CN101603176B - Preparation method of surface metal-based nano-array ball array structure - Google Patents
Preparation method of surface metal-based nano-array ball array structure Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及的是一种纳米材料技术领域的制备方法,具体是一种表面金属基纳米阵列球布阵结构的制备方法。The invention relates to a preparation method in the technical field of nanomaterials, in particular to a preparation method for a surface metal-based nano-array ball array structure.
背景技术Background technique
这种纳米布阵结构是指金属或非金属表面具有微纳米尺度的复合有序阵列结构,在底部具有纵向针状结构,在针的顶端为球状结构,即针上长球。由于这种结构真实表面积大,具有高反应活性,其跳棋式结构会产生许多新的特性,所以应用范围十分广阔。例如:(1)微电子封装领域,利用其特殊结构,使框架与塑封树脂间的结合强度大大增强。(2)可用于金属与金属,金属与陶瓷之间的复合材料。(3)表面积增大使其具有良好的光散射特性和吸收特性,可以作为光学材料、激光隐身材料、光热转换材料。(4)把纳米球作为模(板)制成特殊结构的材料。(5)可以产生荷叶效应,良好的疏水性可作为疏水材料。目前,微纳米布阵结构多是从器件角度来研究的,一般尺寸大都在微米和毫米之间。有关制备方法主要是模(板)法和LIGA(软X射线深层光刻电铸成形技术)法。经过对现有技术的检索发现,马迪等在“AAO样模法电沉积镍纳米线表征及电化学行为研究”(功能材料,1001-9731(2004)增刊-2836-03)一文中提到模板法,具体是将多孔氧化膜作为模板,然后在模板上电沉积金属微粒,从而制备出纳米阵列,再通过化学方法将模板溶掉的一种方法。另外,吴广峰等在“LIGA工艺基础及其发展趋势”(机电工程技术,1009-9492(2007)12-0089-04)中提到LIGA法,即采用光刻制版、电铸成型、去模板等复杂步骤进行微结构加工的方法。但是两种现有技术均存在工艺复杂,效率低,成本高,设备投资大,对基材尺寸与形状有严格要求等缺点。因此,只适用于微器件制造或研究目的。This nano-array structure refers to a composite ordered array structure with micro-nano scale on the metal or non-metal surface, with a longitudinal needle-like structure at the bottom and a spherical structure at the top of the needle, that is, a long ball on the needle. Due to the large real surface area and high reactivity of this structure, its checkers-like structure will generate many new properties, so the application range is very wide. For example: (1) In the field of microelectronic packaging, using its special structure, the bonding strength between the frame and the plastic packaging resin is greatly enhanced. (2) It can be used for composite materials between metal and metal, metal and ceramics. (3) The increased surface area makes it have good light scattering and absorption properties, and can be used as optical materials, laser stealth materials, and photothermal conversion materials. (4) Use nanospheres as templates (plates) to make materials with special structures. (5) The lotus leaf effect can be produced, and the good hydrophobicity can be used as a hydrophobic material. At present, the micro-nano array structure is mostly studied from the perspective of devices, and the general size is mostly between microns and millimeters. The relevant preparation methods are mainly template (plate) method and LIGA (soft X-ray deep layer photolithography electroforming technology) method. After searching the existing technology, it was found that Ma Di et al. mentioned in the article "Characterization and Electrochemical Behavior of Electrodeposited Nickel Nanowires by AAO Pattern Method" (Functional Materials, 1001-9731(2004) Supplement-2836-03) The template method is specifically a method in which a porous oxide film is used as a template, and then metal particles are electrodeposited on the template to prepare a nano-array, and then the template is dissolved by a chemical method. In addition, Wu Guangfeng and others mentioned the LIGA method in "LIGA process basis and its development trend" (Mechanical and Electrical Engineering Technology, 1009-9492 (2007) 12-0089-04), that is, the use of photolithography plate making, electroforming, and template removal and other complex steps for microstructure processing. However, both existing technologies have disadvantages such as complex process, low efficiency, high cost, large equipment investment, and strict requirements on the size and shape of the base material. Therefore, it is suitable only for micro-device fabrication or research purposes.
