CN101814407B - Assembling device and method for display panel and a treatment device thereof and a baseplate delivery mechanism - Google Patents

Abstract

According to the present invention, in the display panel module assembly device, each processing operation device can be connected with the necessary minimum width, and the overall device length of the display panel module assembly device can be shortened. Furthermore, there is provided a display panel module assembly apparatus capable of processing substrates of a wide size ranging from small to large substrates with high precision and high speed. By arranging a plurality of substrate holding members and substrate conveying members that are slender in a certain direction, especially in the substrate conveying direction, the substrate holding mechanism and substrate conveying mechanism are integrated to realize a substrate holding and conveying mechanism that conveys small to large substrates. In addition, by collectively transporting the display panel substrates at the respective processing positions at the same time sequence, the respective processing devices can be connected with the necessary minimum width. Furthermore, by moving the substrate transport mechanism after the transport operation to the transport upstream side within the substrate processing operation time, high-precision and high-speed substrate transport and processing operations are realized.

Description

Display panel assembly device and method, processing operation device, and substrate conveying device

technical field

The present invention relates to mounting a drive IC or COF (Chip on Film flexible board), FPC (Flexible Printed Circuits) on the periphery of a display panel (display unit substrate) of an FPD (=Flat Panel Display) such as a liquid crystal or plasma. circuit) and other so-called TAB (=Tape Automated Bonding) connection, and a display panel module assembly device for installing peripheral substrates (PCB=printed circuit board printed circuit board). More specifically, it is possible to more efficiently arrange each processing step in the display panel module assembling device or to more stably transfer and transport the display panel substrate conveying device of the display panel. the

Background technique

The display panel module assembly device performs multiple processing steps sequentially on the display panel substrate of the FPD such as plasma (or simply referred to as the substrate, and in the case of other substrates such as PCB, it is written as the PCB substrate), and installs it on the periphery of the substrate. Devices that drive ICs, TABs, and PCB substrates. the

For example, as an example of the processing process, it includes: (1) a terminal cleaning process of removing the TAB attached part at the edge of the substrate; (2) attaching an anisotropic conductive film (ACF=Anisotropic Conductive Film) ) ACF process, (3) positioning of substrate wiring at the position where ACF is attached, and mounting TAB or IC mounting process, (4) crimping process of fixing the mounted TAB with ACF film by thermocompression bonding, (5) Inspection process of inspecting the position or connection state of the mounted TAB or IC, (6) PCB process (multiple processes) of attaching and mounting a PCB substrate with ACF or the like on the opposite side of the TAB substrate side. Furthermore, depending on the number of sides of the substrate to be processed, the number of TABs or ICs to be processed, and the like, the number of processing positions, processing units for rotating the substrate, and the like are required. the

The display panel module assembly device continuously arranges the processing operation devices that perform these processing operations, and uses the substrate transfer mechanism to transfer the substrates between them to perform peripheral processing of the substrates. the

As a method of transporting substrates between each processing operation device, as described in Patent Documents 1 and 3, when the stage from the stage on which the substrate is placed before the operation to the stage and from the stage to the stage are disclosed, A transport method that uses a mechanism that lifts the substrate from below and carries it in and out. In addition, Patent Document 2 further improves the substrate transfer method, and discloses that a substrate holding and transfer stage including a comb-shaped arm is arranged on each processing device, thereby transferring the substrate between each processing device and sequentially transferring the substrate. The way. the

Furthermore, in order to shorten the overall length of the apparatus, Patent Document 3 discloses a conveying mechanism including a pair of belt conveyors and a conveyance method in which the arrangement interval between each processing operation apparatus (work placement table) can be shortened. The panels arranged in between support the substrate conveying structure of the workbench. the

Also, a display panel transport device using the transport mechanism described in Patent Document 1 and Patent Document 4 discloses a device that holds the display panel by suction force and transports the display panel while switching suction to a target position. the

As each processing operation device, Patent Document 1 discloses a configuration of a work table for performing each processing work and a mechanism for loading and unloading a display panel substrate to and from the work table. In this structure, the workbench carrying the display panel substrate holds the display panel substrate, and can adjust the width, length, and horizontal rotation direction of the substrate. The processing position of the display panel substrate is positioned on the workbench, and each process is performed. Operation. the

In addition, Patent Document 2 discloses a configuration in which a comb-toothed arm capable of moving a display panel substrate in three-axis and horizontal rotation directions is disposed on each processing device. In this configuration, the operation of transferring the display panel substrate and the positioning operation of the processing position of the display panel substrate are performed by the comb-toothed arm provided with each processing operation device. the

Furthermore, Patent Document 3 discloses that a display panel support table is disposed between a pair of conveyor mechanisms such as belt conveyors, and that a positioning operation of a processing position of a display panel substrate is performed using the display panel support table. Methods. the

[Patent Document 1] Japanese Patent Application Laid-Open No. 8-26475

[Patent Document 2] Japanese Patent Laid-Open No. 2007-99466

[Patent Document 3] Japanese Patent Laid-Open No. 2003-76290

[Patent Document 4] Japanese Patent Application Laid-Open No. 2008-134439

First, consider the problem of the method of transferring substrates between each processing work equipment. In the display panel module assembly apparatus using the conventional conveying mechanism of the above-mentioned Patent Document 1, the conveying mechanism for the substrate is arranged along the arrangement line of the processing work equipment. Therefore, the distance between the processing work devices becomes wider, and the device length in the direction in which the processing work devices are arranged, that is, the overall length of the display panel module assembly device becomes very long. the

Also in Patent Document 2, a place for transferring substrates between processing work devices is required, and therefore, the overall length of the display panel module assembly device becomes long. Furthermore, after transferring the substrate to the downstream processing device, the substrate transport mechanism of the processing device needs to go to the upstream processing device to receive the next processed substrate. Since each processing operation device is on standby until the next processing substrate is carried in, there is a problem that the work efficiency of each processing operation device is reduced. the

Patent Document 3 is a structure in which unprocessed substrates are carried in and processed substrates are sent out to each processing device at the same time by using the conveyor-like conveyance mechanism of each processing device, and there is no need to install a substrate between each processing device. In the standby position of the substrate or the arm, each processing operation device can be placed close to each other, and the overall length of the display panel module assembly device can be shortened. the

However, several problems remain in the manner disclosed in Patent Document 3 as well. the

The minimum width required for each processing work device roughly depends on the side length of the substrate to be processed. The minimum width of the processing equipment required to process the long side and the short side of the substrate is different, and the diagonal length of the substrate needs to be the smallest in the processing unit that rotates the substrate. Furthermore, there is a difference in the minimum width of the processing work device that is required to process the same side. For example, in the main crimping process that requires high pressure and temperature, it is necessary to secure the strength of the processing unit frame, and therefore the required width of the processing operation device tends to be larger than others. In addition, the required minimum width is also slightly different for each processing work device. the

However, in the configuration proposed in Patent Document 3, substrates are carried out and carried in from each processing station simultaneously by driving the same belt conveyor. However, since the same belt conveyor is used for carrying out and carrying in, it is necessary to have the same substrate conveyance speed or distance between processing work devices. Therefore, it is necessary that the distances between the respective processing work devices are also the same. In order to do this, each processing work device needs to match the maximum width of the connected processing work device. Therefore, also in the substrate conveyance method of Patent Document 3, each processing operation device configured with the minimum required width cannot be arranged in the closest state. the

In this method, if there is a difference in the conveying speed of the belts of each processing unit, it is also possible to make a difference in the movement amount of the conveyed substrate in principle, but there is a difference in speed during transfer between the belts. Since the tape is in contact with the substrate surface, there is a high possibility of imparting damage to the substrate surface, and there is a problem that it is difficult to ensure the conveying accuracy, so it cannot be used in practice. the

In addition, in the system disclosed in Patent Document 3 in which substrates are transferred between the belt conveyors installed in each processing device, even if the belt conveying speeds of each processing device are controlled to be the same, it is not possible to completely eliminate the problem of the transfer section. There is a risk of reduced conveying accuracy (transfer accuracy) or damage to the substrate surface. Therefore, in order to avoid this, naturally, there is a limit to the substrate transfer speed that can be transferred and transferred, and it is difficult to perform high-speed substrate transfer. the

Furthermore, in the method of Patent Document 3, the substrate is conveyed by a pair of belt conveyors, and therefore, the substrate to be conveyed needs to be a substrate of a size placed on a pair (both) of the conveyors. Therefore, there is also a problem that it is difficult to cope with small substrates. the

In addition, the display panel substrate conveyance device using the conveyance mechanism described in Patent Document 1 and Patent Document 4 is a device that holds the display panel by suction force, and conveys while switching suction to a target position. Therefore, if the conveyance becomes high-speed due to the shortening of each processing operation time, when there is a need to switch between the fixed part of the transfer display panel and the suction of the receiving part at high speed, it is necessary to improve the reliability of high-speed conveyance and transfer. question. In addition, in the suction conveyance of the display panel substrate, suction errors during transfer may occur. the

Next, consider the problem of the structure of each processing work device. In the configurations of the conventional processing operation devices disclosed in the above-mentioned Patent Documents 1 to 3, each processing operation is performed after holding the transported substrate and performing a positioning operation. the

As described above, the display panel module assembling apparatus connects a plurality of processing devices, and continuously performs various processing operations on the display panel. In the configurations of the processing work devices disclosed in the above-mentioned Patent Documents 1 to 3, there is a difference in processing work time due to the content of the processing work. Therefore, the processing operation device of the short-time process needs to wait for the end of the processing operation device of the time-consuming process, the conveyance interval of the substrate is limited by the processing operation device of the time-consuming process, and in the processing operation device of the short-time process The time at which the job stop occurred. the

In order to operate each processing operation device more efficiently, it is considered to increase the number of processing operation devices for time-consuming processes and connect them to processing operation devices for short-time processes to obtain a takt balance of each processing process. However, in this form, there is a problem that the number of connected processing devices increases, and the overall length of the display panel module assembly device becomes very long. the

Contents of the invention

A first object of the present invention is to provide a display panel module assembling device or an assembling method or a display panel substrate conveying device that can be configured to be compact and particularly shorten the overall length of the device by improving the substrate conveying mechanism. the

In addition, the second object of the present invention is to provide a display panel capable of transferring substrates of various sizes between successive processing devices or processing units at high speed and/or high accuracy by using the same transfer mechanism or transfer method. A module assembling device or assembling method or a display panel substrate conveying device. the

Furthermore, a third object of the present invention is to provide a display panel module assembling device or a display panel substrate conveying device capable of continuously connecting and arranging each processing device at a minimum necessary interval. the

In addition, a fourth object of the present invention is to improve the reliability of high-speed conveyance and transfer in conveyance of display panel substrates. the

Furthermore, a fifth object of the present invention is to provide a display panel substrate transfer device, a display panel substrate transfer method, or a display panel module assembly device that avoids suction errors during transfer during suction transfer of the display panel substrate. the

In addition, a sixth object of the present invention is to provide a display panel assembly device that can be configured to shorten the overall length of the display panel module assembly device. the

Furthermore, a seventh object of the present invention is to improve the work efficiency of each processing operation in a display panel module assembly device or an assembly method including displaying various processing operations. the

Finally, an eighth object of the present invention is to provide a display panel substrate assembly processing device capable of achieving both of the above-mentioned sixth and seventh objects. the

In order to achieve the first, second, or third object above, the present invention is characterized in that it includes a substrate holding mechanism that arranges a plurality of substrate holding members that are elongated in a certain direction in parallel with the display panel substrate. A surface parallel to the conveying surface of the display panel substrate; a substrate conveying mechanism, which arranges a plurality of substrate conveying members elongated in the certain direction in parallel on a surface parallel to the conveying surface of the display panel substrate, and the substrate conveying member At least one of the substrate holding members is arranged between the substrate holding members, the substrate conveying mechanism holds the display panel substrate arranged on the substrate holding member, and moves linearly in the substrate conveying direction, thereby conveying the The display panel substrate. the

In addition, in order to achieve the above-mentioned first, second or third object, the second feature of the present invention is that the display panel substrate conveying device for conveying the display panel substrate has: a substrate holding mechanism, which has a working position on the processing working device. A substrate holding member holding a display panel substrate; a substrate conveying mechanism that conveys the display panel substrate to the other substrate holding member downstream of the display panel substrate processing step, the substrate conveying mechanism having: an operating mechanism capable of The conveying section moves linearly. the

Furthermore, in order to achieve the above-mentioned first, second, or third object, in addition to the first or second feature, the third feature of the present invention is that the substrate transport mechanism has the function of holding the substrate transport member relative to the substrate. The mechanism includes a mechanism for relatively raising and lowering the substrate holding member, and an operating mechanism capable of reciprocating the substrate conveying member within a predetermined range along the substrate conveying direction. the

In addition, in order to achieve the above-mentioned first, second or third object, in addition to the third feature, the fourth feature of the display panel module assembly device of the present invention is that a plurality of the substrate conveying mechanisms are arranged, and can be independently set. The reciprocating movement distance of each of the substrate conveying mechanisms is determined, and the plurality of substrate conveying mechanisms move the display panel substrate on the substrate holding mechanism in the substrate conveying direction at the same timing. the

In addition, in order to achieve the above-mentioned first, second or third object, in addition to the fourth feature, the fifth feature of the display panel module assembly device of the present invention is that the Transport distance variable mechanism for reciprocating travel distance. the

Furthermore, in order to achieve the above-mentioned first, second or third object, the display panel module assembling device of the present invention has, in addition to any one of the first to third features, a sixth feature: substrate posture detection A mechanism for detecting the posture of the display panel substrate; a substrate posture correction mechanism for correcting the posture of the display panel substrate based on the detection result of the substrate posture detection mechanism. the

In addition, in order to achieve the above-mentioned first, second or third object, in addition to the sixth feature, the seventh feature of the display panel module assembling apparatus of the present invention is that the posture of the display panel substrate is such that the position of each of the processing devices The posture at the working position of the work position, the substrate holding mechanism is arranged in plurality corresponding to each of the processing operation devices, and at least one of the substrate holding mechanisms has a substrate posture detection mechanism based on detecting the posture of the substrate at the working position and the substrate A substrate posture correction mechanism that corrects the substrate posture based on the detection result of the posture detection mechanism. the

In addition, in order to achieve the above-mentioned first, second, or third object, in addition to the first or second feature, the eighth feature of the display panel module assembly device of the present invention is that each of the processing devices includes: at least one processing unit for performing predetermined processing on the edge of the display panel substrate; a substrate posture detection mechanism for detecting the posture of the conveyed display panel substrate, based on the detection result of the substrate posture detection mechanism, correcting the relative The relative position of the processing unit of the substrate. the

Furthermore, in order to achieve the above-mentioned first, second or third object, in addition to the first to second features, the display panel module assembling apparatus of the present invention has a ninth feature in that it has a plurality of the display panel substrate transfer devices, and A mechanism for changing the posture or conveying direction of the display panel substrate is provided between the display panel substrate conveying devices. the

In addition, in order to achieve the above-mentioned first, second, or third object, the ninth feature of the display panel module assembly device or the substrate conveying device of the present invention is that the substrate holding mechanism has friction resistance on the opposite side of the processing operation device. Small low friction substrate holder. the

Furthermore, in order to achieve the above-mentioned first, second or third purpose, the eleventh feature of the display panel module assembly method of the present invention is that the mechanism for transporting the display panel substrate is finished after the operation at the operation position of the processing operation device receiving the display panel substrate from a substrate holding mechanism corresponding to the working position, linearly moving the display panel substrate to a working position downstream of the working position, and delivering the display panel substrate to a The downstream working position corresponds to the substrate holding mechanism, and moves linearly back to the original working position before the work at the downstream working position is completed. the

In addition, in order to achieve the above-mentioned first, second, or third object, the display panel substrate transfer device of the present invention is characterized in that it receives the substrate from the substrate holding mechanism and linearly moves the display panel substrate to the desired position. The other substrate holding mechanism on the downstream side of the substrate holding mechanism conveys the substrate, transfers the display panel substrate to the other substrate holding mechanism, and moves linearly back to the original substrate holding mechanism after transferring the substrate. . the

In addition, in order to achieve the above-mentioned fourth or fifth object, the thirteenth feature of the present invention is that the display panel substrate conveying device includes a suction system that produces at least three stages of suction in the following states: State, the first suction state, the first suction force that does not cause the display panel substrate to fall off or position shift under the acceleration and deceleration when the display panel substrate is transported acts on the display panel substrate; The second attraction without holding force acts on the display panel substrate; in the third attraction state, the third attraction between the first attraction and the second attraction acts on the display panel substrate. the

In addition, in order to achieve the above-mentioned fourth or fifth object, a fourteenth feature of the present invention is to include a plurality of the adsorption systems, and to connect the pressure losses of at least two of the adsorption systems. the

In order to achieve the sixth, seventh, or eighth object, the display panel module assembling device or assembly method or the processing device for display panel substrate assembly is configured so as to shorten the processing time of the processing device. the

Alternatively, the display panel module assembling apparatus, the assembling method, or the display panel substrate assembling processing operation apparatus are configured to shorten the line length of the display panel module assembling apparatus. the

