CN102358826A - 一种铝掺杂的氧化锆复合抛光粉的制备方法 - Google Patents
一种铝掺杂的氧化锆复合抛光粉的制备方法 Download PDFInfo
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- CN102358826A CN102358826A CN201110244253XA CN201110244253A CN102358826A CN 102358826 A CN102358826 A CN 102358826A CN 201110244253X A CN201110244253X A CN 201110244253XA CN 201110244253 A CN201110244253 A CN 201110244253A CN 102358826 A CN102358826 A CN 102358826A
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- zirconium
- aluminum
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Links
- 238000005498 polishing Methods 0.000 title claims abstract description 53
- 239000000843 powder Substances 0.000 title claims abstract description 30
- 239000002131 composite material Substances 0.000 title claims abstract description 29
- 238000002360 preparation method Methods 0.000 title claims abstract description 23
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 title claims description 46
- 150000003754 zirconium Chemical class 0.000 claims abstract description 31
- 239000012266 salt solution Substances 0.000 claims abstract description 26
- 239000000243 solution Substances 0.000 claims abstract description 16
- 238000006386 neutralization reaction Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 10
- 239000003513 alkali Substances 0.000 claims abstract description 8
- 238000001354 calcination Methods 0.000 claims abstract description 8
- 239000003960 organic solvent Substances 0.000 claims abstract description 8
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims abstract 14
- DNXNYEBMOSARMM-UHFFFAOYSA-N alumane;zirconium Chemical compound [AlH3].[Zr] DNXNYEBMOSARMM-UHFFFAOYSA-N 0.000 claims abstract 12
- 239000002244 precipitate Substances 0.000 claims abstract 12
- 239000011259 mixed solution Substances 0.000 claims abstract 6
- 239000000203 mixture Substances 0.000 claims description 21
- 239000012670 alkaline solution Substances 0.000 claims description 17
- 150000007530 organic bases Chemical class 0.000 claims description 17
- 238000003756 stirring Methods 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 239000007864 aqueous solution Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 claims description 6
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 6
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 5
- 239000004202 carbamide Substances 0.000 claims description 5
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 claims description 4
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 claims description 4
- CMOAHYOGLLEOGO-UHFFFAOYSA-N oxozirconium;dihydrochloride Chemical compound Cl.Cl.[Zr]=O CMOAHYOGLLEOGO-UHFFFAOYSA-N 0.000 claims description 3
- XJUNLJFOHNHSAR-UHFFFAOYSA-J zirconium(4+);dicarbonate Chemical compound [Zr+4].[O-]C([O-])=O.[O-]C([O-])=O XJUNLJFOHNHSAR-UHFFFAOYSA-J 0.000 claims description 3
- 241000143437 Aciculosporium take Species 0.000 claims 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims 1
- ZZCONUBOESKGOK-UHFFFAOYSA-N aluminum;trinitrate;hydrate Chemical compound O.[Al+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O ZZCONUBOESKGOK-UHFFFAOYSA-N 0.000 claims 1
- 239000011976 maleic acid Substances 0.000 claims 1
- UJVRJBAUJYZFIX-UHFFFAOYSA-N nitric acid;oxozirconium Chemical compound [Zr]=O.O[N+]([O-])=O.O[N+]([O-])=O UJVRJBAUJYZFIX-UHFFFAOYSA-N 0.000 claims 1
- 229920001495 poly(sodium acrylate) polymer Polymers 0.000 claims 1
- 229920002401 polyacrylamide Polymers 0.000 claims 1
- NNMHYFLPFNGQFZ-UHFFFAOYSA-M sodium polyacrylate Chemical compound [Na+].[O-]C(=O)C=C NNMHYFLPFNGQFZ-UHFFFAOYSA-M 0.000 claims 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 claims 1
- 230000032683 aging Effects 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 6
- 229910052761 rare earth metal Inorganic materials 0.000 abstract description 6
- 238000005406 washing Methods 0.000 abstract description 6
- 150000002910 rare earth metals Chemical class 0.000 abstract description 5
- 238000005520 cutting process Methods 0.000 abstract description 4
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 abstract 4
- 229910001928 zirconium oxide Inorganic materials 0.000 abstract 4
- 238000001035 drying Methods 0.000 abstract 1
- 238000001914 filtration Methods 0.000 abstract 1
- 239000005304 optical glass Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 description 53
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 52