发明内容Contents of the invention
本发明针对现有技术存在的上述不足,提供一种表面金属基纳米阵列球布阵结构的制备方法,利用电化学沉积原理,将导电性金属基材作为阴极置于含有结晶调整剂的电镀溶液中,并施加电流或电压,使电结晶按垂直于表面的方向纵向一维生长,然后在金属表面形成类似针状结构的纳米阵列。再将金属基材置于化学镀溶液中,然后在纳米阵列上沉积一层球状晶结构。The present invention aims at the above-mentioned deficiencies in the prior art, and provides a method for preparing a surface metal-based nano-array ball array structure, using the principle of electrochemical deposition, placing a conductive metal substrate as a cathode in an electroplating solution containing a crystallization regulator , and apply current or voltage to make the electrocrystal grow vertically and one-dimensionally in the direction perpendicular to the surface, and then form a nano-array similar to needle-like structure on the metal surface. Then the metal substrate is placed in the electroless plating solution, and then a layer of spherical crystal structure is deposited on the nano-array.
本发明是通过以下技术方案实现的,本发明包括以下步骤:The present invention is achieved through the following technical solutions, and the present invention comprises the following steps:
第一步、选取合适的金属基材,将金属基材依次进行表面除油处理、表面除锈处理以及酸洗处理。The first step is to select a suitable metal substrate, and then perform surface degreasing treatment, surface derusting treatment and pickling treatment on the metal substrate in sequence.
所述的表面除油处理是指:将金属基材表面粘附的油污有机物质去除。The surface degreasing treatment refers to removing the oily organic substances adhered to the surface of the metal substrate.
所述的表面除锈处理是指:将金属基材表面的氧化层无机物质去除。The surface derusting treatment refers to removing inorganic substances in the oxide layer on the surface of the metal substrate.
所述的酸洗处理,是指将金属基材在具有腐蚀性的溶液中浸泡。The pickling treatment refers to immersing the metal substrate in a corrosive solution.
第二步、将金属基材放入电镀槽中作为阴极,镍金属片或者不溶极板作为阳极,并用导线将阳极、阴极、电镀电源和电镀液串联构成回路,然后通过电镀电源对金属基材实施电镀。The second step is to put the metal substrate into the electroplating tank as the cathode, and the nickel metal sheet or the insoluble plate as the anode, and connect the anode, the cathode, the electroplating power supply and the electroplating solution in series with a wire to form a circuit, and then pass the electroplating power supply to the metal substrate. Perform electroplating.
所述的电镀液的组分及浓度为:金属离子0.1-2.5mol/L、络合剂0.1-2mol/L、硼酸0.5mol/L和结晶调整剂1-1000PPM,该电镀液的溶液温度25-60℃,pH3.5-6.0。The components and concentrations of the electroplating solution are: 0.1-2.5mol/L metal ions, 0.1-2mol/L complexing agent, 0.5mol/L boric acid and 1-1000PPM crystal regulator, the solution temperature of the electroplating solution is 25 -60°C, pH3.5-6.0.
所述的金属离子是指:镍、铜、铁或铝中的一种或其组合。The metal ion refers to one or a combination of nickel, copper, iron or aluminum.
所述的络合剂是指:柠檬酸盐、苹果酸盐、乙二胺四乙酸盐、醋酸盐、乙二胺中一种或其组合。The complexing agent refers to: one of citrate, malate, ethylenediaminetetraacetate, acetate, ethylenediamine or a combination thereof.
所述的结晶调整剂,由Cu、Ag、Pd、Au、Zn、Sn、Ca以及Y、La、Ce、Eu稀土金属离子构成。The crystal regulator is composed of Cu, Ag, Pd, Au, Zn, Sn, Ca and Y, La, Ce, Eu rare earth metal ions.
所述的实施电镀为直流电镀、单脉冲电镀或双脉冲电流电镀。The electroplating performed is DC electroplating, single pulse electroplating or double pulse current electroplating.
第三步、将电镀后的金属基材放入另一含有化学镀液的镀槽中2min,进行化学镀后制得表面金属基纳米阵列球布阵结构。In the third step, the electroplated metal substrate is placed in another plating tank containing an electroless plating solution for 2 minutes, and the surface metal-based nano-array ball array structure is prepared after electroless plating.
所述的化学镀液的组分及浓度为:金属及其合金的沉积金属离子0.1-2.5mol/L、还原剂0.1-2.5mol/L、柠檬酸三钠0.1-2.5mol/L和乙酸钠0.1-2.5mol/L,该化学镀液的溶液温度5℃-150℃,pH3.5-6.0。The composition and concentration of the electroless plating solution are: 0.1-2.5 mol/L of deposited metal ions of metals and alloys thereof, 0.1-2.5 mol/L of reducing agent, 0.1-2.5 mol/L of trisodium citrate and sodium acetate 0.1-2.5mol/L, the solution temperature of the electroless plating solution is 5°C-150°C, and the pH is 3.5-6.0.
