of described the 4th opening.
Further, one of them side of said locating piece is provided with a slit with the axial centre line parallel of said pilot hole, and described slit and pilot hole connect.
Further, described facula position detection means is two-dimentional.
Further, described reflecting module comprises that an end is fixed on the base on the work stage, and the other end of said base is provided with fixed orifice, and the pyramid mirror of ability reflection of parallel beam is installed in the described fixed orifice; Said base end to end is penetrated with the 5th opening and the 6th opening, and described the 5th opening and the 6th opening all connect with described fixed orifice; Described the 5th opening can pass the laser beam that said laser alignment mirror sends, and described the 6th opening can acceptance angle axicon lens reflected in parallel laser alignment mirror sends the laser beam of returning.
Further, said base is fixedly mounted on the work stage through the ring flange of end face setting.
Technique effect of the present invention is: zero-bit of the present invention is gathered the light signal that reflecting module reflects the laser beam of being launched by the laser alignment mirror at sensor through the facula position detection means, passes through the data message of printed circuit board (PCB) record acquisition again.The facula position detection means can adopt one dimension or two-dimentional.Its concrete course of work is following: the laser alignment mirror of host module is launched laser beam; First opening that laser beam passes pedestal shines the 5th opening of the base of the reflecting module on the work stage; The 6th opening, second opening on the pedestal that the parallel beam of returning through the pyramid mirror reflection of reflecting module again passes reflecting module shine on the facula position detection means on the pedestal; Then will gather the facula position of laser beam on the facula position detection means; At this moment, the printed circuit board (PCB) that connects the facula position detection means writes down the data message of hot spot position detection device collection and converts its light signal into electric signal.The installation site of above-mentioned reflecting module is exactly the benchmark object of reference of absolute reference position; The 5th opening of reflecting module is the entrance port of laser beam; The 5th opening that is to say reflecting module is the center of tested absolute reference position reference object of reference; Therefore, the positional information of the null pick-up of this kind structure collection is accurately higher compared with the data message of the position transducer collection of prior art.The absolute reference initial position message of the null pick-up collection of this kind structure can provide an initial position reference point accurately for laser interferometer.
The present invention is owing to adopt facula position detection means and laser alignment mirror; The benchmark object of reference of tested absolute reference position is a reflecting module; The 5th opening of reflecting module is again benchmark object of reference center, therefore, and at the measuring workpieces platform during with respect to base station position initial position message; Reduce measuring error, improved measuring accuracy.
When null pick-up of the present invention adopts the facula position detection means of two dimension; Facula position detects the positional information that information can be gathered any two degree of freedom among X, Y, Z, Rx, Ry, the Rz; At this moment; Printed circuit board (PCB) data recorded information also is two-dimentional, and is more accurate compared with the data message of a point of independent measurement.When needs are gathered the positional information of six-freedom degree, adopt three groups of null pick-ups that the two dimensional spot position detection device is installed, it is installed in diverse location just can carries out the measurement of six-degree of freedom position information.This kind mode when measuring six-freedom degree, is only installed six position transducers of three groups of null pick-ups rather than prior art, therefore, has reduced alignment error, thereby has improved measuring accuracy.
Description of drawings
Fig. 1 is the installation site synoptic diagram of null pick-up of the present invention;
Fig. 2 is the unitized construction synoptic diagram of the host module of null pick-up of the present invention;
Fig. 3 is the disassemblying structure synoptic diagram of null pick-up Fig. 2 of the present invention;
Fig. 4 is the local structure for amplifying synoptic diagram of A part among Fig. 3 of null pick-up of the present invention;
Fig. 5 is the unitized construction synoptic diagram of another angle of the host module of null pick-up of the present invention;
Fig. 6 is the disassemblying structure synoptic diagram of null pick-up Fig. 5 of the present invention;
Fig. 7 is the pedestal bottom plate structural representation of the host module of null pick-up of the present invention;
Fig. 8 is the adjustable plate of null pick-up of the present invention and the package assembly synoptic diagram of locating piece;
Fig. 9 is the disassemblying structure synoptic diagram of the reflecting module of null pick-up of the present invention;
Figure 10 is the unitized construction synoptic diagram of the reflecting module of null pick-up of the present invention;
Figure 11 is the understructure synoptic diagram of the reflecting module of null pick-up of the present invention.
