CN101995664B - Laser beam transformation shaper outputting uniform linear spots - Google Patents

Abstract

The invention discloses a laser beam transformation shaper whose output is a uniform line spot, which is a laser beam with irregular spot shape and uneven energy distribution after transformation and shaping into a laser beam with uniform energy distribution and a spot shape approximate to a line The optical system is mainly used in laser polishing, laser cleaning, and laser-induced material surface modification, which belongs to the field of laser surface treatment technology and its application. The present invention comprises seven parts: the first part telescope system that is made up of a plurality of circular lenses or cylindrical lenses, the second, the third, the fourth, the fifth part that are formed by the cylindrical lens array that has N cylindrical lenses respectively, consists of two The sixth part is composed of cylindrical lenses whose generatrices are perpendicular to each other, and the seventh part is composed of cylindrical lenses or a combination of cylindrical lenses. The invention transforms and shapes the incident laser light into a linear laser spot with uniform energy distribution of the spot, cooperates with the rapid movement of the workbench, and greatly improves the efficiency of laser polishing, laser cleaning and laser-induced material surface modification.

Description

Laser beam transformation shaper whose output is uniform line spot

technical field

The invention is a laser beam transformation shaper whose output is uniform line spot, which is a kind of light spot with irregular shape (such as: circular, nearly circular, elliptical, nearly elliptical, square, nearly square, etc.), The laser beam with uneven energy distribution (such as: Gaussian distribution, near-Gaussian distribution, etc.) is transformed into an optical system with uniform energy distribution and a laser beam whose spot shape is approximately a line after beam transformation. It is mainly used in laser polishing, laser cleaning, laser It belongs to the field of laser surface treatment technology and its application.

Background technique

The laser spot required for laser surface treatment technology and its application fields is slightly different depending on the technology used. Among them, the shape of the laser spot is usually square, rectangular or approximately a line, and the energy distribution of the laser spot is usually Gaussian. Near Gaussian distribution or uniform distribution. In order to achieve higher surface treatment efficiency, the shape of the laser spot is usually a laser spot with a shape similar to a line, or a rectangular laser spot with a short side, and combined with the rapid movement of the worktable to form a scanning laser surface treatment. In order to achieve a better surface treatment effect, the energy distribution of the laser spot is usually uniformly distributed. The laser beam transformation shaper in the field of laser surface treatment technology and its application usually includes three components: beam expander collimator, shaper and homogenizer; the laser beam transformation shaper that does not require high surface treatment effect can be used in some In some cases (such as: the incident laser is a Gaussian beam or a near-Gaussian beam and the central part is intercepted in the transformation shaper, the distribution of the incident laser light is relatively uniform, etc.), the homogenizer is omitted, and the beam expander collimator is even combined with the shaper. The optical system of the laser beam conversion shaper does not have high requirements on the optical imaging quality, therefore, the requirements on the aberration of each component unit are not high, and only the spherical aberration of each component unit needs to be considered in the design. The optical system of the laser beam conversion shaper is usually designed for a single wavelength. Therefore, the material is usually selected for a single wavelength during design, that is, the entire optical system uses a single material without considering the correction of chromatic aberration in the optical system; The optical system of the beam conversion shaper is less likely to be designed for multiple wavelengths that are relatively close. Therefore, it is less likely to select materials for multiple wavelengths that are relatively close during design. When selecting materials for multiple wavelengths, Because the wavelengths are relatively close, according to the different applicable wavelength bands, choosing 2-3 common materials (such as: K9, B270, etc.) can meet the correction requirements of the optical system for chromatic aberration. The laser beam transformation shaper usually requires to use the input laser energy as much as possible, so the number of lenses contained in its optical system is small, usually less than 10 pieces.

At present, in the field of laser surface treatment technology and its application, the laser beam transformation shapers used are mainly classified according to the following three methods:

1. According to the requirements of the transformation shaper on the incident laser, the transformation shaper is divided into two types: the incident laser of the first type of transformation shaper is a Gaussian beam or a near-Gaussian beam; the incident laser of the second type of transformation shaper is a certain A non-uniform beam (non-Gaussian beam, non-near-Gaussian beam) with spot energy distribution and divergence characteristics. Among them, the first transformation shaper is usually designed for Gaussian lasers or near-Gaussian lasers with specific parameters, and transformation shapers designed for different parameters cannot be used universally, for example: "Gauss-flat-top" transformation shapers, etc.; the second transformation Shapers are usually designed for non-uniform laser beams with certain spot energy distribution and divergence characteristics. As long as the spot energy distribution and divergence characteristics of non-uniform laser beams are within the design range, non-uniform lasers can be universally transformed into shapers, for example: Optical waveguide uniform beam transformation shaper, etc.