所述的金属离子是指:镍、铜、铁或铝中的一种或其组合。The metal ion refers to one or a combination of nickel, copper, iron or aluminum.
所述的还原剂是指亚磷酸二氢钠。Described reducing agent refers to sodium dihydrogen phosphite.
本发明在电沉积过程中,通过加入结晶调整剂,控制活性点的数量并使得电结晶在每一个时刻都依赖活性点向镀液中延伸,使结晶按垂直于金属基材表面的方向一维纵向生长,形成微纳米针状晶布阵结构。之后利用化学镀方法,加入还原剂与缓冲剂,使纳米针上长出相近尺度的纳米球。此方法最大的优点在于不需要借助任何模版,无需复杂设备,对底材形状材质无特殊要求,适于工业化批量生产。In the process of electrodeposition, the present invention controls the number of active points and makes the electrocrystallization depend on the active points to extend into the plating solution at every moment by adding a crystallization regulator, so that the crystallization is one-dimensional in a direction perpendicular to the surface of the metal substrate. Longitudinal growth, forming a micro-nano needle-like crystal array structure. Afterwards, the electroless plating method is used to add reducing agents and buffers to grow nanospheres of similar size on the nanoneedles. The biggest advantage of this method is that it does not require any templates, complex equipment, and no special requirements on the shape and material of the substrate, and is suitable for industrialized mass production.
具体实施方式Detailed ways
下面对本发明的实施例作详细说明,本实施例在以本发明技术方案为前提下进行实施,给出了详细的实施方式和具体的操作过程,但本发明的保护范围不限于下述的实施例。The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.
实施例1Example 1
(1)将需要进行疏水处理的铜片表面进行除油、除锈及酸洗处理。(1) Degreasing, derusting and pickling treatment are performed on the surface of the copper sheet that needs to be hydrophobically treated.
(2)将经(1)步骤处理好的金属基材置于电镀溶液中,金属基材作为阴极,镍板作为阳极,通过导线将两者以及电源、电镀液构成回路。电镀液组成为:氯化镍0.1mol/L,柠檬酸三氨0.1mol/L,硼酸0.5mol/L,结晶调整剂氯化铜1ppm,溶液温度60℃,pH6。(2) Place the metal substrate processed in step (1) in the electroplating solution, the metal substrate is used as the cathode, and the nickel plate is used as the anode, and the two, the power supply, and the electroplating solution are used to form a circuit through wires. The composition of the electroplating solution is: 0.1 mol/L nickel chloride, 0.1 mol/L triammonium citrate, 0.5 mol/L boric acid, 1 ppm copper chloride crystallization regulator, solution temperature 60°C, pH 6.
(3)调整电流密度1A/min,电镀20min。(3) Adjust the current density to 1A/min, and electroplate for 20 minutes.
(4)将经(3)步骤处理好的金属基材置于化学镀溶液中,溶液组成为:六水合硫酸镍0.1mol/L,亚磷酸二氢钠0.1mol/L,柠檬酸三钠0.1mol/L,乙酸钠0.2mol/L,溶液温度60℃,pH7.5,时间2min。(4) Place the metal base material processed through (3) in the electroless plating solution, the solution consists of: nickel sulfate hexahydrate 0.1mol/L, sodium dihydrogen phosphite 0.1mol/L, trisodium citrate 0.1 mol/L, sodium acetate 0.2mol/L, solution temperature 60°C, pH 7.5, time 2min.
结果:经SEM观察,纳米镀针高度0.05-0.4微米,底部直径0.05-0.2微米,纳米球直径0.05-0.2微米。Results: By SEM observation, the height of the nano-plated needles is 0.05-0.4 microns, the diameter of the bottom is 0.05-0.2 microns, and the diameter of the nanospheres is 0.05-0.2 microns.
实施例2Example 2
(1)将需要进行疏水处理的铜片表面进行除油、除锈及酸洗处理。(1) Degreasing, derusting and pickling treatment are performed on the surface of the copper sheet that needs to be hydrophobically treated.
(2)将经(1)步骤处理好的金属基材置于电镀溶液中,金属基材作为阴极,镍板作为阳极,通过导线将两者以及电源、电镀液构成回路。电镀液组成为:氯化镍2.5mol/L,柠檬酸三氨2mol/L,硼酸0.5mol/L,结晶调整剂氯化铜1000ppm,溶液温度25℃,Ph3.5。(2) Place the metal substrate processed in step (1) in the electroplating solution, the metal substrate is used as the cathode, and the nickel plate is used as the anode, and the two, the power supply, and the electroplating solution are used to form a circuit through wires. The electroplating solution is composed of: 2.5 mol/L nickel chloride, 2 mol/L triammonium citrate, 0.5 mol/L boric acid, 1000 ppm copper chloride as a crystal regulator, solution temperature 25°C, Ph 3.5.