Specifically, in order to achieve the sixth, seventh, or eighth above-mentioned purpose, the fifteenth feature is that in the display panel module assembly device or assembly method, in at least one of the above-mentioned processing operation devices, there is a At least two or more processing units that simultaneously perform processing operations on one side of a display panel substrate. the

In addition, in order to achieve the above-mentioned sixth, seventh, or eighth object, the sixteenth feature is that, in the display panel module assembly device or assembly method, there is a process of dividing the long processing time among the various processes. , and at least two or more processing units that process jobs simultaneously. the

Furthermore, in order to achieve the above-mentioned sixth, seventh, or eighth object, on the basis of the above-mentioned fifteenth and sixteenth features, the seventeenth feature is that the simultaneous means that the display panel substrate is It means that the job is completed during the period before the next job position is conveyed. the

In addition, in order to achieve the above-mentioned sixth, seventh, or eighth object, in addition to any one of the above-mentioned fifteenth to seventeenth features, the eighteenth feature is that the processing unit detects the display panel on which the processing operation is performed. The posture of the substrate is corrected based on the result, relative to the processing side of the display panel substrate and the processing unit. the

In addition, in order to achieve the sixth or seventh or eighth purpose above, in addition to any one of the fifteenth to seventeenth features above, the nineteenth feature is that the processing unit can move in a parallel direction. the

Furthermore, in order to achieve the sixth, seventh, or eighth object, in addition to any one of the fifteenth to seventeenth features above, the twentieth feature is that the processing operations in the plurality of processing units are performed simultaneously. , controlling the operation sequence of the processing actions in the plurality of processing units of the processing job and the transfer movement to the next working position. the

Finally, in order to achieve the above-mentioned eighth object, the twenty-first feature is that in the display panel substrate assembly processing device, there is at least one processing unit for performing operations on one side of a display panel substrate, and the processing unit has A mechanism capable of moving in a direction parallel to the direction of the processing side. the

Invention effect

According to the present invention described above, at the work position in each processing operation device, the substrate holding members elongated in the substrate conveyance direction are arranged in parallel in the direction straight in the substrate conveyance direction, and formed so as to be positioned above the substrate The substrate conveyance mechanism in which substrate conveyance members elongate in the substrate conveyance direction are arranged in parallel between the plurality of elongated substrate holders of the holding mechanism can hold and convey small to large substrates. the

In the substrate conveying operation, the substrate conveying member is relatively raised with respect to the substrate holding member, whereby the substrate is lifted and separated from the substrate holding part by a small amount, and after being slid and conveyed to a predetermined position at high speed, the substrate is conveyed This method in which the member is lowered relatively to the substrate holding member and the substrate is transferred to the substrate holding unit again can move the substrate with minimal movement, enabling high-speed and high-precision transfer between processing machines. the

In a series of continuous substrate conveying apparatuses, a plurality of the above-mentioned substrate conveying mechanisms are arranged so that the reciprocating distance of each substrate conveying mechanism is independent, so that in this embodiment, the distance between the respective processing positions can be freely set. the

Furthermore, the plurality of substrate conveying mechanisms simultaneously move the substrates on the substrate holding mechanism in the substrate conveying direction at the same timing, so that the respective substrates can be placed adjacent to each other with the distance between the processing devices. Move between processing devices. Thereby, it is possible to provide a display panel substrate conveying device capable of connecting and arranging the respective processing operation devices in series at the necessary minimum interval. the

In addition, the reciprocating movement distance in the substrate conveying direction of a plurality of substrate conveying mechanisms can be set independently for each substrate holding mechanism, thereby realizing optimal processing operations according to each processing operation device or processing substrate conditions, etc. distance between locations. the

Furthermore, by providing a substrate posture detection mechanism that detects the substrate posture at the work position and a substrate posture correction mechanism that corrects the substrate posture based on the detection result of the substrate posture detection mechanism in some of the substrate holding mechanisms, it is also possible to By correcting the change in the posture of the substrate that occurs when the substrate is continuously conveyed between multiple processing devices, it is possible to transfer the substrate at high speed and with high precision throughout the entire length of the display panel module assembly device composed of connecting multiple processing devices. Furthermore, at least one processing unit for performing predetermined processing on the edge of the conveyed substrate and a substrate posture detection mechanism for detecting the posture of the conveyed substrate are provided in each processing operation device, and the substrate posture detection mechanism can As a result of the detection, the relative position of the processing unit with respect to the substrate is corrected, so processing operations such as mounting of electronic components performed around each substrate can be performed with higher accuracy. the

In addition, according to the above-mentioned present invention, it can be realized that substrates of various sizes ranging from small to large substrates can be transferred and conveyed between successive processing units at high speed and with high precision by using the same transfer mechanism, and each processing unit can The display panel module assembling apparatus and method in which the working devices are continuously connected and arranged at the minimum interval required for processing the working devices can transport substrates such as display panels. the

Furthermore, according to the above-mentioned present invention, stress is not applied to the panel during transfer of the display panel, the panel can be prevented from falling off, and stable transfer operation can be performed even during high-speed transfer. the

In addition, according to the present invention described above, when an adsorption error occurs in at least one location and a pressure drop occurs, a sudden pressure drop does not occur in other adsorption systems, so that the panel does not suddenly fall off. In addition, since the suction force remains on the neighboring pads, an effect of re-adsorption of the pads sucking the wrong part can also be expected. As a result, the transfer of the display panel can be performed stably, and thus a highly reliable display panel module assembling device can be provided. the

Furthermore, according to the above-mentioned present invention, in the display panel module assembling device or assembling method, the mechanism part for performing each processing operation of the processing operation device is unitized, and at least two or more processing units are simultaneously placed on one side of one display panel substrate. By performing the processing work, the working efficiency of the slow processing work device can be improved. the

In addition, according to the above-mentioned present invention, it can be known that a plurality of processing units can correct the processing side of the display panel substrate and the relative position of the processing units based on the detection result of the posture of the display panel substrate, so that a processing side of the display panel substrate can be independently performed. Positioning processing can be performed simultaneously by the above-mentioned plurality of processing units. the

Furthermore, according to the above-mentioned present invention, the plurality of processing units are provided with an operating mechanism capable of moving in a direction parallel to the direction of the processing side of the display panel substrate, so that each processing unit can move to an arbitrary position, and the processing can be improved. unit operating efficiency. the

In addition, according to the above-mentioned present invention, by controlling the processing operation in a plurality of processing units and the transfer movement between the processing positions on the side of the substrate, it is possible to prevent interference such as a collision of a plurality of processing units performing processing operations. A processing side of the same display panel substrate simultaneously performs processing operations based on a plurality of processing units. the

From the above results, it can be seen that by adjusting the number of processing units arranged in each processing operation device, the processing time of each processing operation device can be made close, and in the display panel module assembly device or assembly method including a variety of processing operations, it can be improved. The run rate of the processing job. the

In addition, it is possible to provide a display panel module assembling device that can shorten the overall length of the display panel module assembling device in a display panel module assembling device including various processing operations. the

Furthermore, it is possible to provide a display panel substrate assembly processing operation device capable of achieving the above-mentioned two effects. the

The above objects, features, and effects of the present invention and other objects, features, and effects of the present invention are further described in the following description. the

Description of drawings

FIG. 1 is a diagram for explaining the basic configuration of a display panel substrate conveying device and a display panel module assembly device using the same according to the present invention. the

FIG. 2 is a diagram for schematically explaining an operation state during each processing operation and during substrate transportation, and is a diagram showing a cross section from the substrate transportation direction. the

FIG. 3 is a diagram for schematically explaining the operating state of each processing unit and during substrate transfer, and is a diagram showing a cross-section from the side of the apparatus. the

FIG. 4( a ) is a diagram illustrating steps 1 to 4 of the substrate handling and conveying procedures in the display panel substrate conveying device and the display panel module assembly device using the same. the

FIG. 4( b ) is a diagram illustrating step 5 and step 6 in the processing and transport sequence of the substrate following FIG. 4( a ). the

FIG. 5 is a diagram for explaining a substrate position correction method by a substrate holding mechanism. the

FIG. 6 is a schematic diagram illustrating force applied to the substrate, deformation of the substrate, and the like during substrate transfer. the

7 is a diagram for explaining the substrate holding mechanism of the present invention and holding of substrates with different sizes depending on the substrate holding mechanism. the

FIG. 8 is a diagram for explaining a display panel substrate conveyance mechanism in a case where a very large substrate is assumed to be conveyed. the

FIG. 9 is a diagram for explaining a mode of further simplifying the mechanism of the display panel substrate conveyance device of the present invention. the

FIG. 10 is a diagram for explaining a mode in which a plurality of processing units simultaneously perform work on one substrate. the

FIG. 11 is a diagram showing an example of a fiducial mark provided on a substrate. the

FIG. 12 is a diagram showing an example of a configuration of a processing unit for positioning a substrate. the

13 is a diagram illustrating an embodiment of a new display panel module assembly device based on the display panel substrate conveying device and the processing unit mechanism of the present invention. the

FIG. 14 is a diagram illustrating an example of a configuration of a control unit in the display panel substrate conveyance device of the present invention. the

FIG. 15 is a diagram illustrating an example of a basic control method in the display panel substrate conveyance device of the present invention. the

Fig. 16 is a diagram illustrating the structure of another embodiment of the display panel substrate conveying device of the present invention. the

FIG. 17 is a diagram illustrating the structure of still another embodiment of the display panel substrate conveying device of the present invention. the

Fig. 18 is a side cross-sectional view showing the embodiment of the present invention shown in Fig. 16 . the

Fig. 19 is a side sectional view showing the embodiment of the present invention shown in Fig. 17 . the

Fig. 20 is a structure of a module assembly device according to an embodiment of the present invention. the

FIG. 20-1 is a flow chart of conveyance to the target position of the display panel substrate according to the embodiment of the present invention. the

Fig. 20-2 is a plan view of transfer and conveyance of large substrates and small substrates according to an embodiment of the present invention. the

Fig. 21 is a plan view of the panel fixing part and the panel movable part for transfer and transportation according to the embodiment of the present invention. the

Fig. 22 is a cross-sectional view of a panel fixing part and a panel movable part for transfer according to an embodiment of the present invention. the

Fig. 23 is a vertical movement diagram of the panel movable part during transfer according to the embodiment of the present invention. the

Fig. 24 is a diagram showing switching of suction force and an operation sequence in an ideal panel transfer according to an embodiment of the present invention. the

Fig. 25 is a diagram showing a delay in release of the attractive force on one side of the transfer panel for the transfer operation according to the embodiment of the present invention. the

Fig. 26 is a diagram showing that the release of the suction force on one side of the transfer panel is advanced in the transfer operation according to the embodiment of the present invention. the

Fig. 27 is a diagram showing a case where the operation of the transfer panel is advanced with respect to the timing of weakening the suction in the embodiment of the present invention. the

Fig. 28 is a diagram showing how the operation of the transfer panel is delayed with respect to the timing of weakening suction in the embodiment of the present invention. the

Fig. 29 is a diagram showing a delay in releasing the suction force on the side of the panel that transfers the embodiment of the present invention. the

Fig. 30 is a diagram showing a situation where the attractive force is weak on the side transferring the panel according to the embodiment of the present invention. the

Fig. 31 is a diagram showing a case where the attractive force on the side transferring the panel according to the embodiment of the present invention is weak and limited. the

Fig. 32 is a diagram showing a case where the operation of the side that transfers the panel according to the embodiment of the present invention is advanced. the

Fig. 33 is a diagram showing a delay in the operation of the side that transfers the panel according to the embodiment of the present invention. the

Fig. 34 is a diagram showing a situation where the suction force on the transfer side is at a weak level due to the release valve of the embodiment of the present invention. the

Fig. 35 is a diagram showing how the suction is switched by opening and closing the valve of the suction pump according to the comparative example of the present invention. the

Fig. 36 is a diagram showing a suction system that generates a weak stage of suction using a release valve according to an embodiment of the present invention. the

Fig. 37 is a diagram showing reduction of the suction force when one of the absorbent pads according to the embodiment of the present invention leaks. the

Fig. 38 is a view showing how the adsorption system according to the embodiment of the present invention is divided and connected with pressure loss. the

In the figure: 1-the processing device group on the long side of the substrate (source side); 2-the rotation mechanism of the substrate; 3-the processing device group on the short side of the substrate (gate side); 4-terminal cleaning process Operation device (source side); 5-ACF attachment processing operation device (source side); 6-TAB/IC mounting processing operation device (source side); 7-formal crimping processing operation device (source side); 8-terminal Cleaning processing device (gate side); 9-ACF attachment processing device (gate side); 10-substrate (display panel substrate); 11-substrate conveying mechanism; 11A-substrate conveying member; 11S-auxiliary substrate conveying member ; 12-substrate holding mechanism; 12A-substrate holding member; 12S-auxiliary substrate holding member; 13-processing device; 14-substrate conveying member lifting mechanism; Operating range; 17-The gap between the substrate holding member and the substrate conveying member; 18-The suction hole on the surface of the substrate conveying member; 19-The suction hole on the surface of the substrate holding member; 20-Arrangement area for small substrates; 21-Arrangement area for large substrates ; 22-suction chamber under the adsorption hole; 23, 63-opening and closing valve; 24-negative pressure system supplied by suction pump, etc.; 25-disposition area of super large substrate; 27-The side close to the processing side of the substrate (substrate holding and conveying area); 28-The side far from the processing of the substrate (substrate low friction holding area); 29-Sliding the slider of the stage; 30-Processing The processing unit of the operation; 31-end mark 31 indicating the end of the display panel; 32-mounting position mark indicating the mounting position of TAB or IC, etc.; 33-XYZθ movement mechanism that moves the processing unit as a whole; 34-detection on the substrate 35-processing position correction mechanism; 36-processing unit mechanism B (different type of processing unit from 30); 37-system action timing control mechanism (MC); 38-each processing operation Start signal; 39- each processing operation end signal (also includes error signal or function processing signal, etc.); 40- each processing operation device control mechanism (AC-1 ~ AC-6); 41- each processing operation device control mechanism and Control communication signals between each processing operation device; 42-sensors for detecting the coordinate positions of substrate conveying members B-1 to B-4, etc.; 43-drive devices (M-1 to M-4) for each substrate conveying member; 44-detection signal of the coordinate position of each substrate conveying member; 45-operation signal of the drive device of each substrate conveying member; 46-substrate conveying operation control mechanism (BC-1); 47-transporting operation start signal; 48-substrate Conveying end signal; 49-processing unit mechanism control mechanism (UC-1～UC-3) in the processing operation device; 50-substrate conveying control signal of the system action sequence control mechanism; 51-processing device action of the system action sequence control mechanism control signal ; 52-substrate transport action signal of the substrate transport action control mechanism; 53-processing device action signal (1)(2)(3) of each processing device control mechanism...; 101-display panel substrate; 102-substrate transport member ; 103-substrate holding member; 104-handling operation device; 105-substrate conveying member lifting device; 106-slider stage guide rail; 107-substrate conveying member surface suction hole; 108-substrate conveying member surface suction hole ; 109-disposition area of small substrate; 110-disposition area of large substrate; 111-suction chamber under adsorption hole; 112, 143-opening and closing valve; 113-negative pressure system supplied by suction pump etc.; 115-sliding Slider of stage; 116-processing unit; 140-suction pad; 141-release valve; 142-suction pump; type piping. the

Detailed ways

Hereinafter, an embodiment of the present invention will be described using FIGS. 1 to 5 . the

FIG. 1 is a diagram illustrating an example of a basic structure of a display panel substrate conveying device and a display panel module assembly device using the same according to the present invention. the

The apparatus of FIG. 1 is an apparatus for carrying out various processing operations on the periphery of the substrate while sequentially conveying the substrate 10 from left to right in the figure, and performing mounting and assembling operations of ICs and TABs. In the apparatus of FIG. 1 , first, after processing the long side (source side) of the substrate by the processing unit 1 on the long side (source side) of the substrate, the substrate is rotated by the rotary table 2, and then the substrate is rotated by the substrate long side (source side). The processing unit group 3 on the short side (gate side) performs processing on the short side (gate side) of the substrate. In the apparatus shown in Fig. 1, as the processing on the long side (source side) of the substrate, (1) the terminal cleaning process of removing the TAB attached part at the edge of the substrate, (2) ACF process of attaching anisotropic conductive film (ACF) to the inside, (3) Mounting process of mounting TAB or IC by aligning with substrate wiring at the position where ACF is attached, (4) Mounting TAB by thermocompression bonding Or IC, using the ACF film to fix the crimping process, 4 to 7 in Figure 7 represent the terminal cleaning processing device 4, the ACF attaching processing device 5, the TAB/IC mounting processing device 6, and the actual crimping processing operation device7. the

In the apparatus of FIG. 1 , only the terminal cleaning processing device 8 and the ACF attaching processing device 9 are shown as processing operations on the short side (gate side) of the substrate, and the subsequent processing device group is omitted. In addition to the processing operation device shown in FIG. 1, as the entire display panel module assembly device, in addition to the processing operation on the short side (gate side) of the substrate, which is not shown in the figure, the remaining two sides (long side, short side) of the substrate The processing process or the PCB processing process (including multiple processing steps) of attaching and mounting the PCB substrate with ACF on the opposite side of the substrate side of the TAB, and the inspection process of the substrate after the processing operation. . Of course, what processing device needs to be connected depends on the structure of the display panel module for assembly. the