2. According to the method of transforming the shaper to control the shape of the laser spot, the transforming shaper is divided into two types: the first type of transforming shaper blocks the laser beam through the blocking body, absorbs the laser energy at the edge of the laser beam, and thus controls the output Laser spot shape; the second type of transformation shaper transforms and shapes the incident laser through an internal optical system composed of mirrors, lenses, and prisms, thereby controlling the shape of the outgoing laser spot. Among them, there is a large loss of laser energy in the first transformation shaper, and the output and input of laser energy are relatively low. When transforming and shaping a high-power laser, an air cooling system or a water cooling system is required to cooperate to ensure the transformation of the shaper. normal use, such as: a telescope system with a diaphragm, etc.; there is no shielding body for the laser beam in the second transformation shaper, the laser energy loss is small, and the output-input ratio is high. When transforming and shaping a higher-power laser When it is used, no air-cooling system or water-cooling system is needed, such as "Gauss-flat top" transformation shaper, etc.

3. According to the method of transforming the uniform laser beam of the shaper, the transformation shaper is divided into three categories: the first type of transformation shaper controls the incident laser wavefront through a specific optical system (such as: free-form surface, etc.), so as to achieve uniformity The role of the laser beam, such as: "Gauss-flat-top" transformation shaper, etc.; the second type of transformation shaper introduces an optical waveguide into the optical system, so that the incident laser light is reflected multiple times in the optical system, so as to achieve uniform laser beam Function, such as: optical waveguide uniform beam transformation shaper, etc.; the third type of transformation shaper performs beam splitting and beam superposition on the incident laser beam, so as to realize the function of uniform laser beam, such as: compound eye uniform beam transformation shaper, etc.

In the laser surface treatment technology and its application field, due to the different use occasions, the indicators of the laser beam transformation shaper are also different. Each laser beam transformation shaper has its own characteristics and application range, and is applied to specific occasions and uses. For applications such as high-precision laser polishing, high-precision laser cleaning, and high-efficiency laser-induced surface modification of materials, traditional laser beam transformation shapers often cannot achieve ideal results due to uniformity and efficiency problems, for example: " The output laser spot of the Gaussian-flat-top transform shaper is usually a circular spot, the output laser spot of the compound eye uniform beam transform shaper is usually a square spot, and the laser energy loss in the telescope system with a diaphragm is relatively large. It is conducive to the improvement of surface treatment efficiency; the energy distribution of the exit laser spot of the optical waveguide uniform beam transformation shaper is usually near Gaussian distribution, which is not conducive to the improvement of surface treatment uniformity.

Contents of the invention

The purpose of the present invention is to design and implement a laser beam transformation and shaping suitable for high-precision laser polishing, high-precision laser cleaning, and high-efficiency laser-induced material surface modification for laser surface treatment technology and its application field. device. The laser beam transformation shaper can not only be applicable to the case where the incident laser is a Gaussian beam or a near-Gaussian beam, but also can be applied to a case where the incident laser is a non-uniform beam (non-Gaussian beam, non-near-Gaussian beam) with certain spot energy distribution and divergence characteristics. light beam). The laser beam transformation shaper can transform and shape the incident laser light into a linear laser spot with uniform energy distribution of the laser spot. With the rapid movement of the worktable, it can greatly improve the efficiency of laser polishing, laser cleaning and laser-induced material surface modification.

In order to achieve the above object, the present invention adopts the following technical scheme: a laser beam transformation shaper whose output is a uniform line spot consists of a first part 1, a second part 4, a third part 5, a fourth part 6, and a fifth part 7 , The sixth part 8 and the seventh part 11 are composed, as shown in FIG. 1 . The first part 1 is a telescope system, which is composed of a plurality of circular lenses or cylindrical lenses; the second part 4, the third part 5, the fourth part 6 and the fifth part 7 are all composed of N identical cylinders A cylindrical lens array composed of lenses, the specific numerical value of N is given when the present invention is designed and implemented, and the value range of N is greater than or equal to 2, wherein: the generatrices of the cylindrical lens array of the second part 4 and the third part 5 are parallel, and the first The generatrices of the cylindrical lens array of the third part 5 and the fourth part 6 are vertical, and the generatrices of the cylindrical lens array of the fourth part 6 and the fifth part 7 are parallel; the sixth part 8 is a cylindrical lens combination, which includes two generatrixes perpendicular to each other The cylindrical lens, the generatrices of the first cylindrical lens 9 are parallel to the generatrices of the second part 4 column lens arrays, the generatrices of the second cylindrical lens 10 are parallel to the generatrices of the fourth part 6 column lens arrays; the seventh part 11 is a cylindrical lens Or a cylindrical lens combination, the generatrix of which is parallel to the generatrix of the second part of the 4-rod lens array.

