CN101484817A - System and method for cleaning a contactor device - Google Patents

Abstract

A system and method for cleaning a contactor device is presented. The cleaning system includes an automated testing handler and a handler controller for controlling the operation of the handler and facilitating user interaction with the handler. The handler further includes a contactor having a plurality of pins for establishing an electrical connection with one or more input devices. The handler is configured to house one or more input devices and one or more surrogate cleaning devices. The surrogate cleaning devices are configured to clean the pins of the contactor. A pick and place mechanism positioned in the handler is configured to transport both the input devices and the surrogate cleaning devices to the contactor.

Description

Be used to clean the system and method for contactor arrangement

The cross reference of related application case

The application's case is advocated the 60/817th of application on June 30th, 2006, the 11/639th of No. 532 U.S. Provisional Application cases and application on Dec 15th, 2006, the right of priority of No. 429 U. S. application cases, the full text of described two application cases all is incorporated herein by reference.

Technical field

Provide following description to background technology of the present invention just in order to help to understand the present invention, and do not admit its description or constitute prior art of the present invention.

The present invention relates generally to the field of testing semiconductor device.Specifically, the present invention relates to be used for clean the system and method for the semiconductor device contactor of automated test device (" ATE ").

Background technology

ATE is used for measuring semiconductor device in semicon industry.In general, automated test device is configured to admit a collection of or " heap " semiconductor device of being used to test.ATE carries out test based on predetermined set, and described predetermined set depends on the characteristic that is input among the ATE for each device of test.At actual test period, the various test macros that are configured to handle the operating conditions of input media are applied to input media and write down the result.

In general, in order to test, at first input media is connected to contactor.The characteristic of the contactor that is used to test can influence the repeatability and the test output of test.Bad contactor may cause invalid failures or test errors contrast, and this may cause unnecessary machine stopping time, unaccountable production problems and even client to return goods again.

Contactor comprises one group of pin.The lead-in wire or the soldered ball of these pins touch input means during electrical testing.Contact element is made of the beryllium copper Base Metal of surface gold-plating usually.The profile of contact element is most important for contact integrality and life-span prolongation.

At test period, each device must be inserted in the contactor to be electrically connected to tester.In the whole process of each device of test, the pin on the contactor can be assembled chip and other foreign matter.Foreign matter or chip cause contactor to be executed the task under not good enough condition.This may produce owes test result accurately.Therefore, must cleaned at regular intervals contactor pin.Current, in most of ATE, make whole time-out of device processes clean the contactor pin.This method has prolonged to be handled and test a pile or batch required time of semiconductor device.Therefore, need a kind ofly clean the contactor among the ATE effectively so that can handle the system and method for a pile semiconductor device efficiently.

Summary of the invention

One embodiment of the present of invention relate to a kind of system that is used to clean contactor arrangement, and it comprises the automatic test processor.Described processor further comprises contactor, and it has a plurality of pins to be used to set up and being electrically connected of one or more input medias.Described processor is configured to ccontaining one or more input medias and one or more and substitutes cleaning device, wherein saidly substitutes the pin that cleaning device is configured to clean contactor.Pick up to be positioned in the processor with placement mechanism and to be configured to input media and to substitute cleaning device and be transported to contactor.Described system also comprise processor control unit with the operation that is used for controlling processor and promote user and processor alternately.

According to another embodiment of the present invention, a kind of method that is used for the contactor arrangement of cleaning machine comprises: provide to be contained in the processor one or more and to substitute cleaning device i; One or more input medias are provided in processor; And whether definite contactor needs cleaning.If contactor needs cleaning, so described method is carried out the automated cleaning circulation.If contactor does not need cleaning, so described method actuating unit cycle of treatment.

According to still another embodiment of the invention, the automated cleaning round-robin is carried out and be may further comprise the steps: determine to substitute cleaning device and whether can be used for cleaning contactor, and will substitute cleaning device and be inserted in the contactor so that the cleaning contactor.

Should be appreciated that aforementioned summary description and following detailed description all only are exemplary with indicative, and do not limit the present invention who is advocated.

Description of drawings

To understand these and other feature of the present invention, aspect and advantage easily by the subsidiary one exemplary embodiment of being showed in following description, appended claims and the accompanying drawing, the described accompanying drawing of hereinafter concise and to the point description.

Fig. 1 is the block scheme that is used to clean the system of contactor arrangement according to an embodiment of the invention.

Fig. 2 is the screenshotss of the graphic user interface of the system that is used to clean contactor arrangement according to an embodiment of the invention.