Shown in the figure: 1, host module, 2, reflecting module, 3, work stage, 11, pedestal, 12, adjustable plate, 13, shutter, 14, locating piece; 15, printed circuit board (PCB), 16, the laser alignment mirror, 17, the facula position detection means, 21, base, 22, the pyramid mirror, 111, base plate; 112, swash plate, 113, side plate, 121, free end, 122 free walls, 123 fixed heads, the 131, the 3rd opening; 132, the 4th opening, 141, pilot hole, 142, the slit, 161, transmitting terminal, 211, fixed orifice, the 212, the 5th opening; 213, ring flange, the 214, the 6th opening, 1111, bottom outlet, 1121, first opening, 1,122 second openings, 1123, locating slot.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further detail:
Shown in Fig. 1-11, null pick-up of the present invention comprises host module 1, and described host module 1 comprises pedestal 11, and described pedestal 11 is provided with laser alignment mirror 16 and facula position detection means 17; Said facula position detection means 17 receives the parallel beam of reflecting module 2 reflections that are installed on the work stage 3; The laser beam that the said laser alignment mirror 16 of described reflecting module 2 reflected in parallel sends, described facula position detection means 17 is electrically connected with the printed circuit board (PCB) 15 that the light signal of its induction is transferred to electric signal.
Like Fig. 2, Fig. 3, Fig. 5, Fig. 6, Fig. 7, shown in Figure 8, the pedestal 11 of said host module 1 comprises base plate 111 and swash plate 112, and described base plate 111 is provided with bottom outlet 1111, and described swash plate 112 is provided with first opening 1121 and second opening 1122; It also comprises adjustable plate 12; Described adjustable plate 12 comprises the free wall 122 that a fixed head 123 and an end are fixedly connected with said fixed head 123; Bottom outlet 1111 and fixed head 123 that the free end 121 of said free wall 122 passes base plate 111 are fixed on the base plate 111, and the free end 121 of said free wall 122 is fixedly connected with locating piece 14; Described locating piece 14 is provided with pilot hole 141, in the described pilot hole 141 laser alignment mirror 16 is installed, and the transmitting terminal 161 of said laser alignment mirror 16 is aimed at described first opening 1121; The medial surface of said swash plate 112 also is equipped with facula position detection means 17, the center of said second opening 1122 of photosensitive region centrally aligned of said facula position detection means 17; Described facula position detection means 17 is electrically connected with the printed circuit board (PCB) 15 that light signal is transferred to electric signal.Among Fig. 8, the faying face of adjustable plate 12 and locating piece 14 be provided with the concavo-convex groove that matches with protruding with behind adjustable plate 12 and locating piece 14 location, connect with bolt again.
Like Fig. 2, Fig. 3, Fig. 5, shown in Figure 6, described pedestal 11 also comprises at least one block of side plate 113, and described side plate 113 is all perpendicular to base plate of said pedestal 11 111 and swash plate 112; The base plate 111 and the swash plate 112 of said pedestal 11 can be integrated, also can make up; The base plate 111 of said pedestal 11, swash plate 112 and at least one block of side plate 113 can be integrated, also can make up.Adopt integrated mode, can reduce in the array mode, the alignment error when base plate 111, swash plate 112 or side plate 113 combinations has improved the degree of accuracy of pedestal 11.
Like Fig. 2, shown in Figure 3; The lateral surface of said swash plate 112 also is installed with shutter 13; Described shutter 13 is provided with the 3rd opening 131 and the 4th opening 132; The center of said first opening 1121 of the centrally aligned of described the 3rd opening 131, the center of described two openings 1122 of the centrally aligned of described the 4th opening 132.Shutter 13 is a selectable unit; The purpose of shutter 13 is set; Be in order to adjust the size of the 3rd opening 131 and the 4th opening 132, so that laser alignment mirror 16 emission laser beam can be passed the 4th opening 132 of the 6th opening 214 that the parallel beam of the 5th opening 212 through reflection on the pyramid mirror 22 of reflecting module 2 of the 3rd opening 131, the reflecting module 2 of first opening 1121, the shutter 13 of pedestal 11 pass reflecting module 2 smoothly, shutter 13 smoothly, second opening 1122 of pedestal 1 is radiated on the facula position detection means 17 of pedestal 1.
