CN101498815A - Miniaturized high-resolution frequency-adjustable optical filter device - Google Patents
Miniaturized high-resolution frequency-adjustable optical filter device Download PDFInfo
- Publication number
- CN101498815A CN101498815A CNA2008100042827A CN200810004282A CN101498815A CN 101498815 A CN101498815 A CN 101498815A CN A2008100042827 A CNA2008100042827 A CN A2008100042827A CN 200810004282 A CN200810004282 A CN 200810004282A CN 101498815 A CN101498815 A CN 101498815A
- Authority
- CN
- China
- Prior art keywords
- filtering apparatus
- miniature high
- resolution frequency
- optical filtering
- tandem type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 169
- 239000013307 optical fiber Substances 0.000 claims abstract description 79
- 230000000694 effects Effects 0.000 claims abstract description 30
- 239000006185 dispersion Substances 0.000 claims abstract description 20
- 238000001914 filtration Methods 0.000 claims description 90
- 230000005540 biological transmission Effects 0.000 claims description 50
- 239000000835 fiber Substances 0.000 claims description 33
- 230000010287 polarization Effects 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 6
- 230000008859 change Effects 0.000 description 14
- 238000004891 communication Methods 0.000 description 9
- 230000006855 networking Effects 0.000 description 9
- 238000013461 design Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000011797 cavity material Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000002955 isolation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000750 progressive effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000000708 deep reactive-ion etching Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000009881 electrostatic interaction Effects 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention relates to a miniaturized high-resolution frequency-adjustable optical filter device, which is used for processing an optical signal with multiple wavelengths and comprises the following components: the optical fiber collimating unit comprises at least one input optical fiber which is arranged along an optical axis of the optical signal and transmits the optical signal and at least one output optical fiber which transmits a preset wavelength, at least one cascade diffraction grating which forms a preset wavelength optical path and a residual wavelength optical path by forming a preset angle with the optical signal and performing dispersion effect on the optical signal so as to separate the preset wavelength and the residual wavelength from the optical signal, a micro-electro-mechanical system lens which is arranged along the optical path and reflects the residual wavelength and the preset wavelength to the cascade diffraction grating so as to transmit the preset wavelength to the output optical fiber, and a relay unit which is used for loading and adjusting the micro-electro-mechanical system lens. The invention can reduce the whole volume of the frequency-adjustable optical filter device and can effectively maintain proper bandwidth resolution.
Description
Technical field
The present invention relates to a kind of Frequency Adjustable (tunable) optical filtering apparatus, particularly relate to and a kind ofly can reduce Frequency Adjustable optical filtering apparatus overall volume, and can effectively keep the miniature high-resolution frequency-modulating optical filtering apparatus of suitable frequency range resolution.
Background technology
Be accompanied by the lasting exploitation of correlation techniques such as Internet, make and also become hot optics spare part very powerful and exceedingly arrogant in the field, current optical communication networking by the optics spare parts such as Frequency Adjustable optical filter that are used for optical communication networking (optical communication network).
The optical communication networking mainly is to constitute via the spare part in conjunction with subsystem (sub-systems), module or execution specific function, aforesaid specific function comprises selects or removes a specific wavelength, or contains in the optical signal of multi-wavelength (multiple wavelengths) from one and to select or to remove specific one group of wavelength.The effect at optical communication networking and the related description of application, then can be illustrated in by StamationsKartalopoulos shown and by Wiley-Interscience in Introduction to DWDM Technology one book of being published in 2000.
Traditionally, in the optical signal of a multi-wavelength, select or remove the function of a specific wavelength or specific one group of wavelength, reach by using the fixed optics filter plate to be combined into such as light access multiplexer devices such as (optical add/drop multiplexer are called for short OADMs).Adjustable (reconfigurable) light access multiplexer (ROADMs) is meant the OADMs that the specific band that is selected or removes can dynamically be revised.This makes dynamically and the optical communication networking of quick reconfiguration becomes possibility.
Therefore, can be dynamically and the optical communication networking of quick reconfiguration in order to cooperate, then need to provide the wave filter of several Frequency Adjustable, the wave filter of these Frequency Adjustable is to allow specific wavelength or the specific one group of wavelength dynamic restructuring that is selected or removes in the optical signal of multi-wavelength.
See also shown in Figure 1, be one the explanation existing a kind of adjustable optical access multiplexer structural representation.Existing a kind of adjustable optical access multiplexer 1 comprises: diaphragm type band pass filter (thin-film band passfilter) the 12 and one output optical alignment element 13 that an input optical alignment element (collimator) 11, rotates or tilts.
This input optical alignment element 11 is made of a ferrule 111 and a lenticule filter plate 112, and it mainly is that transmission one is between λ
0～λ
nBetween multi-wavelength.The diaphragm type band pass filter 12 of this rotation or inclination selectively allows the wavelength X of being desired
iBy.This 13 of output optical alignment element is to be responsible for transmission wavelength λ
I, the motor (figure does not show) that is used for making this diaphragm type band pass filter 12 to rotate or tilt along the direction of arrow among Fig. 1 mainly is the shortcoming that excessive and speed becomes this adjustable optical access multiplexer 1 slowly because of volume.
Aforementioned motor loss mechanism mechanically can't meet the demand of millions of the cycle indexes of using at the networking satisfactorily.In addition, the width of the frequency range of filter plate (passband) is that the function according to its angle of inclination changes, and it causes the optical characteristics by the modulation scope of this diaphragm type band pass filter 12 can't be consistent.And the angle of this diaphragm type band pass filter 12 also will produce polarization dependent loss (polarization dependent loss is called for short PDL), and therefore, PDL herein also is important considerations.
See also shown in Figure 2, be one the explanation existing another kind of adjustable optical access multiplexer synoptic diagram.Existing another kind of adjustable optical access multiplexer 2 comprises: the diaphragm type filter plate 22 of an input optical alignment element 21, a linear change and an output optical alignment element 23.The diaphragm type filter plate 22 of this linear change is to move along the direction of arrow shown in Fig. 2 across light beam transversal ground by a stepping motors (stepping motor, figure does not show).Wavelength across the length of the diaphragm type filter plate 22 of this linear change is passed through will continuously change.Therefore, the wavelength X of being desired
iThen can be selected and the diaphragm type filter plate 22 by this linear change.