The first part 1 plays the role of preliminary shaping of the incident laser in the system, that is, transforming and shaping the laser incident into the first part 1 into a laser spot that fills the laser incident range of the second part 4 as much as possible, and reduces the divergence as much as possible angle. The composition of the first part 1 can be designed and implemented by ray tracing software such as: SOD88, ZEMAX, CODE V, OSLO, etc. This process and technology have been well known in the industry, and its typical structure is composed of multiple circular lenses or cylinders. A telescope system composed of lenses, etc.

In the present invention, the laser spot of the incident laser can be in any shape, such as: square, rectangular, circular, oval, etc., and the laser spot of the incident laser can be in any energy distribution, such as: Gaussian distribution, near-Gaussian distribution or other non-uniform Distribution, etc.; the first part 1 plays a role in the pre-processing of the incident laser, which transforms and shapes the incident laser into a laser spot that fills the laser incident range of the second part 4 (the incident range of the second part of the laser is square or rectangular) as much as possible, And reduce the divergence angle as much as possible, for example: the first part 1 transforms and shapes the incident laser light whose laser spot shape is square or rectangular into an outgoing laser whose laser spot coincides with the incident range of the laser spot in the second part 4, and the first part 1 transforms the laser spot shape into The circular or elliptical incident laser is transformed and shaped into an outgoing laser whose edge of the laser spot shape is tangent to the edge of the laser incident range of the second part 4 .

The second part 4 is a cylindrical lens array composed of N identical cylindrical lenses, and the distance between the second part 4 and the first part 1 is given when the first part 1 is designed and implemented. The second part 4 divides the incident laser light into N parallel laser beams, as shown in FIGS. 5 and 6 .

The third part 5 is a cylindrical lens array composed of N identical cylindrical lenses, the generatrices of the cylindrical lens array of the third part 5 and the second part 4 are parallel, and each cylindrical lens in the N identical cylindrical lenses corresponds to the second One of the N identical cylindrical lenses in the part 4; each pair of cylindrical lenses corresponding to the second part 4 and the third part 5 respectively form an optical system, and the rear focal point 12 of the second part 4 cylindrical lenses is located in the second part 4 Near the center of the distance from the third part 5 , the front focal point 13 of the cylindrical lens of the third part is located near 1/4 of the distance between the second part 4 and the third part 5 , as shown in FIG. 2 . By adjusting the distance between the third part 5 and the second part 4, the width of the laser spot on the uniform beam surface in the direction perpendicular to the generatrix of the second part 4-column lens array can be adjusted. When designing and implementing, this width is adjusted as narrow state.

The fourth part 6 is a cylindrical lens array composed of N identical cylindrical lenses, the generatrices of the cylindrical lens array of the fourth part 6 and the third part 5 are perpendicular, and the distance between the fourth part 6 and the third part 5 is within the design and Given at implementation time. The fourth part 6 divides each of the incident N laser beams into N parallel laser beams, as shown in FIG. 7 .

The fifth part 7 is a cylindrical lens array composed of N identical cylindrical lenses, the generatrices of the cylindrical lens arrays of the fifth part 7 and the fourth part 6 are parallel, and each cylindrical lens in the N identical cylindrical lenses corresponds to the fourth One of the N identical cylindrical lenses in the part 6; each pair of cylindrical lenses corresponding to the fourth part 6 and the fifth part 7 form an optical system respectively, and the rear focal point 14 of the 6 cylindrical lenses in the fourth part is located in the fourth part 6 Near the center of the distance 7 from the fifth part, the front focal point 15 of the 7-cylindrical lens of the fifth part is located near 1/4 of the distance between the fourth part 6 and the fifth part 7, as shown in FIG. 3 . By adjusting the distance between the fifth part 7 and the fourth part 6, the width of the laser spot on the uniform beam surface in the direction perpendicular to the generatrix of the 6-column lens array of the fourth part can be adjusted. When designing and implementing, this width is adjusted as wider state.

The second part 4 and the third part 5 are orthogonal to the fourth part 6 and the fifth part 4 and do not affect each other, so there are three kinds of the second part 4, the third part 5, the fourth part 6 and the first part A combined form of five parts 4. The first combination is: the second part 4, the fourth part 6, the fifth part 7 and the third part 5, and the second combination is the second part 4, the fourth part 6, the third part 5 and the fifth Part 7, the third combination form is the second part 4, the third part 5, the fourth part 6, and the fifth part 7; and each combination form can play the same role.

