CN101556903A - Radio frequency identification real-time common information system of semiconductor supply chain system - Google Patents
Radio frequency identification real-time common information system of semiconductor supply chain system Download PDFInfo
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- CN101556903A CN101556903A CNA2008100930077A CN200810093007A CN101556903A CN 101556903 A CN101556903 A CN 101556903A CN A2008100930077 A CNA2008100930077 A CN A2008100930077A CN 200810093007 A CN200810093007 A CN 200810093007A CN 101556903 A CN101556903 A CN 101556903A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention discloses a Radio Frequency Identification (RFID) real-time common information system, which is used for transmitting real-time information of a plurality of chips among manufacturers of a semiconductor supply chain system, wherein each manufacturer is provided with a preset space for arranging a plurality of carriers, each carrier is used for bearing at least one chip, and the RFID real-time common information system comprises an RFID intermediate module, a storage position and logistics information of the carriers and the chips are generated by means of label information; a production process data module for storing object information related to the wafer; a real-time information module for integrating the RFID medium module and the production process data module to generate real-time information of the carrier and the wafer; and an inter-enterprise e-commerce module, comprising a plurality of B2B servers respectively arranged in the semiconductor supply chain system, and connected and exchanged with the real-time information by an e-commerce standard protocol.
Description
Technical field
The present invention is relevant for a kind of real-time common information system of system of semiconductor supply chain, particularly the real-time common information system of the system of semiconductor supply chain of relevant a kind of integration of wireless radio-frequency (RF) identification (RFID) technology.
Background technology
Disclosed about using the RFID technology to have U.S. patent of invention US6330971 and the U.S. to disclose application case US20060043197 and TaiWan, China patent of invention TW I267029 in early days at wafer stock or the prior art that transports.Wherein, U.S. patent of invention US6330971 discloses a kind of RFID of use technology to follow the trail of the system of wafer, shown in Figure 1A, this system 10 comprises a plurality of carriers 11, the RFID reading machine 12 of bearing wafer, be attached to the RFID label 14 and the controller 13 of carrier 11, wherein RFID reading machine 12 by a plurality of antennas 15 on it reading the RFID label 14 that is attached on each carrier 11, RFID the reading machine 12 and label information that reads is sent to controller 13 so that present carrier 11 and bearing wafer position thereof to be provided by the RS232 interface simultaneously.
In addition, the U.S. discloses application case US2006004319 in early days and discloses the carrier of a kind of RFID of use to carry out the system of wafer transportation, shown in Figure 1B, this system 100 comprises conveying arrangement 110, the carrier 111 of bearing wafer, handle board 115, RFID reading machine 116 and board controller 117, when carrier 111 is delivered to processing board 115 by conveying arrangement 110, the RFID reading machine 116 that then is installed on processing board 115 reads the RFID label 114 of carrier body 112, so that the carrier identification code of RFID label 114 records is delivered to board controller 117, handle the processed that board 115 carries out wafer in this carrier 111 to provide.
In addition, TaiWan, China patent of invention TW I267029 discloses the carrier of a kind of RFID of use to carry out the system of wafer transportation, shown in Fig. 1 C, this transportation system 1000 comprises wafer case 1010, RFID label 1020, conveying arrangement 1030, handle board 1040, RFID reading machine 1050, main frame 1060 and trigger 1070, when the RFID label 1020 of a wafer case 1010 appears at when handling near the board 1040, because the RFID inductor directly receives RFID label 1020 and starts conveying arrangement 1030 automatically, possible errors is sent to wafer case 1010 to carry by mechanical arm and unloads portion and accidentally injure the operator, but main frame 1060 is issued an order and control the RFID inductor and when respond to, avoid RFID inductor induced RF ID label and the mechanical arm accident is activated and endangers operator's safety undeservedly by operator's direct control trigger 1070.