The present embodiment provides a display panel substrate transfer device that efficiently transfers the substrate 10 between these various processing positions connected in large numbers. the

The display panel substrate conveying device of this embodiment firstly includes: a substrate holding mechanism 12 for holding the substrate 10 at each processing device position; Position the substrate transport mechanism 11. In FIG. 1 , in front of each processing device, 4 groups of active side and 2 groups of independent substrate holding mechanisms 12a-e (adding letters to indicate processing devices) and substrate conveying mechanisms 11a-e (adding letters) are shown in the figure. Indicates a handling device). the

As shown in FIG. 2 described later, the substrate holding mechanism 12 has a structure in which a plurality of substrate holding members 12A elongated in the substrate conveying direction are arranged in a row in a direction straight in the substrate conveying direction. As shown in FIG. 2 , the substrate transport mechanism 11 has a structure in which a plurality of substrate transport members 11A elongated in the substrate transport direction are arranged in a row between the plurality of elongated substrate holding members 12A. In FIG. 1 , a substrate 10 is shown partially cut away to illustrate a substrate holding mechanism 12 or a substrate conveying mechanism 11 disposed therebelow, and its outer shape is shown by dotted lines. The substrate conveyance member arranged in parallel in front of the same processing work device 13 is integrally configured to move the substrate 10 held by the substrate holding mechanism 12 to the next processing work device position. the

2 and 3 are diagrams for schematically explaining operation states during each processing operation and during substrate transfer. FIG. 2 shows a cross section from the transport direction of the substrate 10, and FIG. 3 shows a cross section from the side of the device. The substrate conveying mechanism 11 has a plurality of substrate conveying members 11A to C (three in FIG. 2 , and will be collectively referred to as 11A hereinafter regardless of the number or form) disposed between the substrate holding mechanism 12. These are integrated and have With respect to the substrate holding members 12A to D of the substrate holding mechanism 12 (there are four in FIG. 2 , and will be collectively referred to as 12A hereinafter regardless of the number or form), the substrate conveying member 11A is opposed to each other. Lifting mechanism 14 for ascending and descending substrate conveying member. the

After the processing operation on the substrate 10 in each processing operation device is completed (FIG. 3-(1)), the substrate conveyance mechanism 11 raises the substrate conveyance members 11aA, 11bA to place the substrate on the substrate holding members 12aA, 12bA, etc. The arranged substrate 10 is lifted by a small amount (FIG. 3-(2)), and then, it is slid along the gap direction of the substrate holding members 12aA, 12bA, etc. (FIG. 3-(3)), whereby the substrate 10 can be transported. to the next job processor. As a mechanism for sliding the substrate conveyance mechanism 11 , normal slider stage mechanisms 29 and 15 based on linear motors, ball screws, and the like can be applied. The conveyance direction of the substrate 10 in FIG. 2 is a direction perpendicular to the paper surface. The substrate conveyance mechanism 11 that conveys the substrate 10 to the next conveyance processing position lowers the substrate conveyance members 11aA, 11bA, etc., and transfers the substrate 10 to the substrate holding mechanism 11 of the next work processing apparatus (FIG. 3 -(4)). The substrate conveying mechanism 11 that transfers the substrate 10 to the substrate holding mechanism 12 is in the state of descending, and returns to the processing operation device position of the raw material (Fig. 3-(5)). This returning operation can be performed during the processing operation of each processing operation device, and thus can contribute to an improvement in the operating rate without loss of time. In addition, even if the lengths between the processing operation devices are different, the return operation can be performed during the processing operation, so it is possible to perform the same timing between the processing operation devices with a margin in time, and the substrate can be 10 are successively transported to the downstream processing operation device position continuously. the

In the substrate conveyance method of the above-described embodiment, the amount of ascent and descent of the substrate 10 by the substrate conveyance mechanism 11 can be suppressed extremely, and the substrate 10 can be conveyed in the shortest straight line between each processing operation device. Accordingly, it is possible to move a plurality of substrates 10 substantially simultaneously at a high speed between the processing devices in conjunction with conveyance of the substrates 10 described later in the same sequence. the

Regarding the amount of substrate lift by the transport mechanism during actual substrate transport, it is necessary to consider the deflection or warping of the substrate 10 during transport, the flatness of the holding surface of the substrate holding mechanism, and the holding of the substrate between adjacent processing equipment. The height alignment accuracy of the mechanism, the height position accuracy during ascending conveyance of the substrate conveying mechanism, and the like are determined within a range in which the substrate 10 does not contact the surface of the substrate holding member 12A. As for the descending amount of the substrate conveyance mechanism 11 during the return operation, it is needless to say that the substrate conveyance member 11A is determined within a range in which the substrate conveyance member 11A does not come into contact with the lower surface of the substrate. The lifting amount of the substrate 10 from the substrate holding mechanism during transportation in this embodiment is about 1 to 2 mm. the

However, the TAB-attached substrate 10 needs to be raised by such an amount that the front end of the TAB does not come into contact with the substrate holding member 12A during transportation. If the TAB length is about 20 mm, it is necessary to raise the substrate conveying member 11A relative to the substrate holding member 12A. About 20mm. the

The substrate conveying mechanism 11 of this embodiment performs the separation or separation of the substrate holding mechanism 12 and the substrate 10 by the necessary minimum vertical movement of the substrate conveying mechanism before and after sliding and conveying a predetermined amount in the vertical direction. Therefore, it is possible to minimize and suppress a change in substrate posture or a decrease in placement accuracy due to the transfer operation. the

The substrate holding member 12A and the substrate conveying member 11A in this embodiment need to have a length equal to or longer than the entire length of the substrate in the substrate conveying direction when holding and conveying a substrate of the largest size, and be of the minimum size for holding and conveying. At least one pair of the substrate holding member 12A and the substrate conveying member 11A can be arranged in the straight direction during the substrate conveyance. As a result, the substrate holding member 12A and the substrate conveying member 11A of this embodiment have elongated shapes. the

In addition, in the above-mentioned embodiments, the substrate holding member 12A and the substrate conveying member 11A are shown as elongated shapes, but the form in which the contact surface with the substrate 10 is formed in a convex shape at regular intervals is also an elongated shape. the

Furthermore, although not shown in FIGS. 1 to 3 , in this embodiment, suction holes are arranged at regular intervals on the surfaces of the substrate holding member 12A and the substrate conveying member 11A, and the substrate can be sucked to the substrate by negative pressure. Holding mechanism or substrate transport mechanism. As a result, the substrate 10 is firmly fixed to the substrate holding mechanism 12 or the substrate conveying mechanism 11, so that the substrate 10 does not deviate from the substrate holding mechanism 12 or the substrate conveying mechanism 11 during the substrate processing operation or substrate conveying. Complementary with the above-mentioned transfer method that separates the above-mentioned micro-up/down operation and horizontal transfer operation, high-precision substrate transfer can be realized. the

However, in the vacuum suction method described above, in order to fix the substrate 10 stably and reliably, it is necessary to bring the substrate 10 into close contact with the suction port. However, the substrate 10 is often warped. In order to securely adsorb the warped substrate 10 to the vacuum suction holes, it is necessary to press the substrate 10 tightly to the suction holes. In the transfer mechanism of this embodiment, when transferring to any one of the substrate holding mechanism and the substrate transfer mechanism, the suction force at the origin of the transfer is also configured and controlled to be maintained at a predetermined value, so that the suction hole of the transfer destination , the substrate 10 is pressed against the adsorption hole and transferred at the same time, so as to realize reliable, stable and high-precision substrate transfer operation. The details of the transfer method using vacuum adsorption will be described later. the

FIG. 4 is a view explaining the processing and conveying procedure of the display panel substrate 10 in the display panel substrate conveying apparatus and the display panel module assembly apparatus using the same. In FIG. 4 , for the sake of explanation, the processing operation is divided into steps 1 to 6 and described. the

First, in step 1, the substrate 10 is placed at the position of each processing operation device, and each processing operation on the gate side (short side side) The device is continuing processing. At this time, alignment is performed on the turntable 2 in the direction of the arrow. the

In step 2, the substrate conveying mechanism 11 under each substrate 10 on the source side (long side) is raised, the substrate 10 is lifted by a small amount, and the substrate 10 is conveyed to the downstream substrate processing operation device position, where The substrate transport mechanism 11 is lowered to transfer it to the substrate holding mechanism 12 . Each processing operation device on the gate side (short side side) is in continuous processing operation. The turntable 2 receives substrates from the source side. the

At this time, the substrate conveyance mechanism 11 holding each substrate 10 moves at the same timing, thereby being able to move to the next processing device position without contacting the substrates at each processing device position. In addition, in the display panel substrate conveying device of this embodiment, each substrate conveying mechanism is driven by an independent driving mechanism. In the device of the embodiment shown in FIG. 3 , independent running elements are arranged on the same linear slide and controlled independently. With the above-mentioned configuration, even when the distances between the respective processing working devices are different, it is possible to perform smooth transportation at the same time sequence. In the embodiment shown in FIG. 4 , the width of the primary crimping processing device is larger than that of other processing devices, but the transport distance is longer. By adopting such a structure, applying the display panel substrate conveying device of this embodiment enables connection of each processing operation device with the necessary minimum width, and therefore, it is possible to provide a display panel module manufacturing device with a short overall length. the

Next, in step 3, the substrate transport mechanism 11 that has descended below the substrate holding mechanism 12 on the source side (substrate long side) returns to the original processing operation device position. In this embodiment, at this time, the substrate 10 is held by the substrate holding mechanism 12 and various processing operations are performed, and there is no loss of processing time due to the return operation of the substrate transport mechanism 11 . A new substrate is loaded into the processing device 4, and each processing device on the source side (long side) starts processing. Each processing operation device on the gate side (short side side) is in continuous processing operation. the

In step 4, in order to rotate the substrate 10 by 90 degrees with the rotary table 2, and align the position of the short side (gate side) of the substrate as the next substrate processing side with the processing line of the downstream processing operation device, as follows Slides in a direction perpendicular to the substrate conveyance direction as indicated by the arrows. Each processing device on the source side (long side) is processing. Each processing device on the gate side (short side side) is also in continuous processing operation. the

Step 5 and Step S6 correspond to Step 2 and Step 3 of each processing operation device on the source side (long side side), and in step 5, the substrate conveying mechanism 11 of each processing operation device on the gate side (short side side) returns to the upstream On the side, in step 6, the substrate 10 is slid and transported to each processing device on the gate side (short side side) by the substrate holding mechanism 12 . At this time, each processing operation device located on the source side (long side side) on the upstream side of the turntable 2 is continuing processing. That is, each processing operation device on the source side (long side) starts processing in step 3, continues processing in steps 4 to 6, and ends processing in step 1. On the other hand, for each processing device located on the substrate short side (gate side) downstream of the turntable, processing starts in step 1 and ends in step 5 for each processing job. In this way, the processing phases of the processing jobs on the gate side (short side) located downstream of the turntable and the processing jobs on the source side (long side) located upstream of the turntable are different in phase, but basic In the same process as above, the substrate 10 can be transported and processed at the same time interval, and the display panel module assembly apparatus as a whole can perform continuous substrate 10 processing operations. the

The display panel module assembly apparatus is an apparatus configured by connecting a very large number of processing devices as described above. Therefore, the number of transfers of the substrate 10 is large, and it is difficult to fully ensure the posture and arrangement accuracy of the substrate 10 being conveyed over the entire length of the device using the display panel substrate conveying device of this embodiment. Therefore, in order to maintain the posture and arrangement accuracy of the substrate 10 moving in the display panel module assembly apparatus, it is effective to provide a part of the substrate holding mechanism 12 with a mechanism for correcting the posture and position of the conveyed substrate 10 . the

In particular, since it is necessary to apply high temperature and high pressure to the end portion of the substrate, the position of the substrate is likely to deviate in the position of the actual pressure-bonding device. Also, in the turntable that rotates the substrate 10 , there is a high possibility that the position of the substrate will deviate due to centrifugal force or the like applied to the substrate 10 . Therefore, in the structure of the display panel module assembly device of the present invention shown in FIG. 1 , it is effective to provide a mechanism for correcting the position of the substrate in the substrate holding mechanism at the positions of the terminal cleaning devices 4 and 8 and the main crimping device 7 . the

FIG. 5 is a diagram for explaining a substrate position correction method by the substrate holding mechanism 12 . Several gaps 17 are formed between the substrate holding member 12A, which is elongated in the substrate conveying direction, and the substrate conveying member 11A. The substrate holding member 12A is configured to be operable within the range of this gap. Preferably, for the running direction, in addition to the direction along the substrate conveying direction, the substrate conveying direction, and the three axes (X, Y, Z directions in the figure) perpendicular to the substrate surface in the substrate surface, it can also be on the substrate surface The rotation direction (theta direction in the figure) is corrected. the

The position correction operation of the substrate 10 is carried out as follows: after the substrate 10 transported to the substrate holding mechanism 12 detects the reference marks and the like at the end of the substrate by a camera mechanism (not shown), etc., the substrate position correction amount is calculated and controlled. A mechanism (not shown) calculates the correction operation amount of the substrate 10, and operates the substrate holding member 12A based on the calculation result. In each processing operation device, the arrangement position reference of the substrate 10 is determined in advance as a reference. The substrate position correction operation is performed to correct and move the substrate position to the reference arrangement position of the processing operation device. the

Instead of the substrate holding mechanism 12 , the substrate conveyance mechanism 11 may be provided with a position correction mechanism for the substrate 10 . The substrate conveyance mechanism 11 moves among the respective processing devices, and therefore, when a position correction mechanism for the substrate 10 is added, the mechanism structure becomes complicated. However, there is an advantage that a special operating mechanism or the like is not required on the substrate holding mechanism side 12, and the structure becomes simple. It is necessary to determine whether to equip the substrate holding mechanism 12 with a position correcting mechanism for the substrate 10 or to equip the substrate transport mechanism 11 with the position correcting mechanism for the substrate 10 in consideration of the overall structure of the device such as final wiring and piping processing. FIG. 6 is a schematic diagram illustrating force applied to the substrate 10 and deformation of the substrate 10 that occur during substrate transfer. 6 a) shows the transfer operation from the substrate holding mechanism 12 to the substrate transfer mechanism 11, that is, when the substrate transfer member is raised, and FIG. 6 b) shows the transfer from the substrate transfer mechanism 11 to the substrate holding mechanism 12. The operation time is the time when the substrate conveying member moves down. the

As described above, the suction holes 18 and 19 are arranged at a constant pitch on the surfaces of the substrate holding member 12A and the substrate transport member 11A. Thereby, the substrate 10 can be adsorbed by the substrate holding mechanism 12 or the substrate conveying mechanism 11 , and it is possible to prevent deviation of the substrate 10 during the conveying operation or the like. Furthermore, by performing the transfer operation of the substrate 10 between the substrate holding mechanism 12 and the substrate conveying mechanism 11 while suctioning the substrate 10 , a force that presses the substrate 10 against the suction hole is generated. Accordingly, the transfer suction operation can be reliably performed even on the substrate 10 having warpage. the

However, in the transfer operation of the substrate 10 in a state where both the substrate holding mechanism 12 and the substrate conveying mechanism 11 are sucked, deflection deformation of the substrate 10 as shown in FIG. 6 occurs during the transfer. When the deformation of the substrate 10 during the transfer becomes large, it becomes a cause of positional displacement of the substrate 10 due to the transfer operation. the

As a method of reducing the deformation of the substrate during transfer, it is conceivable to weaken the suction pressure of the substrate 10 during transfer. However, in order to prevent the substrate 10 from shifting during the substrate processing operation or substrate transfer and reliably suction and transfer the warped substrate 10 , the suction pressure needs to ensure a certain level of suction force. As another method of reducing deformation of the substrate during transfer, it is effective to reduce the gap between the substrate holding mechanism and the substrate conveying mechanism of the substrate 10 . the

As a result of experiments, when the gap 17 between the substrate holding member 12A and the substrate conveying member 11A is about 30 to 10 mm, the transfer offset of the substrate 10 is about several 100 μm, and when the gap is 10 mm or less, it is possible to ensure approximately Transfer offset below 100μm. In this embodiment, the target amount of offset during substrate transfer is set to be several 10 μm or less, and the gap between the substrate holding mechanism 12 and the substrate transport member 11A is set to 6 mm. At this time, the operating range of the substrate holding mechanism is ±5 mm. The posture and arrangement accuracy deviation of the actual crimping part or the substrate 10 after rotation is also 1 mm or less at most, so the operating range of the substrate holding mechanism as a substrate posture correction mechanism can be sufficiently ensured. the

FIG. 7 is a diagram for explaining holding of a substrate 10 having a different size by the substrate holding mechanism 12 and the substrate transport mechanism 11 according to the present embodiment. In the substrate holding mechanism 12 and the substrate conveying mechanism 11 of this embodiment, a plurality of substrate holding members 12A and substrate conveying members 11A that are elongated in the substrate conveying direction are arranged, and a plurality of substrates are disposed from the arrangement area 20 of small substrates to the arrangement area of large substrates. The substrate 10 having a wide width can be held between 21. the

