CN102400208A - Crucible withdrawing device of single crystal furnace - Google Patents
Crucible withdrawing device of single crystal furnace Download PDFInfo
- Publication number
- CN102400208A CN102400208A CN2011103606217A CN201110360621A CN102400208A CN 102400208 A CN102400208 A CN 102400208A CN 2011103606217 A CN2011103606217 A CN 2011103606217A CN 201110360621 A CN201110360621 A CN 201110360621A CN 102400208 A CN102400208 A CN 102400208A
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- CN
- China
- Prior art keywords
- support ring
- handle
- single crystal
- collet
- withdrawing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 31
- 241000013987 Colletes Species 0.000 description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 239000010439 graphite Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 241000209456 Plumbago Species 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a crucible withdrawing device of a single crystal furnace. The crucible withdrawing device comprises a suspending part and a hook arranged on the suspending part, wherein the suspending part comprises a lifting frame, an upper supporting ring, fixing members, a connecting rod, a lower supporting ring, a bottom support and a handle; the upper end of the lifting frame is fixedly connected with the hook; the lower end of the lifting frame is fixed on the upper supporting ring; two ends of the connecting rod respectively penetrate through the upper supporting ring and the lower supporting ring; the connecting rod is rotatably fixed with the upper supporting ring and the lower supporting ring relatively through the fixing members; one end of the handle is fixedly arranged on the end part of the connecting rod, which penetrates out from the upper supporting ring; one end of the bottom support is fixedly arranged on the end part of the connecting rod, which penetrates out from the lower supporting ring; the other end of the handle and the other end of the bottom support are opposite in extending directions; the handle and the bottom support are mutually parallel to the upper supporting ring and the lower supporting ring; and the other end of the bottom support points to the axis of the lower supporting ring.
Description
Technical field:
The present invention relates to the silicon single crystal manufacturing apparatus technical field, particularly a kind of single crystal growing furnace crucible withdrawing device.
Background technology:
Single crystal growing furnace is the indispensable equipment that polysilicon is converted into the silicon single crystal technological process, and silicon single crystal is the basic material of photovoltaic generation and semicon industry.Silicon single crystal is as the critical support material of advanced information society, is one of most important monocrystal material in the world at present, and it is not only the major function material of development computingmachine and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.
Before silicon single-crystal draws, need utilize the crucible unloading device to take out crucible, general single crystal growing furnace crucible unloading device all is to adopt artificial reassembling type to realize, so labour intensity is big and dangerous.
Summary of the invention:
In view of this, be necessary to provide a kind of laborsaving, safe single crystal growing furnace crucible withdrawing device.
A kind of single crystal growing furnace crucible withdrawing device; Comprise suspention portion and be installed in the hook in the suspention portion, suspention portion comprises upending frame, last support ring, mounting block, union lever, following support ring, collet, handle, and the upending frame upper end is fixedly connected with hook; The lower end of upending frame is fixed on the support ring; The two ends of union lever are respectively from last support ring, down support ring passes, and through mounting block with union lever and last support ring, relative rotatable the fixing of support ring down, an end of handle be fixedly mounted on union lever from end that last support ring passes; One end of collet is fixedly mounted on the end from playing support ring to pass of union lever; Wherein the other end of the other end of handle and collet stretches out in the opposite directionly, and handle, collet and last support ring, down support ring is parallel to each other the axis of support ring under the sensing of the other end of collet.
When utilizing single crystal growing furnace crucible withdrawing device provided by the invention that crucible is taken out operation, rotating handles, collet is along with rotation; So that collet is held the bottom of crucible, utilize again to be connected mechanical means with hook and from body of heater, to take out crucible, when needs will be placed on the crucible release of graphite support; Only need the reverse direction rotating handles, make collet along with rotation, so that collet leaves the bottom of crucible; So do not need workman's manual teardown single crystal growing furnace crucible withdrawing device; Just can make the fixing of single crystal growing furnace crucible withdrawing device and crucible and separate, and then reduce working strength of workers, and can guarantee workman's safety.
Description of drawings:
Accompanying drawing 1 is the structural representation of the single crystal growing furnace crucible withdrawing device of a preferred embodiments.
Accompanying drawing 2 is structural representations of another angle of single crystal growing furnace crucible withdrawing device among Fig. 1.
Accompanying drawing 3 is structural representations of bulb plunger among Fig. 1.