The content of described prior art mainly is to utilize RFID to carry out wafer transport or tracking, but that the RFID technology is not relevant with wafer warehouse compartment, test and logistics Information System Integration is together, but with client's real-time exchange that system of semiconductor supply chain is provided relevant information based on wafer (wafer based).Therefore provide a kind of RFID of integration technology to the relevant information system of wafer warehouse compartment, test and logistics, make the client of supply chain system by real-time common information system to grasp the relevant information of wafer on the line in real time, be the problem that industry is badly in need of solution in fact.
Summary of the invention
The real-time common information system of RFID that the purpose of this invention is to provide a kind of system of semiconductor supply chain, make that but grasping wafer in real time on client's line of supply chain system is main wafer warehouse compartment, test and logistics relevant information, to solve desirable not to the utmost the locating of described prior art.
The real-time common information system of the RFID of system of semiconductor supply chain of the present invention, in order to the real time information of transmitting a plurality of wafers between system of semiconductor supply chain, this system of semiconductor supply chain consists predominantly of at least one wafer manufacturer, at least one wafer sort manufacturer and at least one encapsulation manufacturer, wherein each manufacturer has pre-set space and is provided with a plurality of carriers, and each carrier is in order to carry at least one wafer, the real-time common information system of RFID that is characterized in system of semiconductor supply chain includes a plurality of RFID labels (tag), be arranged at each carrier respectively, each RFID label has a label information (tag information); A plurality of RFID reading machines (RFID reader) are disposed in the pre-set space of each manufacturer, read or write the label information of each carrier from this RFID label by RF-wise; One RFID intermediary module (RFID middleware) is by the warehouse compartment and the logistics information (stock and logistic information) of label information generation carrier and wafer; One production technology data module stores the object information (object information) relevant with wafer; One real time information module (realtime informationmodule) is integrated RFID intermediary's module and production technology data module and the real time information that produces carrier and wafer; And a business to business electronic commercial module (B2B e-commerce module), comprise a plurality of B2B servers (B2Bservers), be arranged at each manufacturer of system of semiconductor supply chain respectively, connect and the exchange real time information by an ecommerce standard agreement.In view of the above, can provide that to grasp wafer on the Client line of supply chain system in real time be main relevant informations such as wafer warehouse compartment, test and logistics.
Therefore, the real-time common information system of the RFID of system of semiconductor supply chain of the present invention can provide the client of supply chain system to grasp the relevant informations such as wafer warehouse compartment, wafer sort and wafer logistics that wafer is the master on line in real time.
The real-time common information system of the RFID of system of semiconductor supply chain of the present invention can further provide RFID intermediary module, to produce carrier or relevant warehouse compartment and the logistics information of wafer.
The real-time common information system of the RFID of system of semiconductor supply chain of the present invention can further provide the production technology data module, to produce carrier or the relevant detecting information of wafer.
The real-time common information system of the RFID of system of semiconductor supply chain of the present invention can further be integrated RFID intermediary module and production technology data module, to produce carrier or the relevant real time information of wafer.
The real-time common information system of the RFID of system of semiconductor supply chain of the present invention can further provide the business to business electronic commercial module, but so that exchanges real time information on manufacturer's line of system of semiconductor supply chain.
The real-time common information system of the RFID of system of semiconductor supply chain of the present invention can further provide an index key in RFID intermediary module, so that the manufacturer of system of semiconductor supply chain can carry out the relevant information inquiry of wafer according to the RFID label information.
Description of drawings
For can clearer understanding purpose of the present invention, characteristics and advantage, below conjunction with figs. is elaborated to preferred embodiment of the present invention, wherein:
Figure 1A to Fig. 1 C is a kind of lamellar system of integrating RFID of prior art.
Fig. 2 is the schematic diagram of the real-time common information system of RFID of a kind of system of semiconductor supply chain of first preferred embodiment of proposition according to the present invention.
Fig. 3 is another schematic diagram according to the real-time common information system of RFID of the further semiconductor test factory inside that proposes of Fig. 2.