At the surface of the substrate holding member 12A and the substrate transport member 11A, suction holes 18 and 19 for sucking the substrate 10 during processing or substrate transport are provided. In the case of a small substrate, the substrate 10 is in contact with only a part of the suction holes provided in the substrate holding member 12A and the substrate transport member 11A. the

In this case, there is a problem that a large amount of air flows in from the adsorption holes where the substrate 10 is not adsorbed, and the adsorption force of the adsorption holes where the substrate 10 is adsorbed decreases. Therefore, in this embodiment, as shown in the figure, the suction chamber 22 under the suction hole 18 formed in the substrate holding member 12A is divided into a plurality. The negative pressure system 24 supplied from a suction pump (not shown) etc. is connected to the divided suction chambers 22a-c through on-off valves 23a-c. In addition, the on-off valves 23a-c are controlled according to the size of the substrate to be transported, and the suction chambers 22a-c generating negative pressure are selected so as to suck only the suction holes 18 in the area where the substrate 10 exists. Thereby, the substrate suction can be performed only in the region corresponding to the substrate size, and therefore, the holding force of the substrate 10 can be stably obtained. the

In FIG. 7 , the on-off valve 23 is provided in the suction chamber directly below the adsorption hole, but it is preferable to install the on-off valve 23 in the suction chamber 22 and the like as close as possible to the adsorption hole 18 . When the on-off valve is installed at a position away from the suction hole or the suction chamber via piping, etc., a time delay occurs in the suction operation after the valve is switched, and suction pressure is generated due to pressure loss in the piping. Easy to become unstable and other failures. Of course, the substrate transfer member 11A side also needs to have the same divided suction chamber structure. the

FIG. 8 is a diagram for explaining a substrate conveyance mechanism in a case where further large-scale substrate conveyance is assumed. In the case of transporting an ultra-large substrate 10 such as a substrate exceeding 50 inches, only using the method of arranging a plurality of substrate holding members 12A and substrate transporting members 11A of this embodiment, the substrate holding member 12A and the substrate transporting member 11A The number increases, causing a problem that the structure becomes complicated. the

Therefore, as shown in FIG. 8, a substrate holding/transporting mechanism including a plurality of substrate holding members 12A and a substrate conveying member 11A is disposed on the substrate lower surface on the side 27 close to the processing side of the substrate 10, and the On the lower surface of the substrate on the side 28 where the processing side is farther away, a low-friction substrate holding portion 26 with less frictional resistance is disposed. As a substrate holding method with low frictional resistance, in addition to the method of supporting a part of the substrate 10 by using a support and guide member with low frictional resistance using a fluorine-based or silicon-based material, or a method of supporting the substrate 10 with a plurality of rotating balls, An air-floating method in which the substrate 10 is floated by jetting air from a plurality of minute holes may be used. Among these methods, from the viewpoint of preventing loss to the lower surface of the substrate, the most effective method is the air-floating method that does not come into contact with the lower surface of the substrate. However, it is more preferable to use a mechanical low-friction substrate holding mechanism together with the air-floating method as countermeasures against unpredictable substrate contact during substrate transfer. the

That is, when a large substrate is transported, for the substrate 10, the side 27 close to the processing side is transported by the same substrate transport mechanism 11 as in FIG. Air - Move while floating. In addition, when holding a large substrate, the substrate 10 is held by the substrate holding mechanism 12 similar to that in FIG. the

On the other hand, when transporting small substrates, the same substrate holding and transport mechanism as shown in FIG. 7 is used. Therefore, in the substrate holding and transport structure of this embodiment shown in FIG. The width from the arrangement region 20 to the arrangement region 25 of the large substrate is a large substrate size. the

As a problem with this embodiment, when the substrate 10 is highly accelerated while holding only the substrate end side of the ultra-large substrate, a large rotational torque is generated on the substrate 10 , and therefore, conveyance deviation of the substrate 10 may occur. In order to prevent this, it is effective to provide an auxiliary substrate transport member and an auxiliary substrate holding member near the center of the substrate, which is the center of gravity of the large substrate. This prevents the occurrence of rotational torque when the substrate is accelerated, and thus enables stable high-speed conveyance even for large substrates. If the auxiliary substrate conveyance member and the auxiliary substrate holding member are provided at the center of the largest substrate to be conveyed, there is an effect of suppressing the generation of rotational torque even when relatively small substrates are conveyed. the

The left half of FIG. 8 shows a configuration example in the case where the auxiliary substrate transport member 11S and the auxiliary substrate holding member 12S are provided near the center of gravity of the large substrate. the

FIG. 9 is a diagram for explaining a further simplification of the mechanism of the display panel substrate conveyance device of the present embodiment. The display panel module assembly apparatus is an apparatus configured by connecting a plurality of processing devices, and it is necessary to stop the substrate 10 at each processing device position. In addition, in the case of the conventional substrate conveyance mechanism described in Patent Document 1 or 2, substantially the same number of substrate conveyance mechanisms as each processing work apparatus is required. the

However, in the present invention, as shown in FIG. 9 , a plurality of substrates 10 disposed on a plurality of processing devices 4 , 5 a , and 5 b can be collectively conveyed only by increasing the length of the substrate conveyance member 11 aA. Accordingly, the number of conveying mechanisms for the substrate 10 can be significantly reduced, and the structure of the conveying device can be simplified. the

In the form of the above-mentioned embodiment, a plurality of substrates 10 are simultaneously conveyed by the amount of one processing operation device by using the same elongated substrate conveying member, and therefore, the moving distance of each substrate 10 is the same. The conveyance by the elongated substrate conveyance member can be applied only to an area where the intervals between the substrate arrangement positions between the processing devices are constant. the

In addition, in the embodiment of FIG. 9 , two substrate transport members 11A are arranged between four substrate holding members 12A. In the embodiment shown in FIGS. 1 to 8 , the substrate conveying members 11A are arranged entirely between the substrate holding members 12A. As shown in FIG. 9 , the number of substrate holding members 12A or substrate conveying members 11A may be spaced apart. It is necessary to determine the number or arrangement of the substrate transport members 11A or holding members in consideration of the relationship between the force to adsorb and fix the substrate 10 and the force applied to the substrate 10 during processing and transport, together with the size and weight of the substrate to be processed and transported. In this embodiment, by arranging two to four substrate transport members 11A or holding members having a width of approximately 2 cm, conditions for sufficiently holding the substrate 10 during processing and transport can be obtained. the

Next, the improvement of the efficiency of the processing operation or the further speed-up of the processing tact to which the display panel substrate conveying device and the display panel module assembling device of the present embodiment are applied will be described. the

The display panel module assembly device is connected to a device that performs a plurality of processing operations, and performs various processing operations on the substrate 10 continuously. Of course, there is a difference in the processing time of each processing work process. The processing operation device of the short-time process waits for the end of the processing operation device of the time-consuming process, so the conveyance interval of the substrate 10 is limited by the processing operation device of the time-consuming process, and the processing operation device of the short-time process , generates the time at which the job stops. the

In order to operate each processing unit more efficiently, it is conceivable to connect more processing units for time-consuming processes than for short-term processes to obtain a takt balance of each processing process. In previous FIG. 9 , an example in which two provisional crimping processing devices were connected was shown. However, in this form, the number of connected processing devices increases, and the overall length of the display panel module assembly device becomes extremely long. the

FIG. 10 is a diagram for explaining a method of solving the problem. In the apparatus shown in FIG. 10, a plurality of processing units 30 for actually performing processing operations are arranged in one processing operation device. By adopting such a configuration, a plurality of processing units 30 can simultaneously perform operations on one substrate 10 that is one processing device 13 , and the same effect as when the working efficiency of each processing device is improved is obtained. the

Usually, reference marks are provided on the processed side and the processed portion of the substrate 10 . FIG. 11 is a diagram showing an example of reference marks provided on the substrate 10 . As a reference mark, a mounting position mark 32 indicating a mounting position of a TAB, an IC, etc. is formed together with an end portion mark 31 indicating an end portion of the display panel. the

In the processing operation device of the embodiment shown in FIG. 10 , a plurality of processing units 30 perform operations on different parts of the processing side of one substrate 10 at the same time. Therefore, even if the substrate side is moved to adjust the processing position, simultaneous It is almost impossible to align the processing positions of the two processing units 30 . Therefore, in order to solve this problem, each processing unit 30 in the processing work device is provided with a function of identifying the mounting position to be processed of each processing unit 30 by the mounting position mark 32 and independently positioning. the

An embodiment of a processing unit 30 for implementing such functionality is shown at 15S FIG. 12 . The processing unit 30 includes: a CCD camera 34 for detecting reference marks on the substrate; and an XYZθ movement mechanism 33 for moving the entire processing unit in the XYZ and θ directions. The processing unit 30 uses the information of the fiducial marks 31 and 32 detected by the CCD camera 34, uses the processing position correction mechanism 35, calculates the correction amount of the processing unit, and uses the XYZθ movement mechanism 33 to correct the processing position. Processing operations such as attaching ACF or mounting TAB. Each processing unit installed in the processing operation device independently performs the detection and positioning operation of the above-mentioned substrate processing position, thereby enabling simultaneous processing of a plurality of processing positions for one substrate 10 . the

In the embodiment of Fig. 12, the X-axis running mechanism is arranged at the bottom. This is because the operating distance is the longest since the X-axis is in a direction parallel to the processing side of the substrate 10 . By adopting such a configuration, the X-axis guide rail can also be used in common among a plurality of processing units 30 included in the processing work equipment. the

In this embodiment, the X-axis motion mechanism is used both for the purpose of moving the processing unit between the processing positions of the substrate and for the purpose of performing positioning at each processing position. In order to achieve both high-speed movement between processing positions and high-precision positioning to the processing position, in addition to the X-axis that moves the processing unit between the processing positions of the substrate with a large travel distance, for high-precision positioning to the processing position It is also considered to set the fine-tuning operating mechanism of the X-axis together with the operating mechanisms of other axes. In reality, multiple X-axes are required, and therefore, the structure needs to be selected in consideration of cost and necessary accuracy. the

In the embodiment of FIG. 12 , the structure in which a CCD camera 34 is mounted on each processing unit 30 is disclosed, but there is also a CCD camera 34 mounted on the processing operation device 13, which is detected by an end mark 31 or a predetermined mounting position mark 32. A method of converting the posture of the entire substrate to be processed into processing position correction information in each processing unit 30 and performing a processing position correction operation of each processing unit 30 . In the case of this method, there is the advantage of reducing the number of cameras for detecting fiducial marks. However, each piece of positional information processed by each processing unit 30 is calculated by calculation using a part of the markers, so attention needs to be paid to application to IC mounting or the like requiring very high positioning accuracy of several μm or less. the

Furthermore, in a system in which a plurality of processing units 30 simultaneously perform operations on one substrate 10 , it is necessary to make the processing units 30 travel at a short distance. In particular, when processing a small substrate or a substrate 10 with a short processing side, it is necessary to perform processing operations with the processing units 30 adjacent to each other. Therefore, there is a high possibility that malfunctions such as interference and collision between the processing units 30 will occur during the processing operation. Therefore, in order to avoid collisions between the processing units 30, a processing unit operation timing control mechanism is provided to drive and control the operation timing of each processing unit 30 performing processing operations on the same substrate. the

An example of the basic control procedure for each processing unit based on the processing unit operation sequence control mechanism is as follows. (1) Using the processing unit operation sequence control mechanism to send processing position information and movement instructions to each processing unit 30 . (2) After the movement is completed, each processing unit 30 reports the movement completion to the processing unit operation sequence control mechanism. (3) The processing unit operation sequence control mechanism sends an instruction to start processing jobs to each processing unit 30 . (4) Each processing unit 30 reports the end of the job to the processing unit operation sequence control mechanism after a predetermined processing operation is completed. (5) The processing unit operation sequence control means sends a command to move to the next processing position to each processing unit 30 . When an abnormality occurs in each processing operation or movement operation, it is reported to the processing unit operation sequence control mechanism, and the processing unit operation sequence control mechanism stops the next operation or movement processing, thereby preventing each processing unit collisions, etc. the

As described above, each processing unit is equipped with a processing unit operation timing control mechanism for each processing unit together with a substrate mark detection and processing position correction mechanism, thereby arranging a plurality of processing units in the processing operation device, thereby improving the performance of one display. Processing efficiency of panel substrates. the

In addition, as described above, in this embodiment, a plurality of processing unit mechanisms 30 that actually perform processing operations in one processing operation device 13 are arranged. As described above, with such a structure, one processing unit 13, that is, a plurality of processing unit mechanisms 13 can simultaneously perform operations on one display panel substrate 10, and obtain the same improvement as the operation efficiency of each processing unit 13. Effect. the

In addition, each processing unit 30 in the processing operation device of this embodiment is provided with a function of independently positioning each processing unit 30 by identifying the mounting position to be processed of each processing unit 30 by the reference position mark of the substrate. Therefore, only the display panel substrate side of the job processing device may be fixedly held. That is, a mechanism for correcting the relative position with the processing unit as disclosed in Patent Documents 1 to 3 is not required. the

Therefore, it is possible to downsize and simplify the transport device for the display panel substrate, and it is possible to apply the disclosed display panel substrate transport method including the linear transport and holding mechanism. the

When this embodiment is applied, there is a limit to the number of processing units 30 that can simultaneously operate on one processing substrate. In particular, in the case of a small substrate, in order to process it with a plurality of processing units 30, it is necessary to configure the processing units to be extremely thin. However, there is a mechanical limit on the width of each processing unit 30, and a certain width (approximately 150 to 200 mm or more) is required. Therefore, the substrate size that can be processed on one processing side by a plurality of processing units 30 There is also a limit to waiting. the

Conditions of substrates that cannot be processed by a plurality of processing units 30 are determined by the length L of the pixel portion of the processing side, the number n of TABs to be processed, and the maximum approachable distance W between processing units. In the case of substrate conditions that can only be processed by one processing unit 30 , processing efficiency cannot be improved even if a plurality of processing units are mounted on the processing operation device. the

Therefore, in the case of a small substrate that cannot be processed simultaneously by a plurality of processing units, in order to obtain a balance in the tact of each processing step, a plurality of substrate processing positions for the same processing are required, and the overall length of the display panel module assembly device becomes longer. the main reason. In particular, in the conventional apparatus structure in which each processing unit 13 processes one display panel substrate, each processing unit needs to have an apparatus width equal to or greater than the width of the largest display panel substrate to be processed. Therefore, when processing a small substrate, the apparatus becomes longer than necessary. the

These problems can also be solved by combining the processing method based on the thin processing unit 30 of this embodiment with the linear conveyance method of the display panel substrate described in this embodiment, and further, it is possible to realize the wide and small to large A display panel module assembly device capable of efficiently assembling substrates. the

Secondly, the display panel module assembly device capable of efficiently assembling wide, small to large substrates can be realized by combining the display panel substrate conveying method and the processing unit in another method of the present invention. FIG. 13 is a diagram for explaining an example of a display panel module assembly device capable of efficiently assembling small to large substrates according to the present invention. the

The display panel substrate conveyance device of this embodiment includes a substrate holding mechanism constituted by a plurality of substrate retaining members 12A elongated in the substrate conveying direction and a substrate composed of a plurality of substrate conveying members 11A also elongated in the substrate conveying direction. The substrate holding and conveying mechanism of the conveying mechanism. the

This transport method has a feature that the transport amount of the substrate 10 can be freely changed by changing the reciprocating distance of the transport mechanism. the

As shown in FIG. 13 , by configuring the substrate holding member 12A to be long across a plurality of substrate stop positions, the reciprocating distance of the substrate conveyance mechanism 11 can be changed, whereby the substrate 10 can be conveyed and held at various pitches. Furthermore, a plurality of processing units 30 for performing processing operations are arranged, and can move in the substrate transfer direction across a plurality of substrate stop positions. the

In other words, in FIG. 9 , the substrate conveyance mechanism 11 straddles the three processing devices 13 and the length of the substrate conveying member 11aA is lengthened, thereby collectively conveying a plurality of substrates 10 arranged in the three processing devices. Furthermore, in FIG. 13 , the substrate holding member 12A is also formed to straddle the lengths of the three processing devices, whereby the substrate conveyance mechanism 11 can be stopped at any position, and the substrate is transferred to the substrate holding mechanism 12 at the stop position. Accordingly, each substrate 10 is in a state where a processing operation can be performed at an arbitrary position. As shown in FIG. 13 , by forming the above-mentioned structure across the entire length, processing can be performed at any position across the entire length. the

That is, the apparatus of this embodiment is not a conventional processing apparatus that fixes the substrate 10 at a predetermined fixed position and processes it. Instead, the stop position of the substrate 10 is changed, and the processing unit mechanism moves to the position to perform each processing operation. the

In the apparatus of this embodiment, as shown in FIG. 13 , the substrate is transported at a transport width corresponding to the transport direction width of the large substrate during processing of a large substrate ( FIG. 13 a ), and at the time of transport of a small substrate ( FIG. 13 b ). The substrate is conveyed at the conveyance width of the conveyance direction width of the small substrate. In the case of processing a large substrate, high processing efficiency can be realized by performing simultaneous processing on one substrate by a plurality of processing unit mechanisms. In the case of small substrates, by reducing the conveyance pitch of the substrates and increasing the stop positions of the substrates, it is possible to arrange a plurality of processing units efficiently. the