Accompanying drawing 4 is application synoptic diagram of single crystal growing furnace crucible withdrawing device among Fig. 1.
Among the figure: single crystal growing furnace crucible withdrawing device 60, suspention portion 62, upending frame 621, last support ring 622, mounting block 623, union lever 624, following support ring 625, collet 626, handle 627, bulb plunger 628, housing 6281, spring 6282, ball 6283, positioning seat 629, hook 63, axis 81, graphite support 82, plumbago crucible 83, quartz crucible 84, crucible lift mechanism 86
Embodiment:
Comprise suspention portion 62 and be installed in the hook 63 in the suspention portion 62 like Fig. 1 and single crystal growing furnace crucible withdrawing device 60 shown in Figure 2.
Suspention portion 62 comprises upending frame 621, last support ring 622, mounting block 623, union lever 624, following support ring 625, collet 626, handle 627, bulb plunger 628, positioning seat 629.
Upending frame 621 upper ends are fixedly connected with hook 63, and the lower end of upending frame 621 is fixed on the support ring 625.
The two ends of union lever 624 are respectively from last support ring 622, support ring 625 passes down, and through mounting block 623 with union lever 624 and last support ring 622, relative rotatable fixing of support ring 625 down.In this embodiment; Mounting block 623 is a nut; Be arranged at the screw thread that nut cooperates on the union lever 624; Last support ring 622, the corresponding pilot hole that is provided with on the support ring 625 down, the two ends of union lever 624 are corresponding respectively passes support ring 622, down behind the pilot hole of support ring 625, through nut and last support ring 622, support ring 625 locks on the axis direction of last support ring 622, following support ring 625 relatively down.
One end of handle 627 be fixedly mounted on union lever 624 from end that last support ring 622 passes; One end of collet 626 is fixedly mounted on the end from playing support ring 625 to pass of union lever 624; Wherein the other end of the other end of handle 627 and collet 626 stretches out in the opposite direction; And handle 627, collet 626 and last support ring 622, following support ring 625 are parallel to each other the axis of support ring 625 under the sensing of the other end of collet 626.In this embodiment, handle 627, collet 626 are long strip shape, and an end of handle 627, collet 626 all is provided with fixed orifices, the fixed orifices that passes handle 627, collet 626 that the two ends of union lever 624 are corresponding respectively, and through the nut locking.
Positioning seat 629 is fixed on the support ring 622 and near handle 627, bulb plunger 628 is installed on the positioning seat 629, and handle 627 is provided for the pilot hole that supplies bulb plunger 628 to head near the position of union lever 624 ends.In this embodiment, positioning seat is " L " shape; Please be simultaneously referring to Fig. 3; Bulb plunger 628 comprises housing 6281, spring 6282 and ball 6283; Spring 6282 and ball 6283 are installed in the housing 6281, and the part of ball 6283 exposes from the circular port on the housing 6281, and wherein the diameter of ball 6283 is greater than the diameter of circular port.
The process that single crystal growing furnace crucible withdrawing device 60 picks and places crucible is below described, please be simultaneously referring to Fig. 4, in the silicon single-crystal operation process; Crucible lift mechanism 86 drives axis 81 and rises, and under the effect of graphite support 82, plumbago crucible 83 rises with quartz crucible 44 together; When arrival is spacing, through crucible unloading device 60 plumbago crucible 83 and quartz crucible 84 are taken out, be specially: rotating handles 627; Collet 626 is along with rotation; Through bulb plunger 628 location, when handle 627 and bulb plunger are spent for 628 one-tenth 90, can be used for taking out plumbago crucible 83 and quartz crucible 84; When handle 627 and bulb plunger were spent for 628 one-tenth 0, crucible unloading device 60 can take out from the outside of plumbago crucible 63.
Claims (7)
1. single crystal growing furnace crucible withdrawing device; It is characterized in that: this single crystal growing furnace crucible withdrawing device comprises suspention portion and is installed in the hook in the suspention portion; Suspention portion comprises upending frame, last support ring, mounting block, union lever, following support ring, collet, handle; The upending frame upper end is fixedly connected with hook, and the lower end of upending frame is fixed on the support ring, and the two ends of union lever are passed from last support ring, following support ring respectively; And through mounting block with union lever and last support ring, relative rotatable the fixing of support ring down; One end of handle be fixedly mounted on union lever from the end that last support ring passes, an end of collet be fixedly mounted on union lever from the end that following support ring passes, wherein the other end of the other end of handle and collet stretches out in the opposite direction; And handle, collet and last support ring, following support ring are parallel to each other the axis of support ring under the sensing of the other end of collet.
