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CN102169856A - heat dissipation structure - Google Patents

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Publication number
CN102169856A
CN102169856A CN2011100345836A CN201110034583A CN102169856A CN 102169856 A CN102169856 A CN 102169856A CN 2011100345836 A CN2011100345836 A CN 2011100345836A CN 201110034583 A CN201110034583 A CN 201110034583A CN 102169856 A CN102169856 A CN 102169856A
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thermally conductive
conductive layer
adhesive
substrate
heat
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CN102169856B (en
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泉谷诚治
原和孝
福冈孝博
内山寿惠
平野仁嗣
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Nitto Denko Corp
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    • H10W40/251
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/04Non-macromolecular additives inorganic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • C09J9/02Electrically-conducting adhesives
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2039Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
    • H05K7/20436Inner thermal coupling elements in heat dissipating housings, e.g. protrusions or depressions integrally formed in the housing
    • H05K7/20445Inner thermal coupling elements in heat dissipating housings, e.g. protrusions or depressions integrally formed in the housing the coupling element being an additional piece, e.g. thermal standoff
    • H05K7/20454Inner thermal coupling elements in heat dissipating housings, e.g. protrusions or depressions integrally formed in the housing the coupling element being an additional piece, e.g. thermal standoff with a conformable or flexible structure compensating for irregularities, e.g. cushion bags, thermal paste
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2039Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
    • H05K7/20436Inner thermal coupling elements in heat dissipating housings, e.g. protrusions or depressions integrally formed in the housing
    • H05K7/20445Inner thermal coupling elements in heat dissipating housings, e.g. protrusions or depressions integrally formed in the housing the coupling element being an additional piece, e.g. thermal standoff
    • H05K7/20472Sheet interfaces
    • H05K7/20481Sheet interfaces characterised by the material composition exhibiting specific thermal properties
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/38Boron-containing compounds

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Laminated Bodies (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

散热结构体具备基板、安装于前述基板的电子零件、用于将由前述电子零件产生的热进行散热的散热性构件、和以覆盖前述电子零件的方式设置于前述基板上的导热性粘接片材。前述导热性粘接片材具备含有片状氮化硼颗粒的导热性层。前述导热性层的与前述导热性层厚度方向正交的方向的导热率为4W/m·K以上,前述导热性粘接片材与前述散热性构件接触。The heat dissipation structure includes a substrate, an electronic component mounted on the substrate, a heat dissipation member for dissipating heat generated by the electronic component, and a thermally conductive adhesive sheet provided on the substrate so as to cover the electronic component. . The thermally conductive adhesive sheet includes a thermally conductive layer containing flaky boron nitride particles. The thermal conductivity of the thermal conductive layer in a direction perpendicular to the thickness direction of the thermal conductive layer is 4 W/m·K or more, and the thermal conductive adhesive sheet is in contact with the heat dissipation member.

Description

散热结构体heat dissipation structure

技术领域technical field

本发明涉及散热结构体。The present invention relates to a heat dissipation structure.

背景技术Background technique

近年来,存储器等电子零件随着大容量化其工作时产生的放热量增大,由此电子零件有劣化的可能,因此包含电子零件和安装其的基板的结构体需要高散热性(高导热性)。In recent years, electronic components such as memories have increased the amount of heat generated during operation as their capacity has increased, which may degrade electronic components. Therefore, structures including electronic components and substrates on which they are mounted require high heat dissipation (high thermal conductivity) sex).

例如提出了下述结构体:在安装于基板的多个存储器上面,放置由铝构成的平板状的存储器用散热装置,用夹具夹住基板、各存储器和存储器用散热装置的结构体(例如存储器用散热装置,参照互联网(URL:http://www.ainex.jp/products/hm-02.htm))。For example, the following structure has been proposed: on a plurality of memory devices mounted on a substrate, a plate-shaped heat sink for memory made of aluminum is placed, and a structure in which the substrate, each memory, and heat sink for memory is clamped by a clamp (such as a memory For the heat sink, refer to the Internet (URL: http://www.ainex.jp/products/hm-02.htm)).

在上述存储器用散热装置、互联网的结构体中,通过使存储器用散热装置接触于存储器的上表面,将由存储器产生的热通过存储器用散热装置进行散热。In the structure of the heat sink for the memory and the Internet, the heat generated by the memory is dissipated by the heat sink for the memory by making the heat sink for the memory contact the upper surface of the memory.

发明内容Contents of the invention

发明要解决的问题The problem to be solved by the invention

然而,在上述存储器用散热装置、互联网的结构体中,存储器的侧表面不与平板状的存储器用散热装置接触,并且,各存储器的厚度不同的情况下,厚度薄的存储器的上表面与存储器用散热装置之间产生间隙。因此,有不能将由存储器产生的热进行充分散热的问题。However, in the structure of the above-mentioned heat sink for memory and the Internet, the side surface of the memory is not in contact with the flat heat sink for memory, and when the thickness of each memory is different, the upper surface of the thin memory and the memory Create gaps between heat sinks. Therefore, there is a problem that the heat generated by the memory cannot be sufficiently dissipated.

本发明的目的在于提供散热性优异的散热结构体。An object of the present invention is to provide a heat dissipation structure excellent in heat dissipation.

用于解决问题的方案solutions to problems

本发明的散热结构体,其特征在于,其具备基板、安装于前述基板的电子零件、用于将由前述电子零件产生的热进行散热的散热性构件、和以覆盖前述电子零件的的方式设置于前述基板上的导热性粘接片材,前述导热性粘接片材具备含有片状的氮化硼颗粒的导热性层,前述导热性层的与前述导热性层的厚度方向正交的方向的导热率为4W/m·K以上,前述导热性粘接片材与前述散热性构件接触。The heat dissipation structure of the present invention is characterized in that it includes a substrate, an electronic component mounted on the substrate, a heat dissipation member for dissipating heat generated by the electronic component, and a heat dissipation member provided on the electronic component so as to cover the electronic component. The thermally conductive adhesive sheet on the substrate, the thermally conductive adhesive sheet has a thermally conductive layer containing flaky boron nitride particles, and the thermally conductive layer has a direction perpendicular to the thickness direction of the thermally conductive layer. The heat conductivity is 4 W/m·K or more, and the heat conductive adhesive sheet is in contact with the heat dissipation member.

另外,在本发明的散热结构体中,适宜的是,前述导热性粘接片材具备层叠在前述导热性层的至少一面的粘接剂层或粘合剂层,前述粘接剂层或前述粘合剂层与前述基板粘接或粘合。In addition, in the heat dissipation structure of the present invention, preferably, the thermally conductive adhesive sheet includes an adhesive layer or an adhesive layer laminated on at least one surface of the thermally conductive layer, and the adhesive layer or the aforementioned The adhesive layer adheres or adheres to the aforementioned substrate.

发明的效果The effect of the invention

在本发明的散热结构体中,由于电子零件被导热性粘接片材覆盖,因而能够将由电子零件产生的热从电子零件的上表面和侧表面热传导至导热性粘接片材。接着,能够将所述热从导热性粘接片材热传导至散热构件,并在散热构件中散热至外部。In the heat dissipation structure of the present invention, since the electronic component is covered with the thermally conductive adhesive sheet, heat generated by the electronic component can be thermally conducted from the upper surface and the side surface of the electronic component to the thermally conductive adhesive sheet. Then, the heat can be thermally conducted from the thermally conductive adhesive sheet to the heat dissipation member, and dissipated to the outside in the heat dissipation member.

因此,能够将由电子零件产生的热通过导热性粘接片材和散热构件有效地进行散热。Therefore, the heat generated by the electronic component can be efficiently dissipated through the thermally conductive adhesive sheet and the heat dissipating member.

附图说明Description of drawings

图1示出本发明的散热结构体的一个实施方式的截面图。FIG. 1 shows a cross-sectional view of one embodiment of the heat dissipation structure of the present invention.

图2为用于说明导热性层的制造方法的工序图,2 is a process diagram for explaining a method of manufacturing a thermally conductive layer,

(a)表示将混合物或层叠片材进行热压的工序,(a) represents the process of hot-pressing the mixture or the laminated sheet,

(b)表示将压制片材分割为多个的工序,(b) represents the process of dividing the pressed sheet into multiple parts,

(c)表示将分割片材层叠的工序。(c) shows the step of laminating the divided sheets.

图3示出导热性层的立体图。Fig. 3 shows a perspective view of a thermally conductive layer.

图4示出导热性粘接片材的截面图。Fig. 4 shows a cross-sectional view of a heat conductive adhesive sheet.

图5为用于制作图1的散热结构体的工序图,表示在支持着框架的壳体上将安装有电子零件的基板进行固定,并且准备导热性粘接片材的工序。5 is a process diagram for manufacturing the heat dissipation structure shown in FIG. 1 , showing a process of fixing a substrate on which electronic components are mounted on a case supporting a frame and preparing a thermally conductive adhesive sheet.

图6示出本发明的散热结构体的其他实施方式(导热性粘接片材由导热性层构成的形态)的截面图。Fig. 6 shows a cross-sectional view of another embodiment (a form in which a heat conductive adhesive sheet is formed of a heat conductive layer) of the heat dissipation structure of the present invention.

图7为用于制作图6的散热结构体的工序图,表示在支持着框架的壳体上将安装有电子零件的基板进行固定,并且准备导热性粘接片材的工序。7 is a process diagram for manufacturing the heat dissipation structure of FIG. 6 , showing a process of fixing a substrate on which electronic components are mounted on a case supporting a frame and preparing a thermally conductive adhesive sheet.

图8示出本发明的散热结构体的其他实施方式(导热性粘接片材的另一个端部接触壳体的形态)的截面图。Fig. 8 is a cross-sectional view showing another embodiment (a form in which the other end of the thermally conductive adhesive sheet is in contact with the case) of the heat dissipation structure of the present invention.

图9示出本发明的散热结构体的其他实施方式(粘接·粘合层与电子零件上表面接触的形态)的截面图。Fig. 9 shows a cross-sectional view of another embodiment (a form in which an adhesive/adhesive layer is in contact with an upper surface of an electronic component) of the heat dissipation structure of the present invention.

图10示出耐弯曲性试验的类型I的试验装置(耐弯曲性试验前)的立体图。Fig. 10 shows a perspective view of a type I test device (before the bending resistance test) of the bending resistance test.

图11示出耐弯曲性试验的类型I的试验装置(耐弯曲性试验中)的立体图。FIG. 11 shows a perspective view of a type I test device (in the bending resistance test) of the bending resistance test.

具体实施方式Detailed ways

图1示出本发明的散热结构体的一个实施方式的截面图,图2为用于说明导热性层的制造方法的工序图,图3示出导热性层的立体图,图4示出导热性粘接片材的截面图,图5为用于制作图1的散热结构体的工序图。1 shows a cross-sectional view of one embodiment of the heat dissipation structure of the present invention, FIG. 2 is a process diagram for explaining a method of manufacturing a thermally conductive layer, FIG. 3 shows a perspective view of the thermally conductive layer, and FIG. As a cross-sectional view of the adhesive sheet, FIG. 5 is a process diagram for manufacturing the heat dissipation structure of FIG. 1 .

图1中,该散热结构体1具备基板2、安装在基板2上的电子零件3、用于将由电子零件3产生的热进行散热(热传输、热传导)的作为散热性构件的框架4、和设置在基板2上的导热性粘接片材5。In FIG. 1, the heat dissipation structure 1 includes a substrate 2, an electronic component 3 mounted on the substrate 2, a frame 4 as a heat dissipation member for dissipating heat generated by the electronic component 3 (heat transmission, heat conduction), and Thermally conductive adhesive sheet 5 provided on substrate 2 .

基板2形成为大致平板形状,由例如氮化铝、氧化铝等陶瓷;例如玻璃·环氧树脂;例如聚酰亚胺、聚酰胺酰亚胺、丙烯酸类树脂、聚醚腈、聚醚砜、聚对苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯、聚氯乙烯等合成树脂等形成。The substrate 2 is formed in a substantially flat plate shape, and is made of, for example, ceramics such as aluminum nitride and alumina; for example, glass and epoxy resin; for example, polyimide, polyamideimide, acrylic resin, polyethernitrile, polyethersulfone, Made of synthetic resins such as polyethylene terephthalate, polyethylene naphthalate, and polyvinyl chloride.

电子零件3包含例如IC(集成电路)芯片20、电容21、线圈22和/或电阻器23。另外,电子零件3控制例如小于5V的电压和/或小于1A的电流。电子零件3安装在基板2的上面,在面方向(基板2的面方向,图1的左右方向和纵深方向。)上彼此隔着间隔配置。电子零件3的厚度例如为1μm~1cm左右。The electronic component 3 includes, for example, an IC (Integrated Circuit) chip 20 , a capacitor 21 , a coil 22 and/or a resistor 23 . In addition, the electronic component 3 controls, for example, a voltage of less than 5V and/or a current of less than 1A. The electronic components 3 are mounted on the upper surface of the substrate 2 and are arranged at intervals in the planar direction (the planar direction of the substrate 2 , the left-right direction and the depth direction in FIG. 1 ). The thickness of the electronic component 3 is, for example, about 1 μm to 1 cm.

框架4被容纳基板2的壳体(在图1中未图示)支撑,其在基板2的外部(侧面)隔着间隔配置,俯视来看形成为包围基板2的大致框形。另外,框架4从截面来看形成为在上下方向长的大致矩形。框架4由例如铝、不锈钢、铜、铁等金属等形成。The frame 4 is supported by a case (not shown in FIG. 1 ) that accommodates the substrate 2 , is arranged at intervals outside the substrate 2 (side surface), and is formed in a substantially frame shape surrounding the substrate 2 in plan view. In addition, the frame 4 is formed in a substantially rectangular shape that is long in the vertical direction when viewed in cross section. The frame 4 is formed of, for example, metal such as aluminum, stainless steel, copper, iron, or the like.

导热性粘接片材5以覆盖电子零件3的方式设置在基板2上。另外,导热性粘接片材5被配置成一个端部(图1中的右端部)与电子零件3的表面(上表面和侧表面)接触,且另一个端部(图1中的左上端部)与框架4的内表面(右侧表面)接触。The thermally conductive adhesive sheet 5 is provided on the substrate 2 so as to cover the electronic component 3 . In addition, the thermally conductive adhesive sheet 5 is arranged such that one end (the right end in FIG. 1 ) is in contact with the surface (upper surface and side surface) of the electronic component 3, and the other end (the upper left end in FIG. 1 part) is in contact with the inner surface (right side surface) of the frame 4.

具体而言,导热性粘接片材5在散热结构体1中形成截面为大致L字形,中央(左右方向的中央)部和一个端部在基板2的上面配置成沿面方向延伸,自中央部起的另一端部分从基板2的一端边缘(左端边缘)向上方弯曲,而且,配置成导热性粘接片材5的另一个端部在框架4的右侧表面(内表面)向上方延伸。Specifically, the thermally conductive adhesive sheet 5 has a substantially L-shaped cross-section in the heat dissipation structure 1, and the center (the center in the left-right direction) and one end are arranged on the upper surface of the substrate 2 so as to extend in the plane direction. The other end portion is bent upward from one end edge (left end edge) of the substrate 2 , and the other end portion of the thermally conductive adhesive sheet 5 is arranged to extend upward on the right side surface (inner surface) of the frame 4 .

该导热性粘接片材5参照图4那样具备导热性层6、和层叠于导热性层6的背面(下面)的粘接剂层7或粘合剂层7(以下,有时将它们统称为“粘接·粘合层7”。)。This thermally conductive adhesive sheet 5 includes a thermally conductive layer 6 as shown in FIG. "Adhesive/adhesive layer 7".).

导热性层6形成为片状,且含有氮化硼颗粒。The thermally conductive layer 6 is formed in a sheet shape and contains boron nitride particles.

具体而言,导热性层6含有氮化硼(BN)颗粒作为必要成分,进一步,例如含有树脂成分。Specifically, the thermally conductive layer 6 contains boron nitride (BN) particles as an essential component, and further contains, for example, a resin component.

氮化硼颗粒形成为片状(或者鳞片状),在导热性层6中以取向于规定方向(后述)的形态分散。The boron nitride particles are formed into flakes (or scales) and dispersed in the thermally conductive layer 6 in a form oriented in a predetermined direction (described later).