If you change your mind, by treating the plurality of processing units 30 as the processing operation device 13 and sharing the work of one substrate, it is possible to realize the display panel module without lengthening the entire length of the display panel module assembly device more than necessary. Assemble the device. the

In this way, by using the thin processing unit and its control method of this embodiment, a display panel module assembly device capable of efficiently assembling small to large substrates can be realized. the

In the form of this embodiment, there is no concept of a fixed processing position of the substrate 10 or a divided processing operation device, and the conveying pitch of the substrate 10 and the processing operation device corresponding to the size of the substrate can be realized within a predetermined interval. Therefore, it is possible to Efficient assembly work with a short overall device length from small to large boards. In addition, a plurality of processing units may combine different processing jobs. In the embodiment shown in FIG. 13, the ACF attaching processing operation and the TAB loading processing operation are combined. the

The number of processing units that can process one substrate 10 is determined by the length L of the pixel portion on the processing side of the substrate, the number n of TABs to be processed, and the maximum approachable distance W between processing units. In order to realize the optimum processing action corresponding to various substrate conditions, in the display panel module assembly apparatus of this embodiment, it is also necessary to have a device for determining and switching the conveying width or processing unit arrangement conditions, etc., using the above parameters as input values. The processing condition calculation control system of the processing job setting condition on the side. the

The substrate conveying mechanism 11A of the substrate conveying mechanism in this embodiment adopts the long substrate conveying member 11aA shown in FIG. 9 that conveys a plurality of substrates 10 at the same time. Organizational simplification. However, in this case, as described above, the spacing between the substrate holding positions within the section is constant. When it is necessary to change the pitch between the substrate holding positions in the processing section, it is necessary to use a transport method that combines a plurality of substrate transport mechanisms. the

In the substrate processing position variable area, it is difficult to correct the substrate posture or arrangement position during transportation, and a certain degree of error may accumulate in the substrate posture or arrangement position during transportation. The processing position itself to the substrate 10 in the section is solved by using the method of processing unit correction described in FIG. 12 . However, the display panel module assembly device itself is a long device in which a plurality of processing operations are combined. In order to maintain the substrate conveyance posture and arrangement accuracy in the entire apparatus, it is preferable to perform substrate position correction by the substrate position correction method described in FIG. 5 before and after the substrate processing position variable section. the

14 and 15 are diagrams for explaining an example of a control method of a display panel module assembling device and a display panel module assembling device using the display panel module assembling device according to an embodiment of the present invention. the

In FIG. 14 , A-1 to A-6 represent the respective processing devices 13 , and B-1 to B-4 represent the substrate transport mechanism 11 for conveying the substrate 10 held in front of the respective processing devices. B-1 to B-4 indicated by dotted lines indicate the positions of the substrate transport mechanism 11 after the substrate transport. As described above, the substrate conveyance mechanism 11 moves linearly before the processing device 13, but for convenience of illustration, the position of the substrate conveyance mechanism 11 after conveyance shown by the dotted line is shown below the position of the substrate conveyance mechanism 11 before conveyance. side. Actually, the centerlines of the substrate conveyance mechanism 11 drawn before and after conveyance coincide. the

In addition, the substrate conveyance mechanisms B-1 and B-3 are arranged across a plurality of processing apparatuses 13, but this is a substrate conveyance mechanism configured to simultaneously convey a plurality of substrates 10 as described in FIG. 9 . the

Each substrate transport mechanism is driven by an independent drive device 43 (M-1 to M-4). As the drive device, a general linear drive mechanism such as a linear motor or a ball screw system can be used. S-1 to S-4 in FIG. 14 are sensors 42 that detect the coordinate positions and the like of the substrate conveyance mechanisms B-1 to B-4. the

In the control device of this embodiment, a system operation sequence control mechanism 37 (MC) for controlling the basic operation sequence of the entire device system is arranged at the highest level. The substrate conveyance operation control mechanism 46 (BC-1) and each processing operation device control mechanism 40 (AC-1 to AC-6) are arranged in the lower positions. As other configurations, the substrate transfer operation control mechanism 46 (BC-1) also has a plurality of configurations, such as the case where multiple substrate transfer operations are required, or the case where the substrate transfer mechanism of the present invention is composed of multiple locations away from each other. the

Next, the substrate transport operation control signal in this control system will be described. As a basic operation, first, the system operation sequence control unit 37 (MC) sends a transfer operation start signal 47 to the substrate transfer operation control unit 46 (BC-1). The substrate conveyance operation control mechanism 46 (BC-1) receives this, drives the drive mechanism of each substrate conveyance member 11A, and executes the substrate conveyance operation. After the transfer of the substrate 10 to the next processing operation device is completed, the substrate transfer operation control unit 46 (BC-1) sends a substrate transfer completion signal 48 to the system operation sequence control unit 37 (MC). the

Receiving the substrate conveyance end signal 48, the system operation sequence control unit 37 (MC) simultaneously transmits each processing start signal 38 to each processing operation device control unit. Each processing operation device control mechanism 40 (AC-1 to AC-6) that has received each processing start signal 38 implements each prescribed processing, and after each processing is completed, each processing operation device control mechanism 40 (AC-1 to AC-6) 6) Send each processing end signal 39 to the system operation sequence control unit 37 (MC). the

After receiving each processing end signal 39, the system operation sequence control mechanism 37 (MC) sends the next conveyance operation start signal 47 to the substrate conveyance operation control mechanism 46 (BC-1), and by repeating it, the substrate conveyance process is continuously controlled. action. the

In addition to the above, the substrate transport operation control mechanism 46 (BC-1) or each processing device control mechanism 40 (AC-1 to AC-6) also needs to send error information and the like when an abnormality occurs to the system operation sequence control mechanism 37 ( MC) sent. Thereby, the system operation sequence control means 37 (MC) can collectively manage errors of the entire system, and can perform system control based on them. the

Furthermore, in addition to the above-mentioned error signal, it is also necessary to communicate between the system operation sequence control mechanism 37 (MC) and the substrate conveyance operation control mechanism 46 (BC-1) or each processing operation device control mechanism 40 (AC-1 to AC-6). During the transmission and reception of several signals. For example, the substrate conveyance mechanisms B-1 to B-4 need to move to the conveyance base point position after substrate conveyance, and each of the processing operation devices A-1 to A-6 may also have processing performed. In order to cope with these processes, the system operation sequence control mechanism 37 (MC) needs to receive the operation start preparation completion of the substrate conveyance operation control mechanism 46 (BC-1) or each processing operation device control mechanism 40 (AC-1 to AC-6), etc. After the signal, the conveyance operation start signal 47 or each processing start signal 38 is sent. the

The details of these communication signals are omitted because they depend on the function or operation mode of each processing device, but it is of course important to determine after carefully considering the function or operation mode. the

In FIG. 14 , components of UC- 1 to UC- 3 are described in A- 3 of the processing work device 13 . A-3 of the processing operation device 13 in FIG. 14 shows a configuration in which a plurality of processing units 30 are included in the processing operation device shown in FIG. 10 . The components of UC-1 to UC-3 are the control means 49 of these processing units 30 . In this embodiment, it is assumed that the processing unit A-3 has three processing units 30 disposed therein. the

In this way, in the structure having a plurality of processing units 30 in the processing operation device, each processing unit mechanism control mechanism 49 (UC-1 to UC-3) is arranged below each processing operation device control mechanism 40 (AC-3), Control of operation sequence and the like is performed by each processing operation device control mechanism 40 (AC-3). the

FIG. 15 is a schematic illustration of the system action timing control mechanism 37 (MC), the substrate conveying movement control mechanism 46 (BC-1), and each processing operation device control mechanism 40 (AC-1 to AC-1) in the embodiment of FIG. AC-6) Diagrams of the fundamental signals between. the

Receiving the rising of the substrate conveyance control signal 50 of the system operation sequence control means 37 (MC), the substrate conveyance operation signal 52 of the substrate conveyance operation control means 46 (BC-1) becomes conveyance. After the substrate conveying is completed, the substrate conveying operation signal 52 of the substrate conveying operation control mechanism 46 (BC-1) is accepted to decrease, the substrate conveying control signal 50 of the system operation sequence control mechanism 37 (MC) is reduced, and the processing device operation is improved. control signal 51 . Each processing unit control mechanism 40 ( AC- 1 to AC- 6 ) receives the rise of the processing unit operation control signal 51 , starts each processing operation, and raises the processing unit operation signal 53 . After the operation of each processing operation is completed, each processing operation device control mechanism 40 (AC- 1 to AC- 6 ) lowers the processing device operation signal 53 . Receiving this, the system operation sequence control means 37 lowers the processing device operation control signal 51 and raises the substrate transfer control signal 50 for the next substrate transfer. By repeating this, continuous processing operation control is performed. the

When malfunction occurs in the substrate conveyance mechanism 11 or each processing unit 13 , an error occurrence signal 39 is sent to the system operation sequence control mechanism 37 (MC). In addition, it is conceivable that the system operation sequence control unit 37 determines that it is an error when the substrate conveyance unit or each processing operation is not completed within a predetermined time. the

In addition to the embodiment of the present invention described in FIGS. 14 and 15 , a method in which each processing unit control mechanism 40 (AC- 1 to AC- 6 ) independently performs drive control of the substrate conveyance mechanism 11 is conceivable. In this case, it is difficult to make the movement timings of the respective substrate conveyance mechanisms 11 exactly match in order for the plurality of processing operation device control mechanisms 40 (AC-1 to AC-6) to control the plurality of substrate conveyance mechanisms 11 . Collisions may occur between adjacent substrate transport mechanisms 11 . the

As a method of preventing this, when moving the substrate conveying mechanism 11 to the downstream side, sequentially move from the substrate conveying mechanism 11 on the downstream side, and when moving the substrate conveying mechanism 11 to the upstream side, start from the upstream The method in which the substrate conveyance mechanisms 11 on the side start to move sequentially can prevent collisions between adjacent substrate conveyance mechanisms 11 . That is, in this method, when moving the substrate conveyance mechanism 11 to the downstream side, first, the processing operation device control mechanism 40 that controls the drive of the most downstream substrate conveyance mechanism 11 moves and controls the most downstream substrate conveyance mechanism 11, and moves the most downstream substrate conveyance mechanism 11 to the downstream side. The information of the completion of the movement is transmitted to the processing device control mechanism 40 controlling the substrate conveying mechanism 11 adjacent to the upstream side, and the substrate conveying mechanism 11 is sequentially moved to the upstream side. The same applies to the case of moving the substrate conveyance mechanism 11 to the upstream side. In this case, the substrate conveyance mechanism 11 on the upstream side is sequentially moved by the drive control of the most upstream substrate conveyance mechanism 11 to the processing operation device. Mechanism 40 forwards timing information. the

In this form, the substrate conveyance operation control mechanism 46 (BC-1) is useless, but a waiting time is generated for the reciprocating movement time of the substrate conveyance mechanism 11 . Therefore, the substrate conveyance mechanism 11 needs to stop for a certain period of time on the upstream side or the downstream side. This method is not suitable for the case where it is necessary to strictly define the time when the substrate conveyance mechanism 11 stops on the upstream side or the downstream side in terms of the operation of the entire system. the

Finally, the structure of another embodiment of the display panel substrate conveying device of the present invention will be described using FIGS. 16 to 19 . the

In FIG. 16 , the substrate holding mechanism 12 and the substrate conveying mechanism 11 include comb-shaped conveying members facing each other. The substrate holding mechanism 12 is integrated on the side of the processing device 13 , that is, on the substrate processing side (a portion surrounded by A in the figure). Accordingly, the substrate processing side can smoothly hold the substrate 10 . The substrate transport mechanism 11 is opposite to this, and is formed as an integral comb-tooth structure on the opposite side of the processing device 13 , that is, on the opposite side of the substrate processing side. the

FIG. 18 is a diagram showing a side view (section B-B) of the structure of the display panel substrate conveying apparatus of FIG. 16 . As shown in FIG. 18 , the substrate holding member 12A is a structure that is cantilever-supported by an integral part (part A in FIG. 16 ) of the substrate processing side. In addition, the substrate transport member 11A facing thereto is a structure that is cantilever-supported by an integral portion on the side opposite to the substrate processing side. the

Next, the basic conveyance operation of the display panel module assembling apparatus as an embodiment of the present invention shown in FIGS. 16 and 18 will be described. the

In FIG. 16 , the substrate conveying member 11A is located below the substrate holding member 12A, and the substrate 10 being processed at this time is held by the substrate holding member 12A. However, in FIG. 16 , the substrate 10 is not shown. the

At the time of substrate conveyance, first, the substrate conveyance member 11A moves up and down by the substrate conveyance member elevating mechanism 14 . Thereby, the substrate 10 placed on the substrate holding member 12A is transferred to the substrate conveying member 11A. The substrate conveying mechanism 11 rises to a height at which the substrate conveying member 11A, which is a comb-tooth portion, does not collide with the substrate holding member 12A when moving in the conveying direction (X direction). The dotted line in FIG. 18 indicates the raised position of the substrate transport member 11A. Then, the substrate conveyance mechanism 11 conveys the substrate 10 to the next processing operation device position by the movement of the slider 29 in the X direction. The substrate transport mechanism 11A descends after moving to the next processing operation device position, thereby transferring the held substrate 10 to the substrate holding member 12A at the next operation position. The substrate conveying mechanism 11 moves on the guide rail 15 of the slider stage after lowering the substrate conveying member 11A as a comb-tooth portion to a height where it does not collide with the substrate holding member 12A, and moves the position back to the original substrate. 10 to accept the position. In FIG. 18 , the solid line indicates the descending position of the substrate conveying member 11A. the

Also in such a structure, the substrate 10 between the processing devices of the present invention can be sequentially and linearly moved from the substrate holding member 12A of the conveyance starting point to the substrate holding member 12A of the conveying end point, and a plurality of substrates 10 can be moved linearly. Synchronized, conveyed at the same time. the

However, in the structure of the present embodiment, as described above, it is necessary for the substrate conveyance member 11A as the comb-tooth portion to ascend or descend to a position avoiding the substrate holding member 12A as the comb-tooth portion. On the other hand, in FIG. 1 as the previous embodiment, the degree to which the substrate conveying member 11A separates the substrate 10 from the substrate holding member 12A is sufficient regardless of the height of the substrate holding member 12A. Therefore, in the structure of the embodiment of the present invention shown in FIGS. 16 and 18 , compared with the structure of the previous embodiment, before and after the substrate is transported, at least a large vertical direction (Z) greater than or equal to the height of the substrate holding member 12A is required. direction) to move the substrate transport member 11A. Therefore, there is a disadvantage that the moving time of the substrate 10 is likely to be longer than the structure of the embodiment shown in FIG. 1 . However, in other points, it is a configuration that satisfies the basic functions of the present invention. the

On the contrary, the structure of other embodiments of the present invention shown in FIG. 16 and FIG. 18 has a mechanism capable of disposing the mechanism parts of the substrate holding mechanism 12 and the substrate conveying mechanism 11 at a distance from the structure shown in the embodiment of FIG. 1 . Advantages such as location etc. are easy to make the structure simple. the

In addition, in the structure of the embodiment of the present invention shown in FIG. 16 and FIG. 18 , when the size of the substrate to be conveyed is large, the comb teeth portion of the single arm of the substrate holding member 12A and the substrate conveying member 11A becomes long. Therefore, in order to maintain the strength of the comb teeth, it is necessary to increase the thickness of the comb teeth in the Z direction. Therefore, it is difficult to say that it is a preferable structure when it is applied to the board|substrate 10 for large-scale televisions of several tens of inches or more. the

However, for example, in the case of a relatively small substrate 10 such as 20 inches or less, it is not necessary to increase the comb tooth portion so much, so the distance of moving up and down becomes small and the structure becomes simple, so it is an effective method of the present invention. implementation plan. the

17 and 19 are diagrams illustrating the structure of yet another embodiment of the display panel substrate conveyance device of the present invention. FIG. 19 is a diagram showing a side view (section B-B) of the structure of the display panel substrate conveying apparatus of FIG. 17 . the

In the structure of the example shown in FIGS. 17 and 19 , the portion of the substrate conveying mechanism 11 that supports the substrate conveying member 11A as a comb-tooth portion is arranged between the substrate holding mechanisms 12 . In addition, the substrate holding mechanism 12 is divided into two structures, which are arranged on the opposite side to the processing device 13 side. the

The substrate conveying operation in the embodiment structure of the display panel substrate conveying apparatus of the present invention shown in FIGS. 17 and 19 is basically the same as that described in FIGS. 16 and 18 , and thus is omitted. the

By adopting the embodiment structure of the display panel substrate conveying device of the present invention shown in FIGS. 17 and 19 , the cantilever lengths of the comb teeth of the substrate conveying member 11A and the substrate holding member 12A can be shortened. That is, a relatively thin comb structure can be applied, and the movement distance for suppressing the up-and-down movement during substrate transfer can be extremely short. That is, the structure of this embodiment is a structure that can easily cope with a large board compared with the embodiment shown in FIGS. 16 and 18 . However, of course, the structure is more complicated than that of the embodiment shown in Fig. 16 and Fig. 18 . the