- 239000004411 aluminium Substances 0.000 description 49
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 20
- 229910052726 zirconium Inorganic materials 0.000 description 20
- 239000012530 fluid Substances 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 238000001556 precipitation Methods 0.000 description 10
- 159000000013 aluminium salts Chemical class 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910000329 aluminium sulfate Inorganic materials 0.000 description 6
- 239000013078 crystal Substances 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- -1 Organic acid salt Chemical class 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000008139 complexing agent Substances 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000036571 hydration Effects 0.000 description 2
- 238000006703 hydration reaction Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002512 suppressor factor Substances 0.000 description 2
- 229910020203 CeO Inorganic materials 0.000 description 1
- SGXGSKGGPHZTCP-UHFFFAOYSA-N O.O=[Zr] Chemical compound O.O=[Zr] SGXGSKGGPHZTCP-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- AFCIMSXHQSIHQW-UHFFFAOYSA-N [O].[P] Chemical compound [O].[P] AFCIMSXHQSIHQW-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- VCRLKNZXFXIDSC-UHFFFAOYSA-N aluminum oxygen(2-) zirconium(4+) Chemical compound [O--].[O--].[Al+3].[Zr+4] VCRLKNZXFXIDSC-UHFFFAOYSA-N 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000003837 high-temperature calcination Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 description 1
- 235000019982 sodium hexametaphosphate Nutrition 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 1
- 238000001132 ultrasonic dispersion Methods 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
| 样品名称 | 光洁度等级 | 划伤条数 | 表面粘附性 |
| 铝掺杂的氧化锆复合抛光粉 | 高 | 5-15 | 弱 |
| 稀土抛光粉 | 低 | 15-30 | 强 |
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110244253 CN102358826B (zh) | 2011-08-19 | 2011-08-19 | 一种铝掺杂的氧化锆复合抛光粉的制备方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110244253 CN102358826B (zh) | 2011-08-19 | 2011-08-19 | 一种铝掺杂的氧化锆复合抛光粉的制备方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102358826A true CN102358826A (zh) | 2012-02-22 |
| CN102358826B CN102358826B (zh) | 2013-08-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110244253 Active CN102358826B (zh) | 2011-08-19 | 2011-08-19 | 一种铝掺杂的氧化锆复合抛光粉的制备方法 |
Country Status (1)
| Country | Link |
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| CN (1) | CN102358826B (zh) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103450813A (zh) * | 2013-01-10 | 2013-12-18 | 湖南皓志新材料股份有限公司 | 一种铁掺杂氧化锆抛光液的制备方法 |
| CN103450811A (zh) * | 2013-01-10 | 2013-12-18 | 湖南皓志新材料股份有限公司 | 一种铝掺杂的铈锆固溶体抛光粉的制备方法 |
| CN103965790A (zh) * | 2014-04-25 | 2014-08-06 | 泰安麦丰新材料科技有限公司 | 一种锆铝铈抛光液及其制备方法 |
| CN110256969A (zh) * | 2019-05-29 | 2019-09-20 | 湖南皓志科技股份有限公司 | 一种蓝玻璃精抛液及其配制方法 |
| CN112321458A (zh) * | 2020-10-26 | 2021-02-05 | 宿迁科思化学有限公司 | 一种防晒剂中间体依托立林的制备方法 |
| US11161751B2 (en) | 2017-11-15 | 2021-11-02 | Saint-Gobain Ceramics & Plastics, Inc. | Composition for conducting material removal operations and method for forming same |
| CN114538508A (zh) * | 2022-02-28 | 2022-05-27 | 深圳陶陶科技有限公司 | 二氧化锆粉体及其制备方法 |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103450813A (zh) * | 2013-01-10 | 2013-12-18 | 湖南皓志新材料股份有限公司 | 一种铁掺杂氧化锆抛光液的制备方法 |
| CN103450811A (zh) * | 2013-01-10 | 2013-12-18 | 湖南皓志新材料股份有限公司 | 一种铝掺杂的铈锆固溶体抛光粉的制备方法 |
| CN103450813B (zh) * | 2013-01-10 | 2014-09-17 | 湖南皓志新材料股份有限公司 | 一种铁掺杂氧化锆抛光液的制备方法 |
| CN103965790A (zh) * | 2014-04-25 | 2014-08-06 | 泰安麦丰新材料科技有限公司 | 一种锆铝铈抛光液及其制备方法 |
| CN103965790B (zh) * | 2014-04-25 | 2015-06-03 | 泰安麦丰新材料科技有限公司 | 一种锆铝铈抛光液及其制备方法 |
| US11161751B2 (en) | 2017-11-15 | 2021-11-02 | Saint-Gobain Ceramics & Plastics, Inc. | Composition for conducting material removal operations and method for forming same |
| CN110256969A (zh) * | 2019-05-29 | 2019-09-20 | 湖南皓志科技股份有限公司 | 一种蓝玻璃精抛液及其配制方法 |
| CN112321458A (zh) * | 2020-10-26 | 2021-02-05 | 宿迁科思化学有限公司 | 一种防晒剂中间体依托立林的制备方法 |
| CN112321458B (zh) * | 2020-10-26 | 2023-04-07 | 宿迁科思化学有限公司 | 一种防晒剂中间体依托立林的制备方法 |
| CN114538508A (zh) * | 2022-02-28 | 2022-05-27 | 深圳陶陶科技有限公司 | 二氧化锆粉体及其制备方法 |
| CN114538508B (zh) * | 2022-02-28 | 2023-12-26 | 深圳陶陶科技有限公司 | 二氧化锆粉体及其制备方法 |
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|---|---|
| CN102358826B (zh) | 2013-08-07 |
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