氮化硼颗粒的纵向方向长度(与片的厚度方向正交的方向的最大长度)的平均例如为1~100μm、优选为3~90μm。另外,氮化硼颗粒的纵向方向长度的平均为5μm以上,优选为10μm以上,进一步优选为20μm以上,尤其优选为30μm以上,最优选为40μm以上,通常例如为100μm以下,优选为90μm以下。The average length of the boron nitride particles in the longitudinal direction (the maximum length in the direction perpendicular to the thickness direction of the sheet) is, for example, 1 to 100 μm, preferably 3 to 90 μm. In addition, the average length of the boron nitride particles in the longitudinal direction is 5 μm or more, preferably 10 μm or more, more preferably 20 μm or more, especially preferably 30 μm or more, most preferably 40 μm or more, usually, for example, 100 μm or less, preferably 90 μm or less.

另外,氮化硼颗粒的厚度(片材的厚度方向长度,即,颗粒的横向方向长度)的平均例如为0.01~20μm、优选为0.1~15μm。In addition, the average thickness of the boron nitride particles (the length in the thickness direction of the sheet, that is, the length in the lateral direction of the particles) is, for example, 0.01 to 20 μm, preferably 0.1 to 15 μm.

另外,氮化硼颗粒的纵横比(纵向方向长度/厚度)例如为2~10000、优选为10~5000。In addition, the aspect ratio (length in the longitudinal direction/thickness) of the boron nitride particles is, for example, 2 to 10,000, preferably 10 to 5,000.

接着,氮化硼颗粒的通过光散射法测定的平均粒径例如为5μm以上、优选为10μm以上、进一步优选为20μm以上、尤其优选为30μm以上、最优选为40μm以上,通常为100μm以下。Next, the average particle diameter of the boron nitride particles measured by the light scattering method is, for example, 5 μm or more, preferably 10 μm or more, more preferably 20 μm or more, especially preferably 30 μm or more, most preferably 40 μm or more, and usually 100 μm or less.

另外,通过光散射法测定的平均粒径为通过动态光散射式粒度分布测定装置测定的体积平均粒径。In addition, the average particle diameter measured by the light scattering method is the volume average particle diameter measured by the dynamic light scattering type particle size distribution measuring apparatus.

氮化硼颗粒的通过光散射法测定的平均粒径不满足上述范围时,有时导热性层6变脆、处理性降低。When the average particle diameter of the boron nitride particles measured by the light scattering method does not satisfy the above-mentioned range, the thermally conductive layer 6 may become brittle and the handleability may decrease.

另外,氮化硼颗粒的体积密度(JIS K 5101,表观密度)例如为0.3~1.5g/cm3、优选为0.5~1.0g/cm3In addition, the bulk density (JIS K 5101, apparent density) of the boron nitride particles is, for example, 0.3 to 1.5 g/cm 3 , preferably 0.5 to 1.0 g/cm 3 .

另外,氮化硼颗粒可以使用市售品或者其加工得到的加工品。作为氮化硼颗粒的市售品,可列举出例如MomentivePerformance Materials Japan LCC制造的“PT”系列(例如“PT-110”等),昭和电工公司制造的“SHOBN UHP”系列(例如“SHOBN UHP-1”等)等。In addition, the boron nitride particle can use a commercial item or the processed product obtained by processing it. Commercially available boron nitride particles include, for example, the "PT" series manufactured by MomentivePerformance Materials Japan LCC (such as "PT-110", etc.), the "SHOBN UHP" series manufactured by Showa Denko Corporation (such as "SHOBN UHP- 1", etc.) etc.

树脂成分是能够分散氮化硼颗粒的物质,即,分散氮化硼颗粒的分散溶剂(基体),可列举出例如热固化性树脂成分、热塑性树脂成分等树脂成分。The resin component is a substance capable of dispersing boron nitride particles, that is, a dispersion solvent (matrix) for dispersing boron nitride particles, and examples thereof include resin components such as thermosetting resin components and thermoplastic resin components.

作为热固化性树脂成分,可列举出例如环氧树脂、热固化性聚酰亚胺、酚醛树脂、尿素树脂、三聚氰胺树脂、不饱和聚酯树脂、邻苯二甲酸二烯丙酯树脂、有机硅树脂、热固化性聚氨酯树脂等。Examples of the thermosetting resin component include epoxy resin, thermosetting polyimide, phenolic resin, urea resin, melamine resin, unsaturated polyester resin, diallyl phthalate resin, silicone resin, thermosetting polyurethane resin, etc.

作为热塑性树脂成分,可列举出例如聚烯烃(例如聚乙烯、聚丙烯、乙烯-丙烯共聚物等)、丙烯酸类树脂(例如聚甲基丙烯酸甲酯等)、聚醋酸乙烯酯、乙烯-醋酸乙烯酯共聚物、聚氯乙烯、聚苯乙烯、聚丙烯腈、聚酰胺、聚碳酸酯、聚缩醛、聚对苯二甲酸乙二醇酯、聚苯醚、聚苯硫醚、聚砜、聚醚砜、聚醚醚酮、聚烯丙基砜(poly allyl sulfone)、热塑性聚酰亚胺、热塑性聚氨酯树脂、聚氨基双马来酰亚胺、聚酰胺酰亚胺、聚醚酰亚胺、双马来酰亚胺三嗪树脂、聚甲基戊烯、氟化树脂、液晶聚合物、烯烃-乙烯醇共聚物、离聚物、聚芳酯、丙烯腈-乙烯-苯乙烯共聚物、丙烯腈-丁二烯-苯乙烯共聚物、丙烯腈-苯乙烯共聚物等。Examples of thermoplastic resin components include polyolefins (such as polyethylene, polypropylene, ethylene-propylene copolymers, etc.), acrylic resins (such as polymethyl methacrylate, etc.), polyvinyl acetate, ethylene-vinyl acetate, etc. Ester copolymer, polyvinyl chloride, polystyrene, polyacrylonitrile, polyamide, polycarbonate, polyacetal, polyethylene terephthalate, polyphenylene oxide, polyphenylene sulfide, polysulfone, poly Ethersulfone, polyether ether ketone, polyallyl sulfone, thermoplastic polyimide, thermoplastic polyurethane resin, polyaminobismaleimide, polyamideimide, polyetherimide, Bismaleimide triazine resin, polymethylpentene, fluorinated resin, liquid crystal polymer, olefin-vinyl alcohol copolymer, ionomer, polyarylate, acrylonitrile-ethylene-styrene copolymer, propylene Nitrile-butadiene-styrene copolymer, acrylonitrile-styrene copolymer, etc.

这些树脂成分可以单独使用或者两种以上组合使用。These resin components may be used alone or in combination of two or more.

在树脂成分中,优选列举出环氧树脂。Among the resin components, preferably an epoxy resin is used.

环氧树脂在常温为液态、半固态和固态中的任一形态。Epoxy resin is in any form of liquid, semi-solid and solid at room temperature.

具体而言,作为环氧树脂,可列举出例如双酚型环氧树脂(例如双酚A型环氧树脂、双酚F型环氧树脂、双酚S型环氧树脂、氢化双酚A型环氧树脂、二聚酸改性双酚型环氧树脂等)、线性酚醛清漆(novolac)型环氧树脂(例如苯酚酚醛清漆型环氧树脂、甲酚酚醛清漆型环氧树脂、联苯型环氧树脂等)、萘型环氧树脂、芴型环氧树脂(例如双芳基芴型环氧树脂等)、三苯基甲烷型环氧树脂(例如三羟基苯甲烷型环氧树脂等)等芳香族系环氧树脂;例如三环氧基丙基异氰脲酸酯(三缩水甘油基异氰脲酸酯)、乙内酰脲环氧树脂等含氮环环氧树脂;例如脂肪族型环氧树脂;例如脂环族型环氧树脂(例如双环环型环氧树脂等);例如缩水甘油醚型环氧树脂;例如缩水甘油胺型环氧树脂等。Specifically, examples of epoxy resins include bisphenol epoxy resins (such as bisphenol A epoxy resins, bisphenol F epoxy resins, bisphenol S epoxy resins, hydrogenated bisphenol A epoxy resins), and bisphenol A epoxy resins. Epoxy resin, dimer acid modified bisphenol type epoxy resin, etc.), novolac type epoxy resin (such as phenol novolak type epoxy resin, cresol novolac type epoxy resin, biphenyl type epoxy resins, etc.), naphthalene-type epoxy resins, fluorene-type epoxy resins (such as bisarylfluorene-type epoxy resins, etc.), triphenylmethane-type epoxy resins (such as trihydroxybenzenemethane-type epoxy resins, etc.) Aromatic epoxy resins such as triepoxypropyl isocyanurate (triglycidyl isocyanurate), hydantoin epoxy resin and other nitrogen-containing ring epoxy resins; such as aliphatic type epoxy resin; such as alicyclic type epoxy resin (such as bicyclic ring type epoxy resin, etc.); such as glycidyl ether type epoxy resin; such as glycidylamine type epoxy resin, etc.

这些环氧树脂可以单独使用或者两种以上组合使用。These epoxy resins may be used alone or in combination of two or more.

优选列举出液态环氧树脂与固态环氧树脂的组合、进一步优选列举出液态的芳香族系环氧树脂与固态的芳香族系环氧树脂的组合等。作为这样的组合,具体而言,可列举出液态的双酚型环氧树脂与固态的三苯基甲烷型环氧树脂的组合、液态的双酚型环氧树脂与固态的双酚型环氧树脂的组合。Preferably, a combination of a liquid epoxy resin and a solid epoxy resin is used, and more preferably, a combination of a liquid aromatic epoxy resin and a solid aromatic epoxy resin is used. As such a combination, specifically, a combination of a liquid bisphenol-type epoxy resin and a solid triphenylmethane-type epoxy resin, a combination of a liquid bisphenol-type epoxy resin and a solid bisphenol-type epoxy resin combination of resins.

另外,作为环氧树脂,优选例举出单独使用半固态的环氧树脂,进一步优选列举出单独使用半固态的芳香族系环氧树脂。作为这样的环氧树脂,具体而言可列举出半固态的芴型环氧树脂。In addition, as the epoxy resin, preferably, a semi-solid epoxy resin used alone is used, and more preferably, a semi-solid aromatic epoxy resin used alone is used. Specific examples of such epoxy resins include semi-solid fluorene epoxy resins.

如果为液态的环氧树脂与固态的环氧树脂的组合、半固态的环氧树脂,则能够提高导热性层6的高度差追随性(后述)。If it is a combination of a liquid epoxy resin and a solid epoxy resin, or a semi-solid epoxy resin, the level difference followability of the thermally conductive layer 6 can be improved (described later).

另外,环氧树脂的环氧当量例如为100~1000g/eqiv.、优选为160~700g/eqiv.;软化温度(环球法)例如为80℃以下(具体而言为20~80℃)、优选为70℃以下(具体而言为25~70℃)。In addition, the epoxy equivalent of the epoxy resin is, for example, 100 to 1000 g/eqiv., preferably 160 to 700 g/eqiv.; the softening temperature (ring and ball method) is, for example, 80° C. or lower (specifically, 20 to 80° C.), preferably It is 70°C or lower (specifically, 25 to 70°C).

另外,环氧树脂在80℃下的熔融粘度例如为10~20000mPa·s、优选为50~15000mPa·s。组合使用2种以上环氧树脂时,作为它们的混合物的熔融粘度设定在上述范围内。In addition, the melt viscosity of the epoxy resin at 80° C. is, for example, 10 to 20000 mPa·s, preferably 50 to 15000 mPa·s. When two or more epoxy resins are used in combination, the melt viscosity of their mixture is set within the above-mentioned range.

另外,组合使用常温下为固态的环氧树脂和常温下为液态的环氧树脂时,组合使用软化温度例如为小于45℃、优选为35℃以下的第1环氧树脂、和软化温度例如为45℃以上、优选为55℃以上的第2环氧树脂。由此,能够将树脂成分(混合物)的运动粘度(依据JIS K 7233,后述)设定在希望的范围,另外,能够提高导热性层6的高度差追随性。In addition, when an epoxy resin that is solid at room temperature and an epoxy resin that is liquid at room temperature are used in combination, the first epoxy resin having a softening temperature of, for example, less than 45° C., preferably 35° C. or lower, and a softening temperature of, for example, The second epoxy resin is 45°C or higher, preferably 55°C or higher. Thereby, the kinematic viscosity (according to JIS K 7233, described later) of the resin component (mixture) can be set in a desired range, and the height difference followability of the thermally conductive layer 6 can be improved.

另外,可以使环氧树脂含有例如固化剂和固化促进剂而作为环氧树脂组合物来制备。In addition, an epoxy resin can be prepared as an epoxy resin composition by containing, for example, a curing agent and a curing accelerator.

固化剂为能够通过加热而使环氧树脂固化的潜在性固化剂(环氧树脂固化剂),可列举出例如咪唑化合物、胺化合物、酸酐化合物、酰胺化合物、酰肼化合物、咪唑啉化合物等。另外,除了上述以外,也可列举出酚化合物、尿素化合物、聚硫醚化合物等。The curing agent is a latent curing agent (epoxy resin curing agent) capable of curing epoxy resin by heating, and examples thereof include imidazole compounds, amine compounds, acid anhydride compounds, amide compounds, hydrazide compounds, and imidazoline compounds. Moreover, in addition to the above, a phenolic compound, a urea compound, a polythioether compound, etc. are mentioned.

作为咪唑化合物,可列举出例如2-苯基咪唑、2-甲基咪唑、2-乙基-4-甲基咪唑、2-苯基-4-甲基-5-羟甲基咪唑等。Examples of the imidazole compound include 2-phenylimidazole, 2-methylimidazole, 2-ethyl-4-methylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole and the like.

作为胺化合物,可列举出例如乙二胺、丙二胺、二亚乙基三胺、三亚乙基四胺等脂肪族多元胺;例如间苯二胺、二氨基二苯基甲烷、二氨基二苯基砜等芳香族多元胺等。Examples of amine compounds include aliphatic polyamines such as ethylenediamine, propylenediamine, diethylenetriamine, and triethylenetetramine; for example, m-phenylenediamine, diaminodiphenylmethane, diaminodiphenylmethane, and Aromatic polyamines such as phenyl sulfone, etc.

作为酸酐化合物,可列举出例如邻苯二甲酸酐、马来酸酐、四氢邻苯二甲酸酐、六氢邻苯二甲酸酐、4-甲基-六氢邻苯二甲酸酐、甲基纳迪克酸酐(methyl nadic anhydride)、苯均四酸酐、十二烯基琥珀酸酐、二氯琥珀酸酐、二苯甲酮四羧酸酐、氯菌酸酐(chlorendic anhydride)等。Examples of acid anhydride compounds include phthalic anhydride, maleic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, 4-methyl-hexahydrophthalic anhydride, methyl sodium Methyl nadic anhydride, pyromellitic anhydride, dodecenyl succinic anhydride, dichlorosuccinic anhydride, benzophenone tetracarboxylic anhydride, chlorendic anhydride, etc.

作为酰胺化合物,可列举出例如双氰胺、聚酰胺等。As an amide compound, dicyandiamide, a polyamide, etc. are mentioned, for example.

作为酰肼化合物,可列举出例如己二酸二酰肼等。As a hydrazide compound, adipic acid dihydrazide etc. are mentioned, for example.

作为咪唑啉化合物,可列举出例如甲基咪唑啉、2-乙基-4-甲基咪唑啉、乙基咪唑啉、异丙基咪唑啉、2,4-二甲基咪唑啉、苯基咪唑啉、十一烷基咪唑啉、十七烷基咪唑啉、2-苯基-4-甲基咪唑啉等。Examples of imidazoline compounds include methylimidazoline, 2-ethyl-4-methylimidazoline, ethylimidazoline, isopropylimidazoline, 2,4-dimethylimidazoline, phenylimidazole line, undecylimidazoline, heptadecylimidazoline, 2-phenyl-4-methylimidazoline, etc.

这些固化剂可以单独使用或者两种以上组合使用。These curing agents may be used alone or in combination of two or more.

作为固化剂,优选列举出咪唑化合物。As a curing agent, preferably an imidazole compound is used.