By using the display panel substrate transfer device of the present invention as described above, it is possible to transfer substrates with high precision and high speed for substrates ranging from small to large substrates with a wide width. the

Furthermore, flexible substrate holding and conveying operations according to the size of the substrate can be performed, and in the display panel module assembly device of the present invention, the continuous processing of the substrate can be realized at the minimum width requiring each processing mechanism according to the size of the substrate. the

According to the present invention, it is possible to provide a display panel substrate conveying device and a display panel module assembling device using the same, which can convey and assemble large-sized substrates from small to large substrates, and further reduce the overall length of the device. the

Next, an embodiment of the present invention in which a substrate is stably transferred and conveyed in a display panel module assembly apparatus will be described with reference to FIGS. 20 to 38 . the

FIG. 20 shows in particular the parts related to the mechanism for conveying the panel, and details about the relevant circuit system, control system hardware/software, and the supply part or assembly part of the product circuit board assembled near the outer periphery of the display panel substrate 101. Not pictured. the

As the mechanism most associated with conveying, it includes conveying system and suction system. The suction system includes a suction pump 142 , and the suction pump 142 is connected to an air pipe 142 a of the substrate transport member 102 and to an air pipe 142 b of the substrate holding member 103 . Furthermore, on-off valves 143 for opening and closing air are provided in the pipes, respectively. In addition, the opening and closing of the on-off valve 143 is controlled by the suction switching controller 144, and a signal line is connected between the controller and the valve. the

On the other hand, the conveyance system equipment as a part of holding/conveying the panel includes: a substrate conveying member 102 that holds and conveys the display panel substrate 101; The respective members are provided with suction holes 107 on the surface of the substrate conveying member for suctioning the display panel substrate, and suction holes 8 on the surface of the substrate holding member. In addition, in the transfer system equipment, the transfer operation is controlled by the substrate transfer unit controller 145 . In addition, in the piping 142a to the substrate conveying member 102, in order not to cause insufficient piping length for the moving distance of the substrate conveying member, resulting in deviation of the piping or stress on the piping, telescopic piping is provided as an example in the figure. 142c is formed as a mechanism that does not affect the piping at all even if the substrate transport member moves. the

In addition, the substrate transfer unit controller 145 that controls the transfer operation of the substrate transfer member is connected to the suction switching controller 144 that controls the opening and closing of the suction valve through a signal line, so that the transfer operation and the suction switching timing are matched. the

FIG. 20-1 is a flowchart showing an operation state when the display panel substrate 101 is conveyed downstream from the display panel conveyance front 20-1a which is the current position for about one time. the

First, the display panel substrate 101 is located at [20-1a] which is the current position. Next, [20-1b] in which the substrate conveyance member starts to rise from below, releases the suction of the substrate holding member when the substrate conveyance member reaches the position of the display panel substrate, and simultaneously becomes [20-1c] in which suction of the substrate conveyance member starts. In addition, the substrate conveyance part further ascends from the substrate holding part in the state where the display panel substrate is sucked ([20-1d]), and the substrate conveyance member horizontally conveys in the direction of the destination ([20-1e]), and the display panel substrate is Convey horizontally to the target conveying position ([20-1f]). At the target position, the substrate conveying member 102 starts to descend ([20-1g]) while the display panel is being sucked, and when the display panel substrate reaches the position of the substrate holding member, the suction of the substrate conveying member is released and the substrate holding is started simultaneously. Attraction of member 103 ([20-1h]). Furthermore, the substrate conveying member is lowered than the substrate holding member ([20-1i]), the display panel substrate is adsorbed and fixed by the substrate holding member at the target conveying position, and one conveyance cycle ends ([20-1j]). Thereafter, by sequentially repeating the cycle, the display panel substrate is repeatedly conveyed until the target distance is reached. the

Furthermore, conveyance of the display panel substrate as an example will be described in detail using FIG. 20-2. the

The display panel module assembly device in Fig. 20-2 transports the display panel substrate 101 sequentially from the left to the right in Fig. 20-2, and at the same time performs various processing operations on the peripheral part of the substrate, and performs mounting and assembly operations such as IC or TAB. installation. Fig. 20-2 upper level a shows the state of large substrate transport and processing operations. The position moves from the position of the display panel substrate 101a to the position of the display panel substrate 101b and the position of the display panel substrate 101c in sequence. In the position of the display panel substrate 101a, processing jobs are accepted by the processing unit 116a and the processing unit 116b. In the position of the display panel substrate 101b, processing jobs are accepted by the processing unit 116c and the processing unit 116d. In addition, the processing units 116 such as the processing unit 116 a , the processing unit 116 b , the processing unit 116 c , and the processing unit 116 d have a moving device capable of moving on the guide rail 106 of the slider stage. Figure 20-2 lower stage b) shows the state during the transport and processing of small substrates. The position moves from the position of the display panel substrate 101d to the position of the display panel substrate 101e, the position of the display panel substrate 101f, the position of the display panel substrate 101g, the position of the display panel substrate 101h, and the position of the display panel substrate 101i. In the position of the display panel substrate 101d, a processing job is received by the processing unit 116a. In the position of the display panel substrate 101e, a processing job is received by the processing unit 116b. In the position of the display panel substrate 101f, a processing job is received by the processing unit 116c. In the position of the display panel substrate 101g, a processing operation is received by the processing unit 116d. In addition, the processing units 116 such as the processing unit 116 a , the processing unit 116 b , the processing unit 116 c , and the processing unit 116 d have a moving device capable of moving on the guide rail 106 of the slider stage. A moving device capable of moving the processing unit 116 on the guide rail 106 of the slider stage may be provided on the slider stage. the

In FIG. 20-2 , first, it shows how the substrate long side (source side) is processed by the processing unit 116a to the processing unit 116d which is a group of processing equipment on the substrate long side (source side). Thereafter, although not shown, the substrate is rotated by a rotating device, and then, the processing operation on the short side (gate side) of the substrate is performed. the

In addition, as shown in FIG. 20-2 , the transport mechanism for transporting the substrate 101 to the unit where these mountings are performed is shown by a substrate transport member 102 and a substrate holding member 103 . The elongated substrate holding member 103 in the substrate conveying direction has a structure in which a plurality of them are arranged in parallel in a straight line in the substrate conveying direction. In addition, it has a structure in which a plurality of substrate transport members 102 are arranged in parallel between the substrate holding members. the

In addition, the substrate conveying members arranged in parallel are integrally formed as a mechanism that moves and conveys the display panel substrate 101 held by the substrate holding member 103 horizontally after being raised to the position of the next processing device. the

Fig. 21 is a plan view showing the detailed structure of the substrate transfer section and its A-A sectional view. The section of the part shown in FIG. 22 shows how the conveying part rises and falls during conveying. Furthermore, as shown in FIG. 21 , suction holes are arranged at regular intervals on the surfaces of the holding member and the conveying member, and the display panel can be adsorbed to the substrate holding member or the substrate conveying member by negative pressure. the

In addition, in FIG. 21 , in order to illustrate the substrate conveyance member 102 or the substrate holding member 103 arranged therebelow, the small substrate arrangement region 9 and the large substrate arrangement region 110 are partly cut off, and their outlines are shown by dotted lines. On the substrate side of the substrate conveying member 102 or the substrate holding member 103 , suction holes 107 on the surface of the substrate conveying member and suction holes 108 on the surface of the substrate holding member are provided. After the processing operation of the substrate by each processing operation device is completed, the substrate conveying member 102 is raised to lift the display panel substrate placed on the substrate holding member 103 by a small amount, and then, the substrate is moved along the gap between the substrate holding member 103 The display panel substrate can be slid in the direction to be transported to the next job processing device. As a slide device for sliding the substrate transport member, although not shown, a general slider stage mechanism using a linear motor, a ball screw, or the like can be applied. In addition, as shown in the lower A-A sectional view of FIG. 21, a suction chamber 111 under the suction hole, an on-off valve 112, and a negative pressure system 113 supplied from a suction pump or the like are provided. the

The substrate conveying member 102 has a plurality of substrate conveying members arranged in a gap between the substrate holding members 103 , and these substrate conveying members are integrated, and the substrate conveying member 102 rises and falls relative to the substrate holding member 103 . the

The conveyance direction of the board|substrate in FIG. 22 is a direction perpendicular|vertical to a paper surface. The substrate conveyance member 102 that conveys the substrate to the next conveyance processing position is lowered by a substrate conveyance member elevating device 105 capable of raising and lowering the substrate conveyance member 102 . The substrate transport member elevating device 105 is formed on the slider 115 of the slider stage on the guide rail 106 of the slider stage, thereby enabling the display panel substrate 101 to be transferred to the substrate holding member 103 of the next processing operation device 4 . Move up and transfer the substrate. The left side of Fig. 3 shows the positional relationship during each processing operation, and the right side of Fig. 22 shows the positional relationship during substrate transportation. The substrate conveying member 102 that transfers the display panel substrate 101 onto the substrate holding member 103 returns to the original position of the processing operation device in a lowered state. By performing this operation synchronously between adjacent processing operation devices 104 , the display panel substrate 101 can be sequentially and continuously transported to the position of the downstream processing operation device 104 . the

In addition, before and after the substrate conveying member 102 is slid and conveyed by a predetermined amount in the horizontal direction, it is necessary to separate the substrate holding member 103 from the display panel substrate 101 when the substrate conveying member 102 is raised and lowered in the vertical direction. or keep it. The sequence of switching the suction and the sequence of the transport operation during transport will be described later. the

23a) shows the transfer of the display panel substrate 101 from the substrate transport member 102 to the substrate holding member 103, and FIG. 23b) shows the transfer of the display panel substrate 101 from the substrate holding member to the substrate transport member 102. When the display panel substrate 101 is transferred, if the suction force on the transfer side remains in the suction hole 7 on the surface of the substrate conveying member or the suction hole 108 on the surface of the substrate holding member, stress is applied to the display panel substrate 101 as shown in FIG. 23 . Therefore, as a result, problems such as cracking of the display panel substrate 101 or remaining suction marks occur. the

FIG. 24 is a diagram showing an optimal change in the adsorption force of the fixing unit and the transport unit and a sequence of transfer operations when the display panel substrate is transferred in the display panel substrate transport using the suction transport mechanism shown in FIGS. 20 to 23 . In addition, in Fig. 24, it is shown that the position of the display panel substrate is first located at the fixed part, and secondly, the movable part rises to receive it, and then, after the movable part is horizontally conveyed for an appropriate distance along the conveying direction, the movable part descends and descends. The operation up to the time of one transfer is completed to a new fixed part of the transfer destination. the

Next, the timing of the strong and weak attraction of the fixed part and the movable part, the switching of zero, and the rising position, panel transfer position, and lowering position of the movable part operation will be described in more detail. As described above, in the figure, the display panel is initially adsorbed and held by the fixing portion. Next, in order to transfer the display panel to the movable part, the adsorption force for holding the display panel by the fixing part is weakened. At the same time, in order to receive from the fixed part, the attractive force of the movable part is improved. Corresponding to the timing 118 when both the attractive forces of the fixed part and the movable part are weakened, the movable part is raised from the lowered position to the panel transfer position at the same height as the fixed part. In sequence, the display panel is sucked and held by both the fixed part and the movable part. Furthermore, as the movable portion continues to rise, the display panel is separated from the fixed portion. At this stage, the suction force of the movable portion rises to a strong level, so that the display panel does not cause positional displacement even if it is transported horizontally. On the other hand, the reduction of the suction force of the fixed part can avoid using useless suction air at the parts that do not need to be sucked. the

Also, after the movable part is horizontally transported to the target position, the movable part is lowered in order to attract and fix the display panel to the fixed part at the target position, but this time, contrary to the previous description, the movable part for holding the panel is weakened. At the same time, in order to receive the display panel from the movable part, the attractive force of the fixed part is improved. In addition, in accordance with the sequence 119 when both the attractive forces of the movable part and the fixed part are weakened, the movable part is lowered to the panel transfer position at the same height as the fixed part. That is, in the sequence of reference numeral 119 , the display panel is sucked and held by both the movable part and the fixed part. Furthermore, the movable part continues to descend, whereby the display panel stays in the fixed part, and the display panel is separated from the movable part. Also, at that stage, the attractive force of the fixing portion rises to a strong level, and the display panel is firmly fixed by suction. In addition, by reducing the suction force of the movable part after the conveyance is completed, useless suction air can not be used at a site that does not require suction. In this way, display panel transportation is performed once. By continuously performing this operation, the display panel is continuously transported from upstream to downstream. the

In this embodiment, the panel is transferred from the fixed part to the movable part or from the movable part to the fixed part at the timing when the suction pressure of the fixed part and the movable part becomes weak, so that the following effects can be expected: Due to the effect of the remaining adsorption force, the position of the panel does not shift, and due to the weak suction effect, when the panel is peeled off from the suction pad during transfer, problems such as panel cracking do not occur. The mode in FIG. 34 described later is the best mode, but it is the second best mode if the timing can be matched. the

Next, an example will be described in which the timing of reducing the suction pressure on the transfer panel side is delayed. the

FIG. 25 shows a sequence of transfer operations when the time for the weakening of the adsorption force of the portion holding the display panel is delayed during transfer of the display panel substrate using the suction transfer mechanism shown in FIGS. 20 to 23 . . In addition, in Fig. 25, it is shown that the position of the display panel substrate is first at the fixed part, and secondly, the movable part rises to receive, and then, after the movable part is conveyed horizontally for an appropriate distance along the conveying direction, the movable part descends, Lower down to the new fixed part of the delivery destination, and complete the operation until the first transfer. the

Furthermore, the timing of the strong, weak, and 0 switching of the suction force of the fixed part and the movable part, and the ascending position, panel transfer position, and descending position of the movable part operation will be described in detail. As described above, in the figure, the display panel is initially held by suction on the fixing portion. In order to receive the display panel from the fixed part, the attractive force of the movable part is increased, and it is raised from the lowered position. However, at this time, the attractive force of the fixed portion of the display panel is still strong, and the relationship between the attractive forces of the fixed portion and the movable portion at that time is 120. In addition, corresponding to the sequence, the movable part is raised from the lowered position at the same height as the fixed part, and it is raised to the panel transfer position. In the sequence of 120, both the fixed part and the movable part are sucked and held display panel. Furthermore, after that, the suction force of the movable part of the display panel is raised to a strong level, and horizontal transportation is performed as described above. the

In addition, after being horizontally conveyed to the target position by the movable part, the movable part is lowered in order to attract and fix the display panel to the fixing part at the target position. Contrary to the previous description this time, the movable part directly descends with a strong suction force for holding the panel, and descends to the panel transfer position at the same height as the fixed part. That is, at the sequence of 121, both the movable part and the fixed part suck and hold the display panel. the

In this embodiment, the panel is transferred from the fixed part to the movable part while the suction pressure of the fixed part is still strong, and the panel is transferred from the movable part to the fixed part while the suction pressure of the movable part is still strong. panel. In both cases, due to the effect that the adsorption force remains strongly on the transfer side, even if vibration such as vibration occurs, the effect of not causing positional displacement of the panel can be expected compared with the embodiment of FIG. 24 . It would be the best form if it can be combined with another mechanism that utilizes the residual pressure of adsorption to prevent cracking or bending of the panel. the

Next, an example in which the timing of reducing the suction pressure on the side of the transfer panel is advanced will be described. the

FIG. 26 shows a sequence of transfer operations when the timing of the weakening of the adsorption force of the portion holding the display panel is advanced when the display panel substrate is transferred in the display panel substrate transfer using the suction transfer mechanism shown in FIGS. 20 to 23 . . In addition, in Fig. 26, it is shown that the position of the display panel substrate is first at the fixed part, and secondly, the movable part rises to receive, and then, after the movable part is conveyed horizontally for an appropriate distance along the conveying direction, the movable part descends, Lower down to the new fixed part of the delivery destination, and complete the operation until the first transfer. the

Furthermore, the timing of the strong, weak, and 0 switching of the suction force of the fixed part and the movable part, and the ascending position, panel transfer position, and descending position of the movable part operation will be described in detail. As described above, in the figure, the display panel is initially held by suction on the fixing portion. In order to receive the display panel from the fixed part, the attractive force of the movable part is increased, and it is raised from the lowered position. However, at this time, the attractive force of the fixed portion holding the display panel is already weak, and the relationship between the attractive forces of the fixed portion and the movable portion at this moment is 122. In addition, corresponding to the sequence, the movable part is raised from the lowered position at the same height as the fixed part, and raised to the panel transfer position, and in the sequence of 122, both the fixed part and the movable part are sucked and held. display panel. Furthermore, then, the attraction force of the fixing part that has received the display panel rises to a strong level, and it is horizontally conveyed as described above. the

In addition, after being horizontally conveyed to the target position by the movable part, the movable part is lowered in order to attract and fix the display panel to the fixing part at the target position. This time, contrary to the previous description, the movable part directly descends with the weak adsorption force of the movable part holding the panel, and descends to the panel transfer position at the same height as the fixed part. That is, at the sequence of 123, both the movable part and the fixed part suck and hold the display panel. the

