CN102121943B - Six-dimensional acceleration sensor based on miniature uniaxial acceleration sensor/sensor - Google Patents

Abstract

The invention discloses a six-dimensional acceleration sensor based on a miniature uniaxial acceleration sensitive element/sensor, which includes a base, three sensor circuit boards with two miniature uniaxial acceleration sensitive elements/sensors respectively installed with the same characteristics, data acquisition and Process the circuit board and the cover plate connected to the base, the sensor circuit board with two miniature uniaxial acceleration sensitive elements/sensors is installed with two miniature uniaxial acceleration sensitive elements/sensors, to ensure that the two miniature uniaxial acceleration sensitive elements/sensors on each circuit board A miniature uniaxial acceleration sensitive element/sensor is symmetrical about the central axis of the sensor circuit board and the sensitive axes are perpendicular to each other; the base is three mutually perpendicular surfaces processed on a solid body as the installation base of the sensor circuit board. Because the miniature uniaxial acceleration sensor is used as the sensitive device and the data processing circuit board is organically integrated, the invention has the advantages of compact structure, small volume and high integration degree.

Description

Six-dimensional acceleration sensor based on miniature uniaxial acceleration sensor/sensor

technical field

The invention relates to a six-dimensional acceleration sensor based on a miniature uniaxial acceleration sensitive element/sensor, which realizes the six-dimensional acceleration of the base movement by combining the six miniature uniaxial acceleration sensitive elements/sensors installed on the surface of the base with data acquisition and processing circuits. The invention relates to the sensing of dimensional acceleration, belonging to the fields of inertial technology and sensor technology. The sensitive element and sensor in the attributive before the title of the present invention "six-dimensional acceleration sensor based on miniature uniaxial acceleration sensitive element/sensor" are two equivalent concepts.

Background technique

The motion of the robot and space mechanism can be obtained by sensing its six-dimensional acceleration (including three-dimensional angular acceleration and three-dimensional linear acceleration). Since traditional acceleration sensors can only sense three-dimensional linear acceleration or single-axis angular acceleration, the research on six-dimensional acceleration sensors that can simultaneously realize three-dimensional angular acceleration and three-dimensional linear acceleration sensing has become a research topic in the fields of inertial technology and sensor technology. A hot issue.

At present, a variety of six-dimensional acceleration sensors based on capacitive, piezoresistive and photoelectric principles have been studied by using the sensing principle of obtaining the displacement of a single inertial mass relative to the shell or the strain of an elastic unit to realize six-dimensional acceleration. For example, Canavan et al. (IEEE Transactions on Magnetics, Vol.27, No.2, 3253-3256, 1992) designed a method by obtaining the displacement of a superconducting mass suspended on a set of superconducting coils with continuous current. A six-dimensional acceleration sensor that realizes six-dimensional acceleration sensing; Amarasinghe et al. (Sensors and Actuators A: Physical, Vol.134, No.2, 310-320, 2007) proposed a cantilever beam that supports inertial mass Strain realizes the six-dimensional acceleration sensor of six-dimensional acceleration sensing; Chapsky et al. (Sensors and Actuators A: Physical, Vol.135, No.2, 558-569, 2007) studied a method using six optical displacement sensors to obtain The displacement of the cubic inertial mass supported by 24 springs realizes the six-dimensional acceleration sensor for six-dimensional acceleration sensing. The above-mentioned six-dimensional acceleration sensors all have the disadvantages of complex structures and high requirements for manufacturing techniques.