作为固化促进剂,可列举出例如三乙二胺、三-2,4,6-二甲基氨基甲基苯酚等叔胺化合物;例如三苯基膦、四苯基硼酸四苯基鏻、O,O-二乙基二硫代磷酸四正丁基鏻等磷化合物;例如季铵盐化合物、有机金属盐化合物、它们的衍生物等。这些固化促进剂可以单独使用或者两种以上组合使用。As the curing accelerator, tertiary amine compounds such as triethylenediamine and triethylenediamine, three-2,4,6-dimethylaminomethylphenol; for example, triphenylphosphine, tetraphenylphosphonium tetraphenylborate, O , Phosphorus compounds such as tetra-n-butylphosphonium diethyl dithiophosphate; such as quaternary ammonium salt compounds, organometallic salt compounds, their derivatives, etc. These curing accelerators may be used alone or in combination of two or more.

相对于100质量份环氧树脂,环氧树脂组合物中的固化剂的配合比例例如为0.5~50质量份、优选为1~10质量份;固化促进剂的配合比例例如为0.1~10质量份、优选为0.2~5质量份。The proportion of the curing agent in the epoxy resin composition is, for example, 0.5 to 50 parts by mass, preferably 1 to 10 parts by mass, with respect to 100 parts by mass of the epoxy resin; the proportion of the curing accelerator is, for example, 0.1 to 10 parts by mass , Preferably it is 0.2-5 mass parts.

上述固化剂和/或固化促进剂根据需要可以作为利用溶剂进行溶解和/或分散的溶剂溶液和/或溶剂分散液来制备而使用。The above-mentioned curing agent and/or curing accelerator can be prepared and used as a solvent solution and/or a solvent dispersion liquid dissolved and/or dispersed in a solvent as needed.

作为溶剂,可列举出例如丙酮、甲乙酮(MEK)等酮类、例如醋酸乙酯等酯类、例如N,N-二甲基甲酰胺等酰胺类等有机溶剂等。另外,作为溶剂,也可列举出例如水、例如甲醇、乙醇、丙醇、异丙醇等醇类等水系溶剂。作为溶剂,优选列举出有机溶剂,进一步优选为酮类、酰胺类。Examples of the solvent include ketones such as acetone and methyl ethyl ketone (MEK), esters such as ethyl acetate, organic solvents such as amides such as N,N-dimethylformamide, and the like. In addition, examples of the solvent include aqueous solvents such as water and alcohols such as methanol, ethanol, propanol, and isopropanol. As the solvent, organic solvents are preferably used, and ketones and amides are more preferable.

另外,树脂成分的通过依据JIS K 7233(泡粘度计法)的运动粘度试验(温度:25℃±0.5℃,溶剂:丁基卡必醇,树脂成分(固体成分)浓度:40质量%)测定的运动粘度例如为0.22×10-4~2.00×10-4m2/s、优选为0.3×10-4~1.9×10-4m2/s、进一步优选0.4×10-4~1.8×10-4m2/s。另外,上述运动粘度也可以设定例如为0.22×10-4~1.00×10-4m2/s、优选为0.3×10-4~0.9×10-4m2/s、进一步优选为0.4×10-4~0.8×10-4m2/s。In addition, the content of the resin component was measured by a kinematic viscosity test (temperature: 25°C ± 0.5°C, solvent: butyl carbitol, resin component (solid content) concentration: 40% by mass) according to JIS K 7233 (bubble viscometer method) The kinematic viscosity is, for example, 0.22×10 -4 to 2.00×10 -4 m 2 /s, preferably 0.3×10 -4 to 1.9×10 -4 m 2 /s, more preferably 0.4×10 -4 to 1.8×10 -4 m 2 /s. In addition, the above-mentioned kinematic viscosity can also be set, for example, at 0.22×10 -4 to 1.00×10 -4 m 2 /s, preferably at 0.3×10 -4 to 0.9×10 -4 m 2 /s, more preferably at 0.4×10 -4 m 2 /s, 10 -4 ~ 0.8×10 -4 m 2 /s.

树脂成分的运动粘度超过上述范围时,有时无法赋予导热性层6以优异的柔软性和高度差追随性(后述)。另一方面,树脂成分的运动粘度不满足上述范围时,有时不能使氮化硼颗粒沿规定方向取向。When the kinematic viscosity of the resin component exceeds the above-mentioned range, excellent flexibility and step followability (described later) may not be imparted to the thermally conductive layer 6 . On the other hand, when the kinematic viscosity of the resin component does not satisfy the above-mentioned range, boron nitride particles may not be oriented in a predetermined direction.

另外,在依据JIS K 7233(气泡粘度计法)的运动粘度试验中,将树脂成分样品中泡的上升速度与标准样品(运动粘度已知)中泡的上升速度相比较,将上升速度一致的标准样品的运动粘度判定为树脂成分的运动粘度,通过这样来测定树脂成分的运动粘度。In addition, in the kinematic viscosity test based on JIS K 7233 (bubble viscometer method), the rising speed of the bubbles in the resin component sample is compared with the rising speed of the bubbles in the standard sample (kinematic viscosity is known), and the rising speed is the same The kinematic viscosity of the standard sample is judged as the kinematic viscosity of the resin component, and the kinematic viscosity of the resin component is measured in this way.

接着,在导热性层6中,氮化硼颗粒的以体积为基准计的含有比例(固体成分,即,氮化硼颗粒相对于树脂成分和氮化硼颗粒的总体积的体积百分率)例如为35体积%以上、优选为60体积%以上、优选为65体积%以上;通常例如为95体积%以下、优选为90体积%以下。Next, in the thermally conductive layer 6, the volume-based content ratio of the boron nitride particles (solid content, that is, the volume percentage of the boron nitride particles to the total volume of the resin component and the boron nitride particles) is, for example, 35 volume % or more, preferably 60 volume % or more, preferably 65 volume % or more; usually, for example, 95 volume % or less, preferably 90 volume % or less.

氮化硼颗粒的以体积为基准计的含有比例不满足上述范围时,有时不能使氮化硼颗粒在导热性层6中沿规定方向取向。另一方面,氮化硼颗粒的以体积为基准计的含有比例超过上述范围时,有时导热性层6变脆,处理性降低。When the volume-based content ratio of the boron nitride particles does not satisfy the above range, the boron nitride particles may not be oriented in a predetermined direction in the thermally conductive layer 6 . On the other hand, when the volume-based content ratio of the boron nitride particles exceeds the above-mentioned range, the thermally conductive layer 6 may become brittle and the handleability may decrease.

另外,相对于形成导热性层6的各成分(氮化硼颗粒和树脂成分)的总量(固体成分总量)100质量份的、氮化硼颗粒的以质量为基准计的配合比例例如为40~95质量份、优选为65~90质量份;相对于形成导热性层6的各成分的总量100质量份的、树脂成分的以质量为基准计的配合比例例如为5~60质量份、优选为10~35质量。另外,氮化硼颗粒的相对于100质量份树脂成分的以质量为基准计的配合比例例如为60~1900质量份、优选为185~900质量份。In addition, with respect to 100 parts by mass of the total amount (total solid content) of each component (boron nitride particle and resin component) forming the thermally conductive layer 6, the compounding ratio of the boron nitride particle on a mass basis is, for example, 40 to 95 parts by mass, preferably 65 to 90 parts by mass; the compounding ratio of the resin component based on mass is, for example, 5 to 60 parts by mass with respect to 100 parts by mass of the total amount of the components forming the thermally conductive layer 6 , preferably 10 to 35 mass. Moreover, the compounding ratio by mass of boron nitride particle|grains with respect to 100 mass parts of resin components is 60-1900 mass parts, for example, Preferably it is 185-900 mass parts.

另外,在组合使用两种环氧树脂(第1环氧树脂和第2环氧树脂)时,第1环氧树脂与第2环氧树脂的质量比例(第1环氧树脂的质量/第2环氧树脂的质量)可以根据各环氧树脂(第1环氧树脂和第2环氧树脂)的软化温度等适宜地设定,例如为1/99~99/1、优选为10/90~90/10。In addition, when two epoxy resins (the first epoxy resin and the second epoxy resin) are used in combination, the mass ratio of the first epoxy resin to the second epoxy resin (mass of the first epoxy resin/second epoxy resin) The quality of the epoxy resin) can be appropriately set according to the softening temperature of each epoxy resin (the first epoxy resin and the second epoxy resin), for example, it is 1/99~99/1, preferably 10/90~ 90/10.

另外,在树脂成分中,除了上述各成分(聚合物)外,包含例如聚合物前体(例如,包含低聚物的低分子量聚合物等)和/或单体。In addition, the resin component contains, for example, a polymer precursor (for example, a low-molecular-weight polymer including an oligomer, etc.) and/or a monomer in addition to the above-mentioned components (polymer).

接着,对导热性层6的形成方法进行说明。Next, a method for forming the thermally conductive layer 6 will be described.

在该方法中,首先,将上述各成分以上述配合比例进行配合,并进行搅拌混合,由此来制备混合物。In this method, first, each of the above-mentioned components is blended in the above-mentioned blending ratio, and stirred and mixed to prepare a mixture.

在搅拌混合中,应将各成分有效地混合,例如可以将溶剂和上述各成分一起混合、或者例如可以通过加热使树脂成分(优选热塑性树脂成分)熔融。In stirring and mixing, each component should be mixed efficiently. For example, a solvent and each of the above-mentioned components may be mixed together, or a resin component (preferably a thermoplastic resin component) may be melted by heating, for example.

作为溶剂,可列举出与上述同样的有机溶剂。另外,上述固化剂和/或固化促进剂作为溶剂溶液和/或溶剂分散液来制备时,可以在搅拌混合中不追加溶剂,而将溶剂溶液和/或溶剂分散液的溶剂原样作为用于搅拌混合的混合溶剂来提供。或者,也可以在搅拌混合中进一步追加溶剂作为混合溶剂。Examples of the solvent include the same organic solvents as those described above. In addition, when the above-mentioned curing agent and/or curing accelerator is prepared as a solvent solution and/or a solvent dispersion, no solvent may be added during stirring and mixing, and the solvent of the solvent solution and/or solvent dispersion may be used as it is for stirring. Mixed solvent mixtures are available. Alternatively, a solvent may be further added as a mixed solvent during stirring and mixing.

使用溶剂进行搅拌混合时,在搅拌混合后将溶剂除去。When stirring and mixing is performed using a solvent, the solvent is removed after stirring and mixing.

对于溶剂的除去,例如在室温下放置1~48小时,或例如在40~100℃下加热0.5~3小时,或者例如在0.001~50kPa的减压气氛下在20~60℃下加热0.5~3小时。For the removal of the solvent, for example, leave it at room temperature for 1 to 48 hours, or for example, heat at 40 to 100° C. for 0.5 to 3 hours, or for example, heat at 20 to 60° C. for 0.5 to 3 hours under a reduced pressure atmosphere of 0.001 to 50 kPa. Hour.

通过加热使树脂成分熔融时,加热温度例如为在树脂成分的软化温度附近或者超过该温度,具体而言为40~150℃、优选为70~140℃。When the resin component is melted by heating, the heating temperature is, for example, near the softening temperature of the resin component or higher, specifically, 40 to 150°C, preferably 70 to 140°C.

接着,在该方法中对所得混合物进行热压。Next, the resulting mixture is hot-pressed in the process.

具体而言,如图2的(a)所示,例如根据需要通过2张脱模膜(mold release film)12对混合物进行热压,由此来得到压制片材6A。热压的条件如下:温度例如为50~150℃、优选为60~140℃;压力例如为1~100MPa、优选为5~50MPa;时间例如为0.1~100分钟、优选为1~30分钟。Specifically, as shown in FIG. 2( a ), for example, the mixture is hot-pressed through two mold release films (mold release film) 12 as needed, thereby obtaining a pressed sheet 6A. The hot pressing conditions are as follows: the temperature is, for example, 50-150°C, preferably 60-140°C; the pressure, for example, is 1-100MPa, preferably 5-50MPa; the time is, for example, 0.1-100 minutes, preferably 1-30 minutes.

进一步优选对混合物进行真空热压。真空热压的真空度例如为1~100Pa、优选为5~50Pa;温度和压力以及时间,与上述热压的那些相同。It is further preferred to subject the mixture to vacuum heat pressing. The degree of vacuum of the vacuum heat press is, for example, 1 to 100 Pa, preferably 5 to 50 Pa; the temperature, pressure and time are the same as those of the heat press described above.

热压中的温度、压力和/或时间在上述范围以外时,导热性层6的孔隙率P(后述)有时无法调整至所希望的值。When the temperature, pressure, and/or time in hot pressing are outside the above-mentioned ranges, the porosity P (described later) of the heat conductive layer 6 may not be adjusted to a desired value.

通过热压得到的压制片材6A的厚度例如为50~1000μm、优选为100~800μm。The thickness of the pressed sheet 6A obtained by hot pressing is, for example, 50 to 1000 μm, preferably 100 to 800 μm.

接着,在该方法中,如图2的(b)所示,将压制片材6A分割为多个(例如4个)而得分割片材6B(分割工序)。在压制片材6A的分割中,将压制片材6A沿其厚度方向切割,使得沿厚度方向投影时分裂为多个。另外,压制片材6A以使得各分割片材6B沿厚度方向投影时成为同样的形状的方式进行切割。Next, in this method, as shown in FIG. 2( b ), the pressed sheet 6A is divided into a plurality (for example, four) to obtain divided sheets 6B (dividing step). In the division of the pressed sheet 6A, the pressed sheet 6A is cut in its thickness direction so as to be split into a plurality when projected in the thickness direction. In addition, the pressed sheet 6A is cut so that each divided sheet 6B has the same shape when projected in the thickness direction.

接着,在该方法中,如图2的(c)所示,将各分割片材6B在厚度方向上层叠,得到层叠片材6C(层叠工序)。Next, in this method, as shown in FIG. 2( c ), each divided sheet 6B is stacked in the thickness direction to obtain a stacked sheet 6C (stacking step).

其后,在该方法中,如图2的(a)所示,将层叠片材6C热压(优选真空热压)(热压工序)。热压的条件与上述混合物的热压条件相同。Thereafter, in this method, as shown in FIG. 2( a ), the laminated sheet 6C is hot-pressed (preferably vacuum hot-pressed) (hot-pressing step). The conditions of hot pressing are the same as those of the above-mentioned mixture.

热压后的层叠片材6C的厚度例如为1mm以下、优选为0.8mm以下;通常,例如为0.05mm以上、优选为0.1mm以上。The thickness of the laminated sheet 6C after hot pressing is, for example, 1 mm or less, preferably 0.8 mm or less; usually, for example, 0.05 mm or more, preferably 0.1 mm or more.

其后,参照图3所示,在导热性层6中为了使氮化硼颗粒8在树脂成分9中有效地沿规定方向取向,反复实施上述分割工序(图2的(b))、层叠工序(图2的(c))和热压工序(图2的(a))的一系列工序。对于反复次数没有特别的限定,可以根据氮化硼颗粒的填充状态适宜地设定,例如为1~10次、优选为2~7次。Thereafter, as shown in FIG. 3 , in order to effectively orient the boron nitride particles 8 in the resin component 9 in a predetermined direction in the thermally conductive layer 6 , the above-mentioned dividing step ( FIG. 2 ( b )) and the stacking step are repeatedly implemented. ((c) of FIG. 2 ) and a series of processes of the hot pressing process ((a) of FIG. 2 ). The number of repetitions is not particularly limited, and can be appropriately set according to the filling state of the boron nitride particles, for example, 1 to 10 times, preferably 2 to 7 times.

另外,在上述热压工序(图2的(a))中,例如可以通过多个压延辊等将混合物和层叠片材6C压延。In addition, in the above-mentioned hot pressing step ((a) of FIG. 2 ), for example, the mixture and the laminated sheet 6C may be rolled by a plurality of calender rolls or the like.

由此,能够形成图3和图4所示的导热性层6。Thereby, the thermally conductive layer 6 shown in FIGS. 3 and 4 can be formed.

形成的导热性层6的厚度例如为1mm以下、优选为0.8mm以下;通常,例如为0.05mm以上、优选为0.1mm以上。The thickness of the formed thermally conductive layer 6 is, for example, 1 mm or less, preferably 0.8 mm or less; usually, for example, 0.05 mm or more, preferably 0.1 mm or more.