As shown in Figure 4, one of them side of said locating piece 14 is provided with a slit 142 with the axial centre line parallel of said pilot hole 141, and described slit 142 connects with pilot hole 141.Its advantage is: slit 142 can reinforce the installation of the laser alignment mirror 16 in the pilot hole 141, and laser alignment mirror 16 can securely be installed in the pilot hole 141 of locating piece 14.
Described facula position detection means 17 can be an one dimension, also can be two-dimentional.The facula position detection means 17 of employing one dimension can only be gathered the positional information of the one degree of freedom of tested absolute reference position reference object of reference; Adopt the facula position detection means 17 of two dimension, the degree of freedom positional information that can gather the both direction of tested absolute reference position reference object of reference simultaneously.
Like Fig. 2, Fig. 3, Fig. 5, shown in Figure 6, the gradient scope of the adjustable plate 12 free walls 122 that the gradient of the swash plate 112 of said pedestal 11 matches with it is greater than 0 degree, less than 90 degree or greater than 90 degree, spends less than 180.Specifically add the angle that to select man-hour 15 degree, 30 degree, 45 degree, 60 degree, 75 degree, 105 degree, 120 degree, 135 degree, 150 degree, 165 degree etc. to be convenient to process.This embodiment adopts 45 degree, because 45 degree can make the adjusting, easier for installation of adjustable plate 12 and pedestal 11.
Like Fig. 9, Figure 10, shown in Figure 11, described reflecting module 2 comprises that an end is fixed on the base 21 on the work stage 3, and the other end of said base 21 is provided with fixed orifice 211, and the pyramid mirror 22 of ability reflection of parallel beam is installed in the described fixed orifice 211; Said base 21 end to end also are penetrated with the 5th opening 212 and the 6th opening 214, and described the 5th opening 212 and the 6th opening 214 all connect with described fixed orifice 211; Described the 5th opening 212 can pass the laser beam that said laser alignment mirror 16 sends, the laser beam that described the 6th opening 214 ability acceptance angle axicon lens 22 reflected in parallel laser alignment mirrors 16 send.In this kind structure, as the benchmark object of reference, the 5th opening 212 is the center of benchmark object of reference with reflecting module 2, and during measurement, laser beam is transmitted directly in the 5th opening 212, makes the measurement data of this null pick-up more accurate.
Like Fig. 9, Figure 10, shown in Figure 11, said base 21 is fixedly mounted on the work stage 3 through the ring flange 213 of end face setting.Its advantage is: ring flange 213, can increase the base 21 of reflecting module 2 and the contact area of work stage 3, and make being installed on the work stage 3 that pyramid mirror 22 can be more stable.
Like Fig. 3, Fig. 5, Fig. 6, shown in Figure 11; Described first opening 1121, second opening 1122, the 3rd opening 131, the 4th opening 132, the 5th opening 212, the 6th opening 214 can be manhole, also can be polygon through holes such as triangle, quadrangle.This embodiment all adopts manhole, is because the circular port manufacturing is simple, easy to process.
Zero-bit of the present invention is gathered the light signal that reflecting module 2 reflects the laser beam of being launched by laser alignment mirror 16 at sensor through facula position detection means 17, passes through the data message of printed circuit board (PCB) 15 record acquisitions again.Facula position detection means 17 can adopt one dimension or two-dimentional.Its concrete course of work is following: the laser alignment mirror 16 of host module 1 is launched laser beam; First opening 1121 that laser beam passes pedestal 11 shines the 5th opening 212 of the base 21 of the reflecting module 2 on the work stage 3; The parallel beam that reflects of pyramid mirror 22 through reflecting module 2 passes the 6th opening 214 of reflecting module 2 again, second opening 1122 on the pedestal 11 shines on the facula position detection means 17 on the pedestal 11; Then will gather the facula position of laser beam on the facula position detection means 17; At this moment, the printed circuit board (PCB) 15 that connects facula position detection means 17 writes down the data message of hot spot position detection devices 17 collections and converts its light signal into electric signal.The installation site of above-mentioned reflecting module 2 is exactly the benchmark object of reference of absolute reference position; The 5th opening 212 of reflecting module 2 is the entrance port of laser beam; The 5th opening 212 that is to say reflecting module 2 is the center of tested absolute reference position reference object of reference; Therefore, the positional information of the null pick-up of this kind structure collection is accurately higher compared with the data message of the position transducer collection of prior art.The absolute reference initial position message of the null pick-up collection of this kind structure can provide an initial position reference point accurately for laser interferometer.