In addition, six-dimensional acceleration sensing can also be realized by fixing multiple uniaxial acceleration sensing units together according to a specific layout structure. For example, the invention patent "Layout Method of Sensitive Components of Six-axis Acceleration Sensor" (patent number: ZL 200610095028.3) invented by the inventor himself provides a sensitive unit of six-dimensional acceleration sensor based on six uniaxial acceleration sensitive units layout method. The invention patent "Layout Method of Six-axis Acceleration Sensor Based on Nine Acceleration Sensing Units" (Patent No.: ZL 200810237023.9) invented by the inventor himself provides a sensitive unit of a six-dimensional acceleration sensor based on nine uniaxial acceleration sensing units layout method. The above two methods can effectively obtain six-dimensional acceleration, and have the advantages of simple structure, low cost and easy implementation. However, due to their structure, the size of the sensitive unit of the six-dimensional acceleration sensor processed by this layout method is relatively large, so it is difficult to use The existing miniature uniaxial acceleration sensitive element/sensor based on MEMS technology realizes the miniaturization of the six-dimensional acceleration sensor.

Contents of the invention

The object of the present invention is to provide a six-dimensional acceleration sensor based on a miniature uniaxial acceleration sensitive element/sensor with compact structure, small volume and high integration.

Technical scheme of the present invention is as follows:

The six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor described in the present invention includes a base, three sensor circuit boards with two miniature uniaxial acceleration sensitive elements/sensors respectively installed with the same characteristics, and a data acquisition and processing circuit plate and cover attached to the base. Two miniature uniaxial acceleration sensitive elements/sensors and their peripheral circuits are installed on each of the three sensor circuit boards with the same characteristics, and the two miniature uniaxial acceleration sensitive elements/sensors are symmetrical about the midline of the surface of the sensor circuit board and the sensitive axes are mutually Vertical, the distance from each sensitive center of mass to the vertical foot is l (the scale parameter of the six-dimensional acceleration sensor); the three sensor circuit boards are respectively fixed on the three mutually perpendicular surfaces of the base, through the positioning holes or perpendicular to the installation plane The plane positioning ensures that the sensitive axes of two adjacent miniature uniaxial acceleration sensitive units/sensors on different sensor circuit boards are perpendicular to each other and coplanar, and the distance from each sensitive centroid to the vertical foot is l; the base passes through a piece The three mutually perpendicular surfaces processed on the rectangular entity are used as the installation base of the sensor circuit board; the base can be a recessed or convex base, and the entity of the processed base can be other axisymmetric shapes; data acquisition and The processing circuit board is directly fixed on the housing and connected to the three sensor circuit boards through cables. When the housing moves together with the measured object, the six miniature uniaxial acceleration sensitive elements/sensors convert the felt motion into six-channel electrical signal output, and the data acquisition and processing circuit board controls the six miniature uniaxial acceleration sensitive elements/sensors The output of the sensor is amplified, filtered, and converted into a digital signal and read into the data processing chip for calculation. The obtained six-dimensional acceleration is converted into an analog signal output through the DA output module or output to the outside through USB/Bluetooth/RS232 and other interfaces. digital device.

The present invention has the following advantages:

1. The present invention processes three mutually perpendicular surfaces on the base as the installation plane of the sensor circuit board, and makes two miniature uniaxial acceleration sensitive elements/sensors on each sensor circuit board about the centerline of the sensor circuit board surface Symmetrical and sensitive axes are perpendicular to each other, the distance from each sensitive centroid to the vertical foot is l, and at the same time, the sensitive axes of two adjacent miniature uniaxial acceleration sensitive unit sensors on different sensor circuit boards are mutually perpendicular and coplanar, and their respective sensitive centroids The distance to the vertical foot is l, the installation plane of this structure can facilitate the installation of the sensor circuit board, and realize the organic arrangement of the miniature uniaxial acceleration sensitive elements/sensors, making the six-dimensional acceleration sensor compact in structure, small in size and highly integrated .

2. The use of miniature uniaxial acceleration sensitive elements/sensors as the sensitive unit has the advantages of easy implementation, small volume and high integration.

3. The structure of the base is simple, and the manufacturing process requirements and production cost are low.

4. The data acquisition and processing circuit uses a digital signal processing chip to realize the calculation of the six-dimensional acceleration, which is fast, accurate and real-time.

5. The measurement results are output to external devices through USB/DA output/Bluetooth/RS232, etc., which are easy to use and convenient to interface.