Embodiment
Because the present invention is the real-time common information system of RFID that discloses a kind of system of semiconductor supply chain, to provide system or operator can monitor technical process and product percent of pass in real time based on wafer (wafer based), wafer sort flow process of wherein being utilized and radio frequency identification principle thereof, for having, correlative technology field knows that usually the knowledgeable can understand, so, no longer do complete description with explanation hereinafter.Simultaneously, with the accompanying drawing that is hereinafter contrasted, be to express the structural representation relevant with feature of the present invention, also do not need according to the complete drafting of actual size.
At first please refer to Fig. 2 and Fig. 3, first preferred embodiment that the present invention shown in the figure proposes, it is a kind of real-time common information system 20 of RFID of system of semiconductor supply chain.The real-time common information system 20 of the RFID of this system of semiconductor supply chain is built and is put in wafer sort manufacturer 200, with the real time information of transmission wafer between system of semiconductor supply chain, and this semiconductor supply chain body is contained wafer sort manufacturer 200, wafer manufacturer 300, encapsulation manufacturer 400 and IC design manufacturer 500, wherein above-mentioned manufacturer has corresponding business to business electronic commercial module 24,34,44,54, each business to business electronic commercial module includes corresponding B2B server 241,341,441,541, these B2B servers can connect and exchange real time information to each other to carry out network by an ecommerce standard agreement, as RosettaNet or other standard agreement as the electronic commerce data Fabric Interface.In addition, described manufacturer further has a RFID intermediary module 21 respectively, 31,41, one production technology data module 22,32,42, an and real time information module 23,33,43, wherein said RFID intermediary module produces warehouse compartment and the logistics information relevant with carrier 214 or wafer 2140, and RFID intermediary module further comprises a Data Transport Protocol (not shown) and driver (not shown), connecting a plurality of RFID reading machines 212, and this Data Transport Protocol can be RS232, Ethernet, any of various wired or wireless host-host protocols such as USB or WLAN.The production technology data module is in order to store the object information relevant with wafer 2140, and while management enterprise resource planning system 221 (ERP), manufacturing system 222 (MES), automation process control system 223 (Auto-WIP), automated setting system 224 (Auto-Setup), electronic data are copied system 225 (e-Run Card) and automation electronic data analytical system 226 (EDA) etc. and test technology application software associated.The real time information module is to integrate described production technology data module and RFID intermediary module with generation and carrier or the relevant real time information of wafer.
In the above-described embodiments, real time information includes first real time information, second real time information and the 3rd real time information, and wherein first real time information is meant the logistics information 331 of wafer, and other manufacturer that is offered supply chain by wafer manufacturer 300 comes access.Second real time information comprises logistics information 231, the detecting information 232 and warehouse compartment information 233 of wafer, other manufacturer that is offered supply chain by wafer sort manufacturer 200 comes access, and this warehouse compartment information 233 includes carrier 214 and is positioned at the station 251 of receiving, goes out goods station 252 and position information such as test machine 253, nitrogen cabinet 254 or track sled 255.The 3rd real time information is meant the logistics information 431 of wafer, and other manufacturer that is offered supply chain by wafer package manufacturer 400 comes access.In addition, can design manufacturer 500 at IC and advance one and comprise the 4th real time information (not shown), it comprises logistics information, detecting information and the warehouse compartment information of wafer.
In described embodiment, wafer sort manufacturer 200 has a pre-set space 211 with ccontaining a plurality of carriers 214, as shown in Figure 3, and carrier 214 is in order to carry a plurality of wafers 2140, and each carrier 214 is provided with a plurality of RFID labels 213, each RFID label 213 records one label information, this label information comprises tag recognition sign indicating number (tag ID), carrier or wafer lot number (carrier or Lot ID), customer number (customer ID), wafer model (waferpart ID), wafer number (wafer ID), number of wafers (wafer Q ' ty), good dies quantity (Good DieQ ' ty) and probe numbering (probe card ID).A plurality of RFID reading machines 212 are disposed in the pre-set space of manufacturer, and the label information of each carrier 214 or wafer 2140 is read or write to the RFID label 213 that oneself is close to by RF-wise, and this RFID label 213 can be a passive type or active.In addition, carrier 214 can be that crystal-boat box, wafer handling casket (FOUP), wafer transport case (FOSB), handcart or probe cartridge (Probe CardBox) wait any.