Fig. 3 is the block scheme of automated test device processor according to an embodiment of the invention.

Fig. 4 is the figure that substitutes cleaning device according to an embodiment of the invention.

Fig. 5 is the process flow diagram of the initialization sequence of the explanation method that is used to clean contactor arrangement according to an embodiment of the invention.

Fig. 6 is the process flow diagram of the loading sequence of the explanation method that is used to clean contactor arrangement according to an embodiment of the invention.

Fig. 7 is the process flow diagram of the automated cleaning cyclic sequence of the explanation method that is used to clean contactor arrangement according to an embodiment of the invention.

Fig. 8 is the photo of pogo pin before cleaning that is used for contactor according to an embodiment of the invention.

Fig. 9 is the photo of pogo pin after cleaning that is used for contactor according to an embodiment of the invention.

Figure 10 is the process flow diagram of explanation back according to an embodiment of the invention cleaning sequence.

Embodiment

Hereinafter will the embodiment of the invention be described referring to accompanying drawing.Should be appreciated that, below describe the content intention and describe one exemplary embodiment of the present invention, and unrestricted the present invention.

Fig. 1 shows device cleaning systems according to an embodiment of the invention.Described device cleaning systems comprise processor (ATE) 10 and controller 20.According to one embodiment of present invention, but controller 20 is personal computer, workstation or the servers that are connected to processor 10 with mode of operation.In another embodiment of the present invention, controller 20 can be integrated in the processor 10.Controller 20 comprises processor and storer, and it is configured to operating software for the operating means cleaning systems.Controller 20 also allows user's 30 input commands to carry out for processor 10.In addition, controller 20 provides output to user 30.According to one embodiment of present invention, user 30 can come input command and check output by using the graphic user interface of being implemented by controller 20 40.

The one exemplary embodiment of present graphical user interface among Fig. 2.User 30 can use GUI 40 to come the setting of input command and foundation and modifier cleaning systems.This paper will discuss user 30 can use the order that GUI 40 sets up and the example of setting.These orders and setting can directly influence the operation and the overall cleaning system performance of processor 10.

The block scheme of showing processor 10 among Fig. 3.Processor 30 comprises at least one contactor 50, has picking up and placement mechanism 60 and case storehouse 70 of shuttle 65, and described case storehouse 70 can be filled with one or more JEDEC pallets 80.Described JEDEC pallet comprises the input media 90 that is used to test.In addition, substituting cleaning device (SCD) 100 is contained in the standard JEDEC pallet 110.Preferably, unique case storehouse 70 also by the identification of device cleaning systems to be used for ccontaining SCDJEDEC pallet 110.The case bin location is stored in the storer of controller 20 to help device cleaning systems software.

Input media 90 is placed and is contacted to test with contactor 50 physics.Contactor 50 foundation are electrically connected so that test the desirable characteristics of input media 90 with input media 90.In general, input media 90 is depended in the configuration of contactor 50.The configuration affects of contactor 50 comprises test result of testing output and the ability of reproducing test result.

Contactor 50 has one group of contact 55 that is called pogo pin.Contact 55 also can be described as contact finger and/or contact element.Pogo pin 55 is to be attached to the class nail of contactor with touch input means 90.In general, pogo pin 55 and like are made of the metal based on beryllium copper of surface gold-plating.The zoomed-in view of showing pogo pin 55 among Fig. 8 and Fig. 9.Pogo pin 55 preferably relatively clean (not having chip) so that guarantee the high quality operation of device cleaning systems.The device cleaning systems use SCD 100 to guarantee the clean degree of pogo pin 55, and have therefore guaranteed the efficient operation of processor 10.Usually, for the contactor 50 of each group, there are the different SCD 100 in order to cleaning contactor 50 of the described amount of several times.

As shown in Figure 4, according to one embodiment of present invention, SCD is made of several layers.According to one embodiment of present invention, to be approximately 450 μ m thick for SCD 100.Preferably, SCD 100 the size of input media 90+/-0.010 ＂ in.In general, the layer of formation SCD 100 is made of the chip trapping material.For instance, basic unit comprises adhesive 101.PET film 102 is placed on the adhesive 101.Isocyanurate foam 103 is shelved on the PET film 102.Isocyanurate foam 103 contains resin 105 and abrasive material 104.These materials can clean contactor 50, and especially pogo pin 55.