另外,在导热性层6中的氮化硼颗粒8的以体积为基准计的含有比例(固体成分,即,氮化硼颗粒8相对于树脂成分9和氮化硼颗粒8的总体积的体积百分率)如上所述,例如为35体积%以上(优选为60体积%以上、进一步优选为75体积%以上);通常为95体积%以下(优选为90体积%以下)。In addition, the volume-based content ratio of the boron nitride particles 8 in the thermally conductive layer 6 (solid content, that is, the volume of the boron nitride particles 8 with respect to the total volume of the resin component 9 and the boron nitride particles 8 Percentage) is as above, for example, 35 vol% or more (preferably 60 vol% or more, more preferably 75 vol% or more); usually 95 vol% or less (preferably 90 vol% or less).

氮化硼颗粒8的含有比例不满足上述范围时,有时不能使氮化硼颗粒8在导热性层6中沿规定方向取向。When the content ratio of the boron nitride particles 8 does not satisfy the above-mentioned range, the boron nitride particles 8 may not be oriented in a predetermined direction in the thermally conductive layer 6 .

另外,树脂成分9为热固化性树脂成分时,例如,在未固化状态下反复实施上述分割工序(图2的(b))、层叠工序(图2的(c))和热压工序(图2的(a))的一系列工序,原样得到未固化状态的导热性层6。另外,在导热性粘接片材5相对于电子零件3以及基板2粘接时,使未固化状态的导热性层6热固化。In addition, when the resin component 9 is a thermosetting resin component, for example, the above-mentioned dividing step ((b) of FIG. 2 ), laminating step ((c) of FIG. 2 ) and hot pressing step (Fig. A series of steps in (a)) of 2 obtains the thermally conductive layer 6 in an uncured state as it is. In addition, when the thermally conductive adhesive sheet 5 is bonded to the electronic component 3 and the substrate 2 , the uncured thermally conductive layer 6 is thermally cured.

接着,在这样形成的导热性层6中,如图3及其局部放大示意图所示,氮化硼颗粒8的纵向方向LD沿着与导热性层6的厚度方向TD交叉(正交)的面方向SD取向。Next, in the thermally conductive layer 6 formed in this way, as shown in FIG. Orientation SD Orientation.

另外,氮化硼颗粒8的纵向方向LD与导热性层6的面方向SD所成的角度的算术平均(氮化硼颗粒8相对于导热性层6的取向角度α)例如为25度以下、优选为20度以下;通常为0度以上。In addition, the arithmetic mean of the angle formed by the longitudinal direction LD of the boron nitride particles 8 and the surface direction SD of the thermally conductive layer 6 (orientation angle α of the boron nitride particles 8 with respect to the thermally conductive layer 6) is, for example, 25 degrees or less, Preferably it is 20 degrees or less; usually 0 degrees or more.

另外,氮化硼颗粒8相对于导热性层6的取向角度α如下算出:利用截面抛光仪(CP)将导热性层6沿厚度方向进行切割加工,使用扫描电子显微镜(SEM)对由此出现的截面在能够观察到200个以上的氮化硼颗粒8的视野的倍率下拍摄照片,根据所得SEM照片,取得氮化硼颗粒8的纵向方向LD相对于导热性层6的面方向SD(与厚度方向TD正交的方向)的倾斜角α,并算出其平均值。In addition, the orientation angle α of the boron nitride particles 8 with respect to the thermally conductive layer 6 is calculated by cutting the thermally conductive layer 6 in the thickness direction with a cross-section polisher (CP), and examining the resulting orientation angle α with a scanning electron microscope (SEM). The cross-section of the boron nitride particles 8 can be observed under the magnification of the magnification of the field of view of more than 200 boron nitride particles 8. According to the obtained SEM photos, the longitudinal direction LD of the boron nitride particles 8 is obtained relative to the plane direction SD of the thermally conductive layer 6 (and The inclination angle α in the direction perpendicular to the thickness direction TD) was calculated, and its average value was calculated.

由此,导热性层6的面方向SD的导热率为4W/m·K以上、优选为5W/m·K以上、更优选为10W/m·K以上、进一步优选为15W/m·K以上,尤其优选为25W/m·K以上,通常为200W/m·K以下。Accordingly, the thermal conductivity of the thermally conductive layer 6 in the plane direction SD is 4 W/m·K or higher, preferably 5 W/m·K or higher, more preferably 10 W/m·K or higher, and still more preferably 15 W/m·K or higher. , especially preferably 25 W/m·K or more, usually 200 W/m·K or less.

另外,树脂成分9为热固化性树脂成分时,导热性层6的面方向SD的导热率在热固化的前后基本相同。In addition, when the resin component 9 is a thermosetting resin component, the thermal conductivity in the plane direction SD of the thermally conductive layer 6 is substantially the same before and after thermosetting.

导热性层6的面方向SD的导热率不满足上述范围时,由于面方向SD的导热性不充分,因此有时不能在这种需要面方向SD的导热性的散热用途中使用。If the thermal conductivity in the plane direction SD of the thermally conductive layer 6 does not satisfy the above-mentioned range, the thermal conductivity in the plane direction SD is insufficient, so it may not be used for heat dissipation applications that require the thermal conductivity in the plane direction SD.

另外,导热性层6的面方向SD的导热率通过脉冲加热法测定。在脉冲加热法中可以使用氙闪光灯分析仪(xenon flashanalyzer)“LFA-447型”(NETZSCH公司制造)。In addition, the thermal conductivity in the plane direction SD of the thermally conductive layer 6 was measured by a pulse heating method. In the pulse heating method, a xenon flash analyzer (type LFA-447) (manufactured by NETZSCH) can be used.

另外,导热性层6的厚度方向TD的导热率例如为0.5~15W/m·K、优选为1~10W/m·K。In addition, the thermal conductivity in the thickness direction TD of the thermally conductive layer 6 is, for example, 0.5 to 15 W/m·K, preferably 1 to 10 W/m·K.

另外,导热性层6的厚度方向TD的导热率可以通过脉冲加热法、激光闪光法或者TWA法(temperature wave analysis)测定。在脉冲加热法中,可以使用与上述相同的设备;在激光闪光法中,可以使用“TC-9000”(ULVAC-RIKO,Inc.制造)、在TWA法中,可以使用“ai-Phase mobiLe”(ai-Phase Co.,Ltd.制造)。In addition, the thermal conductivity in the thickness direction TD of the thermally conductive layer 6 can be measured by a pulse heating method, a laser flash method, or a TWA method (temperature wave analysis). In the pulse heating method, the same equipment as above can be used; in the laser flash method, "TC-9000" (manufactured by ULVAC-RIKO, Inc.) can be used; in the TWA method, "ai-Phase mobiLe" can be used (manufactured by ai-Phase Co., Ltd.).

由此,导热性层6的面方向SD的导热率与导热性层6的厚度方向TD的导热率之比(面方向SD的导热率/厚度方向TD的导热率)例如为1.5以上、优选为3以上、进一步优选为4以上;通常为20以下。Accordingly, the ratio of the thermal conductivity in the plane direction SD of the thermally conductive layer 6 to the thermal conductivity in the thickness direction TD of the thermally conductive layer 6 (thermal conductivity in the plane direction SD/thermal conductivity in the thickness direction TD) is, for example, 1.5 or more, preferably 3 or more, more preferably 4 or more; usually 20 or less.

另外,虽然在图3中未图示,但是在导热性层6中,例如有孔隙(间隙)形成。In addition, although not shown in FIG. 3 , for example, voids (gaps) are formed in the thermally conductive layer 6 .

导热性层6中的孔隙的比例即孔隙率P可以通过氮化硼颗粒8的含有比例(以体积为基准),进而氮化硼颗粒8和树脂成分9的混合物的热压(图2的(a))的温度、压力和/或时间来调整,具体而言,可以通过将上述热压(图2的(a))的温度、压力和/或时间设定至上述范围内来调整。The ratio of the pores in the thermally conductive layer 6, that is, the porosity P, can be determined by the content ratio of the boron nitride particles 8 (based on volume), and then the hot pressing of the mixture of the boron nitride particles 8 and the resin component 9 (Fig. 2 ( a)) by adjusting the temperature, pressure and/or time, specifically, by setting the temperature, pressure and/or time of the hot press ((a) of FIG. 2 ) within the above range.

导热性层6中的孔隙率P例如为30体积%以下、优选为10体积%以下。The porosity P in the thermally conductive layer 6 is, for example, 30% by volume or less, preferably 10% by volume or less.

上述孔隙率P例如可以通过下述方法测定:首先,利用截面抛光仪(CP)将导热性层6沿厚度方向进行切割加工,对由此出现的截面用扫描电子显微镜(SEM)在200倍下观察,获得图像,由所得图像,对孔隙部分和其余部分进行二值化处理,接着算出孔隙部分相对于导热性层6的总体截面积的面积比。The above-mentioned porosity P can be measured, for example, by the following method: First, the thermally conductive layer 6 is cut along the thickness direction by using a cross-section polisher (CP), and the resulting cross-section is viewed with a scanning electron microscope (SEM) at 200 times. Observe and obtain an image, binarize the void portion and the remaining portion from the obtained image, and then calculate the area ratio of the void portion to the overall cross-sectional area of the thermally conductive layer 6 .

另外,在导热性层6中,相对于固化前的孔隙率P1,固化后的孔隙率P2例如小于100%、具体而言优选为50%以下。In addition, in the heat conductive layer 6 , the porosity P2 after curing is, for example, less than 100%, and specifically, preferably 50% or less with respect to the porosity P1 before curing.

在孔隙率P(P1)的测定中,树脂成分9为热固化性树脂成分时,使用热固化前的导热性层6。In the measurement of the porosity P (P1), when the resin component 9 is a thermosetting resin component, the thermally conductive layer 6 before thermosetting is used.

如果导热性层6的孔隙率P在上述范围内,则能够提高导热性层6的高度差追随性(后述)。If the porosity P of the thermally conductive layer 6 is within the above-mentioned range, the level difference followability of the thermally conductive layer 6 can be improved (described later).

另外,导热性层6在以JIS K 5600-5-1的圆筒形心轴法(mandrel method)为依据的耐弯曲性试验中,在下述试验条件下评价时,优选为观察不到断裂。In addition, when the thermally conductive layer 6 is evaluated under the following test conditions in the bending resistance test based on the cylindrical mandrel method (mandrel method) of JIS K 5600-5-1, it is preferable that no fracture is observed.

试验条件Test conditions

试验装置:类型ITest device: Type I

心轴:直径10mmMandrel: 10mm in diameter

弯曲角度:90度以上Bending angle: more than 90 degrees

导热性层6的厚度:0.3mmThickness of thermally conductive layer 6: 0.3 mm

另外,图10和图11示出类型I的试验装置的立体图,下面,说明类型I的试验装置。In addition, FIG. 10 and FIG. 11 show perspective views of the type I test device, and the type I test device will be described below.

在图10和图11中,类型I的试验装置90包括:第一平板91;第二平板92,其与第一平板91并列配置;以及心轴(旋转轴)93,其是为了使第一平板91与第二平板92相对转动而设置的。In Fig. 10 and Fig. 11, the test apparatus 90 of type I comprises: first plate 91; Second plate 92, it is arranged side by side with first plate 91; And mandrel (axis of rotation) 93, it is for the first The flat plate 91 and the second flat plate 92 are arranged to rotate relative to each other.

第一平板91形成为大致矩形平板状。另外,在第一平板91的一端部(可动端部)上设置有止挡件94。止挡件94以沿第一平板91的一端部延伸的方式形成在第一平板91的表面上。The first flat plate 91 is formed in a substantially rectangular flat plate shape. In addition, a stopper 94 is provided on one end portion (movable end portion) of the first plate 91 . The stopper 94 is formed on the surface of the first flat plate 91 so as to extend along one end portion of the first flat plate 91 .

第二平板92呈大致矩形平板状,是以其一边与第一平板91的一边(与设有止挡件94的一端部相反的一侧的另一端部(基端部)的一边)相邻的方式配置的。The second flat plate 92 has a substantially rectangular flat plate shape, so that one side thereof is adjacent to one side of the first flat plate 91 (the side of the other end portion (base end portion) on the side opposite to the end portion on which the stopper 94 is provided) configured in a way.

心轴93是以沿第一平板91和第二平板92彼此相邻的一边延伸的方式形成的。The mandrel 93 is formed to extend along one side of the first flat plate 91 and the second flat plate 92 adjacent to each other.

如图10所示,在开始耐弯曲性试验之前,使该类型I的试验装置90的第一平板91的表面与第二平板92的表面处于同一平面。As shown in FIG. 10 , before starting the bending resistance test, the surface of the first flat plate 91 and the surface of the second flat plate 92 of this type I test device 90 were made to be on the same plane.

并且,在实施耐弯曲性试验时,将导热性层6载置在第一平板91的表面和第二平板92的表面上。此外,导热性层6是以其一边与止挡件94抵接的方式载置的。In addition, when performing the bending resistance test, the thermally conductive layer 6 was placed on the surface of the first flat plate 91 and the surface of the second flat plate 92 . In addition, the heat conductive layer 6 is placed so that one side thereof abuts against the stopper 94 .

接着,如图11所示,使第一平板91与第二平板92相对转动。具体地说,使第一平板91的可动端部和第二平板92的可动端部以心轴93为中心转动规定角度。详细地说,使第一平板91和第二平板92以第一平板91与第二平板92的可动端部的表面相接近(相对)的方式转动。Next, as shown in FIG. 11 , the first flat plate 91 and the second flat plate 92 are relatively rotated. Specifically, the movable end portion of the first plate 91 and the movable end portion of the second plate 92 are rotated by a predetermined angle around the spindle 93 . Specifically, the first flat plate 91 and the second flat plate 92 are rotated so that the surfaces of the movable end portions of the first flat plate 91 and the second flat plate 92 approach (opposite) each other.

由此,导热性层6在追随第一平板91和第二平板92的转动的同时以心轴93为中心弯曲。Thereby, the heat conductive layer 6 bends around the mandrel 93 while following the rotation of the first flat plate 91 and the second flat plate 92 .

进一步优选为,导热性层6在上述实验条件下将弯曲角度设定为180度时也观察不到断裂。More preferably, the thermally conductive layer 6 is not broken even when the bending angle is set to 180 degrees under the above-mentioned experimental conditions.

另外,树脂成分9为热固化性树脂成分时,提供于弯曲性试验的导热性层6为半固化(B阶段状态)的导热性层6。In addition, when the resin component 9 is a thermosetting resin component, the thermally conductive layer 6 provided in the bending test is a semi-cured (B-stage state) thermally conductive layer 6 .

在上述弯曲角度下的耐弯曲性试验中,观察到导热性层6断裂时,有时不能赋予导热性层6优异的柔软性。In the bending resistance test at the bending angle described above, when the thermally conductive layer 6 is observed to be broken, the thermally conductive layer 6 may not be able to impart excellent flexibility.

另外,该导热性层6在以JIS K 7171(2008年)为依据的三点弯曲试验中,以下述试验条件进行评价时,例如观察不到断裂。In addition, when the thermally conductive layer 6 is evaluated under the following test conditions in a three-point bending test based on JIS K 7171 (2008), for example, no fracture is observed.

试验条件Test conditions

试验片:尺寸20mm×15mmTest piece: size 20mm×15mm

支点间距离:5mmDistance between fulcrums: 5mm

试验速度:20mm/min(压头的下压速度)Test speed: 20mm/min (the pressing speed of the indenter)

弯曲角度:120度Bending angle: 120 degrees

评价方法:在上述试验条件下试验时,通过目视观察实验片的中央部是否有裂纹等断裂。Evaluation method: When testing under the above-mentioned test conditions, the center of the test piece was visually observed for fractures such as cracks.

另外,在三点弯曲试验中,树脂成分3为热固化性树脂成分时,使用热固化前的导热性层6。In addition, in the three-point bending test, when the resin component 3 is a thermosetting resin component, the heat conductive layer 6 before thermosetting was used.

