CN102166685A - Three-coordinate galvanometer scanning laser processing head - Google Patents

Abstract

The invention provides a three-coordinate galvanometer scanning laser processing head, which includes an XY two-axis laser galvanometer system, a clamping mechanism, a Z-axis moving mechanism, a laser displacement sensor and a control system, and the Z-axis moving mechanism includes a fixed part And a moving part, the clamping mechanism is fixedly installed on the fixed part of the Z-axis moving mechanism, the XY two-axis laser galvanometer system and the laser displacement sensor are fixedly installed on the moving part of the Z-axis moving mechanism, the laser displacement sensor, the Z-axis Both the moving mechanism and the XY two-axis laser galvanometer system are electrically connected to the control system. The laser processing head has the function of dynamic focus adjustment and has an independent and compact structure. Its standard CNC machine tool broach interface design makes it very easy to combine with three-axis, five-axis and other commercial multi-axis linkage CNC machine tools, which greatly improves the process flexibility. , can easily change the conventional multi-axis linkage CNC machine tool into a galvanometer scanning laser processing machine tool, and the functions are compatible, so it has important practical value.

Description

A three-coordinate galvanometer scanning laser processing head

technical field

The invention belongs to the application field of laser processing, in particular to a three-coordinate vibrating mirror scanning laser processing head.

Background technique

In recent years, the laser processing technology based on galvanometer scanning (hereinafter referred to as galvanometer scanning laser processing) is due to its high efficiency, high precision, non-contact, high degree of flexibility, and strong material adaptability (machinable superhard, ultrabrittle , ultra-thin and other special materials) and other characteristics, so that it has been widely used in the field of precision manufacturing.

The galvanometer scanning laser processing equipment generally includes a laser, a light guide path, a galvanometer scanning laser processing head, and a machine tool. The system principle is: the laser beam output from the laser resonator passes through the light guide path to complete the beam expansion alignment After straightening, it enters the galvanometer scanning laser processing head. The XY two-axis laser galvanometer system in the laser processing head realizes the focusing and precise deflection scanning movement of the laser beam. Specifically, the galvanometer scanning laser processing head mainly includes an XY two-axis laser galvanometer system and an auxiliary mechanism. The XY two-axis laser galvanometer system generally includes two laser plane mirrors and a scanning focusing lens. The laser beam passes through The reflection of a pair of laser plane mirrors (referred to as X and Y axis laser plane mirrors) installed vertically and driven by a servo motor enters the scanning focusing lens (also known as F-theta objective lens or telecentric lens) to focus and output Act on the object to be processed. The rotation of the X and Y axis laser plane mirrors makes the laser focus spot on the working plane move on the X and Y axes respectively, and the two mirrors cooperate to make the laser focus spot move in a straight line and various curves on the working plane. The incident angle of the beam satisfies a linear relationship with the spot position on the image plane, so the position of the spot on the image plane can be controlled by controlling the scanning angle of the incident beam.

The galvanometer scanning laser processing head is generally fixedly installed on the machine tool, and the X, Y two-dimensional graphic laser processing within the scanning range of the laser galvanometer system can be realized by controlling the deflection movement of the beam. Therefore, installing the galvanometer scanning laser processing head on an X-Y-Z multi-axis CNC machine tool that can move linearly can realize many laser processing applications such as laser engraving, laser welding, laser etching, and laser marking of large-format workpieces. It divides the area to be processed into several sub-blocks (the size of the sub-blocks is determined by the scanning range of the galvanometer scanning laser processing head), and utilizes the characteristics of high processing speed and high precision of the galvanometer scanning laser processing head to realize each Sub-block graphics processing, while the machine tool mainly drives the galvanometer scanning laser processing head to the next sub-block processing position. For example, the Chinese patent No. 200320116332.3 "Vibrating lens engraving and cutting multi-purpose laser engraving machine", the invention patent document No. 201020026191.6 "An ultraviolet laser cutting machine", and the patent document no. "Type laser welding device and method" reports the application of XY two-axis laser galvanometer system for flat plate laser cutting, etching and welding of various materials.

However, in the current galvanometer scanning laser processing equipment, the structure of the galvanometer scanning laser processing head is relatively simple. In addition to the XY two-axis laser galvanometer system, there are only some auxiliary mechanisms such as dust removal and CCD processing monitoring. The two-dimensional laser galvanometer system is designed to be fixedly connected to the multi-axis CNC machine tool. Because it does not have the characteristics of modularization and independent interface, it is not easy to disassemble and install, and the adjustment of the focal length must rely on the Z-axis motion mechanism of the multi-axis CNC machine tool. Functional correlation Due to the high degree of precision, it is difficult to realize the processing requirements of complex curved surface workpieces that require frequent adjustment of the processing focal length in real time. Furthermore, there is no document reporting a galvanometer scanning laser processing head with integrated processing focal length measurement and adjustment functions.