2. single crystal growing furnace crucible withdrawing device according to claim 1 is characterized in that: positioning seat is " L " shape.
3. single crystal growing furnace crucible withdrawing device according to claim 1, it is characterized in that: mounting block is a nut, is arranged at the screw thread that nut cooperates on the union lever.
4. single crystal growing furnace crucible withdrawing device according to claim 1; It is characterized in that: go up support ring, the corresponding pilot hole that is provided with on the support ring down; The two ends of union lever are corresponding respectively passes support ring, down behind the pilot hole of support ring, through mounting block with last support ring, support ring locks on the axis direction of last support ring, following support ring relatively down.
5. single crystal growing furnace crucible withdrawing device according to claim 1; It is characterized in that: handle, collet are long strip shape; One end of handle, collet all is provided with fixed orifices, the fixed orifices that passes handle, collet that the two ends of union lever are corresponding respectively, and through the mounting block locking.
6. single crystal growing furnace crucible withdrawing device according to claim 1; It is characterized in that: suspention portion also comprises positioning seat, bulb plunger; Positioning seat is fixed on the support ring and near handle; The bulb plunger is installed on the positioning seat, and handle is provided for the pilot hole that supplies the bulb plunger to head near the position of union lever end.
7. single crystal growing furnace crucible withdrawing device according to claim 6; It is characterized in that: the bulb plunger comprises housing, spring and ball; Spring and ball are installed in the housing, and the part of spheroid exposes from the circular port on the housing, and wherein the diameter of spheroid is greater than the diameter of circular port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103606217A CN102400208A (en) | 2011-11-15 | 2011-11-15 | Crucible withdrawing device of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103606217A CN102400208A (en) | 2011-11-15 | 2011-11-15 | Crucible withdrawing device of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102400208A true CN102400208A (en) | 2012-04-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103606217A Pending CN102400208A (en) | 2011-11-15 | 2011-11-15 | Crucible withdrawing device of single crystal furnace |
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| Country | Link |
|---|---|
| CN (1) | CN102400208A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103233265A (en) * | 2013-04-18 | 2013-08-07 | 中国恩菲工程技术有限公司 | Single crystal rod hoisting device |
| CN116590786A (en) * | 2023-07-18 | 2023-08-15 | 苏州晨晖智能设备有限公司 | Single crystal furnace thermal field dismounting device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101570392A (en) * | 2008-04-30 | 2009-11-04 | 日本超精石英株式会社 | Crucible lift device and method for taking-out crucible |
| CN101962086A (en) * | 2009-07-22 | 2011-02-02 | 日本超精石英株式会社 | A handling device and handling method of quartz glass crucible |
| CN101962085A (en) * | 2009-07-22 | 2011-02-02 | 日本超精石英株式会社 | Crane device for wrapped quartz glass crucible and method of packing wrapped quartz glass crucible using the device |
-
2011
- 2011-11-15 CN CN2011103606217A patent/CN102400208A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101570392A (en) * | 2008-04-30 | 2009-11-04 | 日本超精石英株式会社 | Crucible lift device and method for taking-out crucible |
| CN101962086A (en) * | 2009-07-22 | 2011-02-02 | 日本超精石英株式会社 | A handling device and handling method of quartz glass crucible |
| CN101962085A (en) * | 2009-07-22 | 2011-02-02 | 日本超精石英株式会社 | Crane device for wrapped quartz glass crucible and method of packing wrapped quartz glass crucible using the device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103233265A (en) * | 2013-04-18 | 2013-08-07 | 中国恩菲工程技术有限公司 | Single crystal rod hoisting device |
| CN103233265B (en) * | 2013-04-18 | 2016-03-30 | 中国恩菲工程技术有限公司 | Single crystal rod hoisting device |
| CN116590786A (en) * | 2023-07-18 | 2023-08-15 | 苏州晨晖智能设备有限公司 | Single crystal furnace thermal field dismounting device |
| CN116590786B (en) * | 2023-07-18 | 2023-09-22 | 苏州晨晖智能设备有限公司 | Single crystal furnace thermal field dismounting device |
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Application publication date: 20120404 |