In addition, RFID intermediary module 21 can further provide an index key (not shown), carries out information inquiry so that this business to business electronic commercial module to be provided according to a particular wafer by Search engine in it 216 and database 217.This index key can be arbitrary or combination such as described tag recognition sign indicating number, carrier or wafer lot number, customer number, wafer model, wafer number or probe numbering.In addition, the RFID reading machine can further be connected to an alarming device 215, and this alarming device 215 is installed in the contiguous station 251 of receiving, goes out each place, gateway (not shown) in goods station 252 or the pre-set space, so that the operator to be provided real time monitoring.
Second preferred embodiment that the present invention proposes, it is a kind of real-time common information system of RFID (not shown) of system of semiconductor supply chain, with the real time information of transmitting a plurality of semiconductor objects between each manufacturer of system of semiconductor supply chain, wherein the semiconductor object can be wafer, probe or light shield, and each manufacturer has pre-set space so that a plurality of carriers to be set, and each carrier is in order to carrying at least one semiconductor object, and the real-time common information system of the RFID of this system of semiconductor supply chain includes a plurality of RFID labels, a plurality of RFID reading machines, one RFID intermediary module, one production technology data module, an one business to business electronic commercial module and a real time information module.Wherein each carrier and semiconductor object are respectively arranged with a plurality of RFID labels, and each RFID label system record one label information.The RFID reading machine is disposed in the pre-set space of each manufacturer, reads or write the label information of each carrier and semiconductor object from the RFID label by RF-wise.Module system of RFID intermediary produces the warehouse compartment and the logistics information of carrier and semiconductor object by label information.The production technology data module stores the object information relevant with the semiconductor object.The module integrated described RFID of real time information intermediary module and production technology data module are to produce the carrier real time information relevant with the semiconductor object.The business to business electronic commercial module comprises a plurality of B2B servers, is arranged at each manufacturer of system of semiconductor supply chain respectively, connects and exchanges described real time information by an ecommerce standard agreement.And this real time information includes logistics information, detecting information and warehouse compartment information.About the described RFID label of present embodiment, RFID reading machine, RFID intermediary module, production technology data module, business to business electronic commercial module, and the correlation function and the technical characterictic of real time information module, the identical as first embodiment description person.
The above is preferred embodiment of the present invention only, is not in order to limit interest field of the present invention; Above simultaneously description should be understood and be implemented for the special personage who knows the present technique field, does not therefore break away from the equivalence of being finished under the disclosed spirit and changes or modification, all should be included in the application's the claim scope.
Claims (11)
1. the radio frequency identification (RFID) real-time common information system of a system of semiconductor supply chain, in order to the real time information of transmitting a plurality of wafers between system of semiconductor supply chain, this system of semiconductor supply chain includes at least one wafer manufacturer, at least one wafer sort manufacturer and at least one encapsulation manufacturer, wherein these manufacturers have pre-set space and are provided with a plurality of carriers, and each carrier is characterized in that in order to carry at least one wafer the radio frequency identification (RFID) real-time common information system of this system of semiconductor supply chain includes:
A plurality of wireless radio frequency identification marks are arranged at each carrier respectively, and each wireless radio frequency identification mark has a label information;
A plurality of radio frequency identification reading machines are disposed in the pre-set space of each manufacturer, read or write the label information of each carrier from this wireless radio frequency identification mark via RF-wise;
One radio frequency identification intermediary module produces the warehouse compartment and the logistics information of these carriers and wafer by these label informations;
One production technology data module stores the object information relevant with these wafers;
One real time information module is integrated this radio frequency identification intermediary module and production technology data module and the real time information that produces these carriers and wafer; And
One business to business electronic commercial module comprises a plurality of B2B servers, is arranged at each manufacturer of this system of semiconductor supply chain respectively, connects and exchanges these real time information by an ecommerce standard agreement.