Contents of the invention

The object of the present invention is to propose a three-coordinate galvanometer scanning laser processing head, which has a modular processing unit, is easy to disassemble, can be combined with a variety of commercial CNC machine tools, and has a simple and reliable process. , The advantages of strong applicability in the processing of complex curved surface workpieces.

The invention provides a three-coordinate galvanometer scanning laser processing head, including an XY two-axis laser galvanometer system; a clamping mechanism for installing the laser processing head to a multi-axis linkage numerical control machine tool; for adjusting the XY two-axis laser The Z-axis moving mechanism of the Z-axis position of the galvanometer system; the control system for controlling the movement of the Z-axis moving mechanism and the XY two-axis laser galvanometer system; the Z-axis moving mechanism includes a fixed part and a moving part, and a clamping mechanism It is fixedly installed on the fixed part of the Z-axis moving mechanism, and the XY two-axis laser galvanometer system is fixedly installed on the moving part of the Z-axis moving mechanism. The moving direction is parallel, and the Z-axis moving mechanism and the XY two-axis laser vibrating mirror system are electrically connected with the control system.

Further, it also includes a laser displacement sensor used to measure the Z-direction distance between the XY two-axis laser galvanometer system and the processed workpiece, and output the Z-direction distance to the control system. The laser displacement sensor is fixedly installed on the Z-axis to move The moving parts of the mechanism are electrically connected to the control system.

Further, the fixed part of the Z-axis moving mechanism is a guide rail, and the moving part is a slider, which is installed on the guide rail and can move up and down along the guide rail.

Further, the installation angle of the laser displacement sensor makes the laser displacement measurement direction parallel to the beam emission direction of the XY two-axis laser galvanometer system.

Further, the multi-axis linkage CNC machine tool is a three-axis or five-axis linkage CNC machine tool.

Existing galvanometer scanning laser processing equipment generally adopts a structure in which the XY two-dimensional laser galvanometer system and the multi-axis CNC machine tool are integrally fixed. The Z-axis laser focus adjustment function must rely on the cooperation of the multi-axis CNC machine tool, so the processing head is not easy to disassemble. Installation, applicability is not high. The three-coordinate galvanometer scanning laser processing head provided by the present invention has a "2+1 axis" structure of an XY two-axis laser galvanometer system and a Z-axis moving mechanism. Through the internal Z-axis moving mechanism, the laser vibration can be realized The processing focal length self-adjustment function of the mirror system. The structure of the processing head is independent and compact, and the clamping mechanism is designed according to the broach interface of the standard CNC machine tool, so that the combined processing with commercial multi-axis linkage CNC machine tools such as three-axis and five-axis is very simple, which greatly improves the process flexibility and can be convenient The conventional multi-axis linkage CNC machine tool is changed into a galvanometer scanning laser processing machine tool, and the functions are compatible, so it has important practical value.

In addition, the processing head is also equipped with a high-precision laser displacement sensor, Z-axis moving mechanism, high-precision laser displacement sensor and control system constitute a closed-loop feedback control system for laser processing focal length, so that the processing head itself has the function of dynamic measurement and adjustment of processing focal length .

Description of drawings

Fig. 1 is a structural schematic diagram of a three-coordinate galvanometer scanning laser processing head of the present invention;

The meanings of the symbols in the figure; 1 is the standard clamping structure for industrial CNC machine tools, 2 is the Z-axis moving mechanism, 3 is the bracket, 4 is the XY two-axis laser galvanometer system, 5 is the laser displacement sensor, 6 is the workpiece , 7 is a laser beam, 8 is a control system, 201 is a vertical guide rail, and 202 is a slider.

Detailed ways

Typical implementations of the present invention will be described in detail below with the help of drawings and examples.