Description of drawings

FIG. 1 is a three-dimensional assembly diagram of a six-dimensional acceleration sensor based on a miniature uniaxial acceleration sensitive element/sensor involved in the present invention.

Fig. 2(a) is a three-dimensional structural schematic diagram of the base of the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor involved in the present invention.

Fig. 2(b) is a front view of the base of the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor involved in the present invention.

Fig. 2(c) is an A-A sectional view of the base of the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor involved in the present invention.

Fig. 3(a) is the front view of the sensor circuit board assembly diagram of the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor involved in the present invention.

Fig. 3(b) is a side view of the sensor circuit board assembly diagram of the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor involved in the present invention.

Fig. 4 is a schematic block diagram of a data acquisition and processing circuit board based on a miniature uniaxial acceleration sensitive element/sensor involved in the present invention.

FIG. 5 is a three-dimensional assembly schematic diagram of an embodiment of the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor using an external data acquisition and processing circuit board in the present invention.

FIG. 6 is a three-dimensional assembly schematic diagram of an embodiment of a six-dimensional acceleration sensor based on a miniature uniaxial acceleration sensor/sensor using a convex base in the present invention.

Fig. 7(a) is a three-dimensional schematic diagram of the convex base in the embodiment of the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor of the present invention using the convex base.

Fig. 7(b) is a front view of the convex base in the embodiment of the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor used in the present invention.

Fig. 8 is a three-dimensional assembly schematic diagram of an embodiment of a six-dimensional acceleration sensor based on a miniature uniaxial acceleration sensor/sensor using a convex base and an external data acquisition and processing circuit board in the present invention.

Detailed ways

The structure of the present invention is specifically described below in conjunction with embodiment and accompanying drawing:

As shown in Figure 1, the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor consists of a cover plate 1, a data acquisition and processing circuit board 2, and two miniature uniaxial acceleration sensitive elements/sensors installed on three pieces with the same characteristics. 9 of the sensor circuit board 3 and the base 4, wherein the base 4 also serves as the housing of the sensor. The sensor circuit board 3 installed with two miniature uniaxial acceleration sensitive elements/sensors 9 is fixed on the three mounting planes of the base 4 through mounting holes 10 or glue bonding, and is fixed on the three mounting planes of the base 4 by the positioning holes on the sensor circuit board or with the mounting plane The vertical face ensures positioning such that the lower edge of the sensor circuit board 3 coincides with the lower plane of the mounting plane and is centered in the horizontal direction of the mounting plane. The data acquisition and processing circuit board 2 is composed of a data processing circuit 6 and an output interface 8, and is fixed on the base 4 through screws and mounting holes 7 and 11. The sensor circuit board 3 and the data acquisition and processing circuit board 2 are connected by wires.

As shown in Figures 2 (a) and 2 (b), the base 4 is a recessed base, by retaining the side of the cylinder from the top surface to the cylinder on a cuboid with a square section or other cylinders with a square section Three mounting planes 12 , 13 and 14 , which are perpendicular to each other and symmetrical to the central axis of the cuboid, are cut out inside, and the three mounting planes 12 , 13 and 14 are indented relative to the sides of the cylinder. As shown in FIG. 2( c ), O is the intersection of the planes where the installation planes 12 , 13 and 14 are located. The angle between the installation plane 14 and one side of the cuboid is 125.3°, and the distance from its lower edge to point O is c. Mounting bosses 15 and mounting holes 16 for connection with the measured object are processed on the bottom of the base 4 and the center of the two orthogonal sides.