2. the radio frequency identification (RFID) real-time common information system of system of semiconductor supply chain according to claim 1, it is characterized in that the end that a end that this real time information includes first real time information and be positioned at wafer manufacturer, a end that second real time information is positioned at wafer sort manufacturer and the 3rd real time information are positioned at encapsulation manufacturer, this first real time information comprises the logistics information of wafer, this second real time information comprises logistics information, detecting information and the warehouse compartment information of wafer, and the 3rd real time information comprises the logistics information of wafer.
3. the radio frequency identification (RFID) real-time common information system of system of semiconductor supply chain according to claim 1, it is characterized in that this ecommerce standard agreement is is the electronic commerce data Fabric Interface with RosettaNet or other standard agreement, and this radio frequency identification intermediary module further comprises a Data Transport Protocol and driver, in order to connecting these radio frequency identification reading machines, and this Data Transport Protocol is to be selected from by groups that transmission means constituted such as RS232, Ethernet, USB and WLAN.
4. the radio frequency identification (RFID) real-time common information system of system of semiconductor supply chain according to claim 1 is characterized in that this production technology data module is in order to management ERP, MES, automation WIP scheduling, automation Setup, e-Run Card and EDA etc. and test technology application software associated.
5. the radio frequency identification (RFID) real-time common information system of system of semiconductor supply chain according to claim 1, it is characterized in that this carrier is to be selected from by crystal-boat box, wafer handling casket, wafer transport case, handcart, and the group that constituted of probe cartridge, and the configurable wireless radio frequency identification mark that at least more than one is arranged of this carrier.
6. the radio frequency identification (RFID) real-time common information system of system of semiconductor supply chain according to claim 1 is characterized in that this warehouse compartment packets of information contains this carrier or wafer is positioned at the station of receiving, goes out the goods station, test machine, nitrogen cabinet, track sled or handcart or carrier car or the positional information of building object space; And this label information comprises tag recognition sign indicating number, carrier or wafer lot number, customer number, wafer model, wafer number, number of wafers, good dies quantity and probe numbering.
7. the radio frequency identification (RFID) real-time common information system of system of semiconductor supply chain according to claim 1, it is characterized in that this wireless radio frequency identification mark can be a passive type or active, and this wireless radio frequency identification mark is can be may be read into radiofrequency signal by arbitrary contiguous radio frequency identification reading machine in this pre-set space.
8. the radio frequency identification (RFID) real-time common information system of system of semiconductor supply chain according to claim 1, it is characterized in that this radio frequency identification intermediary module further provides an index key, providing this business to business electronic commercial module to carry out information inquiry according to a particular wafer, and the group that this tag recognition sign indicating number of the optional freedom of this index key, carrier or wafer lot number, customer number, wafer model, wafer number and probe numbering are formed.
9. the radio frequency identification (RFID) real-time common information system of system of semiconductor supply chain according to claim 1 is characterized in that this radio frequency identification reading machine further is connected to an alarming device, so that the operator to be provided real time monitoring; And this alarming device be installed in this wafer factory the station of receiving, go out the goods station or build gateway in the object space.
10. the radio frequency identification (RFID) real-time common information system of system of semiconductor supply chain according to claim 1, it is characterized in that this system of semiconductor supply chain further comprises IC design manufacturer, and this real time information is advanced one and is included the end that the 4th real time information is positioned at this IC design, comprises logistics information, detecting information and the warehouse compartment information of wafer.