The main shortcoming of this adjustable optical access multiplexer 2 is the adjustable optical access multiplexers 1 in shown in Figure 1 of duplicating, and its employed stepping motors volume is excessive, speed is slower, and tends to produce loss easily.In addition, the making of the diaphragm type filter plate 22 of this linear change is very difficult.The diaphragm type filter plate 22 of this linear change will be inhomogeneous because of the film by beam area, separate (for example: dwdm system has the channel spacing of 50GHz.) and make the optical channel (channel) that is used for the narrow interval in existing high density multiplexer for wavelength divisions (dense wavelength division multiplexer the is called for short DWDM) system produce.
See also shown in Figure 3, be one the explanation existing another adjustable optical access multiplexer synoptic diagram.Existing another adjustable optical access multiplexer 3 comprises: an input optical alignment element 31, a wavelength are selected an element 32 and an output optical alignment element 33; Wherein, be to control standard of wavelength tool (etalon) element of a Frequency Adjustable as this wavelength selection element 32 with electric power, temperature or sound.By changing the effective length through the light path of this etalon resonant cavity (etalon cavity), the application that relies on external energy is to select suitable wavelength.
For instance, micromechanics etalon filter (electrically-controlled micromechanical etalon filter) with electric power control is found in IEEEPhotonics Technology Letters, pages 394-395, March, 1998 title are in the explanation of widely tunable Fabry-Perot filter using Ga (Al) AsA10x deformablemirrors.The standard of wavelength tool element of this kind electric power control is to adjust centre wavelength by the spacing between voltage-regulation two reflection horizon.
Other Frequency Adjustable wave filter person mainly is to use one or more heat-sensitive type resonant cavity retes (thermally-sensitive cavitylayers) between the reflectance coating of conventional films filter plate structure.This kind heat-sensitive type resonant cavity rete has a refractive index with temperature change.Therefore, by the refractive index scalable centre wavelength of temperature variation with change resonant cavity rete.
The design of most of thermal actuation (thermally-actuated) is to use expensive relay control technology mostly, and also causes having the problem generation of thermal instability because of the character of resonant cavity material itself.Therefore, need loop to follow the trail of (closed loop tracking) and control gear usually, so also increased the overall dimensions of production cost and packing component.
As shown in the above description, reducing the overall volume of Frequency Adjustable optical filter and also keep suitable frequency range resolution, is current Frequency Adjustable optical filter association area institute technical bottleneck to be broken through, and this obviously is the problem of the anxious desire solution of relevant dealer.Therefore how to found a kind of miniature high-resolution frequency-modulating optical filtering apparatus of new structure, real one of the current important research and development problem that belongs to, also becoming the current industry utmost point needs improved target.
Because the defective that above-mentioned existing Frequency Adjustable optical filter exists, the inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge, and the utilization of cooperation scientific principle, actively studied innovation, in the hope of founding a kind of miniature high-resolution frequency-modulating optical filtering apparatus of new structure, can improve general existing Frequency Adjustable optical filter, make it have more practicality.Through constantly research, design, and, create the present invention who has practical value finally through after studying sample and improvement repeatedly.
Summary of the invention
The objective of the invention is to, overcome the defective that existing Frequency Adjustable optical filter exists, and provide a kind of miniature high-resolution frequency-modulating optical filtering apparatus of new structure, technical matters to be solved is to make it that a kind of miniature high-resolution frequency-modulating optical filtering apparatus is provided, and is very suitable for practicality.
The object of the invention to solve the technical problems realizes by the following technical solutions.A kind of miniature high-resolution frequency-modulating optical filtering apparatus according to the present invention's proposition, be used to handle a light signal with multi-wavelength, this miniature high-resolution frequency-modulating optical filtering apparatus comprises: a fiber optic collimator unit, contain at least one was provided with and transmitted this light signal along an optical axis of this light signal input optical fibre, and at least one transmits the output optical fibre of a predetermined wavelength; At least one tandem type diffraction grating, and accompany a predetermined angular between this light signal and this light signal is carried out effect of dispersion, isolating this predetermined wavelength and a residue wavelength in this light signal certainly, and constitute a predetermined wavelength light path and a residue wavelength light path; One along described light path setting and reflect this residue wavelength and predetermined wavelength to this tandem type diffraction grating, so that this predetermined wavelength is transferred to the MEMS (micro electro mechanical system) eyeglass of this output optical fibre; And relay unit that supplies mounting and adjust this MEMS (micro electro mechanical system) eyeglass.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein this miniature high-resolution frequency-modulating optical filtering apparatus is to comprise most tandem type diffraction gratings, and also comprises one and be arranged on the described light path and the light source polarization rotating element between this tandem type diffraction grating and this MEMS (micro electro mechanical system) eyeglass.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said tandem type diffraction grating are respectively tandem type transmission grating or tandem type reflection grating; And this light source polarization rotating element is one 1/4 ripple plates.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said tandem type diffraction grating is respectively the tandem type transmission grating, described tandem type transmission grating is to accompany one in order along described light path respectively to be the vertical angle settings of 90 degree in fact, and then makes this predetermined wavelength penetrate described tandem type transmission grating in order and to this residue wavelength chromatic effect of loosing along this predetermined wavelength light path; This fiber optic collimator unit has a fiber optic collimator element, and this input optical fibre and output optical fibre are to be arranged at this fiber optic collimator element respectively.
The wafer that aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said relay unit have this MEMS (micro electro mechanical system) eyeglass of mounting carries seat, and the voltage control circuit that this MEMS (micro electro mechanical system) eyeglass of control rotates.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said relay unit are to make this MEMS (micro electro mechanical system) eyeglass do a single axle rotation around one first sloping shaft.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said MEMS (micro electro mechanical system) eyeglass are single shaft pendulum mirrors.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said relay unit are to make this MEMS (micro electro mechanical system) eyeglass do twin shaft rotation perpendicular to second sloping shaft of this first sloping shaft in fact around one first sloping shaft and around one.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said MEMS (micro electro mechanical system) eyeglass are three-dimensional twin shaft pendulum mirrors.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein this miniature high-resolution frequency-modulating optical filtering apparatus also comprises one and is arranged at beam sizes switching device between this MEMS (micro electro mechanical system) eyeglass and this 1/4 ripple plate along described light path.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said beam sizes switching device has a lens load bearing seat along described light path setting, first lens that are located in this lens load bearing seat and have one first focal length, and one is adjacent to these first lens and has second lens less than second focal length of this first focal length.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said first, second lens be respectively gradually changed refractive index lens and C type lens one of them.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said fiber optic collimator unit contains two input optical fibres, and described input optical fibre is arranged at this fiber optic collimator element respectively.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said fiber optic collimator unit contains two output optical fibres, and described output optical fibre is arranged at this fiber optic collimator element respectively.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein this miniature high-resolution frequency-modulating optical filtering apparatus also comprises one and is located in this output optical fibre in order to receive the light sensing unit of this predetermined wavelength, and a ferrule that is located between this output optical fibre and the light sensing unit, this light sensing unit is collapse optical diode light detection piece or photodiode.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein said tandem type diffraction grating is respectively a tandem type transmission grating, described tandem type transmission grating is to accompany one in order along described light path respectively to be the vertical angle settings of 90 degree in fact, and then makes this predetermined wavelength penetrate described tandem type transmission grating in order and to this residue wavelength chromatic effect of loosing along this predetermined wavelength light path; This fiber optic collimator unit is to have an input optical fibre collimating element and an output optical fibre collimating element, and this input optical fibre and output optical fibre are to be arranged at this input optical fibre collimating element and output optical fibre collimating element respectively.