The sixth part 8 is a combination of cylindrical lenses, which includes two cylindrical lenses whose generatrices are perpendicular to each other, the generatrix of the first cylindrical lens 9 is parallel to the generatrix of the second part 4 cylindrical lens arrays, and the generatrix of the second cylindrical lens 10 is parallel to the generatrix of the first cylindrical lens. The generatrices of the four-part 6-column lens array are parallel, and a certain distance is maintained between the uniform beam surface 16 corresponding to the first cylindrical lens 9 and the beam uniform surface 17 corresponding to the second cylindrical lens 10, as shown in Figure 4; the sixth part The first cylindrical lens 9 superimposes the light beams separated by the second part 4, as shown in Figure 8, and the second cylindrical lens 10 of the sixth part superimposes the light beams separated by the fourth part 6, as shown in Figure 9 Shown; The distance between the sixth part 8 and the second part 4, the third part 5, the fourth part 6, and the fifth part 7 is given during design and realization.

The seventh part 11 is a cylindrical lens or a combination of cylindrical lenses, the generatrix of which is parallel to the generatrix of the 4-rod lens array of the second part, and the seventh part 11 is located near the uniform beam surface 16 corresponding to the first cylindrical lens 9 of the sixth part, The focal length of the seventh part 11 is equal to the distance between the uniform beam surface 16 corresponding to the first cylindrical lens 9 of the sixth part and the beam uniform surface 17 corresponding to the second cylindrical lens 10, as shown in FIG. 4 ; the seventh part 11 Transfer the uniform beam surface 16 corresponding to the first cylindrical lens 9 of the sixth part to the beam uniform surface 17 corresponding to the second cylindrical lens 10 of the sixth part, and simultaneously control the laser spot on the beam uniform surface 17 in the second part The width in the vertical direction of the bus bar of the 4-column lens array is compressed to finally form a linear laser spot with uniform energy distribution of the laser spot, as shown in Figure 10.

The incident laser light enters the first part 1, and the first part 1 transforms and shapes the incident laser light into a laser spot that fills the laser incident range of the second part 4 as much as possible and has a divergence angle as small as possible; Part 4, the second part 4 divides the incident laser light into N beams of parallel laser beams; the incident laser light passes through the first part 1 and the second part 4, and then exits to the third part 5, each of the N cylindrical lenses in the third part 5 Corresponding to one of the N parallel laser beams, the distance between the second part 4 and the third part 5 can be controlled to adjust the width of the laser spot on the uniform beam surface 16 in the direction perpendicular to the generatrix of the second part 4-column lens array, And make it into a narrow state; the incident laser light is emitted to the fourth part 6 after passing through the first part 1, the second part 4 and the third part 5, and the fourth part 6 divides each of the incident N beams of laser light into N beams of parallel laser beams; the incident laser light passes through the first part 1, the second part 4, the third part 5 and the fourth part 6, and then exits to the fifth part 7, and each of the N cylindrical lenses in the fifth part 7 corresponds to the fourth N beams of parallel laser beams divided by part 6 can control the distance between the fourth part 6 and the fifth part 7, and can adjust the width of the laser spot on the uniform beam surface 17 in the direction perpendicular to the generatrix of the fourth part 6-column lens array, And make it wider; after the incident laser passes through the first part 1, the second part 4, the third part 5, the fourth part 6 and the fifth part 7, it exits to the sixth part 8, and the first column of the sixth part The lens 9 superimposes the incident laser beam in the direction perpendicular to the generatrix of the first cylindrical lens 9 in the sixth part, and forms a uniform beam surface 16, and the second cylindrical lens 10 in the sixth part superimposes the incident laser beam in the sixth part Part of the second cylindrical lens 10 is superimposed in the vertical direction of the generatrix, and forms a uniform beam surface 17; the incident laser light passes through the first part 1, the second part 4, the third part 5, the fourth part 6, the fifth part 7 and the sixth part After the part 8, it is emitted to the seventh part 11, and the seventh part 11 converts the width of the laser spot on the uniform beam surface 16 corresponding to the first cylindrical lens 9 of the sixth part in the direction perpendicular to the generatrix of the second part 4-cylindrical lens array Compression is performed, and a linear laser spot with uniform energy distribution of the laser spot is formed on the uniform beam surface 17 corresponding to the second cylindrical lens 10 in the sixth part.

In the present invention, the first part 1 performs pre-processing on the incident laser light, so that the incident laser light is suitable for the subsequent processing of the second part 4, the third part 5, the fourth part 6, the fifth part 7, the sixth part 8 and the seventh part 11 ; The second part 4 divides the laser beam for the first time; each cylindrical lens in the third part 5 corresponds to each cylindrical lens in the second part 4 respectively; the fourth part 6 divides the laser beam for the second time Segmentation; each cylindrical lens in the fifth part 7 corresponds to each cylindrical lens in the fourth part 6 respectively; the laser beam divided by the second part 4 and the fourth part 6 passes through the sixth part 8 at Superposition is performed on the uniform beam surface, and the corresponding laser spots on the two uniform beam surfaces 16-17 are respectively controlled by controlling the distance between the second part 4 and the third part 5, and the distance between the fourth part 6 and the fifth part 7 Width; the seventh part 11 is located near the uniform beam surface 16 corresponding to the first cylindrical lens 9 of the sixth part, and the beam uniform surface 16 corresponding to the first cylindrical lens 9 of the sixth part is transferred to the sixth part through the seventh part 11 On the uniform beam surface 17 corresponding to the second cylindrical lens 10, the two beam uniform surfaces 16-17 are overlapped, and at the same time, the spot width on the beam uniform surface is further compressed to form a line with uniform energy distribution of the laser spot on the beam uniform surface 17 type laser spot.