The operation of described system will be described now.Fig. 5 shows the process flow diagram that is used for the energising/initiating sequence of device test system according to an embodiment of the invention.At first, with processor 10 energisings (step 1000).The initialization sequence (step 1010) of controller 20 beginning processors 10.According to one embodiment of present invention, which device of current existence also may detect the current state of those devices in the operation detection processor 10 of carrying out during initialization sequence.For instance, processor can determine whether using 50 configurations (step 1020) of new contactor.If contactor 50 configurations are new (mean and do not use described contactor when last time is with processor 10 energisings), the clean cycle of reset contactor 50 counting (step 1030) so.

Clean cycle counting detector bar 50 has been used to test the number of times of input media 90.Same contactor 50 after tested after the certain number destination device 90, system determines to clean contactor 50 to keep effective processing operation.In device cleaning software, the clean cycle counting is preset as default amount.Yet user 30 can change the clean cycle counting via gui interface 40.Current contactor 50 during the clean cycle counting indication of reset contactor 50 is used is clean and is not used to test any input media 50 as yet.In replacement scheme, 50 configurations are not new if processor 10 is determined contactor, so retrieval contactor clean cycle counting (step 1040) from system storage.

In addition, during power up sequence, processor is determined SCD 100 current whether exist (steps 1050).If during switching on, have SCD 100 in the processor 10, point out user 30 to remove SCD 100 (step 1060) so.Why system requires to remove SCD 100, is because can't know that it is new that how many SCD 100 have used (for example, being used to clean part) and how many SCD 100.Preferably, because the physics of SCD 100, SCD 100 only is used to clean contactor 50 once.After once using, the validity of SCD 100 when cleaning second contactor 50 reduces.In replacement scheme, if do not detect SCD 100 in processor, device test system advances to its loading procedure (step 1070) so.

Loading and the handling procedure that is used for device test system described referring now to Fig. 6.Designated bin 70 ccontaining SCD JEDEC pallets 110 are preferably used in statement as mentioned.Before loading, user 30 can select one case storehouse to come ccontaining SCD JEDEC pallet 110.According to one embodiment of present invention, SCD JEDEC pallet 110 is wedge shapes/jagged, makes and has only SCD JEDEC 110 to be placed in the designated bin.In general, as shown in Figure 6, after energising and initialization, SCD 100 is loaded in the processor 10 (step 2000).Yet, according to another embodiment of the present invention, can in the middle of batch processing, load SCD 100 according to the number of employed input media 60.

As further showing among Fig. 6, can simultaneously SCD 100 and input media 90 be loaded into (step 2000,2010) in the processor 10.All or part of SCD JEDEC pallet 110 can be carried in the designated bin 70.In general, after loading is finished, close the door of processor 10.After closing handler door (not shown), system's operation self-test.For instance, according to one embodiment of present invention, the device cleaning systems are tested to check after closing handler door SCD 100 whether available (step 2012).If SCD 100 can use, install cleaning systems so and advance to step 2020, as shown in Figure 6.If the device cleaning systems determine not exist in the processor 10 SCD 100, show alert message (step 2014) to user 30 so.In case SCD 100 and input media 90 are placed in the processor 10, the device cleaning systems just write down the number (step 2020) of SCD 100 and input media 90.Receiving after input media 90 is ready for the indication of processing, the device cleaning systems determine whether the contactor 50 of filling processor 10 needs cleaning (step 2030).Whether contactor 50 needs to clean the clean cycle counting that depends on contactor 50, and this describes hereinbefore.If contactor 50 needs cleaning, so initial automated cleaning circulation.If contactor 50 does not need cleaning, initiating means handles 2040 so.

Handle in 2040 at device, use the contactor 50 of filling processor 10 to test input media 90.During this process, the device cleaning systems write down the number of times that each contactor 50 is used to test input media, therefore produce contactor 50 clean cycle countings (step 2050).As shown in Figure 6, after having calculated contactor clean cycle counting, the device cleaning systems determine once more whether contactor 50 needs cleaning (step 2060).If determining contactor 50, the cleaning device system needs cleaning, so initial automated cleaning circulation 3000.If contactor does not need cleaning, continue input media so and handle 2030.According to one embodiment of present invention, in replacement scheme, user 30 can import cleaning contactor order 2070.In case receive cleaning contactor order 2070, just initial automated cleaning circulation (step 3000).