In this embodiment, the panel is transferred from the fixed part to the movable part when the suction pressure of the fixed part is already weak, and the panel is transferred from the movable part to the fixed part when the suction pressure of the movable part is already weak. panel. In both cases, since there is no effect of adsorption force on the transfer side, the effect of not causing cracks or bending in the panel can be further expected compared to the embodiment of FIG. 24 . It would be the best mode if it can be combined with a mechanism for another application that does not cause the panel to shift in position during transfer. the

Next, an example in which the timing of reducing the suction pressure on the transfer panel side is delayed and the timing of reducing the suction pressure on the transferred side is advanced will be described. the

27 shows a sequence of transfer operations when the time for the weakening of the adsorption force of the portion holding the display panel is delayed when the display panel substrate is transferred in the display panel substrate transfer using the suction transfer mechanism shown in FIGS. 20 to 23 . . In addition, in Fig. 27, it is shown that the position of the display panel substrate is first at the fixed part, and secondly, the movable part rises to accept, and then, after the movable part is conveyed horizontally for an appropriate distance along the conveying direction, the movable part descends, Lower down to the new fixed part of the delivery destination, and complete the operation until the first transfer. the

Furthermore, the timing of the strong, weak, and 0 switching of the suction force of the fixed part and the movable part, and the ascending position, panel transfer position, and descending position of the movable part operation will be described in detail. As described above, in the figure, the display panel is initially held by suction on the fixing portion. In order to receive the display panel from the fixed part, the movable part is raised from the lowered position. However, at this time, the attractive force of the fixed portion holding the display panel is still strong, and the attractive force of the movable portion is still strong. In this case, the relationship between the attractive forces of the fixed part and the movable part is 124. Also, corresponding to the sequence, the movable part is raised from the lowered position to the same height as the fixed part to the panel transfer position, and at sequence 124, only the fixed part absorbs and holds the display panel. Furthermore, after that, the suction force of the movable part which received the display panel is raised, and it conveys horizontally as mentioned above. the

Also, after the movable part is horizontally transported to the target position, the movable part is lowered in order to attract and fix the display panel to the fixed part at the target position. Contrary to the previous description this time, the movable part directly descends with a strong suction force for holding the panel, and descends to the panel transfer position at the same height as the fixed part. That is, in the sequence of 125 , the movable part absorbs and holds the display panel. the

In this embodiment, the panel is transferred from the fixed part to the movable part while the suction pressure of the fixed part is still strong, and the panel is transferred from the movable part to the fixed part while the suction pressure of the movable part is still strong. panel. In both cases, due to the effect that the adsorption force remains strongly on the transfer side, even if vibration or the like occurs, it can be expected that the position of the panel will not be shifted compared with the embodiment of FIG. 24 . It is the most optimal form if a mechanism for another purpose that prevents cracking or bending of the panel by utilizing the residual pressure of adsorption and a mechanism for preventing positional displacement of the panel on the transfer side can be combined. the

Next, an example in which the timing of reducing the suction pressure on the transfer panel side is advanced and the timing of reducing the suction pressure on the transferred side is delayed will be described. the

FIG. 28 shows a sequence of transfer operations when the time for the weakening of the adsorption force of the portion holding the display panel is delayed when the display panel substrate is transferred in the display panel substrate transfer using the suction transfer mechanism shown in FIGS. 20 to 23 . . In addition, in Fig. 28, it is shown that the position of the display panel substrate is first at the fixed part, and secondly, the movable part rises to receive, and then, after the movable part is conveyed horizontally for an appropriate distance along the conveying direction, the movable part descends, Lower down to the new fixed part of the delivery destination, and complete the operation until the first transfer. the

Furthermore, the timing of the strong, weak, and 0 switching of the suction force of the fixed part and the movable part, and the ascending position, panel transfer position, and descending position of the movable part operation will be described in detail. As described above, in the figure, the display panel is initially held by suction on the fixing portion. In order to receive the display panel from the fixed part, the movable part is raised from the lowered position. However, at this time, the attractive force of the fixed portion holding the display panel is already weak, and the attractive force of the movable portion is already strong. At this time, the relationship between the attractive forces of the fixed part and the movable part is 126. Also, corresponding to the sequence, the movable part is raised from the lowered position to the same height as the fixed part to the panel transfer position, and at the sequence of 126, only the movable part is sucked and held to hold the display panel. However, since the attraction of the fixing portion is already weak, the display panel moves away from the fixing portion while shifting its position. As a result, there is a high possibility that the position of the display panel transferred to the movable unit will be misaligned. Furthermore, since the attraction force of the movable part of the display panel is already strong, it is kept in its original state and horizontally conveyed as described above. the

Also, after the movable part is horizontally transported to the target position, the movable part is lowered in order to attract and fix the display panel to the fixed part at the target position. This time, contrary to the previous description, the movable part directly descends with the weak adsorption force of the movable part holding the panel, and descends to the panel transfer position at the same height as the fixed part. the

In this embodiment, the panel is transferred from the fixed part to the movable part in the sequence 127 when the suction pressure of the fixed part is already weak, and the panel is transferred from the movable part to the fixed part in the sequence 127 when the suction pressure of the movable part is already weak. transfer panel. In both cases, since there is no effect of adsorption force on the transfer side, the effect of not causing cracks or bending in the panel can be further expected compared to the embodiment of FIG. 24 . It would be the best mode if it can be combined with a mechanism for another application that does not cause the panel to shift in position during transfer. the

Next, an example in which transfer is performed without setting the suction pressure on the transfer side to zero with respect to the embodiment shown in FIG. 24 will be described. the

FIG. 29 shows the most ideal fixing part and conveyance shown in FIG. Changes in the adsorption force of the part and the timing of the transfer operation, do not set the suction level to zero as a characteristic state. the

In this embodiment, the panel is transferred from the fixed part to the movable part or from the movable part to the fixed part at the timing when the suction pressure of the fixed part and the movable part becomes weak, so that the following effects can be expected: Due to the effect of the remaining adsorption force, the position of the panel does not shift, and due to the weak suction effect, when the panel is peeled off from the suction pad during transfer, problems such as panel cracking do not occur. The form of FIG. 34 described later is the best form, but it is possible to correspond to the timing, and the suction air is not always set to zero. Therefore, when the capacity of the pump generating suction pressure is large or the amount of suction air used is small, Second best way. the

Next, an example in which the timing of reducing the suction pressure on the transfer panel side is advanced will be described. the

30 shows a sequence of transfer operations when the timing of weakening the adsorption force of the portion holding the display panel is advanced when the display panel substrate is transferred in the display panel substrate transfer using the suction transfer mechanism shown in FIGS. 20 to 23 . . In addition, in Fig. 30, it is shown that the position of the display panel substrate is first at the fixed part, and secondly, the movable part rises to receive, and then, after the movable part is conveyed horizontally for an appropriate distance along the conveying direction, the movable part descends, Lower down to the new fixed part of the delivery destination, and complete the operation until the first transfer. the

Furthermore, the timing of the strong, weak, zero switching of the fixed part and the movable part's attractive force, and the rising position, panel transfer position, and lowering position of the movable part operation will be described in detail. As described above, in the figure, the display panel is initially held by suction on the fixing portion. In order to receive the display panel from the fixed part, the movable part is raised from the lowered position. However, at this time, the attractive force of the fixed portion holding the display panel is already weak, and the attractive force of the movable portion is already weak. At this time, the relationship between the attractive forces of the fixed part and the movable part is 130. Also, corresponding to the sequence, the movable part is raised from the lowered position to the same height as the fixed part to the panel transfer position, and at the sequence of 130, the display panel is sucked and held by the fixed part and the movable part. the

In addition, after being horizontally conveyed to the target position by the movable part, the movable part is lowered in order to attract and fix the display panel to the fixing part at the target position. Both the movable part holding the panel and the fixed part receiving the panel are in a state where the suction force is already weak, and the movable part is lowered to the panel transfer position at the same height as the fixed part. That is, at the sequence of 131, both the movable part and the fixed part suck and hold the display panel. The movable part has already lost its holding force when it is lowered, so when it is transferred to the fixed part, it is transferred smoothly. the

In this embodiment, since the panel is transferred from the fixed part to the movable part or from the movable part to the fixed part in the timing when the suction pressure of the fixed part is weak, it can be expected that the effect of the remaining suction force will not cause any damage. Due to the positional displacement of the panel, and due to the weak suction effect, when the panel is peeled off from the suction pad at the time of transfer, there is a very good effect that problems such as panel cracking do not occur. The form of FIG. 34 described later is the best form, but the suction air is not always set to zero, so it is the second best form when the capacity of the pump generating the suction pressure is large or the amount of suction air used is small. . the

Next, an example of a mode in which the suction pressure is weakened with a delay in the timing of weakening the suction pressure on the side of the transfer panel will be described. the

31 shows a sequence of transfer operations when the time for the weakening of the adsorption force of the portion holding the display panel is delayed when the display panel substrate is transferred in the display panel substrate transfer using the suction transfer mechanism shown in FIGS. 20 to 23 . . In addition, in Fig. 31, it is shown that the position of the display panel substrate is first at the fixed part, and secondly, the movable part rises to receive, and then, after the movable part is conveyed horizontally for an appropriate distance along the conveying direction, the movable part descends, Lower down to the new fixed part of the delivery destination, and complete the operation until the first transfer. the

Furthermore, the timing of the strong, weak, and 0 switching of the suction force of the fixed part and the movable part, and the ascending position, panel transfer position, and descending position of the movable part operation will be described in detail. As described above, in the figure, the display panel is initially held by suction on the fixing portion. In order to receive the display panel from the fixed part, increase the attractive force of the movable part, and raise it from the lowered position. However, at this time, the attractive force of the fixed portion of the display panel remains strong, and the relationship between the attractive forces of the fixed portion and the movable portion at this time is 123. In addition, corresponding to the sequence, the movable part is raised from the lowered position at the same height as the fixed part, and raised to the panel transfer position, and at the sequence of 132, both the fixed part and the movable part are sucked and held. display panel. However, if the movable part continues to rise in the original state, the attraction of the fixed part remains strong, and therefore the display panel is unreasonably separated from the fixed part. As a result, cracking or warping may occur in the display panel. Furthermore, after that, the suction force of the fixed part which has received the display panel is raised to a strong level, and the horizontal transport is carried out as described above. the

In addition, after being horizontally conveyed to the target position by the movable part, the movable part is lowered in order to attract and fix the display panel to the fixing part at the target position. This time, contrary to the previous description, the movable part directly descends in a state where the adsorption force of the movable part holding the panel is strong, and descends to the panel transfer position at the same height as the fixed part. That is, at the sequence of 133, both the movable part and the fixed part suck and hold the display panel. the

In this embodiment, the panel is transferred from the fixed part to the movable part while the suction pressure of the fixed part is still strong, and the panel is transferred from the movable part to the fixed part while the suction pressure of the movable part is still strong. panel. In both cases, due to the effect that the adsorption force remains strongly on the transfer side, even if vibration or the like occurs, it can be expected that the position of the panel will not be shifted compared with the embodiment of FIG. 5 . Combined use of the remaining pressure of adsorption to prevent cracking or bending of the panel. In addition, the suction air is not always set to zero, so the capacity of the pump that generates the suction pressure is large or the amount of suction air used is small. case is the best way. the

Next, an example of a mode in which the suction pressure is weakened with a delay in the timing of weakening the suction pressure on the side of the transfer panel will be described. the

32 shows a sequence of transfer operations when the time for the weakening of the adsorption force of the portion holding the display panel is delayed when the display panel substrate is transferred using the suction transfer mechanism shown in FIGS. 20 to 23 . . In addition, in Fig. 32, it is shown that the position of the display panel substrate is first at the fixed part, and secondly, the movable part rises to receive, and then, after the movable part is conveyed horizontally for an appropriate distance along the conveying direction, the movable part descends, Lower down to the new fixed part of the delivery destination, and complete the operation until the first transfer. the

Furthermore, the timing of the strong, weak, and 0 switching of the suction force of the fixed part and the movable part, and the ascending position, panel transfer position, and descending position of the movable part operation will be described in detail. As previously explained, in the figure, the display panel is initially held by adsorption on the fixing portion. In order to receive the display panel from the fixed part, it is raised from the lowered position in a state where the attractive force of the movable part is weak. However, at this time, the attractive force of the fixed portion of the display panel remains strong, and the relationship between the attractive forces of the fixed portion and the movable portion at this time is 134. In addition, corresponding to the sequence, the movable part is raised from the lowered position at the same height as the fixed part, and raised to the panel transfer position, and at the sequence of 134, both the fixed part and the movable part are sucked and held. display panel. However, if the movable part continues to rise in the original state, the attraction of the fixed part remains strong, and therefore the display panel is unreasonably separated from the fixed part. As a result, cracking or warping may occur in the display panel. Furthermore, after that, the suction force of the movable part having received the display panel is increased to a strong level, and the horizontal conveyance is carried out as described above. the

In addition, after being horizontally conveyed to the target position by the movable part, the movable part is lowered in order to attract and fix the display panel to the fixing part at the target position. This time, contrary to the previous description, the movable part directly descends with a strong suction force for holding the panel, and descends to the panel transfer position at the same height as the fixed part. That is, at the sequence of 135, both the movable part and the fixed part suck and hold the display panel. the

In this embodiment, similarly to the above, the panel is transferred from the fixed part to the movable part while the suction pressure of the fixed part is still strong, and the panel is transferred from the movable part while the suction pressure of the movable part is still strong. The moving part transfers the panel to the fixed part. In both cases, due to the effect that the adsorption force remains strongly on the transfer side, even if vibration or the like occurs, it can be expected that the position of the panel will not be shifted compared with the embodiment of FIG. 24 . Combined use of the remaining pressure of adsorption to prevent cracking or bending of the panel. In addition, the suction air is not always set to zero, so the capacity of the pump that generates the suction pressure is large or the amount of suction air used is small. case is the best way. the

Next, an example of a mode in which the timing of weakening the suction pressure on the side of the transfer panel is advanced and the suction pressure is weak will be described. the

33 shows a sequence of transfer operations when the time for the weakening of the adsorption force of the portion holding the display panel is delayed when the display panel substrate is transferred in the display panel substrate transfer using the suction transfer mechanism shown in FIGS. 20 to 23 . . In addition, in Fig. 33, it is shown that the position of the display panel substrate is first at the fixed part, and secondly, the movable part rises to receive, and then, after the movable part is horizontally conveyed for an appropriate distance along the conveying direction, the movable part descends, Lower down to the new fixed part of the delivery destination, and complete the operation until the first transfer. the

Furthermore, the timing of the strong, weak, and 0 switching of the suction force of the fixed part and the movable part, and the ascending position, panel transfer position, and descending position of the movable part operation will be described in detail. As described above, in the figure, the display panel is initially held by suction on the fixing portion. In order to receive the display panel from the fixed part, the attractive force of the movable part is increased, and it is raised from the lowered position. However, at this time, the attraction force of the fixed part holding the display panel is still weak, and the relationship between the attraction force of the fixed part and the movable part at this time is 136. In addition, corresponding to the sequence, the movable part is raised from the lowered position at the same height as the fixed part, and raised to the panel transfer position, and at the sequence of 136, both the fixed part and the movable part are sucked and held. display panel. In addition, if the movable part continues to rise in the original state, the display panel will move away from the fixed part. Furthermore, thereafter, the movable portion having received the display panel is horizontally conveyed as described above. the

In addition, after being horizontally conveyed to the target position by the movable part, the movable part is lowered in order to attract and fix the display panel to the fixing part at the target position. This time, contrary to the previous description, the adsorption force of the movable part holding the panel is already weak, and the movable part descends to the panel transfer position at the same height as the fixed part. That is, at the sequence of 137, both the movable part and the fixed part suck and hold the display panel. the

In this embodiment, since the panel is transferred from the fixed part to the movable part or from the movable part to the fixed part at the timing when the suction pressure of the fixed part is weak, it can be expected that the effect of the remaining suction force will not be reduced. Due to the positional displacement of the panel, and due to the weak suction effect, when the panel is peeled off from the suction pad at the time of transfer, there is a very good effect that problems such as panel cracking do not occur. The form of FIG. 34 described later is the best form, but the suction air is not always set to zero, so it is the second best form when the capacity of the pump generating the suction pressure is large or the amount of suction air used is small. . the

Next, the most preferable form among the examples described so far will be described. the

FIG. 34 shows a sequence of the adsorption transport mechanism for solving the problems of FIGS. 24 to 33 described so far. In addition, in Fig. 34, it is shown that the position of the display panel substrate is first at the fixed part, and secondly, the movable part rises to receive, and then, after the movable part is conveyed horizontally for an appropriate distance along the conveying direction, the movable part descends, Lower down to the new fixed part of the delivery destination, and complete the operation until the first transfer. the