Aforesaid miniature high-resolution frequency-modulating optical filtering apparatus, wherein this miniature high-resolution frequency-modulating optical filtering apparatus also comprises one and is located in this output optical fibre in order to receiving the light sensing unit of this predetermined wavelength, this light sensing unit be collapse optical diode light detection piece and photodiode one of them.
The present invention compared with prior art has tangible advantage and beneficial effect.As known from the above, for achieving the above object, miniature high-resolution frequency-modulating optical filtering apparatus of the present invention, be used to handle a light signal with multi-wavelength, comprise: fiber optic collimator unit, at least one tandem type diffraction grating (cascaded optical diffraction grating), a MEMS (micro electro mechanical system) (micro-electro-mechanical system is called for short a MEMS) eyeglass and a mounting are also adjusted the relay unit (actuator) of this MEMS (micro electro mechanical system) eyeglass.This fiber optic collimator unit contains at least one input optical fibre that is provided with and transmits this light signal along an optical axis of this light signal, and at least one transmits the output optical fibre of a predetermined wavelength.Accompany a predetermined angular between this tandem type diffraction grating and this light signal and this light signal is carried out effect of dispersion (dispersion effect), isolating this predetermined wavelength and a residue wavelength in this light signal certainly, and constitute a predetermined wavelength light path and a residue wavelength light path.This MEMS (micro electro mechanical system) eyeglass is along described light path setting, and reflect this residue wavelength and predetermined wavelength to this tandem type diffraction grating so that this predetermined wavelength is transferred to this output optical fibre.
By technique scheme, miniature high-resolution frequency-modulating optical filtering apparatus of the present invention has following advantage and beneficial effect at least: the present invention can reduce the overall volume of Frequency Adjustable optical filtering apparatus, and can keep suitable frequency range resolution effectively.
In sum, the present invention is relevant a kind of miniature high-resolution frequency-modulating optical filtering apparatus, be used to handle a light signal with multi-wavelength, it comprises: one contains at least one along an optical axis setting of this light signal and transmit the input optical fibre of this light signal and the fiber optic collimator unit of the output optical fibre that at least one transmits a predetermined wavelength, at least one and this light signal press from both sides a predetermined angular and this light signal are carried out effect of dispersion to isolate this predetermined wavelength and a residue wavelength and to constitute a predetermined wavelength light path and the tandem type diffraction grating in a residue wavelength light path in this light signal certainly, one along described light path setting and reflect this residue wavelength and predetermined wavelength to this tandem type diffraction grating so that this predetermined wavelength is transferred to the MEMS (micro electro mechanical system) eyeglass of this output optical fibre, and one for mounting and adjust the relay unit of this MEMS (micro electro mechanical system) eyeglass.The present invention can reduce the overall volume of Frequency Adjustable optical filtering apparatus, and can keep suitable frequency range resolution effectively.The present invention has above-mentioned plurality of advantages and practical value, no matter it all has bigger improvement on product structure or function, obvious improvement is arranged technically, and produced handy and practical effect, and more existing Frequency Adjustable optical filter has the outstanding effect of enhancement, thereby being suitable for practicality more, really is a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of instructions, and for above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, below especially exemplified by preferred embodiment, and conjunction with figs., be described in detail as follows.
Description of drawings
Fig. 1 is the synoptic diagram of the existing a kind of adjustable optical access multiplexer of an explanation.
Fig. 2 is the synoptic diagram of the existing another kind of adjustable optical access multiplexer of an explanation.
Fig. 3 is the synoptic diagram of existing another the adjustable optical access multiplexer of an explanation.
Fig. 4 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus first preferred embodiment of the present invention.
Fig. 5 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus second preferred embodiment of the present invention.
Fig. 6 is the front elevational schematic of this second preferred embodiment of miniature high-resolution frequency-modulating optical filtering apparatus of the present invention.
Fig. 7 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 3rd preferred embodiment of the present invention.
Fig. 8 is the front elevational schematic of miniature high-resolution frequency-modulating optical filtering apparatus the 3rd preferred embodiment of the present invention.
Fig. 9 is a kind of schematic top plan view of aspect of a beam sizes switching device of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 3rd preferred embodiment of the present invention.
Figure 10 is the schematic top plan view of another kind of aspect of the beam sizes switching device of explanation the present invention the 3rd preferred embodiment.
Figure 11 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 4th preferred embodiment of the present invention.
Figure 12 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 5th preferred embodiment of the present invention.
Figure 13 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 6th preferred embodiment of the present invention.
Figure 14 is the front elevational schematic of miniature high-resolution frequency-modulating optical filtering apparatus the 6th preferred embodiment of the present invention.
Figure 15 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 7th preferred embodiment of the present invention.
Figure 16 is the front elevational schematic of miniature high-resolution frequency-modulating optical filtering apparatus the 7th preferred embodiment of the present invention.
Figure 17 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 8th preferred embodiment of the present invention.
Figure 18 is the front elevational schematic of miniature high-resolution frequency-modulating optical filtering apparatus the 8th preferred embodiment of the present invention.
Figure 19 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 9th preferred embodiment of the present invention.
Embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, to its embodiment of miniature high-resolution frequency-modulating optical filtering apparatus, structure, feature and the effect thereof that foundation the present invention proposes, describe in detail as after.
Relevant aforementioned and other technology contents, characteristics and effect of the present invention can be known to present in the following detailed description that cooperates with reference to graphic preferred embodiment.By the explanation of embodiment, when can being to reach technological means that predetermined purpose takes and effect to get one more deeply and concrete understanding to the present invention, yet appended graphic only provide with reference to the usefulness of explanation, be not to be used for the present invention is limited.
Before the present invention is described in detail, it should be noted that in the following description content similar elements is to represent with identical label.