Fig. 7 illustrates that automated cleaning round-robin according to an embodiment of the invention on the one hand.In general, when having reached test threshold, implements contactor clean cycle counting the automated cleaning circulation.In replacement scheme, the automated cleaning circulation can be initial by user 30.For instance, user 30 can carry out cleaning contactor order with initial automated cleaning circulate (step 3000).After the initialization clean cycle, the device cleaning systems determine whether SCD 100 can be used for carrying out cleaning (step 3010).If SCD 100 is unavailable, suspend automated cleaning cycling (step 3020) so.If there is SCD 100 to use in the processor 10, automated cleaning circulates preceding and then does not suspend so.At first, the device cleaning systems activate and pick up and place processor 60 so that at least one SCD 100 is removed (step 3030) from SCD JEDEC pallet 110.In case remove, just SCD 100 be placed in the shuttle 65 (step 3040).The configuration that the checkout area of contactor 50 in processor is located in is depended in the orientation of SCD 100 in shuttle and placement.For instance, if test site is configured to 2 * 2 styles, the orientation of SCD 100 in shuttle 65 also is necessary for 2 * 2 so.

Shuttle 65 is transported near the contactor 50 test site (step 3050) with SCD 100.Next, via picking up and place processor 60 SCD 100 is removed from shuttle.If pick up with apparatus for placing 60 and can not pick up SCD 100 (step 3060), system implementation cleans (step 3070) so.If at any some place, processor 10 can not pick up SCD 100 from shuttle 65, if perhaps drop SCD 100 when mechanism moves, device must rerun so by the gross, because SPC breaks down.Picking up under the situation of SCD 100 by user's 30 input retry orders, cleaning operation does not take place.According to another embodiment of the present invention, processor 10 comprises and is used for determining whether system is difficult to pick up the mechanism of SCD 100 or input part 90.

Yet, can pick up SCD 100 if pick up with placement mechanism, so each SCD 100 is dropped in the contactor so that the pogo pin 55 (step 3080) of cleaning contactor 50.According to alternate embodiment, SCD 100 is positioned near the test site, and therefore need not be transported to test site via shuttle.According to one embodiment of present invention, clean all contactors of enabling 50 simultaneously.In general, SCD 100 is inserted in the contactor, and then the device cleaning systems are waited for time cycle (for example, the SCD 100 that just withdraws after 100ms) of predetermined user definition.This inserting step can repeat to reach the number of times that is provided with based on device to test.For instance, the number of times that SCD 100 is inserted in the contactor 50 depends on that the title that is provided with by user 30 is the variable of " insertion of every clean cycle ".The user can use GUI 40 that this variable is set.During cleaning, system shows that to user 30 detector bar cleans ongoing message.Reach pre-determined number in case SCD 100 has been inserted in the contactor 50, just make SCD 100 turn back to the JEDEC pallet.

SCD 100 cleans the pogo pin 55 of contactor 50 effectively and removes chip from it.Fig. 8 shows the multiple pictures of the pogo pin that is coated with chip 55 of contactor 50.Described photo was taken before cleaning.Chip may have a strong impact on the performance of contactor 50 and therefore influence the processing of a plurality of input medias 90.Fig. 9 is illustrated in as mentioned above by inserting the multiple pictures that SCD 100 cleans identical springs pin 55 shown in Figure 8 afterwards.As shown in Figure 9, no longer there is chip on the pogo pin 55.Remove chip in this way and kept the performance of contactor 50 during test operation.

Statement reaches pre-determined number in case SCD 100 is inserted into contactor 50 as mentioned, just makes SCD 100 turn back to JEDEC pallet (step 4000).In addition, the physical location of SCD 100 in the JEDEC pallet just writes down and is stored in (step 4010) in the controller storage after it returns.After SCD 100 returns, SCD 100 is inserted into the number of times record in the contactor 50 and is stored in (step 4020) in the controller storage.Based on the insertion counting of SCD 100, the device cleaning systems determine whether described device can continue to use SCD 100 (step 4030).It is user-defined threshold value that SCD inserts counting.If SCD 100 inserts counting greater than threshold value, system decrements is used to follow the tracks of the value (step 4040) of the variable of the number of residue unit (" URSD ") before the SCD loss so.In replacement scheme, if SCD100 inserts counting less than threshold quantity, URSD number remain unchanged (step 4050) so.After step 4040 or 4050, show the value (step 4060) of URSD to user 30.In addition, after definite URSD value, system determines that whether described value is less than the remaining not number (step 4070) of the input media 90 of test in the processor.In other words, system determines whether to exist enough SCD 100 to test remaining input media 90.If there is no, suspend the operation of processor and so to user's 30 display messages (step 4080).Exist enough SCD to test remaining input media 90 if system detects, (step 4090) normally proceeded in system operation so.