(3)调整电流密度1A/min,电镀20min。(3) Adjust the current density to 1A/min, and electroplate for 20 minutes.
(4)将经(3)步骤处理好的金属基材置于化学镀溶液中,溶液组成为:六水合硫酸镍0.5mol/L,亚磷酸二氢钠0.5mol/L,柠檬酸三钠0.5mol/L,乙酸钠1.5mol/L,溶液温度80℃,pH8,时间2min。(4) Place the metal base material treated in step (3) in the electroless plating solution, the solution consists of: nickel sulfate hexahydrate 0.5mol/L, sodium dihydrogen phosphite 0.5mol/L, trisodium citrate 0.5 mol/L, sodium acetate 1.5mol/L, solution temperature 80°C, pH 8, time 2min.
结果:经SEM观察,纳米镀针高度0.05-0.4微米,底部直径0.05-0.2微米,纳米球直径0.05-0.2微米。Results: By SEM observation, the height of the nano-plated needles is 0.05-0.4 microns, the diameter of the bottom is 0.05-0.2 microns, and the diameter of the nanospheres is 0.05-0.2 microns.
实施例3Example 3
(1)将需要进行疏水处理的铜片表面进行除油、除锈及酸洗处理。(1) Degreasing, derusting and pickling treatment are performed on the surface of the copper sheet that needs to be hydrophobically treated.
(2)将经(1)步骤处理好的金属基材置于电镀溶液中,金属基材作为阴极,镍板作为阳极,通过导线将两者以及电源、电镀液构成回路。电镀液组成为:氯化镍1.3mol/L,柠檬酸三氨1mol/L,硼酸0.5mol/L,结晶调整剂氯化铜500ppm,溶液温度40℃,pH4。(2) Place the metal substrate processed in step (1) in the electroplating solution, the metal substrate is used as the cathode, and the nickel plate is used as the anode, and the two, the power supply, and the electroplating solution are used to form a circuit through wires. The electroplating solution is composed of: 1.3 mol/L nickel chloride, 1 mol/L triammonium citrate, 0.5 mol/L boric acid, 500 ppm copper chloride as a crystal regulator, solution temperature 40°C, pH 4.
(3)调整电流密度1A/min,电镀20min。(3) Adjust the current density to 1A/min, and electroplate for 20 minutes.
(4)将经(3)步骤处理好的金属基材置于化学镀溶液中,溶液组成为:六水合硫酸镍2.5mol/L,亚磷酸二氢钠1.3mol/L,柠檬酸三钠1.3mol/L,乙酸钠1.3mol/L,溶液温度40℃,pH9.5,时间2min。(4) Place the metal substrate processed through (3) in the electroless plating solution, the solution consists of: nickel sulfate hexahydrate 2.5mol/L, sodium dihydrogen phosphite 1.3mol/L, trisodium citrate 1.3 mol/L, sodium acetate 1.3mol/L, solution temperature 40°C, pH 9.5, time 2min.
结果:经SEM观察,纳米镀针高度0.05-0.4微米,底部直径0.05-0.2微米,纳米球直径0.05-0.2微米。Results: By SEM observation, the height of the nano-plated needles is 0.05-0.4 microns, the diameter of the bottom is 0.05-0.2 microns, and the diameter of the nanospheres is 0.05-0.2 microns.
实施例4Example 4
(1)将需要进行疏水处理的铜片表面进行除油、除锈及酸洗处理。(1) Degreasing, derusting and pickling treatment are performed on the surface of the copper sheet that needs to be hydrophobically treated.
(2)将经(1)步骤处理好的金属基材置于电镀溶液中,金属基材作为阴极,镍板作为阳极,通过导线将两者以及电源、电镀液构成回路。电镀液组成为:氯化镍0.7mol/L,柠檬酸三氨0.5mol/L,硼酸0.5mol/L,结晶调整剂氯化铜100ppm,溶液温度30℃,pH4.5。(2) Place the metal substrate processed in step (1) in the electroplating solution, the metal substrate is used as the cathode, and the nickel plate is used as the anode, and the two, the power supply, and the electroplating solution are used to form a circuit through wires. The electroplating solution is composed of: 0.7 mol/L nickel chloride, 0.5 mol/L triammonium citrate, 0.5 mol/L boric acid, 100 ppm copper chloride as a crystal regulator, solution temperature 30°C, pH 4.5.