Furthermore, the timing of the strong, weak, and 0 switching of the suction force of the fixed part and the movable part, and the ascending position, panel transfer position, and descending position of the movable part operation will be described in detail. As described above, in the figure, the display panel is initially held by suction on the fixing portion. In order to receive the display panel from the fixed part, the attractive force of the movable part is increased, and it is raised from the lowered position. At the same time, the attractive force of the fixed portion of the display panel is kept weak at this time, and the relationship between the attractive force of the fixed portion and the movable portion at this time is 138. In order to expand the transfer timing of the method shown in FIG. 24 , in this method, a time width is provided at the weak level of the portion holding the display panel. In addition, corresponding to the sequence, the movable part is raised from the lowered position at the same height as the fixed part, and raised to the panel transfer position, and at the sequence of 138, both the fixed part and the movable part are sucked and held display panel. In addition, if the movable part continues to rise in the original state, the display panel will be separated from the fixed part, but no crack or warp will occur on the display panel. Furthermore, after that, the suction force of the movable part having received the display panel is increased to a strong level, and the horizontal conveyance is carried out as described above. the

In addition, after being horizontally conveyed to the target position by the movable part, the movable part is lowered in order to attract and fix the display panel to the fixing part at the target position. Contrary to the previous description, the movable part descends in a state in which the adsorption force of the movable part holding the panel is weak, and descends to the panel transfer position at the same height as the fixed part. That is, at the sequence of 139, both the movable part and the fixed part suck and hold the display panel. Furthermore, the movable part continues to descend, and the display panel is transferred smoothly. In this way, in the timing sequence of FIG. 34, the possibility of causing a problem of cracking or bending during transfer is low. As shown in FIG. The effect of reducing the consumption of suction air. the

FIG. 35 is a comparative example of an air intake system. The suction pad 140 is piped from the pump P, and the suction force of the suction pad 140 is generated and released by opening and closing the valve. In this method, of course, the longer the piping, the worse the opening and closing of the valve and the suction force responsiveness of the adsorption pad. When actually installed in the device, it is difficult to arrange it at a short distance from the pump to the adsorption part through the valve. the

In the case of transferring the display panel from the fixed part to the movable part like the previous devices, or transferring the display panel from the movable part to the fixed part with a delay in the operation, the time at the time of transfer also becomes longer. Therefore, in FIG. 35 There is also no problem with follow-up delays in ways that either strengthen or weaken the appeal. However, in the case of a high-speed conveying line, in the original state of the comparison method, it is very difficult to optimally match the timing of transfer and the timing of the strength of suction as described in FIGS. 24 to 28. occur. the

Therefore, a means for solving this problem is shown in FIG. 36 . This means that the timings 138 and 139 of the weak suction in FIG. 34 described earlier can achieve optimal correspondence with the timing of the transfer operation without being affected by the length of the piping from the pump as the above-mentioned problem. structure. In Fig. 36, the suction pad 140 is piped from the pump P, and the suction force of the suction pad 140 is generated and released by opening and closing the valve. Furthermore, in order to weaken the suction, the release valve 141 provided in the chamber is opened. In this way, the adsorption force of the adsorption pad 140 can be weakened in a short time. In the case of this method, the adsorption force of the adsorption pad does not change during the opening and closing of the valve, so that there is no problem even if the distance from the pump to the adsorption part via the valve becomes longer when the device is actually installed. Next, the result of verifying that the suction pressure can be weakened by opening and closing the on-off valve 141 will be described. the

FIG. 37 is a graph showing the results of an experiment in which the suction pressure was reduced all at once by opening the on-off valve 141 . The surface of the display panel is in close contact with all 70 adsorption pads, that is, when the adsorption pads are completely closed, the suction pressure generated by the pump is maintained, and each adsorption pad generates a target suction force. Secondly, it can be seen that if one adsorption pad is intentionally opened to the atmosphere, the suction pressure generated by the pump is reduced to about half at once. Furthermore, it can be seen that the weakened suction pressure also changes as a plurality (seven in the figure) are intentionally released to the atmosphere. Utilizing this characteristic, there is a release valve near the suction pad, and only by opening the release valve corresponding to one suction pad, it is possible to easily create an optimal weak suction state during the display panel transfer operation. the

On the other hand, when the display panel is adsorbed and fixed by the suction pad, if the panel has large warping or local unevenness, etc., and foreign matter such as debris is attached, the suction pad that should be in contact with the part and the display panel will not contact each other. In normal close contact, the part of the suction pad that is incompletely touched cannot maintain the suction pressure, and as a result, the suction pressure is lowered to near the atmospheric pressure. the

Therefore, a suction mechanism devised to solve the problem is shown in FIG. 38 . The figure shows a schematic sectional view and a plan view of a mechanism part. In addition, the structure of FIG. 38 is an example, and the number of chambers etc. in a figure are not limited to this. the

FIG. 38 shows a collective suction unit at a certain location, and the chambers for maintaining the suction pressure are divided into three types: A series, B series, and C series. In addition, the respective chambers are connected by thin hoses or thin pipes. A suction pump is connected to the connected destination, and suction pressure is generated in each adsorption pad by the suction pump. In addition, each chamber is provided with a release valve 141 for instantaneously changing the pressure inside the chamber, and the suction pressure of each adsorption pad can be switched between strong and weak by opening and closing the release valve 141 . the

The mechanism shown in this Figure 38 has two effects. First, when the display panel is adsorbed by the suction pad, local unevenness or height difference occurs in a part of the suction pad, or debris is caught, and suction errors occur, causing the suction pressure of the part to drop to close to atmospheric pressure. As a result, , the overall suction pressure of the chamber where the adsorption pad is fixed decreases, and the overall adsorption force of the adsorption pad provided with the chamber decreases, and because the piping connecting the chambers is thin, a large pressure is generated between the chambers Losses, therefore, prevent pressure fluctuations caused in one chamber from simultaneously affecting other chambers. Second, since the suction pads installed in the A series, B series, and C series are arranged adjacent to each other, even if a drop in the suction pressure occurs in any one of the chambers, a sudden pressure drop does not occur in the adjacent pads. Attracting the panels, therefore, has the effect of increasing the possibility of re-adsorption. the

As described above, by using the display panel substrate conveying device of the present invention, it is possible to prevent accidents in which cracks or suction marks remain on the display panel substrate due to the application of more than necessary suction pressure during substrate conveyance, or display panel damage caused by insufficient suction force. In addition, in order to transport substrates at high speed and speed up the transfer sequence, the suction pressure time suitable for transfer is also set to a certain time to obtain a limit, so that the transfer can be performed stably. the

Furthermore, it is possible to provide a display panel substrate transfer device and a display panel module assembly device using the same, which can suppress the occurrence of drop-off of the display panel substrate due to suction errors by taking advantage of the division of the suction system and the effects of those pressure loss connections. the

Also, a feature of the present invention resides in pressure variation of the suction portion. Also, although not shown in the figure, the same effect can be expected by optimally reducing the suction pressure in the timing of the transfer in the mechanism for transferring the display panel substrate using the comb blade, so it is applicable. the

As described above, the object of the present invention is to solve the problem that, for example, in a display panel module assembling apparatus, when the panel is transferred in a state where the suction force on the transfer side remains, stress is applied to the panel, causing There are problems such as cracking or residual adsorption marks. In addition, in the case of weak transfer, position shift occurs, or adsorption falls off, and floating from the adsorption part occurs due to the warping of the panel itself. Therefore, for example, by reducing the suction force when the display panel is transferred during substrate transportation to a weak mode, stress is also applied to the panel, and the suction does not come off. Also, specifically, by opening the suction system using the release valve, it is possible to easily create a stable weak suction mode. Furthermore, since the weak stage suction pressure can be controlled using the opening time of the relief valve, even if the speed is increased, the control is easy. the

Furthermore, by dividing the suction system and connecting each of them to generate pressure loss, and arranging the suction pads or suction holes of those other systems close to each other, even if an adsorption error occurs in a certain system, the pressure of the other system can be delayed by the pressure loss. As a result, the effect of preventing the panel from coming off can be expected. the

In addition, the display panel module assembling device is a device for mounting driver ICs, TABs, PCB substrates, etc. on the periphery of the display panel substrate by sequentially performing a plurality of processing steps on the display panel substrate of the FPD such as plasma. the

For example, as an example of the processing process, it includes: (1) a terminal cleaning process of removing the TAB attached part at the edge of the substrate; (2) attaching an anisotropic conductive film (ACF=Anisotropic Conductive Film) ) ACF process, (3) Mounting process of mounting TAB or IC at the position where ACF is attached, aligning with substrate wiring, (4) mounting TAB by thermocompression bonding, and fixing with ACF film , (5) Inspection process of inspecting the position or connection state of the mounted TAB or IC, (6) PCB process (multiple processes) of attaching and mounting the TAB on the side opposite to the display panel substrate side using ACF, etc. Furthermore, depending on the number of sides of the substrate to be processed, the number of TABs or ICs to be processed, and the like, the number of processing apparatuses, processing units for rotating the substrate, and the like are required. the

In the display panel module assembly apparatus, processing devices for performing these processing steps are arranged in series, substrates are conveyed between them by a substrate conveying mechanism, and peripheral processing of the substrates is performed. the

As the structure of each processing operation device, as described in Japanese Patent Application Laid-Open No. 8-26475, it is formed to include a work table for performing each processing work and a mechanism for sending and receiving a display panel substrate to and from the work table. also may. In this structure, the workbench carrying the display panel substrate holds the display panel substrate and can adjust the width, length, and horizontal rotation direction of the substrate. The workbench is used to position the processing position of the display panel substrate and perform each process. Homework is also available. the

Also, as described in JP 2007-99466 A, a comb-toothed arm capable of moving the display panel substrate in three axes and horizontal rotation directions may be arranged in each processing device. As with this configuration, the operation of transferring the display panel substrate and the positioning operation of the processing position of the display panel substrate may be performed by using the comb-toothed arm provided in each processing operation device. the

Furthermore, as described in Japanese Patent Application Laid-Open No. 2003-76290, a display panel support table may be arranged between a pair of conveying mechanisms like belt conveyors, and the display panel substrate may be deposited using the display panel support table. A method for handling positioning actions for a position. the

The accompanying drawings are supplemented as follows. FIG. 29 shows the case where the adsorption level is set to be weak and transferred, FIG. 30 shows the case where the adsorption level is set to be weak and transferred for a long time, and FIG. 31 shows the case where the adsorption on the transfer side is strong. In the case of carrying out the transfer operation in the original state, Fig. 33 shows the situation of carrying out the transfer operation after the adsorption force on the receiving side becomes stronger, and Fig. 34 shows an example of the best situation of the present invention which can solve all the problems so far. the

Claims (25)

1. A display panel module assembly apparatus that sequentially transports display panel substrates between processing devices, and mounts electronic components by performing various processes on the processing side of the display panel substrate, characterized in that, In at least one or more processing devices, there are at least two or more processing units that simultaneously perform processing operations on one side of one display panel substrate, The processing operation includes at least one of the steps of cleaning the position on the substrate where the electronic component is to be mounted, attaching the ACF to the cleaned position, and mounting the electronic component at the position where the ACF is attached. process, and the process of crimping the mounted electronic components and the substrate. 2. The display panel module assembling device according to claim 1, characterized in that, The "simultaneously" means that the processing operation is completed before the display panel substrate is conveyed to the next operation position. 3. The display panel module assembling device according to claim 1 or 2, characterized in that, The processing unit has: a display panel substrate posture detection mechanism that detects the posture of the display panel substrate performing processing; The processing unit position correction mechanism corrects the relative position of the processing side of the display panel substrate and the processing unit based on the result of the display panel substrate posture detection mechanism. 4. The display panel module assembling device according to claim 1 or 2, characterized in that, The processing unit has a mechanism capable of moving in a direction parallel to a processing side direction of the display panel substrate. 5. The display panel module assembling device according to claim 1 or 2, characterized in that, The processing unit has a mechanism capable of moving in a direction parallel to a direction in which the processing unit is arranged. 6. The display panel module assembling device according to claim 1 or 2, characterized in that, The processing operations in two or more of the processing units are performed simultaneously, and the display panel module assembly device has: a processing unit operation sequence control mechanism, which controls the processing operations in the processing operations in the two or more processing units. and the work sequence of the transfer movement operation to transfer to the next work position. 7. The display panel module assembling device according to claim 1 or 2, characterized in that, For two or more processing units, each of the processing units independently has processing in at least one of the width direction, thickness direction, length direction, and rotation direction of each axis of the display panel substrate. The unit position correction mechanism is disposed on a mechanism capable of moving in the conveying direction of the display panel substrate. 8. A display panel module assembly device, which sequentially transports display panel substrates, and mounts electronic components by performing various treatments on the processing side of the display panel substrate, characterized in that it has: Divide the processing side jobs with a long processing time among the various processing, and at least two or more processing units that simultaneously perform the processing jobs, The processing operation includes at least one of the steps of cleaning the position on the substrate where the electronic component is to be mounted, attaching the ACF to the cleaned position, and mounting the electronic component at the position where the ACF is attached. process, and the process of crimping the mounted electronic components and the substrate. 9. The display panel module assembling device according to claim 8, characterized in that, The "simultaneously" means that the processing operation is completed before the display panel substrate is conveyed to the next operation position. 10. The display panel module assembling device according to claim 8 or 9, characterized in that, The processing unit has: a display panel substrate posture detection mechanism that detects the posture of the display panel substrate performing processing; The processing unit position correction mechanism corrects the relative position of the processing side of the display panel substrate and the processing unit based on the result of the display panel substrate posture detection mechanism. 11. The display panel module assembling device according to claim 8 or 9, characterized in that, The processing unit has a mechanism capable of moving in a direction parallel to a processing side direction of the display panel substrate. 12. The display panel module assembling device according to claim 8 or 9, characterized in that, The processing unit has a mechanism capable of moving in a direction parallel to a direction in which the processing unit is arranged. 13. The display panel module assembling device according to claim 8 or 9, characterized in that, The processing operations in two or more of the processing units are performed simultaneously, and the display panel module assembly device has: a processing unit operation sequence control mechanism, which controls the processing operations in the processing operations in the two or more processing units. and the work sequence of the transfer movement operation to transfer to the next work position. 14. The display panel module assembling device according to claim 8 or 9, characterized in that, For two or more processing units, each of the processing units independently has processing in at least one of the width direction, thickness direction, length direction, and rotation direction of each axis of the display panel substrate. The unit position correction mechanism is disposed on a mechanism capable of moving in the conveying direction of the display panel substrate. 15. A method for assembling a display panel module, wherein the display panel substrates are sequentially conveyed between processing devices, and electronic components are mounted by performing various treatments on the processing sides of the display panel substrates, wherein, At least two or more processing units in at least one processing operation device simultaneously perform processing operations on one side of the display panel substrate, The processing operation includes at least one of the steps of cleaning the position on the substrate where the electronic component is to be mounted, attaching the ACF to the cleaned position, and mounting the electronic component at the position where the ACF is attached. process, and the process of crimping the mounted electronic components and the substrate. 16. The display panel module assembly method according to claim 15, characterized in that, The "simultaneously" means that the processing operation is completed before the display panel substrate is conveyed to the next operation position. 17. The display panel module assembly method according to claim 15 or 16, characterized in that, The processing unit detects the posture of the display panel substrate being processed, and based on the detection result, corrects the relative position of the processing side of the display panel substrate and the processing unit. 18. The display panel module assembly method according to claim 15 or 16, characterized in that, The processing unit moves in a direction parallel to a processing side direction of the display panel substrate. 19. A method for assembling a display panel module, wherein display panel substrates are conveyed sequentially, and electronic components are mounted by performing various treatments on the processing side of the display panel substrate, characterized in that, At least two or more processing units divide the processing side jobs with a long processing time among the various processings, and perform processing jobs at the same time, The processing operation includes at least one of the steps of cleaning the position on the substrate where the electronic component is to be mounted, attaching the ACF to the cleaned position, and mounting the electronic component at the position where the ACF is attached. process, and the process of crimping the mounted electronic components and the substrate. 20. The display panel module assembly method according to claim 19, characterized in that, The "simultaneously" means that the processing operation is completed before the display panel substrate is conveyed to the next operation position. 21. The display panel module assembly method according to claim 19 or 20, characterized in that, The processing unit detects the posture of the display panel substrate being processed, and based on the detection result, corrects the relative position of the processing side of the display panel substrate and the processing unit. 22. The display panel module assembly method according to claim 19 or 20, characterized in that, The processing unit moves in a direction parallel to a processing edge direction of the display panel substrate. 23. A processing device for assembling a display panel substrate, which processes the processing side of the display panel substrate to assemble the display panel substrate, characterized in that: Having at least two or more processing units that simultaneously perform operations on one side of a display panel substrate, the processing unit has a mechanism capable of moving in a direction parallel to the processing side direction, The processing operation includes at least one of the steps of cleaning the position on the substrate where the electronic component is to be mounted, attaching the ACF to the cleaned position, and mounting the electronic component at the position where the ACF is attached. process, and the process of crimping the mounted electronic components and the substrate. 24. The processing device for assembling a display panel substrate according to claim 23, wherein: The display panel substrate assembly processing operation device is an ACF attachment processing operation device or a TAB mounting processing operation device. 25. The processing device for assembling a display panel substrate according to claim 23, wherein: The processing unit has: a display panel substrate posture detection mechanism that detects the posture of the display panel substrate being processed; The processing unit position correction mechanism corrects the relative position of the processing side of the display panel substrate and the processing unit based on the result of the display panel substrate posture detection mechanism.

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