接着,该导热性层6在上述三点弯曲试验中观察不到断裂,因此可知高度差追随性优异。另外,高度差追随性是指,在将导热性层6设置于有高度差的设置对象(例如上述基板2等)时,可追随该高度差(例如由上述电子零件3形成的高度差)来进行密合的特性。Next, since no breakage was observed in the above-mentioned three-point bending test, this thermally conductive layer 6 was found to be excellent in height difference followability. In addition, the height difference followability means that when the thermal conductive layer 6 is installed on an installation object with a height difference (such as the above-mentioned substrate 2, etc.), it can follow the height difference (such as the height difference formed by the above-mentioned electronic component 3) The characteristics of sealing.

另外,在导热性层6例如可以带有文字、记号等标记。即,导热性层6的标记附着性优异。标记附着性是指能够将上述标记可靠地附着在导热性层6上的特性。In addition, marks such as letters and symbols may be attached to the heat conductive layer 6 , for example. That is, the thermally conductive layer 6 is excellent in marking adhesion. The mark adhesion refers to the property that the above mark can be reliably attached to the thermally conductive layer 6 .

作为标记,具体而言,可以通过印刷或者刻印等而附着于导热性层6(涂布、定影或者固着)。Specifically, the mark can be attached to the thermally conductive layer 6 by printing, engraving, or the like (coating, fixing, or fixing).

作为印刷,可列举出例如喷墨印刷、凸版印刷、凹版印刷、激光印刷等。As printing, inkjet printing, letterpress printing, gravure printing, laser printing etc. are mentioned, for example.

另外,通过喷墨印刷、凸版印刷或者凹版印刷来印刷标记时,例如可以将用于提高标记的定影性的墨定影层设置于导热性层6的表面(印刷侧表面、上表面、相对于粘接·粘合剂层7的相反侧表面)。In addition, when the mark is printed by inkjet printing, letterpress printing or gravure printing, for example, an ink fixing layer for improving the fixability of the mark can be provided on the surface of the thermally conductive layer 6 (the surface on the printing side, the upper surface, the surface relative to the adhesive surface, etc.). The opposite side surface of the adhesive layer 7).

另外,通过激光印刷来印刷标记时,例如可以将用于提高标记的定影性的调色剂定影层设置于导热性层6的表面(印刷侧表面、上表面、相对于粘接·粘合剂层7的相反侧表面)。In addition, when printing a mark by laser printing, for example, a toner fixing layer for improving the fixability of the mark can be provided on the surface of the thermally conductive layer 6 (the surface on the printing side, the upper surface, and the surface of the bonding/adhesive agent). the opposite side surface of layer 7).

作为刻印,可列举出例如激光刻印、冲压等。As marking, laser marking, punching, etc. are mentioned, for example.

另外,导热性层6具有绝缘性和粘合性(微粘性)。In addition, the thermally conductive layer 6 has insulation and adhesiveness (slightly adhesive).

具体而言,导热性层6的体积电阻(JIS K6271)例如为1×1010Ω·cm以上、优选为1×1012Ω·cm以上;通常为1×1020Ω·cm以下。Specifically, the volume resistance (JIS K6271) of the thermally conductive layer 6 is, for example, 1×10 10 Ω·cm or more, preferably 1×10 12 Ω·cm or more, and usually 1×10 20 Ω·cm or less.

导热性层6的体积电阻R根据JIS K 6911(热固化性塑料一般试验方法,2006年版)进行测定。The volume resistance R of the thermally conductive layer 6 is measured in accordance with JIS K 6911 (General Test Methods for Thermosetting Plastics, 2006 edition).

导热性层6的体积电阻R不满足上述范围时,有时不能防止后述的电子元件间的短路。When the volume resistance R of the thermally conductive layer 6 does not satisfy the above-mentioned range, it may not be possible to prevent a short circuit between electronic components which will be described later.

另外,在导热性层6中,树脂成分9为热固化性树脂成分时,体积电阻R为固化后的导热性层6的值。In addition, in the thermally conductive layer 6, when the resin component 9 is a thermosetting resin component, the volume resistance R is the value of the thermally conductive layer 6 after hardening.

另外,导热性层6在以下的初始粘接力试验(1)中,例如不从被粘物脱落。即,导热性层6与被粘物保持临时固定状态。In addition, the heat conductive layer 6 did not come off from the adherend, for example, in the following initial adhesion test (1). That is, the thermally conductive layer 6 and the adherend maintain a temporarily fixed state.

初始粘接力试验(1):在沿水平方向的被粘物上加热压接导热性层6进行临时固定,放置10分钟后,使被粘物上下反转。Initial adhesion test (1): The thermally conductive layer 6 was temporarily fixed on the adherend along the horizontal direction by heat and pressure, and left to stand for 10 minutes, and the adherend was turned upside down.

作为被粘物,可列举出例如上述安装有电子零件的基板2等。压接例如是,使由有机硅树脂等树脂形成的海绵辊边按压导热性层6边在导热性层6的表面滚动。As a to-be-adhered body, the board|substrate 2 etc. which mounted the said electronic component are mentioned, for example. The pressure bonding is, for example, rolling a sponge roller made of resin such as silicone resin on the surface of the thermally conductive layer 6 while pressing the thermally conductive layer 6 .

另外,树脂成分9为热固化性树脂成分(例如环氧树脂)时,加热压接的温度例如为80℃。Moreover, when the resin component 9 is a thermosetting resin component (for example, an epoxy resin), the temperature of thermocompression bonding is 80 degreeC, for example.

另一方面,树脂成分9为热塑性树脂成分(例如聚乙烯)时,加热压接的温度例如为热塑性树脂成分的软化点或熔点加上10~30℃的温度、优选为热塑性树脂成分的软化点或熔点加上15~25℃的温度、进一步优选为热塑性树脂成分的软化点或熔点加上20℃的温度、具体而言为120℃(即,热塑性树脂成分的软化点或熔点为100℃,该100℃加上20℃的温度)。On the other hand, when the resin component 9 is a thermoplastic resin component (such as polyethylene), the temperature of thermocompression bonding is, for example, the softening point or melting point of the thermoplastic resin component plus a temperature of 10 to 30° C., preferably the softening point of the thermoplastic resin component. Or the melting point plus a temperature of 15 to 25°C, more preferably the softening point or melting point of the thermoplastic resin component plus a temperature of 20°C, specifically 120°C (that is, the softening point or melting point of the thermoplastic resin component is 100°C, The 100°C plus a temperature of 20°C).

导热性层6在上述初始粘接力试验(1)中从被粘物脱落时,即,在不能保持导热性层6与被粘物临时固定状态时,有时不能将导热性层6可靠地临时固定在被粘物上。When the thermally conductive layer 6 falls off from the adherend in the above-mentioned initial adhesion test (1), that is, when the temporarily fixed state of the thermally conductive layer 6 and the adherend cannot be maintained, the thermally conductive layer 6 may not be reliably temporarily fixed. Fixed on the adherend.

另外,树脂成分9为热固化性树脂成分时,供于初始粘接力试验(1)和初始粘接力试验(2)(后述)的导热性层6为未固化的导热性层6,通过初始粘接力试验(1)和初始粘接力试验(2)中的加热压接,由此导热性层6成为B阶段状态。In addition, when the resin component 9 is a thermosetting resin component, the thermally conductive layer 6 for the initial adhesion test (1) and the initial adhesion test (2) (described later) is an uncured thermally conductive layer 6, By heat-compression bonding in the initial adhesive strength test (1) and the initial adhesive strength test (2), the heat conductive layer 6 becomes a B-stage state.

另外,树脂成分9为热塑性树脂成分时,供于初始粘接力试验(1)和初始粘接力试验(2)(后述)的导热性层6为固态的导热性层6,通过初始粘接力试验(1)和初始粘接力试验(2)中的加热压接使导热性层6为软化状态。In addition, when the resin component 9 is a thermoplastic resin component, the thermally conductive layer 6 for the initial adhesion test (1) and the initial adhesion test (2) (described later) is a solid thermally conductive layer 6, and the The thermocompression bonding in the relay test (1) and the initial adhesion test (2) brought the heat conductive layer 6 into a softened state.

优选的是,导热性层6在上述的初始粘接力试验(1)和以下的初始粘接力试验(2)的两者中都不从被粘物脱落。即,能够保持导热性层6与被粘物的临时固定状态。It is preferable that the heat conductive layer 6 does not come off from the adherend in both the above-mentioned initial adhesion test (1) and the following initial adhesion test (2). That is, the temporarily fixed state of the thermally conductive layer 6 and the adherend can be maintained.

初始粘接力试验(2):将导热性层6加热压接于沿水平方向的被粘物上而进行临时固定,放置10分钟,然后使被粘物沿垂直方向(上下方向)配置。Initial adhesion test (2): The thermally conductive layer 6 was bonded to the adherend in the horizontal direction by heat and pressure, temporarily fixed, left for 10 minutes, and then the adherend was arranged in the vertical direction (vertical direction).

初始粘接力试验(2)的加热压接中的温度与上述的初始粘接力试验(1)的加热压接中的温度相同。The temperature in the thermocompression bonding in the initial adhesive strength test (2) was the same as the temperature in the thermocompression bonding in the initial adhesive strength test (1) described above.

粘接·粘合层7如图4所示形成于导热性层6的背面。详细而言,粘接·粘合层7如图1所示形成于面向从电子零件3露出的基板2的、导热性层6的下面。The bonding/bonding layer 7 is formed on the back surface of the thermally conductive layer 6 as shown in FIG. 4 . Specifically, as shown in FIG. 1 , the bonding/bonding layer 7 is formed on the lower surface of the thermally conductive layer 6 facing the substrate 2 exposed from the electronic component 3 .

粘接·粘合层7在常温气氛和加热气氛中具有柔软性、并且具有粘接性或者粘合性(粘性),由通过加热或者加热后的冷却能够表现出粘接作用的粘接剂、或者能够表现出粘合作用(粘合的作用,即压敏粘接的作用)的粘合剂构成。Adhesive/adhesive layer 7 has flexibility in a normal temperature atmosphere and a heated atmosphere, and has adhesiveness or cohesiveness (tackiness). Or an adhesive composition capable of exhibiting an adhesive effect (the effect of bonding, that is, the effect of pressure-sensitive bonding).

作为粘接剂,可列举出例如热固化型粘接剂、热熔型粘接剂等。As an adhesive agent, a thermosetting adhesive agent, a hot-melt adhesive agent, etc. are mentioned, for example.

热固化型粘接剂通过由加热引起的热固化来凝固,粘接在基板2上。作为热固化型粘接剂,可列举出例如环氧系热固化型粘接剂、聚氨酯系热固化型粘接剂、丙烯酸系热固化型粘接剂等。优选列举出环氧系热固化型粘接剂。The thermosetting adhesive is solidified by thermal curing by heating, and adheres to the substrate 2 . Examples of thermosetting adhesives include epoxy-based thermosetting adhesives, polyurethane-based thermosetting adhesives, acrylic thermosetting adhesives, and the like. Preferably, epoxy-based thermosetting adhesives are used.

热固化型粘接剂的固化温度例如为100~200℃。The curing temperature of the thermosetting adhesive is, for example, 100 to 200°C.

热熔型粘接剂通过加热发生熔融或者软化而热熔接于基板2,通过其后的冷却而凝固,由此粘接在基板2上。作为热熔型粘接剂,可列举出例如橡胶系热熔型粘接剂、聚酯系热熔型粘接剂、烯烃系热熔型粘接剂等。优选列举出橡胶系热熔型粘接剂。The hot-melt adhesive is melted or softened by heating to be thermally fused to the substrate 2 , and then solidified by cooling to adhere to the substrate 2 . Examples of the hot-melt adhesive include rubber-based hot-melt adhesives, polyester-based hot-melt adhesives, and olefin-based hot-melt adhesives. Preferably, rubber-based hot-melt adhesives are used.

热熔型粘接剂的软化温度(环球法)例如为100~200℃。另外,热熔型粘接剂的熔融粘度在180℃下例如为100~30000mPa·s。The softening temperature (ring and ball method) of the hot-melt adhesive is, for example, 100 to 200°C. In addition, the melt viscosity of the hot-melt adhesive is, for example, 100 to 30000 mPa·s at 180°C.

另外,上述粘接剂中根据需要例如也可以含有导热性颗粒。In addition, the above-mentioned adhesive may contain, for example, thermally conductive particles as necessary.

作为导热性颗粒,可列举出例如导热性无机颗粒、导热性有机颗粒等,优选列举出导热性无机颗粒。As a heat conductive particle, a heat conductive inorganic particle, a heat conductive organic particle etc. are mentioned, for example, Preferably a heat conductive inorganic particle is mentioned.

作为导热性无机颗粒,可列举出例如氮化硼颗粒、氮化铝颗粒、氮化硅颗粒、氮化镓颗粒等氮化物颗粒;例如氢氧化铝颗粒、氢氧化镁颗粒等氢氧化物颗粒;例如氧化硅颗粒、氧化铝颗粒、氧化钛颗粒、氧化锌颗粒、氧化锡颗粒、氧化铜颗粒、氧化镍颗粒等氧化物颗粒;例如碳化硅颗粒等碳化物颗粒;例如碳酸钙颗粒等碳酸盐颗粒;例如钛酸钡颗粒、钛酸钾颗粒等钛酸盐颗粒等金属酸盐颗粒;例如铜颗粒、银颗粒、金颗粒、镍颗粒、铝颗粒、白金颗粒等金属颗粒等。Examples of thermally conductive inorganic particles include nitride particles such as boron nitride particles, aluminum nitride particles, silicon nitride particles, and gallium nitride particles; hydroxide particles such as aluminum hydroxide particles and magnesium hydroxide particles; Oxide particles such as silicon oxide particles, aluminum oxide particles, titanium oxide particles, zinc oxide particles, tin oxide particles, copper oxide particles, nickel oxide particles; carbide particles such as silicon carbide particles; carbonate particles such as calcium carbonate particles Particles; metal salt particles such as titanate particles such as barium titanate particles and potassium titanate particles; metal particles such as copper particles, silver particles, gold particles, nickel particles, aluminum particles, platinum particles, etc.

这些导热性颗粒,可以单独使用或两种以上组合使用。These heat conductive particles may be used alone or in combination of two or more.

作为导热性颗粒的形状,可列举出例如块状、针状、片状、层状、管状等。导热性颗粒的平均粒径(最大长度)例如为0.1~1000μm。Examples of the shape of the heat conductive particles include a block shape, a needle shape, a flake shape, a layer shape, a tube shape, and the like. The average particle diameter (maximum length) of the heat conductive particles is, for example, 0.1 to 1000 μm.

另外,导热性颗粒具有例如各向异性的导热性或者各向同性的导热性。优选具有各向同性的导热性。In addition, the thermally conductive particles have, for example, anisotropic thermal conductivity or isotropic thermal conductivity. It preferably has isotropic thermal conductivity.

导热性颗粒的导热率例如为1W/m·K以上、优选为2W/m·K以上、进一步优选为3W/m·K以上;通常为1000W/m·K以下。The thermal conductivity of the thermally conductive particles is, for example, 1 W/m·K or higher, preferably 2 W/m·K or higher, more preferably 3 W/m·K or higher; usually 1000 W/m·K or lower.

导热性颗粒的配合比例相对于100质量份粘接剂的树脂成分,例如为190质量份以下、优选为900质量份以下。另外,导热性颗粒的以体积为基准计的配合比例为95体积%以下、优选为90体积%以下。The mixing ratio of the heat conductive particles is, for example, 190 parts by mass or less, preferably 900 parts by mass or less, based on 100 parts by mass of the resin component of the adhesive. Moreover, the compounding ratio by volume of a heat conductive particle is 95 volume% or less, Preferably it is 90 volume% or less.

将导热性颗粒混合在粘接剂中时,将导热性颗粒以上述配合比例加入到粘接剂中,搅拌混合。When mixing the thermally conductive particles into the adhesive, the thermally conductive particles are added to the adhesive in the above blending ratio, and stirred and mixed.

由此,将粘接剂作为导热性粘接剂制备。Thus, the adhesive was prepared as a thermally conductive adhesive.

导热性粘接剂的导热率例如为0.01W/m·K以上、通常为100W/m·K以下。The thermal conductivity of the thermally conductive adhesive is, for example, 0.01 W/m·K or more, usually 100 W/m·K or less.