The three-coordinate vibrating mirror scanning laser processing head according to the present invention has a structure as shown in Figure 1, including: clamping mechanism 1, Z-axis moving mechanism 2, bracket 3, XY two-axis laser vibrating mirror system 4, laser displacement Sensor 5 and control system 8 . The Z-axis moving mechanism 2 , the XY two-axis laser vibrating mirror system 4 , and the laser displacement sensor 5 are all electrically connected to the control system 8 . The bottom of the clamping mechanism 1 is installed on the bracket 3, which is used to install the laser processing head on the multi-axis linkage CNC machine tool; the Z-axis moving mechanism 2 is also installed on the bracket 3, which is used to adjust the XY two-axis laser galvanometer system The Z-axis position, which can move up and down along the Z-axis direction; the bracket 3 is used to fix the Z-axis moving mechanism 2 and the clamping mechanism 1; the XY two-axis laser galvanometer system 4 is used to focus the laser beam and output it on the The workpiece 6 is processed, and the focused laser beam is controlled by the control system 8 to scan the XY two-dimensional pattern; the laser displacement sensor 5 is used to measure the Z-direction distance between the XY two-axis laser galvanometer system 4 and the processed workpiece 6, and feedback to the control System 8; the control system 8 controls the moving parts of the Z-axis moving mechanism 2 to move in the Z-axis direction to adjust the focal length of laser processing.

Specifically, the Z-axis moving mechanism 2 includes a fixed part and a moving part, that is, a vertical guide rail 201 and a slider 202. The vertical guide rail 201 is fixedly connected to the bracket 3, and the slider 202 is installed on the vertical guide rail through a lifting gear. 201 , the control system 8 drives the slider 202 to move up and down along the vertical guide rail 201 by controlling the servo motor. The XY two-axis laser galvanometer system 3 is fixedly installed on the moving part of the Z-axis moving mechanism 2, that is, the slider 202. The XY two-axis laser galvanometer system 4 is installed in an orientation such that the beam emission direction is in line with the vertical movement direction of the slider 202 (that is, Z axis direction) parallel to each other, therefore, the two-axis galvanometer XY two-dimensional graphic scanning motion capability of the XY two-axis laser galvanometer system 4 is combined with the Z-axis linear motion capability of the slider 202 to form a complete XYZ Cartesian coordinate system motion function, realizing its own Three-coordinate galvanometer scanning laser processing movement. The fixed part of the Z-axis moving mechanism 2 is fixedly connected with the clamping mechanism 1 through the bracket 3. The function of the clamping mechanism 1 is to install the laser processing head on the standard broach holder of the multi-axis linkage CNC machine tool, and the multi-axis linkage CNC machine tool It can be a three-axis linkage CNC machine tool, or a five-axis linkage CNC machine tool, etc.

The laser displacement sensor 5 is fixedly installed on the slider 202 of the Z-axis moving mechanism 2, and is fixedly installed next to the XY two-axis laser galvanometer system 4, and the installation angle makes the laser displacement measurement direction consistent with that of the XY two-axis laser galvanometer system 4. The outgoing direction of the light beam (that is, the direction of the Z axis) is parallel. The laser displacement sensor 5, the Z-axis moving mechanism 2 and the control system 8 form a closed-loop feedback control system, and according to the conversion relationship between the XY two-axis laser galvanometer system 4 and the fixed installation position of the laser displacement sensor 5, the laser beam can be adjusted during processing. 7. The processing focal length dynamic measurement and adjustment function.

The structure of the clamping mechanism 1 is designed according to the international standard broach head, which can be a round broach, a keyway broach, a rectangular or hexagonal hole broach, etc., and is determined by the broach holder configured by the multi-axis linkage CNC machine tool to be installed. model.

The Z-axis moving mechanism 2 can be a servo motor or stepping motor-driven screw guide rail plus a slider structure, or a linear motor-driven linear guide rail plus a slider structure. It is required to be able to achieve high repeatability positioning accuracy of the Z-axis slider motion. at 0.05mm.

The XY two-axis laser vibrating mirror system 4 can be any XY two-axis laser vibrating mirror system widely used in the industrial field. Parameters such as processing focal length and output beam characteristics are determined accordingly.

The laser displacement sensor 5 can be any laser displacement measuring device capable of realizing accurate distance measurement, and the measurement accuracy is required to be higher than 0.05mm, and the high-precision laser displacement sensors widely used in the industrial field can meet this requirement.