State among the embodiment of Jie Shiing as mentioned, realized some advantages of the present invention.For instance, the present invention helps carrying out cleaning contactor arrangement when input media is handled operation (for example test).After contactor had been used for the input media of testing setup number, system cleaned described contactor.Depend on the characteristic of input media and the character of test, this number of scalable so that contactor operate with optimum level.In addition, described system and method allows to clean contactor under the situation that does not significantly interrupt the input media processing.Therefore, described system and method allows semiconductor device is carried out efficient and high-quality test.

For explanation with describe purpose and presented above description to the preferred embodiment of the present invention.Do not wish that this is detailed or limit the invention to the precise forms that disclosed, and can carry out multiple modification and change, maybe can obtain multiple modification and change by putting into practice the present invention in view of above teaching.Selecting and describing described embodiment is in order to explain principle of the present invention, and as practical application so that the those skilled in the art can utilize the present invention in various embodiments and is suitable for the various modifications of desired specific use.Wish that scope of the present invention is defined by appended claims and its equivalent.

Claims (14)

1. system that is used to clean contactor arrangement, it comprises:

The automatic test processor, wherein said processor further comprises:

Contactor, it has a plurality of pins to be used to set up and being electrically connected of one or more input medias;

One or more input medias;

One or more cleaning devices, wherein said cleaning device are configured to clean the described pin of described contactor;

Pick up and placement mechanism, it is configured to described input media and described cleaning device are transported to described contactor; And

Processor control unit, it is used to control the operation of described processor and promotes the mutual of user and described processor.

2. system according to claim 1, but wherein said processor control unit is the personal computer that is connected to described processor with mode of operation.

3. system according to claim 1, wherein said processor control unit is integrated in the shell of described processor.

4. system according to claim 1, wherein said processor control unit allow the user via graphic user interface to described processor input information and order.

5. system according to claim 1, wherein said picking up with placement mechanism further comprises shuttle, and described shuttle is configured to physically input media or cleaning device be removed and described input media or cleaning device are placed on the described contactor from pallet.

6. system according to claim 1, wherein said pallet is the JEDEC pallet of standard.

7. method that is used for the contactor arrangement of cleaning machine, it comprises following steps:

One or more cleaning devices are provided in described processor;

One or more input medias are provided in described processor;

Determine whether described contactor needs cleaning;

If described contactor needs cleaning, then use the one or more clean cycle of carrying out in the described cleaning device; And

If described contactor does not need cleaning, then actuating unit cycle of treatment.

8. the method that is used for the contactor arrangement of cleaning machine according to claim 7, whether wherein said definite described contactor needs cleaning further to comprise:

Determine how many input medias described contactor arrangement has been tested and counted to obtain the contactor clean cycle; And

Determine that whether described contactor clean cycle counting is greater than test threshold.

9. the method that is used for the contactor arrangement of cleaning machine according to claim 7, wherein said actuating unit cycle of treatment step further comprises:

Use described contactor that described input media is carried out test;

How many input medias record has tested with described contactor;

Determine whether described contactor needs cleaning; And

If described contactor needs cleaning, then carry out described automated cleaning circulation.

10. the method that is used for the contactor arrangement of cleaning machine according to claim 7, wherein said execution automated cleaning circulation step further comprises:

Determine whether cleaning device can be used for cleaning described contactor;

Remove described cleaning device from first pallet; And

Described cleaning device is inserted in the described contactor.

11. the method that is used for the contactor arrangement of cleaning machine according to claim 10 wherein, is withdrawn described cleaning device after the past at pre-determined number from described contactor.

12. the method that is used for the contactor arrangement of cleaning machine according to claim 10, wherein said execution automated cleaning circulation step further comprises:

After the described contactor of cleaning, make described contactor arrangement turn back to pallet;

Write down the definite position of described cleaning device in described pallet;

Record has been inserted into described cleaning device the number of times in the described contactor;

Determine whether described cleaning device still can be used for cleaning described contactor; And

Determine remaining unit before described cleaning device exhausts.

13. the method that is used for the contactor arrangement of cleaning machine according to claim 10, the wherein said step that removes further comprises:

Cleaning device is placed in the shuttle that picks up with apparatus for placing;

Determine whether described shuttle can not pick up described cleaning device; And

If described shuttle can not pick up described cleaning device, then carry out cleaning operation.

14. the method that is used for the contactor arrangement of cleaning machine according to claim 10, if wherein described cleaning device is unavailable, then initial pausing operation.

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