Aiming at the laser surface treatment technology and its application field, the present invention designs and implements a laser beam transformation shaper suitable for high-precision laser polishing, high-precision laser cleaning, and high-efficiency laser-induced material surface modification. The laser beam transformation shaper can not only be applicable to the case where the incident laser is a Gaussian beam or a near-Gaussian beam, but also can be applied to a case where the incident laser is a non-uniform beam (non-Gaussian beam, non-near-Gaussian beam) with certain spot energy distribution and divergence characteristics. light beam). The laser beam transformation shaper can transform and shape the incident laser light into a linear laser spot with uniform energy distribution of the laser spot. With the rapid movement of the worktable, it can greatly improve the efficiency of laser polishing, laser cleaning and laser-induced material surface modification.

Description of drawings

Fig. 1 three-dimensional diagram of the optical system of the present invention (taking N=9 as an example)

Fig. 2 schematic diagram of focus relationship between the second part and the third part of the present invention

Fig. 3 schematic diagram of focus relationship between the fourth part and the fifth part of the present invention

Fig. 4 the relationship between the sixth part of the present invention and the uniform beam surface

Fig. 5 laser spot pattern incident on the second part of the present invention

Fig. 6 the laser spot diagram of the second part of the present invention (taking N=9 as an example)

Fig. 7 the fourth part of the present invention segmented laser spot diagram (taking N=9 as an example)

Fig. 8 The laser spot diagram superimposed by the first cylindrical lens in the sixth part of the present invention (taking N=9 as an example)

Fig. 9 is the superimposed laser spot diagram of the second cylindrical lens in the sixth part of the present invention (taking N=9 as an example)

Fig. 10 is a linear laser spot diagram with uniform energy distribution of the laser spot finally formed by the present invention

In the figure: 1, the first part; 2, the first cylindrical lens of the first part in the embodiment; 3, the second cylindrical lens of the first part in the embodiment; 4, the second part; 5, the third part; 6, the fourth 7. The fifth part; 8. The sixth part; 9. The first cylindrical lens in the sixth part; 10. The second cylindrical lens in the sixth part; 11. The seventh part; 12. The back focus of the second part Position; 13. The position of the front focus of the third part; 14. The position of the rear focus of the fourth part; 15. The position of the front focus of the fifth part; , The uniform beam surface corresponding to the second cylindrical lens in the sixth part.

Detailed ways

The present invention will be further described below in conjunction with accompanying drawing:

In this embodiment, the spot shape of the incident laser is rectangular (18mm × 35mm), the spot energy distribution is non-uniform distribution (18mm direction is Gaussian distribution, 35mm direction is nearly Gaussian distribution), and the central wavelength is 248nm excimer laser. Suitable for high precision laser polishing and laser cleaning. This embodiment consists of a first part 1 , a second part 4 , a third part 5 , a fourth part 6 , a fifth part 7 , a sixth part 8 and a seventh part 11 . The first part is a telescope system, which is made up of two cylindrical lenses; the second part 4, the third part 5, the fourth part 6 and the fifth part 7 are all cylindrical lens arrays, wherein the second part 4 and the third part 5 The generatrixes of the cylindrical lens array are parallel, the generatrixes of the third part 5 and the fourth part 6 are vertical, and the generatrixes of the fourth part 6 and the fifth part 7 are parallel; the sixth part 8 is a combination of cylindrical lenses, which contains two Cylindrical lenses whose busbars are perpendicular to each other, the busbars of the first cylindrical lens 9 are parallel to the busbars of the second part 4-column lens array, the busbars of the second cylindrical lens 10 are parallel to the busbars of the fourth part 6-column lens array; the seventh part 11 is a A cylindrical lens whose generatrix is parallel to the generatrix of the second part of the 4-rod lens array.