＜the first preferred embodiment 〉
See also shown in Figure 4, be the explanation miniature high-resolution frequency-modulating optical filtering apparatus first preferred embodiment of the present invention schematic top plan view.The miniature high-resolution frequency-modulating optical filtering apparatus of the present invention's first preferred embodiment is to be used to handle a light signal λ (λ just, with multi-wavelength
0λ
iλ
n), it comprises: fiber optic collimator unit 4, tandem type diffraction grating 5, light source polarization rotating element, a MEMS (micro electro mechanical system) eyeglass 7 and a mounting are also adjusted the relay unit 8 of this MEMS (micro electro mechanical system) eyeglass 7.
This fiber optic collimator unit 4 contains an input optical fibre 41 that is provided with and transmits this light signal λ along the optical axis of this light signal λ, and transmission one predetermined wavelength lambda
iOutput optical fibre 42.This fiber optic collimator unit 4 has a fiber optic collimator element 43, and this input optical fibre 41 and output optical fibre 42 are to be arranged at this fiber optic collimator element 43 respectively.In this first preferred embodiment of the present invention, the fiber optic collimator element 43 that this contains input optical fibre 41 and output optical fibre 42 is one can reduce cost and make volume be able to the double-fiber collimator of miniaturization (dual fibercollimator) because of a shared lenticule (figure do not show).
This tandem type diffraction grating 5, in this first preferred embodiment of the present invention, this tandem type diffraction grating 5 is to use a tandem type transmission (transmission) grating 51, also can be to use tandem type reflection (reflection) grating.Accompany a predetermined angular between this tandem type transmission grating 51 and this light signal λ and this light signal λ is carried out effect of dispersion, to isolate this predetermined wavelength lambda among this light signal λ certainly
iReach a residue wavelength (λ
n, figure does not show) and constitute a predetermined wavelength light path and a residue wavelength light path.
In the present invention, this tandem type transmission grating 51 allows this light signal λ by twice, and therefore, the volume of overall package member reduces and the grating cost descends.Tandem type transmission grating 51 used in the present invention can be to make via produce most grooves on a substrate surface, also can be to make via forming on whole base material as the periodically variable diffraction pattern of volume phase holographic grating (volume phase holographic grating).
In this first preferred embodiment of the present invention, this light source polarization rotating element is one 1/4 ripple plates (quarter waveplate) 6.This 1/4 ripple plate 6 is to be arranged on the described light path and between this tandem type transmission grating 51 and this MEMS (micro electro mechanical system) 7 eyeglasses.In the present invention, this 1/4 ripple plate 6 is to be used for making the polarized light of this light signal λ to rotate 90 °, moderately to reduce the polarization dependent loss (PDL) that is produced because of this tandem type transmission grating 51.
This MEMS (micro electro mechanical system) eyeglass 7 is along described light path setting, and reflects this residue wavelength X
nAnd predetermined wavelength lambda
iTo this tandem type transmission grating 51 so that this predetermined wavelength lambda
iBe transferred to this output optical fibre 42.
This relay unit 8, the wafer with this MEMS (micro electro mechanical system) eyeglass 7 of a mounting carries the voltage control circuit 82 that this MEMS (micro electro mechanical system) eyeglass 7 of seat 81 and one control rotates.Be applicable to that relay unit 8 of the present invention is to make this MEMS (micro electro mechanical system) eyeglass 7 around one first sloping shaft (just, Z-axis) does a single axle rotation, also can be to make this MEMS (micro electro mechanical system) eyeglass 7 do twin shaft rotation perpendicular to second sloping shaft (transverse axis just) of this first sloping shaft in fact around this first sloping shaft and around one.This voltage control circuit 82 is via drive electrode (figure do not show) is applied an appropriate voltage so that this MEMS (micro electro mechanical system) eyeglass 7 produces mobile because of the effect of electrostatic force, whereby, adjust and determine the angle position of first sloping shaft (Z-axis just) of this MEMS (micro electro mechanical system) eyeglass 7.
Being applicable to that MEMS (micro electro mechanical system) eyeglass 7 of the present invention is single shaft pendulum mirrors (tilt mirror), also can be the twin shaft pendulum mirror of three-dimensional (3-D).What deserves to be mentioned is, the MEMS (micro electro mechanical system) eyeglass 7 of various embodiments of the present invention, preferably, be obtained via monocrystalline silicon being bestowed micro-photographing process (photolithography), deep reaction formula ion-etching (deepreactive ion etching is called for short DRIE) and wet etching manufacture of semiconductor such as (wetetching).
In the design of single shaft pendulum mirror (figure does not show), the eyeglass in moving (pendulum mirror just) is to turn round the fixing certainly environmental structure of arm (torsion beam) with silicon to be draped.This relay unit 8 is to be used for making this pendulum mirror to tilt, so that the pitch angle of this pendulum mirror is accurately and can controls via the voltage that puts on relay unit 8 repeatedly.
(figure does not show) is to use two groups static relay unit in the design of 3-D twin shaft pendulum mirror.Wherein one group of relay unit is that a balance accessory (gimbal assembly) that contains this 3-D twin shaft pendulum mirror is tilted.Wherein another group relay unit is that the 3-D twin shaft pendulum mirror that is positioned at this balance accessory is tilted.This 3-D twin shaft pendulum mirror is to turn round arm via one first group of silicon to be suspended in this balance accessory, and this balance accessory is to turn round arm via one second group of silicon to be suspended in its fixing environmental structure, and it is vertically to turn round arm towards this first group of silicon that this second group of silicon turned round arm.This allows the banking motion of successive range on diaxon.
Be applicable to structure, its Electrostatic Control mechanism (just relay unit 8) and the manufacturing thereof of MEMS (micro electro mechanical system) eyeglass 7 of the present invention, can be to use and be described in U.S. Pat 6,628,856 and US6,782,153 aspect, these MEMS (micro electro mechanical system) eyeglasses are described in detail in this and no longer add to give unnecessary details.
MEMS (micro electro mechanical system) eyeglass 7 of the present invention design in the use is to turn round arm in conjunction with monocrystalline silicon to form pendulum mirror structure, and this pendulum mirror structure almost is the loss in the no mechanism under recycling repeatedly and for a long time.Silicon is turned round arm does not make this MEMS (micro electro mechanical system) eyeglass 7 can keep due pitch angle under these relay unit 8 long cycle controls because of there being ductility in essence yet.Therefore, the MEMS (micro electro mechanical system) eyeglass 7 that uses among the present invention provides and includes compact in size, consumed power is low and high some advantage of trustworthiness.