作为粘合剂,例如适宜地选自于如下公知的粘合剂:丙烯酸系粘合剂、有机硅系粘合剂、橡胶系粘合剂、乙烯基烷基醚系粘合剂、聚酯系粘合剂、聚酰胺系粘合剂、聚氨酯系粘合剂、苯乙烯-二烯嵌段共聚物系粘合剂等。粘合剂可以单独使用或者2种以上组合使用。作为粘合剂,优选列举出丙烯酸系粘合剂、有机硅系粘合剂、橡胶系粘合剂;进一步优选列举出丙烯酸系粘合剂、有机硅系粘合剂。另外,在粘合剂中也可以以与上述同样的比例含有上述导热性颗粒而将粘合剂作为导热性粘合剂制备。导热性粘合剂的导热率与上述同样。As the adhesive, for example, it is suitably selected from the following known adhesives: acrylic adhesives, silicone adhesives, rubber adhesives, vinyl alkyl ether adhesives, polyester adhesives, Adhesives, polyamide adhesives, polyurethane adhesives, styrene-diene block copolymer adhesives, etc. Binders can be used alone or in combination of two or more. As the adhesive, preferably an acrylic adhesive, a silicone adhesive, and a rubber adhesive are used; more preferably, an acrylic adhesive and a silicone adhesive are used. In addition, the above-mentioned thermally conductive particles may be contained in the binder in the same ratio as above, and the binder may be prepared as a thermally conductive binder. The thermal conductivity of the thermally conductive adhesive is the same as above.

粘接·粘合层7的厚度T例如为50μm以下、优选为25μm以下、进一步优选为15μm以下;通常为1μm以上。粘接·粘合层7的厚度T超过上述范围时,有时不能使由电子零件3产生的热从导热性层6经过粘接·粘合层7热传导至框架4。The thickness T of the bonding/bonding layer 7 is, for example, 50 μm or less, preferably 25 μm or less, more preferably 15 μm or less; usually 1 μm or more. When the thickness T of the adhesive/adhesive layer 7 exceeds the above-mentioned range, heat generated in the electronic component 3 may not be thermally conducted from the thermally conductive layer 6 to the frame 4 through the adhesive/adhesive layer 7 .

而且,为了得到导热性粘接片材5,参照图4所示,首先,准备上述导热性层6,接着,将粘接·粘合层7层叠于导热性层6的背面。Then, in order to obtain the heat conductive adhesive sheet 5, as shown in FIG.

具体而言,通过将上述溶剂配合于粘接剂(优选为热固化型粘接剂)或者粘合剂而使其溶解,由此来制备清漆,将所述清漆涂布在隔膜表面,其后,通过常压干燥或者真空(减压)干燥蒸馏除去清漆的有机溶剂。另外,清漆的固体成分浓度例如为10~90质量%。Specifically, a varnish is prepared by mixing the above-mentioned solvent with an adhesive (preferably a thermosetting adhesive) or an adhesive to dissolve it, and the varnish is coated on the surface of the separator, and then , The organic solvent of the varnish is distilled off by normal pressure drying or vacuum (reduced pressure) drying. Moreover, the solid content concentration of a varnish is 10-90 mass %, for example.

其后,使粘接·粘合层7贴合于导热性层6。粘接·粘合层7与导热性层6贴合时,根据需要进行压接或者热压接。Thereafter, the adhesive/adhesive layer 7 is bonded to the heat conductive layer 6 . When bonding the adhesive/adhesive layer 7 and the thermally conductive layer 6, they are pressure-bonded or thermocompression-bonded as necessary.

接着,使用图5对散热结构体1的制作方法进行说明。Next, the manufacturing method of the heat radiation structure 1 is demonstrated using FIG. 5. FIG.

首先,在该方法中,如图5所示,将安装有电子零件3的基板2固定到支持着框架4的壳体(未图示)上,并且准备导热性粘接片材5。First, in this method, as shown in FIG. 5 , substrate 2 on which electronic components 3 are mounted is fixed to a case (not shown) supporting frame 4 , and thermally conductive adhesive sheet 5 is prepared.

另外,对导热性粘接片材5进行外形加工,以使其沿厚度方向投影时包含基板2。详细而言,导热性粘接片材5切割加工为如下尺寸:其中央部和一个端部与基板2重叠,另一个端部不与基板2重叠。In addition, the outer shape of the thermally conductive adhesive sheet 5 is processed so as to include the substrate 2 when projected in the thickness direction. Specifically, the thermally conductive adhesive sheet 5 is cut to a size such that its center and one end overlap the substrate 2 , and the other end does not overlap the substrate 2 .

接着,在该方法中,如图5所示,将导热性粘接片材5热压接于电子零件3以及基板2和框架4。Next, in this method, as shown in FIG. 5 , the thermally conductive adhesive sheet 5 is bonded to the electronic component 3 , the substrate 2 , and the frame 4 by thermocompression.

具体而言,将导热性粘接片材5的中央部和一个端部热压接于电子零件3和基板2,并且将导热性粘接片材5的另一个端部热压接于框架4。Specifically, the central part and one end of the thermally conductive adhesive sheet 5 are bonded to the electronic component 3 and the substrate 2 by thermocompression, and the other end of the thermally conductive adhesive sheet 5 is bonded to the frame 4 by thermocompression. .

详细而言,首先,如图5的虚线所示,将导热性粘接片材5和基板2配置成粘接·粘合层7的中央部和一个端部面向电子零件3,并且使导热性粘接片材5的另一个端部弯曲。In detail, first, as shown by the dotted line in FIG. The other end of the adhesive sheet 5 is bent.

接着,参照图5的箭头所示,使导热性粘接片材5的中央部和一个端部与电子零件3和基板2接触,并且使导热性粘接片材5的另一个端部与框架4接触,接着,加热导热性粘接片材5,同时将导热性粘接片材5的中央部和一个端部朝着基板2压接(按压,即热压接),并且将导热性粘接片材5的另一个端部朝着框架4压接(按压,即热压接)。Next, as indicated by the arrows in FIG. 5 , the central portion and one end of the thermally conductive adhesive sheet 5 are brought into contact with the electronic component 3 and the substrate 2 , and the other end of the thermally conductive adhesive sheet 5 is brought into contact with the frame. 4 contact, then, heat the thermally conductive adhesive sheet 5, and at the same time press the central part and one end of the thermally conductive adhesive sheet 5 toward the substrate 2 (press, ie thermocompression bonding), and apply the thermally conductive adhesive The other end of the connecting sheet 5 is crimped (pressed, that is, thermally crimped) toward the frame 4 .

压接是,例如使由有机硅树脂等树脂形成的海绵辊边按压导热性粘接片材5边在导热性粘接片材5的表面(导热性层6的上表面)滚动。For pressure bonding, for example, a sponge roller made of a resin such as silicone resin is rolled on the surface of the thermally conductive adhesive sheet 5 (upper surface of the thermally conductive layer 6 ) while pressing the thermally conductive adhesive sheet 5 .

加热温度例如为40~120℃。The heating temperature is, for example, 40 to 120°C.

该热压接中,由于粘接·粘合层7的柔软性提高,参照图1所示,从基板2的表面(上表面)向表侧(上侧)突出的电子零件3穿破粘接·粘合层7,电子零件3的表面(上表面)与导热性层6的背面(下面)接触。另外,在电子零件3的周围形成的间隙(例如电阻器23与基板2之间的间隙)14被粘接·粘合层7填充。进一步,粘接·粘合层7缠绕覆盖用于连接电子零件3(具体而言,为IC芯片20和电阻器23)和基板2的、未图示的端子和/或引线15。In this thermocompression bonding, since the flexibility of the adhesive/adhesive layer 7 is improved, as shown in FIG. · Adhesive layer 7 is such that the surface (upper surface) of electronic component 3 is in contact with the back surface (lower surface) of thermally conductive layer 6 . In addition, a gap 14 formed around the electronic component 3 (for example, a gap between the resistor 23 and the substrate 2 ) is filled with the bonding/adhesive layer 7 . Furthermore, the adhesive/adhesive layer 7 is wound around and covers terminals and/or leads 15 (not shown) for connecting the electronic component 3 (specifically, the IC chip 20 and the resistor 23 ) and the substrate 2 .

详细而言,电子零件3的上表面和侧表面的上部被导热性层6覆盖。In detail, the upper surface and the upper part of the side surface of the electronic component 3 are covered with the thermally conductive layer 6 .

另一方面,电子零件3的侧表面的下部被由电子零件3穿破的粘接·粘合层7覆盖(粘接或粘合)。On the other hand, the lower portion of the side surface of the electronic part 3 is covered (adhesive or bonded) with the adhesive·adhesive layer 7 pierced by the electronic part 3 .

更具体而言,在热压接中,树脂成分9为热固化性树脂成分时,树脂成分9成为B阶段,因此导热性层6粘合于从电子零件3露出的基板2的表面(上表面)。进一步,电子零件3的厚度比粘接·粘合层7的厚度厚时,在导热性层6中,电子零件3的上部从导热性层6的背面进入到内部。More specifically, in thermocompression bonding, when the resin component 9 is a thermosetting resin component, the resin component 9 becomes a B-stage, so the thermally conductive layer 6 adheres to the surface (upper surface) of the substrate 2 exposed from the electronic component 3. ). Furthermore, when the thickness of the electronic component 3 is thicker than that of the bonding/bonding layer 7 , the upper part of the electronic component 3 enters the inside of the thermally conductive layer 6 from the back surface of the thermally conductive layer 6 .

另外,粘接剂为热熔型粘接剂时,通过上述热压接,粘接·粘合层7熔融或软化,粘接·粘合层7的中央部和一个端部与基板2的表面和电子零件3的侧表面热熔接,并且粘接·粘合层7的另一个端部与框架4的内表面热熔接。In addition, when the adhesive is a hot-melt adhesive, the adhesive/adhesive layer 7 is melted or softened by the thermocompression bonding, and the central part and one end of the adhesive/adhesive layer 7 are bonded to the surface of the substrate 2. It is thermally welded to the side surface of the electronic component 3 , and the other end portion of the bonding/adhesive layer 7 is thermally welded to the inner surface of the frame 4 .

粘接剂为热固化型粘接剂时,通过上述热压接,粘接·粘合层7成为B阶段状态,粘接·粘合层7的中央部和一个端部临时固定于基板2的上表面和电子零件3的侧表面,并且粘接·粘合层7的另一个端部临时固定于框架4的内表面。When the adhesive is a thermosetting adhesive, the adhesive/adhesive layer 7 is in a B-stage state by the thermocompression bonding, and the central portion and one end portion of the adhesive/adhesive layer 7 are temporarily fixed to the bottom of the substrate 2. The upper surface, the side surface of the electronic component 3 , and the other end of the adhesive/adhesive layer 7 are temporarily fixed to the inner surface of the frame 4 .

其后,树脂成分9为热固化性树脂成分时,使导热性层6热固化,并且在粘接剂为热固化型粘接剂时使粘接·粘合层7热固化。Thereafter, when the resin component 9 is a thermosetting resin component, the thermally conductive layer 6 is thermally cured, and when the adhesive is a thermosetting adhesive, the bonding/bonding layer 7 is thermally cured.

为了使导热性层6和粘接·粘合层7热固化,例如将临时固定有导热性粘接片材5的框架4、基板2以及电子零件3投入干燥机。热固化的条件为:加热温度例如为100~250℃、优选为120~200℃;加热时间例如为10~200分钟、优选为60~150分钟。In order to thermally cure the thermally conductive layer 6 and the bonding/adhesive layer 7, for example, the frame 4 to which the thermally conductive adhesive sheet 5 is temporarily fixed, the substrate 2, and the electronic component 3 are put into a dryer. Conditions for thermosetting are: the heating temperature is, for example, 100 to 250° C., preferably 120 to 200° C.; the heating time is, for example, 10 to 200 minutes, preferably 60 to 150 minutes.

由此,导热性粘接片材5的中央部和一个端部与电子零件3和基板2粘接,并且导热性粘接片材5的另一个端部与框架4粘接。Thus, the central portion and one end portion of the thermally conductive adhesive sheet 5 are bonded to the electronic component 3 and the substrate 2 , and the other end portion of the thermally conductive adhesive sheet 5 is bonded to the frame 4 .

接着,在上述散热结构体1中,由于电子零件3被导热性粘接片材5覆盖,因此能够将由电子零件3产生的热从电子零件3的上表面和侧表面热传导至导热性粘接片材5。接着,能够使所述热从导热性粘接片材5热传导至框架4,并在框架4中向外部散热。Next, in the above-mentioned heat dissipation structure 1, since the electronic component 3 is covered by the thermally conductive adhesive sheet 5, heat generated by the electronic component 3 can be thermally conducted from the upper surface and the side surface of the electronic component 3 to the thermally conductive adhesive sheet. Material 5. Then, the heat can be thermally conducted from the thermally conductive adhesive sheet 5 to the frame 4 and dissipated in the frame 4 to the outside.

因此,能够将由电子零件3产生的热通过导热性粘接片材5和框架4有效地散热。Therefore, the heat generated by the electronic component 3 can be efficiently dissipated through the thermally conductive adhesive sheet 5 and the frame 4 .

另外,通过将导热性粘接片材5以覆盖电子零件3的方式设置于基板2上这样的简易而优异的作业性,能够将由电子零件3产生的热进行散热。In addition, the heat generated by the electronic component 3 can be dissipated due to the simple and excellent workability of disposing the heat conductive adhesive sheet 5 on the substrate 2 so as to cover the electronic component 3 .

图6示出本发明的散热结构体的其他实施方式(导热性粘接片材由导热性层构成的形态)的截面图;图7为用于制作图6的散热结构体的工序图;图8示出本发明的散热结构体的其他实施方式(导热性粘接片材的另一个端部接触壳体的形态)的截面图;图9示出本发明的散热结构体的其他实施方式(粘接·粘合层接触电子零件上表面的形态)的截面图。Fig. 6 shows the sectional view of the other embodiment (form that the thermally conductive adhesive sheet is made of thermally conductive layer) of the heat dissipation structure of the present invention; Fig. 7 is a process diagram for making the heat dissipation structure of Fig. 6; Fig. 8 shows a cross-sectional view of another embodiment of the heat dissipation structure of the present invention (the other end of the thermally conductive adhesive sheet is in contact with the housing); FIG. 9 shows another embodiment of the heat dissipation structure of the present invention ( Adhesive/adhesive layer contacting the upper surface of the electronic component) is a cross-sectional view.

另外,在以后的各附图中,对与上述各部对应的构件赋予相同的参照符号,省略其详细说明。In addition, in each of the following drawings, the same reference numerals are given to members corresponding to the above-mentioned respective parts, and detailed description thereof will be omitted.

在上述说明中,虽然导热性粘接片材5上设有粘接·粘合层7,但是,例如如图6所示,也可以不设粘接·粘合层7,由导热性层6形成导热性粘接片材5。In the above description, although the thermally conductive adhesive sheet 5 is provided with the adhesive/adhesive layer 7, for example, as shown in FIG. A thermally conductive adhesive sheet 5 is formed.

在图6中,电子零件3的侧表面与导热性层6接触。详细而言,从电子零件3露出的基板2的上面和电子零件3的全部侧表面与导热性层6接触。In FIG. 6 , the side surface of electronic component 3 is in contact with thermally conductive layer 6 . Specifically, the upper surface of the substrate 2 exposed from the electronic component 3 and all side surfaces of the electronic component 3 are in contact with the thermally conductive layer 6 .

为了得到该散热结构体1,如图7所示,将安装有电子零件3的基板2固定于支撑框架4的壳体(未图示)上,并且准备导热性粘接片材5。导热性粘接片材5由导热性层6构成。In order to obtain this heat dissipation structure 1, as shown in FIG. 7, the board|substrate 2 mounted with the electronic component 3 is fixed to the case (not shown) of the support frame 4, and the thermally conductive adhesive sheet 5 is prepared. The thermally conductive adhesive sheet 5 is composed of a thermally conductive layer 6 .

接着,如图7的虚线所示,使导热性粘接片材5弯曲,接着,参照图7的箭头所示,将导热性粘接片材5的中央部和一个端部热压接于电子零件3和基板2,并且将导热性粘接片材5的另一个端部热压接于框架4。Next, as shown by the dotted line in FIG. 7, the thermally conductive adhesive sheet 5 is bent, and then, as shown by the arrows in FIG. Components 3 and substrate 2 , and the other end of thermally conductive adhesive sheet 5 is bonded to frame 4 by thermocompression.