11. the radio frequency identification (RFID) real-time common information system of a system of semiconductor supply chain, in order to the real time information of transmitting a plurality of semiconductor objects between each manufacturer of system of semiconductor supply chain, wherein these manufacturers have pre-set space and are provided with a plurality of carriers, and each carrier is characterized in that in order to carry at least one semiconductor object the radio frequency identification (RFID) real-time common information system of this system of semiconductor supply chain includes:
A plurality of wireless radio frequency identification marks are arranged at each carrier and semiconductor object respectively, and each wireless radio frequency identification mark has a label information;
A plurality of radio frequency identification reading machines are disposed in the pre-set space of each manufacturer, read or write the label information of each carrier and semiconductor object from this wireless radio frequency identification mark by RF-wise;
One radio frequency identification intermediary module produces the warehouse compartment and the logistics information of these carriers and semiconductor object by these label informations;
One production technology data module stores the object information relevant with these semiconductor objects;
One real time information module is integrated this radio frequency identification intermediary module and production technology data module and the real time information that produces these carriers and semiconductor object; And
One business to business electronic commercial module comprises a plurality of B2B servers, is arranged at each manufacturer of this system of semiconductor supply chain respectively, connects and exchanges these real time information by an ecommerce standard agreement;
Wherein this real time information includes and is selected from the following group that information constituted about the semiconductor object: logistics information, detecting information and warehouse compartment information.
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| CN2008100930077A CN101556903B (en) | 2008-04-11 | 2008-04-11 | Radio frequency identification real-time common information system of semiconductor supply chain system |
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| CN2008100930077A CN101556903B (en) | 2008-04-11 | 2008-04-11 | Radio frequency identification real-time common information system of semiconductor supply chain system |
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| CN101556903B CN101556903B (en) | 2010-10-20 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102162824A (en) * | 2010-12-24 | 2011-08-24 | 中科院杭州射频识别技术研发中心 | Online testing method for mass production of ultrahigh frequency (UHF) identification electronic tag antenna |
| CN102117731B (en) * | 2009-12-31 | 2013-01-02 | 中芯国际集成电路制造(上海)有限公司 | Method and device for monitoring measurement data in process production flow of semiconductor |
| CN110993527A (en) * | 2019-11-07 | 2020-04-10 | 航天科工微电子系统研究院有限公司 | Novel intelligent manufacturing production line for microsystems and implementation method thereof |
| US11366996B2 (en) | 2019-11-20 | 2022-06-21 | Corning Incorporated | Chipless RFID for liquid lens |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101095705B1 (en) * | 2004-09-20 | 2011-12-20 | 씨제이 지엘에스 주식회사 | Broadband Electronic Logistics System using RFID Tag and Its Method |
| CN1797446A (en) * | 2004-12-22 | 2006-07-05 | 财团法人工业技术研究院 | Real-time supply chain synchronization system and method using radio frequency identification technology |
-
2008
- 2008-04-11 CN CN2008100930077A patent/CN101556903B/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102117731B (en) * | 2009-12-31 | 2013-01-02 | 中芯国际集成电路制造(上海)有限公司 | Method and device for monitoring measurement data in process production flow of semiconductor |
| CN102162824A (en) * | 2010-12-24 | 2011-08-24 | 中科院杭州射频识别技术研发中心 | Online testing method for mass production of ultrahigh frequency (UHF) identification electronic tag antenna |
| CN102162824B (en) * | 2010-12-24 | 2014-11-26 | 中科院杭州射频识别技术研发中心 | Online testing method for mass production of ultrahigh frequency (UHF) identification electronic tag antenna |
| CN110993527A (en) * | 2019-11-07 | 2020-04-10 | 航天科工微电子系统研究院有限公司 | Novel intelligent manufacturing production line for microsystems and implementation method thereof |
| CN110993527B (en) * | 2019-11-07 | 2022-08-02 | 航天科工微电子系统研究院有限公司 | Novel intelligent manufacturing production line for microsystems and implementation method thereof |
| US11366996B2 (en) | 2019-11-20 | 2022-06-21 | Corning Incorporated | Chipless RFID for liquid lens |
| US11580347B2 (en) | 2019-11-20 | 2023-02-14 | Corning Incorporated | Chipless RFID for liquid lens |
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| CN101556903B (en) | 2010-10-20 |
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Granted publication date: 20101020 |