The incident laser light enters the first part 1 and is transformed and shaped by the first part 1 into a laser spot that fills the laser incident range of the second part 4 and has a reduced divergence angle. Among them, the shape of the laser spot of the incident laser is rectangular (18mm×35mm), and the energy distribution of the laser spot is non-uniform (Gaussian distribution in the direction of 18mm, and near-Gaussian distribution in the direction of 35mm); the first part 1 is the telescope system, which consists of two columns The lens is composed, and the composition form is designed and realized by ray tracing software (such as: SOD88, ZEMAX, CODE V, OSLO, etc.), this process and technology have been known in the industry, and the first part 1 plays a role in the incident laser in this embodiment. The role of pre-processing; the laser incident range of the second part 4 is square (35mm×35mm); the divergence angle of the incident laser light of the second part 4 is reduced by half in the direction of 18mm relative to the incident laser.

The specific parameters of the first part 1 are: the shape of the first cylindrical lens 2 is rectangular (18mm×35mm), the focal length is -80mm, and the placement method is shown in Figure 1; the shape of the second cylindrical lens 3 is square (35mm×35mm) , the focal length is 156mm, and the placement method is shown in Figure 1; the distance between the first cylindrical lens 2 and the second cylindrical lens 3 is 80mm; the distance between the second cylindrical lens 3 and the second part 4 is 45mm.

The incident laser light is emitted to the second part 4 after passing through the first part 1 . The second part 4 is a cylindrical lens array composed of 7 identical cylindrical lenses. The second part 4 divides the incident laser light into 7 parallel laser beams.

The incident laser light is emitted to the third part 5 after passing through the first part 1 and the second part 4 . The third part 5 is a cylindrical lens array composed of 7 identical cylindrical lenses, the generatrices of the third part 5 and the second part 4 are parallel to the cylindrical lens array, and each cylindrical lens in the third part 5 corresponds to 7 parallel laser beams , and corresponds to one of the 7 identical cylindrical lenses in the second part 4.

The specific parameters of the second part 4 are: the shape of each cylindrical lens is rectangular (35mm×5mm), the cylindrical lens array is square (35mm×35mm), and the focal length is 70mm. The placement method is shown in Figure 1. The specific parameters of the third part 5 are: the shape of each cylindrical lens is rectangular (35mm×5mm), the cylindrical lens array is square (35mm×35mm), and the focal length is 105mm. The placement method is shown in Figure 1. The distance between the second part 4 and the third part 5 is 140 mm. By adjusting the distance between the third part 5 and the second part 4, the width of the laser spot on the uniform beam surface 16 in the direction perpendicular to the generatrix of the second part 4-column lens array can be adjusted. When designing and implementing, this width can be adjusted It is 123mm. The distance between the third part 5 and the fourth part 6 is 10 mm.

The incident laser light is emitted to the fourth part 6 after passing through the first part 1 , the second part 4 and the third part 5 . The fourth part 6 is a cylindrical lens array composed of seven identical cylindrical lenses, and the generatrices of the fourth part 6 and the third part 5 are perpendicular to the cylindrical lens array. The fourth part 6 divides each of the 7 incident laser beams into 7 parallel laser beams.

The incident laser light passes through the first part 1 , the second part 4 , the third part 5 and the fourth part 6 , and then exits to the fifth part 7 . The fifth part 7 is a cylindrical lens array composed of 7 identical cylindrical lenses, the generatrices of the fifth part 7 and the fourth part 6 are parallel to the cylindrical lens array, and each cylindrical lens in the fifth part 7 corresponds to the 7 in the fourth part 6 One of the same cylindrical lenses.

The specific parameters of the fourth part 6 are: the shape of each cylindrical lens is rectangular (5mm×35mm), the cylindrical lens array is square (35mm×35mm), and the focal length is 18mm. The placement method is shown in Figure 1. The specific parameters of the fifth part 7 are: the shape of each cylindrical lens is rectangular (5mm×35mm), the cylindrical lens array is square (35mm×35mm), and the focal length is 21mm. The placement method is shown in Figure 1. The distance between the fourth part 6 and the fifth part 7 is 36 mm. By adjusting the distance between the fifth part 7 and the fourth part 6, the width of the laser spot on the uniform beam surface 17 in the direction perpendicular to the generatrix of the 6-column lens array of the fourth part can be adjusted. When designing and implementing, this width can be adjusted 20mm. The distance between the fifth part 7 and the first cylindrical lens 9 of the sixth part 8 is 15 mm.

The incident laser light passes through the first part 1 , the second part 4 , the third part 5 , the fourth part 6 and the fifth part 7 , and then exits to the sixth part 8 . The sixth part 8 is a cylindrical lens combination, which includes two cylindrical lenses whose generatrices are perpendicular to each other, the generatrix of the first cylindrical lens 9 is parallel to the generatrix of the second part 4 rod lens arrays, and the generatrix of the second cylindrical lens 10 is parallel to the generatrix of the fourth part 6 The generatrices of the cylindrical lens array are parallel. The sixth part of the first cylindrical lens 9 superimposes the incident laser beam on the direction perpendicular to the generatrix of the sixth part of the first cylindrical lens 9, so that the incident laser beam is on the line with the sixth part of the first cylindrical lens 9 generatrix The uniform beam is carried out in the vertical direction to form the uniform beam surface 16; the sixth part of the second cylindrical lens 10 superimposes the incident laser beam in the direction perpendicular to the generatrix of the sixth part of the second cylindrical lens 10, so that the incident laser beam The light beam is uniformly bundled in a direction perpendicular to the generatrix of the sixth part of the second cylindrical lens 10 to form a beam uniformity surface 17 .