What deserves to be mentioned is, typically, single (single) tandem type transmission grating only provides a very little effect of dispersion (with typical low-cost grating, be about 0.08 °/nm), therefore, this first preferred embodiment of the present invention is to be applicable to low-density multiplexer for wavelength divisions (coarse wavelengthdivision multiplexer is called for short CWDM) system.Owing to be used for the generally about 100GHz of channel spacing or the 50GHz of dwdm system.Therefore, single tandem type transmission grating that this kind effect of dispersion is little is difficult to separate as the wavelength interval of dwdm system passage closely.When the grating in being applied to dwdm system had a large amount of dispersity (dispersion power), then these gratings meaned the optical element that must increase increase channel isolations such as specific prism further usually.
＜the second preferred embodiment 〉
See also Fig. 5 and shown in Figure 6, Fig. 5 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus second preferred embodiment of the present invention, and Fig. 6 is the front elevational schematic of this second preferred embodiment.The miniature high-resolution frequency-modulating filter of the present invention's second preferred embodiment is to be used to handle the light signal λ (λ just, that this has multi-wavelength
0λ
iλ
n), and be to be same as this first preferred embodiment haply.Its difference is that the miniature high-resolution frequency-modulating filter of this second preferred embodiment is to comprise two tandem type transmission gratings 521,522, to be applicable to dwdm system.
Described tandem type transmission grating 521,522 is to accompany one in order along described light path respectively to be the vertical angle setting of 90 degree in fact, and then makes this predetermined wavelength lambda
iPenetrated described tandem type transmission grating 521,522 in order and to this residue wavelength X along this predetermined wavelength light path
nThe chromatic effect of loosing.What deserves to be mentioned is, vertical in the different embodiment of this instructions, be the direction of facing paper that is parallel to embodiment with reference to a direction of overlooking paper and perpendicular to embodiment.Therefore, described tandem type transmission grating 521,522 is perpendicular to paper.Described tandem type transmission grating the 521, the 522nd tilts to think this light signal λ (input beam just) and this predetermined wavelength lambda a little
iVertical offset between (output beam just) (vertical offset) is done some compensation (can more be clearly illustrated by Fig. 6).
After this light signal λ passed through this tandem type transmission grating 521, the spectrum of this light signal λ was opened by chromatic dispersion.This dispersion angle can be represented via following equation:
λf＝sinθ
in+sinθ
out
In following formula, f is the spatial frequency (spatialfrequency) of this tandem type transmission grating 521; θ
InIt is the incident angle of the normal direction of relative this tandem type transmission grating 521; θ
OutIt is the emergence angle of the normal direction of relative this tandem type transmission grating 521.As λ=1545nm, and during f=940lines/mm, θ
In=θ
Out=46.6 °.
In this second preferred embodiment of the present invention, described tandem type transmission grating 521,522 comes down to the vertical angle setting with 90 degree, whereby, and to produce the multiplication of effect of dispersion.This predetermined wavelength lambda
iBe further via adjusting this MEMS (micro electro mechanical system) eyeglass 7 to guide this predetermined wavelength lambda
iFor the second time by described this output optical fibre 42 of tandem type transmission grating 521,522 reverse reflex.So, this predetermined wavelength lambda
iLight path then be light path between this input optical fibre 41 and this output optical fibre 42, or via the selected transmission port (port) of this relay unit 8.Residue wavelength X among this light signal λ
nBe to be excluded because of the total dispersion angle is excessive.
What deserves to be mentioned is that the size of MEMS (micro electro mechanical system) eyeglass 7 of the present invention and configuration thereof are to be designed to, this light signal λ (λ just,
0λ
iλ
n) will meet the surface of this MEMS (micro electro mechanical system) eyeglass 7 and opened by chromatic dispersion by described tandem type transmission grating 521,522 backs.If when needing, light path from these MEMS (micro electro mechanical system) eyeglass 7 reflexeds to this output optical fibre 42, be to send according to described tandem type transmission grating 521,522 one of them person's regulation light path, so that this light signal λ experience tertiary colo(u)r(s) looses and replaces four chromatic dispersions.For instance, the means that aforementioned lights signal λ experience tertiary colo(u)r(s) looses are can be via using extra reflecting element or optical element (figure does not show) to reach.
In this second preferred embodiment of the present invention, this MEMS (micro electro mechanical system) eyeglass 7 can be to use single shaft pendulum mirror, (just, Z-axis) orientation causes the change at the pitch angle of this MEMS (micro electro mechanical system) eyeglass 7 to cause this predetermined wavelength lambda to first sloping shaft of this MEMS (micro electro mechanical system) eyeglass 7
iBe reversed this output optical fibre 42 that turns back; This MEMS (micro electro mechanical system) eyeglass 7 also can be to use 3-D twin shaft pendulum mirror, then this second sloping shaft (just, transverse axis) auxiliary adjustment can be adjusted the Z-axis of light beam more accurately, is compensated so as to wrong accurate (misalignment) to input optical fibre 41 and output optical fibre 42.Level is a direction of overlooking paper and the direction of facing paper perpendicular to embodiment that reference one is parallel to embodiment in each embodiment of the present invention's explanation.Generally, this first sloping shaft is to be used to carry out frequency modulation, and this second sloping shaft is to be used as calibration.Through above stated specification as can be known, the vertical calibration that this input optical fibre 41, output optical fibre 42, tandem type transmission grating 521,522 and MEMS (micro electro mechanical system) eyeglass 7 are own all can be controlled accurately.
This second preferred embodiment of the present invention is via the reflective MEMS (micro electro mechanical system) eyeglass 7 that uses a described tandem type transmission grating 521,522 and a high-res, make light signal λ by described tandem type transmission grating 521,522 twice, to overcome the restriction that singly penetrates grating and brought of effect of dispersion deficiency.Second preferred embodiment that the present invention is used for dwdm system can reach purpose and the effect that increases the total dispersion angle significantly, and makes the isolation of adjacency channel increase.
＜the three preferred embodiment 〉
See also Fig. 7 and shown in Figure 8, Fig. 7 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 3rd preferred embodiment of the present invention, and Fig. 8 is the front elevational schematic of the 3rd preferred embodiment.The miniature high-resolution frequency-modulating filter of the present invention's the 3rd preferred embodiment is to be same as this second preferred embodiment haply.Its difference is, the miniature high-resolution frequency-modulating filter of the 3rd preferred embodiment also comprises one and is arranged at beam sizes switching device (beam-sizeconversion element) 9 between this MEMS (micro electro mechanical system) eyeglass 7 and this 1/4 ripple plate 6 along described light path.