As shown in Figure 3 (a), two miniature uniaxial acceleration sensitive elements/sensors 9 are fixed on the upper surface of the sensor circuit board 3 with respect to the center line of the surface of the sensor circuit board 3 and the sensitive axes are perpendicular to each other, and each sensitive centroid to the vertical foot The distance to the lower surface of the sensor circuit board 3 is respectively l and h (as shown in Figure 3 (b)), the distance from the vertical feet of the sensitive axes of the two miniature uniaxial acceleration sensitive elements/sensors 9 to the sensor circuit board 3 lower edges is d, the sensitive axes of two adjacent miniature uniaxial acceleration sensitive unit sensors located on different sensor circuit boards 3 are perpendicular to each other and coplanar, and the distances from the respective sensitive centroids to the vertical feet are l, satisfying

$\mathrm{<span\; class="notranslate">\; d</span>}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; 2</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; l</span>}<span\; class="notranslate">\; +</span>\mathrm{<span\; class="notranslate">\; h</span>}<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; c</span>}$

As shown in Fig. 4, the data acquisition and processing circuit board 2 is composed of three parts: a data acquisition module, a data processing module and an output interface module. Among them, the data acquisition module converts the analog signal output by the miniature uniaxial acceleration sensitive element/sensor 9 into a digital signal through six-way A/D conversion and reads it into the data processing module. The six-dimensional acceleration is calculated by the acceleration solving program, which is converted into an analog signal output through the DA output module of the output interface module or output to an external digital device through an interface such as USB/Bluetooth/RS232.

As shown in Figure 5, the data acquisition and processing circuit board in the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor can adopt an external structure. The interface board 17 is fixed on the base 4 through screws and mounting holes 18 and 11, and the outputs of the three sensor circuit boards 3 are drawn out through the interface 19 and connected to the external data acquisition and processing board 2 through cables. The data acquisition and processing board 2 reads the outputs of the three sensor circuit boards 3 and processes them.

As shown in Figure 6, it is another embodiment of the six-dimensional acceleration sensor based on the miniature uniaxial acceleration sensitive element/sensor, by the cover plate 20, the data acquisition and processing circuit board 2, two miniature uniaxial acceleration sensitive elements are installed The sensor circuit board 3 and the convex base 21 of the sensor 9 are formed. The sensor circuit board 3 mounted with two miniature uniaxial acceleration sensitive elements/sensors 9 is fixed on the three mounting planes of the convex base 21 through mounting holes or adhesive bonding. The positioning is ensured by the positioning holes on the sensor circuit board, so that the lower edge of the sensor circuit board 3 coincides with the upper edge of the mounting plane of the convex base 21 and is centered in the horizontal direction of the mounting plane. Both the protruding base 21 and the data acquisition and processing circuit board 2 are fixed on the housing processed from a rectangular parallelepiped with a square cross section through mounting holes. The sensor circuit board 3 and the data acquisition and processing circuit board 2 are connected by wires.

As shown in Figure 7(a), the convex base 21 is cut out from the side of the cylinder to the center on a rectangular parallelepiped cylinder with a square cross section, and three mutually perpendicular cylinders with an angle of 125.3° included in the cross section and symmetrical to the cylinder axis are cut out. The installation planes 23, 24 and 25 are obtained, and each installation plane is processed with a positioning hole 22 for the installation and positioning of the sensor circuit board 3. The installation of the miniature uniaxial acceleration sensitive elements/sensors on the sensor circuit board 3 and the relationship between the adjacent miniature uniaxial acceleration sensitive elements/sensors on each sensor circuit board 3 are the same as the requirements of the previous embodiments. The bottom of the convex base 21 is processed with a positioning hole and a mounting surface 26 for connecting the measured carrier.

As shown in FIG. 7( b ), P is the intersection of the planes where the installation planes 23 , 24 and 25 are located. The distance from the upper edge of the installation planes 23, 24 and 25 to point P is e, satisfying

$\mathrm{<span\; class="notranslate">\; e</span>}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; 2</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; l</span>}<span\; class="notranslate">\; -</span>\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; h</span>}<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; d</span>}$

As shown in Figure 8, the data acquisition and processing circuit board in the six-dimensional acceleration sensor based on the convex base of the miniature uniaxial acceleration sensitive element/sensor can also adopt an external structure. The interface board 17 is fixed on the base 21 through screws and mounting holes 18, and the outputs of the three sensor circuit boards 3 are drawn out through the interface 19 and connected to the external data acquisition and processing board 2 through cables. The data acquisition and processing board 2 reads the outputs of the three sensor circuit boards 3 and processes them.