The specific parameters of the sixth part 8 are: the shape of the first cylindrical lens 9 is square (35mm×35mm), the focal length is 190mm, and the placement method is shown in Figure 1; the shape of the second cylindrical lens 10 is square (35mm×35mm) , the focal length is 195 mm, and the placement method is shown in Figure 1; the distance between the first cylindrical lens 9 and the second cylindrical lens 10 is 10 mm; the uniform beam surface 16 corresponding to the first cylindrical lens 9 is located in the second cylindrical lens 180 mm behind the second cylindrical lens 10 , the beam uniform surface 17 corresponding to the second cylindrical lens 10 is located 195 mm behind the second cylindrical lens 10 . The distance between the second cylindrical lens 10 of the sixth part and the seventh part 11 is 180 mm.

The incident laser light passes through the first part 1 , the second part 4 , the third part 5 , the fourth part 6 , the fifth part 7 and the sixth part 8 , and then exits to the seventh part 11 . The seventh part 11 is a piece of cylindrical lens whose generatrix is parallel to the generatrix of the 4-rod lens array in the second part. The seventh part 11 transfers the uniform beam surface 16 corresponding to the first cylindrical lens 9 of the sixth part to the beam uniform surface 17 corresponding to the second cylindrical lens 10 of the sixth part, and simultaneously controls the laser spot on the uniform beam surface 17 Compress the width in the direction perpendicular to the generatrix of the 4-column lens array in the second part to form a linear laser spot with uniform energy distribution of a laser spot on the uniform beam surface, and the length of the laser spot is 18mm.

The specific parameters of the seventh part 11 are: the shape of the cylindrical lens is rectangular (18mm×10mm), the focal length is 15mm, and it is located near the uniform beam surface 16 corresponding to the first cylindrical lens 9 in the sixth part. The specific placement method is shown in Figure 1 .

Claims (2)

1. a laser beam transformation reshaper that is output as the uniform line hot spot is characterized in that: be comprised of first (1), second portion (4), third part (5), the 4th part (6), the 5th part (7), the 6th part (8) and the 7th part (11); Described first (1) is telescopic system, is comprised of a plurality of circle lens or post lens; Described second portion (4), third part (5), the 4th part (6) and the 5th part (7) be the cylindrical lens array for being comprised of N same column lens all, the span of N is more than or equal to (2), wherein: second portion (4) is parallel with the cylindrical lens array bus of third part (5), third part (5) is vertical with the cylindrical lens array bus of the 4th part (6), and the 4th part (6) is parallel with the cylindrical lens array bus of the 5th part (7); Described the 6th part (8) is the post lens combination, wherein comprise two orthogonal post lens of bus, first post lens (9) bus is parallel with second portion (4) cylindrical lens array bus, and second post lens bus (10) is parallel with the 4th part (6) cylindrical lens array bus; Described the 7th part (11) is post lens or post lens combination, and its bus is parallel with second portion (4) cylindrical lens array bus;

The effect of incident laser being carried out preliminary shaping is played by described first (1) in system, the laser beam transformation that is about to incident first (1) is shaped as the laser facula that is full of as far as possible second portion (4) laser incident scope, and the reduce dispersion angle;

Described second portion (4) is the cylindrical lens array that is comprised of N same column lens, and second portion (4) is divided into N bundle parallel laser light beam with the laser of incident;

Described third part (5) is the cylindrical lens array that is comprised of N same column lens, third part (5) is parallel with the cylindrical lens array bus of second portion (4), in the corresponding second portions of each post lens (4) in N same column lens in N same column lens one; Each corresponding in second portion (4) and the third part (5) coupled columns lens form an optical system separately, the back focus (12) of second portion (4) post lens is positioned near the center of distance between second portion (4) and third part (5), the front focus (13) of third part (5) post lens to the distance of second portion (4) be between second portion (4) and the third part (5) distance about 1/4; By regulate third part (5) with respect to the distance of second portion (4) can regulate the 6th part the first post lens (9) correspondence all restraint the upper laser facula of face (16) with second portion (4) cylindrical lens array bus vertical direction on width;

Described the 4th part (6) is the cylindrical lens array that is comprised of N same column lens, the 4th part (6) is vertical with the cylindrical lens array bus of third part (5), and the 4th part (6) is with the every a branch of N bundle parallel laser light beam that is divided in the N bundle laser of incident;