The present invention is owing to adopt facula position detection means 17 and laser alignment mirror 16; The benchmark object of reference of tested absolute reference position is a reflecting module 2; The 5th opening 212 of reflecting module 2 is again benchmark object of reference center, therefore, and at measuring workpieces platform 3 during with respect to base station position initial position message; Reduce measuring error, improved measuring accuracy.
When null pick-up of the present invention adopts the facula position detection means 17 of two dimension; Facula position detects the positional information that 17 information can be gathered any two degree of freedom among X, Y, Z, Rx, Ry, the Rz; At this moment; Printed circuit board (PCB) 15 data recorded information also are two-dimentional, and are more accurate compared with the data message of a point of independent measurement.When needs are gathered the positional information of six-freedom degree, adopt three groups of null pick-ups that two dimensional spot position detection device 17 is installed, it is installed in diverse location just can carries out the measurement of six-degree of freedom position information.This kind mode when measuring six-freedom degree, is only installed six position transducers of three groups of null pick-ups rather than prior art, therefore, has reduced alignment error, thereby has improved measuring accuracy.
Claims (10)
1. null pick-up, it is characterized in that: comprise host module (1), described host module (1) comprises pedestal (11), described pedestal (11) is provided with laser alignment mirror (16) and facula position detection means (17); Said facula position detection means (17) receives the parallel beam of reflecting module (2) reflection that is installed on the work stage (3); The laser beam that the said laser alignment mirror of described reflecting module (2) reflected in parallel (16) sends, described facula position detection means (17) are electrically connected with the printed circuit board (PCB) (15) that the light signal of its induction is transferred to electric signal.
2. null pick-up according to claim 1; It is characterized in that: described pedestal (11) comprises base plate (111) and swash plate (112); Described base plate (111) is provided with bottom outlet (1111), and described swash plate (112) is provided with first opening (1121) and second opening (1122); The medial surface of said swash plate (112) is equipped with facula position detection means (17), the center of said second opening of the photosensitive region centrally aligned of said facula position detection means (17) (1122).
3. null pick-up according to claim 1; It is characterized in that: described pedestal (11) also comprises adjustable plate (12); Described adjustable plate (12) comprises the free wall (122) that a fixed head (113) and an end are fixedly connected with said fixed head (113); Bottom outlet (1111) and fixed head (123) that the free end (121) of said free wall (122) passes base plate (111) are fixed on the base plate (111), and the free end (121) of said free wall (122) is fixedly connected with locating piece (14); Described locating piece (14) is provided with pilot hole (141), and laser alignment mirror (16) is installed in the described pilot hole (141), and the transmitting terminal (161) of said laser alignment mirror (16) is aimed at described first opening (1121).
4. null pick-up according to claim 2 is characterized in that: described pedestal (11) also comprises at least one block of side plate (113), and described side plate (113) is all perpendicular to the base plate (111) and the swash plate (112) of said pedestal (11).
5. null pick-up according to claim 2; It is characterized in that: described swash plate (112) medial surface also is provided with locating slot (1123); Described second opening (1122) is arranged on the described locating slot (1123), and described facula position detection means (17) is installed in the locating slot (1123).
6. null pick-up according to claim 2; It is characterized in that: the lateral surface of said swash plate (112) also is installed with shutter (13); Described shutter (13) is provided with the 3rd opening (131) and the 4th opening (132); The center of said first opening of the centrally aligned of described the 3rd opening (131) (1121), the center of described two openings of the centrally aligned of described the 4th opening (132) (1122).