This beam sizes switching device 9, have a lens load bearing seat 91, first lens 92 that are located in this lens load bearing seat 91 and have one first focal length (focal length) F, and one is adjacent to these first lens 92 and has second lens 93 less than second focal distance f of this first focal length F along described light path setting.Therefore, as shown in Figure 9, the diameter D of the light beam imported of these first lens 92 will be reduced into D (f/F) when being transferred to these second lens 93 certainly.
First and second lens 92,93 that are applicable to the present invention's the 3rd preferred embodiment are respectively gradually changed refractive index lens (GRIN lens, just, refractive index is gradual change type and changes to change the lens of focal length) and C type lens (C lens, just, be that the end is circular-arc cylindrical lens, and use an end face that is formed to focus) one of them.
Seeing also shown in Figure 9ly, is a kind of schematic top plan view of aspect of a beam sizes switching device of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 3rd preferred embodiment of the present invention.These first, second lens the 92, the 93rd, C type lens are to the combination of C type lens, and C type lens with this first focal length F, usually have one than major diameter and long length, and the C type lens with second focal distance f have one usually than minor diameter and short length.
In addition, seeing also shown in Figure 10ly, is the schematic top plan view of another kind of aspect of the beam sizes switching device of explanation the present invention the 3rd preferred embodiment.These first, second lens the 92, the 93rd, the combination of gradually changed refractive index lens refractive index progressive lens, and gradually changed refractive index lens with this first focal length F, usually have one than major diameter and long length, and the gradually changed refractive index lens with this second focal distance f have one usually than minor diameter and short length.
In addition, first, second lens 92,93 of this beam sizes switching device 9 of the present invention also can be the combinations of C type lens refractive index progressive lens, and the gradually changed refractive index lens are to one of them person of combination of C type lens.Other beam sizes switching devices that are suitable for also can be the combinations of convex lens (convexlens) to convex lens.In addition, these first, second lens the 92, the 93rd, along axially being oppositely arranged of an optical axis, and the surface towards being provided with of these first, second lens 92,93 is to be polished 6～8 degree angles respectively so as to reducing reflection light quantity.
＜the four preferred embodiment 〉
See also shown in Figure 11, be the explanation miniature high-resolution frequency-modulating optical filtering apparatus the 4th preferred embodiment of the present invention schematic top plan view.The miniature high-resolution frequency-modulating filter of the present invention's the 4th preferred embodiment is to be same as this second preferred embodiment haply.Its difference is that the miniature high-resolution frequency-modulating filter of the 4th preferred embodiment is to comprise three tandem type transmission gratings 531,532,533, to be applicable to dwdm system.
Described tandem type transmission grating 531,532,533 is to accompany one in order along described light path respectively to be the vertical angle setting of 90 degree in fact, and then makes this predetermined wavelength lambda
iPenetrated described tandem type transmission grating 531,532,533 in order and to this residue wavelength X along this predetermined wavelength light path
n(figure does not show) chromatic effect of loosing whereby, can increase the effect of dispersion of single unit system.
＜the five preferred embodiment 〉
See also shown in Figure 12, be the explanation miniature high-resolution frequency-modulating optical filtering apparatus the 5th preferred embodiment of the present invention schematic top plan view.The miniature high-resolution frequency-modulating filter of the present invention's the 5th preferred embodiment is to be same as this second preferred embodiment haply.Its difference is that the miniature high-resolution frequency-modulating filter of the 5th preferred embodiment is to comprise four tandem type transmission gratings 541,542,543,544, to be applicable to dwdm system.
Described tandem type transmission grating 541,542,543,544 is to accompany one in order along described light path respectively to be the vertical angle setting of 90 degree in fact, and then makes this predetermined wavelength lambda
iPenetrated described tandem type transmission grating 541,542,543,544 in order and to this residue wavelength X along this predetermined wavelength light path
n(figure does not show) chromatic effect of loosing.
＜the six preferred embodiment 〉
See also Figure 13 and shown in Figure 14, Figure 13 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 6th preferred embodiment of the present invention, and Figure 14 is the front elevational schematic of the 6th preferred embodiment.The miniature high-resolution frequency-modulating filter of the present invention's the 6th preferred embodiment is to be same as the 3rd preferred embodiment haply.Its difference is, the fiber optic collimator unit 4 of the miniature high-resolution frequency-modulating filter of the 6th preferred embodiment is to contain two input optical fibres 411,412.Described input optical fibre the 411, the 412nd is arranged at this fiber optic collimator element 43 respectively, whereby, with the present invention's the 6th preferred embodiment as a Frequency Adjustable optical filtering apparatus that is used for the optical-fibre communications networking with change-over switch (switching).
In the present invention's the 6th preferred embodiment, this MEMS (micro electro mechanical system) eyeglass 7 is to use 3-D twin shaft pendulum mirror.Therefore, second sloping shaft of this MEMS (micro electro mechanical system) eyeglass 7 (transverse axis just) can select described input optical fibre 411,412 one of them person's light signal λ to be used as the light source that is conditioned.As shown in figure 14, the pitch angle of this MEMS (micro electro mechanical system) eyeglass 7 (shown in the curve arrow in the wafer of Figure 14 carries seat 81) is to be to enter input optical fibre 411 or input optical fibre 412 around its second sloping shaft (transverse axis just) to determine.In addition, as shown in figure 13, the pitch angle of this MEMS (micro electro mechanical system) eyeglass 7 (shown in the curve arrow in the wafer of Figure 13 carries seat 81) is to adjust the predetermined wavelength lambda that is sent to this output optical fibre 42 around its first sloping shaft (Z-axis just)
i
＜the seven preferred embodiment 〉
See also Figure 15 and shown in Figure 16, Figure 15 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 7th preferred embodiment of the present invention, and Figure 16 is the front elevational schematic of the 7th preferred embodiment.The miniature high-resolution frequency-modulating filter of the present invention's the 7th preferred embodiment is to be same as the 3rd preferred embodiment haply.Its difference is that the fiber optic collimator unit 4 of the miniature high-resolution frequency-modulating filter of the 7th preferred embodiment is to contain two output optical fibres 421,422.Described output optical fibre the 421, the 422nd is arranged at this fiber optic collimator element 43 respectively, whereby, with the present invention's the 7th preferred embodiment as a Frequency Adjustable optical filtering apparatus that is used for the optical-fibre communications networking with change-over switch.