Claims (10)

1. six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor; Comprise pedestal (4), three sensor circuit board (3), data acquisition and treatment circuit plate (2) and cover plates (1) that two miniature individual axis acceleration sensitive element/sensors (9) are installed respectively that characteristic is consistent, it is characterized in that: the mounting plane of three orthogonal surfaces as three sensor circuit boards (3) arranged on the pedestal (4); Every sensor circuit board (3) upper surface is installed two miniature individual axis acceleration sensitive element/sensors (9); And guarantee that two miniature individual axis acceleration sensitive element/sensors (9) are vertical each other about surperficial center line symmetry of sensor circuit board (3) and responsive axis; Responsive separately barycenter is l to the distance of intersection point, and l is the scale parameter of six-dimension acceleration sensor; Each sensor circuit board (3) is fixed on the said mounting plane and with said mounting plane and locatees; Guarantee on the different sensors circuit board and the mutual vertical and coplane of the responsive axis of adjacent two miniature individual axis acceleration sensing unit/sensors, responsive separately barycenter is l to the distance of intersection point simultaneously.

2. the six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor according to claim 1 is characterized in that: said each sensor circuit board (3) guarantees through each sensor circuit board (3) pilot hole or the face vertical with said mounting plane with the location of said mounting plane.

3. a kind of six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor according to claim 1 and 2 is characterized in that: said orthogonal mounting plane obtains through on the pedestal (4) of an entity, cutting with 125.3 ° of base level bottom surface angles and about axisymmetric three planes, entity center.

4. a kind of six-dimension acceleration sensor according to claim 3 based on miniature individual axis acceleration sensitive element/sensor; It is characterized in that: said cutting is cut from end face towards column body for keeping column side face, makes the plane of three mounting planes for caving in respect to column side face of formation.

5. a kind of six-dimension acceleration sensor according to claim 3 based on miniature individual axis acceleration sensitive element/sensor; It is characterized in that: said cutting makes three mounting planes of formation be the plane with respect to cylinder bottom surface evagination for from the cutting of column side face to the center.

6. according to the described a kind of six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor of one of claim 1-3, it is characterized in that: miniature individual axis acceleration sensitive element/sensor (9) is based on the miniature individual axis acceleration sensitive element of MEMS technology or based on the technological micro-acceleration sensor of MEMS.

7. a kind of six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor according to claim 4 is characterized in that: miniature individual axis acceleration sensitive element/sensor (9) is based on the miniature individual axis acceleration sensitive element of MEMS technology or based on the technological micro-acceleration sensor of MEMS.

8. a kind of six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor according to claim 5 is characterized in that: miniature individual axis acceleration sensitive element/sensor (9) is based on the miniature individual axis acceleration sensitive element of MEMS technology or based on the technological micro-acceleration sensor of MEMS.

9. according to claim 4 or 7 described a kind of six-dimension acceleration sensors based on miniature individual axis acceleration sensitive element/sensor; It is characterized in that: the responsive barycenter of said miniature individual axis acceleration sensitive element/sensor (9) is h to the distance of sensor circuit board (3) lower surface; The intersection point of the responsive axis of two miniature individual axis acceleration sensitive element/sensors (9) is d to the distance of sensor circuit board (3) lower limb; The distance that the intersection point O of each mounting plane lower limb to three mounting plane is ordered is c, satisfies: $d=2\sqrt{2}l+h-c.$

10. according to claim 5 or 8 described a kind of six-dimension acceleration sensors based on miniature individual axis acceleration sensitive element/sensor; It is characterized in that: the responsive barycenter of said miniature individual axis acceleration sensitive element/sensor (9) is h to the distance of sensor circuit board (3) lower surface; The intersection point of the responsive axis of two miniature individual axis acceleration sensitive element/sensors (9) is d to the distance of sensor circuit board (3) lower limb; The distance that the intersection point P of each mounting plane coboundary to three mounting plane is ordered is e, satisfies $e=2\sqrt{2}l-\sqrt{2}h-d.$

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