(3)调整电流密度1A/min,电镀20min。(3) Adjust the current density to 1A/min, and electroplate for 20 minutes.
(4)将经(3)步骤处理好的金属基材置于化学镀溶液中,溶液组成为:六水合硫酸镍0.7mol/L,亚磷酸二氢钠0.7mol/L,柠檬酸三钠0.7mol/L,乙酸钠0.7mol/L,溶液温度90℃,pH9,时间2min。(4) Place the metal substrate processed through (3) in the electroless plating solution, and the solution consists of: 0.7 mol/L of nickel sulfate hexahydrate, 0.7 mol/L of sodium dihydrogen phosphite, and 0.7 mol/L of trisodium citrate. mol/L, sodium acetate 0.7mol/L, solution temperature 90°C, pH 9, time 2min.
结果:经SEM观察,纳米镀针高度0.05-0.4微米,底部直径0.05-0.2微米,纳米球直径0.05-0.2微米。Results: By SEM observation, the height of the nano-plated needles is 0.05-0.4 microns, the diameter of the bottom is 0.05-0.2 microns, and the diameter of the nanospheres is 0.05-0.2 microns.
实施例5Example 5
(1)将需要进行疏水处理的铜片表面进行除油、除锈及酸洗处理。(1) Degreasing, derusting and pickling treatment are performed on the surface of the copper sheet that needs to be hydrophobically treated.
(2)将经(1)步骤处理好的金属基材置于电镀溶液中,金属基材作为阴极,镍板作为阳极,通过导线将两者以及电源、电镀液构成回路。电镀液组成为:氯化镍1.9mol/L,柠檬酸三氨1.5mol/L,硼酸0.5mol/L,结晶调整剂氯化铜800ppm,溶液温度50℃,pH5。(2) Place the metal substrate processed in step (1) in the electroplating solution, the metal substrate is used as the cathode, and the nickel plate is used as the anode, and the two, the power supply, and the electroplating solution are used to form a circuit through wires. The composition of the electroplating solution is: 1.9 mol/L nickel chloride, 1.5 mol/L triammonium citrate, 0.5 mol/L boric acid, 800 ppm copper chloride crystallization regulator, solution temperature 50°C, pH 5.
(3)调整电流密度1A/min,电镀20min。(3) Adjust the current density to 1A/min, and electroplate for 20 minutes.
(4)将经(3)步骤处理好的金属基材置于化学镀溶液中,溶液组成为:六水合硫酸镍1.9mol/L,亚磷酸二氢钠1.9mol/L,柠檬酸三钠1.9mol/L,乙酸钠1.9mol/L,溶液温度70℃,pH10.0,时间2min。(4) Place the metal substrate processed through (3) in the electroless plating solution, the solution consists of: nickel sulfate hexahydrate 1.9mol/L, sodium dihydrogen phosphite 1.9mol/L, trisodium citrate 1.9 mol/L, sodium acetate 1.9mol/L, solution temperature 70°C, pH 10.0, time 2min.
结果:经SEM观察,纳米镀针高度0.05-0.4微米,底部直径0.05-0.2微米,纳米球直径0.05-0.2微米。Results: By SEM observation, the height of the nano-plated needles is 0.05-0.4 microns, the diameter of the bottom is 0.05-0.2 microns, and the diameter of the nanospheres is 0.05-0.2 microns.
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| CN101792918A (en) * | 2010-04-09 | 2010-08-04 | 上海交通大学 | Preparation method of surface Co-based micro-nano needle crystal array structure |
| CN103406248B (en) * | 2013-08-26 | 2016-01-06 | 武汉理工大学 | The preparation method of copper substrate superhydrophobic surface structure |
| CN104308369B (en) * | 2014-10-28 | 2016-08-24 | 吉林大学 | The preparation method of the super-hydrophobic bionic surface of iris at the bottom of a kind of cuprio |
| CN104616727B (en) * | 2015-01-26 | 2016-09-14 | 河南大学 | A kind of nano-cable transparent conductive film with silver as inner core and preparation method thereof |
| CN105670370B (en) * | 2016-01-04 | 2017-11-03 | 北京环境特性研究所 | A kind of wool top molded breadth frequency stealth material |
| CN108075142B (en) * | 2016-11-17 | 2020-03-10 | 中国科学院大连化学物理研究所 | Preparation method of nano-array catalyst layer for anion exchange membrane fuel cell |
| CN109972093B (en) * | 2019-03-22 | 2021-06-15 | 中车工业研究院有限公司 | High polymer bionic configuration photothermal conversion material and preparation method and application thereof |
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