7. null pick-up according to claim 3; It is characterized in that: one of them side of said locating piece (14) is provided with the slit (142) with the axial centre line parallel of said pilot hole (141), and described slit (142) connect with pilot hole (141).
8. null pick-up according to claim 1 is characterized in that: described facula position detection means (17) is two-dimentional.
9. null pick-up according to claim 1; It is characterized in that: described reflecting module (2) comprises that an end is fixed on the base (21) on the work stage (3); The other end of said base (21) is provided with fixed orifice (211), and the pyramid mirror (22) of ability reflection of parallel beam is installed in the described fixed orifice (211); Said base (21) end to end is penetrated with the 5th opening (212) and the 6th opening (214), and described the 5th opening (212) and the 6th opening (214) all connect with described fixed orifice (211); Described the 5th opening (212) can pass the laser beam that said laser alignment mirror (16) sends, the laser beam that described the 6th opening (214) ability acceptance angle axicon lens (22) reflected in parallel laser alignment mirror (16) sends.
10. null pick-up according to claim 9 is characterized in that: said base (21) is fixedly mounted on the work stage (3) through the ring flange (213) that end face is provided with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010530550.6A CN102455169B (en) | 2010-11-03 | 2010-11-03 | Zero-position sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010530550.6A CN102455169B (en) | 2010-11-03 | 2010-11-03 | Zero-position sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102455169A true CN102455169A (en) | 2012-05-16 |
| CN102455169B CN102455169B (en) | 2014-02-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010530550.6A Active CN102455169B (en) | 2010-11-03 | 2010-11-03 | Zero-position sensor |
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| Country | Link |
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| CN (1) | CN102455169B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102829722A (en) * | 2012-08-29 | 2012-12-19 | 江苏建威电子科技有限公司 | Position sensor |
| CN104677271A (en) * | 2013-11-29 | 2015-06-03 | 上海微电子装备有限公司 | Device and method for adjusting zero sensor |
| CN112947007A (en) * | 2021-01-19 | 2021-06-11 | 上海集成电路装备材料产业创新中心有限公司 | Rotary device of rotary platform of photoetching machine |
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| JP2006317200A (en) * | 2005-05-11 | 2006-11-24 | Canon Inc | Surface shape measuring device |
| CN1904548A (en) * | 2005-07-29 | 2007-01-31 | 清华同方威视技术股份有限公司 | Equipment used for space position precise measurement |
| CN101482395A (en) * | 2009-02-10 | 2009-07-15 | 上海微电子装备有限公司 | Position measurement apparatus and method |
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|---|---|---|---|---|
| US4566016A (en) * | 1983-03-24 | 1986-01-21 | Dainippon Screen Seizo Kabushiki Kaisha | Dual intensity laser beam picture recording method |
| JP2006317200A (en) * | 2005-05-11 | 2006-11-24 | Canon Inc | Surface shape measuring device |
| CN1904548A (en) * | 2005-07-29 | 2007-01-31 | 清华同方威视技术股份有限公司 | Equipment used for space position precise measurement |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102829722A (en) * | 2012-08-29 | 2012-12-19 | 江苏建威电子科技有限公司 | Position sensor |
| CN102829722B (en) * | 2012-08-29 | 2013-09-18 | 江苏建威电子科技有限公司 | Position sensor |
| CN104677271A (en) * | 2013-11-29 | 2015-06-03 | 上海微电子装备有限公司 | Device and method for adjusting zero sensor |
| CN104677271B (en) * | 2013-11-29 | 2017-12-29 | 上海微电子装备（集团）股份有限公司 | A kind of null pick-up adjusting means and method |
| CN112947007A (en) * | 2021-01-19 | 2021-06-11 | 上海集成电路装备材料产业创新中心有限公司 | Rotary device of rotary platform of photoetching machine |
| CN112947007B (en) * | 2021-01-19 | 2024-08-20 | 上海集成电路装备材料产业创新中心有限公司 | Rotating device of rotating platform of photoetching machine |
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| Publication number | Publication date |
|---|---|
| CN102455169B (en) | 2014-02-19 |
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