在导热性粘接片材5的热压接中,树脂成分9为热固化性树脂成分时,由于树脂成分9成为B阶段状态,因此在电子零件3的周围形成的间隙14被导热性层6填充。In thermocompression bonding of the thermally conductive adhesive sheet 5, when the resin component 9 is a thermosetting resin component, since the resin component 9 becomes a B-stage state, the gap 14 formed around the electronic component 3 is covered by the thermally conductive layer 6. filling.

由此,导热性粘接片材5临时固定于基板2和框架4。Thereby, the heat conductive adhesive sheet 5 is temporarily fixed to the board|substrate 2 and the frame 4. As shown in FIG.

其后,树脂成分9为热固化性树脂成分时,使导热性层6热固化。Thereafter, when the resin component 9 is a thermosetting resin component, the thermally conductive layer 6 is thermally cured.

由此,导热性层6的中央部和一个端部与电子零件3的上表面与侧表面、以及从电子零件3露出的基板2的上表面粘接,并且导热性层6的另一个端部粘接于框架4的右侧表面。Thus, the central part and one end of the thermally conductive layer 6 are bonded to the upper surface and the side surface of the electronic component 3, and the upper surface of the substrate 2 exposed from the electronic component 3, and the other end of the thermally conductive layer 6 is Bonded to the right surface of frame 4.

该散热结构体1中,导热性层6与电子零件3的表面和框架4的右侧表面直接接触。因此,图6的散热结构体1与图1的散热结构体1相比,能够更有效地将从电子零件3产生的热介由导热性层6进行散热。In this heat dissipation structure 1 , the thermally conductive layer 6 is in direct contact with the surface of the electronic component 3 and the right side surface of the frame 4 . Therefore, the heat dissipation structure 1 of FIG. 6 can dissipate heat generated from the electronic component 3 through the heat conductive layer 6 more effectively than the heat dissipation structure 1 of FIG. 1 .

另一方面,图1的散热结构体1中,导热性层6通过粘接·粘合层7与基板2和框架4粘接,因此,与图6的散热结构体1相比,导热性粘接片材5更可靠地粘接,能够长期表现出更加优异的散热性。On the other hand, in the heat dissipation structure 1 of FIG. 1 , the thermally conductive layer 6 is bonded to the substrate 2 and the frame 4 through the bonding/adhesive layer 7. Therefore, compared with the heat dissipation structure 1 of FIG. The bonding sheet 5 is more reliably bonded, and can exhibit more excellent heat dissipation for a long time.

另外,在上述图1和图6的说明中,虽然作为本发明中的散热性构件例示了框架4,但是散热性构件并不限定于此,例如也可以例示出壳体10(图8)、散热装置(未图示)、补强束(未图示)等。In addition, in the above description of FIG. 1 and FIG. 6, although the frame 4 was illustrated as the heat dissipation member in the present invention, the heat dissipation member is not limited thereto. For example, the case 10 ( FIG. 8 ), A heat sink (not shown), a reinforcing bundle (not shown), etc.

在图8中,壳体10制成上侧开放的有底箱状,一体化地具备底壁13和从其周端部向上方延伸的侧壁11。侧壁11配置在基板2的周围,底壁13配置在基板2的下侧。壳体10由例如铝、不锈钢、铜、铁等金属形成。In FIG. 8 , the casing 10 has a bottomed box shape with an open upper side, and integrally includes a bottom wall 13 and a side wall 11 extending upward from the peripheral end thereof. The side wall 11 is arranged around the substrate 2 , and the bottom wall 13 is arranged under the substrate 2 . The casing 10 is formed of metal such as aluminum, stainless steel, copper, iron, or the like.

另外,导热性粘接片材5的自中央部起的另一端部分从基板2的一端边缘向下方弯曲;配置成导热性粘接片材5的另一个端部在框架4的右侧表面(内表面)向下方延伸。导热性粘接片材5的另一个端部与框架4的右侧表面的下部(具体为侧壁11和底壁13的连接部的附近)接触。In addition, the other end portion from the central portion of the thermally conductive adhesive sheet 5 is bent downward from one end edge of the substrate 2; inner surface) extending downward. The other end of the thermally conductive adhesive sheet 5 is in contact with the lower portion of the right side surface of the frame 4 (specifically, the vicinity of the connecting portion between the side wall 11 and the bottom wall 13 ).

另外,在上述说明中,虽然将粘接·粘合层7层叠在导热性层6的单面(背面),但是,例如也可以如图1的虚线和图4的虚线所示,形成于导热性粘接片材5的两面(表面和背面)。In addition, in the above description, although the adhesive/adhesive layer 7 is laminated on one side (back side) of the thermally conductive layer 6, for example, as shown by the dotted line in FIG. 1 and the dotted line in FIG. Both sides (front and back) of the adhesive sheet 5.

另外,在上述图1的说明中,实施热压接使得粘接·粘合层7被电子零件3穿破,但例如也可以参照图9所示实施,使得粘接·粘合层7不被电子零件3穿破,而是覆盖于电子零件3的上表面。In addition, in the description of FIG. 1 above, the thermocompression bonding is carried out so that the adhesive/adhesive layer 7 is pierced by the electronic component 3, but for example, it may be implemented with reference to FIG. 9 so that the adhesive/adhesive layer 7 is not damaged. The electronic component 3 is pierced and covers the upper surface of the electronic component 3 .

粘接·粘合层7可配置为一方面同电子零件3的上表面接触,另一方面不与从电子零件3露出的基板2的上表面接触,与基板2的上表面隔着一定间隔(间隙)地配置。Adhesive/adhesive layer 7 can be disposed so as to be in contact with the upper surface of electronic component 3 on the one hand, and not to be in contact with the upper surface of substrate 2 exposed from electronic component 3 on the other hand, and to be separated from the upper surface of substrate 2 by a certain interval ( Gap) configuration.

该散热结构体1也能够将来自电子零件3的热介由粘接·粘合层7热传导至导热性层6,进一步,该导热性层6能够将所述热向散热性构件4热输送。This heat dissipation structure 1 can also conduct heat from the electronic component 3 to the thermally conductive layer 6 through the bonding/adhesive layer 7 , and further, the heat conductive layer 6 can thermally transport the heat to the heat dissipation member 4 .

实施例Example

以下示出制备例、实施例和制作例,对本发明进行更具体的说明,但是本发明并不受实施例的任何限定。The present invention will be described more specifically by showing preparation examples, examples, and production examples below, but the present invention is not limited to the examples at all.

导热性层的制备Preparation of thermally conductive layer

制备例1Preparation Example 1

配合13.42g PT-110(商品名,片状的氮化硼颗粒,平均粒径(光散射法)45μm,Momentive Performance Materials Japan.LLC制造)、1.0g JER828(商品名,双酚A型环氧树脂,第1环氧树脂,液态,环氧当量184~194g/eqiv.、软化温度(环球法)小于25℃、熔融粘度(80℃)70mPa·s、Japan Epoxy Resins Co.,Ltd.制造)、和2.0g EPPN-501HY(商品名,三苯基甲烷型环氧树脂,第2环氧树脂,固态、环氧当量163~175g/eqiv.、软化温度(环球法)57~63℃,日本化药公司制造)与3g(固体成分0.15g)固化剂(Curezol 2P4MHZ-PW(商品名,四国化成公司制造)的5质量%甲乙酮分散液)(相对于环氧树脂即JER828和EPPN-501HY的总量为5质量%)并搅拌,在室温(23℃)下放置1晚,使甲乙酮(固化剂的分散剂)挥发,制备半固态的混合物。Mix 13.42g PT-110 (trade name, flaky boron nitride particles, average particle diameter (light scattering method) 45μm, manufactured by Momentive Performance Materials Japan.LLC), 1.0g JER828 (trade name, bisphenol A type epoxy Resin, No. 1 epoxy resin, liquid, epoxy equivalent 184-194g/eqiv., softening temperature (ring and ball method) less than 25°C, melt viscosity (80°C) 70mPa·s, manufactured by Japan Epoxy Resins Co., Ltd.) , and 2.0g EPPN-501HY (trade name, triphenylmethane type epoxy resin, the second epoxy resin, solid state, epoxy equivalent 163-175g/eqiv., softening temperature (ring and ball method) 57-63 ℃, Japan Kayaku Co., Ltd.) and 3 g (solid content 0.15 g) of a curing agent (Curezol 2P4MHZ-PW (trade name, manufactured by Shikoku Chemical Co., Ltd.) of 5% by mass methyl ethyl ketone dispersion) (with respect to epoxy resins, that is, JER828 and EPPN-501HY The total amount was 5% by mass) and stirred, and left overnight at room temperature (23° C.) to volatilize methyl ethyl ketone (a dispersant for a curing agent) to prepare a semi-solid mixture.

另外,在上述配合中,相对于扣除固化剂的固体成分(即,氮化硼颗粒和环氧树脂的固体成分)的总体积,氮化硼颗粒的体积百分率(体积%)为70体积%。In addition, in the above compounding, the volume percentage (vol %) of the boron nitride particles was 70 vol% with respect to the total volume of the solid content excluding the curing agent (ie, the solid content of the boron nitride particles and the epoxy resin).

接着,用有机硅处理过的2张脱模薄膜夹住所得混合物,将其用真空热压机在80℃、10Pa的气氛(真空气氛)下,以5吨的负荷(20MPa)进行2分钟热压,由此得到厚度为0.3mm的压制片材(参照图2的(a))。Next, sandwich the resulting mixture with two release films treated with silicone, and heat it for 2 minutes with a load of 5 tons (20 MPa) at 80° C. and an atmosphere of 10 Pa (vacuum atmosphere). Pressing, thereby obtaining a pressed sheet having a thickness of 0.3 mm (see (a) of FIG. 2 ).

其后,以在沿压制片材的厚度方向投影时分割为多个的方式切割所得压制片材,由此得到分割片材(参照图2的(b)),接着,在厚度方向层叠分割片材而得到层叠片材(参照图2的(c))。Thereafter, the resulting pressed sheet is cut into multiple pieces when projected in the thickness direction of the pressed sheet to obtain a divided sheet (see FIG. 2( b )), and then the divided sheets are stacked in the thickness direction material to obtain a laminated sheet (see FIG. 2(c)).

接着,将所得层叠片材用与上述同样的真空加热压机在与上述同样的条件下进行热压(参照图2的(a))。Next, the obtained laminated sheet was hot-pressed under the same conditions as above using the same vacuum heating press as above (see FIG. 2( a )).

接着,将上述切割、层叠和热压的一连串操作(参照图2),重复4次而得到厚度为0.3mm的导热性层(未固化状态,参照图3)。Next, the above-mentioned series of operations of cutting, lamination, and heat pressing (see FIG. 2 ) were repeated four times to obtain a thermally conductive layer with a thickness of 0.3 mm (uncured state, see FIG. 3 ).

制备例2~16Preparation example 2-16

按照表1~表3的配合比例和制造条件,进行与制备例1同样的处理而得到导热性层(制备例2~16,参照图3)。According to the compounding ratio and manufacturing conditions of Table 1-Table 3, the same process as Preparation Example 1 was performed, and the thermally conductive layer was obtained (Preparation Examples 2-16, refer FIG. 3).

导热性粘接片材的制作Production of thermally conductive adhesive sheets

制作例1Production example 1

将丙烯酸系粘合剂的清漆(溶剂:MEK、固体成分浓度:50质量%、无填料型)涂布于隔膜表面,使得干燥时的厚度为10μm。接着,通过真空干燥,蒸馏除去MEK,由此形成粘合剂层。A varnish of an acrylic adhesive (solvent: MEK, solid content concentration: 50% by mass, filler-free type) was applied on the surface of the separator so that the thickness when dried was 10 μm. Next, MEK was distilled off by vacuum drying to form an adhesive layer.

接着,使制备例1的粘合剂层压接于导热性层,由此,制作导热性粘接片材(参照图4)。Next, the adhesive layer of Preparation Example 1 was pressure-bonded to the thermally conductive layer, thereby producing a thermally conductive adhesive sheet (see FIG. 4 ).

制作例2~16Production examples 2 to 16

除了分别使用制备例2~16的导热性层以外,与制作例1进行同样的处理,分别得到导热性粘接片材(制作例2~16)(参照图4)。Except having used the heat conductive layers of Preparation Examples 2-16, respectively, it processed similarly to Preparation Example 1, and obtained the heat conductive adhesive sheet (Preparation Examples 2-16) (refer FIG. 4).

散热结构体的制作Fabrication of heat dissipation structure

实施例1Example 1

准备由聚酰亚胺形成的平板状基板、其上安装的电子零件(厚度2mm的IC芯片、1mm的电容、4mm的线圈和0.5mm的电阻器)、框架(参照图5)。A flat board made of polyimide, electronic components mounted thereon (IC chip 2 mm thick, capacitor 1 mm, coil 4 mm, resistor 0.5 mm), and a frame (see FIG. 5 ) were prepared.

接着,将制作例1的导热性粘接片材切割为中央部及一个端部与基板重叠、另一个端部不与基板重叠的尺寸。Next, the thermally conductive adhesive sheet of Production Example 1 was cut into a size such that the central portion and one end overlap the substrate, and the other end does not overlap the substrate.

接着,将导热性粘接片材和基板配置成粘合剂层的中央部和一个端部面对电子零件,然后,使导热性粘接片材的另一个端部向上方弯曲,其后,使用由有机硅树脂形成的海绵辊,将导热性粘接片材朝向电子零件和框架压接(临时固定)(参照图9)。Next, the thermally conductive adhesive sheet and the substrate are arranged such that the central portion and one end of the adhesive layer face the electronic component, and then the other end of the thermally conductive adhesive sheet is bent upward, and thereafter, Using a sponge roller made of silicone resin, the thermally conductive adhesive sheet was crimped (temporarily fixed) toward the electronic component and the frame (see FIG. 9 ).

由此,导热性粘接片材的中央部和一个端部粘接于电子零件的上表面,并且导热性粘接片材另一个端部粘接于框架。As a result, the central portion and one end portion of the thermally conductive adhesive sheet are bonded to the upper surface of the electronic component, and the other end portion of the thermally conductive adhesive sheet is bonded to the frame.

另外,在导热性粘接片材的中央部和一个端部与从电子零件露出的基板之间形成间隙(参照图9)。In addition, gaps are formed between the central portion and one end portion of the thermally conductive adhesive sheet and the substrate exposed from the electronic component (see FIG. 9 ).

实施例2~16Examples 2-16

除了分别使用表4中记载的制作例2~16的导热性粘接片材来代替制作例1的导热性粘接片材以外,与实施例1同样地分别形成散热结构体(实施例2~16)。Except for using the thermally conductive adhesive sheets of Production Examples 2 to 16 described in Table 4 instead of the thermally conductive adhesive sheet of Production Example 1, heat dissipation structures were formed in the same manner as in Example 1 (Examples 2 to 16). 16).

实施例17Example 17

除了在导热性粘接片材的制作中不设置粘合剂层以外,与实施例1同样地制作散热结构体(参照图6)。Except not having provided the adhesive layer in preparation of a heat conductive adhesive sheet, it carried out similarly to Example 1, and produced the heat radiation structure (refer FIG. 6).

实施例18~32Examples 18-32

除了在导热性粘接片材的制作中不设置粘合剂层以外,分别与实施例2~16同样地制作散热结构体(实施例18~32)(参照图6)。Except not having provided the adhesive layer in preparation of a heat conductive adhesive sheet, it carried out similarly to Examples 2-16, and produced the heat radiation structure (Examples 18-32) (refer FIG. 6).

评价evaluate

1.导热率1. Thermal conductivity

对制备例1~16的导热性层测定导热率。The thermal conductivity of the thermally conductive layers of Preparation Examples 1 to 16 was measured.

即,使用氙闪光灯分析仪“LFA-447型”(NETZS CH公司制造)按照脉冲加热法测定面方向(SD)的导热率。That is, the thermal conductivity in the plane direction (SD) was measured by a pulse heating method using a xenon flash lamp analyzer "LFA-447" (manufactured by NETZS CH).