Install the three-coordinate galvanometer scanning laser processing head described in the present invention to a commercial three-axis or five-axis linkage CNC machine tool through the clamping mechanism 1 to form a so-called "3+3" axis or "5+3" axis laser processing head. Processing machine tool, the laser processing head is driven by the three-axis or five-axis linkage CNC machine tool to locate the position to be processed on the surface of the large-format workpiece, and then the laser processing head is used to complete the galvanometer scanning laser processing movement, which can realize laser processing of flat workpieces or curved surface workpieces . Specifically, after the laser beam emitted by the laser passes through the light guide system, the laser beam 7 enters the XY two-axis laser galvanometer system 4 in the laser processing head, and is reflected by two X-axis and Y-axis laser plane mirrors. Enter the scanning focus lens and focus on the workpiece 6. During the processing of a flat workpiece, when the slider 202 drives the XY two-axis laser vibrating mirror system 4 and the laser displacement sensor 5 to move up and down along the Z-axis direction, the laser displacement sensor 5 can measure the Z-direction between the sensor and the workpiece surface 6 in real time. distance, and fed back to the control system, since the relative orientation of the laser displacement sensor 5 and the XY two-axis laser galvanometer system 4 is fixed, the Z-axis moving mechanism 2 can be controlled by the control system 8 to adjust the Z position of the slider 202 in real time. axis position, so that the Z-direction distance between the XY two-axis laser galvanometer system 4 and the workpiece surface 6 always maintains the preset processing focal length. In the process of processing curved surface workpieces, first, according to the relative orientation conversion relationship between the laser displacement sensor 5 and the XY two-axis laser galvanometer system 4, the multi-axis linkage CNC machine tool is used to drive the laser processing head to move, so that the measurement beam of the laser displacement sensor 5 Move to the area to be scanned by the XY two-axis laser galvanometer system 4, measure the Z-direction distance between the sensor and the workpiece surface 6, feed back to the control system 8, and control the Z-axis position of the slider 202 by the control system 8 to make the XY The Z-direction distance between the two-axis laser vibrating mirror system 4 and the workpiece surface 6 is the preset processing focal length; then, the laser processing head is driven by a three-axis or five-axis linkage CNC machine tool to move the XY two-axis laser vibrating mirror system 4 to the waiting position. Scan the processing area, and the laser processing head completes the galvanometer scanning laser processing movement.

The embodiments of the present invention are not limited to the content of the above-mentioned specific embodiments, and the equipment that can be combined with the three-coordinate galvanometer scanning laser processing head is not limited to industrial three-axis or five-axis linkage CNC machine tools, and can also be automatic Any workpiece positioner designed. Those skilled in the art can implement the present invention in various other specific implementation modes according to the content disclosed in the present invention. Therefore, any use of the technical solutions and ideas of the present invention, with only some replacements and modifications known to those skilled in the art, is within the protection scope of the present invention.

Claims (5)

1. a three-dimensional vibration mirror scanning type laser Machining head comprises XY diaxon laser galvanometer system, it is characterized in that it also comprises:

Be used for this laser Machining head is mounted to the clamping mechanism of multi-axis linkage numerical control lathe;

Be used to regulate the Z axle travel mechanism of XY diaxon laser galvanometer system Z shaft position;

Be used to control the control system of Z axle travel mechanism and the motion of XY diaxon laser galvanometer system;

Described Z axle travel mechanism comprises a fixed part and a moving component, clamping mechanism is fixedly mounted on the fixed part of Z axle travel mechanism, XY diaxon laser galvanometer system is fixedly mounted on the moving component of Z axle travel mechanism, the light beam exit direction of XY diaxon laser galvanometer system is parallel with the direction of motion of Z axle travel mechanism moving component, and Z axle travel mechanism and XY diaxon laser galvanometer system all are electrically connected with control system.

2. three-dimensional vibration mirror scanning type laser Machining head according to claim 1, it is characterized in that, it comprises that also one is used between measured X Y diaxon laser galvanometer system and the processing work Z to spacing, and this Z is exported to the laser displacement sensor of control system to spacing, this laser displacement sensor is fixedly mounted on the moving component of Z axle travel mechanism, is electrically connected with control system.

3. three-dimensional vibration mirror scanning type laser Machining head according to claim 1 and 2 is characterized in that, the fixed part of described Z axle travel mechanism is a guide rail, and moving component is a slide block, and slide block is installed on the guide rail, and can move up and down along guide rail.

4. three-dimensional vibration mirror scanning type laser Machining head according to claim 1 and 2 is characterized in that, the setting angle of laser displacement sensor makes its laser displacement measurement direction parallel with the light beam exit direction of XY diaxon laser galvanometer system.

5. three-dimensional vibration mirror scanning type laser Machining head according to claim 1 and 2 is characterized in that, described multi-axis linkage numerical control lathe is three or 5-shaft linkage numerical control lathe.

Images