Described the 5th part (7) is the cylindrical lens array that is comprised of N same column lens, the 5th part (7) is parallel with the cylindrical lens array bus of the 4th part (6), in corresponding the 4th parts of each post lens (6) in N same column lens in N same column lens one; Each corresponding in the 4th part (6) and the 5th part (7) coupled columns lens form an optical system separately, the back focus (14) of the 4th part (6) post lens is positioned near the center of (7) distance between the 4th part (6) and the 5th part, the front focus (15) of the 5th part (7) post lens to the distance of the 4th part (6) be between the 4th part (6) and the 5th part (7) distance about 1/4; By regulating the 5th part (7) with respect to the distance of the 4th part (6), can regulate the upper width of laser facula on the 4th part (6) cylindrical lens array bus vertical direction of all bundles face (17) corresponding to second post lens of the 6th part (10);

Described the 6th part (8) is the post lens combination, wherein comprise two orthogonal post lens of bus, first post lens (9) bus is parallel with second portion (4) cylindrical lens array bus, second post lens (10) bus is parallel with the 4th part (6) cylindrical lens array bus, and, keep certain distance between all bundles face (16) that first post lens (9) are corresponding all bundles face (17) corresponding with second post lens (10); The 6th part first post lens (9) superpose to the separated light beam of second portion (4), and second post lens of the 6th part (10) superpose to the separated light beam of the 4th part (6);

Described the 7th part (11) is post lens or post lens combination, its bus is parallel with second portion (4) cylindrical lens array bus, the 7th part (11) is positioned near all bundles face (16) corresponding to the 6th part first post lens (9), and the focal length of the 7th part (11) all bundle face (16) corresponding with the 6th part first post lens (9) equates with distance between all bundles face (17) corresponding to second post lens (10); The 7th part (11) all bundles face (16) that the 6th part first post lens (9) are corresponding is transferred on all bundles face (17) corresponding to second post lens of the 6th part (10), simultaneously the width of laser facula on the 4th part (6) cylindrical lens array bus vertical direction on all bundles face (17) corresponding to the 6th part the second post lens (10) compressed, finally form a uniform Linear Laser hot spot of laser facula energy distribution;

Incident laser incides first (1), and first (1) is shaped as the laser beam transformation of incident and is full of as far as possible second portion (4) laser incident scope and the as far as possible little laser facula of dispersion angle; Incident laser shines second portion (4) after first (1), second portion (4) is divided into N bundle parallel laser light beam with the laser of incident; Incident laser is behind first (1) and second portion (4), shine third part (5), a branch of in the corresponding N bundle of in third part 5N post lens each parallel laser light beam, distance between control second portion (4) and third part (5), can regulate the upper laser facula of all bundles face (16) corresponding to the 6th part first post lens (9) with second portion (4) cylindrical lens array bus vertical direction on width, and be narrower state; Incident laser shines the 4th part (6) after first (1), second portion (4) and third part (5), the 4th part (6) is with the every a branch of N bundle parallel laser light beam that is divided in the N bundle laser of incident; Incident laser is through first (1), second portion (4), after third part (5) and the 4th part (6), shine the 5th part (7), N bundle parallel laser light beam after corresponding the 4th part of in the 5th part 7N post lens each (6) is cut apart, control the distance between the 4th part (6) and the 5th part (7), can regulate the width on the upper laser facula of all bundles face (17) corresponding to second post lens of the 6th part (10) and the 4th part (6) the cylindrical lens array bus vertical direction, and be the wider shape attitude; Incident laser is through first (1), second portion (4), third part (5), after the 4th part (6) and the 5th part (7), shine the 6th part (8), the 6th part first post lens (9) are superposeing the laser beam of incident with the 6th part first post lens (9) bus vertical direction, and face (16) is all restrainted in formation, second post lens of the 6th part (10) are superposeing the laser beam of incident with second post lens of the 6th part (10) bus vertical direction, and form the face (17) of all restrainting; Incident laser is through first (1), second portion (4), third part (5), the 4th part (6), after the 5th part (7) and the 6th part (8), shine the 7th part (11), laser facula on the 7th part (11) all bundles face (16) that the 6th part first post lens (9) are corresponding with second portion (4) cylindrical lens array bus vertical direction on width compress, and at uniform Linear Laser hot spot of laser facula energy distribution of all bundles face (17) formation corresponding to second post lens of the 6th part (10).

2. a kind of laser beam transformation reshaper that is output as the uniform line hot spot according to claim 1, it is characterized in that: the laser facula of incident laser is shaped as square, rectangle, circle or oval; The laser facula energy distribution is Gaussian distribution or nearly Gaussian distribution.

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