其结果示出于表1~表3。The results are shown in Tables 1 to 3.

2.孔隙率(P)2. Porosity (P)

按照下述方法测定制备例1~16的热固化前的导热性层的孔隙率(P1)。The porosity (P1) of the heat conductive layer before thermosetting of Preparation Examples 1-16 was measured by the following method.

孔隙率的测定方法:首先,通过截面抛光仪(CP),将导热性片材沿厚度方向进行切割加工,对由此出现的截面用扫描电子显微镜(SEM)在200倍下观察,获得图像。此后,由所得图像,对孔隙部分和其以外的部分进行二值化处理,接着算出孔隙部分相对于导热性片材总体的截面积的面积比。Measuring method of porosity: Firstly, cut the thermally conductive sheet along the thickness direction with a cross-section polisher (CP), and observe the resulting cross-section with a scanning electron microscope (SEM) at 200 times to obtain an image. Thereafter, from the obtained image, the void portion and other portions were binarized, and then the area ratio of the void portion to the cross-sectional area of the entire thermally conductive sheet was calculated.

其结果示出于表1~表3。The results are shown in Tables 1 to 3.

3.高度差追随性(三点弯曲试验)3. Height difference followability (three-point bending test)

对制备例1~16的热固化前的导热性层,在下述试验条件下,依据JIS K7171(2008年)实施三点弯曲试验,由此按照下述评价基准评价高度差追随性。其结果示出于表1~表3。The thermally conductive layers before thermosetting of Production Examples 1 to 16 were subjected to a three-point bending test in accordance with JIS K7171 (2008) under the following test conditions to evaluate height difference followability according to the following evaluation criteria. The results are shown in Tables 1 to 3.

试验条件Test conditions

试验片:尺寸20mm×15mmTest piece: size 20mm×15mm

支点间距离:5mmDistance between fulcrums: 5mm

试验速度:20mm/min(压头的下压速度)Test speed: 20mm/min (the pressing speed of the indenter)

弯曲角度:120度Bending angle: 120 degrees

评价基准Evaluation benchmark

◎:完全观察不到断裂。⊚: No breakage was observed at all.

○:几乎观察不到断裂。◯: Cracks are hardly observed.

×:明确观察到断裂。x: Cracks were clearly observed.

4.印刷标记的识别性(印刷标记附着性:通过喷墨印刷或4. Recognition of printed marks (printed mark adhesion: by inkjet printing or 激光印刷的标记附着性)Laser printing marking adhesion)

通过喷墨印刷和激光印刷,在制备例1~16的导热性层上印刷标记,对所述标记进行观察。Marks were printed on the thermally conductive layers of Preparation Examples 1 to 16 by inkjet printing and laser printing, and the marks were observed.

其结果,在制备例1~16的导热性层的任一个中,均能够良好地识别到基于喷墨印刷和激光印刷两者的标记,确认印刷标记附着性良好。As a result, in any of the thermally conductive layers of Preparation Examples 1 to 16, marks by both inkjet printing and laser printing could be recognized favorably, and it was confirmed that the print mark adhesion was good.

5.体积电阻5. Volume resistance

测定制备例1~16的导热性层的体积电阻(R)。The volume resistance (R) of the thermally conductive layers of Preparation Examples 1-16 was measured.

即,依据JIS K 6911(热固化性塑料的一般试验方法,2006年版)测定导热性层的体积电阻(R)。That is, the volume resistance (R) of the thermally conductive layer was measured in accordance with JIS K 6911 (General Test Methods for Thermosetting Plastics, 2006 Edition).

其结果示出于表1~表3。The results are shown in Tables 1 to 3.

6.初始粘接力试验6. Initial adhesion test

6-1.对笔记本用安装基板的初始粘接力试验6-1. Initial adhesion test to notebook mounting substrates

对于制备例1~16的未固化的导热性层,对安装有多个电子零件的笔记本用安装基板实施初始粘接力试验(1)和(2)。For the uncured thermally conductive layers of Preparation Examples 1 to 16, the initial adhesion tests (1) and (2) were implemented with respect to a mounting board for notebooks on which a plurality of electronic components were mounted.

即,使用由有机硅树脂形成的海绵辊,在80℃(制备例1~9及制备例11~16)或者120℃(制备例10)下将导热性层加热压接于沿水平方向的笔记本电脑用安装基板的表面而进行临时固定,放置10分钟后,然后将笔记本用安装基板设置成沿上下方向(初始粘接力试验(2))。That is, using a sponge roller made of silicone resin, heat-compression bond the thermally conductive layer to a notebook in the horizontal direction at 80°C (Preparation Examples 1 to 9 and Preparation Examples 11 to 16) or 120°C (Preparation Example 10). The surface of the computer mounting board was temporarily fixed, and after leaving it for 10 minutes, the notebook mounting board was placed in the vertical direction (initial adhesion test (2)).

接着,将笔记本电脑用安装基板设置成导热性层指向下侧(即,使其从刚临时固定的状态进行上下反转)(初始粘接力试验(1))。Next, the mounting substrate for a notebook computer was set so that the thermally conductive layer was directed downward (that is, it was turned upside down from the state just temporarily fixed) (initial adhesion test (1)).

接着,在上述初始粘接力试验(1)和初始粘接力试验(2)中,按照下述标准对导热性层进行评价。其结果示出于表1~表3。Next, in the above-mentioned initial adhesion test (1) and initial adhesion test (2), the thermally conductive layer was evaluated according to the following criteria. The results are shown in Tables 1 to 3.

标准standard

○:确认导热性层未从笔记本电脑用安装基板脱落。◯: It was confirmed that the thermally conductive layer did not fall off from the mounting substrate for notebook personal computers.

×:确认导热性层从笔记本电脑用安装基板脱落。x: It was confirmed that the thermally conductive layer was peeled off from the mounting substrate for notebook personal computers.

6-2.对不锈钢基板的初始粘接力试验6-2. Initial adhesion test to stainless steel substrate

对于制备例1~16的未固化的导热性层,与上述同样地实施相对于不锈钢基板(SUS304制)的初始粘接力试验(1)和(2)。About the uncured heat conductive layer of the preparation examples 1-16, the initial stage adhesive force test (1) and (2) with respect to the stainless steel board|substrate (made by SUS304) were implemented similarly to the above.

接着,在上述初始粘接力试验(1)和初始粘接力试验(2)中,按照下述标准对导热性层进行评价。其结果示出于表1~表3。Next, in the above-mentioned initial adhesion test (1) and initial adhesion test (2), the thermally conductive layer was evaluated according to the following criteria. The results are shown in Tables 1 to 3.

标准standard

○:确认导热性层未从不锈钢基板上脱落。◯: It was confirmed that the thermally conductive layer did not come off the stainless steel substrate.

×:确认导热性层从不锈钢基板上脱落。×: It was confirmed that the thermally conductive layer was peeled off from the stainless steel substrate.

7.体积电阻7. Volume resistance

测定制备例1~16的未固化的导热性层的体积电阻(R)。The volume resistance (R) of the uncured heat conductive layer of Preparation Examples 1-16 was measured.

即,依据JIS K 6911(热固化性塑料的一般试验方法,2006年版)测定导热性层的体积电阻(R)。That is, the volume resistance (R) of the thermally conductive layer was measured in accordance with JIS K 6911 (General Test Methods for Thermosetting Plastics, 2006 Edition).

其结果示出于表1~表3。The results are shown in Tables 1 to 3.

8.散热性8. Heat dissipation

使实施例1~32的散热结构体中的电子零件工作,经过1小时。用红外线照相机测定工作中导热性粘接片材的表面温度,结果为70℃,确认到温度上升被抑制。The electronic components in the heat dissipation structures of Examples 1 to 32 were operated for one hour. The surface temperature of the thermally conductive adhesive sheet during operation was measured with an infrared camera, and it was 70° C., and it was confirmed that the temperature rise was suppressed.

另一方面,对未使用导热性粘接片材的基板(比较例1的散热结构体中的基板),进行同样的评价,电子零件垂直上方的温度为130℃。On the other hand, when the same evaluation was performed on the substrate not using the thermally conductive adhesive sheet (the substrate in the heat dissipation structure of Comparative Example 1), the temperature vertically above the electronic component was 130°C.

据此,确认到实施例1~32的散热结构体的散热性优异。From this, it was confirmed that the heat dissipation structures of Examples 1 to 32 were excellent in heat dissipation.

表1Table 1

Figure BSA00000431048200341
Figure BSA00000431048200341

g*A:配合质量g *A : Fitting mass

[体积%]*B:相对于导热片材(扣除固化剂)的总体积的百分率[Volume%] *B : Percentage relative to the total volume of the thermally conductive sheet (excluding curing agent)

[体积%]*C:相对于导热片材的总体积的百分率[Volume%] *C : Percentage relative to the total volume of the thermally conductive sheet

次数]*D:层叠片材的热压的次数Number of times] *D : Number of times of hot pressing of the laminated sheet

表2Table 2

g*A:配合质量g *A : Fitting mass

[体积%]*B:相对于导热片材(扣除固化剂)的总体积的百分率[Volume%] *B : Percentage relative to the total volume of the thermally conductive sheet (excluding curing agent)

[体积%]*C:相对于导热片材的总体积的百分率[Volume%] *C : Percentage relative to the total volume of the thermally conductive sheet

次数*D:层叠片材的热压的次数Number of times *D : The number of times of hot pressing of laminated sheets

表3table 3

g*A:配合质量g *A : Fitting mass

[体积%]*B:相对于导热片材(扣除固化剂)的总体积的百分率[Volume%] *B : Percentage relative to the total volume of the thermally conductive sheet (excluding curing agent)

[体积%]*C:相对于导热片材的总体积的百分率[Volume%] *C : Percentage relative to the total volume of the thermally conductive sheet

次数*D:层叠片材的热压的次数Number of times *D : The number of times of hot pressing of laminated sheets

表4Table 4

Figure BSA00000431048200371
Figure BSA00000431048200371

表1~表3中的各成分中的数值在没有特殊的记载时表示克数。The numerical value in each component in Table 1 - Table 3 shows the number of grams unless otherwise indicated.

另外,在表1~表3的氮化硼颗粒的栏中,上面的数值为氮化硼颗粒的配合质量(g),中间的数值为相对于在导热性片材中扣除固化剂的固体成分(即,氮化硼颗粒、和环氧树脂或聚乙烯的固体成分)的总体积,氮化硼颗粒的体积百分率(体积%),下面的数值为相对于导热性片材的固体成分(即,氮化硼颗粒、和环氧树脂或固化剂的固体成分)的总体积,氮化硼颗粒的体积百分率(体积%)。In addition, in the column of boron nitride particles in Tables 1 to 3, the upper value is the compounding mass (g) of boron nitride particles, and the middle value is the solid content of the thermally conductive sheet excluding the curing agent. (that is, the total volume of boron nitride particles, and the solid content of epoxy resin or polyethylene), the volume percentage (volume %) of boron nitride particles, and the following values are relative to the solid content of the thermally conductive sheet (that is, , the total volume of boron nitride particles, and the solid content of epoxy resin or curing agent), the volume percentage (volume %) of boron nitride particles.

另外,对表1~表3的各成分附有※的成分,以下记载其详细内容。In addition, for each component in Tables 1 to 3, the details of the components marked with * are described below.

PT-100※1:商品名、片状的氮化硼颗粒、平均粒径(光散射法)45μm、Momentive Performance Materials Japan LLC制造PT-100 *1 : Trade name, flaky boron nitride particles, average particle size (light scattering method) 45 μm, manufactured by Momentive Performance Materials Japan LLC

UHP-1※2:商品名:SHOBN UHP-1,片状的氮化硼颗粒,平均粒径(光散射法)9μm,昭和电工制造UHP-1 *2 : Trade name: SHOBN UHP-1, flake-shaped boron nitride particles, average particle size (light scattering method) 9 μm, manufactured by Showa Denko

环氧树脂A※3:OGSOL EG(商品名),双芳基芴型环氧树脂,半固态,环氧当量294g/eqiv.,软化温度(环球法)47℃,熔融粘度(80℃)1360mPa·s,Osaka Gas Chemicals Co.,Ltd.制造Epoxy Resin A ※3 : OGSOL EG (trade name), bisaryl fluorene type epoxy resin, semi-solid, epoxy equivalent 294g/eqiv., softening temperature (ring and ball method) 47°C, melt viscosity (80°C) 1360mPa s, manufactured by Osaka Gas Chemicals Co., Ltd.

环氧树脂B※4:JER828(商品名),双酚A型环氧树脂,液态,环氧当量184~194/eqiv.,软化温度(环球法)小于25℃,熔融粘度(80℃)70mPa·s,Japan Epoxy Resins Co.,Ltd.制造Epoxy Resin B ※4 : JER828 (trade name), bisphenol A type epoxy resin, liquid, epoxy equivalent 184~194/eqiv., softening temperature (ring and ball method) less than 25°C, melt viscosity (80°C) 70mPa s, manufactured by Japan Epoxy Resins Co., Ltd.

环氧树脂C※5:JER1002(商品名),双酚A型环氧树脂,固态,环氧当量600~700g/eqiv.,软化温度(环球法)78℃,熔融粘度(80℃)10000mPa·s以上(测定界限以上),Japan EpoxyResins Co.,Ltd.制造Epoxy Resin C ※5 : JER1002 (trade name), bisphenol A type epoxy resin, solid, epoxy equivalent 600~700g/eqiv., softening temperature (ring and ball method) 78°C, melt viscosity (80°C) 10000mPa · s or more (above the measurement limit), manufactured by Japan EpoxyResins Co., Ltd.

环氧树脂D※6:EPPN-501HY(商品名),三苯甲烷型环氧树脂,固态,环氧当量163~175/eqiv.,软化温度(环球法)57~63℃,日本化药公司制造Epoxy resin D ※6 : EPPN-501HY (trade name), triphenylmethane type epoxy resin, solid state, epoxy equivalent 163-175/eqiv., softening temperature (ring and ball method) 57-63 ℃, Nippon Kayaku Co., Ltd. manufacture

固化剂※7:Curezol 2PZ(商品名,四国化成公司制造)的5质量%甲乙酮溶液Curing agent *7 : 5% by mass methyl ethyl ketone solution of Curezol 2PZ (trade name, manufactured by Shikoku Chemicals Co., Ltd.)

固化剂※8:Curezol 2P4MHZ-PW(商品名,四国化成公司制造)的5质量%甲乙酮分散液Curing agent *8 : 5% by mass methyl ethyl ketone dispersion of Curezol 2P4MHZ-PW (trade name, manufactured by Shikoku Chemicals Co., Ltd.)

聚乙烯※9:低密度聚乙烯,重均分子量(Mw)4000,数均分子量(Mn)1700,Aldrich公司制造Polyethylene *9 : Low-density polyethylene, weight average molecular weight (Mw) 4000, number average molecular weight (Mn) 1700, manufactured by Aldrich

另外,上述说明作为本发明的例示的实施方式来提供,但是这只不过是单纯的例示,不能作为限定性解释。对本领域技术人员而言明显的本发明的变形例,也包含在专利的权利要求范围内。In addition, although the above-mentioned description is provided as an exemplary embodiment of the present invention, this is merely an illustration and should not be interpreted as a limitation. Modifications of the present invention that are obvious to those skilled in the art are also included in the scope of the patent claims.

Claims (2)

1. a heat-radiating structure is characterized in that,
It possesses substrate, be installed on the electronic component of described substrate, be used for the thermal diffusivity member that will be dispelled the heat by the heat that described electronic component produces and be arranged at thermal conductivity adhesive sheet on the described substrate in the mode that covers described electronic component,
Described thermal conductivity adhesive sheet possesses the thermal conductivity layer of the boron nitride particle that contains sheet,
Thermal conductivity with direction described thermal conductivity layer thickness direction quadrature described thermal conductivity layer is more than the 4W/mK,
Described thermal conductivity adhesive sheet contacts with described thermal diffusivity member.
2. heat-radiating structure according to claim 1 is characterized in that,
Described thermal conductivity adhesive sheet has the bond layer or the adhesive phase of one side at least that is layered in described thermal conductivity layer,
Described bond layer or described adhesive phase and described substrate bonding or bonding.
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