In the present invention's the 7th preferred embodiment, this MEMS (micro electro mechanical system) eyeglass 7 is to use 3-D twin shaft pendulum mirror.Therefore, second sloping shaft of this MEMS (micro electro mechanical system) eyeglass 7 (transverse axis just) can select described output optical fibre 421,422 one of them person to transmit this predetermined wavelength lambda
iAs shown in figure 16, the pitch angle of this MEMS (micro electro mechanical system) eyeglass 7 (shown in the curve arrow in the wafer of Figure 16 carries seat 81) is to determine this predetermined wavelength lambda around its second sloping shaft (transverse axis just)
iBe to be transferred to output optical fibre 421 or output optical fibre 422.In addition, as shown in figure 15, the pitch angle of this MEMS (micro electro mechanical system) eyeglass 7 (shown in the curve arrow in the wafer of Figure 15 carries seat 81) is to adjust the predetermined wavelength lambda that is sent to this output optical fibre 42 around its first sloping shaft (Z-axis just)
i
＜the eight preferred embodiment 〉
See also Figure 17 and shown in Figure 180, Figure 17 is the schematic top plan view of explanation miniature high-resolution frequency-modulating optical filtering apparatus the 8th preferred embodiment of the present invention, and Figure 18 is the front elevational schematic of the 8th preferred embodiment.The miniature high-resolution frequency-modulating filter of the present invention's the 8th preferred embodiment is to be same as the 3rd preferred embodiment haply.Its difference is that the miniature high-resolution frequency-modulating filter of the 8th preferred embodiment also comprises one and is located in this output optical fibre 42 in order to receive this predetermined wavelength lambda
iLight sensing unit (optical sensor) 94, and a ferrule (ferrule) 95 that is located between this output optical fibre 42 and the light sensing unit 94, to examine device (optical detector) as the Frequency Adjustable optics light that is used for optical channel monitor (optical channel monitor).In the present invention's the 8th preferred embodiment, this light sensing unit 94 is collapse optical diode light detection pieces (avalanche photodiode is called for short APD), also can be photodiode (photo-diode).
＜the nine preferred embodiment 〉
See also shown in Figure 19, be the explanation miniature high-resolution frequency-modulating optical filtering apparatus the 9th preferred embodiment of the present invention schematic top plan view.The miniature high-resolution frequency-modulating filter of the present invention's the 9th preferred embodiment is to be same as this second preferred embodiment haply.Its difference is, the fiber optic collimator unit 4 of the miniature high-resolution frequency-modulating filter of the 9th preferred embodiment has an input optical fibre collimating element 44 and an output optical fibre collimating element 45, and this input optical fibre 41 and output optical fibre 42 are to be arranged at this input optical fibre collimating element 44 and output optical fibre collimating element 45 respectively.In addition, the miniature high-resolution frequency-modulating rate wave apparatus of the present invention's the 9th preferred embodiment also comprises one and is located in this output optical fibre 42 in order to receive this predetermined wavelength lambda
iLight sensing unit 96.In the present invention's the 9th preferred embodiment, this light sensing unit 96 is collapse optical diode light detection pieces, also can be photodiode.
General Utopian Frequency Adjustable optical filtering apparatus is can be to the wavelength (λ just, that is selected
i) low insertion loss (insertion loss) and wide frequency range is provided, side by side, for the wavelength that is not selected (λ just,
n) excellent isolation is provided.In addition, Utopian Frequency Adjustable optical filtering apparatus is the tuning range that can provide wide, and can promptly produce the adjusting mechanism of loss fast and not in conjunction with one.In addition, the optical characteristics of selected frequency range will can not change along with the function of wavelength.
Therefore, each preferred embodiment of the present invention in conjunction with the relay unit 8 of tandem type diffraction grating 5, MEMS (micro electro mechanical system) eyeglass 7 and electrostatic interaction with as the Frequency Adjustable element, under the Frequency Adjustable element that the diaphragm type filter plate and the electro-motor of previous prior art institute combination are constituted was compared, not only the problem of volume miniaturization and loss was little; In addition, the feasible predetermined wavelength lambda of being separated because enough effect of dispersions are provided from this light signal λ
iPossess excellent isolation is arranged.
Conclude describedly, miniature high-resolution frequency-modulating optical filtering apparatus of the present invention can reduce the overall volume of Frequency Adjustable optical filtering apparatus, and can keep suitable frequency range resolution effectively, so can reach purpose of the present invention and effect really.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention, any those skilled in the art, in not breaking away from the technical solution of the present invention scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solution of the present invention, according to technical spirit of the present invention to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (17)
1, a kind of miniature high-resolution frequency-modulating optical filtering apparatus is used to handle a light signal with multi-wavelength, it is characterized in that this miniature high-resolution frequency-modulating optical filtering apparatus comprises:
A fiber optic collimator unit contain at least one was provided with and transmitted this light signal along an optical axis of this light signal input optical fibre, and at least one transmits the output optical fibre of a predetermined wavelength;
At least one tandem type diffraction grating, and accompany a predetermined angular between this light signal and this light signal is carried out effect of dispersion, isolating this predetermined wavelength and a residue wavelength in this light signal certainly, and constitute a predetermined wavelength light path and a residue wavelength light path;
One along described light path setting and reflect this residue wavelength and predetermined wavelength to this tandem type diffraction grating, so that this predetermined wavelength is transferred to the MEMS (micro electro mechanical system) eyeglass of this output optical fibre; And
A relay unit that supplies mounting and adjust this MEMS (micro electro mechanical system) eyeglass.
2, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 1, it is characterized in that this miniature high-resolution frequency-modulating optical filtering apparatus is to comprise most tandem type diffraction gratings, and also comprise one and be arranged on the described light path and the light source polarization rotating element between this tandem type diffraction grating and this MEMS (micro electro mechanical system) eyeglass.
3, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 2 is characterized in that wherein said tandem type diffraction grating is respectively tandem type transmission grating or tandem type reflection grating; And this light source polarization rotating element is one 1/4 ripple plates.
4, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 3, it is characterized in that wherein said tandem type diffraction grating is respectively the tandem type transmission grating, described tandem type transmission grating is to accompany one in order along described light path respectively to be the vertical angle settings of 90 degree in fact, and then makes this predetermined wavelength penetrate described tandem type transmission grating in order and to this residue wavelength chromatic effect of loosing along this predetermined wavelength light path; This fiber optic collimator unit has a fiber optic collimator element, and this input optical fibre and output optical fibre are to be arranged at this fiber optic collimator element respectively.
5, as the described miniature high-resolution frequency-modulating optical filtering apparatus of arbitrary claim in the claim 1 to 4, it is characterized in that the wafer that wherein said relay unit has this MEMS (micro electro mechanical system) eyeglass of mounting carries seat, and the voltage control circuit that this MEMS (micro electro mechanical system) eyeglass of control rotates.
6, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 5 is characterized in that wherein said relay unit is to make this MEMS (micro electro mechanical system) eyeglass do a single axle rotation around one first sloping shaft.
7, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 6 is characterized in that wherein said MEMS (micro electro mechanical system) eyeglass is a single shaft pendulum mirror.
8, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 5 is characterized in that wherein said relay unit is to make this MEMS (micro electro mechanical system) eyeglass do twin shaft rotation perpendicular to second sloping shaft of this first sloping shaft in fact around one first sloping shaft and around one.
9, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 8 is characterized in that wherein said MEMS (micro electro mechanical system) eyeglass is three-dimensional twin shaft pendulum mirror.
10, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 4 is characterized in that this miniature high-resolution frequency-modulating optical filtering apparatus also comprises one and is arranged at beam sizes switching device between this MEMS (micro electro mechanical system) eyeglass and this 1/4 ripple plate along described light path.
11, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 10, it is characterized in that wherein said beam sizes switching device has a lens load bearing seat along described light path setting, first lens that are located in this lens load bearing seat and have one first focal length, and one is adjacent to these first lens and has second lens less than second focal length of this first focal length.
12, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 11, it is characterized in that wherein said first, second lens be respectively gradually changed refractive index lens and C type lens one of them.
13, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 10 is characterized in that wherein said fiber optic collimator unit contains two input optical fibres, and described input optical fibre is arranged at this fiber optic collimator element respectively.
14, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 10 is characterized in that wherein said fiber optic collimator unit contains two output optical fibres, and described output optical fibre is arranged at this fiber optic collimator element respectively.
15, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 4, it is characterized in that this miniature high-resolution frequency-modulating optical filtering apparatus also comprises one and is located in this output optical fibre in order to receive the light sensing unit of this predetermined wavelength, and a ferrule that is located between this output optical fibre and the light sensing unit, this light sensing unit is collapse optical diode light detection piece or photodiode.
16, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 3, it is characterized in that wherein said tandem type diffraction grating is respectively a tandem type transmission grating, described tandem type transmission grating is to accompany one in order along described light path respectively to be the vertical angle settings of 90 degree in fact, and then makes this predetermined wavelength penetrate described tandem type transmission grating in order and to this residue wavelength chromatic effect of loosing along this predetermined wavelength light path; This fiber optic collimator unit has an input optical fibre collimating element and an output optical fibre collimating element, and this input optical fibre and output optical fibre are to be arranged at this input optical fibre collimating element and output optical fibre collimating element respectively.
17, miniature high-resolution frequency-modulating optical filtering apparatus as claimed in claim 4, it is characterized in that this miniature high-resolution frequency-modulating optical filtering apparatus also comprises one and is located in this output optical fibre in order to receiving the light sensing unit of this predetermined wavelength, this light sensing unit be collapse optical diode light detection piece and photodiode one of them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100042827A CN101498815A (en) | 2008-01-29 | 2008-01-29 | Miniaturized high-resolution frequency-adjustable optical filter device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100042827A CN101498815A (en) | 2008-01-29 | 2008-01-29 | Miniaturized high-resolution frequency-adjustable optical filter device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101498815A true CN101498815A (en) | 2009-08-05 |
Family
ID=40945957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100042827A Pending CN101498815A (en) | 2008-01-29 | 2008-01-29 | Miniaturized high-resolution frequency-adjustable optical filter device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101498815A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110212977A (en) * | 2019-06-10 | 2019-09-06 | 昂纳信息技术（深圳）有限公司 | A kind of wavelength and power monitor device |
| CN111694103A (en) * | 2020-06-30 | 2020-09-22 | 昂纳信息技术（深圳）有限公司 | Design method of optical filter |
-
2008
- 2008-01-29 CN CNA2008100042827A patent/CN101498815A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110212977A (en) * | 2019-06-10 | 2019-09-06 | 昂纳信息技术（深圳）有限公司 | A kind of wavelength and power monitor device |
| CN111694103A (en) * | 2020-06-30 | 2020-09-22 | 昂纳信息技术（深圳）有限公司 | Design method of optical filter |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7899330B2 (en) | Compact high-resolution tunable optical filter using optical diffraction element and a mirror | |
| Wu et al. | Optical MEMS for lightwave communication | |
| EP1766819B1 (en) | Dual-source optical wavelength processor | |
| US8229258B2 (en) | Optical waveguide-type wavelength domain switch | |
| US20030021526A1 (en) | Dynamic dispersion compensator | |
| US7873246B2 (en) | Beam steering element and associated methods for manifold fiberoptic switches and monitoring | |
| US20070160321A1 (en) | Monolithic mems-based wavelength-selective switches and cross connects | |
| US20030035605A1 (en) | Double pass arrangement for a liquid crystal device | |
| US7231110B2 (en) | Wavelength selector switch | |
| US7253873B2 (en) | Dynamic gain equalizer | |
| JP4842226B2 (en) | Wavelength selective switch | |
| US6671428B1 (en) | Wavelength selective optical cross switch and optical add/drop multiplexer using volume phase grating and array of micro electro mechanical mirrors | |
| JP4949355B2 (en) | Wavelength selective switch | |
| WO2019234448A1 (en) | Optical switching unit | |
| CN101498815A (en) | Miniaturized high-resolution frequency-adjustable optical filter device | |
| JP2009042557A (en) | Wavelength selective switch | |
| Berger et al. | Widely tunable, narrow optical bandpass Gaussian filter using a silicon microactuator | |
| KR20040005969A (en) | Reconfigurable optical add/drop module | |
| TWI325974B (en) | Compact high-resolution tunable optical filter apparatus | |
| Sumriddetchkajorn et al. | A reconfigurable thin-film filter-based 2 x 2 add-drop fiber-optic switch structure | |
| Wilson et al. | Spectral passband filter with independently variable center wavelength and bandwidth | |
| Loukina et al. | Dynamic spectral equalizer using free-space dispersive optics combined with a polymer-dispersed liquid-crystal spatial light attenuator | |
| Wu et al. | Microelectromechanical systems for lightwave communication | |
| Yu et al. | Tunable optical bandpass filter with variable-aperture MEMS reflector | |
| Riza et al. | Wavelength-tunable variable fiber-optic attenuator using liquid-Crystal-mirror hybrid controls |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20090805 |